CN201318338Y - Shafting damping structure used for turbomolecular pump - Google Patents

Shafting damping structure used for turbomolecular pump Download PDF

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Publication number
CN201318338Y
CN201318338Y CNU2008201771270U CN200820177127U CN201318338Y CN 201318338 Y CN201318338 Y CN 201318338Y CN U2008201771270 U CNU2008201771270 U CN U2008201771270U CN 200820177127 U CN200820177127 U CN 200820177127U CN 201318338 Y CN201318338 Y CN 201318338Y
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CN
China
Prior art keywords
vibration damping
damping
damping structure
axial
bearing sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2008201771270U
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Chinese (zh)
Inventor
邹蒙
李明月
范斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING KYKY TECHNOLOGY DEVELOPMENT Co Ltd
Original Assignee
BEIJING KYKY TECHNOLOGY DEVELOPMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING KYKY TECHNOLOGY DEVELOPMENT Co Ltd filed Critical BEIJING KYKY TECHNOLOGY DEVELOPMENT Co Ltd
Priority to CNU2008201771270U priority Critical patent/CN201318338Y/en
Application granted granted Critical
Publication of CN201318338Y publication Critical patent/CN201318338Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a shafting damping structure used for a turbomolecular pump, and relates to the filed of liquid equipment. The damping structure is characterized in that a bearing is sleeved with a bearing sleeve; and both ends of the sleeve are provided with damping structures. The structure is simple and compact, an O-shaped rubber ring is used for radial damping, and an axial damping pad adopts a component which is pressed by a rectangular cross section rubber ring or metal with rubber. The damping structure can cover the shortages of existing damping structures, has good damping property, can realize good radial and axial damping, and is a novel structure which is easy to processing and manufacturing.

Description

A kind of axle that is applied to turbomolecular pump is a vibration damping structure
Technical field
The present invention relates to the fluid device field, is a kind of structure invention of pumping equipment, and more particularly, the present invention is that a kind of axle that is used for turbomolecular pump is a vibration damping structure.
Background technique
In pumping equipment, molecular pump is a kind of high rotating speed, high-precision vacuum pump.Because the imbalance of high speed rotating part, factors such as part foozle cause molecular pump can produce vibration in operation process.These vibrations can aggravate bearing wear, reduce the use of molecular pump and receive a mandate, even cause that structural fatigue destroys, and therefore will reduce the vibration of molecular pump as much as possible.At present, the bearing vibration damping of turbomolecular pump generally uses the rubber ring of circular cross-section or rectangular cross-section to be enclosed within the outside of bearing, to reach the radially purpose of vibration damping.Its advantage is manufacturing and installs all more convenient.In the axial general spring damping structure of using, the shortcoming of this structure is to overcome the surface of contact friction that axial vibration causes and the vibration and the noise of generation effectively.
Summary of the invention
The objective of the invention is to,, design a kind of existing favorable damping performance, be convenient to the new structure of manufacturing again at the deficiency of existing vibration damping structure.This structure can realize good radial and axial vibration damping.
The objective of the invention is to be achieved through the following technical solutions:
Place a bearing sleeve in the outside of molecular pump two bearings, the fluting of two ends up and down of bearing sleeve, also can with part that bearing sleeve matches on slot; Radially vibration isolation rubber circle is installed in the groove, and cushion rubber can be circular cross-section or rectangular cross-section; While, to damping pad, the axial vibration damping pad can have various ways in the one or both ends of bearing sleeve installation shaft.Because this class formation has radial and axial vibration-damping function simultaneously, effectiveness in vibration suppression is good.Directly contact because of bearing again, rather than contact, so heat-conducting property improves a lot with the rubber phase of poor thermal conductivity with bearing sleeve.
Here for two examples, one is that the axial vibration damping pad is the rectangular rubber circle; Another is that the axial vibration damping pad is the assembly that rubber and stamped metal form.
Description of drawings
The present invention will be described below in conjunction with accompanying drawing, wherein:
Fig. 1 is traditional vibration damping structure sectional drawing.
Fig. 2 is first kind of vibration damping structure sectional drawing.
Fig. 3 is the partial enlarged drawing of first kind of vibration damping structure.
Fig. 4 is second kind of vibration damping structure sectional drawing.
Fig. 5 is second kind of axial vibration damping pad detail drawing in the vibration damping structure.
Reference character is expressed as among the figure: 1 '-traditional radially vibration damping cushion rubber, 1-bearing sleeve, 2-be the vibration damping cushion rubber radially, 3-axial vibration damping pad, 4-metal body, 5-rubber body.
Embodiment
Fig. 1 is traditional vibration damping structure, does not have bearing sleeve in traditional vibration damping structure, and radially vibration damping cushion rubber 1 ' is directly installed on the outside of bearing, is axially using spring to come vibration damping.
Fig. 2 is first kind of vibration damping structure, and this damping pad is the rectangular rubber circle.Bearing is positioned on the bearing sleeve 1 by other devices, and the two ends of bearing sleeve 1 are opened rectangle groove and placed radially vibration damping cushion rubber 2.
Fig. 3 describes the bathtub construction at this axial vibration damping cushion rubber place in detail, and this groove is formed by two dovetail grooves merging of splitting, and top dovetail groove is opened on the part above the bearing sleeve 1; Below dovetail groove open bearing sleeve 1 and with its on the part that radially matches.Use this flute profile that the axial vibration damping cushion rubber was accurately located, can be its radial deformation slot milling again.Wherein, top axial vibration damping cushion rubber has damping effect to the vibration that makes progress, and following axial vibration damping cushion rubber has damping effect to downward vibration, so must two uses together.
Fig. 4 is second kind of vibration damping structure, and bearing is positioned on the bearing sleeve 1 by other devices, and rectangle groove is opened to place vibration damping structure in the two ends of bearing sleeve 1.This axial vibration damping pad 3 is the assembly that rubber and stamped metal form.
Fig. 5 describes the structure of this damping pad in detail, and 3 pairs on this axial vibration damping pad both direction up and down all has damping effect, so, can only use in a side.

Claims (4)

1. a kind of axle that is applied to turbomolecular pump is a vibration damping structure, it is characterized by and place a bearing sleeve outside two bearings of molecular pump, at the two ends of bearing sleeve vibration damping structure is set.
2. vibration damping structure according to claim 1 is characterized by at the two ends of sleeve fluting, or with part that sleeve matches on slot, place radially vibration isolation rubber circle and axial vibration damping pad in the groove.
3. vibration damping structure according to claim 2, it is characterized by radially, the cross section of vibration isolation rubber circle can be circular or square.
4. vibration damping structure according to claim 2, it is characterized by the axial vibration damping pad can be the rectangular cross-section rubber ring or the assembly of metal and rubber compacting.
CNU2008201771270U 2008-11-05 2008-11-05 Shafting damping structure used for turbomolecular pump Expired - Fee Related CN201318338Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008201771270U CN201318338Y (en) 2008-11-05 2008-11-05 Shafting damping structure used for turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008201771270U CN201318338Y (en) 2008-11-05 2008-11-05 Shafting damping structure used for turbomolecular pump

Publications (1)

Publication Number Publication Date
CN201318338Y true CN201318338Y (en) 2009-09-30

Family

ID=41197103

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2008201771270U Expired - Fee Related CN201318338Y (en) 2008-11-05 2008-11-05 Shafting damping structure used for turbomolecular pump

Country Status (1)

Country Link
CN (1) CN201318338Y (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103644145A (en) * 2013-12-04 2014-03-19 江苏大学 Hot water circulating pump suspension body of coiler cooling structure
CN103671221A (en) * 2012-09-10 2014-03-26 刘大刚 Elastic supporting fan
CN108167219A (en) * 2017-11-21 2018-06-15 上海裕达实业有限公司 A kind of high speed shafting structure of grease lubrication molecular pump
CN110762127A (en) * 2019-10-24 2020-02-07 上海裕达实业有限公司 Bearing support vibration reduction structure suitable for molecular pump
CN111432940A (en) * 2017-09-29 2020-07-17 Efc系统股份有限公司 Rotary coating atomizer with vibration-damping air bearing

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103671221A (en) * 2012-09-10 2014-03-26 刘大刚 Elastic supporting fan
CN103644145A (en) * 2013-12-04 2014-03-19 江苏大学 Hot water circulating pump suspension body of coiler cooling structure
CN103644145B (en) * 2013-12-04 2016-01-27 江苏大学 A kind of hot water circulating pump suspension body of coil pipe cooling structure
CN111432940A (en) * 2017-09-29 2020-07-17 Efc系统股份有限公司 Rotary coating atomizer with vibration-damping air bearing
CN108167219A (en) * 2017-11-21 2018-06-15 上海裕达实业有限公司 A kind of high speed shafting structure of grease lubrication molecular pump
CN110762127A (en) * 2019-10-24 2020-02-07 上海裕达实业有限公司 Bearing support vibration reduction structure suitable for molecular pump

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090930

Termination date: 20141105

EXPY Termination of patent right or utility model