CN110762182A

CN110762182A - Ignition-proof gear and magnetron sputtering coating device

Info

Publication number: CN110762182A
Application number: CN201910900129.0A
Authority: CN
Inventors: 张立茂; 王涛; 佘清
Original assignee: Beijing North Microelectronics Co Ltd
Current assignee: Beijing North Microelectronics Co Ltd
Priority date: 2019-09-23
Filing date: 2019-09-23
Publication date: 2020-02-07
Anticipated expiration: 2039-09-23
Also published as: CN110762182B

Abstract

The invention discloses an ignition-proof gear and a magnetron sputtering coating device, wherein the ignition-proof gear comprises: the internal intensive lantern ring of insulating gear ring is located including insulating gear ring and cover to the gear main part, strengthens the outer wall of the lantern ring and the interior wall connection of insulating gear ring, strengthens the outer wall of the lantern ring and the inner wall laminating of insulating gear ring, and the outer wall of insulating gear ring is equipped with a plurality of teeth of a cogwheel, and insulating gear ring is insulating, and the intensity of the intensive lantern ring is higher than the intensity of insulating gear ring. Through the insulating gear ring that adopts insulating material and the bilayer structure who strengthens the lantern ring, can also strengthen the holistic mechanical strength of gear when realizing the insulating nature of gear and external connecting piece, especially can increase the intensity in shaft hole, avoid the shaft hole to be destroyed by external connection's pivot wearing and tearing to increase and use this gear of preventing striking sparks place drive mechanism's operating stability.

Description

Ignition-proof gear and magnetron sputtering coating device

Technical Field

The invention relates to the field of semiconductor manufacturing equipment, in particular to an anti-sparking gear and a magnetron sputtering coating device.

Background

Copper sputtering has been rapidly developed because of its lower conductivity and reduced electromigration. The copper target is sputtered as the top magnetron rotates, and the target is sputtered only when the magnetron passes through the position. The magnetron rotates at a constant speed for one period on the back of the target, which is equal to the whole target being sputtered once.

The electrode on the copper cavity generally adopts a planetary magnetron, the planetary magnetron increases the area of target material corrosion, and simultaneously optimizes the design in the electrical aspect to realize the variable speed control of the magnetron so as to meet the requirement of 28nm technology. The magnetron lift mechanism allows the deposition rate to remain constant during the target life cycle. Through changing original limit magnet into the electro-magnet, obtained better step coverage performance, guaranteed not have the space and electroplate. The planetary magnetron lifting mechanism and the rotating mechanism mainly transmit motion through belt gears and belts, so the gears and belts are important parts in the transmission process of the planetary magnetron lifting and rotating mechanism.

Fig. 1 is a schematic structural diagram of a conventional magnetron copper sputtering apparatus (copper cavity upper electrode), and a rotating mechanism of the conventional magnetron copper sputtering apparatus mainly comprises a servo motor 1, a reducer 2, a gear 3, a belt 4, a synchronous pulley 5, a rotating mechanism bearing seat assembly 6, a fixing flange 7, a high-voltage insulating cover 8, a high-voltage insulating base 9 and a planetary magnetron, wherein the planetary magnetron comprises a small arm assembly 10, a gear box assembly 11 and a large counterweight 12.

The rotary motion of the servo motor 1 drives the rotary mechanism bearing seat assembly 6 to rotate through the gear 3 and the belt 4, and further drives the magnetron arranged on the small arm assembly 10 to rotate, so that the back of the target material is rotated.

Deionized water is filled in the high-voltage insulating seat 9, in the process, the target material is electrified with DC voltage, so that the magnetron has induction voltage, the synchronous pulley 5 is connected with the magnetron, the gear 3 is connected with the output shaft of the motor 1 (the motor 1 is grounded), the belt 4 (a synchronous toothed belt) is connected with the synchronous pulley 5 and the gear 3, the belt 4 is mainly made of rubber materials, excessive conductive substances (such as steel wires and the like) are doped in the belt 4 in order to improve the mechanical strength, the wear resistance, the heat resistance, the ageing resistance and the like, so that the belt 4 is not completely insulated, an electric loop is formed between the target material and the magnetron and the synchronous pulley 5, the belt 4 and the gear 3, and the phenomenon of electric sparking between the belt and the pulleys can occur.

The existing gear structure is shown in fig. 2 and fig. 3, the whole gear 13 is made of cast nylon (also called as MC901 material or cast nylon), the MC901 material has an insulating effect, a formed electric circuit can be interrupted, and the ignition problem of a belt is solved to a certain extent, but the overall strength of the gear is not high due to the fact that the MC901 material is soft, under the condition of vibration or after long-time variable speed operation, the eccentric wear phenomenon of the inner circular shaft hole 14 which is in contact with a speed reducer shaft is easily caused by looseness of a jackscrew of the gear 13, even a key arranged on the shaft can damage and damage the gear key groove 15, and the upper electrode operation fails.

Therefore, it is necessary to provide a gear which can prevent electric sparking, has higher mechanical strength, and can improve the operational reliability of an electrode rotating mechanism on a magnetron sputtering coating device.

Disclosure of Invention

The invention provides an ignition-proof gear and a magnetron sputtering coating device, which can prevent electric ignition and enhance the strength of the gear so as to improve the operation stability of an upper electrode rotating mechanism.

The invention provides an anti-sparking gear, which comprises: the gear body comprises an insulating gear ring and a strengthening lantern ring sleeved in the insulating gear ring;

the reinforced lantern ring is fixedly connected with the insulating gear ring, the outer wall of the reinforced lantern ring is attached to the inner wall of the insulating gear ring, and a plurality of gear teeth are arranged on the outer wall of the insulating gear ring;

the insulating gear ring is insulating, and the intensity of strengthening the lantern ring is higher than the intensity of insulating gear ring.

Optionally, the outer wall of the reinforcing lantern ring is provided with a plurality of protruding portions, and two end faces of the protruding portions are respectively provided with a first fixing hole along the axial direction of the gear body.

Optionally, the inner wall of the insulating gear ring is provided with a plurality of limiting grooves matched with the protrusions, and the limiting grooves penetrate through the insulating gear ring along the axial direction of the gear body.

Optionally, the gear further comprises two annular baffles respectively arranged on two end faces of the gear body, the annular baffles are provided with through holes matched with the first fixing holes, and the annular baffles are fixedly connected with the reinforcing lantern ring through the first fixing pieces, the through holes and the first fixing holes.

Optionally, the reinforcing collar and the insulating gear ring are fixedly connected by interference press fit.

Optionally, the insulating gear ring is provided with one or more second fixing holes penetrating through the insulating gear ring along the radial direction of the gear body, the reinforcing lantern ring is provided with one or more third fixing holes matched with the second fixing holes along the radial direction of the gear body, and the insulating gear ring and the reinforcing lantern ring are further fixedly connected through one or more second fixing pieces, one or more second fixing holes and one or more third fixing holes.

Optionally, the inner wall of the reinforcing lantern ring is provided with a gear key groove, and the gear key groove penetrates through the reinforcing lantern ring along the axial direction of the gear body.

Optionally, the insulating gear ring is made of nylon, and the reinforcing lantern ring is made of stainless steel.

The invention also provides a magnetron sputtering coating device which comprises the ignition-proof gear.

Optionally, the magnetron sputtering coating device further includes: the device comprises a servo motor, a speed reducer, a synchronous toothed belt, a synchronous belt wheel, a rotating mechanism bearing seat, a planetary magnetron, a high-voltage insulating cover and a high-voltage insulating base;

the servo motor is connected with the speed reducer, the speed reducer is connected with the ignition preventing gear, and the ignition preventing gear is connected with the synchronous belt wheel through the synchronous toothed belt;

the high-voltage insulation cover is covered on the top of the high-voltage insulation base, and the planetary magnetron is arranged in the high-voltage insulation base;

the rotating mechanism bearing seat is fixedly connected with the high-voltage insulating cover through a flange, the rotating mechanism bearing seat is provided with a transmission shaft extending into the high-voltage insulating base, the synchronous belt wheel is connected with the top end of the rotating shaft, and the bottom end of the rotating shaft is connected with the planetary magnetron.

The invention has the beneficial effects that:

through the insulating gear ring that adopts insulating material and the bilayer structure who strengthens the lantern ring, can also strengthen the holistic mechanical strength of gear when realizing the insulating nature of gear and external connecting piece, especially can increase the intensity in shaft hole (inner ring lateral wall), avoid the shaft hole to be destroyed by the wearing and tearing of axle (motor shaft etc.) to increase and use this gear of preventing striking sparks place drive mechanism's operating stability.

The magnetron sputtering coating device for the sparking-preventing gear can effectively block an electric loop formed between a target material, a magnetron, a synchronous belt wheel, a belt, a gear and the ground, avoid sparking between the belt and the belt wheel in a rotating mechanism, simultaneously avoid the problem that an upper star type magnetron is unreliable in operation due to the fact that a gear key groove and an inner circle of the gear are easy to damage when a gear jackscrew is loosened, and effectively improve the safety and reliability of the magnetron sputtering coating device.

The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.

FIG. 1 shows a schematic structural diagram of a conventional magnetron sputtering coating device.

Fig. 2 shows a schematic structural diagram of an axial end face of a transmission gear in a rotating mechanism of a conventional magnetron sputtering coating device.

FIG. 3 shows a radial structure diagram of a transmission gear in a rotating mechanism of a prior magnetron sputtering coating device.

Fig. 4 is a schematic axial end view of an anti-spark gear according to an embodiment of the present invention.

FIG. 5 illustrates a radial configuration of an anti-spark gear according to one embodiment of the present invention.

FIG. 6 shows a schematic structural view of a stiffening collar according to an embodiment of the invention.

FIG. 7 illustrates a schematic structural diagram of an insulated gear ring according to one embodiment of the present invention.

FIG. 8 is a schematic diagram of a magnetron sputtering coating apparatus for an insulating gear ring according to an embodiment of the present invention.

Description of the reference numerals

In fig. 1 to 3:

1. a servo motor; 2. an accelerator; 3. a gear; 4. a synchronous toothed belt; 5. a synchronous pulley; 6. rotating a bearing seat of the mechanism; 7. a fixed flange; 8. a high voltage insulation cover; 9. a high voltage insulating base; 10. a counterweight small arm; 11. a gear case; 12. a large arm is equipped; 13. a gear; 14. a shaft hole; 15. gear keyway.

In fig. 4 to 8:

100. an ignition prevention gear; 101. an insulating gear ring; 102. reinforcing the lantern ring; 103. a baffle plate; 104. a first fixing hole; 105. a second fixing hole; 106. a third fixing hole; 107. a projection; 108. a gear keyway; 109. a shaft hole; 110. a limiting groove; 111. gear teeth; 200. a magnetron sputtering coating device; 201. a servo motor; 202. a speed reducer; 203. a planetary magnetron; 204. a synchronous toothed belt; 205. a synchronous pulley; 206. rotating a bearing seat of the mechanism; 207. a fixed flange; 208. a high voltage insulation cover; 209. a high voltage insulating base; 210. a counterweight small arm; 211. a gear case; 212. a large arm is equipped; 213. a target material; 214. a reaction chamber; 215. a substrate.

Detailed Description

The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

FIG. 4 is a schematic axial end view of an anti-spark gear according to an embodiment of the present invention, and FIG. 5 is a schematic radial view of an anti-spark gear according to an embodiment of the present invention;

as shown in fig. 4 and 5, an anti-spark gear 100 according to an embodiment of the present invention includes:

the gear body comprises an insulating gear ring 101 and a reinforcing lantern ring 102 sleeved in the insulating gear ring 101; strengthen lantern ring 102 and insulating gear ring 101 fixed connection, strengthen the outer wall of lantern ring 102 and the inner wall laminating of insulating gear ring 101, insulating gear ring 101's outer wall is equipped with a plurality of teeth of a cogwheel, and insulating gear ring 101 is insulating, strengthens the intensity that lantern ring 102 is higher than insulating gear ring 101. Specifically, the gear body comprises an insulating gear ring 101 arranged on an outer layer and a reinforcing collar 102 arranged on an inner layer, wherein the inner wall of the reinforcing collar 102 forms a shaft hole 109 of the gear body, gear teeth are arranged along the outer wall of the insulating gear ring 101, the insulating gear ring 101 is made of an insulating material, and the strength (hardness or rigidity) of the reinforcing collar 102 is higher than that of the insulating gear ring 101, namely the reinforcing collar 102 is stronger than the insulating gear ring 101 in terms of resistance to abrasion, fracture and excessive deformation, so that the torsion load (or bending load, compression load or the like) and abrasion resistance of the gear body can be improved through the reinforcing collar 102. The outer insulating gear ring 101 made of insulating materials can avoid the ignition problem caused by electric conduction when being connected with gears of other transmission devices, effectively increases the mechanical strength of the gear body through the reinforcing lantern ring 102, effectively reduces abrasion and damage of rotating shafts of other devices to the gear inner circular shaft hole 109, and increases the transmission stability and the service life of the gear body.

Referring to fig. 6, the outer wall of the reinforcing collar 102 is provided with three protrusions 107, and both end faces of the protrusions 107 are respectively provided with first fixing holes 104 along the axial direction of the gear body.

Specifically, the reinforcing collar 102 in this embodiment is annular as a whole, the inner ring forms a circular shaft hole 109 of the gear body, the three protrusions 107 are sequentially distributed at intervals of 120 degrees on the outer wall of the reinforcing collar, the cross section of the three protrusions 107 in the axial direction perpendicular to the reinforcing collar 102 is semicircular, and the thickness of the protrusion 107 in the axial direction is consistent with the thickness of the reinforcing collar 102, that is, the protrusion 107 can be regarded as a semi-cylinder. In the present invention, the number, shape and thickness of the convex portions 107 are not limited, in other embodiments of the present invention, two convex portions 107 spaced by 180 degrees or four convex portions 107 sequentially spaced by 90 degrees may be provided on the outer wall of the reinforcing collar 102, the outer wall of the reinforcing collar 102 may be processed into a spline shape (that is, a plurality of convex portions 107 are uniformly distributed on the outer wall of the reinforcing collar 102), the shape of the convex portions 107 may be a triangle, a rectangle, a trapezoid, etc., and the thickness of the convex portions 107 may be smaller than the thickness of the reinforcing collar 102. The arrangement of the convex part 107 can increase the contact area between the reinforcing collar 102 and the insulating gear ring 101, avoid relative sliding and increase torque.

As shown in fig. 6, two symmetrical two first fixing holes 104 are formed on two end faces of each semicircular projection 107 along the axial hole 109, namely three first fixing holes 104 are formed on two end faces of the reinforcing collar 102, and the first fixing holes 104 in this embodiment are threaded holes with internal threads. In practical implementation, one first fixing hole 104 may be formed on each of the two end surfaces of each semicircular protrusion 107. In other embodiments of the present invention, a first fixing hole 104 may be formed only on one end surface of the protruding portion 107, and then the first fixing hole 104 penetrates through the other end surface of the protruding portion 107 to form a through hole, which may have an internal thread or a through hole with a smooth inner wall. The shape of the shaft hole 109 in the present invention may also be rectangular, triangular, polygonal, etc., if the gear body is mounted on the motor shaft, and the cross-sectional shape of the motor shaft is triangular, the shaft hole 109 may be correspondingly processed into the triangular shaft hole 109, and the shape of the shaft hole 109 may be designed by those skilled in the art according to the type of the rotating shaft butted with the shaft hole 109. Meanwhile, the shape of the main body of the strengthening lantern ring 102 can be isosceles triangle, square and other polygonal shapes, and the technical effect similar to that of the embodiment can be achieved.

Referring to fig. 7, the inner wall of the insulating gear ring 101 is provided with three retaining grooves 110 which are engaged with the protrusions 107, and the retaining grooves 110 penetrate the insulating gear ring 101 in the axial direction of the shaft hole 109. Specifically, the insulating gear ring 101 in this embodiment is a circular ring, the inner circular side wall is provided with three semicircular limiting grooves 110 which are matched with the outer wall of the reinforcing sleeve ring 102, the contact area between the outer wall of the reinforcing sleeve ring 102 and the inner wall of the insulating gear ring 101 can be increased by matching the three limiting grooves 110 and the three protrusions 107, so that the connection between the reinforcing sleeve ring 102 of the inner layer and the insulating gear ring 101 of the outer layer is tighter, and meanwhile, the relative sliding between the outer wall of the reinforcing sleeve ring 102 and the inner wall of the insulating gear ring 101 in the rotating process can be avoided. In other embodiments of the present invention, if the main body or outer wall of the reinforcing collar 102 is machined to have the form of the other polygon or spline, the inner wall (inner circle) of the corresponding insulating gear ring 101 should also be machined to have a corresponding shape for matching.

The sparking prevention gear 100 of the embodiment further comprises two annular baffles 103 which are respectively arranged on two end faces of the gear body, the annular baffles 103 are provided with through holes which are matched with the first fixing holes 10, and the annular baffles 103 are fixedly connected with the reinforcing lantern ring 102 through first fixing pieces, first fixing holes 104 and the through holes. Specifically, referring to fig. 4, the annular baffle 103 is a circular ring, and three through holes corresponding to three first fixing holes 104 are formed in the baffle 103, in a specific implementation, after the reinforcing lantern ring 102 is embedded into the inner ring of the insulating gear ring 101, the through holes in the two annular baffles 103 are aligned with the first fixing holes 104 at two ends of the reinforcing lantern ring 102, and then the two baffles 103 are fixed to two end faces of the gear main body through first fixing pieces, where the first fixing pieces in this embodiment are screws, and the first fixing holes 104 are threaded holes, and the baffles 103 can limit the reinforcing lantern ring 102 and the insulating gear ring 101 from moving relatively in the axial direction, so as to avoid causing gear operation failure. In other embodiments of the present invention, when the first fixing hole 104 is a through hole (with or without threads) penetrating through the protrusion 107, the first fixing member 104 may be a bolt and a nut, and the bolt is fixed to the bolt by the nut and the bolt at the other end of the protrusion 107 after passing through the first fixing hole 104 from the first fixing hole 104, so that the two ring baffles are fixed at the same time.

Further, the diameter of the inner circle of the ring-shaped baffle plate 103 in this embodiment should be larger than or equal to the diameter of the shaft hole 109, and the diameter of the outer circle should be smaller than the diameter of the circle on which the bottom of the gear groove between the gear teeth on the outer wall of the insulating gear ring 101 is located. In other embodiments of the present invention, if the shaft hole 109 has other polygonal shapes, the diameter of the inner circle of the ring-shaped baffle plate 103 should be larger than the diameter of the circumscribed circle of the polygonal shape. In order to achieve better insulating performance, the material of the baffle plate 103 in this example is the same insulating material as the insulating gear ring 101. The baffle 103 should be made of a material with a certain mechanical strength, so the baffle 103 may also be made of a metal such as aluminum alloy or stainless steel, and when the baffle 103 is made of a metal, it should be noted that the outer edge of the baffle 103 should not exceed the bottom of the tooth socket between the gear teeth to avoid the electrical connection with the external transmission mechanism. The number of the through holes of the baffle plate 103 is not limited in the present invention, but it is required to be the same as and one-to-one corresponding to the number of the first fixing holes 104 provided in the protruding portion 107.

In this embodiment, the reinforcing collar 102 is press-fitted to the insulating gear ring 101 by interference fit, so that the outer wall of the reinforcing collar 102 is fixedly connected to the inner wall of the insulating gear ring 101. In a specific implementation process, the diameter of the inner circle of the insulating gear ring 101 should be slightly smaller than the diameter of the outer circle of the reinforcing collar 102, for example, the diameter of the inner circle of the insulating gear ring 101 is 2cm, the diameter of the outer circle of the reinforcing collar 102 may be processed to be 2.1cm, and the radius of the semicircular protrusion 107 should be slightly larger than the radius of the semicircular limiting groove 110, so as to achieve interference press-fit engagement between the reinforcing collar 102 and the insulating gear ring 101, further enhance the binding force between the reinforcing collar 102 and the insulating gear ring 101, and improve the mechanical strength of the gear body. In other embodiments of the present invention, if the main body of the reinforcing collar 102 and the protrusion 107 are processed into other equilateral polygons or splines, the diameter of the corresponding shape of the circumscribed circle formed by the inner wall of the insulating gear ring 101 should be slightly smaller than the diameter of the circumscribed circle of the polygon or spline.

In one example, the insulating gear ring 101 is provided with one or more second fixing holes 105 penetrating through the insulating gear ring 101 along the radial direction of the gear body, the reinforcing collar 102 is provided with one or more third fixing holes 106 matching with the second fixing holes 105 along the radial direction of the gear body, and the insulating gear ring 101 and the reinforcing collar 102 are further fixedly connected through one or more second fixing pieces, one or more second fixing holes 105 and one or more third fixing holes 106.

Specifically, referring to fig. 4 and 5, the second fixing member in this embodiment is a jackscrew, the insulating gear ring 101 and the reinforcing collar 102 are respectively provided with three second fixing holes 105 and three third fixing holes 106 along the radial direction for mounting the jackscrew, each second fixing hole 105 and one third fixing hole 106 cooperate to form a through hole penetrating through the insulating gear ring 101 and the reinforcing collar 102, and one of the three through holes is formed to communicate with the gear key groove 108. Three thru holes are distributed along the gear main body at intervals of 120 degrees, each thru hole is located between two first fixing holes 104, namely, the projection of each thru hole on the end face of the gear main body is 60 degrees apart from two adjacent first fixing holes 104, a jackscrew is arranged in each thru hole, and then the jackscrew is jacked on the surface of a rotating shaft to realize the fixed connection between the gear main body and an external rotating shaft, meanwhile, the connection between the insulating gear ring 101 and the strengthening lantern ring is further strengthened, and the relative rotation between the inner wall of the insulating gear ring 101 and the outer wall of the strengthening lantern ring 102 in the rotating process of the gear main body is avoided. Because tolerance allowance which is convenient for sleeving is often arranged between the shaft hole 109 and the external rotating shaft, namely a tiny gap is formed between the shaft hole 109 and the rotating shaft, the axis of the shaft hole 109 can be coincided with the axis of the externally connected rotating shaft by adjusting jackscrews in the three through holes, and the rotation deviation of the gear body is avoided; meanwhile, a through hole is communicated with the gear key groove 108, and a jackscrew in the through hole can be jacked on a shaft key of an external rotating shaft, so that the shaft key and the reinforcing lantern ring 102 are tightly fixed together, and the gear key groove 108 is effectively prevented from being damaged by the shaft key. It should be noted that after the jackscrew is installed in the through hole (formed by the second fixing hole 105 and the third fixing hole 106) to fixedly connect the gear body and the external rotating shaft, the top end of the jackscrew should be no higher than the bottom edge of the tooth socket of the gear teeth, so as to avoid the jackscrew from affecting the operation of the gear teeth, and the length of the jackscrew can be designed by those skilled in the art according to actual conditions.

In this embodiment, the inner wall of the strengthening collar 102 is provided with a gear key groove 108, and the gear key groove 108 penetrates through the strengthening collar 102 along the axial direction of the gear body. Specifically, the shaft hole 109 and the gear key groove 108 are used for connecting with an external rotating shaft, the gear key groove 108 is used for transmitting torque, and synchronous rotation with the external rotating shaft can be realized by matching the gear key groove with a shaft key of the external connecting rotating shaft. In other embodiments of the present invention, the shaft hole 109 may have a triangular or rectangular shape or other shape having a function of limiting and transmitting torque, and the gear key groove 108 may not be provided, so that a person skilled in the art may select and design the shaft hole 109 according to the specific form of the external rotation shaft and the shaft hole 109.

In this embodiment, the insulating gear ring 101 is made of cast nylon, and the reinforcing collar 102 is made of stainless steel. Specifically, the cast nylon is also called as MC901 material or cast nylon, the MC901 material is widely applied in the industrial field, and has good comprehensive mechanical properties and good insulation properties, in this embodiment, the insulating gear ring 101 is cast and molded in a mold by using the MC901 material, the reinforcing lantern ring 102 is processed by using stainless steel, and the double-layer structure formed by the insulating gear ring 101 and the reinforcing lantern ring 102 made of the MC901 material effectively prevents the gear main body gear tooth part from being electrically ignited with external transmission equipment, and meanwhile, the reinforcing lantern ring 102 made of the inner layer stainless steel material increases the mechanical strength of the gear main body, improves the mechanical properties of abrasion resistance and impact resistance, and effectively prolongs the service life of the gear main body. In other embodiments of the present invention, the insulating gear ring 101 may also be made of nylon 6 or the like, and the reinforcing collar 102 may also be made of aluminum alloy or the like, and those skilled in the art may appropriately select a material having similar performance to that in the present embodiment according to the scheme of the present invention, and details thereof are not described herein.

Fig. 8 shows a schematic structural diagram of a magnetron sputtering coating device 200 of an insulating gear ring 101 according to an embodiment of the present invention, wherein the magnetron sputtering coating device 200 comprises the above-mentioned ignition preventing gear 100.

The magnetron sputtering coating device 200 in this embodiment further includes: a servo motor 201, a reducer 202, a synchronous cog belt 204, a synchronous belt pulley 205, a rotary mechanism bearing seat 206, a planetary magnetron 203, a high-voltage insulating cover 208 and a high-voltage insulating base 209; the speed reducer 202 is connected with the servo motor 201, the speed reducer 202 is connected with the ignition-proof gear 100, the ignition-proof gear 100 is connected with the synchronous belt wheel 205 through the synchronous toothed belt 204, the high-voltage insulating cover 208 is covered on the top of the high-voltage insulating base 209, and the planetary magnetron 203 is arranged inside the high-voltage insulating base 209; the rotating mechanism bearing seat 206 is fixedly connected with a high-voltage insulating cover 208 through a fixing flange 207, the rotating mechanism bearing seat 206 is provided with a transmission shaft extending to the inside of a high-voltage insulating base 209, a synchronous pulley 205 is connected with the top end of a rotating shaft, and the bottom end of the rotating shaft is connected with the planetary magnetron 203.

Specifically, the sparking prevention gear 100 effectively prevents an electric circuit from being formed between the target material-planetary magnetron 203-synchronous pulley 205-synchronous toothed belt 204-sparking prevention gear 100-ground through the good insulation of the outer insulation gear ring 101, so that the sparking phenomenon of the sparking prevention gear 100 and the synchronous toothed belt 204 is avoided, and the safety of the magnetron sputtering coating device 200 in the coating process is improved. Meanwhile, the reinforced lantern ring 102 on the inner layer of the ignition preventing gear 100 is high in mechanical strength, under the condition that a jackscrew is loosened due to vibration or the jackscrew is not screwed up due to negligence, abrasion and damage of a rotating shaft of the speed reducer 202 to the inner circle of the gear shaft hole 109 and the gear key groove 108 can be reduced, the operation stability of a rotating mechanism of an upper electrode is improved, and therefore stable rotation and efficient operation of the planetary magnetron 203 are guaranteed, and the coating yield of the magnetron sputtering coating device 200 is further guaranteed.

Further, the planetary magnetron 203 comprises a gear box 211, a small counterweight arm 210 and a large counterweight arm 212 which are arranged at the lower part of the gear box 211, wherein a magnetron (not shown) is arranged at one end of the small counterweight arm 210, when the planetary magnetron works, the high-voltage insulating base 209 is filled with deionized water, and the transmission shaft drives the large counterweight arm 212 and the small counterweight arm 210 to rotate through a gear set in the gear box 211, so as to drive the magnetron to rotate around the back surface of the target 213 arranged at the bottom of the high-voltage insulating base 209.

In the process, the target 213 is energized with a dc voltage, so that the planetary magnetron 203 has an induced voltage, the motor 1 is grounded, the magnetic field provided by the planetary magnetron 203 passes through the target 213, a magnetic field distribution is formed on the surface of one side of the target 213 facing the reaction chamber 214, the motion range of electrons is limited under the action of the intersecting electric field and magnetic field, the motion trajectory of the electrons is extended, the electrons ionize the argon atoms in the reaction chamber 214 to the maximum extent to form argon ions, the concentration of the argon ions is greatly increased, the electrical and atmospheric requirements required by the sputtering technology can be effectively reduced, and the argon ions in the reaction chamber 214 bombard the target 213 to form a sputtering film on the surface of the substrate 215. The planetary magnetron 203 is prior art and its technical principle is not described in detail here.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.

Claims

1. An anti-sparking gear, comprising: the gear body comprises an insulating gear ring and a strengthening lantern ring sleeved in the insulating gear ring;

2. The spark prevention gear according to claim 1, wherein the outer wall of the reinforcing collar is provided with a plurality of protrusions, and both end surfaces of the protrusions are respectively provided with first fixing holes in the axial direction of the gear body.

3. The spark prevention gear as claimed in claim 2, wherein the inner wall of the insulating gear ring is provided with a plurality of retaining grooves that are engaged with the protrusions, the retaining grooves penetrating the insulating gear ring in the axial direction of the gear body.

4. The anti-sparking gear according to claim 2 or 3, further comprising two annular baffles respectively arranged on two end faces of the gear body, wherein the annular baffles are provided with through holes matched with the first fixing holes, and the annular baffles are fixedly connected with the reinforcing lantern ring through a first fixing piece, the through holes and the first fixing holes.

5. An anti-sparking gear according to any one of claims 1-3, characterized in that the reinforcing collar and the insulating gear ring are fixedly connected by interference press fit.

6. The spark prevention gear as claimed in any one of claims 1 to 3, wherein the insulating gear ring is provided with one or more second fixing holes penetrating through the insulating gear ring in the radial direction of the gear body, the reinforcing collar is provided with one or more third fixing holes matching with the second fixing holes in the radial direction of the gear body, and the insulating gear ring and the reinforcing collar are further fixedly connected through one or more second fixing pieces, one or more second fixing holes, and one or more third fixing holes.

7. The spark prevention gear according to any one of claims 1 to 3, wherein the inner wall of the reinforcing collar is provided with a gear key groove, and the gear key groove penetrates through the reinforcing collar along the axial direction of the gear body.

8. An anti-sparking gear according to any one of claims 1-3, characterized in that the insulating gear ring is made of nylon and the reinforcing collar is made of stainless steel.

9. A magnetron sputtering coating apparatus comprising the sparking prevention gear according to any one of claims 1 to 8.

10. The magnetron sputtering coating device according to claim 9, further comprising: the device comprises a servo motor, a speed reducer, a synchronous toothed belt, a synchronous belt wheel, a rotating mechanism bearing seat, a planetary magnetron, a high-voltage insulating cover and a high-voltage insulating base;