CN110676187A - Device and method for accurately measuring center of photosensitive surface of photoelectric detector - Google Patents
Device and method for accurately measuring center of photosensitive surface of photoelectric detector Download PDFInfo
- Publication number
- CN110676187A CN110676187A CN201910848986.0A CN201910848986A CN110676187A CN 110676187 A CN110676187 A CN 110676187A CN 201910848986 A CN201910848986 A CN 201910848986A CN 110676187 A CN110676187 A CN 110676187A
- Authority
- CN
- China
- Prior art keywords
- vertical shaft
- center
- photoelectric detector
- lower vertical
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 238000009966 trimming Methods 0.000 claims abstract description 30
- 238000005259 measurement Methods 0.000 claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 claims abstract description 26
- 238000006243 chemical reaction Methods 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims description 16
- 230000003746 surface roughness Effects 0.000 claims description 9
- 239000004587 polysulfide sealant Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000565 sealant Substances 0.000 claims description 2
- 238000013461 design Methods 0.000 description 5
- 239000000725 suspension Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009987 spinning Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 230000009191 jumping Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 235000019606 astringent taste Nutrition 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a device and a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which comprises a microscope and a double-vertical-shaft combined detection device matched with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover, a vertical shaft sleeve and a lower vertical shaft seat which are sequentially connected from top to bottom, and the upper vertical shaft cover, the vertical shaft sleeve and the lower vertical shaft seat are coaxial. The invention mainly aims at the problems of large deviation of the center of the photosensitive surface of the double four-quadrant photoelectric detector relative to the assembly reference axis and coaxiality measurement, and can realize automatic center determination and accurate positioning. According to the method for accurately detecting the photosensitive center of the photoelectric detector, provided by the invention, the reference conversion error generated in the original scheme assembly process of the part with the photoelectric detector is eliminated by trimming, and the deviation error between the manufacturing reference of the device and the reference axis measured by the center of the photosensitive surface is eliminated, so that the assembly requirement of an out-of-tolerance device can be met, and the reference conversion error in the original assembly process can be eliminated.
Description
Technical Field
The invention particularly relates to a device and a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which are used for detecting devices and similar structural parts which cannot be directly contacted for measurement.
Background
The double four-quadrant photoelectric detector is a core device for capturing a target by a laser seeker, 8 areas are arranged in an outer four quadrant and an inner four quadrant, and the center of a cross division line (also called as the center of a photosurface) of the inner four quadrant, namely the crossing point of an F axis and a G axis on the photosurface, is required to deviate by no more than 0.1mm relative to the detection reference of the device, so that the double four-quadrant photoelectric detector plays a role in adjusting the superposition of the optical zero position and the electric zero position of the seeker. If the coaxiality of the center of the photosensitive surface relative to the detection reference of the device is out of tolerance or the deviation is too large, the adjustment of the dispersion circle curve of the objective lens component of the seeker is influenced, the optical zero position and the electric zero position of the seeker are not coincident, a gyro correction signal output by the seeker cannot truly reflect the tracking angular speed, the aiming and target capturing precision of the seeker is directly influenced, and the miss is easily caused, so that the double four-quadrant photoelectric detector is also called as an eye of a laser seeker.
When the double four-quadrant photoelectric detector is used for manufacturing devices and assembling and adjusting a photoelectric detection part with a ring and a laser seeker optical system, the measurement reference of the center of the photosensitive surface needs to be converted and iterated, iterative errors are generated, and the double four-quadrant photoelectric detector cannot be directly contacted with measurement. After the center measuring reference of the photosensitive surface is converted and trimmed to the short conical surface part of the photoelectric detection part with the ring, the device manufacturing reference in the double four-quadrant photoelectric detector is still used as the measuring reference, and the reference non-coincident error is generated to cause misjudgment. If the device manufacturing standard is not coaxial with the detection standard of the center of the photosensitive surface of the device or the deviation amount is large, the device manufacturing standard cannot be used for detecting the deviation of the center of the photosensitive surface and cannot be used as the standard for trimming the reference conical surface of the part with the photoelectric detector, and the problem needs to be solved urgently.
Disclosure of Invention
The invention aims to provide a device for accurately measuring the center of a photosensitive surface of a photoelectric detector, which mainly aims at the problems of large deviation of the center of the photosensitive surface of a double-four-quadrant photoelectric detector relative to an assembly reference axis and coaxiality measurement and can realize automatic center determination and accurate positioning.
The invention also aims to provide a method for accurately measuring the center of the photosensitive surface of the photoelectric detector, so that batch measurement is realized.
Therefore, the technical scheme provided by the invention is as follows:
the utility model provides an accurate detection device of photosensitive center of photoelectric detector, includes the microscope, still includes the two vertical axis combination detection device that use with the microscope cooperation, two vertical axis combination detection device include from last vertical axis lid, vertical axis cover and the lower vertical axis seat that connects gradually extremely down, it is all coaxial to go up vertical axis lid, vertical axis cover and lower vertical axis seat.
The upper vertical shaft cover is of a round structure, two ends of the upper vertical shaft cover are both open, and the center of the upper vertical shaft cover is provided with a self-aligning bearing end face and an upper vertical shaft hole from top to bottom in sequence.
The center of the vertical shaft sleeve is sequentially provided with an upper vertical shaft excircle, a self-centering conical surface, a containing cavity, a lower vertical shaft hole and a lower vertical shaft bearing end face I from top to bottom.
The lower vertical shaft base comprises a cylinder, a second lower vertical shaft bearing end face and an aligning part end face which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle.
The perpendicularity between the upper vertical shaft hole and the self-aligning bearing end face II is not more than 0.002mm, the cylindricity of the upper vertical shaft hole is not more than 0.003mm, and the surface roughness Ra0.1 is achieved.
The straightness that hangs down of lower vertical axis hole and lower vertical axis bearing terminal surface one is less than 0.002mm, vertical axis hole cylindricity is less than 0.003mm down, go up the vertical axis excircle and all following vertical axis hole and lower vertical axis bearing terminal surface one as the benchmark from the centering conical surface, and the axiality of relative benchmark is less than 0.001mm, go up vertical axis excircle cylindricity and be less than 0.003mm, clearance control within 0.002mm, each functional surface roughness Ra0.1.
The flatness of the second end face of the collimation part is less than 0.002mm, the excircle of the lower vertical shaft and the second force-bearing end face of the lower vertical shaft are processed by taking the end face of the collimation part as a reference, the parallelism of the second force-bearing end face of the lower vertical shaft and the second end face of the collimation part is less than 0.001mm, the verticality of the excircle of the lower vertical shaft and the second end face of the collimation part is less than 0.001mm, and the surface roughness of each functional surface is Ra0.1.
A method for accurately measuring the center of a photosensitive surface of a photoelectric detector by using a device for accurately measuring the photosensitive center of the photoelectric detector comprises the following steps:
step 1) trimming a part with a ring photoelectric detector to be detected, and performing iterative conversion on a photosensitive center to form a new reference for assembling and adjusting an optical system;
step 2) placing a lower vertical shaft seat in the double-vertical-shaft combined detection device on a disc of a microscope to be directly pressed and fixed, adjusting an ocular lens system of the microscope, adjusting an ocular cross division line to the center of the cross section of the lower vertical shaft seat, after the adjustment is finished, installing a trimmed ring-shaped photoelectric detector part to be detected on a vertical shaft sleeve, spinning a vertical shaft cover, realizing automatic center determination and accurate positioning, and forming a fixed stable vertical shaft;
and 3) sleeving the vertical shaft on the lower vertical shaft seat to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve during measurement, and finding the center of the photosensitive surface of the part with the photoelectric detector through the eyepiece of the microscope.
The specific process of step 1) is as follows:
coating polysulfide sealant in a bonding glue containing hole of the part ring, assembling the part ring on a detection reference of a photoelectric detector part, and obtaining a photoelectric detector part with a ring after the polysulfide sealant is cured;
the manufacturing reference of the photoelectric detector part with the ring is taken as a reference, the photoelectric detector with the ring is arranged on a precision lathe by a clamp for trimming, the excircle size, the reference conical surface, the conical surface angle and the end surface are processed at the corresponding part, the detection reference measured by the center of the photosensitive surface is iteratively converted onto the reference conical surface, and a new reference for installing and adjusting the optical system is formed.
When in trimming, the clamp is arranged on the main shaft of the equipment, the manufacturing reference of the photoelectric detector part with the ring is taken as a clamping part, the reference end face of the photoelectric detector part with the ring is taken as a trimming auxiliary reference, and then the correcting excircle of the clamp is adjusted to the rotation center of the main shaft of the equipment, so that the jumping is less than 0.003mm for trimming.
The invention has the beneficial effects that:
the device for accurately detecting the photosensitive center of the photoelectric detector provided by the invention adopts a semi-moving cylindrical vertical shaft structure to automatically determine the center of the photosensitive surface of the device, and the cylindrical vertical shaft structure realizes quick calibration, so that a special detection device for double vertical shaft combination is formed, the device is directly measured, secondary calibration is not needed, and batch measurement is realized.
According to the method for accurately detecting the photosensitive center of the photoelectric detector, provided by the invention, the reference conversion error generated in the original scheme assembly process of the part with the photoelectric detector is eliminated by trimming, and the deviation error between the manufacturing reference of the device and the reference axis measured by the center of the photosensitive surface is eliminated, so that the assembly requirement of an out-of-tolerance device can be met, and the reference conversion error in the original assembly process can be eliminated.
In order to make the aforementioned and other objects of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
FIG. 1 is a schematic diagram of a photodetector according to an embodiment of the present invention;
FIG. 2 is a schematic view of the center of the photosurface;
FIG. 3 is a schematic view of the construction of the part ring;
FIG. 4 is a schematic structural diagram of a component with a ring photodetector;
FIG. 5 is a schematic diagram of a vertical axis structure commonly used in precision instruments, in which (a) is a standard cylindrical vertical axis and (b) is a semi-moving cylindrical vertical axis;
FIG. 6 is a schematic structural diagram of an embodiment of the dual vertical axis combined detection device of the present invention;
FIG. 7 is a diagrammatic view of an upper vertical shaft cover in an embodiment;
FIG. 8 is a diagrammatic view of an embodiment of a vertical shaft sleeve;
FIG. 9 is a diagrammatic view of the lower vertical shaft base of the embodiment;
FIG. 10 shows a taper trimming jig for a band photodetector unit in an embodiment.
Description of reference numerals:
1. manufacturing a benchmark; 2. detecting a benchmark; 3. a first reference end face; 4. a conical surface trimming part; 5. a reference hole; 6. bonding glue containing holes; 7. a second reference end surface; 8. trimming a conical surface to obtain a reference; 9. the size of the excircle; 10. a reference conical surface; 11. a conical surface angle; 12. an end face; 13. fitting size; 14. fitting gaps; 15. the first force bearing end face of the collimation part; 16. the collimation part end face I; 17. self-aligning the first force bearing end face; 18. a ball bearing; 19. a conical surface; 20. a lower vertical shaft seat; 21. a vertical shaft sleeve; 22. an upper vertical shaft cover; 23. a band photodetector section; 24. an upper vertical shaft hole; 25. self-aligning a force bearing end face II; 26. an upper vertical axis excircle; 27. self-centering conical surface angle; 28. a first force bearing end face of the lower vertical shaft; 29. a lower vertical shaft hole; 30. a self-centering conical surface; 31. the outer circle of the lower vertical shaft; 32. a second force bearing end surface of the lower vertical shaft; 33. the collimation part end face II; 34. correcting the excircle; 35. and connecting the machine tool spindle.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
It should be noted that, in the present invention, the upper, lower, left and right in the drawings are regarded as the upper, lower, left and right of the photo-sensitive center accurate detection device of the photo-detector described in this specification.
The exemplary embodiments of the present invention will now be described with reference to the accompanying drawings, however, the present invention may be embodied in many different forms and is not limited to the embodiments described herein, which are provided for complete and complete disclosure of the present invention and to fully convey the scope of the present invention to those skilled in the art. The terminology used in the exemplary embodiments illustrated in the accompanying drawings is not intended to be limiting of the invention. In the drawings, the same units/elements are denoted by the same reference numerals.
Unless otherwise defined, terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Further, it will be understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense.
Example 1:
this embodiment provides an accurate detection device of photosensitive center of photoelectric detector, including the microscope, still include the two vertical axis combination detection device that use with the microscope cooperation, two vertical axis combination detection device include from last to down the last vertical axis lid 22, vertical axis cover 21 and the lower vertical axis seat 20 that connect gradually, it is all coaxial to go up vertical axis lid 22, vertical axis cover 21 and lower vertical axis seat 20.
The implementation process of the invention comprises the following steps:
the lower vertical shaft seat 20 in the double-vertical-shaft combined detection device is placed on a disc of a microscope to be directly pressed and fixed, an ocular lens system of the microscope is adjusted, an ocular cross division line is adjusted on the center of the cross section of the lower vertical shaft seat 20, after the adjustment is finished, a trimmed photoelectric detector part 23 with a ring to be detected is arranged on a vertical shaft sleeve 21, a vertical shaft cover 22 is spun, the automatic center determination and accurate positioning are realized, and a fixed stable vertical shaft is formed;
the vertical shaft sleeve 21 is arranged on the lower vertical shaft base 20 to form a rotatable standard cylindrical vertical shaft, the vertical shaft sleeve 21 is rotated during measurement, and the center of the photosensitive surface of the photoelectric detector component 23 with the ring is found through the microscope ocular. As shown in fig. 6, the microscope is not shown in the figure. As shown in FIG. 2, the center of the intersection of the F-axis and the G-axis is the center of the photosurface.
The invention solves the problems of overlarge deviation amount and coaxiality measurement of the manufacturing reference 1 and the detection reference 2 of the double four-quadrant photoelectric detector, can be convenient for assembling and disassembling devices on a general optical instrument, is quick and can avoid repeated calibration.
Example 2:
on the basis of embodiment 1, this embodiment provides an accurate detection device of photosensitive center of photoelectric detector, go up vertical shaft lid 22 and be the round body structure, both ends are all opened, and the center is from last to being down in proper order for from finding right bearing terminal surface 12 and last vertical shaft hole 24. As shown in fig. 7.
The center of the vertical shaft sleeve 21 is sequentially provided with an upper vertical shaft excircle 26, a self-centering conical surface 30, an accommodating cavity, a lower vertical shaft hole 29 and a lower vertical shaft bearing end face I28 from top to bottom. As shown in fig. 8.
The lower vertical shaft base 20 comprises a cylinder, a second lower vertical shaft force bearing end face 32 and an aligning part end face 12 which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle 31. As shown in fig. 9.
The principle of the invention is as follows:
the accurate detection device for the photosensitive center of the photoelectric detector can automatically determine the center, so that the center of the photosensitive surface of the part 23 with the photoelectric detector can be directly measured. The invention adopts the structural principle of a vertical shaft, realizes the automatic determination of the center of the photosensitive surface of the device by utilizing a semi-moving cylindrical vertical shaft structure, realizes the quick calibration of a standard cylindrical vertical shaft, designs and forms a double-vertical-shaft combined detection device, and directly measures the annular photoelectric detector component 23.
As shown in fig. 5, fig. 5 (a) is a typical standard cylindrical vertical shaft structure, and the matching size 13, the matching gap 14 and the first 15 bearing end face of the collimation part are reasonably designed to realize quick and accurate centering; fig. 5 (b) is a semi-moving cylindrical vertical shaft structure with higher centering precision, which is an improvement on the structure in fig. 5 (a), and after a conical surface 19 is added at the upper end of the shaft sleeve, the movable bearing is formed by the ball 18 and the self-centering bearing end surface I17, so that the automatic centering is realized.
As shown in FIG. 6, the double vertical shaft combined detecting device is composed of a lower vertical shaft base 20, a vertical shaft sleeve 21 and an upper vertical shaft cover 22, a photo-detector part 23 with a ring is arranged on the detecting device, and the photo-detector part 23 with a ring is shown in FIG. 4.
The detection device has the following characteristics: (1) the reference conical surface 10 in the photoelectric detector part 23 with the ring is used for positioning and has the characteristics of suspension and swing, and the photoelectric detector part 23 with the ring is used as the ball 18 in the figure 5 (b) by adjusting the tolerance of the conical surface 19; (2) in the spinning process of the upper vertical shaft cover 22 in fig. 7, the second self-aligning bearing end face 25 in fig. 7 is tangent to the end face 12 in the band-shaped photoelectric detector part 23 and moves along the axis matched with the excircle 26 of the upper vertical shaft in fig. 7 and the excircle 26 of the upper vertical shaft in fig. 8, the reference conical surface 10 in fig. 4 and the self-centering conical surface 30 in fig. 8 realize automatic centering and accurate positioning through suspension and swing, and the semi-moving cylindrical vertical shaft structure is changed into a fixed fastening vertical shaft structure; (3) in FIG. 8, the lower vertical shaft hole 29 is matched with the outer circle 31 of the lower vertical shaft in FIG. 9, and the first lower vertical shaft bearing end surface 28 in FIG. 8 is closely tangent to the second lower vertical shaft bearing end surface 32 in FIG. 9 to form a standard cylindrical vertical shaft; (4) and placing the second end face 33 of the collimation part in the figure 9 on a measuring disc of the tool microscope, calibrating the center of the excircle 31 of the lower vertical shaft in the figure 9, and fixing the lower vertical shaft seat 20 in the figure 9 to form a fixed, reproducible and repeatedly transferable measuring datum.
Example 3:
on the basis of embodiment 2, this embodiment provides a device for accurately detecting the photosensitive center of a photodetector, and the design specification of the upper vertical shaft cover 22 requires: the perpendicularity of the upper vertical shaft hole 24 and the second self-aligning bearing end face 25 is not more than 0.002mm, the cylindricity of the upper vertical shaft hole 24 is not more than 0.003mm, and the bearing end face is formed by one-time grinding and pressure grinding, and the surface roughness is Ra0.1.
Example 4:
on the basis of embodiment 2, this embodiment provides an apparatus for accurately detecting a photosensitive center of a photodetector, where the design and manufacturing requirements of the vertical shaft sleeve 21 are as follows: the verticality of the lower vertical shaft hole 29 and the bearing end surface 28 of the lower vertical shaft is less than 0.002mm, and the cylindricity of the lower vertical shaft hole 29 is less than 0.003mm after grinding; the self-centering conical surface 305, a vertical shaft hole 29 below the self-centering conical surface angle 27 and a lower vertical shaft bearing end surface I28 are taken as references, the coaxiality relative to the references is less than 0.001mm, and a 30-degree inclined plane of the self-centering conical surface angle 27 is processed into a forward tolerance of 30'; the vertical shaft hole 29 below the excircle 26 of the upper vertical shaft and the self-centering conical surface angle 27 are used as references, and are subjected to matched grinding according to the size of the upper vertical shaft hole 24, the cylindricity after grinding is less than 0.003mm, the gap is controlled within 0.002mm, the coaxiality relative to the references is less than 0.001mm, the rotation is easy and smooth, and the phenomena of tightening, astringency or jumping cannot be generated; the surface roughness of each functional surface is Ra0.1.
Example 5:
on the basis of embodiment 2, this embodiment provides a device for accurately detecting the photosensitive center of a photodetector, and the design technical requirements of the lower vertical shaft base 20 are as follows: the flatness requirement after the second 33 end faces of the collimation parts are finely ground is less than 0.002 mm; the lower vertical shaft excircle 31 and the lower vertical shaft bearing end face II 32 are processed by taking the alignment part end face II 33 as a reference, the parallelism between the lower vertical shaft bearing end face II 32 and the alignment part end face II 33 is less than 0.001mm, the verticality between the lower vertical shaft excircle 31 and the alignment part end face II 33 is less than 0.001mm, and the lower vertical shaft hole 29 in the graph 8 is subjected to matched grinding according to the size, the gap is controlled within 0.002mm, the rotation is easy and smooth, and the phenomena of tightening, astringency or jumping cannot be generated; the surface roughness of each functional surface is Ra0.1.
The assembling method of the double-vertical-shaft combined detection device comprises the following steps: firstly, an upper vertical shaft hole 24 in an upper vertical shaft cover 22 in FIG. 7 is matched with an upper vertical shaft excircle 26 in a vertical shaft sleeve 21 in FIG. 8, and smooth spinning is carried out inwards through threaded connection, so that the phenomena of tightening and unsmooth are not generated; and then the combined component is matched with the lower vertical shaft excircle 31 in the lower vertical shaft seat 20 in the figure 9 through the lower vertical shaft hole 29 in the vertical shaft sleeve 21 in the figure 8, and can be tightly attached to the lower vertical shaft bearing end surface second 32 in the figure 9 to easily and smoothly rotate without generating tightening and unsmooth, thus finishing the assembly.
Example 6:
the embodiment provides a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which uses a device for accurately measuring the photosensitive center of the photoelectric detector and comprises the following steps:
step 1) trimming a to-be-detected band-ring photoelectric detector part 23, and performing iterative conversion on a photosensitive center to form a new reference for optical system installation and adjustment;
step 2) placing a lower vertical shaft seat 20 in the double-vertical-shaft combined detection device on a disc of a microscope to be directly compressed and fixed, adjusting an eyepiece system of the microscope, adjusting the center of the cross section of the lower vertical shaft seat 20 by an eyepiece cross division line, after the adjustment is finished, installing a trimmed photoelectric detector part 23 with a ring to be detected on a vertical shaft sleeve 21, spinning a vertical shaft cover 22, realizing automatic center determination and accurate positioning, and forming a fixed stable vertical shaft;
and 3) mounting the vertical shaft sleeve 21 on the lower vertical shaft base 20 to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve 21 during measurement, and finding the center of the photosensitive surface with the photoelectric detector component 23 through the microscope eyepiece.
The principle of the invention is as follows:
because the deviation between the manufacturing reference 1 of the device and the detection reference 2 measured by the center of the photosensitive surface is more than 0.2mm, the existing assembly of the ring-shaped photoelectric detector component 23, the trimming processing method of the reference conical surface 10 thereof and the presetting detection method of the laser guide head optical system are not applicable, and therefore a new trimming method is needed.
From the assembly process analysis, there are three transformation iteration errors: firstly, a manufacturing error exists between the device manufacturing reference 1 and a detection reference 2 measured at the center of the photosurface in the device manufacturing reference 1 in the figure 1, and the device manufacturing reference and the detection reference have deviation; when the reference conical surface 10 and the end surface 12 of the ring photoelectric detector component 23 in fig. 4 are trimmed and processed, the detection reference 2 in fig. 1 is not taken as a reference, but the device manufacturing reference 11 in fig. 1 is taken as a clamping and positioning reference, the references are converted, and a reference misalignment error is introduced; thirdly, when the center of the photosurface in fig. 4 is measured, the reference conical surface 10 and the end surface 12 in fig. 4 are not taken as the measurement reference, and the device manufacturing reference 1 in fig. 1 is still taken as the measurement reference, so that reference conversion iteration occurs and a misalignment error is introduced. These factors can cause misjudgment of results and are also key links for improving the assembly process.
The invention relates to a method for directly measuring and analyzing key points at the center of a photosensitive surface of a part 23 with a photoelectric detector. After the ring-shaped photoelectric detector part 23 in fig. 4 is assembled and cut, the reference conical surface 10 and the end surface 12 in fig. 4 are the reference for the measurement of the ring-shaped photoelectric detector and the adjustment of the optical system of the laser seeker. During measurement, the primary problem is to accurately simulate a reference system consisting of the reference conical surface 10 and the end surface 12 in fig. 4, and the key technology for designing the measurement method. The center of the photosensitive surface with the photoelectric detector part 23 in fig. 4 can not be in contact measurement, and only can be measured by a general optical instrument, the batch measurement requirement is met during measurement, the measurement can be quickly calibrated, repeated calibration is not needed, the measurement efficiency is high, and the problem is also considered in the design of the measurement method. From structural feature analysis of the belt ring photoelectric detector part 23, the length of the reference conical surface 10 in fig. 4 is only 2.2mm, the angle of the inclined surface is 30 degrees, the conical surface 19 is too short, the problems of swing and suspension exist during positioning, and direct positioning and centering are not stable; the end face 12 and the reference conical surface 10 in fig. 4 are machined by one trimming, so that the mutual position accuracy can be improved, and the end face and the reference conical surface are used as auxiliary references for positioning and centering. Therefore, the reference system formed by the reference conical surface 10 and the end surface 12 in fig. 4 is accurately simulated, and the accurate measurement device for the photosensitive center of the photoelectric detector is used for automatically determining the center to realize stable positioning and centering, so that accurate measurement can be realized.
The photodetector component 23 with ring in fig. 4 is formed by adhering and assembling the part ring in fig. 3 on the photodetector in fig. 1, and then trimming and processing.
Example 7:
on the basis of embodiment 6, the invention provides a method for accurately measuring the center of a photosensitive surface of a photoelectric detector, and the specific process of the step 1) is as follows:
coating polysulfide sealant in a bonding sealant accommodating hole 6 of the part ring, assembling the part ring on a detection reference 2 of a photoelectric detector part, and curing the polysulfide sealant to obtain a photoelectric detector part 23 with a ring;
taking the manufacturing reference 1 of the photoelectric detector part 23 with the ring as a reference, installing the photoelectric detector with the ring on a precision lathe by using a clamp for trimming, processing an excircle size 9, a reference conical surface 10, a conical surface angle 11 and an end surface 12 at corresponding positions, and enabling a detection reference 2 measured by the center of a photosensitive surface to be iteratively converted on the reference conical surface 10 to form a new reference for installing and adjusting an optical system.
During assembly, firstly, a proper amount of polysulfide sealant is coated in a bonding glue containing hole 6 of a part ring in a graph 3, then the part ring in the graph 3 is assembled on a detection reference 2 of a photoelectric detector in the graph 1, a matching hole 2 in the part ring in the graph 3 is matched with the detection reference 2 of the photoelectric detector in the graph 1, the part ring can easily and smoothly rotate without clamping stagnation, and a reference end face II 7 in the graph 3 is tightly attached to a reference end face I3 in the graph 1; after the polysulfide sealant is cured, the manufacturing reference 1 of the photoelectric detector in the figure 1 is taken as a reference, the photoelectric detector with the ring is arranged on a precise lathe by a clamp, the conical surface trimming part 4 in the figure 3 is trimmed according to the technical requirements of the figure 4, the excircle size 9, the reference conical surface 10, the conical surface angle 11 and the end surface 12 in the figure 4 are processed, the photosensitive surface center detection reference 2 in the figure 1 of the device is converted to the reference conical surface 10 in the figure 4 in an iteration mode, and a new reference for assembling and adjusting an optical system is formed.
Example 8:
the method of the invention is adopted in the embodiment to solve the problems existing in a batch of inlet photoelectric detectors.
When the imported photoelectric detector is put into factory for inspection, the deviation between the manufacturing reference 11 of the device in the figure 1 and the detection reference 2 measured at the center of the photosensitive surface in the figure 1 is more than 0.2mm, about 2500 out-of-tolerance devices exist, the cost of the device is high, more than ten thousand elements of a single device can be generated, and huge economic loss can be generated if the device is not used. In view of shortage of photoelectric detector sources, the batch of devices are needed to be used, but the original assembly of the photoelectric detector part 23 with the ring, the trimming and processing method of the reference conical surface 10 of the photoelectric detector part and the presetting and detecting method of the optical system of the laser guide head are not applicable. The method mainly aims at carrying out classification research on the problem of the deviation of the centers of the photosurfaces of the batch of the imported devices, formulating a corresponding assembly scheme, adopting corresponding technical measures and designing a new assembly and measurement method, thereby not only meeting the assembly requirements of the batch of the eccentric imported devices, but also meeting the performance requirements of the optical system of the laser guide head.
The above practical problems are solved by the following steps:
step 1) is carried out on the conical surface 19 of the ring-equipped photodetector part 23
In order to eliminate the reference conversion error generated in the original assembly process of the ring-shaped photoelectric detector component 23, the ring-shaped photoelectric detector component 23 is clamped by a clamp, the clamp is shown in fig. 10, and the clamp is additionally provided with an auxiliary reference surface and a floating and center-correcting function. During trimming, a fixture is reliably installed on a main shaft of equipment by connecting a main shaft 35 of a machine tool, the manufacturing reference 1 of the device in the figure 1 is a clamping part, but a trimming auxiliary reference of the reference end face in the figure 1 is added, then the correcting excircle 34 in the figure 10 is adjusted to the rotation center of the main shaft of the equipment, the runout is smaller than 0.003mm, and trimming processing is carried out by taking the conical surface trimming reference 8 as a reference; the 30 ° bevel of the reference cone 10 in fig. 4 is trimmed to a negative tolerance of 40 "as required for the improvement.
Step 2) measuring method for center of photosensitive surface of detector component
Firstly, placing a collimation part II of a lower vertical shaft seat 20 in the double-vertical-shaft combined detection device of FIG. 6 on a disc of a tool microscope to be directly pressed and fixed without correcting to the rotation center position of the disc; and adjusting the eyepiece system of the microscope to adjust the cross division line of the eyepiece to the center of the excircle 31 of the lower vertical shaft in the figure 9. After adjustment, the part 23 with the ring photoelectric detector to be detected is arranged at the position of the part 23 with the ring photoelectric detector in fig. 6, the upper vertical shaft cover 22 in fig. 6 is spun, and the automatic centering and accurate positioning are realized by means of the suspension amount and the swinging amount existing between the reference conical surface 10 in fig. 4 and the self-centering conical surface 30 at the upper end of the shaft sleeve in fig. 8, so that a fixed stable vertical shaft is formed; then the lower vertical shaft hole 29 in the figure 8 is arranged on the outer circle 31 of the lower vertical shaft in the figure 9 which is calibrated in place to form a rotatable standard cylindrical vertical shaft; in the measurement, the knurled part of the vertical shaft sleeve 21 in the figure 6 is rotated, and the deviation of the center of the photosensitive surface of the component 23 with the photoelectric detector is observed through an ocular lens of a tool microscope. The device is replaced and the measurement is carried out according to the method, and the batch measurement is realized without recalibration.
The trimming method can eliminate the deviation error between the manufacturing reference 1 of the device shown in figure 1 and the axis of the detection reference 2 measured at the center of the photosensitive surface shown in figure 1, not only can meet the assembly requirement of an out-of-tolerance device, but also can eliminate the reference conversion error in the original assembly process.
After trimming, the center of the photosurface of the ring-equipped photodetector component 23 is measured by matching a microscope and a double-vertical-axis combined detection device. The invention can directly observe and measure the photosensitive center.
Compared with the prior art, the invention has the following characteristics:
1) the problem analysis that the deviation amount of the device manufacturing reference 1 and the detection reference 22 is too large and the original assembly scheme of the photoelectric detector part with a belt 23 has reference conversion errors is combined, and the assembly conical surface 19 of the part is trimmed;
2) analyzing key technical difficulties of directly measuring the center of the photosurface of the component 23 with the ring photoelectric detector, determining a measuring principle, and designing a new method for accurate measurement and a double-vertical-axis combined detection device with strong originality;
3) the adjustment of the angle tolerance manufactured by the reference conical surface 10 in the photoelectric detector component 23 with the ring is improved, the angle tolerance of the self-centering conical surface 30 at the upper end of the vertical shaft sleeve 21 is reversely given, and the circular line contact is formed, so that the suspension amount and the swing amount are larger when the conical surface 19 is positioned and centered, and the use function of the ball 18 equivalent to a semi-moving cylindrical vertical shaft can be realized;
4) after the center is automatically determined, the semi-moving cylindrical vertical shaft structure is changed into a fixed fastening vertical shaft structure through thread pressing, so that the positioning and centering are more accurate and stable.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.
Claims (10)
1. The utility model provides a photosensitive center accurate detection device of photoelectric detector, includes the microscope, its characterized in that: the microscope is characterized by further comprising a double-vertical-shaft combined detection device matched with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover (22), a vertical shaft sleeve (21) and a lower vertical shaft seat (20) which are sequentially connected from top to bottom, and the upper vertical shaft cover (22), the vertical shaft sleeve (21) and the lower vertical shaft seat (20) are all coaxial.
2. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the upper vertical shaft cover (22) is of a round structure, two ends of the upper vertical shaft cover are both open, and the center of the upper vertical shaft cover is provided with a self-aligning bearing end face (12) and an upper vertical shaft hole (24) from top to bottom in sequence.
3. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the center of the vertical shaft sleeve (21) is sequentially provided with an upper vertical shaft excircle (26), a self-centering conical surface (30), a containing cavity, a lower vertical shaft hole (29) and a lower vertical shaft force bearing end face I (28) from top to bottom.
4. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the lower vertical shaft seat (20) comprises a cylinder, a second lower vertical shaft bearing end face (32) and an aligning part end face (12) which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle (31).
5. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 2, wherein: the perpendicularity of the upper vertical shaft hole (24) and the self-aligning bearing end face II (25) is not more than 0.002mm, the cylindricity of the upper vertical shaft hole (24) is not more than 0.003mm, and the surface roughness Ra0.1 is achieved.
6. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 3, wherein: the straightness that hangs down of vertical axis hole (29) and lower vertical axis load terminal surface (28) is less than 0.002mm, vertical axis hole (29) cylindricity is less than 0.003mm down, go up vertical axis excircle (26) and all following vertical axis hole (29) and lower vertical axis load terminal surface (28) as the benchmark from centering conical surface (30), and the axiality of relative benchmark is less than 0.001mm, go up vertical axis excircle (26) cylindricity and be less than 0.003mm, clearance control is within 0.002mm, each surface roughness Ra0.1.
7. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 4, wherein: the flatness of the second collimation part end face (33) is less than 0.002mm, the lower vertical shaft outer circle (31) and the second lower vertical shaft bearing end face (32) are machined by taking the collimation part end face (12) as a reference, the parallelism of the second lower vertical shaft bearing end face (32) and the second collimation part end face (33) is less than 0.001mm, the verticality of the outer lower vertical shaft circle (31) and the second collimation part end face (33) is less than 0.001mm, and the surface roughness of each surface is Ra0.1.
8. A method for accurately measuring the center of a photosensitive surface of a photodetector, using the apparatus for accurately measuring the center of a photosensitive surface of a photodetector according to claim 1, characterized in that: the method comprises the following steps:
step 1) trimming a to-be-detected band-ring photoelectric detector part (23), and performing iterative conversion on a photosensitive center to form a new reference for assembling and adjusting an optical system;
step 2) a lower vertical shaft seat (20) in the double-vertical shaft combined detection device is placed on a disc of a microscope to be directly compressed and fixed, an eyepiece system of the microscope is adjusted, an eyepiece cross division line is adjusted on the center of the cross section of the lower vertical shaft seat (20), after the adjustment is finished, a trimmed photoelectric detector part (23) with a ring to be detected is installed on a vertical shaft sleeve (21), a vertical shaft cover (22) is spun, automatic center determination and accurate positioning are achieved, and a fixed stable vertical shaft is formed;
and 3) mounting the vertical shaft sleeve (21) on the lower vertical shaft seat (20) to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve (21) during measurement, and finding the center of the photosensitive surface with the photoelectric detector component (23) through the microscope ocular.
9. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein the specific process of the step 1) is as follows:
coating polysulfide sealant in a bonding sealant accommodating hole (6) of the part ring, assembling the part ring on a detection reference (2) of a photoelectric detector part, and obtaining a photoelectric detector part (23) with a ring after the polysulfide sealant is cured;
the manufacturing standard (1) of a part (23) with the photoelectric detector is used as a standard, the photoelectric detector with the ring is arranged on a precision lathe by a clamp for trimming, the excircle size (9), the standard conical surface (10), the conical surface angle (11) and the end surface (12) are processed at corresponding positions, the detection standard (2) measured by the center of the photosensitive surface is iteratively converted on the standard conical surface (10), and a new standard for assembling and adjusting the optical system is formed.
10. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein: when in trimming, the clamp is arranged on a main shaft of the equipment, the manufacturing reference (1) of the ring belt photoelectric detector component (23) is taken as a clamping part, the reference end surface (12) of the ring belt photoelectric detector component (23) is taken as a trimming auxiliary reference, and then the correcting excircle (34) of the clamp is adjusted to the rotation center of the main shaft of the equipment, so that the runout is less than 0.003mm for trimming.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910848986.0A CN110676187B (en) | 2019-09-09 | 2019-09-09 | Device and method for accurately measuring center of photosensitive surface of photoelectric detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910848986.0A CN110676187B (en) | 2019-09-09 | 2019-09-09 | Device and method for accurately measuring center of photosensitive surface of photoelectric detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110676187A true CN110676187A (en) | 2020-01-10 |
| CN110676187B CN110676187B (en) | 2022-04-12 |
Family
ID=69076756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910848986.0A Active CN110676187B (en) | 2019-09-09 | 2019-09-09 | Device and method for accurately measuring center of photosensitive surface of photoelectric detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110676187B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111571498A (en) * | 2020-05-11 | 2020-08-25 | 中国电子科技集团公司第十一研究所 | Device for assembling multiband detector chip |
| CN112054075A (en) * | 2020-07-31 | 2020-12-08 | 重庆鹰谷光电股份有限公司 | Ultra-high precision silicon quadrant photoelectric detector |
| CN114377994A (en) * | 2021-12-10 | 2022-04-22 | 江苏大学 | Coaxial relation rapid detection tool based on photosensitive material and detection method thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2048625A (en) * | 1979-05-03 | 1980-12-10 | Philips Nv | Measuring and adjusting convergence in a shadow mask type display tube |
| JP2010026055A (en) * | 2008-07-16 | 2010-02-04 | Canon Inc | Optical scanner and image forming apparatus using the same |
| CN201903325U (en) * | 2010-12-08 | 2011-07-20 | 上海理工大学 | Goos-Hanchen shift real-time measurement system |
| CN203116749U (en) * | 2013-02-25 | 2013-08-07 | 上海米度测量技术有限公司 | Precise attitude measurement device |
| CN103604366A (en) * | 2013-11-06 | 2014-02-26 | 深圳市华星光电技术有限公司 | System for detecting error and guiding error correction and method thereof |
| CN105157623A (en) * | 2015-10-14 | 2015-12-16 | 重庆鹰谷光电有限公司 | TO photoelectric detector coaxiality detection device and method |
| CN108873185A (en) * | 2017-05-09 | 2018-11-23 | 中国航空制造技术研究院 | A kind of fast assembling-disassembling exempts from debugging formula photodetector attachment device |
| CN109405744A (en) * | 2018-12-26 | 2019-03-01 | 中国工程物理研究院流体物理研究所 | A kind of test device, installation method and the application method of spot center spatial position |
-
2019
- 2019-09-09 CN CN201910848986.0A patent/CN110676187B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2048625A (en) * | 1979-05-03 | 1980-12-10 | Philips Nv | Measuring and adjusting convergence in a shadow mask type display tube |
| JP2010026055A (en) * | 2008-07-16 | 2010-02-04 | Canon Inc | Optical scanner and image forming apparatus using the same |
| CN201903325U (en) * | 2010-12-08 | 2011-07-20 | 上海理工大学 | Goos-Hanchen shift real-time measurement system |
| CN203116749U (en) * | 2013-02-25 | 2013-08-07 | 上海米度测量技术有限公司 | Precise attitude measurement device |
| CN103604366A (en) * | 2013-11-06 | 2014-02-26 | 深圳市华星光电技术有限公司 | System for detecting error and guiding error correction and method thereof |
| CN105157623A (en) * | 2015-10-14 | 2015-12-16 | 重庆鹰谷光电有限公司 | TO photoelectric detector coaxiality detection device and method |
| CN108873185A (en) * | 2017-05-09 | 2018-11-23 | 中国航空制造技术研究院 | A kind of fast assembling-disassembling exempts from debugging formula photodetector attachment device |
| CN109405744A (en) * | 2018-12-26 | 2019-03-01 | 中国工程物理研究院流体物理研究所 | A kind of test device, installation method and the application method of spot center spatial position |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111571498A (en) * | 2020-05-11 | 2020-08-25 | 中国电子科技集团公司第十一研究所 | Device for assembling multiband detector chip |
| CN112054075A (en) * | 2020-07-31 | 2020-12-08 | 重庆鹰谷光电股份有限公司 | Ultra-high precision silicon quadrant photoelectric detector |
| CN112054075B (en) * | 2020-07-31 | 2023-01-06 | 重庆鹰谷光电股份有限公司 | Ultra-high precision silicon quadrant photoelectric detector |
| CN114377994A (en) * | 2021-12-10 | 2022-04-22 | 江苏大学 | Coaxial relation rapid detection tool based on photosensitive material and detection method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110676187B (en) | 2022-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110676187B (en) | Device and method for accurately measuring center of photosensitive surface of photoelectric detector | |
| CN102608727B (en) | Centering tool and method for determining reference of non-spherical reflector by using same | |
| CN106908961B (en) | Optical module adjustment method and tool based on infrared imaging | |
| CN201344989Y (en) | An optical lens and lens group | |
| CN104296694B (en) | The detection means and method of a kind of laser tracker optical axis and mechanical rotating shaft angle | |
| WO2016065731A1 (en) | Optical device for quick auxiliary centering utilizing axial chromatic aberration | |
| CN207763655U (en) | A kind of rotary axis Radial mixing detecting system | |
| CN104567752A (en) | Stray light elimination dual-optical-path optical centering instrument | |
| CN106441166A (en) | Optical fiber connector coaxiality detection method and device thereof | |
| CN111352207B (en) | Optical machine adjusting method based on card type optical system | |
| CN113721343B (en) | High-precision attitude sensor optical lens assembly test method | |
| CN102539123B (en) | Method for determining optical axis of large-caliber non-spherical reflecting mirror based on centering processing | |
| CN106291863A (en) | Dove prism installation and debugging method for fiber rotation connector | |
| CN109613673B (en) | Wide-temperature infrared lens, assembly and adjustment tool thereof and assembly and adjustment method thereof | |
| CN103246041A (en) | Objective lens assembly process | |
| CN102053327A (en) | Lens device | |
| Langehanenberg et al. | Smart and precise alignment of optical systems | |
| CN202472092U (en) | Centering tooling | |
| CN115740511A (en) | High-precision optical lens machining device and working method thereof | |
| CN214173705U (en) | Reference optical fiber unit of optical fiber spectrum telescope | |
| CN104833320B (en) | Anti-transmission Eccentric Instrument test platform and anti-transmission Eccentric Instrument | |
| CN204405031U (en) | Eliminate stray light double light path optical centering instrument | |
| CN208322144U (en) | A kind of turn-over tooling, the system for improving lens barrel turn-over centering machining accuracy | |
| CN110779686A (en) | Non-contact real-time precise adjusting and mounting method for coaxial optical lens | |
| CN109323849B (en) | Optical fiber cutting head zero focus measurement system and measurement method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |