CN110640918A - Monocrystalline silicon edulcoration device with hydrologic cycle function - Google Patents
Monocrystalline silicon edulcoration device with hydrologic cycle function Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
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Abstract
Description
技术领域technical field
本发明涉及单晶硅技术领域,具体为一种带有水循环功能的单晶硅除杂装置。The invention relates to the technical field of single crystal silicon, in particular to a single crystal silicon impurity removal device with a water circulation function.
背景技术Background technique
硅的单晶体,具有基本完整的点阵结构的晶体,不同的方向具有不同的性质,是一种良好的半导材料,用于制造半导体器件、太阳能电池等,单晶硅在生产加工时,产生大量的费屑,费屑粘在刀具上,容易划破单晶硅表面,影响单晶硅整体的加工质量,并且大量费屑附着在刀具上,使刀具加工产生的热量无法散发,导致刀具损坏,降低装置使用寿命,为此,我们提出一种带有水循环功能的单晶硅除杂装置。A single crystal of silicon, a crystal with a substantially complete lattice structure, has different properties in different directions, and is a good semiconductor material for the manufacture of semiconductor devices, solar cells, etc. A large amount of waste chips sticks to the tool, which is easy to scratch the surface of single crystal silicon, which affects the overall processing quality of single crystal silicon, and a lot of waste chips adhere to the tool, so that the heat generated by the tool processing cannot be dissipated, resulting in tool damage. , reduce the service life of the device, for this reason, we propose a single crystal silicon impurity removal device with water circulation function.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种带有水循环功能的单晶硅除杂装置,以解决上述背景技术中提出的问题。The purpose of the present invention is to provide a single crystal silicon impurity removal device with a water circulation function, so as to solve the above-mentioned problems in the background art.
为实现上述目的,本发明提供如下技术方案:一种带有水循环功能的单晶硅除杂装置,包括工作平台,所述工作平台顶部左右两侧均设置有立柱,两组所述立柱顶部与顶板连接,所述顶板内腔底部开设有导向槽,所述导向槽内腔底部活动插接有电动伸缩杆,所述电动伸缩杆底部设置有驱动电机,所述驱动电机底部输出端与加工刀具连接,所述驱动电机底部外壁设置有防尘罩,且加工刀具位于防尘罩的内腔,右侧所述立柱右侧外壁安装有储水箱,所述储水箱内腔左侧底部设置有泵,且泵左侧出水口延伸至储水箱的左侧外壁并与软管连接,所述软管左侧延伸至防尘罩的内腔,且软管位于加工刀具的右侧,所述工作平台顶部开设有孔洞,所述工作平台底部安装有收集箱,所述收集箱内腔底部设置有杂质收集箱,且杂质收集箱顶部开设有开口,所述杂质收集箱右侧外壁与把手连接,且把手右端延伸至收集箱的右侧外壁,所述收集箱左右两侧内壁之间设置有支撑板,且支撑板位于杂质收集箱的正上方,所述支撑板顶部中央与挡板连接,所述挡板顶部与过滤网连接,所述过滤网右侧外壁与收集箱右侧内壁顶部连接,且过滤网左侧高度低于右侧高度,所述支撑板顶部左侧开设有开口,所述支撑板顶部右侧设置有抽水泵,所述抽水泵右侧出水口延伸至收集箱右侧外壁并与回流管连接,所述回流管远离抽水泵的一端与储水箱右侧外壁连接。In order to achieve the above purpose, the present invention provides the following technical solutions: a monocrystalline silicon impurity removal device with a water circulation function, comprising a working platform, the left and right sides of the top of the working platform are provided with uprights, and the tops of the two groups of the uprights are connected with The top plate is connected, the bottom of the inner cavity of the top plate is provided with a guide groove, the bottom of the inner cavity of the guide groove is movably inserted with an electric telescopic rod, the bottom of the electric telescopic rod is provided with a driving motor, and the output end of the bottom of the driving motor is connected with the processing tool The bottom outer wall of the drive motor is provided with a dust cover, and the machining tool is located in the inner cavity of the dust cover, a water storage tank is installed on the right outer wall of the right side of the column, and a pump is arranged at the bottom left side of the inner cavity of the water storage tank , and the left water outlet of the pump extends to the left outer wall of the water storage tank and is connected with a hose, the left side of the hose extends to the inner cavity of the dust cover, and the hose is located on the right side of the processing tool, the working platform A hole is opened at the top, a collection box is installed at the bottom of the working platform, an impurity collection box is arranged at the bottom of the inner cavity of the collection box, and an opening is opened at the top of the impurity collection box, and the outer wall of the right side of the impurity collection box is connected with the handle, and The right end of the handle extends to the right outer wall of the collection box. A support plate is arranged between the left and right inner walls of the collection box, and the support plate is located directly above the impurity collection box. The center of the top of the support plate is connected to the baffle plate. The top of the baffle is connected to the filter screen, the right outer wall of the filter screen is connected to the top of the right inner wall of the collection box, and the height of the left side of the filter screen is lower than the height of the right side, an opening is provided on the left side of the top of the support plate, and the support A suction pump is arranged on the right side of the top of the plate, and the water outlet on the right side of the suction pump extends to the right outer wall of the collection tank and is connected to a return pipe, and the end of the return pipe away from the suction pump is connected to the right outer wall of the water storage tank.
优选的,所述杂质收集箱底部前后两侧均设置有滑轮,所述收集箱内腔底部均开设有与滑轮相匹配的滑动槽,且滑轮底部外壁在活动槽顶部外壁相贴合。Preferably, pulleys are provided on the front and rear sides of the bottom of the impurity collection box, sliding grooves matching the pulleys are provided at the bottom of the inner cavity of the collecting box, and the outer walls of the bottom of the pulleys are fitted on the top outer walls of the movable grooves.
优选的,所述收集箱顶部左右两侧均设置有卡块,所述工作平台底部左右两侧均开设有与卡块相匹配的卡槽,且收集箱顶部通过卡块卡槽与工作平台底部连接。Preferably, the left and right sides of the top of the collection box are provided with clamping blocks, the left and right sides of the bottom of the working platform are provided with clamping grooves matching the clamping blocks, and the top of the collection box is connected to the bottom of the working platform through the clamping block clamping grooves. connect.
优选的,所述工作平台顶部均匀开设有孔洞,且孔洞呈矩形阵列排布。Preferably, the top of the working platform is evenly provided with holes, and the holes are arranged in a rectangular array.
优选的,所述过滤网呈左低右高倾斜设置,且倾斜角度为三十度到四十五度之间。Preferably, the filter screen is inclined at a low left and a high right, and the inclination angle is between 30 degrees and 45 degrees.
优选的,所述把手外壁均匀设置有半圆形的凸块,且凸块为橡胶凸块。Preferably, the outer wall of the handle is evenly provided with semicircular bumps, and the bumps are rubber bumps.
与现有技术相比,本发明的有益效果是:Compared with the prior art, the beneficial effects of the present invention are:
1.装置中通过软管向加工刀具上喷水,去除加工刀具表面附着的费屑杂质,防止加工刀具上附着的杂质划伤单晶硅表面而降低单晶硅的生产质量,节约了生产资源,并且也防止费屑杂质聚集在加工刀具上,导致加工刀具加工产生的热量无法散发而使刀具损坏,同时水冲洗刀也具有着降温效果,降低加工刀具加工产生的温度,增加装置的使用寿命;1. In the device, water is sprayed onto the processing tool through a hose to remove the debris-wasting impurities attached to the surface of the processing tool, preventing the impurities attached to the processing tool from scratching the surface of single crystal silicon and reducing the production quality of single crystal silicon, saving production resources. , and also prevent debris from accumulating on the processing tool, resulting in the heat generated by the processing tool cannot be dissipated and the tool is damaged. At the same time, the water washing tool also has a cooling effect, reducing the temperature generated by the processing tool and increasing the service life of the device. ;
2.通过收集箱将费屑杂质和水流收集,方便将费屑杂质进行集中处理,降低杂质收集难度,同时通过抽水泵将收集的水输送到储水箱中循环使用,减少了不必要的浪费,节约了水资源,增加了装置的实用性。2. The waste impurities and water flow are collected through the collection box, which is convenient for centralized treatment of waste impurities and reduces the difficulty of collecting impurities. At the same time, the collected water is transported to the water storage tank through the pump for recycling, reducing unnecessary waste. It saves water resources and increases the practicability of the device.
附图说明Description of drawings
图1为本发明结构示意图;Fig. 1 is the structural representation of the present invention;
图2为本发明收集箱结构示意图;Fig. 2 is the structure schematic diagram of the collecting box of the present invention;
图3为本发明杂质收集箱与收集箱连接结构示意图。FIG. 3 is a schematic diagram of the connection structure of the impurity collection box and the collection box of the present invention.
图中:1工作平台、2立柱、3顶板、4电动伸缩杆、5导向槽、6驱动电机、7加工刀具、8防尘罩、9储水箱、10软管、11收集箱、111滑动槽、12杂质收集箱、121滑轮、13把手、14固定板、15挡板、16过滤网、17抽水泵、18回流管。In the picture: 1 work platform, 2 column, 3 top plate, 4 electric telescopic rod, 5 guide groove, 6 drive motor, 7 processing tool, 8 dust cover, 9 water storage tank, 10 hose, 11 collection box, 111 sliding groove , 12 impurity collection box, 121 pulley, 13 handle, 14 fixed plate, 15 baffle plate, 16 filter screen, 17 water pump, 18 return pipe.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
请参阅图1-3,本发明提供一种技术方案:一种带有水循环功能的单晶硅除杂装置,包括工作平台1,工作平台1顶部左右两侧均设置有立柱2,两组立柱2顶部与顶板3连接,顶板3内腔底部开设有导向槽5,导向槽5内腔底部活动插接有电动伸缩杆4,电动伸缩杆4在导向槽5中滑动加工单晶硅,电动伸缩杆4底部设置有驱动电机6,驱动电机6底部输出端与加工刀具7连接,驱动电机6底部外壁设置有防尘罩8,防止费屑杂质被水冲走,增加杂质收取的难度,且加工刀具7位于防尘罩8的内腔,右侧立柱2右侧外壁安装有储水箱9,储水箱9内腔左侧底部设置有泵,且泵左侧出水口延伸至储水箱9的左侧外壁并与软管10连接,软管10左侧延伸至防尘罩8的内腔,且软管10位于加工刀具7的右侧,工作平台1顶部开设有孔洞,工作平台1底部安装有收集箱11,收集箱11内腔底部设置有杂质收集箱12,且杂质收集箱12顶部开设有开口,收集费屑杂质进行集中除了,降低收集难度,杂质收集箱12右侧外壁与把手13连接,且把手13右端延伸至收集箱11的右侧外壁,收集箱11左右两侧内壁之间设置有支撑板14,且支撑板14位于杂质收集箱12的正上方,支撑板14顶部中央与挡板15连接,挡板15顶部与过滤网16连接,过滤网16右侧外壁与收集箱11右侧内壁顶部连接,过滤网16将杂质费屑挡住,使水流可以通过,且过滤网16左侧高度低于右侧高度,方便杂质落下,防止杂质堆积的过滤网16上堵塞装置,提高了工作效率,支撑板14顶部左侧开设有开口,支撑板14顶部右侧设置有抽水泵17,抽水泵17右侧出水口延伸至收集箱11右侧外壁并与回流管18连接,回流管18远离抽水泵17的一端与储水箱9右侧外壁连接,抽水泵17将水输送到储水箱9中进行循环使用,节约了水资源,电动伸缩杆4和驱动电机6均通过导线和外部电源开关电性连接。1-3, the present invention provides a technical solution: a monocrystalline silicon impurity removal device with a water circulation function, comprising a working
其中,杂质收集箱12底部前后两侧均设置有滑轮121,收集箱11内腔底部均开设有与滑轮121相匹配的滑动槽111,且滑轮121底部外壁在活动槽111顶部外壁相贴合,将杂质收集箱12拿出来时,滑轮121在滑动槽111上滑动,减小杂质收集箱12取出来时产生的摩擦力,防止装置损坏,增加了装置的使用寿命;Among them,
收集箱11顶部左右两侧均设置有卡块,工作平台1底部左右两侧均开设有与卡块相匹配的卡槽,且收集箱11顶部通过卡块卡槽与工作平台1底部连接,方便将收集箱11取下来,清理收集箱11中的杂质,保证了收集箱11内部的清洁,增加了装置的使用寿命;The left and right sides of the top of the
工作平台1顶部均匀开设有孔洞,且孔洞呈矩形阵列排布,增加杂质费屑进入收集箱11的途径,防止杂质费屑堵塞工作平台1表面,提高了工作效率;Holes are evenly opened on the top of the working
过滤网16呈左低右高倾斜设置,且倾斜角度为三十度到四十五度之间,防止杂质堆积在过滤网16上而堵塞过滤网16,提高了过滤的工作效率;The
把手13外壁均匀设置有半圆形的凸块,且凸块为橡胶凸块,增加把手13与接触面积和摩擦力,方便将杂质收集箱12取出,清理杂质收集箱12中收集的杂质。The outer wall of the
工作原理:该装置工作时,先将要加工的单晶硅放到工作平台1上,通过电动伸缩杆4工作,使加工刀具7下降到与单晶硅接触,然后驱动电机6旋转带动加工刀具7工作,开始加工单晶硅,同时储水箱9中的泵将水输送到软管10中,然后喷向加工刀具7上,防止费屑杂质在加工刀具7表面附着,避免了费屑杂质划伤单晶硅表面,也防止费屑堆积在加工刀具7表面,造成加工刀具7无法散热而使装置损坏,增加了装置的使用寿命,并且水流将费屑杂质冲到收集箱11中,经过过滤网16,水流进入挡板15的右侧,接着水由抽水泵17输送会储水箱9中进行循环利用,节约了水资源,同时过滤网16上挡住的费屑杂质被冲进挡板15的左侧,然后穿过支撑板14进入杂质收集箱12中,方便集中处理费屑杂质,减小工作难度,完成加工时,拉动把手13将杂质收集箱12取出,处理杂质收集箱12中的杂质,处理完毕时,将杂质收集箱12放回原位。Working principle: When the device is working, the single crystal silicon to be processed is first placed on the working
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, and substitutions can be made in these embodiments without departing from the principle and spirit of the invention and modifications, the scope of the present invention is defined by the appended claims and their equivalents.
Claims (6)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111347327A (en) * | 2020-04-17 | 2020-06-30 | 江苏枂硕电子科技有限公司 | Dust removal type polishing device convenient for cleaning filter screen and polishing method |
| CN111912247A (en) * | 2020-08-27 | 2020-11-10 | 莱西市鑫喆工程技术服务中心 | An energy saving and emission reduction equipment based on flue gas waste heat recovery and reheat technology |
| CN112875310A (en) * | 2021-01-28 | 2021-06-01 | 黄莹 | Stone material processing integration equipment |
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2018
- 2018-06-26 CN CN201810670721.1A patent/CN110640918A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111347327A (en) * | 2020-04-17 | 2020-06-30 | 江苏枂硕电子科技有限公司 | Dust removal type polishing device convenient for cleaning filter screen and polishing method |
| CN111912247A (en) * | 2020-08-27 | 2020-11-10 | 莱西市鑫喆工程技术服务中心 | An energy saving and emission reduction equipment based on flue gas waste heat recovery and reheat technology |
| CN112875310A (en) * | 2021-01-28 | 2021-06-01 | 黄莹 | Stone material processing integration equipment |
| CN112875310B (en) * | 2021-01-28 | 2022-12-23 | 广东百利石环保建材有限公司 | Stone material processing integration equipment |
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