CN110726421A - Vacuum equipment for testing Q value of harmonic oscillator - Google Patents
Vacuum equipment for testing Q value of harmonic oscillator Download PDFInfo
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- CN110726421A CN110726421A CN201910904918.1A CN201910904918A CN110726421A CN 110726421 A CN110726421 A CN 110726421A CN 201910904918 A CN201910904918 A CN 201910904918A CN 110726421 A CN110726421 A CN 110726421A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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Abstract
The invention relates to vacuum equipment for testing a Q value of a harmonic oscillator, which comprises a backing pump, a vacuum valve, a main pump, an electrically-controlled adjustable gate valve, a vacuum container internally provided with a vacuum cavity, an electromagnetic valve, a mass flow controller and an ionization gauge, wherein the backing pump is arranged on the backing pump; the vacuum container is provided with a first exhaust interface and a second exhaust structure, and the two exhaust interfaces are respectively connected with a first exhaust branch and a second exhaust branch; the first exhaust branch is formed by connecting a backing pump and an electromagnetic valve in series through a pipeline, and the air inlet end of the electromagnetic valve is connected with the first exhaust interface through a pipeline; the second exhaust branch is formed by sequentially connecting a backing pump, a vacuum valve, a main pump and an electrically-controlled adjustable gate valve in series through a pipeline, and the air inlet end of the electrically-controlled adjustable gate valve is connected with the second exhaust interface through a pipeline; the mass flow controller and the ionization gauge are respectively connected with a controller interface and a vacuum gauge interface which are arranged on the vacuum container. The vacuum equipment can adjust and maintain the vacuum degree.
Description
Technical Field
The invention relates to the technical field of vacuum equipment, in particular to vacuum equipment for testing a Q value of a harmonic oscillator.
Background
The core part of the quartz hemispherical resonator gyroscope is a harmonic oscillator processed by fused quartz glass. The Q value of the harmonic oscillator directly influences the stability, the starting time, the power consumption, the system drift, the random drift and other characteristics of the gyroscope. The test precision of the Q value is directly related to the overall performance of the product in the processing process and the final processing stage, and the trend of the comprehensive performance of the resonant gyroscope is also determined. More importantly, only the Q value of the harmonic oscillator is accurately measured, accurate information can be provided for each process of harmonic oscillator processing, reliable data are provided for subsequent assembly and development of the gyroscope, and a good foundation is laid for processing and manufacturing the gyroscope with excellent performance.
The Q value test of the quartz harmonic oscillator is carried out in vacuum, and the error caused by air damping is far larger than the Q value result of the harmonic oscillator. The Q values tested differ by several orders of magnitude for different vacuum degrees. In a general vacuum device, the vacuum degree in a vacuum cavity is slowly changed until the limit vacuum of a system is reached, and the vacuum degree is not stopped. The harmonic oscillator Q value measured in the vacuum equipment has poor repeatability, low efficiency and less Q value information.
Through the search of the prior art, the technical scheme similar to the patent is not searched.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide vacuum equipment for testing the Q value of a harmonic oscillator, which can adjust and maintain the vacuum degree.
The above object of the present invention is achieved by the following technical solutions:
a vacuum equipment for harmonic oscillator Q value test is characterized in that: comprises a backing pump, a vacuum valve, a main pump, an electrically controlled adjustable gate valve, a vacuum container with a vacuum cavity arranged therein, an electromagnetic valve, a mass flow controller and an ionization gauge.
The vacuum container is provided with a first exhaust interface and a second exhaust structure, and the two exhaust interfaces are respectively connected with a first exhaust branch and a second exhaust branch. The first exhaust branch is formed by connecting a backing pump and an electromagnetic valve in series through a pipeline, and the air inlet end of the electromagnetic valve is connected with the first exhaust interface through a pipeline. The second exhaust branch is formed by sequentially connecting a backing pump, a vacuum valve, a main pump and an electrically-controlled adjustable gate valve in series through a pipeline, and the air inlet end of the electrically-controlled adjustable gate valve is connected with the second exhaust interface through a pipeline.
The mass flow controller and the ionization gauge are respectively connected with a controller interface and a vacuum gauge interface which are arranged on the vacuum container.
And, the backing pump adopts the oil-free dry pump, the main pump adopts oil-free air-cooled molecular pump.
Moreover, the vacuum container is made of aluminum alloy material, and the inner surface and the outer surface of the vacuum container are both subjected to anodic oxidation treatment.
The invention has the advantages and positive effects that:
1. the invention is provided with two parallel vacuumizing branches, a first exhaust branch is firstly started to carry out rough vacuum vacuumizing treatment, and a main vacuumizing pump on a second exhaust branch is simultaneously started, so that the main vacuumizing pump runs from a starting state to a stable state in the rough vacuum vacuumizing treatment process, then the first exhaust branch is switched to the second exhaust branch to carry out low vacuum vacuumizing treatment, so that the stable state in a vacuum cavity can be quickly reached, and in addition, the second exhaust branch does not run off, so that the vacuum degree in the vacuum cavity is continuously maintained.
2. According to the invention, the electric control adjustable gate valve is arranged on the pipeline connecting the main pump and the vacuum cavity, the mass flow controller is arranged on the vacuum container, and the adjustment of the inlet amount and the outlet amount is realized through the matching adjustment of the two parts, so that the adjustment of different vacuum degrees is tried, and the vacuum pump has the advantage of convenience in adjustment.
3. All be provided with the valve around the main pumper, can realize that the main shaft pump carries out the gassing operation to the vacuum cavity under the circumstances of not stall, the replacement part, has saved the start-stop time of main pumper, has improved efficiency of software testing.
4. The invention can realize the maintenance and adjustment of the vacuum degree, thereby accurately obtaining the Q values of the harmonic oscillators under different vacuum degrees.
Drawings
Fig. 1 is a schematic diagram of the connection of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following embodiments, which are illustrative only and not limiting, and the scope of the present invention is not limited thereby.
A vacuum apparatus for testing the Q value of a harmonic oscillator, please refer to fig. 1, the invention points are:
the device comprises a backing pump 1, a vacuum valve 8, a main pump 7, an electric control adjustable gate valve 6, a vacuum container 3 with a vacuum cavity arranged therein, an electromagnetic valve 2, a mass flow controller 4 and an ionization gauge 5. According to practical use requirements, the size of the vacuum cavity is 230mm multiplied by 230mm, the theoretical pumping speed of the main pump is more than 350L/s, the ultimate vacuum degree is better than 2 multiplied by 10 < -6 > Pa, the theoretical pumping speed of the backing pump is more than 4L/s, and the ultimate vacuum degree is better than 1 Pa.
The vacuum container is provided with a first exhaust interface and a second exhaust structure, and the two exhaust interfaces are respectively connected with a first exhaust branch and a second exhaust branch. The first exhaust branch is formed by connecting a backing pump and an electromagnetic valve in series through a pipeline, and the air inlet end of the electromagnetic valve is connected with the first exhaust interface through a pipeline. The second exhaust branch is formed by sequentially connecting a backing pump, a vacuum valve, a main pump and an electrically-controlled adjustable gate valve in series through a pipeline, and the air inlet end of the electrically-controlled adjustable gate valve is connected with the second exhaust interface through a pipeline.
The mass flow controller and the ionization gauge are respectively connected with a controller interface and a vacuum gauge interface which are arranged on the vacuum container. The range of the mass flow controller is 100SCCM, and the precision is +/-1.5% FS. The mass flow controller is used for inputting external air into a vacuum cavity of the vacuum container and is matched with the second exhaust branch to realize the adjustment of the vacuum degree in the vacuum container. The ionization gauge is used for detecting the gas pressure in the vacuum cavity and realizing the detection of the vacuum degree.
In the above structure, considering the cleaning requirement of the harmonic oscillator, the pre-pump preferably adopts an oil-free dry pump, and the main pump preferably adopts an oil-free air-cooled molecular pump.
In the above structure, the vacuum vessel is made of an aluminum alloy material, and both the inner and outer surfaces of the vacuum vessel are subjected to anodic oxidation treatment. Has the advantages of portability and convenient processing.
The working principle of the vacuum equipment for testing the Q value of the harmonic oscillator is as follows:
after a harmonic oscillator to be detected is placed in a vacuum cavity, firstly, a backing pump and an electromagnetic valve are started, rough vacuum pumping is carried out through a first exhaust branch, a main shaft pump is started in the rough vacuum pumping process, vacuum valves and an electrically-controlled adjustable gate valve in front of and behind the main pump are in a closed state, when the gas pressure in the vacuum cavity reaches 5Pa, and the main pump runs in a stable state, the vacuum valves and the electrically-controlled adjustable gate valve are started, the electromagnetic valve is closed, the first exhaust branch is cut off, a second exhaust branch is connected, low vacuum pumping is carried out through the second exhaust branch, and the vacuum degree of the vacuum cavity quickly reaches a stable state; when the vacuum degree needs to be adjusted, the positions of the mass flow controller and the gate valve are adjusted to realize the adjustment of different vacuum degrees. The table one below is a combination of parameters for adjusting the vacuum.
Table-vacuum degree regulating parameter
| Plugboard valve position | Mass flow controller | Degree of vacuum (Pa) |
| 650 | 0 | 5E-04 |
| 455 | 0 | 9E-04 |
| 420 | 0 | 1E-03 |
| 247 | 0 | 4E-03 |
| 705 | 0.2 | 7E-03 |
| 800 | 0.5 | 1E-02 |
| 525 | 1 | 3E-02 |
| 500 | 20 | 5E-01 |
| 310 | 40 | 5E+00 |
Although the embodiments of the present invention and the accompanying drawings are disclosed for illustrative purposes, those skilled in the art will appreciate that: various substitutions, changes and modifications are possible without departing from the spirit and scope of the invention and the appended claims, and therefore the scope of the invention is not limited to the disclosure of the embodiments and the accompanying drawings.
Claims (3)
1. A vacuum equipment for harmonic oscillator Q value test is characterized in that: the device comprises a backing pump, a vacuum valve, a main pump, an electrically controlled adjustable gate valve, a vacuum container with a vacuum cavity arranged therein, an electromagnetic valve, a mass flow controller and an ionization gauge;
the vacuum container is provided with a first exhaust interface and a second exhaust structure, and the two exhaust interfaces are respectively connected with a first exhaust branch and a second exhaust branch. The first exhaust branch is formed by connecting a backing pump and an electromagnetic valve in series through a pipeline, and the air inlet end of the electromagnetic valve is connected with the first exhaust interface through a pipeline. The second exhaust branch is formed by sequentially connecting a backing pump, a vacuum valve, a main pump and an electrically-controlled adjustable gate valve in series through a pipeline, and the air inlet end of the electrically-controlled adjustable gate valve is connected with the second exhaust interface through a pipeline;
the mass flow controller and the ionization gauge are respectively connected with a controller interface and a vacuum gauge interface which are arranged on the vacuum container.
2. The vacuum apparatus for Q-value testing of harmonic oscillators of claim 1, wherein: the backing pump adopts an oil-free dry pump, and the main pump adopts an oil-free air-cooled molecular pump.
3. The vacuum apparatus for Q-value testing of harmonic oscillators of claim 1, wherein: the vacuum container is made of aluminum alloy materials, and the inner surface and the outer surface of the vacuum container are both subjected to anodic oxidation treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910904918.1A CN110726421A (en) | 2019-09-24 | 2019-09-24 | Vacuum equipment for testing Q value of harmonic oscillator |
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| CN201910904918.1A CN110726421A (en) | 2019-09-24 | 2019-09-24 | Vacuum equipment for testing Q value of harmonic oscillator |
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| CN201910904918.1A Pending CN110726421A (en) | 2019-09-24 | 2019-09-24 | Vacuum equipment for testing Q value of harmonic oscillator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112269116A (en) * | 2020-09-25 | 2021-01-26 | 华东光电集成器件研究所 | Method for testing vacuum packaging performance of integrated circuit tube shell level |
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| CN202039121U (en) * | 2011-03-31 | 2011-11-16 | 苏州凡特真空溅镀科技有限公司 | Device capable of quickly achieving high vacuum |
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| TW201347262A (en) * | 2012-03-27 | 2013-11-16 | Panasonic Corp | Method for evacuating vacuum chamber, vacuum device, method for forming organic film, method for manufacturing organic el element, organic el display panel, organic el display device, organic el light emitting device, and method for detecting impurities |
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2019
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| JP2009030595A (en) * | 2007-06-26 | 2009-02-12 | Mitsutoyo Corp | Vacuum-exhaust device and vacuum-exhaust method |
| CN201121208Y (en) * | 2007-11-05 | 2008-09-24 | 苏贵方 | Air extractor of vacuum apparatus |
| CN201187459Y (en) * | 2008-02-03 | 2009-01-28 | 北儒精密股份有限公司 | Vacuum device with vacuum pumping device |
| CN102536735A (en) * | 2010-12-20 | 2012-07-04 | 北京卫星环境工程研究所 | Cleaning vacuum air exhaust technology for large-sized space environmental simulator |
| CN202039121U (en) * | 2011-03-31 | 2011-11-16 | 苏州凡特真空溅镀科技有限公司 | Device capable of quickly achieving high vacuum |
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| CN112269116A (en) * | 2020-09-25 | 2021-01-26 | 华东光电集成器件研究所 | Method for testing vacuum packaging performance of integrated circuit tube shell level |
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Application publication date: 20200124 |