CN110763014A - Large-size aging tunnel furnace - Google Patents
Large-size aging tunnel furnace Download PDFInfo
- Publication number
- CN110763014A CN110763014A CN201911210298.8A CN201911210298A CN110763014A CN 110763014 A CN110763014 A CN 110763014A CN 201911210298 A CN201911210298 A CN 201911210298A CN 110763014 A CN110763014 A CN 110763014A
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- 230000032683 aging Effects 0.000 title claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 62
- 230000007246 mechanism Effects 0.000 claims abstract description 44
- 238000001816 cooling Methods 0.000 claims abstract description 32
- 238000007599 discharging Methods 0.000 claims abstract description 17
- 230000000630 rising effect Effects 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 2
- 238000004321 preservation Methods 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 5
- 230000009467 reduction Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- PZZYQPZGQPZBDN-UHFFFAOYSA-N aluminium silicate Chemical compound O=[Al]O[Si](=O)O[Al]=O PZZYQPZGQPZBDN-UHFFFAOYSA-N 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1808—Removable covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
- F27B2009/3638—Heaters located above and under the track
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Tunnel Furnaces (AREA)
Abstract
The invention relates to a large-size aging tunnel furnace, which comprises a feeding section, a heating section and a cooling discharging section which are arranged in sequence, wherein a conveying mechanism extending from the feeding section to the cooling discharging section is arranged in the heating section; the heating section comprises a temperature rising section, a constant temperature baking section and a temperature reduction section which have the same structure and are independently controlled; the temperature rise section comprises a furnace body and a furnace cover matched with the furnace body, the furnace body comprises a first heat preservation layer, a main heating pipe is arranged above the conveying cavity, a fan is arranged at the bottom of the conveying cavity, and auxiliary heating pipes are arranged at air supply ports on two sides of the fan; the conveying mechanism is positioned between the main heating pipe and the fan. According to the invention, the main heating pipe is arranged above the conveying mechanism, and the fan and the auxiliary heating pipe are arranged below the conveying mechanism, so that the internal temperature of the heating section of the tunnel furnace reaches a certain requirement and is kept stable; meanwhile, the large-size tunnel furnace can be used for carrying out hot processing or heat treatment on large-size objects through the arranged furnace covers which can be opened at two sides.
Description
Technical Field
The invention relates to the technical field of tunnel furnaces, in particular to a large-size aging tunnel furnace.
Background
The tunnel furnace is an industrial furnace for carrying out thermal processing or heat treatment on an object in the conveying process, in the tunnel furnace, the object to be processed is heated by the tunnel furnace in the conveying process of a mesh belt, and the internal temperature of the object to be processed is required to meet certain requirements and be kept stable in the process; meanwhile, since the conventional tunnel furnace has a small structure, it can perform hot working or heat treatment only on objects having a small size, and is not suitable for objects having a large size.
Disclosure of Invention
The invention provides a large-size aging tunnel furnace for solving the technical problems.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a large-size aging tunnel furnace comprises a feeding section, a heating section and a cooling discharging section which are sequentially arranged, wherein the heating section is internally provided with a conveying mechanism which penetrates through the conveying cavity of the heating section from the feeding section and extends to the cooling discharging section; the heating section comprises a temperature rising section, a constant temperature baking section and a temperature reduction section which have the same structure and are controlled independently; the heating section, the constant-temperature baking section or the cooling section comprises a furnace body and a furnace cover matched with the furnace body, the furnace body comprises a first heat-insulating layer, a conveying cavity is positioned in the first heat-insulating layer, a main heating pipe is arranged above the conveying cavity, a fan is arranged at the bottom of the conveying cavity, and auxiliary heating pipes are arranged at air supply ports on two sides of the fan; the conveying mechanism is positioned between the main heating pipe and the fan, and air ducts capable of circulating hot air are arranged among the conveying mechanism, the main heating pipe, the auxiliary heating pipe, the fan and the third heat-insulating layer.
Further, as a preferred technical scheme, the furnace cover comprises a fixed body arranged along the length direction of the furnace body and side wings arranged at two sides of the fixed body, and the side wings can be turned over along the fixed body to realize the opening and closing of the furnace cover; and a sealing strip is arranged at the joint of the furnace body and the furnace cover.
Further, as a preferred technical scheme, the side wing comprises a second insulating layer and a filtering layer, and an air channel capable of circulating hot air is arranged between the second insulating layer and the filtering layer; the fixing body comprises a third insulating layer.
Further, as a preferred technical scheme, a lateral wing of the furnace cover is connected with the furnace body through a supporting piece, and the lateral wing is turned over along the fixing body through the supporting piece.
Further, as a preferred solution, the support member comprises a gas spring.
Further, as a preferred technical scheme, the main heating pipe comprises an infrared heating pipe.
Furthermore, as a preferred technical scheme, an exhaust port is arranged on the furnace cover positioned at the temperature rising section and the temperature reducing section, the exhaust port is arranged on a side wing of the furnace cover, and a filter is arranged in the exhaust port.
Further, as a preferred technical scheme, the cooling discharge section comprises a cooling section and a discharge section, and the cooling section is provided with a cooling mechanism and an air outlet connected with the cooling mechanism; the discharging section is provided with a control mechanism connected with the heating section, the cooling discharging section and the conveying mechanism, and the control mechanism is provided with an alarm device connected with the control mechanism.
Further, as a preferred technical scheme, the conveying mechanism comprises a conveying belt, a power roller, a conveying belt carrier roller group and a driving mechanism for driving the power roller to rotate, and the conveying belt is diffracted on the power roller and the conveying belt carrier roller group; and the conveying belt is provided with an adjusting device and a cleaning device, and the adjusting device and the cleaning device are in contact with the belt surface of the conveying belt.
Furthermore, as a preferred technical scheme, the bottom of the feeding section, the bottom of the heating section and the bottom of the cooling discharging section are respectively provided with a caster wheel and an adjusting foot cup.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
according to the invention, the main heating pipe is arranged above the conveying mechanism, and the fan and the auxiliary heating pipe are arranged below the conveying mechanism, so that the internal temperature of the heating section of the tunnel furnace reaches a certain requirement and is kept stable; meanwhile, the large-size tunnel furnace can be used for carrying out hot processing or heat treatment on large-size objects through the arranged furnace covers which can be opened at two sides.
Drawings
FIG. 1 is a block diagram of the present invention.
FIG. 2 is a block diagram of the present invention.
FIG. 3 is a structural diagram of a temperature rising section, a constant temperature baking section or a temperature lowering section according to the present invention.
FIG. 4 is a structural diagram of a temperature rising section, a constant temperature baking section or a temperature lowering section according to the present invention.
The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted; the same or similar reference numerals correspond to the same or similar parts; the terms describing positional relationships in the drawings are for illustrative purposes only and are not to be construed as limiting the patent.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand for those skilled in the art and will therefore make the scope of the invention more clearly defined.
Example 1
A large size aging tunnel furnace, as shown in fig. 1-4: the device comprises a feeding section 1, a heating section 2 with a conveying cavity and a cooling discharging section 3 which are sequentially arranged, wherein a conveying mechanism 4 which penetrates through the conveying cavity of the heating section 2 from the feeding section 1 and extends to the cooling discharging section 3 is arranged in the heating section 2; the heating section 2 comprises a temperature rising section 21, a constant temperature baking section 22 and a temperature reducing section 23 which are identical in structure and are controlled independently, the temperature rising section 21, the constant temperature baking section 22 and the temperature reducing section 23 are controlled independently, the temperature in the temperature rising section 21, the temperature reducing section 22 and the temperature reducing section 23 can be controlled finely, and the uniformity of the temperature in the temperature rising section 21, the temperature reducing section 22 and the temperature reducing section 23 is guaranteed.
The temperature rising section 21, the constant temperature baking section 22 or the temperature lowering section 23 comprises a furnace body 212 and a furnace cover 211 matched with the furnace body 212, the furnace body 212 comprises a first heat preservation layer 2121, a conveying cavity is positioned in the first heat preservation layer 2121, a main heating pipe 2122 is arranged above the conveying cavity, a fan 2123 is arranged at the bottom of the conveying cavity, and auxiliary heating pipes 2124 are arranged at air outlets on two sides of the fan 2123; the conveying mechanism 4 is positioned between the main heating pipe 2122 and the fan 2123, and air ducts which can circulate hot air are arranged among the conveying mechanism 4, the main heating pipe 2122, the auxiliary heating pipe 2124, the fan 2123 and the third heat-insulating layer; the furnace cover 211 comprises a fixed body arranged along the length direction of the furnace body 212 and side wings arranged at two sides of the fixed body, and the side wings can be turned over along the fixed body to realize the opening and closing of the furnace cover 211; a sealing strip 2114 is arranged at the joint of the furnace body 212 and the furnace cover 211, so that the sealing property in the conveying cavity is ensured, the heat loss is prevented, and the heat insulation property is ensured; the side wing comprises a second insulating layer 2111 and a filtering layer 2112, and an air channel capable of circulating hot air is arranged between the second insulating layer 2111 and the filtering layer 2112. Wherein, the fixed body includes third heat preservation 2113, and sealing strip 2114 includes joint strip, and main heating pipe 2122 includes infrared heating pipe, and first heat preservation 2121, second heat preservation 2111 and third heat preservation 2113 all include the insulation material that adopts the material to be the aluminium silicate cotton, ensure the heat preservation effect, filter layer 2112 includes the filter.
The working principle of the circulation of hot air in the temperature rising section 21, the constant temperature baking section 22 and the temperature reduction section 23 is shown in fig. 3-4, hot air is filtered by the filter layer 2112 along the air channel between the second insulating layer 2111 and the filter layer 2112, then uniformly passes through the surface of the main heating pipe 2122, enters the surface of a product on the conveying mechanism 4 in the conveying cavity of the tunnel furnace, is induced to flow back to the fan 2123 after passing through the surface of the product, forms hot air circulation, reduces heat loss, and prevents the product from drifting in the furnace. The hot air circulation design is suitable for the large-size tunnel furnace, and can ensure the uniform and maintained temperature in the tunnel furnace when the large-size articles are subjected to hot processing or heat treatment, thereby ensuring the processing quality and effect of the large-size articles.
The lateral wing of the furnace cover 211 of the invention is connected with the furnace body 212 through the supporting piece 2115, and the lateral wing is turned over along the fixing body through the supporting piece 2115, so that the furnace cover 211 of the large-size tunnel furnace can be opened and closed from two sides, and the cleaning and the maintenance are facilitated. The supporting member 2115 comprises a gas spring, the side wing of the furnace cover 211 is lifted by the aid of the gas spring, and a manual supporting rod can be installed after the side wing is lifted in order to ensure the safety of the furnace cover.
In the present invention, an exhaust port 2115 is provided on the furnace cover 211 at the warming-up section 21 and the cooling-down section 23, the exhaust port 2115 is provided on a side wing of the furnace cover 211, a filter 2116 is installed in the exhaust port 2115 to prevent dust from flowing back, and an adjustable valve is provided at the exhaust port 2115.
The cooling discharge section 3 comprises a cooling section 31 and a discharge section 32, and the cooling section 31 is provided with a cooling mechanism 311 and an air outlet 312 connected with the cooling mechanism 311; the discharging section 32 is provided with a control mechanism 321 connected with the heating section 2, the cooling discharging section 3 and the conveying mechanism 4, the control mechanism 321 is provided with an alarm device 322 connected with the control mechanism 321, the control mechanism 321 comprises a human-computer interface and a PLC, and the alarm device 322 is mainly used for alarming and prompting temperature abnormity in the heating section 21, the constant-temperature baking section 22 and the cooling section 23. The control mechanism 321 can control the main heating pipe 2122, the auxiliary heating pipe 2124, the blower 2123, and the like of the temperature raising section 21, the constant temperature baking section 22, and the temperature lowering section 23, respectively, so as to finely control the output power thereof. Meanwhile, the control mechanism 321 may also control the conveying speed of the conveying mechanism 4.
The conveying mechanism 4 comprises a conveying belt 41, a power roller 42, a conveying belt carrier roller group 43 and a driving mechanism for driving the power roller 42 to rotate, and the conveying belt 41 is diffracted on the power roller 42 and the conveying belt carrier roller group 43; the conveyor belt 41 is provided with an adjusting device 44 and a cleaning device 45, and the adjusting device 44 and the cleaning device 45 are in contact with the belt surface of the conveyor belt 41. The adjusting device 44 comprises a tensioning movable roller 441 and a deviation-rectifying adjusting roller 442 to adjust the conveying belt to ensure that the conveying belt 41 is not deviated, and the cleaning device 45 comprises a movable dust-sticking roller to ensure that the conveying belt 41 is clean.
The conveyer belt 41 adopts a high temperature resistant anti-static Teflon mesh belt, and a supporting point is arranged in the middle of each conveyer belt carrier roller of the conveyer belt carrier roller group 43, so that the bending deformation of the conveyer belt carrier rollers is prevented, the flatness of the belt surface of the conveyer belt 41 is influenced, and the baking deformation of products is caused.
The bottom of the feeding section 1, the bottom of the heating section 2 and the bottom of the cooling discharging section 32 are provided with casters 213 and adjusting foot cups 214. Casters 213 are used to move the entire tunnel furnace and adjustment feet cups 214 are used to level the tunnel furnace.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A large-size aging tunnel furnace comprises a feeding section (1), a heating section (2) with a conveying cavity and a cooling discharging section (3) which are sequentially arranged, wherein a conveying mechanism (4) which penetrates through the conveying cavity of the heating section (2) from the feeding section (1) and extends to the cooling discharging section (3) is arranged in the heating section (2); the device is characterized in that the heating section (2) comprises a temperature rising section (21), a constant temperature baking section (22) and a temperature reducing section (23) which have the same structure and are controlled independently; the heating section (21), the constant-temperature baking section (22) or the cooling section (23) comprises a furnace body (212) and a furnace cover (211) matched with the furnace body (212), the furnace body (212) comprises a first heat-insulating layer (2121), a conveying cavity is positioned in the first heat-insulating layer (2121), a main heating pipe (2122) is arranged above the conveying cavity, a fan (2123) is arranged at the bottom of the conveying cavity, and auxiliary heating pipes (2124) are arranged at air outlets on two sides of the fan (2123); the conveying mechanism (4) is positioned between the main heating pipe (2122) and the fan (2123), and air ducts capable of circulating hot air are arranged among the conveying mechanism (4), the main heating pipe (2122), the auxiliary heating pipe (2124), the fan (2123) and the third heat-insulating layer.
2. The large-sized aging tunnel furnace according to claim 1, wherein the furnace cover (211) comprises a fixed body arranged along the length direction of the furnace body (212) and side wings arranged at both sides of the fixed body, and the side wings can be turned along the fixed body to realize the opening and closing of the furnace cover (211); and a sealing strip (2114) is arranged at the joint of the furnace body (212) and the furnace cover (211).
3. The large-size aging tunnel furnace according to claim 2, wherein the furnace cover (211) comprises a second insulating layer (2111) and a filter layer (2112), and an air duct for circulating hot air is arranged between the second insulating layer (2111) and the filter layer (2112); the fixing body includes a third insulation layer (2113).
4. The large-sized aging tunnel furnace according to claim 2, wherein a side wing of the furnace cover (211) is connected to the furnace body (212) by a support member (2115), and the side wing is turned over along the fixing body by the support member (2115).
5. The large size aging tunnel furnace of claim 4, wherein the support members (2115) comprise gas springs.
6. The large size aging tunnel furnace of claim 1, wherein the primary heating pipes (2122) comprise infrared heating pipes.
7. The large-sized aging tunnel furnace according to claim 1, wherein an exhaust port (2115) is provided on the furnace cover (211) at the temperature rising section (21) and the temperature lowering section (23), the exhaust port (2115) is provided on a side wing of the furnace cover (211), and a filter (2116) is installed in the exhaust port (2115).
8. The large-size aging tunnel furnace according to claim 1, wherein the cooling discharge section (3) comprises a cooling section (31) and a discharge section (32), a cooling mechanism (311) and an air outlet (312) connected with the cooling mechanism (311) are arranged on the cooling section (31); the discharging section (32) is provided with a control mechanism (321) connected with the heating section (2), the cooling discharging section (3) and the conveying mechanism (4), and an alarm device (322) connected with the control mechanism (321) is arranged on the control mechanism (321).
9. The large-size aging tunnel furnace according to claim 1, wherein the conveying mechanism (4) comprises a conveying belt (41), power rollers (42), a conveying belt carrier roller group (43) and a driving mechanism for driving the power rollers (42) to rotate, and the conveying belt (41) is wound on the power rollers (42) and the conveying belt carrier roller group (43); the conveying belt (41) is provided with an adjusting device (44) and a cleaning device (45), and the adjusting device (44) and the cleaning device (45) are in contact with the belt surface of the conveying belt (41).
10. The large-size aging tunnel furnace according to claim 1, characterized in that casters (213) and adjusting foot cups (214) are provided at the bottom of the feeding section (1), the heating section (2) and the cooling discharging section (32) (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911210298.8A CN110763014A (en) | 2019-12-02 | 2019-12-02 | Large-size aging tunnel furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911210298.8A CN110763014A (en) | 2019-12-02 | 2019-12-02 | Large-size aging tunnel furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110763014A true CN110763014A (en) | 2020-02-07 |
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ID=69340620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911210298.8A Pending CN110763014A (en) | 2019-12-02 | 2019-12-02 | Large-size aging tunnel furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN110763014A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113451182A (en) * | 2021-08-30 | 2021-09-28 | 江苏晟驰微电子有限公司 | Diffusion furnace temperature control constant temperature system for chip production |
| CN115560573A (en) * | 2022-09-26 | 2023-01-03 | 广东光信机械有限公司 | Tunnel furnace capable of being heated uniformly |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0712467A (en) * | 1993-06-25 | 1995-01-17 | Matsushita Electric Ind Co Ltd | Firing device |
| CN103808135A (en) * | 2012-11-15 | 2014-05-21 | 西安中科麦特电子技术设备有限公司 | Tunnel furnace with wide furnace chamber applied to large workpiece |
| CN105910424A (en) * | 2016-04-28 | 2016-08-31 | 马朝晖 | Safe drying furnace automatic opening-closing cover |
| CN208280181U (en) * | 2018-05-11 | 2018-12-25 | 无锡华九机械设备有限公司 | A kind of manhole capping apparatus |
| CN211291012U (en) * | 2019-12-02 | 2020-08-18 | 深圳市欧珀达科技有限公司 | Large-size aging tunnel furnace |
-
2019
- 2019-12-02 CN CN201911210298.8A patent/CN110763014A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0712467A (en) * | 1993-06-25 | 1995-01-17 | Matsushita Electric Ind Co Ltd | Firing device |
| CN103808135A (en) * | 2012-11-15 | 2014-05-21 | 西安中科麦特电子技术设备有限公司 | Tunnel furnace with wide furnace chamber applied to large workpiece |
| CN105910424A (en) * | 2016-04-28 | 2016-08-31 | 马朝晖 | Safe drying furnace automatic opening-closing cover |
| CN208280181U (en) * | 2018-05-11 | 2018-12-25 | 无锡华九机械设备有限公司 | A kind of manhole capping apparatus |
| CN211291012U (en) * | 2019-12-02 | 2020-08-18 | 深圳市欧珀达科技有限公司 | Large-size aging tunnel furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113451182A (en) * | 2021-08-30 | 2021-09-28 | 江苏晟驰微电子有限公司 | Diffusion furnace temperature control constant temperature system for chip production |
| CN113451182B (en) * | 2021-08-30 | 2021-11-12 | 江苏晟驰微电子有限公司 | Diffusion furnace temperature control constant temperature system for chip production |
| CN115560573A (en) * | 2022-09-26 | 2023-01-03 | 广东光信机械有限公司 | Tunnel furnace capable of being heated uniformly |
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