CN110683745B - Injection molding preparation device and preparation method of chalcogenide glass micro-lens - Google Patents

Injection molding preparation device and preparation method of chalcogenide glass micro-lens Download PDF

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Publication number
CN110683745B
CN110683745B CN201910917430.2A CN201910917430A CN110683745B CN 110683745 B CN110683745 B CN 110683745B CN 201910917430 A CN201910917430 A CN 201910917430A CN 110683745 B CN110683745 B CN 110683745B
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chalcogenide glass
cavity
chamber
heating furnace
propelling
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CN110683745A (en
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张培晴
林常规
戴世勋
王训四
吴至豪
宋宝安
张巍
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Ningbo University
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Ningbo University
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/02Other methods of shaping glass by casting molten glass, e.g. injection moulding
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00Annealing glass products

Abstract

The invention discloses an injection molding preparation device of a chalcogenide glass micro lens, which comprises a vacuum cavity, an upper pushing device, a lower pushing device, an upper heating furnace, a lower heating furnace, a stainless steel sleeve, an upper mold core and a lower mold core; the injection molding preparation device of the chalcogenide glass micro-lens can quickly produce the chalcogenide glass micro-lens with small caliber in batches, and greatly reduces the preparation efficiency and the production cost of the chalcogenide glass micro-lens. The preparation method of the chalcogenide glass micro-lens implemented by the injection molding preparation device has simple steps and easy operation, can repeatedly utilize chalcogenide glass raw materials generated in the preparation process, improves the utilization rate of the raw materials, and has high similarity of the size and the shape of the prepared chalcogenide glass micro-lens and good lens quality. The preparation device and the preparation method are suitable for preparing various chalcogenide glass infrared lenses in a large scale, and are particularly suitable for preparing small-caliber mobile phone lenses and various lens elements required by infrared vehicle-mounted infrared night vision systems, infrared security systems and the like in a large scale.

Description

Injection molding preparation device and preparation method of chalcogenide glass micro-lens
Technical Field
The invention relates to the technical field of chalcogenide glass lens preparation, in particular to an injection molding preparation device and a preparation method of a chalcogenide glass micro lens.
Background
The thermal infrared imager can collect a thermal radiation distribution image of an object and convert the thermal radiation distribution image into an image visible to human eyes, and shows more and more important application in various fields such as military, industry, agriculture, medicine and the like. In recent years, with the improvement of infrared detector preparation technology and the reduction of cost, thermal infrared imagers gradually move from military use to civil markets.
The traditional thermal infrared imager generally adopts germanium single crystals as lens materials. Germanium is a scattered resource and is expensive, and germanium single crystal as a crystal can only be processed into an aspheric lens by using a single-point diamond lathe, so that the processing efficiency is low and the processing cost is high.
Chalcogenide glass is an inorganic glass containing S, Se, and Te As basic components and containing a certain amount of other elements (As, Ga, etc.) As required, and has excellent transmittance in the middle and far infrared bands (0.5 to 20 μm), and is an excellent infrared lens material. In recent years, as the price of germanium single crystal (Ge) materials has increased, chalcogenide glasses have begun to be used as alternative materials in thermal infrared imagers. Because the chalcogenide glass has lower raw material cost, and the chalcogenide glass is used as an amorphous substance, the aspheric lens can be prepared by precision forming, compared with the turning processing of germanium single crystals, the precision forming production efficiency of the chalcogenide glass is high, the chalcogenide glass is suitable for large-scale automatic production, the cost of the middle and far infrared lens is reduced, and the market of the civil middle and far infrared lens is greatly promoted, such as passive vehicle-mounted night vision, industrial monitoring, handheld thermal imagers and the like.
In recent years, attention has been paid to small-aperture imaging lenses represented by mobile phone lenses, and the market share has been increasing year by year. For the lens with small caliber, the germanium single crystal is processed by adopting the traditional diamond turning, the processing efficiency is extremely low, and a large amount of raw materials are wasted; the adoption of the precise die pressing mode for processing needs to prepare the chalcogenide glass preform with polished surface in advance, and the adoption of the single-piece die pressing mode has long manufacturing period, low processing efficiency and high processing cost.
Disclosure of Invention
The invention aims to solve the technical problem of providing a low-cost and high-efficiency injection molding preparation device and a preparation method of chalcogenide glass micro-lenses, aiming at the defects of the prior art, being suitable for preparing various chalcogenide glass infrared lenses in a large scale, and being particularly suitable for preparing various lens elements required by infrared night vision systems such as infrared vehicle-mounted and infrared security systems with small aperture in a large scale.
The technical scheme adopted by the invention for solving the technical problems is as follows: an injection molding preparation device of chalcogenide glass micro-lenses comprises a vacuum cavity, an upper propelling device, a lower propelling device, an upper heating furnace, a lower heating furnace, a stainless steel sleeve, an upper mold core and a lower mold core, wherein the side wall of the vacuum cavity is respectively provided with an air outlet and an air inlet for introducing inert gas, the air outlet is connected with a vacuum pump, the propelling speed of the upper propelling device and the propelling speed of the lower propelling device are adjustable, the upper propelling device comprises an upper propelling motor, the output end of the upper propelling motor is connected with an upper propelling rod, the bottom end of the upper propelling rod extends into the stainless steel sleeve from top to bottom, the bottom end of the upper propelling rod is fixed with a propelling pad, the lower propelling device comprises a lower propelling motor, the output end of the lower propelling motor is connected with a lower propelling rod, the top end of the lower propelling rod extends into the lower heating furnace from bottom to top, the upper heating furnace and the lower heating furnace are respectively controlled by a temperature control platform, the upper heating furnace and the lower heating furnace are arranged in the vacuum cavity from top to bottom, the inner cavity of the upper heating furnace, the inner cavity of the lower heating furnace and the inner cavity of the vacuum cavity are communicated, the stainless steel sleeve is arranged in the upper heating furnace, the bottom of the stainless steel sleeve is provided with a discharge port, the upper mold core and the lower mold core are arranged in the lower heating furnace from top to bottom, the upper mold core is fixed at the top of the lower heating furnace, the lower mold core is fixed at the top end of the lower pushing rod, the bottom of the upper mold core is provided with an upper mold cavity with an opening at the lower part, the upper mold cavity is communicated with the discharge port through a stainless steel connecting pipe, and the upper mold cavity comprises a plurality of upper sub-cavities communicated through upper runners, the top of lower mould benevolence seted up upper portion open-ended lower mould chamber, the lower mould chamber include a plurality of lower sub-chambeies that are linked together through the lower runner, a plurality of last sub-chamber with a plurality of lower sub-chamber from top to bottom one-to-one, last mould benevolence with lower mould benevolence on be provided with the air guide hole respectively, last mould benevolence with lower mould benevolence compound die after, last mould chamber with lower mould benevolence compound die, last mould chamber with lower mould chamber enclose into the injection molding die cavity of many caves promptly, the injection molding die cavity with the air guide hole be linked together.
Preferably, the middle part of the upper die cavity is provided with a central cavity, the upper end and the lower end of the stainless steel connecting pipe are respectively communicated with the discharge hole and the central cavity, and each upper sub-cavity is communicated with the central cavity through a plurality of upper runners. The design of the central cavity can ensure that the softened chalcogenide glass can be uniformly injected into each cavity of the injection molding cavity, and the consistency of the size, the shape and the quality of the prepared chalcogenide glass micro-lens is ensured.
Preferably, each upper sub-cavity and each lower sub-cavity are hemispherical or aspheric, and the diameter of each upper sub-cavity and each lower sub-cavity is 2-10 mm.
Preferably, the lower surface of the propelling pad is provided with a pressure sensor, the stainless steel sleeve and the upper die core are respectively provided with a temperature sensor, and the temperature sensors are electrically connected with the temperature control platform. The pressure sensor is convenient for reading the propelling pressure of the upper propelling device to the softened chalcogenide glass in the preparation process. The temperature sensor is used for transmitting relevant temperature data in the preparation process to the temperature control platform for operators to refer to.
Preferably, the vacuum chamber in install the baffle, the baffle with the inner chamber of vacuum chamber separate for epicoele and cavity of resorption, last heating furnace with lower heating furnace install the epicoele in, lower propulsion motor install the cavity of resorption in, last propulsion motor install the top of vacuum chamber and be located the outside of epicoele, the baffle on seted up first air vent and second air vent, cavity of resorption with lower heating furnace's inner chamber warp first air vent be linked together, cavity of resorption with the epicoele warp second air vent be linked together, the gas outlet with the epicoele communicate with each other, the air inlet with cavity of resorption communicate with each other. The design of the partition plate is convenient for the modular production of the injection molding preparation device, and the air inlet and the air outlet on the vacuum cavity are distributed in different areas, thereby being beneficial to ensuring the smooth air flow in the preparation process and ensuring the preparation effect.
Preferably, the upper part of the stainless steel sleeve is cylindrical, the lower part of the stainless steel sleeve is conical, the upper part is large, the lower part is small, and the shape and the size of the cross section of the propelling pad are matched with the shape and the size of the cross section of the inner cavity of the upper part of the stainless steel sleeve.
Preferably, the upper mold core and the lower mold core are both stainless steel mold cores, and the surfaces of the upper mold core and the lower mold core are both plated with tungsten carbide protective layers.
A preparation method of the chalcogenide glass micro-lens implemented by the injection molding preparation device comprises the following steps:
(1) preparing a chalcogenide glass block by a melt quenching method, wherein the chalcogenide glass block is cylindrical;
(2) cleaning the surface of the chalcogenide glass block body by using absolute ethyl alcohol, and putting the chalcogenide glass block body into a stainless steel sleeve after drying;
(3) vacuumizing the vacuum cavity by a vacuum pump, wherein when the vacuum degree of the vacuum cavity is lower than 10-3When Pa is needed, introducing inert compressed gas into the vacuum cavity through the gas inlet until the pressure in the vacuum cavity is the same as the external atmospheric pressure;
(4) the lower pushing motor is started, the lower die core is pushed to rise through the lower pushing rod, and the upper die core and the lower die core are matched;
(5) opening the temperature control platform and setting the temperature T of the upper heating furnace 1Is Ts<T1<TxSetting the temperature T of the lower heating furnace2Is Tg<T2<TsWherein T issIs the softening temperature, T, of chalcogenide glassxIs the crystallization temperature, T, of chalcogenide glassgThe glass transition temperature of chalcogenide glass;
(6) setting the propelling speed of an upper propelling device, starting an upper heating furnace, a lower heating furnace and an upper propelling motor, heating a stainless steel sleeve to soften a chalcogenide glass block in the stainless steel sleeve, driving a propelling pad to move downwards by the upper propelling motor, and injecting softened chalcogenide glass into an upper die cavity and a lower die cavity through a stainless steel connecting pipe;
(7) after the softened chalcogenide glass fills the injection molding cavity with multiple cavities, introducing inert compressed gas into the vacuum cavity through the gas inlet, cooling the upper mold core and the lower mold core to room temperature by air cooling, and cooling and molding the chalcogenide glass in the injection molding cavity into a semi-finished product of the molded lens;
(8) the lower pushing motor is started again, the lower die core is driven to move downwards by the lower pushing rod, the lower die core is separated from the upper die core, the semi-finished product of the molded lens in the injection molding die cavity is taken out, and the semi-finished product is placed into an annealing furnace for T3Annealing at the annealing temperature of (1) for 3-6 h, wherein T3Glass transition temperature T of glass based on chalcogenidegThe temperature is lower than 10 ℃;
(9) and taking out the annealed semi-finished product of the molded lens, and cutting to obtain a plurality of chalcogenide glass micro-lenses.
Preferably, the inert compressed gas is compressed nitrogen or compressed argon.
Preferably, the chalcogenide glass block is As2Se3Ge-As-Se or Ge-Sb-Se chalcogenide glass blocks. In addition to As2Se3The invention is also applicable to the preparation of other chalcogenide glass micro lenses.
Compared with the prior art, the invention has the following advantages: the injection molding preparation device of the chalcogenide glass micro-lens can quickly produce the chalcogenide glass micro-lens with small caliber in batches, and greatly reduces the preparation efficiency and the production cost of the chalcogenide glass micro-lens. The preparation method of the chalcogenide glass micro-lens implemented by the injection molding preparation device has simple steps and easy operation, can repeatedly utilize chalcogenide glass raw materials generated in the preparation process, improves the utilization rate of the raw materials, and has high similarity of the size and the shape of the prepared chalcogenide glass micro-lens and good lens quality. The preparation device and the preparation method are suitable for preparing various chalcogenide glass infrared lenses in a large scale, and are particularly suitable for preparing small-caliber mobile phone lenses and various lens elements required by infrared vehicle-mounted infrared night vision systems, infrared security systems and the like in a large scale.
Drawings
FIG. 1 is a schematic view showing the construction of an injection mold preparation apparatus according to an embodiment;
FIG. 2 is an enlarged view of FIG. 1 at A;
FIG. 3 is a schematic bottom view of the upper mold core in the example;
FIG. 4 is a schematic representation of the connection of a stainless steel connecting tube to the injection mold cavity in the closed embodiment.
Detailed Description
The invention is described in further detail below with reference to the accompanying examples.
Example 1: an injection molding preparation device of chalcogenide glass micro-lenses comprises a vacuum cavity 1, an upper propulsion unit, a lower propulsion unit, an upper heating furnace 4, a lower heating furnace 5, a stainless steel sleeve 6, an upper mold core 7 and a lower mold core 8, wherein the side wall of the vacuum cavity 1 is respectively provided with an air outlet 11 and an air inlet 12 for introducing inert gas, the air inlet 12 can be externally connected with a nitrogen making machine or a nitrogen storage tank (not shown in the figure), the air outlet 11 is connected with a vacuum pump 13, the propulsion speeds of the upper propulsion unit and the lower propulsion unit are adjustable, the upper propulsion unit comprises an upper propulsion motor 21, the output end of the upper propulsion motor 21 is connected with an upper propulsion rod 22, the bottom end of the upper propulsion rod 22 extends into the stainless steel sleeve 6 from top to bottom, the bottom end of the upper propulsion rod 22 is fixedly provided with a propulsion pad 23, the lower propulsion unit comprises a lower propulsion motor 31, the output end of the lower propulsion motor 31 is connected with a lower propulsion rod 32, the top end of the lower propelling rod 32 extends into the lower heating furnace 5 from bottom to top, the upper heating furnace 4 and the lower heating furnace 5 are respectively controlled by a temperature control platform (not shown in the figure), the upper heating furnace 4 and the lower heating furnace 5 are arranged in the vacuum chamber 1 from top to bottom, the inner cavity of the upper heating furnace 4, the inner cavity of the lower heating furnace 5 and the inner cavity of the vacuum chamber 1 are communicated, the stainless steel sleeve 6 is arranged in the upper heating furnace 4, the bottom of the stainless steel sleeve 6 is provided with a discharge port 61, the upper mold core 7 and the lower mold core 8 are stainless steel mold cores, the surfaces of the upper mold core 7 and the lower mold core 8 are both plated with tungsten carbide protective layers, the upper mold core 7 and the lower mold core 8 are arranged in the lower heating furnace 5 from top to bottom, the upper mold core 7 is fixed at the top of the lower heating furnace 5, the lower mold core 8 is fixed at the top end of the lower propelling rod 32, the bottom of the upper mold core 7 is provided with an upper mold cavity 71 with a lower opening, the upper mold cavity 71 is communicated with the discharge port 61 through a stainless steel connecting pipe 62, go up die cavity 71 and include 8 last sub-chambeies 72 that are linked together through runner 74, upper portion open-ended lower die cavity 81 has been seted up at the top of lower mould benevolence 8, lower die cavity 81 includes 8 lower sub-chambeies 82 that are linked together through runner 83 down, 8 go up sub-chamber 72 and 8 lower sub-chamber 82 upper and lower one-to-one, be provided with air guide hole 9 on last mould benevolence 7 and the lower mould benevolence 8 respectively, go up mould benevolence 7 and lower mould benevolence 8 compound die after, go up die cavity 71 and lower die cavity 81 and enclose into 8 injection mould die cavities 73 in cave promptly, injection mould die cavity 73 is linked together with air guide hole 9.
In the embodiment 1, the upper part of the stainless steel sleeve 6 is cylindrical, the lower part of the stainless steel sleeve 6 is conical, and the cross section of the propulsion pad 23 is matched with the cross section of the inner cavity of the upper part of the stainless steel sleeve 6; the middle part of the upper die cavity 71 is provided with a central cavity 70, the upper end and the lower end of the stainless steel connecting pipe 62 are respectively communicated with the discharge hole 61 and the central cavity 70, and each upper sub-cavity 72 is communicated with the central cavity 70 through a plurality of upper flow channels 74; each upper sub-chamber 72 and each lower sub-chamber 82 is hemispherical in shape, with each upper sub-chamber 72 and each lower sub-chamber 82 having a diameter of 5 mm.
In embodiment 1, a pressure sensor (not shown) is disposed on the lower surface of the thrust pad 23, a temperature sensor 63 is disposed on the stainless steel sleeve 6 and the upper mold core 7, respectively, and the temperature sensor 63 is electrically connected to the temperature control platform.
The injection molding apparatus for chalcogenide glass microlenses in example 2 differs from example 1 in that in example 2, a partition plate 14 is installed in a vacuum chamber 1, the partition plate 14 divides an inner cavity of the vacuum chamber 1 into an upper cavity 15 and a lower cavity 16, an upper heating furnace 4 and a lower heating furnace 5 are installed in the upper cavity 15, a lower propulsion motor 31 is installed in the lower cavity 16, an upper propulsion motor 21 is installed on the top of the vacuum chamber 1 and located outside the upper cavity 15, the partition plate 14 is provided with a first vent hole 17 and a second vent hole 18, the lower cavity 16 is communicated with the inner cavity of the lower heating furnace 5 through the first vent hole 17, the lower cavity 16 is communicated with the upper cavity through the second vent hole 18, an air outlet 11 is communicated with the upper cavity, and an air inlet 12 is communicated with the lower cavity.
Example 3: with the component As2Se3The chalcogenide glass of (1) as a raw material for producing a microlens, the glass transition temperature T of the chalcogenide glassgAt 185 ℃ and a softening temperature TsIs 205 ℃ and a crystallization temperature TxAt 390 ℃; as was prepared using the injection mold preparation apparatus of example 22Se3The method of chalcogenide glass microlenses includes the steps of:
(1) preparing a chalcogenide glass block by a melt quenching method, wherein the chalcogenide glass block is cylindrical, the diameter of the chalcogenide glass block is 50cm, and the length of the chalcogenide glass block is 10 cm;
(2) cleaning the surface of the chalcogenide glass block body by using absolute ethyl alcohol, and putting the chalcogenide glass block body into a stainless steel sleeve 6 after drying;
(3) the vacuum chamber 1 is vacuumized by a vacuum pump 13, and when the vacuum degree of the vacuum chamber 1 is lower than 10-3When Pa is needed, introducing compressed nitrogen into the vacuum cavity 1 through the air inlet 12 until the air pressure in the vacuum cavity 1 is the same as the external atmospheric pressure;
(4) the lower pushing motor 31 is started, the lower die core 8 is pushed to rise through the lower pushing rod 32, and the upper die core 7 and the lower die core 8 are closed;
(5) the temperature control stage is opened to set the temperature T of the upper heating furnace 41The temperature T of the lower heating furnace 5 was set to 250 deg.C2Is 195 ℃;
(6) setting the propelling speed of an upper propelling device, starting an upper heating furnace 4, a lower heating furnace 5 and an upper propelling motor 21, heating a stainless steel sleeve 6 to soften a chalcogenide glass block in the stainless steel sleeve 6, driving a propelling pad 23 to move downwards by the upper propelling motor 21, and injecting softened chalcogenide glass into an upper die cavity 71 and a lower die cavity 81 through a stainless steel connecting pipe 62;
(7) After the softened chalcogenide glass 10 fills the injection molding cavity 73 with 8 cavities, introducing inert compressed gas into the vacuum cavity 1 through the air inlet 12 again, cooling the upper mold core 7 and the lower mold core 8 to room temperature by air cooling, and cooling and molding the chalcogenide glass in the injection molding cavity 73 into a semi-finished molded lens;
(8) the lower pushing motor 31 is started again, the lower mold core 8 is driven to move downwards through the lower pushing rod 32, the lower mold core 8 is separated from the upper mold core 7, the semi-finished product of the molded lens in the injection mold cavity 73 is taken out, and the semi-finished product is put into an annealing furnace to be annealed for 4 hours at the annealing temperature of 170 ℃;
(9) taking out the semi-finished product of the annealed molded lens, and cutting to obtain 8 As2Se3Chalcogenide glass microlenses.
Example 4: with the component Ge10As40Se50The chalcogenide glass of (1) as a raw material for producing a microlens, the glass transition temperature T of the chalcogenide glassgAt a temperature of 225 ℃ and a softening temperature TsAt 245 ℃ and a crystallization temperature TxIs 460 ℃; preparation of Ge Using the injection Molding preparation apparatus of example 210As40Se50The method of chalcogenide glass microlenses includes the steps of:
(1) preparing a chalcogenide glass block by a melt quenching method, wherein the chalcogenide glass block is cylindrical, the diameter of the chalcogenide glass block is 30cm, and the length of the chalcogenide glass block is 10 cm;
(2) cleaning the surface of the chalcogenide glass block body by using absolute ethyl alcohol, and putting the chalcogenide glass block body into a stainless steel sleeve 6 after drying;
(3) The vacuum chamber 1 is vacuumized by a vacuum pump 13, and when the vacuum degree of the vacuum chamber 1 is lower than 10-3When Pa is needed, introducing compressed nitrogen into the vacuum cavity 1 through the air inlet 12 until the air pressure in the vacuum cavity 1 is the same as the external atmospheric pressure;
(4) the lower pushing motor 31 is started, the lower die core 8 is pushed to rise through the lower pushing rod 32, and the upper die core 7 and the lower die core 8 are closed;
(5) the temperature control stage is opened to set the temperature T of the upper heating furnace 41The temperature T of the lower heating furnace 5 was set to 285 deg.C2Is 235 ℃;
(6) setting the propelling speed of an upper propelling device, starting an upper heating furnace 4, a lower heating furnace 5 and an upper propelling motor 21, heating a stainless steel sleeve 6 to soften a chalcogenide glass block in the stainless steel sleeve 6, driving a propelling pad 23 to move downwards by the upper propelling motor 21, and injecting softened chalcogenide glass into an upper die cavity 71 and a lower die cavity 81 through a stainless steel connecting pipe 62;
(7) after the softened chalcogenide glass 10 fills the injection molding cavity 73 with 8 cavities, introducing inert compressed gas into the vacuum cavity 1 through the air inlet 12 again, cooling the upper mold core 7 and the lower mold core 8 to room temperature by air cooling, and cooling and molding the chalcogenide glass in the injection molding cavity 73 into a semi-finished molded lens;
(8) the lower pushing motor 31 is started again, the lower mold core 8 is driven to move downwards through the lower pushing rod 32, the lower mold core 8 is separated from the upper mold core 7, the semi-finished product of the molded lens in the injection mold cavity 73 is taken out, and the semi-finished product is put into an annealing furnace to be annealed for 4 hours at the annealing temperature of 210 ℃;
(9) Taking out the annealed semi-finished product of the molded lens, and cutting to obtain 8 Ge sheets10As40Se50Chalcogenide glass microlenses.
Example 5: with the component Ge28Sb12Se60The chalcogenide glass of (1) as a raw material for producing a microlens, the glass transition temperature T of the chalcogenide glassgAt 285 ℃ and a softening temperature TsAt 305 ℃ and a crystallization temperature TxIs 470 ℃; preparation of Ge Using the injection Molding preparation apparatus of example 228Sb12Se60The method of chalcogenide glass microlenses includes the steps of:
(1) preparing a chalcogenide glass block by a melt quenching method, wherein the chalcogenide glass block is cylindrical, the diameter of the chalcogenide glass block is 50cm, and the length of the chalcogenide glass block is 15 cm;
(2) cleaning the surface of the chalcogenide glass block body by using absolute ethyl alcohol, and putting the chalcogenide glass block body into a stainless steel sleeve 6 after drying;
(3) the vacuum chamber 1 is vacuumized by a vacuum pump 13, and when the vacuum degree of the vacuum chamber 1 is lower than 10-3When Pa is needed, introducing compressed nitrogen into the vacuum cavity 1 through the air inlet 12 until the air pressure in the vacuum cavity 1 is the same as the external atmospheric pressure;
(4) the lower pushing motor 31 is started, the lower die core 8 is pushed to rise through the lower pushing rod 32, and the upper die core 7 and the lower die core 8 are closed;
(5) the temperature control stage is opened to set the temperature T of the upper heating furnace 41The temperature T of the lower heating furnace 5 was set to 355 deg.C2At 295 ℃;
(6) Setting the propelling speed of an upper propelling device, starting an upper heating furnace 4, a lower heating furnace 5 and an upper propelling motor 21, heating a stainless steel sleeve 6 to soften a chalcogenide glass block in the stainless steel sleeve 6, driving a propelling pad 23 to move downwards by the upper propelling motor 21, and injecting softened chalcogenide glass into an upper die cavity 71 and a lower die cavity 81 through a stainless steel connecting pipe 62;
(7) after the softened chalcogenide glass 10 fills the injection molding cavity 73 with 8 cavities, introducing inert compressed gas into the vacuum cavity 1 through the air inlet 12 again, cooling the upper mold core 7 and the lower mold core 8 to room temperature by air cooling, and cooling and molding the chalcogenide glass in the injection molding cavity 73 into a semi-finished molded lens;
(8) the lower pushing motor 31 is started again, the lower mold core 8 is driven to move downwards through the lower pushing rod 32, the lower mold core 8 is separated from the upper mold core 7, the semi-finished product of the molded lens in the injection mold cavity 73 is taken out, and the semi-finished product is put into an annealing furnace to be annealed at the annealing temperature of 275 ℃ for 4 hours;
(9) taking out the annealed semi-finished product of the molded lens, and cutting to obtain 8 Ge sheets28Sb12Se60Chalcogenide glass microlenses.

Claims (10)

1. The injection molding preparation device for the chalcogenide glass micro-lens is characterized by comprising a vacuum cavity, an upper propelling device, a lower propelling device, an upper heating furnace, a lower heating furnace, a stainless steel sleeve, an upper mold core and a lower mold core, wherein the side wall of the vacuum cavity is respectively provided with an air outlet and an air inlet for introducing inert gas, the air outlet is connected with a vacuum pump, the propelling speeds of the upper propelling device and the lower propelling device are adjustable, the upper propelling device comprises an upper propelling motor, the output end of the upper propelling motor is connected with an upper propelling rod, the bottom end of the upper propelling rod extends into the stainless steel sleeve from top to bottom, the bottom end of the upper propelling rod is fixedly provided with a propelling pad, the lower propelling device comprises a lower propelling motor, the output end of the lower propelling motor is connected with a lower propelling rod, and the top end of the lower propelling rod extends into the lower heating furnace from bottom to top, the upper heating furnace and the lower heating furnace are respectively controlled by a temperature control platform, the upper heating furnace and the lower heating furnace are arranged in the vacuum cavity from top to bottom, the inner cavity of the upper heating furnace, the inner cavity of the lower heating furnace and the inner cavity of the vacuum cavity are communicated, the stainless steel sleeve is arranged in the upper heating furnace, the bottom of the stainless steel sleeve is provided with a discharge port, the upper mold core and the lower mold core are arranged in the lower heating furnace from top to bottom, the upper mold core is fixed at the top of the lower heating furnace, the lower mold core is fixed at the top end of the lower pushing rod, the bottom of the upper mold core is provided with an upper mold cavity with an opening at the lower part, the upper mold cavity is communicated with the discharge port through a stainless steel connecting pipe, and the upper mold cavity comprises a plurality of upper sub-cavities communicated through upper runners, the top of lower mould benevolence seted up upper portion open-ended lower mould chamber, the lower mould chamber include a plurality of lower sub-chambeies that are linked together through the lower runner, a plurality of last sub-chamber with a plurality of lower sub-chamber from top to bottom one-to-one, last mould benevolence with lower mould benevolence on be provided with the air guide hole respectively, last mould benevolence with lower mould benevolence compound die after, last mould chamber with lower mould benevolence compound die, last mould chamber with lower mould chamber enclose into the injection molding die cavity of many caves promptly, the injection molding die cavity with the air guide hole be linked together.
2. The apparatus of claim 1, wherein a central cavity is disposed in the middle of the upper mold cavity, the upper end and the lower end of the stainless steel connecting tube are respectively connected to the discharge port and the central cavity, and each of the upper sub-cavities is connected to the central cavity via a plurality of upper runners.
3. The apparatus of claim 1, wherein each of said upper sub-chamber and said lower sub-chamber is hemispherical or aspheric, and the diameter of each of said upper sub-chamber and said lower sub-chamber is 2-10 mm.
4. The apparatus of claim 1, wherein a pressure sensor is disposed on a lower surface of the pushing pad, a temperature sensor is disposed on the stainless steel sleeve and the upper mold, and the temperature sensor is electrically connected to the temperature control platform.
5. The apparatus of claim 1, wherein a partition plate is installed in the vacuum chamber, the partition plate separates the inner chamber of the vacuum chamber into an upper chamber and a lower chamber, the upper heating furnace and the lower heating furnace are installed in the upper chamber, the lower propulsion motor is installed in the lower chamber, the upper propulsion motor is installed at the top of the vacuum chamber and located outside the upper chamber, the partition plate is provided with a first vent hole and a second vent hole, the lower chamber is communicated with the inner chamber of the lower heating furnace through the first vent hole, the lower chamber is communicated with the upper chamber through the second vent hole, the gas outlet is communicated with the upper chamber, and the gas inlet is communicated with the lower chamber.
6. The apparatus of claim 1, wherein the upper portion of the stainless steel sleeve is cylindrical, the lower portion of the stainless steel sleeve is conical, and the cross section of the thrust pad is matched with the cross section of the inner cavity of the upper portion of the stainless steel sleeve.
7. The apparatus of claim 1, wherein the upper mold core and the lower mold core are stainless steel cores, and the upper mold core and the lower mold core are coated with tungsten carbide protective layers.
8. A method for manufacturing a chalcogenide glass microlens using the injection molding apparatus of any one of claims 1 to 7, comprising the steps of:
(1) preparing a chalcogenide glass block by a melt quenching method, wherein the chalcogenide glass block is cylindrical;
(2) cleaning the surface of the chalcogenide glass block body by using absolute ethyl alcohol, and putting the chalcogenide glass block body into a stainless steel sleeve after drying;
(3) vacuumizing the vacuum cavity by a vacuum pump, wherein when the vacuum degree of the vacuum cavity is lower than 10 -3 When Pa is needed, introducing inert compressed gas into the vacuum chamber through the gas inlet until the vacuum chamber is vacuumThe air pressure in the cavity is the same as the external atmospheric pressure;
(4) the lower pushing motor is started, the lower die core is pushed to rise through the lower pushing rod, and the upper die core and the lower die core are matched;
(5) opening the temperature control platform and setting the temperature T of the upper heating furnace1Is Ts<T1<TxSetting the temperature T of the lower heating furnace2Is Tg<T2<TsWherein T issIs the softening temperature, T, of chalcogenide glassxIs the crystallization temperature, T, of chalcogenide glassgThe glass transition temperature of chalcogenide glass;
(6) setting the propelling speed of an upper propelling device, starting an upper heating furnace, a lower heating furnace and an upper propelling motor, heating a stainless steel sleeve to soften a chalcogenide glass block in the stainless steel sleeve, driving a propelling pad to move downwards by the upper propelling motor, and injecting softened chalcogenide glass into an upper die cavity and a lower die cavity through a stainless steel connecting pipe;
(7) after the softened chalcogenide glass fills the injection molding cavity with multiple cavities, introducing inert compressed gas into the vacuum cavity through the gas inlet, cooling the upper mold core and the lower mold core to room temperature by air cooling, and cooling and molding the chalcogenide glass in the injection molding cavity into a semi-finished product of the molded lens;
(8) the lower pushing motor is started again, the lower die core is driven to move downwards by the lower pushing rod, the lower die core is separated from the upper die core, the semi-finished product of the molded lens in the injection molding die cavity is taken out, and the semi-finished product is placed into an annealing furnace for T 3Annealing at the annealing temperature of (1) for 3-6 h, wherein T3Glass transition temperature T of glass based on chalcogenidegThe temperature is lower than 10 ℃;
(9) and taking out the annealed semi-finished product of the molded lens, and cutting to obtain a plurality of chalcogenide glass micro-lenses.
9. The method of claim 8, wherein the inert compressed gas is compressed nitrogen or compressed argon.
10. Injection mold according to claim 8The preparation method of the chalcogenide glass micro-lens implemented by the preparation device is characterized in that the chalcogenide glass block is As2Se3Ge-As-Se or Ge-Sb-Se chalcogenide glass blocks.
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CN112047615A (en) * 2020-08-20 2020-12-08 湖北新华光信息材料有限公司 Preparation method of chalcogenide glass spheres and extrusion forming device used in preparation method
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