CN110762127A - Bearing support vibration reduction structure suitable for molecular pump - Google Patents

Bearing support vibration reduction structure suitable for molecular pump Download PDF

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Publication number
CN110762127A
CN110762127A CN201911027935.8A CN201911027935A CN110762127A CN 110762127 A CN110762127 A CN 110762127A CN 201911027935 A CN201911027935 A CN 201911027935A CN 110762127 A CN110762127 A CN 110762127A
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CN
China
Prior art keywords
bearing
ring
damping
vibration
axial
Prior art date
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Pending
Application number
CN201911027935.8A
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Chinese (zh)
Inventor
黄涛
徐晓辉
景加荣
张延顺
黄佳荣
吴晓鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI YUDA INDUSTRIAL Co Ltd
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SHANGHAI YUDA INDUSTRIAL Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN201911027935.8A priority Critical patent/CN110762127A/en
Publication of CN110762127A publication Critical patent/CN110762127A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/05Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056Bearings
    • F04D29/059Roller bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/02Selection of particular materials
    • F04D29/023Selection of particular materials especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/05Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056Bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07Fixing them on the shaft or housing with interposition of an element
    • F16C35/077Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/08Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal

Abstract

The invention provides a bearing support vibration damping structure suitable for a molecular pump, which comprises a bearing base, a radial damping ring, a bearing, an axial vibration damping ring, a steel ball, a fastener and a cover plate, wherein a bearing installation space is arranged in the bearing base; one or more mounting holes are formed in the axial vibration damping ring, and the steel balls are arranged in the mounting holes. The invention is provided with the radial damping ring and the axial damping ring, the axial damping ring is provided with the limiting steel ball, the bearing can be prevented from axially moving, the axial and radial directions have very good damping effect, the heat conducting performance is good, and the invention has the advantages of simple and compact structure, low cost, high shafting rotation precision, high reliability, long service life and the like.

Description

Bearing support vibration reduction structure suitable for molecular pump
Technical Field
The invention relates to the field of vacuum obtaining equipment, in particular to a bearing support vibration reduction structure suitable for a molecular pump.
Background
The molecular pump is used as a vacuum obtaining device, the working rotating speed of the molecular pump is generally up to tens of thousands of revolutions per minute, and the molecular pump is a high-rotating-speed and high-precision device. The residual unbalance after the dynamic balance of the high-speed rotor can cause the molecular pump to vibrate during the high-speed operation. The wear of the bearing is aggravated by the vibration generated in the case of high-speed operation, and in addition, the bearing generates heat in the case of high-speed operation, which causes a malfunction thereof, and the life thereof is greatly reduced.
At present, in the prior art, elastic elements such as O-rings and the like are generally arranged between an outer ring of a bearing and the bearing to realize vibration reduction, but the heat dissipation of the elastic elements such as the O-rings and the like in a vacuum environment is poor; the bearing generally realizes vibration reduction through a spring and the like, has few contact surfaces, poor heat conduction effect, no limit function and poor reliability.
Patent document No. CN207868911U discloses a vibration reduction structure for a motor end cover bearing, which relates to the technical field of motors and solves the technical problem of reducing the operation noise and vibration of the motor. This structure includes the bearing room, bearing holding chamber has been seted up on the bearing room, is equipped with rotor bearing in the bearing holding chamber, annular damping packing ring has been put to rotor bearing's the coaxial cover in right part to the chamber wall in rotor bearing and bearing holding chamber all with damping packing ring tight fit, the right edge of damping packing ring is tightly supported rotor bearing's right-hand member face after inwards buckling, is fixed with annular apron on the bearing room, and this apron lays with the damping packing ring is coaxial to tightly push down damping packing ring's right-hand member face, leave the clearance between rotor bearing's outer peripheral face left part and the chamber wall in bearing holding chamber. The utility model provides a structure can reduce motor operation noise and vibration, but this scheme is not suitable for vacuum environment, and the damping packing ring is poor at vacuum environment radiating effect.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide a bearing support vibration damping structure suitable for a molecular pump.
The bearing support vibration attenuation structure suitable for the molecular pump comprises a bearing base, a radial damping ring, a bearing, an axial vibration attenuation ring, a steel ball, a fastener and a cover plate,
a bearing installation space is arranged in the bearing base, the bearing is installed in the bearing installation space, a radial damping ring is arranged between the bearing outer ring and the bearing base, the bearing inner ring is connected with the main shaft, the bearing base is connected with the cover plate through a fastener, a through hole for the main shaft to pass through is formed in the middle of the cover plate, and an axial damping ring is arranged between the cover plate and the bearing base;
one or more mounting holes are formed in the axial vibration damping ring, and the steel balls are arranged in the mounting holes.
Preferably, the bearing base is provided with a groove for mounting the radial damping ring on the inner wall of the bearing mounting space.
Preferably, the bearing is an interference fit with the radial damping ring.
Preferably, an annular groove is formed in the cover plate, and the axial damping ring is arranged in the annular groove.
Preferably, the axial vibration reduction ring and the bearing are coaxially arranged, the diameter of the bearing installation space is matched with that of the bearing, the diameter of the inner ring of the axial vibration reduction ring is smaller than that of the bearing installation space, and the diameter of the outer ring of the axial vibration reduction ring is larger than that of the bearing installation space.
Preferably, the steel balls are uniformly distributed in the circumferential direction of the axial damping ring.
Preferably, the radial damping ring and the axial damping ring are made of viscoelastic heat conduction materials.
Preferably, the radial damping ring and the axial damping ring are made of butadiene-acrylonitrile rubber and silver powder in a mixing mode, and the heat conductivity is larger than 40W/(m.K).
Preferably, the steel ball is made of GCr 15; the cover plate is made of grey cast iron nickel plating.
Preferably, the fastener is a vibration reduction screw.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the plurality of viscoelastic high-heat-conductivity rubber rings are arranged between the bearing base and the bearing outer ring and above and/or below the bearing, and the plurality of limiting steel balls are arranged on the axial vibration reduction ring, so that the bearing can be prevented from axially jumping, the axial vibration reduction ring and the radial vibration reduction ring have very good vibration reduction effects, and have good heat conduction performance, and the bearing has the advantages of simple and compact structure, low cost, high shafting rotation precision, high reliability, long service life and the like.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of the present invention.
The figures show that:
Figure BDA0002246700830000031
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The bearing support vibration damping structure suitable for the molecular pump has good vibration damping effect in the axial direction and the radial direction, has good heat conducting performance and limiting effect, and has the advantages of simple and compact structure, low cost, high shafting rotation precision, high reliability, long service life and the like.
According to the bearing support vibration attenuation structure suitable for the molecular pump, as shown in fig. 1, the bearing support vibration attenuation structure comprises a bearing base 1, a radial damping ring 2, a bearing 3, an axial vibration attenuation ring 4, a steel ball 6, a fastener 7 and a cover plate 8, wherein a bearing installation space is arranged inside the bearing base 1, the bearing 3 is installed in the bearing installation space, the radial damping ring 2 is arranged between the outer ring of the bearing 3 and the bearing base 1, the inner ring of the bearing 3 is connected with a spindle 5, the bearing base 1 is connected with the cover plate 8 through the fastener 7, a through hole for the spindle 5 to pass through is formed in the middle of the cover plate 8, and the axial vibration attenuation ring 4 is arranged between the cover plate 8 and; one or more mounting holes are formed in the axial vibration damping ring 4, and the steel ball 6 is arranged in the mounting holes. The bearing base 1 is provided with a groove for mounting the radial damping ring 2 on the inner wall of the bearing mounting space. The bearing 3 is in interference fit with the radial damping ring 2. An annular groove is formed in the cover plate 8, and the axial vibration reduction ring 4 is arranged in the annular groove. The axial vibration reduction ring 4 and the bearing 3 are coaxially arranged, the diameter of the bearing installation space is matched with that of the bearing 3, the diameter of the inner ring of the axial vibration reduction ring 4 is smaller than that of the bearing installation space, and the diameter of the outer ring of the axial vibration reduction ring 4 is larger than that of the bearing installation space. The steel balls 6 are uniformly distributed on the circumferential direction of the axial vibration damping ring 4. The radial damping ring 2 and the axial damping ring 4 are made of viscoelastic heat conduction materials. The radial damping ring 2 and the axial damping ring 4 are made of butadiene-acrylonitrile rubber and silver powder which are mixed according to a certain proportion, and the thermal conductivity is more than 40W/(m.K). The steel ball 6 is made of GCr 15; the cover plate 8 is made of grey cast iron through nickel plating. The fastening piece 7 adopts a damping screw.
The invention provides a bearing vibration reduction supporting structure of a molecular pump, relates to the field of vacuum equipment, and is applied to ultrahigh-speed rotating machinery such as a molecular pump. The damping device comprises a bearing base 1, a radial damping ring 2, a bearing 3, an axial damping ring 4, a main shaft 5, a steel ball 6, a screw and a cover plate 8. The radial damping ring 2 is arranged between the bearing base 1 and the outer ring of the bearing 3, and the radial damping ring 2 is made of a viscoelastic high-thermal-conductivity special material and has good vibration attenuation and thermal conduction effects; the axial vibration damping ring 4 is arranged between the bearing base 1 and the cover plate 8 and is positioned above or below the bearing 3; the axial vibration damping ring 4 is circumferentially provided with a plurality of small holes for placing the steel balls 6, and the axial vibration damping ring 4 is made of a viscoelastic high-heat-conductivity special material and has good vibration damping and heat conducting effects; the steel ball is made of GCr15 (high carbon chromium alloy steel), so that the bearing 3 can be prevented from axially shifting and has a limiting effect; the cover plate 8 is provided with a groove for placing the axial vibration damping ring 4, and the cover plate 8 is made of grey cast iron nickel plating and used for fixing the axial vibration damping ring 4. According to the invention, the plurality of viscoelastic high-heat-conductivity special rubber rings are arranged between the bearing base 1 and the outer 3 rings of the bearing, above or below the bearing, and the axial vibration damping ring 4 is provided with the plurality of limiting steel balls, so that the defects of the existing structure can be overcome, the axial vibration damping ring and the radial vibration damping ring have very good vibration damping effects, and have good heat conductivity, and the invention has the advantages of simple and compact structure, low cost, high shafting rotation precision, high reliability, long service life and the like.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.

Claims (10)

1. A bearing support vibration attenuation structure suitable for a molecular pump is characterized by comprising a bearing base (1), a radial damping ring (2), a bearing (3), an axial vibration attenuation ring (4), a steel ball (6), a fastener (7) and a cover plate (8),
a bearing installation space is arranged in the bearing base (1), the bearing (3) is installed in the bearing installation space, a radial damping ring (2) is arranged between the outer ring of the bearing (3) and the bearing base (1), the inner ring of the bearing (3) is connected with the main shaft (5), the bearing base (1) is connected with a cover plate (8) through a fastener (7), a through hole for the main shaft (5) to pass through is formed in the middle of the cover plate (8), and an axial vibration damping ring (4) is arranged between the cover plate (8) and the bearing base (1);
one or more mounting holes are formed in the axial vibration reduction ring (4), and the steel ball (6) is arranged in the mounting holes.
2. Bearing support vibration-damping structure suitable for molecular pumps according to claim 1 characterized in that the bearing base (1) is provided with a groove for mounting a radial damping ring (2) on the inner wall of the bearing mounting space.
3. Bearing support vibration-damping structure suitable for molecular pumps according to claim 1, characterized in that said bearing (3) is interference fitted with a radial damping ring (2).
4. Bearing support and vibration damping structure for molecular pumps according to claim 1, characterized in that said cover plate (8) is provided with an annular groove in which the axial vibration damping ring (4) is arranged.
5. The bearing support vibration damping structure suitable for a molecular pump according to claim 1, wherein the axial vibration damping ring (4) is coaxially arranged with the bearing (3), the diameter of the bearing installation space is matched with that of the bearing (3), the diameter of the inner ring of the axial vibration damping ring (4) is smaller than that of the bearing installation space, and the diameter of the outer ring of the axial vibration damping ring (4) is larger than that of the bearing installation space.
6. Bearing support vibration-damping structure suitable for molecular pumps according to claim 1, characterized in that said steel balls (6) are uniformly distributed in the circumferential direction of the axial vibration-damping ring (4).
7. The bearing support vibration-damping structure suitable for molecular pump according to claim 1, characterized in that the radial damping rings (2) and the axial vibration-damping rings (4) are made of viscoelastic heat-conducting material.
8. The bearing supporting and vibration damping structure suitable for the molecular pump according to claim 1, wherein the radial damping rings (2) and the axial damping rings (4) are made of a mixture of butadiene-acrylonitrile rubber and silver powder, and the thermal conductivity is more than 40W/(m-K).
9. Bearing support vibration-damping structure suitable for molecular pumps according to claim 1, characterized in that said steel balls (6) are made with GCr 15; the cover plate (8) is made of grey cast iron nickel plating.
10. Bearing support vibration-damping structure suitable for molecular pumps according to claim 1, characterized in that said fasteners (7) employ vibration-damping screws.
CN201911027935.8A 2019-10-24 2019-10-24 Bearing support vibration reduction structure suitable for molecular pump Pending CN110762127A (en)

Priority Applications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111799927A (en) * 2020-07-17 2020-10-20 珠海格力电器股份有限公司 Rotating shaft supporting and protecting structure, magnetic suspension bearing supporting system and motor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2434317Y (en) * 2000-08-16 2001-06-13 无锡纺织机械专件厂 INtegrated false twister bearing
CN201318338Y (en) * 2008-11-05 2009-09-30 北京中科科仪技术发展有限责任公司 Shafting damping structure used for turbomolecular pump
CN101608637A (en) * 2009-07-23 2009-12-23 北京中科科仪技术发展有限责任公司 A kind of bearing component of molecular pump
CN204476836U (en) * 2015-02-11 2015-07-15 中国工程物理研究院机械制造工艺研究所 A kind of turbo-molecular pump bearing bracket
CN205605484U (en) * 2016-04-12 2016-09-28 成都舒派博真空技术有限公司 Vertical molecular pump upper bearing damping structure with dual damping function
CN207868911U (en) * 2018-02-06 2018-09-14 上海川也电机有限公司 Electric motor end cap bearing vibration-proof structure
CN109578509A (en) * 2018-12-12 2019-04-05 中国北方发动机研究所(天津) A kind of bearing arrangement

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2434317Y (en) * 2000-08-16 2001-06-13 无锡纺织机械专件厂 INtegrated false twister bearing
CN201318338Y (en) * 2008-11-05 2009-09-30 北京中科科仪技术发展有限责任公司 Shafting damping structure used for turbomolecular pump
CN101608637A (en) * 2009-07-23 2009-12-23 北京中科科仪技术发展有限责任公司 A kind of bearing component of molecular pump
CN204476836U (en) * 2015-02-11 2015-07-15 中国工程物理研究院机械制造工艺研究所 A kind of turbo-molecular pump bearing bracket
CN205605484U (en) * 2016-04-12 2016-09-28 成都舒派博真空技术有限公司 Vertical molecular pump upper bearing damping structure with dual damping function
CN207868911U (en) * 2018-02-06 2018-09-14 上海川也电机有限公司 Electric motor end cap bearing vibration-proof structure
CN109578509A (en) * 2018-12-12 2019-04-05 中国北方发动机研究所(天津) A kind of bearing arrangement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111799927A (en) * 2020-07-17 2020-10-20 珠海格力电器股份有限公司 Rotating shaft supporting and protecting structure, magnetic suspension bearing supporting system and motor
CN111799927B (en) * 2020-07-17 2023-03-24 珠海格力电器股份有限公司 Rotating shaft supporting and protecting structure, magnetic suspension bearing supporting system and motor

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Application publication date: 20200207

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