CN110690020A - Probe card driving device and laser resistance trimming machine - Google Patents
Probe card driving device and laser resistance trimming machine Download PDFInfo
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- CN110690020A CN110690020A CN201911128192.3A CN201911128192A CN110690020A CN 110690020 A CN110690020 A CN 110690020A CN 201911128192 A CN201911128192 A CN 201911128192A CN 110690020 A CN110690020 A CN 110690020A
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- 239000000523 sample Substances 0.000 title claims abstract description 203
- 238000009966 trimming Methods 0.000 title claims abstract description 19
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 230000001174 ascending effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 208000034656 Contusions Diseases 0.000 description 1
- 208000034526 bruise Diseases 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
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Abstract
The application relates to the technical field of resistor production, in particular to a probe card driving device and a laser resistor trimming machine. The probe card driving device comprises a probe card frame, a first driving device and a protection mechanism; the driving end of the first driving device is connected with the probe card frame to drive the probe card frame to descend to a second position, so that the probe card on the probe card frame is pressed on the resistor sheet to measure the resistance value of the resistor; after the measurement is finished, the probe card frame is driven to ascend to the first position. A liftable driving end is formed at one end of the protection mechanism, and when the driving end of the protection mechanism ascends, the probe card frame can be pushed to ascend along with the liftable driving end of the protection mechanism, so that the probe card frame returns to the first position; when the first driving device can normally operate, the driving end of the protection mechanism is lowered to a low position so as not to hinder the operation of the probe card frame; when the first driving device cannot normally operate, the protection mechanism pushes the probe card frame to rise to the first position, upward supporting force is provided for the probe card frame, and therefore the probe card frame is prevented from falling and breaking the probe.
Description
Technical Field
The invention relates to the technical field of resistor production, in particular to a probe card driving device and a laser resistor trimming machine.
Background
In the resistor production industry, a probe card driving device is an important module of a laser resistor trimming machine, and when the resistance value of a resistor is adjusted by the laser resistor trimming machine, the probe card is required to be driven to lift by the driving device so as to be pressed on a resistor substrate and apply certain pressure on the resistor; however, when the driving device fails, the probe card may descend to damage the probe, thereby causing a significant economic loss.
Disclosure of Invention
The invention aims to provide a probe card driving device and a laser resistor trimming machine, which are used for protecting a probe card to a certain extent and preventing the probe card from being damaged by collision.
The invention provides a probe card driving device which comprises a probe card frame, a first driving device and a protection mechanism, wherein the first driving device comprises a first driving mechanism and a second driving mechanism; the probe card frame is used for fixing a probe card, and the driving end of the first driving device is connected with the probe card frame and used for driving the probe card frame to reciprocate between a first position and a second position; when the first driving device stops driving, the protection mechanism can drive the probe card frame to move towards the first position.
Further, the device also comprises a frame and a connecting plate; the first driving device is positioned in the rack, and a driving end of the first driving device is connected with the probe card frame through the connecting plate; the protection mechanism comprises a top plate and a second driving device; the second driving device is fixedly arranged in the rack, and a driving end of the second driving device is connected with the top plate; when the first driving device stops driving, the second driving device can drive the top plate to move, so that the top plate is abutted against the connecting plate, and the connecting plate and the probe card frame are pushed to move towards the first position.
Further, the protection mechanism further comprises an elastic piece; one end of the elastic piece is a fixed end, and the other end of the elastic piece is connected with the top plate; the resilient member is compressed when the top plate moves in a direction away from the first position.
Further, the device also comprises a guide post; one end of the guide post is connected with the top plate, and the other end of the guide post can be inserted into a guide hole formed in the rack; the elastic piece is sleeved on the guide post.
Furthermore, the device also comprises a first limit baffle and a second limit baffle which are arranged on the rack; when the probe card frame moves to the first position, the probe card frame can abut against the first limit baffle; when the probe card frame moves to the second position, the probe card frame can abut against the second limiting baffle.
The card detecting device comprises a rack, a first driving device and a second driving device, wherein the first driving device is used for driving the first driving device to rotate, the second driving device is used for driving the first driving device to rotate, and the first driving device is used for driving the first driving device to rotate.
Furthermore, the number of the elastic pieces is two, and the two elastic pieces are symmetrically distributed on two sides of the second driving device.
Further, the second driving device is a cylinder, and the elastic member is a spring.
Further, the first driving device is an audio motor.
The invention also provides a laser resistor trimming machine which comprises the probe card driving device.
Compared with the prior art, the invention has the beneficial effects that:
the probe card driving device provided by the invention comprises a probe card frame, a first driving device and a protection mechanism; the probe card for measuring the resistance value of the resistor is fixedly arranged on the probe card frame, the driving end of the first driving device is connected with the probe card frame, and the probe card frame can reciprocate between a first position and a second position along the driving direction of the first driving device under the driving of the first driving device; when the resistance value of the resistance card is adjusted through the laser resistance trimming machine, the resistance card is horizontally placed on a jig of the laser resistance trimming machine, the card detecting frame and the card detecting frame located on the card detecting frame are located above the resistance card, and the first driving device can drive the card detecting frame and the card detecting frame to lift in the vertical direction; when the first driving device drives the probe card frame to move to the second position, the probe on the probe card can be pressed on the resistor disc with certain pressure, so that the resistance value of the resistor can be measured in real time in the process of performing laser resistance adjustment on the resistor disc; after finishing one-time resistance adjustment, the probe card frame is driven by the first driving device to drive the probe card to ascend to the first position, so that the probe on the probe card is far away from the resistance card, and the first driving device can provide upward supporting force for the probe card frame, so that the probe card frame stably stays at the first position. A liftable driving end is formed at one end of the protection mechanism, and when the driving end of the protection mechanism ascends, the probe card frame can be pushed to ascend along with the driving end of the protection mechanism, so that the probe card frame and the probe card return to the first position of the resistance card far away from the lower part; when the device is used specifically, the driving end of the protection mechanism is lowered to the low position, so that the protection mechanism does not hinder the movement of the probe card frame between the first position and the second position under the driving of the first driving device; when first drive arrangement can't normally work, protection machanism can normally operate and promote the probe card frame and rise and get back to the primary importance to provide ascending holding power to the probe card frame, make the probe card frame stop steadily in primary importance department, thereby prevent that the probe card frame from dropping and breaking into the probe.
The invention also provides a laser resistor trimming machine which comprises the probe card driving device, so that the laser resistor trimming machine also has the beneficial effect of the probe card driving device.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of a probe card driving apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of the probe card driving device provided in the embodiment of the present invention with a chassis hidden;
fig. 3 is a schematic structural diagram of a second driving device of the probe card driving apparatus according to the embodiment of the present invention;
fig. 4 is a sectional view of section a-a in fig. 3.
Reference numerals:
the device comprises a probe card frame 1, a first driving device 2, a protection mechanism 3, a second driving device 31, an elastic part 32, a top plate 33, a guide column 34, a guide hole 35, a rack 4, a connecting plate 5, a first limit baffle 6, a second limit baffle 7 and a grating ruler 8.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention.
The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The probe card driving device and the laser resistor trimming machine according to some embodiments of the present application are described below with reference to fig. 1 to 4.
The application provides a probe card driving device, as shown in fig. 1 to 4, comprising a probe card frame 1, a first driving device 2 and a protection mechanism 3; the probe card frame 1 is used for fixing a probe card, and the driving end of the first driving device 2 is connected with the probe card frame 1 and used for driving the probe card frame 1 to reciprocate between a first position and a second position; when the first drive device 2 stops driving, the protection mechanism 3 can drive the probe card holder 1 to move towards the first position.
The probe card driving device comprises a probe card frame 1, a first driving device 2 and a protection mechanism 3; the probe card for measuring the resistance value of the resistor is fixedly arranged on the probe card frame 1, the driving end of the first driving device 2 is connected with the probe card frame 1, and the probe card frame 1 can reciprocate between a first position and a second position along the driving direction of the first driving device 2 under the driving of the first driving device 2; when the resistance value of the resistance card is adjusted through the laser resistance trimming machine, the resistance card is horizontally placed on a jig of the laser resistance trimming machine, the probe card frame 1 and the probe card positioned on the probe card frame 1 are positioned above the resistance card, and the first driving device 2 can drive the probe card frame 1 and the probe card to lift along the vertical direction; when the first driving device 2 drives the probe card frame 1 to move to the second position, the probe on the probe card can be pressed on the resistor chip with certain pressure, so that the resistance value of the resistor can be measured in real time in the process of performing laser resistance adjustment on the resistor chip; after the resistance adjustment for one time, the probe card frame 1 is driven by the first driving device 2 to drive the probe card to ascend to the first position, so that the probe card on the probe card is far away from the resistance card to facilitate the replacement of the resistance card, and the first driving device 2 can provide upward supporting force for the probe card frame 1 to enable the probe card frame 1 to stably stop at the first position.
A lifting driving end is formed at one end of the protection mechanism 3, when the first driving device 2 stops driving, the driving end of the protection mechanism 3 can ascend, and the probe card frame 1 is pushed to ascend along with the lifting driving end, so that the probe card frame 1 and the probe card can return to the first position of the resistance card far away from the lower part. When the probe card rack is used specifically, the driving end of the protection mechanism 3 is firstly lowered to the low position, so that the protection mechanism 3 does not interfere with the movement of the probe card rack 1 between the first position and the second position under the driving of the first driving device 2; however, the situation that the first driving device 2 cannot work normally occurs in the operation process, at this time, the first driving device 2 cannot provide a driving force and a supporting force for the reciprocating motion to the probe card frame 1, the probe card frame 1 falls downwards under the action of gravity, so that a probe on the probe card collides with a device below the probe card, the probe is damaged by collision, the probe is bent and deformed and is completely scrapped, and serious economic loss is caused; therefore, this application has set up protection machanism 3, and when first drive arrangement 2 can't normally work, protection machanism 3 can normally run and promote the probe card frame 1 and rise and get back to the primary importance to provide ascending holding power to probe card frame 1, make probe card frame 1 stop in primary importance department steadily, thereby prevent that probe card frame 1 from dropping and run into the probe.
In one embodiment of the present application, preferably, as shown in fig. 2 and 3, the probe card driving apparatus further includes a rack 4 and a connection board 5; the first driving device 2 is positioned in the rack 4, and the driving end of the first driving device 2 is connected with the probe card frame 1 through a connecting plate 5; the protection mechanism 3 comprises a top plate 33 and a second driving device 31; the second driving device 31 is fixedly arranged in the frame 4, and the driving end of the second driving device 31 is connected with the top plate 33; when the first driving device 2 stops driving, the second driving device 31 can drive the top plate 33 to move, so that the top plate 33 is abutted against the connecting plate 5, and the connecting plate 5 and the card detecting frame 1 are pushed to move to the first position.
In this embodiment, the probe card driving apparatus further includes a rack 4 and a connection board 5; the first driving device 2 is fixedly arranged in the rack 4, and the probe card frame 1 is arranged outside the rack 4 in a hanging manner and is connected with the driving end of the first driving device 2 through a connecting plate 5; the first driving device 2 can drive the connecting plate 5 to ascend and descend, so that the probe card frame 1 is driven to ascend and descend. The protection mechanism 3 includes a second driving device 31 and a top plate 33; the second driving device 31 is fixedly installed in the frame 4, and a driving end of the second driving device 31 is connected with the top plate 33 to drive the top plate 33 to lift; the top plate 33 is positioned below the connecting plate 5, and the top plate 33 is arranged in parallel with the connecting plate 5, so that in the process of lifting the top plate 33, the top plate 33 can abut against the lower part of the connecting plate 5 to provide upward driving force for the connecting plate 5 and the probe card frame 1, and the probe card frame 1 moves upward; while the second driving means 31 and the top plate 33 can also provide a stable upward supporting force to the connecting plate 5.
Specifically, when the first driving device 2 can normally operate, the second driving device 31 first drives the top plate 33 to descend, so that the second driving device 31 and the top plate 33 do not interfere with the movement of the connecting plate 5 in the process that the connecting plate 5 and the probe card holder 1 move from the first position to the second position under the action of the first driving device 2; when the first driving device 2 fails, the second driving device 31 starts to work, the second driving device 31 drives the top plate 33 to ascend, the top plate 33 abuts against the lower part of the connecting plate 5, and pushes the connecting plate 5 and the probe card frame 1 to move upwards along with the connecting plate and the probe card frame 1, so that the probe card frame 1 returns to the first position; the second drive means 31 and the top plate 33 then continue to provide upward support to the web 5 to allow the probe card holder 1 to remain stably in the first position, thereby preventing the probe card holder 1 from falling off and causing a probe impact accident when the first drive means 2 fails to operate properly.
In one embodiment of the present application, preferably, as shown in fig. 2 to 4, the protection mechanism 3 further includes an elastic member 32; one end of the elastic member 32 is a fixed end, and the other end of the elastic member 32 is connected with the top plate 33; when the top plate 33 moves to the second position, the elastic member 32 is compressed.
In this embodiment, the protection mechanism 3 further includes an elastic member 32, the elastic member 32 is fixedly disposed between the frame 4 and the top plate 33, one end of the elastic member 32 is fixedly connected to the frame 4, and the other end of the elastic member 32 is connected to the top plate 33; when the second driving device 31 drives the top plate 33 to move from the high position to the low position, the elastic member 32 will be compressed, and the elastic force of the elastic member 32 will provide an upward driving force to the top plate 33; therefore, when the first driving device 2 and the second driving device 31 cannot work normally, the elastic force of the elastic piece 32 can provide upward driving force for the connecting plate 5 and the probe card holder 1, so that the probe card holder 1 returns to the safe first position.
In one embodiment of the present application, preferably, as shown in fig. 3 and 4, the probe card driving apparatus includes a guide post 34; one end of the guide post 34 is connected with the top plate 33, and the other end of the guide post 34 can be inserted into a guide hole 35 formed in the frame 4; the elastic member 32 is sleeved on the guide post 34.
In this embodiment, the probe card driving apparatus further includes a guide pillar 34, the guide pillar 34 is disposed between the top plate 33 and the base of the rack 4 in the vertical direction; a guide hole 35 is formed in the base of the frame 4, the lower end of the guide column 34 is inserted into the guide hole 35, and the upper end of the guide column 34 is fixedly connected with the top plate 33; when the top plate 33 is lifted, the guide post 34 can be driven to lift along with the lifting, but the bottom end of the guide post 34 is always positioned in the guide hole 35, so that the guide post 34 is always positioned in the vertical direction; the elastic member 32 is sleeved outside the guide post 34, so that the elastic member 32 is not deflected, thereby ensuring that the acting force of the elastic member 32 on the top plate 33 is always in the vertical direction.
In one embodiment of the present application, preferably, as shown in fig. 1, the probe card driving apparatus further includes a first limit baffle 6 and a second limit baffle 7 disposed on the rack 4; when the probe card frame 1 moves to the first position, the probe card frame 1 can abut against the first limit baffle 6; when the probe card frame 1 moves to the second position, the probe card frame 1 can abut against the second limit baffle 7.
In this embodiment, the probe card driving device further includes a first limit baffle 6 and a second limit baffle 7 disposed on the rack 4; the first limit baffle 6 is positioned at the upper end of the rack 4, and when the probe card frame 1 moves to the first position, the upper end of the probe card frame 1 can abut against the first limit baffle 6; the second limit baffle 7 is positioned at the lower end of the rack 4, and when the probe card frame 1 moves to the second position, the lower end of the probe card frame 1 can abut against the second limit baffle 7; thereby carry out rigidity spacing through first limit baffle 6 and the second limit baffle 7 that sets up in frame 4 to probe card frame 1, further guarantee the steady motion of probe card frame 1 and probe card between primary importance and second place, ensure that probe card frame 1 can not descend to the position below the second place and take place the probe and hit the accident.
In an embodiment of the present application, preferably, as shown in fig. 1, the probe card driving apparatus further includes a grating ruler 8, the grating ruler 8 is mounted on the rack 4, the grating ruler 8 is used for measuring a moving distance of the probe card holder 1, and the grating ruler 8 is electrically connected to the first driving device 2.
In this embodiment, probe card drive device still includes grating chi 8, grating chi 8 fixed mounting is in frame 4, can measure the distance of probe card frame 1 up-and-down motion through grating chi 8 in real time to obtain the position of probe card frame 1 in real time, if when detecting resistance through the probe card, can measure whether probe card frame 1 moves to second position department under the drive of first drive arrangement 2 through grating chi 8, accomplish the back that detects, whether probe card frame 1 returns to the first position department that is located the top under the drive of first drive arrangement 2.
The grating ruler 8 is electrically connected with the first driving device 2, the position of the probe card frame 1 is measured in real time through the grating ruler 8 in the process that the first driving device 2 drives the probe card frame 1 to operate, and the measured data is fed back to a control system of the first driving device 2, so that the first driving device 2 is controlled, and the probe card frame 1 can operate to an appointed position under the driving of the first driving device 2; in the specific operation process, in the process that the first driving device 2 drives the probe card frame 1 to descend to the second position, the grating ruler 8 can measure the descending distance of the probe card frame 1 in real time, so that whether the probe card frame 1 runs to the second position is measured, the position information of the probe card frame 1 is fed back to the control system of the first driving device 2, and after the probe card frame 1 reaches the second position, the control system controls the first driving device 2 to stop, so that the probe card frame 1 stably stops at the second position, and the resistance value of the resistance card is measured; in the process of lifting the probe card holder 1 to the first position, the real-time position of the probe card holder 1 is also measured by the grating ruler 8, so as to judge whether the probe card holder 1 returns to the first position under the driving of the first driving device 2.
In one embodiment of the present application, preferably, as shown in fig. 4, the number of the elastic members 32 is two, and the two elastic members 32 are symmetrically distributed on both sides of the second driving device 31.
In this embodiment, the number of the elastic members 32 is two, and the two elastic members 32 are symmetrically distributed on two sides of the second driving device 31; specifically, the driving end of the second driving device 31 is connected to the middle of the top plate 33, and the two elastic members 32 are symmetrically distributed on two sides of the first driving device 2 and connected to two ends of the top plate 33 in the length direction, so that the elastic force of the elastic members 32 uniformly acts on the top plate 33, and the lifting movement of the top plate 33 is more stable.
In one embodiment of the present application, the first driving device 2 is preferably an audio motor, as shown in fig. 1.
In this embodiment, the first driving device 2 employs a highly reliable audio motor having a smaller volume and weight when compared with a motor of the same output power; meanwhile, the audio motor can realize stepless speed regulation without any equipment, so that the weight and the occupied space are further reduced.
Under the condition that the audio motor is normally electrified, the driving end of the audio motor can drive the connecting plate 5 and the probe card frame 1 to reciprocate between a first position and a second position; when power failure occurs, the driving end of the audio motor is reset, and the driving end of the audio motor is lowered to the position below the second position, so that the probe card frame 1 cannot be continuously provided with supporting force, and the probe card frame 1 falls down to cause a probe collision accident; this application has set up protection machanism 3, under the outage circumstances, can provide ascending thrust to connecting plate 5 through protection machanism 3, makes probe card frame 1 rise to the primary importance and stop steadily in primary importance department to the emergence of probe bruise accident has been avoided.
In one embodiment of the present application, it is preferable that the second driving means 31 is a cylinder and the elastic member 32 is a spring.
In this embodiment, the second driving device 31 is a cylinder, and the elastic member 32 is a spring; under the condition of power failure, the first driving device 2 cannot work normally, and the driving end of the first driving device 2 is reset to be below the second position; at this time, the second driving device 31 which depends on gas as a power source can still work normally, and the driving end of the second driving device 31 drives the top plate 33 and the connecting plate 5 to ascend, so that the probe card holder 1 returns to the first position, and the probe card holder 1 is prevented from falling.
When power failure and air cut-off occur simultaneously, the acting force of the driving end of the second driving device 31 on the top plate 33 disappears under the action of no air source, at the moment, the elastic force of the spring in a compressed state acts, the top plate 33 and the connecting plate 5 rise under the action of the elastic force of the spring, and the driving ends of the first driving device 2 and the second driving device 31 also move upwards under the action of external force; thereby through the elastic force of spring with probe card frame 1 upwards promote to first position department, prevent that probe card frame 1 from dropping.
The application also provides a laser resistor trimming machine which comprises the probe card driving device in any one of the embodiments.
In this embodiment, the laser resistor trimming machine includes the probe card driving device, so the laser resistor trimming machine has all the beneficial effects of the probe card driving device, and details are not repeated here.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A probe card driving device is characterized by comprising a probe card frame, a first driving device and a protection mechanism;
the probe card frame is used for fixing a probe card, and the driving end of the first driving device is connected with the probe card frame and used for driving the probe card frame to reciprocate between a first position and a second position;
when the first driving device stops driving, the protection mechanism can drive the probe card frame to move towards the first position.
2. The probe card driving apparatus of claim 1, further comprising a rack and a connection plate;
the first driving device is positioned in the rack, and a driving end of the first driving device is connected with the probe card frame through the connecting plate;
the protection mechanism comprises a top plate and a second driving device;
the second driving device is fixedly arranged in the rack, and a driving end of the second driving device is connected with the top plate;
when the first driving device stops driving, the second driving device can drive the top plate to move, so that the top plate is abutted against the connecting plate, and the connecting plate and the probe card frame are pushed to move towards the first position.
3. The probe card driving apparatus of claim 2, wherein the protection mechanism further comprises an elastic member;
one end of the elastic piece is a fixed end, and the other end of the elastic piece is connected with the top plate;
the resilient member is compressed when the top plate moves in a direction away from the first position.
4. The probe card driving apparatus of claim 3, further comprising a guide post;
one end of the guide post is connected with the top plate, and the other end of the guide post can be inserted into a guide hole formed in the rack;
the elastic piece is sleeved on the guide post.
5. The probe card driving apparatus according to claim 2, further comprising a first limit stop and a second limit stop provided on the rack;
when the probe card frame moves to the first position, the probe card frame can abut against the first limit baffle;
when the probe card frame moves to the second position, the probe card frame can abut against the second limiting baffle.
6. The probe card driving apparatus according to claim 2, further comprising a grating ruler, wherein the grating ruler is mounted on the rack, the grating ruler is used for measuring a movement distance of the probe card rack, and the grating ruler is electrically connected to the first driving device.
7. The probe card driving apparatus according to claim 3, wherein the number of the elastic members is two, and the two elastic members are symmetrically distributed on both sides of the second driving device.
8. The probe card driving apparatus of claim 3, wherein the second driving means is a cylinder, and the elastic member is a spring.
9. The probe card driving apparatus of claim 1, wherein the first driving means is an audio motor.
10. A laser resistor trimming machine comprising the probe card driving device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911128192.3A CN110690020A (en) | 2019-11-18 | 2019-11-18 | Probe card driving device and laser resistance trimming machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911128192.3A CN110690020A (en) | 2019-11-18 | 2019-11-18 | Probe card driving device and laser resistance trimming machine |
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| CN110690020A true CN110690020A (en) | 2020-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911128192.3A Pending CN110690020A (en) | 2019-11-18 | 2019-11-18 | Probe card driving device and laser resistance trimming machine |
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| CN (1) | CN110690020A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115616261A (en) * | 2022-12-15 | 2023-01-17 | 长春光华微电子设备工程中心有限公司 | Probe card assembly and probe station equipment |
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