CN110686891A - Vacuum gate valve testing device - Google Patents

Vacuum gate valve testing device Download PDF

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Publication number
CN110686891A
CN110686891A CN201911060898.0A CN201911060898A CN110686891A CN 110686891 A CN110686891 A CN 110686891A CN 201911060898 A CN201911060898 A CN 201911060898A CN 110686891 A CN110686891 A CN 110686891A
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CN
China
Prior art keywords
vacuum gate
gate valve
box body
assembly
vacuum
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Pending
Application number
CN201911060898.0A
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Chinese (zh)
Inventor
裴莹莹
景加荣
宁远涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI YUDA INDUSTRIAL Co Ltd
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SHANGHAI YUDA INDUSTRIAL Co Ltd
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Application filed by SHANGHAI YUDA INDUSTRIAL Co Ltd filed Critical SHANGHAI YUDA INDUSTRIAL Co Ltd
Priority to CN201911060898.0A priority Critical patent/CN110686891A/en
Publication of CN110686891A publication Critical patent/CN110686891A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00Testing of machine parts
    • G01M13/003Machine valves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)

Abstract

The invention relates to a vacuum gate valve testing device in the technical field of valve testing, which comprises a box body, a power supply assembly, a circulation control assembly and a testing cover plate, wherein the box body is provided with a plurality of through holes; the power supply assembly is arranged inside or outside the box body and used for providing power supply, the circulation control assembly is arranged in the box body, and the circulation control assembly comprises a control subsystem; the box body is internally provided with an adjustable fixing mechanism, the adjustable fixing mechanism is adjusted and fixed according to the envelope sizes of vacuum gate valves to be tested with different calibers, the test cover plate is connected with the valve of the vacuum gate valve to be tested in a matching mode, and the control subsystem is connected with and controls the vacuum gate valve to be tested. The invention realizes the three-degree-of-freedom change of the fixing frame in the box body by matching the box body with the fixing frame and adjusting the position and the size of the fixing frame, is suitable for vacuum gate valves with different calibers and is used for fixing and protecting the vacuum gate valves.

Description

Vacuum gate valve testing device
Technical Field
The invention relates to the technical field of valve testing, in particular to a vacuum gate valve testing device.
Background
The vacuum valve test is one of important means for testing the performance and reliability of the vacuum valve, and particularly, when a novel valve is developed or the reliability of a product is tested, the vacuum valve test is an important link for verifying the quality of the product. Common tests of a common vacuum valve include a leakage rate test and a switch test. The leakage rate test is used for testing the basic performance of the vacuum valve, and the switch test is used for testing the reliability of the vacuum valve after being switched for multiple times. Usually, during the switch test, a leakage rate test is performed at each stage.
During the detection process, related equipment and accessories such as a leak detector, a gas source, a power supply and the like are generally required. Depending on the requirements of the test, additional equipment may be required, which requires the products to be tested to be packaged, transported, monitored in real time, and handled during the test. In the process, the valves with different types and calibers, required accessories, the replacement of places and the replacement of corollary equipment can bring inconvenience to the test of the vacuum valve.
The invention discloses a leak detection test platform of a flange and a disc-drum type vacuum sealing element and a detection method thereof, which are found by the search of the prior art, wherein the leak detection test platform comprises an upper cavity, a lower cavity and a transition cavity, a glass observation window is installed at the top of the upper cavity, a part to be detected is installed between the upper cavity and the lower cavity, a gate valve is installed between the lower cavity and the transition cavity, the bottom of the transition cavity is connected with a vacuum pumping system, an inflation pipe is communicated with one side of the upper cavity, a high vacuum valve and a pressure gauge are arranged on the inflation pipe, and are communicated with a discharge pipe and a branch communicating pipe, a discharge valve is arranged on the discharge pipe, the lower end of the branch communicating pipe is communicated with the lower cavity, the upper cavity is communicated with the transition cavity through a main communicating pipe, and the main communicating pipe and the branch. Although the invention can reduce the use cost, the invention has limited use range and is inconvenient particularly in the aspect of carrying.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a vacuum gate valve testing device.
The invention provides a vacuum gate valve testing device which comprises a box body, a power supply assembly, a circulation control assembly and a testing cover plate, wherein the box body is provided with a first opening and a second opening;
the power supply assembly is arranged inside or outside the box body and used for providing power supply, the circulation control assembly is arranged in the box body, and the circulation control assembly comprises a control subsystem;
the box body is internally provided with an adjustable fixing mechanism, the adjustable fixing mechanism is adjusted and fixed according to the envelope sizes of vacuum gate valves to be tested with different calibers, the test cover plate is connected with the valve of the vacuum gate valve to be tested in a matching mode, and the control subsystem is connected with and controls the vacuum gate valve to be tested.
In some embodiments, the adjustable fixing mechanism includes a first fixing frame and a positioning groove, the positioning groove is opened on the side wall of the box body, the first fixing frame is connected with the positioning groove through a fastening fitting, and the positioning groove extends to a certain length towards two side edges of the side wall of the box body.
In some embodiments, the positioning grooves are arranged in an array along the axial direction of the side wall of the box body.
In some embodiments, the positioning groove is cross-shaped or straight.
In some embodiments, the adjustable fixing mechanism further includes a second fixing frame connected to the first fixing frame, and the second fixing frame may extend in a direction away from the positioning groove.
In some embodiments, the vacuum plugboard further comprises a sensing assembly, the sensing assembly is installed in the box body and used for monitoring the running state of the vacuum plugboard to be tested, and the sensing assembly comprises a driving element motion in-place sensor, a valve core mechanism motion in-place sensor and a valve core motion in-place counting sensor.
In some embodiments, the sensor assembly is connected with the circulation control assembly, the sensor assembly sends the monitored running state information of the vacuum gate valve to be detected to the circulation control assembly, and the circulation control assembly sends out an alarm signal according to feedback monitoring information.
In some embodiments, the circulation control assembly further comprises an electronic display screen, and the box body is provided with a visual screen mounting groove matched with the electronic display screen.
In some embodiments, the test cover includes an outer portion, and the housing includes a test slot that fits within the outer portion.
In some embodiments, an observation hole is formed in a box cover of the box body, and the observation hole is used for observing the operation condition of the vacuum gate valve to be measured in the box body.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention realizes the three-degree-of-freedom change of the fixing frame in the box body by matching the box body with the fixing frame and adjusting the position and the size of the fixing frame, is suitable for vacuum gate valves with different calibers and is used for fixing and protecting the vacuum gate valves.
2. According to the invention, through the connection of the sensor assembly and the circulation control assembly, the real-time monitoring and alarm prompting of the abnormal state of the vacuum gate valve to be detected can be achieved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of the system components of embodiment 1 of a portable vacuum gate valve testing system according to the present invention;
FIG. 2 is an assembly view of the system of embodiment 1 of the present invention;
FIG. 3 is an internal assembly view of the system according to embodiment 1 of the present invention;
fig. 4 is a schematic structural view of a loading box body 102 in the portable adjustable box 100 according to embodiment 1 of the present invention;
fig. 5 is a schematic structural diagram of a cover 101 of the portable adjustable box 100 according to embodiment 1 of the present invention;
FIG. 6 is an assembly view of a vacuum gate valve with a smaller caliber for testing in accordance with embodiment 1 of the present invention;
FIG. 7 is a schematic view of a test lid in example 1 of the present invention;
fig. 8 is a system assembly diagram of embodiment 2 of a portable vacuum gate valve testing system of the present invention.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
As shown in fig. 1 to 8, the present invention provides a portable vacuum gate valve testing system, which comprises: the device comprises a power supply, a circulation control assembly, a portable adjustable box, a sensing assembly, a test cover plate and the like;
furthermore, in the portable vacuum gate valve testing system, the power supply mainly provides power for a driving element, a control assembly and a sensing assembly of the testing system, and has the functions of voltage transformation and electromagnetic isolation; the number of paths for supplying power is determined by the function of the system;
furthermore, in the portable vacuum gate valve testing system, the circulation control assembly comprises a circulation control subsystem, a visual screen and other assemblies, and the circulation control assembly has the functions of providing signals for the gate valve driving element and controlling the switching action and the switching time interval of the vacuum gate valve; the driving element of the vacuum gate valve can be electric, pneumatic or manual; if the gate valve is designed to be a manual driving element, the driving mechanism needs to be connected with an electric or pneumatic element when the switch test is carried out; if the gate valve is designed to be driven electrically, an electric cylinder driver needs to be connected with the circulation control assembly of the test system, and the switching signal sent by the control subsystem is matched with the driver receiving signal form; if the gate valve is designed to be pneumatically driven, the electromagnetic valve of the circulating cylinder needs to be connected with a relay of the circulating control system, and a switching signal sent by the control subsystem is matched with a signal receiving form of the relay;
further, in the above vacuum gate valve test system for portable use, the test cover plate is matched with the gate valve to be tested; the two sides of the vacuum gate valve are respectively provided with a flange, one side is a base flange, the other side is a sealing surface flange, the test cover plate is connected with the base flange of the gate valve, and the sealing connection form of the test cover plate is matched with that of the base flange of the gate valve; a connecting interface matched with the leak detector is designed on the test cover plate;
further, in the portable vacuum gate valve testing system, the adjustable portable box can be adjusted according to the envelope sizes of gate valves with different calibers; the adjustable portable box is provided with holes corresponding to two flanges of the vacuum gate valve on two opposite surfaces respectively, so that the flanges on two sides of the gate valve are exposed, the test cover plate can be connected with an external leak detector, and the running and test states of the vacuum gate valve can be observed; the adjustable portable box can be designed to be composed of plates with replaceable sizes and also can be designed to be composed of a frame with the position adjusted through sliding; the adjustable portable box can be designed to be composed of plates with replaceable sizes, and also can be designed to be composed of adjustable frames, the change of three degrees of freedom in the adjustable box is realized by adjusting the size and the position of the frames, and the adjustable portable box is suitable for vacuum gate valves with different calibers and used for fixing and protecting the vacuum gate valves;
furthermore, in the portable vacuum gate valve testing system, the sensing assembly is used for monitoring the in-place operation state of the gate valve and can have the functions of driving element in-place movement sensing, valve core mechanism in-place movement sensing, valve core in-place movement counting and the like; the sensing assembly can be designed and installed on the adjustable portable box and can be installed on the outer side of the gate valve; when the sensing assembly detects an abnormal condition, an abnormal signal can be transmitted to the circulation control assembly, so that the function of prompting an abnormal state is achieved.
Example 1
As shown in fig. 1 to 7, the present embodiment of the portable vacuum gate valve testing system according to the present invention is implemented by a design form that all components are integrated in the portable adjustable box 100, which are the portable adjustable box 100, the power supply 200, the circulation control component 300, the sensing component 400 and the testing cover 500, the object to be tested is the pneumatic vacuum gate valve 600, the driving element thereof is the pneumatic cylinder 601, and the circulation control component 300 controls the on/off of the vacuum gate valve 600 through the solenoid valve 602 controlling the pneumatic cylinder 601. The vacuum gate valve has two flanges, a sealing face flange 603 and a base flange 604. The test lid 500 is attached to the base flange 604. Wherein the switching of the vacuum gate valve 600 can be observed through the sealing surface flange 603.
Fig. 1 to 3 are schematic diagrams and assembly diagrams of the system in this embodiment, in which some parts such as fasteners, power lines and signal lines are not shown. The installation position of the related components in the portable adjustable box is determined by specific design, and in the embodiment, the positions of all the components are shown in figures 2-3.
The portable, adjustable case 100 in this embodiment has several features: a portable, adjustable case 100 is made up of two main parts, a case lid 101 and a carrying case 102. Secondly, the interior of the portable adjustable box 100 contains an adjustable position fixing frame 103, which is used for fixing vacuum gate valves with different calibers, so that the vacuum gate valve 600 is relatively stable in the portable adjustable box 100, and vibration is reduced, and the fixing frame is fixed on the side wall of the loading box body 102 of the portable adjustable box 100 through a fastening fitting 105, as shown in fig. 3. Thirdly, the side wall of the loading box body 102 comprises a positioning groove 106 for fixing, as shown in fig. 4 to 6, the width of the positioning groove 106 in the Y direction is matched with the fastening fittings 105 inside the portable adjustable box 100, and the positions are arranged in an array along the Y direction. The internal fastening fittings 105 can select proper positions for positioning according to the size of an actual test object, so that the purpose of adjusting the Y direction of the position-adjustable fixing frame 103 is achieved, and the vacuum gate valve is suitable for vacuum gate valves with different calibers; meanwhile, the positioning groove 106 has a certain length in the X direction, and the position of the internal fastening fitting 105 can be changed along the X direction, so that the purpose of adjusting the X direction is achieved, and the vacuum gate valve is suitable for vacuum gate valves with different calibers. Fourthly, the portable adjustable box 100 internally comprises an adjustable length fixing frame 104, as shown in fig. 3 and fig. 6, the adjustable length fixing frame 104 is fixed with the adjustable position fixing frame 103 through a fastening fitting 105, the coupling position of the fastening fitting 105 and the adjustable length fixing frame 104 is adjusted according to gate valves with different calibers, and meanwhile, the coupling position of the adjustable length fixing frame 104 and the adjustable position fixing frame 103 is adjusted, so that the fixing frame is changeable in the Z direction. The three-degree-of-freedom adjustability of the internal space is achieved by adjusting the position of the fixing frame inside the adjustable box 100 and by changing the size of the connecting space. The mount can select one set or multiunit, for example, when the vacuum push-pull valve bore is less, can select a set of mount, when the vacuum push-pull valve bore is great, can select two sets of or multiunit mounts, the vacuum push-pull valve of two kinds of bores all assembles two sets of mounts in this embodiment. The portable adjustable box 100 is provided with a test slot 107 and a visual screen mounting groove 108, the test slot 107 is used for extending the external coupling end 501 of the test cover plate 500, the shape of the test slot 107 can be suitable for the positions of the test cover plates of vacuum gate valves with different calibers, and the size of the visual screen mounting groove 108 is determined according to actual design requirements, as shown in fig. 4. Sixthly, a through hole 109 for observing the running condition of the internal object to be side is designed on the case cover 101 of the portable adjustable case 100, and the shape of the through hole 109 is determined according to the specific design, in the embodiment, the shape of the through hole 109 is designed to be circular, as shown in fig. 5. Fig. 2-3 are schematic diagrams illustrating the assembly of the portable vacuum gate valve test system during the test of the larger-caliber vacuum gate valve 600. Fig. 6 is a schematic view of the assembly of the portable vacuum gate valve testing system during the testing of the smaller diameter vacuum gate valve 600'.
The power supply 200 contains an external plug 201 and provides power to the drive element 602 of the vacuum gate valve, the cycle control assembly 300 and the sensing assembly 400. The power supply 200 is mounted inside or outside the portable adjustable box 100 according to the claims of the present invention. In this embodiment, the power module 200 is mounted inside the adjustable box 100.
In this embodiment, the circulation control assembly 300 has the functions of timing, counting and alarming, and the on/off of the pneumatic vacuum gate valve is controlled by the solenoid valve 602 through the on/off of the relay inside the control assembly 300. The cycle control module 300 can cumulatively calculate the total number of times the system is switched on and off at the time by the duration of the system operation. Meanwhile, the circulation control assembly 300 can also receive a feedback signal of the sensing assembly 400, send out an alarm signal and monitor whether the vacuum flashboard valve is normally opened or closed. According to specific design requirements, the circulation control assembly 300 can be additionally provided with an electronic display screen 301, and has the functions of displaying the switching times, the switching state, whether to alarm and the like of a system.
The sensing assembly 400 can detect the number of times of opening and closing by detecting the movement of the valve core inside the vacuum gate valve 600, and transmit a feedback signal to the circulation control assembly 300. When the switch feedback signal of the sensing assembly 400 is not detected within a certain timing period, the circulation control assembly 300 sends out an alarm signal.
The test cap 500 includes an outer coupling end 501 and a gate valve coupling end 502. In this embodiment, the gate valve coupling end 502 is a flange with a through hole in the middle, and is designed to match the sealing form and the coupling fastening form of the base flange 604 of the object to be measured, and the external coupling end 501 is a KF25 flange and is welded to the central hole of the gate valve coupling end 502, as shown in fig. 7. The test cover plate 500 includes different sized components suitable for use with multiple caliber vacuum gate valves.
Example 2
Fig. 8 is a schematic diagram of the system configuration of this embodiment 2. In the embodiment 2, the tested vacuum gate valve 600 adopts an electric driving mode, an electric cylinder 601 ' is used as a power driving element, and the operation of the electric cylinder 601 ' is realized by an electric motor 602 '. According to the portable vacuum gate valve testing system of the present invention, in the present embodiment, the power supply, the circulation control assembly and the driver of the object to be tested are integrated inside one external control box 300 ', which is independent from the portable adjustable box 100 ', and the sensing assembly 400 is installed inside the portable adjustable box 100 '.
In this embodiment, the external control box 300 'has the functions of timing, counting and alarming, and controls the stroke and test of the operation of the electric cylinder through the motor control signal sent out at regular time, so as to drive the motor 602' to control the switch of the electric vacuum gate valve. Meanwhile, the external control box 300' can also receive feedback signals and alarm signals of the sensing assembly 400 and monitor whether the vacuum flashboard valve is normally opened or closed. The system is also provided with a visual screen for displaying the running time and the times of the electric vacuum gate valve, and the testing requirement of the vacuum gate valve is met.
The embodiment 2 is the same as the embodiment 1 in that the vacuum gate valve 600 to be measured is electrically driven, and other aspects are the same as those of the embodiment 1 and are not described again.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

Claims (10)

1. The vacuum gate valve testing device is characterized by comprising a box body (100), a power supply assembly (200), a circulation control assembly (300) and a testing cover plate (500);
the power supply assembly (200) is mounted inside or outside the box body (100) and used for supplying power, the circulation control assembly (300) is mounted in the box body (100), and the circulation control assembly (300) comprises a control subsystem;
an adjustable fixing mechanism is arranged in the box body (100), the adjustable fixing mechanism is adjusted and fixed according to the envelope sizes of vacuum gate valves to be tested with different calibers, the test cover plate (500) is connected with the valves of the vacuum gate valves to be tested in a matched mode, and the control subsystem is connected with and controls the vacuum gate valves to be tested.
2. The vacuum gate valve testing device according to claim 1, wherein the adjustable fixing mechanism comprises a first fixing frame (103) and a positioning groove (106), the positioning groove (106) is formed in the side wall of the box body (100), the first fixing frame (103) is connected with the positioning groove (106) through a fastening fitting, and the positioning groove (106) extends to a certain length towards two side edges of the side wall of the box body (100).
3. The vacuum gate valve testing device according to claim 2, wherein a plurality of the positioning grooves (106) are arrayed along an axial direction of a side wall of the box body (100).
4. The vacuum gate valve testing device according to claim 3, characterized in that the positioning slot (106) is cross-shaped or in-line shaped.
5. The vacuum gate valve testing arrangement of claim 4, characterized in that the adjustable fixing mechanism further comprises a second fixing frame (104), the second fixing frame (104) being connected with the first fixing frame (103), the second fixing frame (104) being extendable in a direction away from the positioning slot (106).
6. The vacuum gate valve testing device according to claim 1, further comprising a sensing assembly (400), wherein the sensing assembly (400) is installed in the box body (100), the sensing assembly (400) is used for monitoring the running state of the vacuum gate to be tested, and the sensing assembly (400) comprises a driving element motion in-place sensor, a valve core mechanism motion in-place sensor and a valve core motion in-place counting sensor.
7. The vacuum gate valve testing device according to claim 6, characterized in that the sensor assembly (400) is connected with the circulation control assembly (300), the sensor assembly (400) sends monitored running state information of the vacuum gate valve to be tested to the circulation control assembly (300), and the circulation control assembly (300) sends an alarm signal according to feedback monitoring information.
8. The vacuum gate valve testing device according to claim 1, characterized in that the circulation control assembly (300) further comprises an electronic display screen (301), and the box body (100) is provided with a visual screen mounting groove (108) matched with the electronic display screen (301).
9. The vacuum gate valve testing arrangement of claim 1, wherein the test cover (500) includes an outer portion (501), and the housing (100) is provided with test slots (107) adapted to the outer portion (501).
10. The vacuum gate valve testing device according to claim 1, characterized in that an observation hole (109) is formed in a cover of the box body (100), and the observation hole (109) is used for observing the operation condition of the vacuum gate valve to be tested in the box body (100).
CN201911060898.0A 2019-11-01 2019-11-01 Vacuum gate valve testing device Pending CN110686891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911060898.0A CN110686891A (en) 2019-11-01 2019-11-01 Vacuum gate valve testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911060898.0A CN110686891A (en) 2019-11-01 2019-11-01 Vacuum gate valve testing device

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Publication number Priority date Publication date Assignee Title
CN114184372A (en) * 2021-12-07 2022-03-15 江苏佳晟动力系统有限公司 Device for vacuum test of semiconductor vacuum valve

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Publication number Priority date Publication date Assignee Title
CN114184372A (en) * 2021-12-07 2022-03-15 江苏佳晟动力系统有限公司 Device for vacuum test of semiconductor vacuum valve

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