CN110681559B - MEMS piezoelectric ultrasonic transducer with Helmholtz resonant cavity - Google Patents
MEMS piezoelectric ultrasonic transducer with Helmholtz resonant cavity Download PDFInfo
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- CN110681559B CN110681559B CN201910851197.2A CN201910851197A CN110681559B CN 110681559 B CN110681559 B CN 110681559B CN 201910851197 A CN201910851197 A CN 201910851197A CN 110681559 B CN110681559 B CN 110681559B
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- ultrasonic transducer
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- piezoelectric ultrasonic
- helmholtz
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- 239000000758 substrate Substances 0.000 claims abstract description 15
- 230000000149 penetrating effect Effects 0.000 claims 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
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- 239000000919 ceramic Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
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- 239000002210 silicon-based material Substances 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/50—Application to a particular transducer type
- B06B2201/55—Piezoelectric transducer
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910851197.2A CN110681559B (en) | 2019-09-10 | 2019-09-10 | MEMS piezoelectric ultrasonic transducer with Helmholtz resonant cavity |
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CN201910851197.2A CN110681559B (en) | 2019-09-10 | 2019-09-10 | MEMS piezoelectric ultrasonic transducer with Helmholtz resonant cavity |
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CN110681559A CN110681559A (en) | 2020-01-14 |
CN110681559B true CN110681559B (en) | 2020-12-01 |
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CN201910851197.2A Active CN110681559B (en) | 2019-09-10 | 2019-09-10 | MEMS piezoelectric ultrasonic transducer with Helmholtz resonant cavity |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11768178B2 (en) * | 2020-02-28 | 2023-09-26 | Baker Hughes Oilfield Operations Llc | Embedded electrode tuning fork |
CN111377389B (en) * | 2020-03-25 | 2024-03-05 | 京东方科技集团股份有限公司 | Ultrasonic transducer and preparation method thereof |
CN112218220B (en) * | 2020-11-12 | 2022-07-12 | 诺思(天津)微系统有限责任公司 | Micro loudspeaker based on MEMS ultrasonic transducer |
CN112871614B (en) * | 2021-01-12 | 2022-03-15 | 武汉大学 | MEMS ultrasonic transducer with high emission performance |
CN112953296B (en) * | 2021-02-05 | 2023-01-06 | 西北工业大学 | Deep sea ultrasonic driving device based on Helmholtz resonant cavity |
CN115532572B (en) * | 2022-10-14 | 2024-05-07 | 浙江大学 | Multi-frequency piezoelectric micromechanical ultrasonic transducer and preparation method thereof |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6782109B2 (en) * | 2000-04-04 | 2004-08-24 | University Of Florida | Electromechanical acoustic liner |
KR100741262B1 (en) * | 2006-05-18 | 2007-07-19 | 포항공과대학교 산학협력단 | Micro-viscometer |
US9402137B2 (en) * | 2011-11-14 | 2016-07-26 | Infineon Technologies Ag | Sound transducer with interdigitated first and second sets of comb fingers |
CN104836473B (en) * | 2014-02-07 | 2018-11-02 | 北京纳米能源与系统研究所 | Acquire the generator and sound transducer of acoustic energy |
CN104821745A (en) * | 2015-05-29 | 2015-08-05 | 重庆大学 | Low-frequency piezoelectric vibration energy collector based on Helmholtz effect and manufacture process thereof |
US9559037B2 (en) * | 2015-06-02 | 2017-01-31 | Intel Corporation | Package integrated synthetic jet device |
FR3072499B1 (en) * | 2017-10-13 | 2019-10-18 | Office National D'etudes Et De Recherches Aerospatiales | HELMHOLTZ RESONATOR PHOTODETECTOR |
CN108566174A (en) * | 2018-04-17 | 2018-09-21 | 武汉大学 | Default cavity protection wall type thin film bulk acoustic wave resonator and preparation method |
CN108964629A (en) * | 2018-07-04 | 2018-12-07 | 武汉大学 | A kind of tunable thin film bulk acoustic wave resonator |
CN208637138U (en) * | 2018-08-15 | 2019-03-22 | 香港大学浙江科学技术研究院 | Helmholtz resonator |
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Effective date of registration: 20220408 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University |
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Effective date of registration: 20220824 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |