CN110676251A - Determination method and layout method for curved surface of photoelectric detector - Google Patents

Determination method and layout method for curved surface of photoelectric detector Download PDF

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CN110676251A
CN110676251A CN201910860299.0A CN201910860299A CN110676251A CN 110676251 A CN110676251 A CN 110676251A CN 201910860299 A CN201910860299 A CN 201910860299A CN 110676251 A CN110676251 A CN 110676251A
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curved surface
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杨巍
李苗
王小卉
程琨
郁斯婕
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Beijing University of Posts and Telecommunications
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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Abstract

The invention relates to a layout design of a photoelectric detector array in a hemispherical eye camera, which adopts an axisymmetric quartic function rotating curved surface as the curved surface shape of a photoelectric detector for the first time, and designs a circular detector array layout on the curved surface. In the invention, the quartic function rotation surface brings better focus coincidence, corrects various aberrations and makes imaging clearer. Meanwhile, the circular ring array layout brings higher pixel coverage rate and more uniform pixel distribution, so that the image quality uniformity of the detector from the center to the edge is higher. The curved surface photoelectric detector can solve the problem that the traditional plane photosensitive element is difficult to solve, and can serve more fields with the advantages of high fidelity, low aberration and small volume, and has huge application potential and value.

Description

Determination method and layout method for curved surface of photoelectric detector
Technical Field
The invention relates to the field of photoelectric detectors, in particular to a layout design of a photoelectric detector array in a hemispherical eye camera.
Background
With the development of the traditional plane photosensitive element falling into a bottleneck, a curved surface photoelectric detector simulating human eyes retina becomes a new research direction. The curved-surface photoelectric detector can solve the problem of aberration which cannot be solved by the traditional photoelectric detector due to the shape of the curved surface, improves the phenomena of dark angle and distortion, enables imaging to be clearer and more accurate, has higher image quality uniformity, and simultaneously reduces the scale, cost and complexity of the traditional imaging system.
At present, various methods for curving a photoelectric detector exist, and the method mainly comprises a high-bending silicon photoelectric detector, a compound-eye type hemispherical photoelectric detector, a flexible nano-material photoelectric detector and a hemispherical/parabolic photoelectric detector array.
The high-bending silicon photoelectric detector is manufactured by reasonably shaping a commercial CMOS sensor, curvature is applied to a sensor die, silicon is pressed from a plane to form a curved surface, and the performance of the edge of the obtained curved surface sensor is particularly improved compared with that of a plane sensor.
The compound eye design of the bionic arthropod of the compound eye type hemispherical photoelectric detector is characterized in that imaging elements are densely distributed on the outer surface of a molding piece of hemispherical PDMS (polydimethylsiloxane), and a serpentine line is used as an electrical and mechanical interconnection line, so that the solution of a large-view-angle zero-distortion image sensor is provided.
The flexible nano material photoelectric detector adopts one-dimensional or two-dimensional nano materials, such as ZnO nanowires and graphene, realizes the curved surface of the photoelectric detector by depending on the mechanical flexibility of the materials, and has excellent performances of high photoconductive gain, high responsivity, high detectivity and the like due to the excellent photoelectric property of the nano materials.
A hemispherical photoelectric detector array is published by Mark Stoykovich, a chemical doctor of university of science and technology, Massachusetts, at the earliest on famous scientific miscellaneous characters, and proposes that a hemispherical surface is used as a curved surface of a detector, PDMS is cast and solidified in a gap of a mold to form a hemispherical elastic transfer element, and the curvature radius of the hemispherical elastic transfer element is matched with that of a hemispherical glass substrate. The rectangular detector array adopts an island bridge structure, and the pixel units are formed by connecting metal interconnection lines. The array is attached to a tensioned PDMS plane through nonspecific Van der Waals interaction, and is transferred to a hemispherical glass substrate with a matched curvature radius after being loosened, so that the layout of the curved detector array is formed. Hemispherical systems have a more uniform focus from center to edge, a wider field of view, more uniform image intensity and less geometric distortion.
The parabolic photodetector array is proposed by Viktor Malyarchuk which participates in Mark current year research, the Viktor adopts a paraboloid as a curved surface of the detector, the shape of the curved surface is closer to the curved surface where a focus is located than that of a hemispherical surface, a regular hexagonal array is attached to a PDMS plane, and the curved surface photodetector obtained after transfer printing has higher pixel coverage rate than that of a rectangular array detector.
Disclosure of Invention
The invention aims to provide a layout design of a curved surface photoelectric detector array and a coordinate method for mapping the curved surface array layout on a plane. The layout design has a more accurate curved surface shape, the coverage rate of the array on the curved surface is greatly improved, the array distribution on the curved surface is more uniform, and the imaging image quality is more uniform and clear. Since there is currently no commercially available technology for manufacturing arrays directly on curved surfaces, the co-ordinates of the mapping of the curved surface layout on a flat surface provides support for this, making the layout design feasible and practical for production manufacturing by existing PDMS transfer technology.
An optical system is established, a circular biconvex lens is adopted, the visual angle of 60 degrees is the clear visual range of human eyes, other optical parameters can be set automatically, and the object distance is ensured to be more than two times of focal length so as to accord with the imaging principle of a camera. Because the polynomial function is closer to the shape of the curve where the focus is located compared with other functions, the coincidence of the focus of the quartic function in the polynomial function is obviously higher than that of the quadratic function, the dragon lattice phenomenon generated by high-order fitting is avoided, and the quartic function is finally adopted to fit the focus obtained by the optical system. The optical system adopts a traditional circular biconvex lens, so that the curved surface where the focus is positioned is a rotating curved surface obtained by rotating the curve for one circle around the optical axis of the convex lens, and the curve used as a bus needs to beThe axisymmetric curve, i.e. the coefficient of the odd term of the four functions is zero, thereby obtaining the generatrix function of the rotating curved surface: z is a.x4+b·x2+ c, three-dimensional surface of revolution function z ═ a · (x)2+y 2)2+b·(x2+y2) + c is the final surface function of the surface detector. (the optical axis of the convex lens is the z axis, the direction pointing to the object plane is the positive direction; the plane where the x and y axes are located is vertical to the optical axis; and a, b and c are computer fitting parameters).
The invention requires the layout of the detector array on the curved surface to be more uniform, so the layout design is directly carried out on the four-rotation curved surface obtained above to ensure the uniformity of the pixel units on the curved surface without adopting the conventional mode of directly attaching the regular polygon array on the tensioned PDMS plane and then loosely transferring the regular polygon array to the glass substrate with the matched curvature radius. At present, no method for uniform distribution on a four-time rotating curved surface exists, and a thought is given to the problem of Tammmes. The Tammes problem is a mathematical definition of "uniformity", which is: taking n electricity on the surface of the unit ball, the minimum distance between any two points is maximized. Since the minimum distance between any two points is only present between two adjacent points, the Tammes problem is that effective control of the distance between two adjacent points is required. Because the object of the conclusion is a sphere which is characterized in that the curvatures of all points are equal everywhere, the equal distance between two points is equivalent to the equal arc length between two points, and the curvatures of all parts of the surface of the four-time rotation are different, the arc length along the surface of the sphere is used as an evaluation standard to replace the distance, and the curved surface distribution of the detector array is designed by adopting a method of 'effectively controlling the arc length between two adjacent points'.
The annular array is distributed on the surface of the fourth revolution, the circular rings are concentric circular rings taking the center of the curved surface as the center of a circle, and the arc length of the distance between every two adjacent circular rings along the curved surface is equal. And then, pixel units are arranged on each circular ring, and the arc length of the adjacent units spaced along the curved surface is equal to the arc length between the adjacent circular rings, so that the purpose of controlling the arc length of the adjacent pixel units spaced in the radial direction and the circumferential direction is achieved, and the distribution of the pixel units on the curved surface is as uniform as possible. The detector units on the same ring are connected by an island bridge structure, and a flexible and bendable interconnection mechanism is adopted to connect all the pixel units. In a subsequent image processor, each ring on the curved surface is provided with an outgoing line, image information is output sequentially according to the position of the image information through the outgoing lines, the image processor synthesizes pixels of each ring respectively, and finally, the images of all the rings are spliced together from inside to outside according to the known positions of the rings to form a complete image.
Compared with a two-dimensional connection mode of a traditional detector array, the layout design leaves more curved surface space for the pixel units with imaging functions, and meanwhile, fewer interconnection mechanisms and higher degree of freedom of the array mean smaller fault risk. In addition, the coverage rate of the circular layout on the detector substrate reaches 100 percent, and the coverage rate exceeds that of the polygonal layout with the pixel vacuum region at the edge. The high coverage rate layout reflects the imaging quality, so that the performances of definition, brightness and the like of the edge are further improved, the image quality uniformity from the center to the edge is higher, and the distribution of the finally obtained curved surface array has better uniformity.
The PDMS transfer printing technology is adopted to manufacture the curved surface detector, the detector array is required to be attached to the tensioned PDMS as a plane, and the mapping coordinate from the curved surface detector array layout to the plane is required to be realized, so that the layout design can be applied to actual production and manufacturing. From finite element analysis, when the edges of the PDMS were stretched to approximately the same height as the center of the plate, the radial strain from the center to each point of the edge was 0 everywhere, and the total strain was provided only by the hoop strain, which can be expressed as
Figure BDA0002199547760000021
(n is the number of rings from the center to the edge in the ring layout, arc is the pitch arc length along the curved surface between adjacent rings, xnThe abscissa of the intersection of the generatrix function and the nth circle from inside to outside). The interval arc length of two adjacent pixel units on the nth ring on the plane is named arcnThe number of pixel points contained in the curved surface circular ring and the corresponding plane circular ring is equal to m, and then:
perimeter 2 pi x of curved nth ringn=m·arc
The perimeter of the planar nth circle 2 pi (n · arc) ═ m · arcn
The above formula is divided by the following formula,
Figure BDA0002199547760000031
can be obtained by finishing
Figure BDA0002199547760000032
Arc length arcnCorresponding to a central angle of(in rad, units are rad). The polar coordinates of each pixel unit on the nth ring of the plane can be obtained:
Figure BDA0002199547760000034
(i=1,2,3,……,m-1,m)
therefore, the coordinate mapping of the curved surface layout on the plane is completed, so that the layout design can be realized by the prior art and applied to actual production and manufacturing.
Drawings
Fig. 1 is a diagram illustrating ray trace analysis (left diagram) and focus coordinate axis setting (right diagram) of the optical system.
Fig. 2 is a fitting image of an exponential function and a polynomial function illustrating the focal point.
Fig. 3 is an image (left diagram) illustrating a generatrix function of the curved surface and a curved surface function image (right diagram) of the curved surface detector.
Fig. 4 illustrates the intersection of the circle on the curved surface and the generatrix function and its coordinates.
Fig. 5 is a layout illustrating a circular ring where the pixel unit is located on a curved surface.
Fig. 6 is a diagram illustrating the distribution of pixel units on the ring, and a box is a strip-shaped area (left diagram) in which the pixel units at the start of segmentation are not uniformly distributed, and a strip-shaped area (right diagram) in which the pixel units are distributed after fine adjustment.
Fig. 7 is a diagram illustrating the final modified detector cell array and its connection structure.
Figure 8 is a step of fabricating a curved photodetector using a compressible silicon focal plane array and hemispherical elastomeric transfer elements.
Fig. 9 is a diagram illustrating the mapping of the curved pixel cells on a plane.
FIG. 10 is a layout design and its planar mapping illustrating the final curved photodetector array.
Detailed Description
Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. The detailed design process of the present invention is illustrated here, wherein the optical system setting and pixel unit interval requirements are non-limiting, and only the parameters set for the convenience of understanding the example are set, and the relevant data in the example can be changed in actual operation.
The optical system is first established, the optical parameters are only examples, and the actual operation can be set according to the needs. In the example, a single-piece biconvex lens with the same curvature is used as an optical simulation lens, the curvature radius of both surfaces is 50mm, and the material of the lens is selected from a basic optical glass brand number BK 7. The object distance is set to be 200mm, so that the system is ensured to conform to the principle that the object distance imaged by a camera is more than 2 times of the focal distance; the visual angle is +/-30 degrees, which is equivalent to the clear visual angle range of human eyes of 60 degrees, the total visual angles of the light source points are 11, and the visual angles are respectively as follows from top to bottom: 30 degrees, 20 degrees, 15 degrees, 10 degrees, 5 degrees, 0 degrees, 5 degrees, 10 degrees, 15 degrees, 20 degrees and 30 degrees. Taking a straight line perpendicular to an optical axis and with the focus of the 0-degree visual angle as an x axis, and taking a positive visual angle as a positive direction; the z-axis is a straight line where the optical axis is located, the object plane direction is taken as the positive direction, a coordinate system is established, and ray tracing analysis and analysis of the focus coordinate axis are shown in fig. 1. The focal coordinates from 11 views were recorded as shown in the following table:
Figure BDA0002199547760000041
TABLE 1 focal coordinates corresponding to each visual angle ray of the optical system
The curve of the focal point gradually curves toward the lens direction with the increase of the angle of view, according to the trendThe fitted curve range is defined in exponential and polynomial functions. The computer fits the focus with an exponential function and a polynomial function, respectively, the fit results are shown in fig. 2. The fitting image shows that the fitting effect of the exponential function is poor, the focus close to the x axis has a certain distance from the fitting curve, in the polynomial function fitting from the second order to the ninth order, the coincidence degree of the fitting curve and the focus coordinate is higher and higher, but the fitting curve is smoother when the square order is higher, and the dragon lattice phenomenon is generated. Because terms of different orders in the polynomial can be understood as spectrum analysis, when the more frequency spectrums are selected, that is, the higher the order of the polynomial, the better the coincidence between the curve and the data points, but at the same time, the curve between the data points can form a large error, which is represented as unsmooth and even generates oscillation phenomenon, so that the fitted curve is no longer accurate. Through final comparison, certain error exists between quadratic polynomial fitting and cubic polynomial fitting, but the quadratic polynomial fitting effect is good when the quadratic polynomial fitting is improved only once; when the degree of squareness is further improved, the coincidence of the curves is improved but the range is not obvious, and the dragon lattice phenomenon appears on the curves during high-order fitting4+b·x3+c·x2+ d · x + e as a form of the fitting function.
The optical system adopts the traditional circular biconvex lens, so the curved surface where the focus is positioned is a rotating curved surface obtained by rotating the curve for one circle around the z axis, and a condition is newly added to the curve: the curve as the generatrix needs to be a curve having the z-axis as the axis of symmetry. According to relevant mathematical literature, when the parameter satisfies the condition
Figure BDA0002199547760000042
When the quartic function y is a.x4+b·x3+c·x2+ d.x + e having an axis of symmetry
Figure BDA0002199547760000043
Substitution requires b to be 0 and d to be 0. The generatrix function of the surface of revolution is thus obtained: z is a.x4+b·x2+ c. From the focus data shown in fig. 2, the parameter a obtained by fitting is 2.729 × 10-50.02545, c 0.1613, the bus function is:
z=(2.729×10-5)·x4+0.02545·x2+0.1613
the image of the bus function is shown in the left diagram of fig. 3. From the curve f (x, z) ═ 0, a revolution around the z axis, the resulting surface function is
Figure BDA0002199547760000051
It can be known that the three-dimensional surface function form z of the generatrix is a (x)2+y2)2+b·(x2+y2) + c. Substituting the parameters obtained by fitting the above into a curve function of the example final curve detector is obtained as follows:
z=(2.729×10-5)·(x2+y2)2+0.02545·(x2+y2)+0.1613
the surface function image is shown in the right diagram of fig. 3. The four-rotation curved surface design of the curved surface detector is completed.
The layout design of the curved surface detector array is based on the invention content, and a circular array layout with more uniform pixel unit distribution is adopted on the four-rotation surface. In this example, it is set that N is 14 ring pixel units laid out on the curved surface, and the arc length arc of the adjacent two rings along the curved surface is 2.5mm, so that the number of pixel rings and the arc length of the interval can be set as required in actual operation. Firstly, the position of the circular ring where the pixel unit is located on the curved surface is determined. Integrating the curve length from the lowest point to the positive direction of the x axis on the obtained image of the generatrix of the rotating surface, setting a point as a mark when the integral value reaches arc 2.5mm each time, then re-integrating the mark from the point until the marked points reach N14 points except the lowest point, wherein the points are the intersection points of the circular ring and the generatrix function, and the abscissa of the intersection point of the generatrix function and the N-th circular ring from inside to outside is designated as xnAs shown in fig. 4. And then, rotating the bus bar and the marked point by one circle by taking the z axis as an axis of symmetry, wherein when 14 tracks crossed by the marked point are N-14, the position of the circular ring where the pixel unit is located is shown in fig. 5.
Then setting up pixel list on each circular ringThe arc length of the interval between adjacent units is arc 2.5 mm. As the three-dimensional drawing of the cylindrical coordinates is adopted, the division according to the arc length is converted into the division according to the angle for convenient calculation, and the division angles are respectively theta from the inner ring to the outer ringn=[57.451657,28.966519,19.590717,14.999121,12.320951,10.593221,9.399748, 8.531733,7.873978,7.358578,6.943403,6.601189,6.313633,6.068050](n-1, 2,3, … …, 14). The arc length of the last segment is less than 2.5mm, so that the pixel units in the belt-shaped area at the starting point are distributed unevenly, as shown in the box of the left diagram of fig. 6. To cope with this problem, the dividing angle of each ring is finely adjusted to θn’=[60,30,20,15,12.41,10.59,9.47,8.57,7.83,7.35,6.92, 6.56,6.32,6.10](n-1, 2,3, … …, 14). The adjusted starting banded region is shown in the right diagram of fig. 6, except for the three inner rings closest to the bottom of the detector, the modification angles of the other rings are all below 0.1 degrees, the modification amplitude is less than 0.8 percent of the modification amplitude, the influence of the fine adjustment on the distribution uniformity is reduced to the minimum, and finally, the modified detector unit array and the connection structure thereof are shown in fig. 7. The calculation shows that the maximum distance between two adjacent points on the curved surface is only about 12% more than the minimum distance, and the situation is distributed and dispersed on the curved surface, so that the regional density or looseness of the pixel points can not be caused. Therefore, the curved pixel unit layout design has better uniformity.
Since there is currently no commercially available technology for fabricating arrays directly on curved surfaces, it is necessary to use the technology of PDMS transfer, the process of which is shown in fig. 8. The next step is the co-ordinated mapping of the surface layout to a flat surface so that the design can be applied to the actual production manufacturing. The curve to plane strain was analyzed and from finite element analysis, it was found that when the edges of the PDMS were stretched to approximately the same height as the center of the plate, the center to edge radial strain ε was observedmeridionalThe total strain is equal to the hoop strain, so the arc length from the center of the bus to the edge is the radius of the stretched circle, and the distance between two adjacent points mapped on the plane by the intersection point of the bus and each ring is still equal. The radius of each circle mapped to the plane is arc × n (n is 1,2,3, …)…, 14). Due to the radius x of the ring on the curved surfacenAnd the division arc length of the pixel unit on the circle mapped by the plane is no longer equal to 2.5mm, and the difference between the division arc lengths is the annular strain of the pixel unit. According to the derivation process of the invention, the arc lengths of two adjacent points on the same circle in the plane mapping can be obtained(arc 2.5mm, n 1,2,3, … …,14), the polar coordinates of each pixel element on the n-th ring of the final plane map are
Figure BDA0002199547760000062
Figure BDA0002199547760000063
(arc 2.5mm, i 1,2,3, … …, m-1, m), and the same fine tuning operation as above results in a planar mapping of the final surface pixel cell layout design as shown in fig. 9. The planar mapping of the pixel units is in a form of sparse outside and dense inside macroscopically, after the annular array is laid on the planar PDMS according to the mapping diagram and is relaxed, the annular strain of the outer ring is larger than that of the inner ring, when the PDMS returns to the curved surface from the plane, the loose edge area of the planar layout is gradually tightened, and finally the situation similar to the distribution density of the central area is achieved, so that the planar mapping coordination of the relatively uniform layout design on the curved surface is achieved.
The layout design of the final curved photodetector array and its corresponding planar mapping are shown in fig. 10, where the lines represent the connecting mechanism and the black dots are the pixel cells. The design of the curved-surface photoelectric detector can be completed by providing the relevant requirements (parameters such as object distance, lens, visual angle and the like) for the optical system, the number of pixel rings N and the inter-ring arc length arc of the layout on the curved surface to be designed, and the curved-surface photoelectric detector can be manufactured by the prior art, has more accurate curved surface shape, 100% curved surface coverage rate and more uniform array distribution, can correct various problems such as aberration, dark angle and the like, and enables the image quality to be more uniform and more real.

Claims (8)

1. Layout design of photoelectric detector array in hemisphere eye camera, its characterized in that:
1) establishing an analog optical system;
2) establishing and representing a curved function where a focus is located;
3) the layout of the detector array on the curved surface;
4) mapping of array layout on a plane on a curved surface;
5) the array plane layout is coordinated;
steps 1) to 3) are the layout design of the curved surface photoelectric detector, and steps 4) to 5) are required for actual manufacturing.
2. The layout design of the photodetector array as claimed in claim 1, wherein the optical system employs a lenticular lens with a viewing angle of 60 °.
3. The layout design of the photo-detector array according to claim 1, wherein the focal point is located on a curved surface, characterized in that: and fitting the focus by using a quartic function, wherein the curved surface is obtained by rotating the quartic function which is axially symmetrical and is taken as a bus function along the symmetrical axis.
4. The layout design of the photodetector array as claimed in claim 1, wherein the layout of the photodetector array on a curved surface is characterized in that: the detector units are distributed on the curved surface in a ring shape, and the multiple layers of rings on the curved surface are concentric rings taking the center of the curved surface as the center of a circle.
5. The layout design of the photodetector array as claimed in claim 1, wherein the layout of the photodetector array on a curved surface is characterized in that: the detector units on the same ring are connected by an island bridge structure, and a flexible and bendable interconnection mechanism is adopted to connect all the pixel units.
6. The layout design of the photodetector array as claimed in claim 1, wherein the photodetector array is attached to a flat PDMS under tension and transferred to a curved design surface using an array transfer technique.
7. The layout design of the photodetector array as claimed in claim 1, wherein the mapping of the array layout on a plane on the curved surface is characterized by: with the state from the curved surface to the PDMS just flattened as a reference, the radial strain is zero, and only the hoop strain is present.
8. The layout design of photodetector array as claimed in claim 1, wherein the planar layout of the array is coordinated by: and representing the mapping of each pixel point of the layout design on the curved surface on the plane in a coordinate mode.
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