CN110745612B

CN110745612B - Winding system

Info

Publication number: CN110745612B
Application number: CN201810820660.2A
Authority: CN
Inventors: 陈立国
Original assignee: Hongyi Technology Co ltd
Current assignee: Hongyi Technology Co.,Ltd.
Priority date: 2018-07-24
Filing date: 2018-07-24
Publication date: 2021-05-14
Anticipated expiration: 2038-07-24
Also published as: CN110745612A

Abstract

The present application relates to a winding system that is mounted on a mounting surface and includes a fixed end, a first movable end and a second movable end. The first moving end comprises an unreeling chamber and an unreeling mechanism arranged in the unreeling chamber. And a first bevel opening is formed in the cavity of the unreeling chamber and corresponds to the mounting surface. The second moving end comprises a winding chamber and a winding mechanism arranged in the winding chamber. And a second bevel opening is formed in the cavity of the winding chamber and corresponds to the mounting surface. The fixed end includes a process chamber. And a first interface and a second interface which correspond to the first bevel opening and the second bevel opening respectively are arranged on the cavity of the process chamber. The process chamber is detachably and hermetically connected with the unreeling chamber through the first bevel opening and the first interface. The process chamber and the winding chamber are detachably connected with the second interface in a sealing mode through the second bevel opening. The application provides a winding system is convenient for load and uninstallation coiled material, and equipment reliability is high, has improved production efficiency greatly.

Description

Winding system

Technical Field

The application relates to the technical field of coating, in particular to a winding system.

Background

The vacuum coating mode is a coating mode generally adopted from scientific research to production. The vacuum coating method includes various methods such as Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD). When the flexible substrate is subjected to vacuum coating, a roll-to-roll (roll-to-roll) method may be adopted for coating, and a winding device including an unwinding mechanism and a winding mechanism is generally required to be added in a coating system.

Some coating plants fix the winding device inside the coating chamber, but this arrangement makes the loading and unloading of the coil difficult. In addition, some coating equipment also connects a winding device with a movable door, and the winding device can move out of the coating chamber along with the opening of the movable door, however, the winding device is easy to vibrate in the moving process, and the safety and reliability are low.

Disclosure of Invention

In view of this, there is a need for a winding system that is easy and safe to load and unload the coil.

A winding system mounted on a mounting surface, comprising:

a first mobile terminal comprising:

the unwinding chamber is provided with a first inclined plane which is obliquely arranged relative to the mounting surface, and a first opening is formed in the first inclined plane;

the unwinding mechanism is arranged in the unwinding chamber;

a second mobile terminal comprising:

the cavity of the winding chamber is provided with a second inclined surface which is obliquely arranged relative to the mounting surface, and a second opening is formed in the second inclined surface;

the unwinding mechanism is arranged in the unwinding chamber;

the fixed end comprises a process chamber, two ends of the process chamber are respectively provided with a first interface and a second interface corresponding to the first opening and the second opening,

the process chamber and the unreeling chamber are detachably and hermetically connected through the first bevel opening and the first interface, and the process chamber and the reeling chamber are detachably and hermetically connected through the second bevel opening and the second interface.

In one embodiment, the cavity of the process chamber is provided with a third inclined surface which is obliquely arranged relative to the mounting surface, and the first interface is opened on the third inclined surface; and/or the cavity of the process chamber is provided with a fourth inclined surface which is obliquely arranged relative to the mounting surface, and the second interface is arranged on the fourth inclined surface.

In one embodiment, the third inclined surface and the first inclined surface are arranged in parallel; and/or the fourth inclined surface and the second inclined surface are arranged in parallel.

In one embodiment, the first inclined surface has an inclination of 30 ° to 60 ° with respect to the mounting surface; and/or the second slope has an inclination of 30 ° to 60 ° with respect to the mounting surface.

In one embodiment, the first inclined surface and the second inclined surface have the same inclination with respect to the mounting surface, the first opening and the second opening have the same shape and size, and the position of the first opening on the first inclined surface corresponds to the position of the second opening on the second inclined surface.

In one embodiment, the unwinding chamber and/or the winding chamber has a cavity in the shape of a right triangular prism, and the first inclined surface and/or the second inclined surface are inclined surfaces of the right triangular prism.

In one embodiment, the unwinding chamber and the winding chamber are respectively disposed at two ends of the process chamber, which are opposite to each other along a first direction, and the first bevel and the second bevel are inclined towards the first direction.

In one embodiment, the winding system further comprises:

the first moving mechanism is connected with the first moving end and used for driving the first moving end to move towards or away from the fixed end along the first direction; and

and the second moving mechanism is connected with the second moving end and used for driving the second moving end to move along the direction of the fixed end towards or away from the first direction.

In one embodiment, the first mobile terminal further includes: the first deviation correcting mechanism is arranged in the unwinding chamber, is connected with the unwinding mechanism and is used for driving the unwinding mechanism to move along the axial direction of a through scroll of the unwinding mechanism; and/or the second mobile terminal further comprises: and the second deviation rectifying mechanism is arranged in the winding chamber, is connected with the winding mechanism and is used for driving the winding mechanism to move along the axial direction of the reel penetrating shaft of the winding mechanism.

In one embodiment, the first moving end further includes a first offset detector disposed in the unwinding chamber, and/or the second moving end further includes a second offset detector disposed in the winding chamber.

In one embodiment, the process chamber is a physical vapor deposition coating chamber or a chemical vapor deposition coating chamber.

In one embodiment, the winding system includes N fixed ends, N +1 first moving ends, and N +1 second moving ends, where N is an integer greater than or equal to 1.

In one embodiment, the winding system further comprises:

the first guide rails are arranged in parallel at intervals, each first guide rail is correspondingly provided with a group of fixed ends, a first moving end and a second moving end, and the first moving end and the second moving end can move towards or away from the fixed ends along the first guide rails; and

and the two second guide rails are respectively arranged at two ends of the N first guide rails, are respectively crossed and communicated with the N first guide rails, and are respectively provided with one first moving end and one second moving end.

In one embodiment, the first guide rail is disposed along the first direction, and the second guide rail is disposed along a second direction perpendicular to the first direction.

According to the winding system, the winding mechanism and the unwinding mechanism are respectively arranged on the two moving ends, so that the overall weight of each moving end is reduced; the winding mechanism and the unwinding mechanism are respectively accommodated in the cavity to move, and the cavity can play a role in supporting the winding mechanism and the unwinding mechanism, so that the safety and reliability of the equipment in the moving process are improved; by arranging the process chamber at the fixed end, the processing environment in the process chamber is more stable, and the processing precision of the film substrate is more accurate; by providing the chamber with a ramp having an opening, the loading and unloading of the coil (e.g. in a lifting manner) can be performed from the opening of the ramp, which makes the loading and unloading of the coil easier. The winding system provided by the application has the advantages of simple structure, easiness in realization, high safety and reliability, convenience in material replacement and maintenance, and capability of shortening the material replacement time, thereby improving the production efficiency.

Drawings

FIG. 1 is a schematic view of a winding system according to an embodiment of the present disclosure;

fig. 2 is a schematic perspective view of an unwinding chamber according to an embodiment of the present application;

FIG. 3 is a schematic view of a winding system according to another embodiment of the present application;

FIG. 4 is a schematic view of a winding system according to another embodiment of the present application;

fig. 5 is a schematic structural diagram of a winding system including N +1 first moving ends, N fixed ends, and N +1 second moving ends according to an embodiment of the present disclosure.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is further described in detail below by way of embodiments and with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

Referring to fig. 1, the present application provides a winding system 40, wherein the winding system 40 includes a fixed end 400 and a first movable end 300 and a second movable end 500 respectively disposed at two ends of the fixed end 400.

The first moving end 300 includes an unwinding chamber 310 and an unwinding mechanism 320 disposed in the unwinding chamber 310. Referring to fig. 2, the cavity of the unwinding chamber 310 has a first inclined surface 312 inclined relative to the mounting surface 20 of the winding system, and the first inclined surface 312 is provided with a first opening. The second moving end 500 includes a winding chamber 510 and a winding mechanism 520 disposed in the winding chamber 510. The cavity of the winding chamber 510 has a second inclined surface 512 inclined with respect to the mounting surface 20 of the winding system, and a second opening is opened on the second inclined surface 512.

The fixture 400 includes a process chamber 410. A first interface and a second interface corresponding to the first opening and the second opening respectively are disposed on the cavity of the process chamber 410. The process chamber 410 is detachably and hermetically connected with the unwinding chamber 310 through the first opening and the first interface. The process chamber 410 and the rolling chamber 510 are detachably and hermetically connected with the second interface through the second opening.

The mounting surface 20 is referred to herein as a flat surface, such as a floor, for mounting the winding system. The web of material described herein may be formed from a film substrate by winding. The film substrate may include metal film substrates and non-metal film substrates such as copper foil, aluminum foil, stainless steel foil, alloy foil, polyethylene terephthalate (PET) film, Polyethylene (PE) film, Polyamide (PA) film, various composite films, and the like.

According to the winding system, the winding mechanism and the unwinding mechanism are respectively arranged on the two moving ends, so that the overall weight of each moving end is reduced; the winding mechanism and the unwinding mechanism are respectively accommodated in the cavity to move, and the cavity can play a role in supporting the winding mechanism and the unwinding mechanism, so that the safety and reliability of the equipment in the moving process are improved; by arranging the process chamber at the fixed end, the processing environment in the process chamber is more stable, and the processing precision of the film substrate is more accurate; by arranging the inclined plane with the opening on the cavity, the loading and unloading (for example, in a hoisting mode) of the coiled material can be carried out from the opening of the inclined plane, and the loading and unloading of the coiled material are easier. The winding system provided by the application has the advantages of simple structure, easiness in realization, high safety and reliability, convenience in material replacement and maintenance, and capability of shortening the material replacement time, thereby improving the production efficiency.

The first opening may be detachably and hermetically connected to the first port, so that the unreeling chamber 310 and the process chamber 410 are detachably and hermetically connected. The second opening can be detachably and hermetically connected with the second interface, so that the detachable and hermetic connection between the rolling chamber 510 and the process chamber 410 is realized. In an embodiment, the first opening and/or the second opening may be sealingly connected to the first port and/or the second port, respectively, by a flange.

The cavity of the process chamber 410 may have a third inclined surface 411 disposed obliquely with respect to the mounting surface 20. The first interface may be formed on the third slope 411. The cavity of the process chamber 410 may further have a fourth bevel 412 disposed obliquely with respect to the mounting surface 20. The second interface may be formed on the fourth inclined surface 412. Through the first interface and/or the second interface disposed on the third inclined surface 411 and/or the fourth inclined surface 412, maintenance of equipment in the process chamber 410, such as replacement of a target and cleaning of the inside, may be more conveniently performed. In an embodiment, the first inclined surface 312 and the third inclined surface 411 may be disposed in parallel. The second inclined surface 512 and the fourth inclined surface 412 may be disposed in parallel. By arranging the inclined plane of the movable end and the inclined plane of the fixed end in parallel, the first movable end 300 and/or the second movable end 500 and the fixed end 400 can be quickly and effectively connected in a detachable and sealed manner.

In one embodiment, the inclination α of the first inclined surface 312 with respect to the mounting surface 20 is 30 ° to 60 °. In one embodiment, the inclination γ of the second inclined surface 512 with respect to the mounting surface 20 is 30 ° to 60 °. By setting the inclination α and/or the inclination γ to 30 ° to 60 °, the unwinding mechanism 320 and/or the winding mechanism 520 in the unwinding chamber 310 and/or the winding chamber 510 may be better exposed from the opening of the slope, and the loading and unloading of the coil 10 may be more conveniently performed, for example, the coil 10 may be loaded and unloaded in a lifting manner.

In an embodiment, the inclination α may be the same as the inclination γ. The first opening and the second opening may be the same in shape and size. The position of the first opening on the first slope 312 may correspond to the position of the second opening on the second slope 512. The inclination β of the third inclined surface 411 with respect to the mounting surface 20 may be the same as the inclination δ of the fourth inclined surface 412 with respect to the mounting surface 20. The first and second interfaces may be identical in shape and size. The first and second ports may be symmetrically disposed at both ends of the process chamber 410. The first opening can be detachably connected with the first interface in a sealing mode, and can also be detachably connected with the second interface in a sealing mode. The second opening can be detachably connected with the second interface in a sealing mode, and can also be detachably connected with the first interface in a sealing mode. The connection positions of the first movable end 300 and the second movable end 500 on the fixed end 400 can be interchanged, after the interchange positions are changed, the second movable end 500 can be unreeled, and the first movable end 300 can be reeled, so that the installation form of the winding system can be more flexible. The first port and the second port may also be identical in shape, size and inclination. It is understood that the cavity shapes of the unwinding chamber 310 and the winding chamber 510 may be identical, so that the unwinding chamber 310 and the winding chamber 510 may be symmetrically disposed at both ends of the process chamber 410. It is understood that the inner structures of the unwinding chamber 310 and the winding chamber 510 may be identical, that is, the first moving end 300 and the second moving end 500 may be identical.

The cavity of the unwinding chamber 310 and/or the winding chamber 510 may be triangular prism. The cavity of the triangular prism body is firmer in structure and safer. The cavity of the unwinding chamber 310 and/or the winding chamber 510 may also be shaped as a right-angled triangular prism, so that a larger space is available for accommodation and more secure and safe. The first slope 312 or the second slope 512 may be a slope of the right triangular prism.

Both ends of the process chamber 410 may be respectively matched with the shapes of the unwinding chamber 310 and the winding chamber 510. After the unreeling chamber 310 and the reeling chamber 510 are respectively connected with the process chamber 410, the whole cavity of the reeling system is a cuboid. For example, the cavity of the process chamber 410 may be a hexahedron having an inverted trapezoidal shape.

It is understood that the unwinding chamber 310 and the winding chamber 510 may be disposed at two opposite ends of the process chamber 410 along a first direction, respectively. The first inclined surface 312 and the second inclined surface 512 may be inclined toward the first direction, so that the first movable end 300 and the second movable end 500 may be more conveniently attached to and detached from the fixed end 400. The first direction may be parallel to the mounting surface 20.

The winding system 40 may further include a first moving mechanism 600 and/or a second moving mechanism 700. The first moving mechanism 600 and/or the second moving mechanism 700 may be connected to the first moving end 300 and/or the second moving end 500, respectively, for driving the first moving end 300 and/or the second moving end 500 to move toward or away from the fixed end 400. In an embodiment, the first moving mechanism 600 and/or the second moving mechanism 700 may be connected to the unwinding chamber 310 and/or the winding chamber 510, respectively, for moving the unwinding chamber 310 and/or the winding chamber 510 to move in a direction approaching to or moving away from the process chamber 410. The first moving mechanism 600 and/or the second moving mechanism 700 may be a moving motor.

The unwinding mechanism 320 is used for mounting a coil and unwinding the coil. The winding mechanism 520 is used for winding the unwound film substrate 10 to form a roll. The film substrate 10 can be unwound between the unwinding mechanism 320 and the winding mechanism 520 and processed in the process chamber 410. The unwinding chamber 310 may further have a first guide roller 330 disposed therein. The winding chamber 510 may further have a second guide roller 530 disposed therein. The process chamber 410 may further include an intermediate roller 430 disposed therein. After the web material is mounted on the winding mechanism 320, the film substrate 10 may be pulled out from the winding mechanism 320, sequentially pass through the first guide roller 330, the intermediate roller 430 and the second guide roller 530, and finally enter the winding chamber 510 and be wound around the winding shaft of the winding mechanism 520. The unwinding chamber 310 and/or the winding chamber 510 may further include a tension control mechanism (not shown), and after the film substrate 10 is completely threaded, the tension control mechanism may further tension the film substrate 10 disposed on a predetermined path to flatten the film substrate 10, so as to perform subsequent processes such as coating. The tension control mechanism may be connected to the unwinding mechanism 320 or the winding mechanism 520 to control the tension of the film substrate 10.

The first mobile terminal 300 and/or the second mobile terminal 500 may further include a first deviation rectification mechanism 340 and/or a second deviation rectification mechanism 540. The first deviation rectifying mechanism 340 and/or the second deviation rectifying mechanism 540 may be respectively disposed in the unwinding chamber 310 and/or the winding chamber 510 for rectifying the position of the unwound film substrate 10.

In an embodiment, the first deviation rectifying mechanism 340 may be connected to the unwinding mechanism 320, and may drive the unwinding mechanism 320 to move along an axial direction of a through reel of the unwinding mechanism 320, so as to realize a deviation rectifying function for the position of the film substrate 10. For example, the unwinding mechanism 320 may be disposed on the first deviation correcting mechanism 340.

The second deviation rectifying mechanism 540 may be connected to the winding mechanism 520 and may drive the winding mechanism 520 to move along the axial direction of the winding shaft of the winding mechanism 520, so as to realize the deviation rectifying function of the position of the film substrate 10. For example, the take-up mechanism 520 may be placed on the second deviation rectification mechanism 540.

The winding system 40 may further include a first deviation correcting motor and/or a second deviation correcting motor, which are respectively connected to the first deviation correcting mechanism 340 and/or the second deviation correcting mechanism 540, and are configured to drive the first deviation correcting mechanism 340 and/or the second deviation correcting mechanism 540 to move along an axial direction of the through-winding shaft of the unwinding mechanism 320 and/or the winding mechanism 520. The first deviation correcting motor and/or the second deviation correcting motor can be respectively arranged outside the unreeling chamber 310 and/or the reeling chamber 320.

The winding system 40 may further include an offset sensor for detecting whether the film substrate 10 is offset. The offset sensor may be disposed in the winding chamber 310, the unwinding chamber 510 and/or the process chamber 410 and located near the transfer path of the film substrate 10. In an embodiment, a first offset sensor 350 and/or a second offset sensor 550 may be further disposed in the winding chamber 310 and/or the unwinding chamber 510, and the first offset sensor 350 and/or the second offset sensor 550 may be used in cooperation with the first deviation correcting mechanism 340 and/or the second deviation correcting mechanism 540, respectively, to accurately position the film substrate 10 on the predetermined transmission path.

The process chamber 410 may be a vacuum process chamber or a non-vacuum process chamber. When the process chamber 410 is a vacuum process chamber, a vacuum chamber may be formed by connecting the unwinding chamber 310, the process chamber 410 and the winding chamber 420. In one embodiment, the process chamber 410 is a vacuum coating chamber, such as any one of a PVD coating chamber or a CVD coating chamber. The process chamber 410 may further include a coating mechanism 420 for coating the film substrate 10.

Referring to fig. 1, in an embodiment, the coating mechanism 420 may be an evaporation mechanism. The evaporation mechanism may include an evaporation source. The evaporation source may be disposed opposite to the film base 10 so as to coat the film base 10 with a film.

Referring to fig. 3, in another embodiment, the coating mechanism 420 may be a magnetron sputtering mechanism. The magnetron sputtering mechanism may include a heated roller 421 and an ion source 422. The film substrate 10 may pass over the surface of the heated roller 421 to heat the film substrate 10. The ion source 422 may be disposed on a side of the film substrate 10 away from the heating roller 241, and is opposite to and spaced apart from the film substrate 10, so as to perform a film coating on the film substrate 10.

Referring to fig. 4, in another embodiment, the coating mechanism 420 may be a CVD coating mechanism. The CVD coating mechanism may include a discharge electrode pair consisting of a first electrode 423 and a second electrode 424. The film substrate 10 can pass through the space between the first electrode 423 and the second electrode 424, the first electrode 423 and the second electrode 424 ionize the introduced gas molecules or liquid molecules after being electrified, and the generated material is deposited on the film substrate 10 for film coating.

It is understood that the coating mechanism 420 is not limited to the above-mentioned mechanisms, and may be other coating mechanisms, such as a plasma coating mechanism. The process chamber 410 is not limited to be provided with a coating mechanism, and other process mechanisms, such as a plasma cleaning mechanism, etc., may be provided.

Referring to fig. 5, in an embodiment, the winding system 40 may include N fixed ends 400, N +1 first moving ends 300, and N +1 second moving ends 500, where N is an integer greater than or equal to 1. The N +1 first mobile terminals 300 may all be the same. The N +1 second mobile terminals 500 may all be the same. The same or different processes may be independently performed in the process chambers 410 of the N fixing terminals 400, for example, the same or different coating mechanisms 420 may be independently disposed in the N process chambers 410, or the same coating mechanism 420 may be disposed in the N process chambers 410, but the gas introduced into the N process chambers 410 is different, so that different layers may be coated on the film substrate 10. By arranging a plurality of the first moving terminals 300 and the second moving terminals 500, when N of the first moving terminals 300 and N of the second moving terminals 500 work on line, a roll material to be processed can be loaded on the N +1 th first moving terminal 300 on line, or a roll material which has been processed can be unloaded from the N +1 th second moving terminal 500 on line, so that the production efficiency can be further improved.

In an embodiment, the winding system 40 may further include N first guide rails 800 and two second guide rails 900 arranged in parallel and spaced apart. Each first guide rail 800 is correspondingly provided with a set of the fixed end 400, the first movable end 300 and the second movable end 500 can be followed the first guide rail 800 moves towards or away from the direction of the fixed end 400. The two second guide rails 900 are respectively disposed at two ends of the N first guide rails 800, and respectively intersect and communicate with the N first guide rails 800. One first moving end 300 and one second moving end 500 may be respectively disposed on the two second guide rails 900. By doing so, the (N + 1) th first moving end 300 or the (N + 1) th second moving end 500 can reach any one of the process chambers 410 to change the web and unload the web in time.

In one embodiment, the first guide rail 800 may be disposed along the first direction. The second guide rail 900 may be disposed in a second direction perpendicular to the first direction, which is simpler and easier to control the moving end.

In an embodiment, the winding system 40 may be configured to execute different process procedures on the film substrate 10, specifically, each set of the fixed end 400, the first moving end 300, and the second moving end 500 forms a set of process devices, and N sets of process devices sequentially execute different process procedures, and after the previous set of process devices completes a process procedure, the second moving end 500 of the previous set of process devices may be moved to the next set of process devices to be used as the first moving end 300, that is, the winding chamber 510 of the previous set of process devices may be directly used as the unwinding chamber 310 of the next set of process devices, so that the roll material processed by the previous set of process devices may directly enter the next set of process devices to continue the process without being unloaded and loaded, thereby greatly improving the process flow. It is understood that the different process procedures herein may refer to different process methods, such as magnetron sputtering coating by the former process device and thermal evaporation coating by the latter process device, or may refer to different process conditions, such as magnetron sputtering coating, but different gases are introduced into the former process device and the latter process device, so as to form different film layers on the film substrate.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A winding system for mounting on a mounting surface (20), comprising:

a first mobile end (300) comprising:

the unwinding device comprises an unwinding chamber (310), wherein a cavity of the unwinding chamber (310) is provided with a first inclined surface (312) which is obliquely arranged relative to the mounting surface (20), and a first opening is formed in the first inclined surface (312);

the unwinding mechanism (320) is arranged in the unwinding chamber (310);

a second mobile terminal (500) comprising:

the winding chamber (510), a cavity of the winding chamber (510) is provided with a second inclined surface (512) which is obliquely arranged relative to the mounting surface (20), and a second opening is formed in the second inclined surface (512);

a winding mechanism (520) disposed in the winding chamber (510);

a fixed end (400) comprising a process chamber (410), wherein a first interface and a second interface are respectively arranged at two ends of the process chamber (410) corresponding to the first opening and the second opening,

the process chamber (410) and the unreeling chamber (310) are detachably and hermetically connected through the first opening and the first interface, and the process chamber (410) and the reeling chamber (510) are detachably and hermetically connected through the second opening and the second interface.

2. Winding system according to claim 1,

the cavity of the process chamber (410) is provided with a third inclined surface (411) which is obliquely arranged relative to the mounting surface (20), and the first interface is arranged on the third inclined surface (411); and/or

The cavity of the process chamber (410) is provided with a fourth inclined surface (412) which is obliquely arranged relative to the mounting surface (20), and the second interface is arranged on the fourth inclined surface (412).

3. Winding system according to claim 2,

the third inclined surface (411) and the first inclined surface (312) are arranged in parallel; and/or

The fourth slope (412) and the second slope (512) are arranged in parallel.

4. Winding system according to claim 1,

the inclination of the first inclined surface (312) relative to the mounting surface (20) is 30-60 °; and/or

The second slope (512) has an inclination of 30 ° to 60 ° with respect to the mounting surface (20).

5. Winding system according to claim 1, characterized in that said first bevel (312) and said second bevel (512) have the same inclination with respect to said mounting surface (20), said first opening and said second opening have the same shape and size, and the position of said first opening on said first bevel (312) corresponds to the position of said second opening on said second bevel (512).

6. Winding system according to claim 1, characterized in that the cavity of said unwinding chamber (310) and/or said winding chamber (510) is shaped as a right triangular prism, said first bevel (312) and/or said second bevel (512) being the bevel of said right triangular prism.

7. The winding system according to any one of claims 1 to 6, wherein the unwinding chamber (310) and the winding chamber (510) are respectively disposed at two opposite ends of the process chamber (410) along a first direction, and the first slope (312) and the second slope (512) are inclined toward the first direction.

8. The winding system of claim 7, further comprising:

the first moving mechanism (600) is connected with the first moving end (300) and is used for driving the first moving end (300) to move towards or away from the fixed end (400) along the first direction; and

and the second moving mechanism (700) is connected with the second moving end (500) and is used for driving the second moving end (500) to move towards or away from the fixed end (400) along the first direction.

9. Winding system according to claim 7,

the first mobile terminal (300) further comprises:

the first deviation correcting mechanism (340) is arranged in the unwinding chamber (310), is connected with the unwinding mechanism (320), and is used for driving the unwinding mechanism (320) to move along the axial direction of a through reel of the unwinding mechanism (320); and/or

The second mobile terminal (500) further comprises:

and the second deviation rectifying mechanism (540) is arranged in the winding chamber (510), is connected with the winding mechanism (520) and is used for driving the winding mechanism (520) to move along the axial direction of a winding shaft of the winding mechanism (520).

10. Winding system according to claim 9,

the first moving end (300) further comprises a first offset detector (350) arranged in the unreeling chamber (310);

and/or

The second moving end (500) further comprises a second offset detector (550) disposed in the take-up chamber (510).

11. The winding system according to claim 7, wherein the process chamber (410) is a physical vapor deposition coating chamber or a chemical vapor deposition coating chamber.

12. Winding system according to claim 7, comprising N fixed ends (400), N +1 first moving ends (300) and N +1 second moving ends (500), where N is an integer greater than or equal to 1.

13. The winding system of claim 12, further comprising:

the first guide rails (800) are arranged in parallel at intervals, each first guide rail (800) is correspondingly provided with a group of the fixed end (400), the first movable end (300) and the second movable end (500), and the first movable end (300) and the second movable end (500) can move towards or away from the fixed end (400) along the first guide rail (800); and

two second guide rails (900) respectively arranged at two ends of the N first guide rails (800), and respectively crossed and communicated with the N first guide rails (800), wherein the two second guide rails (900) are respectively provided with one first moving end (300) and one second moving end (500).

14. Spooling system as defined in claim 13, wherein the first guide rail (800) is disposed along the first direction and the second guide rail (900) is disposed along a second direction, the second direction being perpendicular to the first direction.