CN110672876B - Flexible vector flow velocity sensor, sensor array and sensor preparation method - Google Patents
Flexible vector flow velocity sensor, sensor array and sensor preparation method Download PDFInfo
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- CN110672876B CN110672876B CN201911021092.0A CN201911021092A CN110672876B CN 110672876 B CN110672876 B CN 110672876B CN 201911021092 A CN201911021092 A CN 201911021092A CN 110672876 B CN110672876 B CN 110672876B
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- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
Abstract
The invention discloses a flexible vector flow velocity sensor, a sensor array and a sensor preparation method. The flexible vector flow rate sensor includes: the flexible film substrate, the piezoresistive sensing units and the signal leads are arranged on the flexible film substrate; a hole is formed in the flexible film substrate, and 4 cantilever beams extend from the edge of the hole to the center of the hole in the hole; any two adjacent cantilever beams are vertical to each other, and any two cantilever beams arranged at intervals are collinear; the number of the piezoresistive sensing units is the same as that of the cantilever beams; each piezoresistive sensing unit is fixed on the corresponding cantilever beam and is in contact with the flexible film substrate; the number of signal leads is 2 times of the number of piezoresistive sensing units; each signal lead is fixed on the flexible film substrate; one end of each signal lead is connected to the corresponding piezoresistive sensing unit, and the other end extends to the edge of the flexible film substrate. The invention can detect the incoming flow speed and direction and avoid the interference to the flow field.
Description
Technical Field
The invention relates to the field of flow field detection, in particular to a flexible vector flow velocity sensor, a sensor array and a sensor preparation method.
Background
Aircrafts play an increasingly important role in human production and scientific research activities. The flow field detection of the surface of the aircraft determines the stability and controllability of the aircraft, so that the real-time flow field detection of the surface of the aircraft has important significance. The current commonly used flow velocity measurement methods comprise mechanical speed measurement, pitot tube speed measurement, hot wire flow velocity meter speed measurement, grating method speed measurement and the like, but the flow velocity measurement methods generally have the defects of poor adaptability, large environmental influence, poor reliability, complex structure and the like when measuring the real-time flow field on the surface of an aircraft.
CN201710141128 discloses a bionic gas flow velocity sensor, which relies on cantilever beam in flow field to generate deflection due to fluid-solid coupling principle, so as to obtain flow field information. However, the cantilever beam of the cantilever beam type sensor extends into the flow field, which will interfere with the flow field and is difficult to apply to the surface of the aircraft.
Disclosure of Invention
The invention aims to provide a flexible vector flow velocity sensor, a sensor array and a sensor preparation method, which can avoid interference on a flow field.
In order to achieve the purpose, the invention provides the following scheme:
a flexible vector flow rate sensor comprising: the flexible film substrate, the piezoresistive sensing units and the signal leads are arranged on the flexible film substrate;
a hole is formed in the flexible film substrate, and 4 cantilever beams extend from the edge of the hole to the center of the hole in the hole; any two adjacent cantilever beams are vertical to each other, and any two cantilever beams arranged at intervals are collinear; the number of the piezoresistive sensing units is the same as that of the cantilever beams; each piezoresistive sensing unit is fixed on the corresponding cantilever beam and is in contact with the flexible film substrate; the number of the signal leads is 2 times that of the piezoresistive sensing units; each signal lead is fixed on the flexible film substrate; one end of each signal lead is connected to the corresponding piezoresistive sensing unit, and the other end of each signal lead extends to the edge of the flexible film substrate;
the flexible film substrate is used for being stuck on the surface of an object to be detected; the cantilever beam is used for generating vibration under the action of a flow field; the piezoresistive sensing unit is used for converting a stress signal generated under the vibration action of the cantilever into an electric signal.
Optionally, the flexible film substrate and the cantilever are made of polyimide.
Optionally, the upper surface of the cantilever beam is flush with the upper surface of the flexible film substrate; the thickness of the cantilever beam is smaller than that of the flexible film substrate.
Optionally, the piezoresistive sensing unit is arranged on an upper surface of the cantilever beam.
Optionally, the piezoresistive sensing unit comprises a first piezoresistive sensing bar, two second piezoresistive sensing bars and two third piezoresistive sensing bars; the first piezoresistive sensing strips are positioned on the cantilever beam, and the two third piezoresistive sensing strips are positioned on the flexible film substrate; one end of each of the two second piezoresistive sensing strips is positioned on the cantilever beam, and the other end of each of the two second piezoresistive sensing strips is positioned on the flexible film substrate; the two second piezoresistive sensing strips are parallel to each other, and the extending direction of the two second piezoresistive sensing strips is the same as the extending direction of the cantilever beam; one ends of the two second piezoresistive sensing strips, which are positioned on the cantilever beam, are respectively connected to two ends of the first piezoresistive sensing strip; the two third piezoresistive sensor bars are respectively connected to one ends of the two second piezoresistive sensor bars, which are positioned on the flexible film substrate; and the two third piezoresistive sensing bars are arranged oppositely.
Optionally, two of the third piezoresistive sensor bars are connected to a signal lead respectively.
A flexible vector flow rate sensor array comprising a plurality of said flexible vector flow rate sensors; and the signal lead of each flexible vector flow velocity sensor is connected to the same processing circuit.
A method of making a flexible vector flow rate sensor, comprising:
processing a hole on the polyimide film by utilizing a reactive ion etching technology to obtain an etched polyimide film;
bonding an unetched polyimide film on the etched polyimide film through hot pressing to obtain a bonded film;
processing 4 piezoresistive sensing units on the upper surface of the bonding film by spraying graphene dispersion liquid; 4 piezoresistive sensing units are uniformly distributed along the edge of the hole;
processing 8 signal leads on the upper surface of the bonding film by sputtering a chromium gold electrode; each piezoresistive sensing unit is connected with two signal leads; each signal lead extends to the edge of the bonding film;
and 4 cantilever beams extending from the edge of the hole to the center of the hole are processed on the bonding film by utilizing a reactive ion etching technology, so that any two adjacent cantilever beams are perpendicular to each other, and any two cantilever beams arranged at intervals are collinear.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: according to the flexible vector flow velocity sensor, the sensor array and the sensor manufacturing method, the substrate is a flexible film substrate and can be attached to the surface of an object to be measured, and meanwhile, the cantilever beam is located in the hole of the flexible film substrate and extends from the edge of the hole to the center of the hole, so that the cantilever beam and the flexible film substrate are located in the same plane, and the phenomenon that the cantilever beam directly extends into a flow field to generate interference on the flow field is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a structural view of a flexible vector flow rate sensor of embodiment 1 of the present invention;
FIG. 2 is an enlarged view of a part of a flexible vector flow rate sensor according to embodiment 1 of the present invention;
fig. 3 is a structural diagram of a piezoresistive sensing unit in the flexible vector flow velocity sensor according to embodiment 1 of the present invention;
fig. 4 is a schematic view of a principle simulation of the flexible vector flow velocity sensor of embodiment 1;
FIG. 5 is a cloud view of a flow field velocity profile of a conventional cantilever beam structure extending beyond a boundary layer;
fig. 6 is a cloud chart of the velocity distribution of the flow field when the flexible vector flow velocity sensor of the present embodiment 1 is used to measure the flow field;
FIG. 7 is a structural view of a flexible vector flow rate sensor array of embodiment 2;
fig. 8 is a schematic view of a manufacturing method of the flexible vector flow rate sensor of example 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1:
the flexible vector flow rate sensor disclosed in this example 1 is used for aircraft surface flow field flow rate detection.
Fig. 1 is a structural view of a flexible vector flow rate sensor according to embodiment 1 of the present invention.
Fig. 2 is a partially enlarged view of a flexible vector flow rate sensor according to embodiment 1 of the present invention.
Referring to fig. 1 and 2, the flexible vector flow rate sensor includes: flexible film substrate 1, piezoresistive sensing elements 3 and signal leads 2.
A hole is arranged on the flexible film substrate 1, and 4 cantilever beams 4 extend from the edge of the hole to the center of the hole in the hole; any two adjacent cantilever beams are vertical to each other, and any two cantilever beams arranged at intervals are collinear; the number of the piezoresistive sensing units 3 is the same as that of the cantilever beams 4; each piezoresistive sensing unit 3 is fixed on the corresponding cantilever beam 4 and is in contact with the flexible film substrate 1; the number of signal leads 2 is 2 times the number of piezoresistive sensing units 3; each signal lead 2 is fixed on the flexible film substrate 1; each signal lead 2 has one end connected to a corresponding piezoresistive sensing unit 3 and the other end extending to the edge of the flexible film substrate 1.
One end of the piezoresistive sensing unit 3 extends to the middle part of the cantilever beam 4, and the other end extends to the flexible film substrate 1, so that the piezoresistive sensing unit 3 is fixed at the root part of the cantilever beam 4 (i.e. the position of the cantilever beam 4 connected with the flexible film substrate).
The flexible film substrate 1 is used for being stuck on the surface of an object to be detected; the cantilever beam 4 is used for generating vibration under the action of a flow field; the piezoresistive sensing units 3 are used to convert the stress change generated under the vibration of the cantilever beam 4 into a resistance change. The signal lead 2 is used to output the change in resistance of the piezoresistive sensing elements 3 to an external processing circuit.
The flexible film substrate 1 and the cantilever beam 4 are made of polyimide. The flexible film substrate 1 is a polyimide film so as to be able to adapt to curved surfaces without curvature, and thus to be suitable for curved surfaces of aircraft.
The hole is a square hole, and 4 cantilever beams 4 are respectively connected to four edges of the hole. Each cantilever beam 4 is perpendicular to the edge of the hole to which it is attached. The cantilever beams 4 in different directions have different vibration behaviors to the same flow field, and the detection on the flow field direction can be realized by combining the vibration behaviors of the 4 cantilever beams. Under different flow rates, the vibration amplitude of the cantilever beam 4 is different, so that the flow rate of the flow field can be determined.
The upper surface of the cantilever beam 4 is flush with the upper surface of the flexible film substrate 1, so that the cantilever beam 4 is kept in the plane of the flexible film substrate 1, and the damage to the flow field caused by the fact that the cantilever beam extends into the flow field is avoided. The thickness of the cantilever beam 4 is smaller than that of the flexible film substrate 1, so that a certain vibration space is reserved for the vibration of the cantilever beam 4.
The piezoresistive sensing units 3 are arranged on the upper surface of the cantilever beam 4.
Fig. 3 is a structural diagram of a piezoresistive sensing unit in the flexible vector flow velocity sensor according to embodiment 1 of the present invention.
Referring to fig. 3, the piezoresistive sensing units 3 are in a zigzag structure. The piezoresistive sensing unit 3 comprises a first piezoresistive sensing bar, two second piezoresistive sensing bars and two third piezoresistive sensing bars; the first piezoresistive sensing strips are positioned on the cantilever beam 4, and the two third piezoresistive sensing strips are positioned on the flexible film substrate 1; one end of each of the two second piezoresistive sensing strips is positioned on the cantilever beam 4, and the other end of each of the two second piezoresistive sensing strips is positioned on the flexible film substrate 1; the two second piezoresistive sensing strips are parallel to each other and the extending direction of the two second piezoresistive sensing strips is the same as the extending direction of the cantilever beam 4; one ends of the two second piezoresistive sensing strips, which are positioned on the cantilever beam 4, are respectively connected to two ends of the first piezoresistive sensing strip; the two third piezoresistive sensing strips are respectively connected to one ends of the two second piezoresistive sensing strips, which are positioned on the flexible film substrate 1; the two third piezoresistive sensor bars are arranged oppositely.
The two third piezoresistive sensor bars are respectively connected with a signal lead 2.
When a flow field flows, the cantilever beam vibrates under the action of fluid-solid coupling, and the piezoresistive sensing unit at the root of the cantilever beam (namely the position of the cantilever beam connected with the flexible film substrate) converts the deformation of the cantilever beam into the change of a resistance signal and outputs the change along with a signal line. The amplitude of the cantilever beam can change along with the change of the flow velocity, so that the flow velocity can be measured according to the change amplitude of the resistance; the four cantilever beams are arranged vertically, the vibration response of the flow field in the same direction is different, and the flow velocity direction can be measured. Because the cantilever beam has small amplitude, the cantilever beam can be ensured to be always positioned on a boundary layer of the aircraft, the interference of a flow field on the surface of the aircraft is avoided, the integrity and the continuity of the flow field on the surface of the aircraft are ensured, and the influence of the generation of vortex on the flight is prevented.
Flow velocity and direction measurement principle: when the flow velocity is increased, the displacement of the tail end of the cantilever beam is correspondingly increased, namely the amplitude of the cantilever beam is increased, and the corresponding resistance change is also increased, so that the flow velocity is measured by measuring the change amplitude of the resistance. Likewise, the vibration behavior of the cantilever beam is different for different incoming flows, so that the direction of the flow velocity can be measured.
Fig. 4 is a schematic diagram of a principle simulation of the flexible vector flow rate sensor of embodiment 1.
Referring to fig. 4, when the flow velocity is increased, the displacement of the tail end of the cantilever beam 4 is correspondingly increased, that is, the amplitude of the cantilever beam is increased, and the corresponding resistance change is also increased, so that the flow velocity is measured by measuring the change amplitude of the resistance; likewise, the vibration behavior of the cantilever beam is different for different incoming flows, so that the direction of the flow velocity can be measured.
Fig. 5 is a cloud diagram of the flow field velocity distribution of a conventional cantilever structure outside an extended boundary layer.
Referring to FIG. 5, the cantilever beam extends beyond the boundary layer and the outer flow field is greatly disturbed, creating significant eddy currents that can have a severe effect on the flight of the aircraft.
Fig. 6 is a cloud chart of the velocity distribution of the flow field when the flexible vector flow velocity sensor of the present embodiment 1 is used to measure the flow field.
As can be seen from fig. 6, the cantilever beam is always kept within the boundary layer, and the flow field above the cantilever beam is not disturbed by the cantilever beam and still remains stable and continuous, which provides a basis for the application on the surface of the aircraft, and can prevent the flow field on the surface of the aircraft from being disturbed to generate eddy currents, boundary layer separation and the like to affect the normal navigation of the aircraft.
Example 2:
Fig. 7 is a structural diagram of a flexible vector flow rate sensor array of embodiment 2.
Referring to fig. 7, the flexible vector flow rate sensor array comprises a plurality of flexible vector flow rate sensors of embodiment 1; the signal leads of each flexible vector flow rate sensor are connected to the same processing circuit. The plurality of flexible vector flow rate sensors are arranged in one or more rows. The flexible vector flow velocity sensor array can realize the detection of a plurality of flow fields.
Example 3:
this example 3 provides a method of manufacturing a flexible vector flow rate sensor, which is used to manufacture the flexible vector flow rate sensor of example 1.
Fig. 8 is a schematic view of a manufacturing method of the flexible vector flow rate sensor of example 3.
Referring to fig. 8, the preparation method includes:
a, processing a hole on a Polyimide (PI) film by utilizing a Reactive Ion Etching (RIE) technology to obtain an etched polyimide film;
bonding the unetched polyimide film on the etched polyimide film through hot pressing to obtain a bonded film;
c, spraying graphene dispersion liquid on the upper surface of the bonding film to process 4 piezoresistive sensing units; 4 piezoresistive sensing units are uniformly distributed along the edge of the hole;
d, processing 8 signal leads on the upper surface of the bonding film by sputtering a chromium gold electrode; each piezoresistive sensing unit is connected with two signal leads; each signal lead extends to the edge of the bonding film;
and E, processing 4 cantilever beams extending from the edge of the hole to the center of the hole on the bonding film by utilizing a reactive ion etching technology, so that any two adjacent cantilever beams are perpendicular to each other, and any two cantilever beams arranged at intervals are collinear.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
1) according to the flexible vector flow velocity sensor, the sensor array and the sensor manufacturing method, the substrate is a flexible film substrate and can be attached to the surface of an object to be measured, meanwhile, the cantilever beam is located in the hole of the flexible film substrate and extends from the edge of the hole to the center of the hole, so that the cantilever beam and the flexible film substrate are located in the same plane and are distributed within a boundary layer of an aircraft, and interference of the flexible film substrate directly extending into a flow field to a flow field is avoided.
2) The piezoresistive sensing units 3 are positioned at the root parts of the cantilever beams 4, are obviously stressed and have better stability and reliability.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (7)
1. A flexible vector flow rate sensor, comprising: the flexible film substrate, the piezoresistive sensing units and the signal leads are arranged on the flexible film substrate;
a hole is formed in the flexible film substrate, and 4 cantilever beams extend from the edge of the hole to the center of the hole in the hole; the hole is a square hole, and the 4 cantilever beams are respectively connected to four edges of the hole; each cantilever beam is perpendicular to the edge of the connected hole; any two adjacent cantilever beams are vertical to each other, two cantilever beams which are arranged at any interval are collinear, and the upper surfaces of the cantilever beams are flush with the upper surface of the flexible film substrate; the thickness of the cantilever beam is smaller than that of the flexible film substrate; the number of the piezoresistive sensing units is the same as that of the cantilever beams; each piezoresistive sensing unit is fixed on the corresponding cantilever beam and is in contact with the flexible film substrate; the number of the signal leads is 2 times that of the piezoresistive sensing units; each signal lead is fixed on the flexible film substrate; one end of each signal lead is connected to the corresponding piezoresistive sensing unit, and the other end of each signal lead extends to the edge of the flexible film substrate;
the flexible film substrate is used for being stuck on the surface of an object to be detected; the cantilever beam is used for generating vibration under the action of a flow field; the piezoresistive sensing unit is used for converting stress change generated under the vibration action of the cantilever into resistance change.
2. The flexible vector flow rate sensor of claim 1, wherein the flexible film substrate and the cantilever beam are both made of polyimide.
3. The flexible vector flow rate sensor of claim 1, wherein the piezoresistive sensing unit is disposed on an upper surface of the cantilever beam.
4. The flexible vector flow rate sensor of claim 1, wherein the piezoresistive sensing units comprise a first piezoresistive sensing strip, two second piezoresistive sensing strips, and two third piezoresistive sensing strips; the first piezoresistive sensing strips are positioned on the cantilever beam, and the two third piezoresistive sensing strips are positioned on the flexible film substrate; one end of each of the two second piezoresistive sensing strips is positioned on the cantilever beam, and the other end of each of the two second piezoresistive sensing strips is positioned on the flexible film substrate; the two second piezoresistive sensing strips are parallel to each other, and the extending direction of the two second piezoresistive sensing strips is the same as the extending direction of the cantilever beam; one ends of the two second piezoresistive sensing strips, which are positioned on the cantilever beam, are respectively connected to two ends of the first piezoresistive sensing strip; the two third piezoresistive sensor bars are respectively connected to one ends of the two second piezoresistive sensor bars, which are positioned on the flexible film substrate; and the two third piezoresistive sensing bars are arranged oppositely.
5. The flexible vector flow rate sensor of claim 4, wherein two of said third piezoresistive sensor bars are each connected to a signal lead.
6. A flexible vector flow rate sensor array comprising a plurality of flexible vector flow rate sensors according to any one of claims 1 to 5; and the signal lead of each flexible vector flow velocity sensor is connected to the same processing circuit.
7. A method for preparing a flexible vector flow velocity sensor is characterized by comprising the following steps:
processing a hole on the polyimide film by utilizing a reactive ion etching technology to obtain an etched polyimide film;
bonding an unetched polyimide film on the etched polyimide film through hot pressing to obtain a bonded film;
processing 4 piezoresistive sensing units on the upper surface of the bonding film by spraying graphene dispersion liquid; 4 piezoresistive sensing units are uniformly distributed along the edge of the hole;
processing 8 signal leads on the upper surface of the bonding film by sputtering a chromium gold electrode; each piezoresistive sensing unit is connected with two signal leads; each signal lead extends to the edge of the bonding film;
processing 4 cantilever beams extending from the edge of the hole to the center of the hole on the bonding film by utilizing a reactive ion etching technology; the hole is a square hole, and the 4 cantilever beams are respectively connected to four edges of the hole; each cantilever beam is perpendicular to the edge of the connected hole, so that any two adjacent cantilever beams are perpendicular to each other, any two cantilever beams arranged at intervals are collinear, and the upper surfaces of the cantilever beams are flush with the upper surface of the flexible film substrate; the thickness of the cantilever beam is smaller than that of the flexible film substrate.
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| CN112798060B (en) * | 2021-04-13 | 2021-06-25 | 南京深思微电子有限公司 | Resonant flow sensor |
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| CN101294977A (en) * | 2007-04-25 | 2008-10-29 | 中国科学院电子学研究所 | Silicon piezoresistance type wind velocity and wind direction sensor based on micro-electromechanical technology |
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| CN108802422B (en) * | 2018-05-24 | 2019-11-22 | 华中科技大学 | A kind of hotting mask flow field sensor-based system of flexible intelligent covering and its application |
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