CN110687677A - Method for manufacturing optical fiber scanner - Google Patents
Method for manufacturing optical fiber scanner Download PDFInfo
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- CN110687677A CN110687677A CN201810739486.9A CN201810739486A CN110687677A CN 110687677 A CN110687677 A CN 110687677A CN 201810739486 A CN201810739486 A CN 201810739486A CN 110687677 A CN110687677 A CN 110687677A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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Abstract
The invention discloses a manufacturing method of an optical fiber scanner, which is used for solving the technical problem of low performance of the optical fiber scanner caused by poor stability of an optical fiber in the optical fiber scanner. The method comprises the following steps: coating a conductive coating on an optical fiber to serve as an inner electrode corresponding to a piezoelectric cantilever in the optical fiber scanner; wrapping a ceramic layer on the optical fiber coated with the conductive coating along the extending direction of the optical fiber; coating a conductive coating layer as an external electrode on the ceramic layer at a designated area along the stretching direction; and applying voltage to the outer electrode and the inner electrode to polarize the partial or the whole ceramic layer.
Description
Technical Field
The invention relates to the technical field of optical fiber scanning, in particular to a manufacturing method of an optical fiber scanner.
Background
Since the volume of an imaging display system based on optical fiber scanning can be made small, it is expected that the imaging display system can be used in wearable devices such as AR (Augmented Reality) devices, VR (Virtual Reality) devices, and other display devices.
At present, an optical fiber scanner mainly comprises a light source, a piezoelectric actuator and an optical fiber, wherein an optical fiber cantilever (stripped to be a bare fiber) is fixed on the piezoelectric actuator through an adhesive and the like, and the piezoelectric actuator applies force to the optical fiber cantilever after receiving a signal, so that the optical fiber cantilever vibrates for scanning. However, the following problems may occur with this structure:
1. the optical fiber and the piezoelectric brake are fixed in an adhesive mode, the length of an adhesive optical fiber cantilever is difficult to control accurately, stress fatigue of the adhesive layer can be caused due to high-frequency vibration, and the performance of the scanner is affected due to peeling of the adhesive layer or peeling of a part of the adhesive layer easily caused by overlong working time;
2. the piezoelectric brake generally adopts a piezoelectric brake with a hollow structure, and bare fibers are fixed in the hollow of the piezoelectric brake; the larger the diameter of the hollow structure is, the more difficult the scanner swings, and more energy needs to be consumed to realize the same scanning performance, i.e. the larger the size of the piezoelectric actuator (the diameter of the tube, the wall thickness, etc.) causes the higher the driving voltage to reach the corresponding scanning range.
In summary, the optical fiber scanner in the prior art has poor stability and low performance.
Disclosure of Invention
The invention aims to provide a manufacturing method of an optical fiber scanner, which is used for solving the technical problem of low performance of the optical fiber scanner caused by poor stability of an optical fiber in the optical fiber scanner.
In order to achieve the above object, in a first aspect, the present invention provides a method of manufacturing an optical fiber scanner, including:
coating a conductive coating on an optical fiber to serve as an inner electrode corresponding to a piezoelectric cantilever in the optical fiber scanner;
wrapping a ceramic layer on the optical fiber coated with the conductive coating along the extending direction of the optical fiber;
coating a conductive coating layer as an external electrode on the ceramic layer at a designated area along the stretching direction;
and applying voltage to the outer electrode and the inner electrode to polarize the partial or the whole ceramic layer.
Optionally, wrapping a ceramic layer on the optical fiber coated with the conductive coating, including:
and extruding and forming ceramic powder to the optical fiber coated with the conductive coating along the extending direction by using a die with an extruding function to form the ceramic layer.
Optionally, before applying a voltage to the outer electrode and the inner electrode, the method further includes:
and arranging a connecting circuit on the optical fiber, wherein the connecting circuit is respectively connected with the inner electrode and the outer electrode and is used as a conductive lead of the inner electrode and the outer electrode.
Optionally, in the extending direction, a length of the conductive coating as the internal electrode is larger than a length of the ceramic layer.
Optionally, the optical fiber is a bare fiber, or an optical fiber wrapped with a coating layer and a protective sleeve; wherein the protective sleeve is a tubular structure.
Optionally, the ceramic layer is in the shape of a square tube or a round tube.
Optionally, a conductive coating is applied on the ceramic layer in a designated area along the stretching direction as an external electrode, including:
dividing the ceramic layer into a first actuating part, a separating part and a second actuating part in sequence along the extension direction;
according to the required vibration direction, coating a conductive coating on the first actuating part and the second actuating part respectively to form at least one pair of outer electrodes; wherein the first and second actuation portions correspond to different vibration directions.
Optionally, if the ceramic layer is square pipe shape, according to the vibration direction that needs, be respectively in first actuating portion with second actuating portion coating conductive coating sets up at least a pair of outer electrode, includes:
applying a conductive coating on two first outer sides, which are parallel to each other and perpendicular to the first vibration direction, comprised by the first actuating portion, and/or applying a conductive coating on two second outer sides, which are parallel to each other and perpendicular to the second vibration direction, comprised by the second conductive portion; wherein the first vibration direction intersects the second vibration direction and is perpendicular to the optical fiber.
Optionally, the ceramic shell has a thickness of [0.04mm, 1.5mm ].
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
in the embodiment of the invention, the conductive coating is coated outside the optical fiber to serve as the inner electrode, the ceramic layer is coated outside the conductive coating, and the outer electrode corresponding to the inner electrode is arranged on the ceramic layer, so that the optical fiber scanner integrally formed by the optical fiber and the piezoelectric ceramic layer is formed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise:
FIG. 1 is a flow chart of a method of manufacturing a fiber scanner according to an embodiment of the present invention;
FIGS. 2A-2B are schematic diagrams of an embodiment of a conductive coating on an optical fiber;
FIGS. 3A-3C are schematic diagrams of an embodiment of the present invention in which a conductive coating and a ceramic layer are coated on an optical fiber;
FIGS. 4A-4B are schematic structural diagrams of external electrodes disposed on a circular ceramic layer according to an embodiment of the present invention;
fig. 5A-5B are schematic structural diagrams of external electrodes disposed on a square ceramic layer according to an embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a manufacturing method of an optical fiber scanner, which can be used in scanning projection. As shown in fig. 1, the steps of the method may be described as follows:
s11: and coating a conductive coating on the optical fiber along the extension direction of the optical fiber to serve as an inner electrode corresponding to the piezoelectric cantilever of the optical fiber scanner.
In practical applications, the optical fiber is a concentric glass body consisting of a core, a cladding and a coating 3 from inside to outside. Wherein, the fiber core: the diameter of the optical fiber is usually 2.5um to 1mm at the central part of the optical fiber, and other sizes are smaller or larger to meet different use requirements. The composition of the core being high purity SiO2The refractive index of the fiber core to light is improved, and optical signals can be transmitted conveniently in a low-power-consumption mode. Cladding: around the core, a diameter of about 125um, and a composition of high purity SiO with very little dopant2Slightly lower than the refractive index of the fiber core, so that the optical signal is transmitted in the fiber core in a closed mode. Coating layer: lie in the outmost of optic fibre, including primary coat layer, buffer layer and secondary coat layer, the effect of coating is that protection optic fibre does not receive vapor erosion and mechanical scotch, increases the slight and bendability of machinery of optic fibre again simultaneously, plays the effect that prolongs optic fibre life-span, and its external diameter of optic fibre after the coating is about 1.5 mm. The bare fiber generally refers to a core having a cladding, and the cladding is coated with a reinforcing resin coating.
The optical fiber in the embodiment of the invention can be a bare fiber, such as a fiber core without a cladding; alternatively, the optical fiber may be a coated optical fiber (i.e., the structure of the core + the cladding + the coating); alternatively, the optical fiber may be an optical fiber having a coating layer and a protective sheath, and the protective sheath may be a thin tube made of a high molecular polymer material, such as a square tube or a circular tube. In addition, the protective sleeve can also be directly wrapped outside the bare fiber for use. In practice, the effect of using bare fiber is the best, and in the embodiment of the present invention, the optical fiber is mainly used as an example for description. The optical fiber is cylindrical, such as cylindrical or square cylindrical, and the embodiment of the present invention is mainly described by taking the optical fiber as a cylindrical example.
At S11, the optical fiber may be stripped to a bare fiber, and a conductive coating, which may be a metal coating (e.g., a silver coating) or other coating having conductive properties, may be applied to the bare fiber. In the embodiment of the present invention, the conductive coating is a silver coating. The silver coating with the electric conduction capability can be coated on the optical fiber by adopting electroplating or other coating processes, and the silver coating can be used as an inner electrode corresponding to the piezoelectric cantilever in the optical fiber scanner, so that the piezoelectric cantilever can be driven to vibrate by adding a corresponding driving signal to the inner electrode at the later stage.
In actual manufacturing, the bare fiber may be silvered along the extending direction of the bare fiber, and the silver coating may completely cover the surface of the bare fiber, where the silver coating corresponds to the complete inner electrode of the piezoelectric cantilever in the fiber scanner, as shown in fig. 2A, where reference numeral 10 represents the optical fiber, and the optical fiber is a cylindrical shape as an example, and reference numeral 20 represents the conductive coating (inner electrode).
Alternatively, the inner electrode may be provided in a plurality of separate portions, such as three-division, four-division, six-division, eight-division, etc., which may be set according to actual requirements, and is not particularly limited herein. As shown in fig. 2B, in order to separate the internal electrodes into 4 parts, the 4 separated parts are concentric with the optical fiber, or the 4 separated parts can be said to be concentric with the optical fiber, and the reference numerals in fig. 2B represent the same meaning as those in fig. 2A, and only 3 separated internal electrode parts can be seen in the field of view.
It should be noted that, if the optical fiber used is an optical fiber with a coating layer or a protective sheath, silver can be directly plated on the coating layer or the outer surface of the protective sheath (such as a round tube or a square tube) to serve as an inner electrode of the optical fiber scanner.
S12: the optical fiber coated with the conductive coating is wrapped with a ceramic layer along the extension direction of the optical fiber.
After plating the conductive coating on the optical fiber, the ceramic powder (containing the mixed glue) can be extruded along the silver-plated part of the bare fiber by using a die with a similar extrusion function, for example, a cylindrical or square-cylindrical ceramic layer for wrapping the optical fiber is formed; furthermore, the formed ceramic layer is processed by the conventional processes in the piezoelectric ceramic processing, such as baking, glue removal and sintering to form ceramic, so as to form a thin ceramic layer on the bare fiber, which is used as the piezoelectric cantilever of the optical fiber scanner. Alternatively, the ceramic layer may be sintered onto the silver coating to provide better integrity of the ceramic layer and the silver coating to help reduce vibration damping therebetween.
In the embodiment of the invention, the optical fiber coated with the conductive coating and the ceramic layer are integrally formed, the optical fiber is tightly embedded in the ceramic layer, the thickness of the ceramic shell can be 0.05 mm-1.5 mm, and if the silver layer is thin enough, the ceramic layer can even break through the current size limit of 0.04 mm.
The structure of the optical fiber scanner sequentially comprises from inside to outside: optical fiber, silver layer and ceramic layer. The length of the ceramic layer may be the same as the length of the conductive layer in the extending direction of the optical fiber, or the length of the ceramic layer may be smaller than the length of the conductive coating layer. The ceramic layer may be a full-circle structure coated with a conductive coating or may be a separate part comprising a plurality of insulating arrangements. For example, the ceramic layers may be separated in a four-division manner as shown in fig. 3A, where reference numeral 10 denotes an optical fiber, reference numeral 20 denotes a conductive coating (internal electrode), reference numeral 30 denotes a ceramic layer, and the separated portions of the ceramic layer are filled with an insulating material (reference numeral 50 in the drawing) therebetween, so that the ceramic layer is polarized after the conductive coating is applied thereon.
Specifically, the ceramic layer structure is a hollow circular tube or square tube structure, and the hollow portion is actually completely filled with the silver-plated optical fiber. The hollow portion of the ceramic layer has a shape corresponding to the shape of the optical fiber coated with the conductive coating. For example, if the optical fiber is a square column shape, the structure of the middle portion of the ceramic layer is a square hollow structure, or if the optical fiber is a cylindrical shape, the structure of the middle portion of the ceramic layer is a circular hollow structure. Fig. 3B and 3C are schematic views of an optical fiber wrapped with a ceramic layer, where reference numerals in fig. 3B and 3C have the same meanings as those denoted by reference numerals in fig. 3A, fig. 3B illustrates a ceramic layer as a cylindrical shape, fig. 3C illustrates a ceramic layer as a square column shape, and the length of the conductive coating layer is longer than that of the ceramic layer.
The conductive coating coated on the optical fiber is very thin, and the optical fiber and the ceramic layer are combined very tightly through processes such as extrusion forming or sintering casting. For example, if the optical fiber is cylindrical, the difference between the inner diameter of the ceramic layer and the outer diameter of the optical fiber is the thickness of the conductive coating, and if the silver coating is very thin, the inner diameter of the ceramic layer can be considered to be approximately equal to the diameter of the optical fiber.
S13: a conductive coating is applied as an external electrode on the ceramic layer in a specified region in the extending direction.
After the optical fiber is sequentially wrapped by the conductive coating and the ceramic layer, the conductive coating can be used as an inner electrode of a piezoelectric cantilever in the optical fiber scanner. Correspondingly, the outer surface of the ceramic layer can be coated with a conductive layer to be used as an outer electrode of the optical fiber scanner, and the outer electrode and the inner electrode exist correspondingly. Preferably, a ceramic layer having a uniform thickness is provided between the inner electrode and the outer electrode.
When the conductive coating is applied as the external electrodes on the ceramic layer, the conductive coating may be applied on the ceramic layer in a separated manner along the extending direction of the optical fiber to form at least one pair of external electrodes on the outer side of the ceramic layer.
As shown in fig. 4A, the ceramic layer is a circular tube, which is a cross-sectional view of the ceramic layer, in which reference numeral 10 represents an optical fiber, reference numeral 20 represents a conductive coating (inner electrode), reference numeral 30 represents a ceramic layer, reference numeral 40 represents an outer electrode, and in the figure, 4 (2 pairs) of outer electrodes are disposed on the outer side surface of the ceramic layer.
Alternatively, if the body of the ceramic layer may be a ceramic layer comprising a plurality of discrete ceramic layers (as shown in FIG. 3A above), for example, the ceramic layer is a four-part structure. Then, when the ceramic layer is coated with the conductive coating, it may be performed in accordance with the structure contained in the ceramic layer. For example, the ceramic layer has a four-division structure as shown in fig. 3A, 4 external electrodes can be formed by coating conductive coatings on 4 external sides of each part of the ceramic layer, that is, the external electrodes are coated in a four-division manner corresponding to the ceramic layer. As shown in fig. 4B, reference numeral 10 denotes an optical fiber, reference numeral 20 denotes a conductive coating (inner electrode), reference numeral 30 denotes a ceramic layer, and reference numeral 40 denotes outer electrodes, which are provided in a number corresponding to the number of outer surfaces of the ceramic layer.
In another embodiment of the present invention, in S13, when the external electrodes are disposed, the integrally formed ceramic layer may be further divided into 3 portions along the extending direction of the optical fiber, and the 3 portions are sequentially a first actuating portion, a separating portion and a second actuating portion, the optical fiber penetrates through the ceramic layer in the front-back direction, and the front end of the optical fiber penetrating through the ceramic layer may form a cantilever. The first and second actuators may correspond to different vibration directions, for example the first actuator corresponds to a first vibration direction, such as the Y-axis, and the second actuator corresponds to a second vibration direction, such as the X-axis. In practical applications, the first and second actuating portions also have different natural/vibrational frequencies.
As shown in fig. 5A, reference numeral 10 denotes an optical fiber, reference numeral 20 denotes an internal electrode, reference numeral 31 denotes a first actuation portion in a ceramic layer, reference numeral 32 denotes a separation portion in a ceramic layer, and reference numeral 33 denotes a second actuation portion in a ceramic layer. It should be noted that, for the sake of assembly convenience, the end of the ceramic layer in fig. 5A where the first actuating portion is located may further include a fixing portion (as indicated by reference numeral 34 in fig. 5B), which is not shown in fig. 5A, so that the ceramic layer can be connected with the base in the fiber scanner through the fixing portion.
When the external electrode is provided on the ceramic layer, a conductive coating may be applied to the ceramic layers of the first and second opposing actuator portions. As shown in fig. 5B, if the ceramic layer is a square tube, a first external electrode (as shown by reference numeral 301) may be formed by coating a conductive coating on two first external side surfaces, which are parallel to each other and perpendicular to the first vibration direction, included in the first actuator, and a second external electrode (as shown by reference numeral 302) may be formed by coating a conductive coating on two second external side surfaces, which are parallel to each other and perpendicular to the second vibration direction, included in the second actuator, and are opposite external side surfaces in the second actuator; the first vibration direction is intersected with the second vibration direction and is perpendicular to the optical fiber. For example, the first direction and the second direction may be directions corresponding to the Y axis and the X axis, respectively, or may be two vibration directions intersecting at other angles.
In practical manufacture, the second actuating part and the first actuating part in the optical fiber scanner are small in size, the thickness of the second actuating part and the first actuating part is about several millimeters, and the second actuating part and the first actuating part are easily damaged when a connecting piece is adopted in the interconnection process of the second actuating part and the first actuating part; in the embodiment of the invention, the optical fiber scanner is manufactured by utilizing integral forming, so that the difficulty in the manufacturing process of the ceramic layer can be greatly reduced, the manufacturing efficiency is improved, meanwhile, the disassembly and the disassembly can be prevented, the mould is integrally formed, a series of processes of subsequent scanner assembly, alignment, debugging and the like can be avoided, and the reliability and the durability of an optical fiber scanning piece are improved.
In the embodiment of the invention, the silver coating is directly plated on the optical fiber, and the diameter of the bare fiber is usually 125um, so that the ceramic layer can even break through the current 0.04mm size limit and directly coat the bare fiber by the manufacturing method provided by the invention as long as the silver layer is thin enough, so that the volume of the optical fiber scanner is reduced by nearly 3 times, and the whole optical fiber scanner reaches smaller size.
In actual manufacturing, a circuit connected to the inner/outer electrodes of the optical fiber scanner may be further disposed on the optical fiber, and the connecting circuit may be a conductive film (see reference numeral 303 in fig. 5B), a printed circuit, a wire, or the like disposed on the optical fiber by electric welding, etching, or the like. The inner and outer electrodes are connected with relevant components (such as a power supply, a processor and the like) in the optical fiber scanner through a connecting circuit, and the optical fiber scanner is provided with the connecting circuit as a conducting circuit of the inner electrode and the outer electrode so as to provide corresponding working voltage, such as driving voltage or polarization voltage and the like, for the optical fiber scanner.
If the length of the silver coating is greater than that of the ceramic layer, the part of the optical fiber close to the light source end, plated with silver and not covered with the ceramic layer can be directly connected with the connecting circuit, and meanwhile, the connecting circuit is also connected with the outer electrode, so that the subsequent inner electrode and the outer electrode can work in a matched manner, such as polarizing the ceramic layer or driving the optical fiber.
S14: and applying voltage to the external electrode and the internal electrode to partially or completely polarize the ceramic layer.
In order to impart piezoelectric properties to the ceramic layers, the ceramic layers are polarized using internal and external electrodes. When polarizing, strong voltage is applied to the inner electrode and the corresponding outer electrode, so that a strong direct current electric field is formed between the inner electrode and the outer electrode, a certain temperature and time are kept, electric domains in the ceramic layer in the strong direct current electric field are forced to be oriented and arranged along the direction of the electric field for spontaneous polarization, and after polarization treatment, the external electric field is zero.
The polarized ceramic layer has piezoelectric property, and then the integrated optical fiber and piezoelectric cantilever card are clamped by the scanner, for example, the optical fiber and piezoelectric cantilever card are fixed on a corresponding base through a fixing part to form a complete optical fiber scanner. In the working process of the optical fiber scanner, according to the scanning direction, corresponding driving signals are input to the electrodes to drive the vibration direction of the optical fiber. For example, if the inner electrode and/or the outer electrode are four-divided, the optical fiber may be vibrated along the X-axis direction by applying the driving signals to the inner electrode and the two outer electrodes in the horizontal direction, and may be vibrated along the Y-axis direction by applying the driving signals to the inner electrode and the two outer electrodes in the vertical direction.
Therefore, the integrated two-way driver can reduce the number of parts, so that the scanning process is more stable, the connecting part between the first actuating part and the second actuating part cannot be loosened due to long-time operation, and the integrated two-way driver has the advantages of convenience in volume production, quickness in manufacturing, small error, high repeatability, high yield and the like.
In the embodiment of the invention, the silver coating is plated on the optical fiber to serve as the inner electrode, the optical fiber coated with the silver coating is further wrapped with the ceramic layer, the outer electrode corresponding to the inner electrode is arranged on the ceramic layer, and the ceramic layer has piezoelectric property through polarization of the inner electrode and the outer electrode on the ceramic layer, so that the ceramic layer can be driven to drive the integrally formed optical fiber to vibrate by applying a driving signal to the electrodes, the optical fiber has good stability, and cannot fall off in the vibration process, and the performance of the optical fiber scanner is good.
In addition, because the size of the integrated optical fiber and the ceramic layer is very small, a sufficiently large scanning range can be achieved only by a very small driving voltage, and the performance of the optical fiber scanner is further improved.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
in the embodiment of the invention, the conductive coating is coated outside the optical fiber to serve as the inner electrode, the ceramic layer is coated outside the conductive coating, and the outer electrode corresponding to the inner electrode is arranged on the ceramic layer, so that the optical fiber scanner integrally formed by the optical fiber and the piezoelectric ceramic layer is formed.
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (9)
1. A method of manufacturing a fiber optic scanner, comprising:
coating a conductive coating on an optical fiber to serve as an inner electrode corresponding to a piezoelectric cantilever in the optical fiber scanner;
wrapping a ceramic layer on the optical fiber coated with the conductive coating along the extending direction of the optical fiber;
coating a conductive coating layer as an external electrode on the ceramic layer at a designated area along the stretching direction;
and applying voltage to the outer electrode and the inner electrode to polarize the partial or the whole ceramic layer.
2. The method of manufacturing according to claim 1, wherein wrapping a ceramic layer over the optical fiber coated with the conductive coating comprises:
and extruding and forming ceramic powder to the optical fiber coated with the conductive coating along the extending direction by using a die with an extruding function to form the ceramic layer.
3. The method of manufacturing according to claim 1, wherein before applying a voltage to the outer electrode and the inner electrode, the method further comprises:
and arranging a connecting circuit on the optical fiber, wherein the connecting circuit is respectively connected with the inner electrode and the outer electrode and is used as a conductive lead of the inner electrode and the outer electrode.
4. The manufacturing method according to claim 3, wherein a length of the conductive coating as the internal electrode is larger than a length of the ceramic layer in the extending direction.
5. The method of manufacturing according to any one of claims 1 to 4, wherein the optical fiber is a bare fiber, or a coated optical fiber, or a coated and protective optical fiber; wherein the protective sleeve is a tubular structure.
6. The method of claim 5, wherein the ceramic layer is in the shape of a square tube or a round tube.
7. The manufacturing method according to claim 6, wherein applying a conductive coating as an external electrode on the ceramic layer at a specified region in the stretching direction comprises:
dividing the ceramic layer into a first actuating part, a separating part and a second actuating part in sequence along the extension direction;
according to the required vibration direction, coating a conductive coating on the first actuating part and the second actuating part respectively to form at least one pair of outer electrodes; wherein the first and second actuation portions correspond to different vibration directions.
8. The method of claim 7, wherein if the ceramic layer is in a square tube shape, coating a conductive coating on the first and second actuating portions respectively according to a desired vibration direction to provide at least one pair of external electrodes comprises:
applying a conductive coating on two first outer sides, which are parallel to each other and perpendicular to the first vibration direction, comprised by the first actuating portion, and/or applying a conductive coating on two second outer sides, which are parallel to each other and perpendicular to the second vibration direction, comprised by the second conductive portion; wherein the first vibration direction intersects the second vibration direction and is perpendicular to the optical fiber.
9. The method of manufacture of claim 6, wherein the ceramic shell has a thickness of [0.04mm, 1.5mm ].
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810739486.9A CN110687677A (en) | 2018-07-06 | 2018-07-06 | Method for manufacturing optical fiber scanner |
| PCT/CN2019/094859 WO2020007358A1 (en) | 2018-07-06 | 2019-07-05 | Optical fiber scanner manufacturing method |
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| CN201810739486.9A CN110687677A (en) | 2018-07-06 | 2018-07-06 | Method for manufacturing optical fiber scanner |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458807A (en) * | 2020-06-04 | 2020-07-28 | 杭州菲柏斯科技有限公司 | Optical fiber switch |
| CN114384694A (en) * | 2020-10-21 | 2022-04-22 | 成都理想境界科技有限公司 | Scanning actuator and optical fiber scanner |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020007358A1 (en) | 2020-01-09 |
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