CN110763129A - Step gauge for detecting thickness of chip substrate - Google Patents
Step gauge for detecting thickness of chip substrate Download PDFInfo
- Publication number
- CN110763129A CN110763129A CN201910977661.2A CN201910977661A CN110763129A CN 110763129 A CN110763129 A CN 110763129A CN 201910977661 A CN201910977661 A CN 201910977661A CN 110763129 A CN110763129 A CN 110763129A
- Authority
- CN
- China
- Prior art keywords
- detection
- fixedly connected
- detecting
- thickness
- rack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/001—Constructional details of gauge heads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/002—Constructional details of contacts for gauges actuating one or more contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a step instrument for detecting the thickness of a chip substrate, which comprises a fixed base, wherein the top of the fixed base is fixedly connected with a support frame, the top of the support frame is fixedly connected with a control device, the bottom of the control device is fixedly connected with a lifting driving device, and the bottom end of an output shaft of the lifting driving device is fixedly connected with a detection module. This step appearance of detecting chip substrate thickness, when the detection syringe needle of wearing and tearing needs to be changed, connect the threaded rod into the thread groove soon, rotation through the scale dial, make the extension length of detection syringe needle visual, can judge the extension length of detection syringe needle fast, when the directional good scale of prerecording in advance of scale pointer, it is highly normal to express, and can be quick through rotating the threaded rod and calibrate the extension length to the detection syringe needle, make more accurate that thickness detected, convenient and fast more uses.
Description
Technical Field
The invention relates to the technical field of step testers, in particular to a step tester for detecting the thickness of a chip substrate.
Background
The step appearance belongs to contact surface topography measuring instrument, according to the difference that uses the sensor, contact step measurement can be divided into inductance type, piezoelectric type and photoelectric type 3, and its measurement principle is: when the contact pin slides lightly along the surface to be measured, the contact pin moves up and down along the peaks and valleys due to the tiny peaks and valleys on the surface, the motion condition of the contact pin reflects the condition of the surface profile, an electric signal output by the sensor outputs an amplitude modulation signal which is in direct proportion to the displacement of the contact pin deviating from the balance position after passing through the measuring bridge, the displacement signal can be demodulated from the amplitude modulation signal after being amplified and subjected to phase-sensitive rectification, an amplified slowly-changing signal which is in direct proportion to the displacement of the contact pin is obtained, and the influence of factors such as modulation frequency, external interference signals and waviness on roughness measurement is further filtered through the noise filter and the waviness filter.
When the probe is drawn across the surface to be tested, because be used for testing the chip, the probe can not adopt the material of excessive hardness to prevent fish tail chip surface, because the friction of surface to be tested, the probe can appear the damage time of certain degree and long lead to the probe to damage even, the more serious probe that can damage the installation probe, current step appearance is examined time measuring, because the damage of probe, need often change, but when changing, because of the extension length for can not finding the probe accurately, lead to measuring error easily, and the calibration is extremely complicated.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a step meter for detecting the thickness of a chip substrate, which solves the problems that the conventional step meter needs to be frequently replaced due to the damage of a probe when in detection, but the measurement error is easily caused and the calibration is extremely complicated due to the fact that the extending length of the probe cannot be accurately found when in replacement.
(II) technical scheme
In order to achieve the purpose, the invention is realized by the following technical scheme: a step instrument for detecting the thickness of a chip substrate comprises a fixed base, wherein the top of the fixed base is fixedly connected with a support frame, the top of the support frame is fixedly connected with a control device, the bottom of the control device is fixedly connected with a lifting driving device, the bottom of an output shaft of the lifting driving device is fixedly connected with a detection module, the bottom of the detection module is slidably connected with a detection rack, the top of the detection rack penetrates through the bottom of the detection module and extends to the inner cavity of the detection module, the bottom of the inner cavity of the detection rack is movably connected with a detection needle, the top of the detection needle is fixedly connected with a threaded rod, the top of the threaded rod penetrates through the bottom of the detection rack and extends to the inner cavity of the detection rack, the inner cavity of the detection rack is provided with a threaded groove in threaded connection with the surface of the threaded rod, and, the bottom of rack is fixedly connected with the connecting rod to the connecting groove with the surperficial swing joint of connecting rod is seted up on the top of threaded rod, movable groove and gear groove have been seted up respectively to the inner chamber of detecting the frame, the inner chamber in movable groove and the surperficial swing joint of rack.
Preferably, the inner chamber of gear groove rotates and is connected with the dwang, the one end of dwang runs through the inner chamber that detects the frame and extends to the surface that detects the frame, the dwang is located the surface fixedly connected with of gear groove inner chamber and the rotating gear of the surface meshing of rack.
Preferably, the surface of the rotating rod, which is located on the outer side of the detection rack, is fixedly connected with a driving gear, the surface of the detection rack is rotatably connected with a driven gear meshed with the surface of the driving gear, and the surface of the driven gear is fixedly connected with a scale indicating dial.
Preferably, the fixed surface of the detection frame is connected with a scale pointer, the bottom of the detection module is fixedly connected with a limiting block, and a limiting groove connected with the limiting block in a sliding manner is formed in the surface of the detection frame.
Preferably, there is a moving table at the top of the support frame through screw thread connection, the top fixedly connected with X of moving table is to the mobile device to X has the horizontal plate to the top fixedly connected with of mobile device, the top fixedly connected with semicircle piece of horizontal plate to the top swing joint of semicircle piece has testing platform, testing platform's bottom is seted up with the surface roll connection's of semicircle piece ball groove, testing platform's fixed surface is connected with the spirit level.
Preferably, the top of the detection platform is in threaded connection with an adjusting bolt, and the top end of the adjusting bolt sequentially penetrates through the detection platform and the horizontal plate from top to bottom and extends to the inner cavity of the horizontal plate.
Preferably, the inner cavity of the detection platform is provided with a first threaded hole in threaded connection with the surface of the adjusting bolt, and the inner cavity of the horizontal plate is provided with a second threaded hole in threaded connection with the surface of the adjusting bolt.
Preferably, ten adjusting bolts are arranged and uniformly distributed on the surface of the detection platform.
(III) advantageous effects
The invention provides a step meter for detecting the thickness of a chip substrate. Compared with the prior art, the method has the following beneficial effects:
(1) the step gauge for detecting the thickness of the chip substrate is characterized in that a support frame is fixedly connected to the top of a fixed base, a control device is fixedly connected to the top of the support frame, a lifting driving device is fixedly connected to the bottom of the control device, a detection module is fixedly connected to the bottom of an output shaft of the lifting driving device, a detection frame is slidably connected to the bottom of the detection module, the top of the detection frame penetrates through the bottom of the detection module and extends to the inner cavity of the detection module, a detection needle head is movably connected to the bottom of the inner cavity of the detection frame, a threaded rod is fixedly connected to the top of the detection needle head, the top of the threaded rod penetrates through the bottom of the detection frame and extends to the inner cavity of the detection frame, a threaded groove in threaded connection with the surface of the threaded rod is formed, and the top of threaded rod offer with the surface swing joint's of connecting rod spread groove, movable groove and gear groove have been seted up respectively to the inner chamber that detects the frame, the inner chamber in movable groove and the surface swing joint of rack, when the detection syringe needle of wearing and tearing need be changed, connect the threaded rod into the thread groove soon, rotation through the scale dial, make the extension length of detection syringe needle visual, can the snap judgments the extension length of detection syringe needle, when the scale pointer points to suitable scale, it is highly normal to express, and can be quick through rotating the threaded rod to the extension length of detection syringe needle calibrate, make thickness detect more accurate, convenient and fast more uses.
(2) This detect step appearance of chip substrate thickness, there is adjusting bolt through the top threaded connection at testing platform, adjusting bolt's top from the top down runs through testing platform and horizontal plate in proper order and extends to the inner chamber of horizontal plate, the live time is long, testing platform's level can change unavoidably, examine time measuring and lead to the detection data to take place the error easily, the instruction through the spirit level earlier carries out the leveling to testing platform this moment, adjust the length in the second screwed hole through rotating adjusting bolt, adjust testing platform's levelness, can be quick carry out the leveling to testing platform.
(3) The step gauge for detecting the thickness of the chip substrate is characterized in that a movable workbench is connected to the top of a support frame through a screw thread of a lead screw, an X-direction moving device is fixedly connected to the top of the movable workbench, a horizontal plate is fixedly connected to the top of the X-direction moving device, a semicircular block is fixedly connected to the top of the horizontal plate, a detection platform is movably connected to the top of the semicircular block, a ball groove in rolling connection with the surface of the semicircular block is formed in the bottom of the detection platform, a level gauge is fixedly connected to the surface of the detection platform, a first threaded hole in threaded connection with the surface of an adjusting bolt is formed in an inner cavity of the detection platform, a second threaded hole in threaded connection with the surface of the adjusting bolt is formed in the inner cavity of the horizontal plate, when detection is carried out, a detection head only needs to move up and down, the position of a chip to be, the condition that detection error is generated due to the fact that the detection rack inclines when the step profiler moves can be effectively prevented from occurring, and the detection precision of the step profiler is improved.
Drawings
FIG. 1 is a front view of the structure of the present invention;
FIG. 2 is a front view of the inspection rack structure of the present invention;
FIG. 3 is a cross-sectional view of an inspection rack construction of the present invention;
FIG. 4 is a top view of the test platform configuration of the present invention;
fig. 5 is an enlarged view of a portion of the structure shown at B in fig. 1 according to the present invention.
In the figure, 1-a fixed base, 2-a support frame, 3-a control device, 4-a lifting drive device, 5-a detection module, 6-a detection frame, 7-a detection needle head, 8-a threaded rod, 9-a threaded groove, 10-a rack, 11-a connecting rod, 12-a connecting groove, 13-a movable groove, 14-a gear groove, 15-a rotating rod, 16-a rotating gear, 17-a driving gear, 18-a driven gear, 19-a scale indicating disc, 20-a scale indicating needle, 21-a limiting block, 22-a limiting groove, 23-a lead screw, 24-a moving workbench, 25-X-direction moving devices, 26-a horizontal plate, 27-a semicircular block, 28-a detection platform, 29-an adjusting bolt, a movable plate, a movable, 30-level meter.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, an embodiment of the present invention provides a technical solution: a step profiler for detecting the thickness of a chip substrate comprises a fixed base 1, a supporting frame 2 is fixedly connected with the top of the fixed base 1, the top of the supporting frame 2 is connected with a movable working platform 24 through a screw 23 in a threaded manner, the screw 23 is connected with a driving mechanism, which is not shown in the figure, the top of the movable working platform 24 is fixedly connected with an X-direction moving device 25, and the X-direction moving device 25 is used for carrying out X-direction movement, which is a mature structure in the prior art and is not repeated, and a horizontal plate 26 is fixedly connected with the top of the X-direction moving device 25, when in detection, a detection positive head 7 only needs to move up and down, the position of a chip to be detected is moved through the matching of the screw 23 and the X-direction moving device, so that the occurrence of detection errors caused by the inclination of a detection rack 6 during movement can be, the top of the horizontal plate 26 is fixedly connected with a semicircular block 27, the top of the semicircular block 27 is movably connected with a detection platform 28, the inner cavity of the detection platform 28 is provided with a first threaded hole in threaded connection with the surface of an adjusting bolt 29, the inner cavity of the horizontal plate 26 is provided with a second threaded hole in threaded connection with the surface of the adjusting bolt 29, the top of the detection platform 28 is in threaded connection with the adjusting bolt 29, ten adjusting bolts 29 are arranged and are uniformly distributed on the surface of the detection platform 28, the top end of each adjusting bolt 29 sequentially penetrates through the detection platform 28 and the horizontal plate 26 from top to bottom and extends to the inner cavity of the horizontal plate 26, the bottom of the detection platform 28 is provided with a ball groove in rolling connection with the surface of the semicircular block 27, the service life is long, the level of the detection platform 28 can hardly change, and detection data errors are easily caused during detection, at this time, leveling is performed on the detection platform 28 through indication of the level gauge 30, the length in the second threaded hole is adjusted by rotating the adjusting bolt 29, so as to adjust the levelness of the detection platform 28, the detection platform 28 can be leveled quickly, the surface of the detection platform 28 is fixedly connected with the level gauge 30, the top of the support frame 2 is fixedly connected with the control device 3, the bottom of the control device 3 is fixedly connected with the lifting driving device 4, the lifting driving device 4 is a mature structure in the prior art, so that the description is omitted, the bottom of the output shaft of the lifting driving device 4 is fixedly connected with the detection module 5, detection is performed through the detection module 5, the bottom of the detection module 5 is slidably connected with the detection rack 6, the surface of the detection rack 6 is fixedly connected with the scale indicating needle 20, the scale of the scale indicating plate 19 is judged through the indicating needle 20, and the bottom of the detection, and the surface of the detection frame 6 is provided with a limit groove 22 which is slidably connected with the surface of the limit block 21, the top of the detection frame 6 penetrates through the bottom of the detection module 5 and extends to the inner cavity of the detection module 5, the bottom of the inner cavity of the detection frame 6 is movably connected with a detection needle 7, the top end of the detection needle 7 is fixedly connected with a threaded rod 8, the top end of the threaded rod 8 penetrates through the bottom of the detection frame 6 and extends to the inner cavity of the detection frame 6, the inner cavity of the detection frame 6 is provided with a threaded groove 9 which is in threaded connection with the surface of the threaded rod 8, the top of the threaded rod 8 is movably connected with a rack 10, the bottom of the rack 10 is fixedly connected with a connecting rod 11, the top end of the threaded rod 8 is provided with a connecting groove 12 which is movably connected with the surface of the connecting rod 11, the inner cavity of, the surface of the rotating rod 15 positioned on the outer side of the detection rack 6 is fixedly connected with a driving gear 17, the surface of the detection rack 6 is rotatably connected with a driven gear 18 meshed with the surface of the driving gear 17, the surface of the driven gear 18 is fixedly connected with a scale indicating disc 19, one end of the rotating rod 15 penetrates through the inner cavity of the detection rack 6 and extends to the surface of the detection rack 6, the surface of the rotating rod 15 positioned in the inner cavity of the gear groove 14 is fixedly connected with a rotating gear 16 meshed with the surface of the rack 10, the inner cavity of the movable groove 13 is movably connected with the surface of the rack 10, when the worn detection needle 7 needs to be replaced, the threaded rod 8 is screwed into the threaded groove 9, the extension length of the detection needle 7 is visualized through the rotation of the scale indicating disc 19, the extension length of the detection needle 7 can be rapidly judged, when the scale indicating needle 20 points to, the height is normal, and the extending length of the probe needle 7 can be quickly calibrated by rotating the threaded rod 8, so that the thickness is detected more accurately, and the probe needle is more convenient and quick to use.
When the device is used, the detection platform 28 is leveled by the indication of the level gauge 30, the length in the second threaded hole is adjusted by rotating the adjusting bolt 29, the levelness of the detection platform 28 is adjusted, after the leveling is finished, the chip is placed on the detection platform 28, the lifting driving device 4 is controlled by the control device 3 to drive the detection needle 7 to move downwards and abut against the surface of the chip, the movable worktable 24 is adjusted to move left and right by the lead screw 23, the horizontal plate 26 is adjusted to move back and forth by the X-direction moving device 25 to drive the chip to move along direction X, Y for detection, when the detection needle 7 is worn, the detection needle 7 is rotated anticlockwise to be taken down, the complete detection needle 7 is selected for installation, the threaded rod 8 is screwed into the threaded groove 9, the threaded rod 8 drives the rack 10 to move upwards by the matching of the connecting rod 11 and the connecting groove 12, the rack 10 drives the rotating gear 16 to rotate on the rotating rod 15, the driving gear 17 is driven, the driving gear 17 drives the driven gear 18 to rotate, the driven gear 18 drives the scale indicating disc 19 to rotate, and when the scale indicating needle 20 points to proper scales, the installation is completed.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a detect step appearance of chip substrate thickness, includes unable adjustment base (1), the top fixedly connected with support frame (2) of unable adjustment base (1), the top fixedly connected with controlling means (3) of support frame (2), its characterized in that: the bottom of the control device (3) is fixedly connected with a lifting drive device (4), the bottom of an output shaft of the lifting drive device (4) is fixedly connected with a detection module (5), the bottom of the detection module (5) is connected with a detection rack (6) in a sliding manner, the top of the detection rack (6) penetrates through the bottom of the detection module (5) and extends to the inner cavity of the detection module (5), the bottom of the inner cavity of the detection rack (6) is movably connected with a detection needle (7), the top of the detection needle (7) is fixedly connected with a threaded rod (8), the top of the threaded rod (8) penetrates through the bottom of the detection rack (6) and extends to the inner cavity of the detection rack (6), the inner cavity of the detection rack (6) is provided with a threaded groove (9) connected with the surface thread of the threaded rod (8), and the top of the threaded rod (8) is movably connected, the bottom fixedly connected with connecting rod (11) of rack (10) to the connecting groove (12) with the surperficial swing joint of connecting rod (11) has been seted up on the top of threaded rod (8), movable groove (13) and gear groove (14) have been seted up respectively to the inner chamber of detecting frame (6), the inner chamber of movable groove (13) and the surperficial swing joint of rack (10).
2. The step gauge for detecting the thickness of the chip substrate according to claim 1, wherein: the inner chamber of gear groove (14) rotates and is connected with dwang (15), the one end of dwang (15) runs through the inner chamber that detects frame (6) and extends to the surface that detects frame (6), dwang (15) are located fixed surface of gear groove (14) inner chamber and are connected with rotating gear (16) with the surface meshing of rack (10).
3. The step gauge for detecting the thickness of the chip substrate according to claim 2, wherein: dwang (15) are located the fixed surface who detects frame (6) outside and are connected with driving gear (17), the surface rotation that detects frame (6) is connected with driven gear (18) with the surface toothing of driving gear (17) to the fixed surface of driven gear (18) is connected with scale indicator (19).
4. The step gauge for detecting the thickness of the chip substrate according to claim 1, wherein: the surface fixed connection who detects frame (6) is connected with scale pointer (20), the bottom fixedly connected with stopper (21) of detecting module (5) to detect the surface of frame (6) and offer the spacing groove (22) with the surperficial sliding connection of stopper (21).
5. The step gauge for detecting the thickness of the chip substrate according to claim 1, wherein: the top of support frame (2) has mobile workbench (24) through lead screw (23) threaded connection, the top fixedly connected with X of mobile workbench (24) is to mobile device (25) to X is to top fixedly connected with horizontal plate (26) of mobile device (25), the top fixedly connected with semicircle piece (27) of horizontal plate (26) to the top swing joint of semicircle piece (27) has testing platform (28), the ball groove with the surface roll connection of semicircle piece (27) is seted up to the bottom of testing platform (28), the fixed surface of testing platform (28) is connected with spirit level (30).
6. The step gauge for detecting the thickness of the chip substrate according to claim 5, wherein: the top threaded connection of testing platform (28) has adjusting bolt (29), the top of adjusting bolt (29) runs through testing platform (28) and horizontal plate (26) and extends to the inner chamber of horizontal plate (26) from the top down in proper order.
7. The step gauge for detecting the thickness of the chip substrate according to claim 6, wherein: the inner cavity of the detection platform (28) is provided with a first threaded hole in threaded connection with the surface of the adjusting bolt (29), and the inner cavity of the horizontal plate (26) is provided with a second threaded hole in threaded connection with the surface of the adjusting bolt (29).
8. The step gauge for detecting the thickness of the chip substrate according to claim 6, wherein: the ten adjusting bolts (29) are uniformly distributed on the surface of the detection platform (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910977661.2A CN110763129B (en) | 2019-10-15 | 2019-10-15 | Step gauge for detecting thickness of chip substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910977661.2A CN110763129B (en) | 2019-10-15 | 2019-10-15 | Step gauge for detecting thickness of chip substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110763129A true CN110763129A (en) | 2020-02-07 |
| CN110763129B CN110763129B (en) | 2022-02-01 |
Family
ID=69331154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910977661.2A Active CN110763129B (en) | 2019-10-15 | 2019-10-15 | Step gauge for detecting thickness of chip substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110763129B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113686732A (en) * | 2021-07-27 | 2021-11-23 | 清华大学 | Platform liquid drop probe, preparation method thereof and liquid drop friction force and normal force detection method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965202A (en) * | 1982-10-06 | 1984-04-13 | Mitsubishi Electric Corp | Measuring device |
| US20040016140A1 (en) * | 2002-07-23 | 2004-01-29 | Nan Ya Technology Corporation | Incremental offset measurement instrument |
| CN202274860U (en) * | 2011-08-04 | 2012-06-13 | 苏州爱特盟光电有限公司 | Camber step instrument |
| CN205102832U (en) * | 2015-10-19 | 2016-03-23 | 中山联合光电科技股份有限公司 | Simple and easy levelness measuring apparatu |
| CN206648840U (en) * | 2017-04-27 | 2017-11-17 | 安徽工业大学 | A kind of soil sampler |
| CN206776353U (en) * | 2017-05-12 | 2017-12-22 | 北京安方宜生态科技有限公司 | A kind of hand-held plant needs water instrument |
| CN208223368U (en) * | 2018-05-11 | 2018-12-11 | 苏州矽利康测试系统有限公司 | A kind of universal depth of parallelism metering plate |
| CN209253162U (en) * | 2018-08-10 | 2019-08-16 | 苏州微创骨科医疗工具有限公司 | A kind of orthopaedics dipstick |
-
2019
- 2019-10-15 CN CN201910977661.2A patent/CN110763129B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965202A (en) * | 1982-10-06 | 1984-04-13 | Mitsubishi Electric Corp | Measuring device |
| US20040016140A1 (en) * | 2002-07-23 | 2004-01-29 | Nan Ya Technology Corporation | Incremental offset measurement instrument |
| CN202274860U (en) * | 2011-08-04 | 2012-06-13 | 苏州爱特盟光电有限公司 | Camber step instrument |
| CN205102832U (en) * | 2015-10-19 | 2016-03-23 | 中山联合光电科技股份有限公司 | Simple and easy levelness measuring apparatu |
| CN206648840U (en) * | 2017-04-27 | 2017-11-17 | 安徽工业大学 | A kind of soil sampler |
| CN206776353U (en) * | 2017-05-12 | 2017-12-22 | 北京安方宜生态科技有限公司 | A kind of hand-held plant needs water instrument |
| CN208223368U (en) * | 2018-05-11 | 2018-12-11 | 苏州矽利康测试系统有限公司 | A kind of universal depth of parallelism metering plate |
| CN209253162U (en) * | 2018-08-10 | 2019-08-16 | 苏州微创骨科医疗工具有限公司 | A kind of orthopaedics dipstick |
Non-Patent Citations (1)
| Title |
|---|
| 崔谦: "《一种接触式焊缝自动跟踪传感器的设计》", 《自动化与仪器仪表》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113686732A (en) * | 2021-07-27 | 2021-11-23 | 清华大学 | Platform liquid drop probe, preparation method thereof and liquid drop friction force and normal force detection method |
| CN113686732B (en) * | 2021-07-27 | 2022-04-22 | 清华大学 | Platform liquid drop probe, preparation method thereof and liquid drop friction force and normal force detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110763129B (en) | 2022-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109186413B (en) | Sphere diameter instrument with adjustable measuring diameter and method for measuring curvature radius and deflection | |
| EP3425329A1 (en) | Cnc machine geometry error and accuracy monitoring and evaluation | |
| CN206479129U (en) | A kind of bearing testers | |
| CN211085003U (en) | Device for detecting angle consistency of eccentric circumferential position of crankshaft by using yaw meter | |
| CN110530231A (en) | A kind of roller detection device for glass production line | |
| CN106885584B (en) | Device and method for testing comprehensive error of inclinometer | |
| CN210773947U (en) | Non-contact valve plate flatness detection device | |
| CN110763129B (en) | Step gauge for detecting thickness of chip substrate | |
| CN204188158U (en) | A kind of flatness checking device of variable detection position | |
| CN108120403A (en) | A kind of glacing flatness ruler verifying bench device and its application method | |
| CN202255342U (en) | Error detection device for indicating values of depth indication meter | |
| CN112254607A (en) | Precision gear runout measuring device | |
| CN107144247A (en) | A kind of digital display axle run-out instrument and axle glitch detection method | |
| CN205642396U (en) | High accuracy level bar calibrating installation based on sine | |
| CN204988191U (en) | Adopt parallel laser projection method to measure portable equipment of cigarette length and diameter | |
| CN201397109Y (en) | Cylinder body bearing seat lateral face position inspection device | |
| CN208398769U (en) | A kind of highway engineering supervision protective layer thickness detection device | |
| CN116519101A (en) | Automatic detection, calibration and correction system for wide-range liquid level meter | |
| CN109780971A (en) | A kind of apparatus for measuring radius | |
| CN205317143U (en) | Timber apron planarization detection device | |
| CN212721227U (en) | Automatic thickness gauge for polyethylene film and sheet | |
| CN209069160U (en) | A kind of fine module gear radial accuracy detection device used suitable for production scene | |
| CN110596416B (en) | Linear speed detection and calibration device | |
| CN210089611U (en) | Flatness out-of-tolerance continuous measuring device | |
| CN106767625A (en) | A kind of outside micrometer check and correction gauge rod calibrating installation and calibration method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20211208 Address after: 443200 floor 2, building A6, electronic information industrial park, Xiannv New Economic Industrial Park, Zhijiang City, Yichang City, Hubei Province Applicant after: Zhijiang Yishuo Semiconductor Co.,Ltd. Address before: 430000 No. 38 Shenghe Road, Changqing office, Dongxihu District, Wuhan City, Hubei Province (7) Applicant before: Wuhan aoyite Technology Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |