CN110639885A - Monocrystalline silicon belt cleaning device with drip dry function - Google Patents

Monocrystalline silicon belt cleaning device with drip dry function Download PDF

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Publication number
CN110639885A
CN110639885A CN201810670684.4A CN201810670684A CN110639885A CN 110639885 A CN110639885 A CN 110639885A CN 201810670684 A CN201810670684 A CN 201810670684A CN 110639885 A CN110639885 A CN 110639885A
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CN
China
Prior art keywords
box
cleaning device
monocrystalline silicon
draining
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810670684.4A
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Chinese (zh)
Inventor
陈春成
戚建静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Jingpin New Energy Technology Co Ltd
Original Assignee
Jiangsu Jingpin New Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Jingpin New Energy Technology Co Ltd filed Critical Jiangsu Jingpin New Energy Technology Co Ltd
Priority to CN201810670684.4A priority Critical patent/CN110639885A/en
Publication of CN110639885A publication Critical patent/CN110639885A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention discloses a monocrystalline silicon cleaning device with a draining function in the technical field of monocrystalline silicon, which comprises a cleaning box, wherein a casing is arranged at the bottom of the cleaning box, a motor is arranged at the bottom of an inner cavity of the casing, an output end of the motor is connected with a rotating shaft, the top end of the rotating shaft penetrates through the inner cavity of the cleaning box and is connected with the cleaning device, a leakage net is uniformly arranged on the outer wall of the cleaning device, a draining box is arranged at the top of the cleaning box, air coolers are arranged on the inner walls of the left side and the right side of the draining box, a hydraulic telescopic rod is arranged at the top of the inner cavity of the draining box, an output end of the hydraulic telescopic rod is connected with a fixed plate, pull ropes are connected with the outer walls of the left side and the right side of the fixed plate, and magnets are connected with the bottoms of the pull ropes, quickening the draining speed of the monocrystalline silicon, ensuring the yield and the quality of the monocrystalline silicon, and having simple structure and convenient use.

Description

Monocrystalline silicon belt cleaning device with drip dry function
Technical Field
The invention relates to the technical field of monocrystalline silicon, in particular to a monocrystalline silicon cleaning device with a draining function.
Background
The cleaning of the monocrystalline silicon wafer is carried out in the processing process of the silicon wafer, each procedure involves cleaning, and the quality of the cleaning quality of the silicon grinding sheet directly influences the next procedure and even influences the yield and the reliability of devices. The existing monocrystalline silicon is generally cleaned by directly placing the monocrystalline silicon in a cleaning machine in the cleaning process, the monocrystalline silicon is collided in a large quantity, the monocrystalline silicon is easy to damage, the monocrystalline silicon is also required to be manually taken out after being cleaned and then is placed in a draining device for draining, the operation is inconvenient, the monocrystalline silicon cannot be drained timely after being cleaned, the surface of the monocrystalline silicon is easy to pollute, and the yield and the quality of the monocrystalline silicon are influenced. Therefore, a monocrystalline silicon cleaning device with a draining function is provided.
Disclosure of Invention
The invention aims to provide a monocrystalline silicon cleaning device with a draining function, which aims to solve the problem of the monocrystalline silicon cleaning device with the draining function in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a monocrystalline silicon belt cleaning device with drain function, is including wasing the case, the bottom of wasing the case sets up the casing, the inner chamber bottom of casing sets up the motor, the pivot is connected to the output of motor, the top of pivot is run through to the inner chamber of washing the case and is connected belt cleaning device, belt cleaning device's outer wall evenly sets up the hourglass net, the top of wasing the case sets up the drain case, the left and right sides inner wall of drain case all sets up the air-cooler, the inner chamber top of drain case sets up hydraulic telescoping rod, the fixed plate is connected to hydraulic telescoping rod's output, the left and right sides outer wall connection stay cord of fixed plate, magnet is connected to the bottom of stay cord, the inner chamber top left and right sides of drain case all sets up the limiting plate, and the stay cord.
Preferably, belt cleaning device includes the washing frame of being connected with the pivot, the left and right sides inner wall of washing frame all sets up the fixed block, the interior wall connection of washing frame holds the box, the bottom inner wall of holding the box evenly sets up spacing loop bar, both ends all set up the iron plate that matches with magnet around the fixed block.
Preferably, the top of the fixed block is provided with a limiting guide sleeve, and a guide pillar matched with the limiting guide sleeve is arranged at the joint of the containing box and the fixed block.
Preferably, both sides all set up spacing hole around the top of limiting plate, and the inner wall in spacing hole bonds the protection rubber sleeve, and the stay cord includes two sets of branch ropes with spacing hole matching.
Preferably, the top of magnet sets up the snap ring, and the junction winding of stay cord and magnet is at the outer wall of snap ring.
Preferably, the inner wall of the limit sleeve rod is provided with a fastening sleeve ring, and the inner wall of the fastening sleeve ring is uniformly provided with elastic rubber balls.
Compared with the prior art, the invention has the beneficial effects that:
1. the monocrystalline silicon is placed in the cleaning device, and the monocrystalline silicon interlayer can be placed and cleaned through the containing box and the limiting sleeve rod in the cleaning device, so that the situation that the monocrystalline silicon collides with each other in the cleaning process is effectively prevented, the monocrystalline silicon is cleaned more thoroughly, and the monocrystalline silicon is better protected from being damaged in the monocrystalline silicon cleaning process;
2. the monocrystalline silicon after the cleaning passes through the hydraulic telescopic rod and the pull rope, the cleaning frame containing the monocrystalline silicon can be conveniently driven to ascend, the cleaning frame is pulled into the draining box, the monocrystalline silicon can be drained by the air cooler in the draining box in operation, the monocrystalline silicon does not need to be manually taken out, the draining speed of the monocrystalline silicon is accelerated, the yield and the quality of the monocrystalline silicon are guaranteed, the structure is simple, and the use is convenient.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the cleaning apparatus of the present invention.
In the figure: 1 washs case, 2 casing, 3 motors, 4 pivots, 5 belt cleaning device, 51 washs frame, 52 fixed block, 53 and holds box, 54 spacing loop bars, 55 iron plate, 6 leak nets, 7 driping casees, 8 air-coolers, 9 hydraulic telescoping rod, 10 fixed plates, 11 limiting plate, 12 stay cords, 13 magnet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a monocrystalline silicon cleaning device with a draining function comprises a cleaning box 1, a casing 2 is arranged at the bottom of the cleaning box 1, a motor 3 is arranged at the bottom of an inner cavity of the casing 2, an output end of the motor 3 is connected with a rotating shaft 4, the top end of the rotating shaft 4 penetrates through the inner cavity of the cleaning box 1 and is connected with a cleaning device 5, and the junction of the rotating shaft 4 and the cleaning box 1 is provided with a bearing, the outer wall of the cleaning device 5 is uniformly provided with a leakage net 6, the top of the cleaning box 1 is provided with a draining box 7, the inner walls of the left side and the right side of the draining box 7 are respectively provided with an air cooler 8, the top of the inner cavity of the draining box 7 is provided with a hydraulic telescopic rod 9, the output end of the hydraulic telescopic rod 9 is connected with a fixed plate 10, the outer walls of the left side and the right side of the fixed plate 10 are connected with a pull rope 12, the bottom of the pull rope 12 is connected with a magnet 13, the left, and the pull rope 12 is movably arranged on the limiting plate 11, and the air cooler 8 and the motor 3 are connected with the power supply through the control switch.
The cleaning device 5 comprises a cleaning frame 51 connected with the rotating shaft 4, fixed blocks 52 are arranged on the inner walls of the left side and the right side of the cleaning frame 51, the inner wall of the cleaning frame 51 is connected with a containing box 53, limiting sleeve rods 54 are uniformly arranged on the inner wall of the bottom of the containing box 53, iron blocks 55 matched with the magnet 13 are arranged at the front end and the rear end of each fixed block 52, the single crystal silicon can be placed in the cleaning frame 51 to be cleaned through the cleaning device 5, and meanwhile, the single crystal silicon can be separately cleaned through the containing box 53, so that the single crystal silicon is cleaned more cleanly;
a limiting guide sleeve is arranged at the top of the fixed block 52, a guide pillar matched with the limiting guide sleeve is arranged at the joint of the containing box 53 and the fixed block 52, and the containing box 53 can be fixed on the fixed block 52 by inserting the guide pillar into the limiting guide sleeve;
the front side and the rear side of the top of the limiting plate 11 are respectively provided with a limiting hole, the inner wall of each limiting hole is bonded with a protective rubber sleeve, the pull rope 12 comprises two groups of branch ropes matched with the limiting holes, the limiting holes are arranged to limit the motion track of the pull rope 12, the protective rubber sleeves can reduce the friction between the pull rope 12 and the limiting plate 11, and the two groups of branch ropes can enable the pull rope 12 to drive the cleaning frame 51 to ascend more stably;
a snap ring is arranged at the top of the magnet 13, and the joint of the pull rope 12 and the magnet 13 is wound on the outer wall of the snap ring, so that the connection between the pull rope 12 and the magnet 13 is more stable;
the inner wall of stop collar rod 54 sets up the fastening lantern ring, and the inner wall of fastening lantern ring evenly sets up elastic rubber ball, sets up the fastening lantern ring in stop collar rod 54, and can fix monocrystalline silicon in holding box 53 through elastic rubber ball.
The working principle is as follows: first, single crystal silicon is put in the cleaning device 5, the single crystal silicon is put in the stopper rod 54 in the housing box 53, then the containing box 53 is put into the cleaning frame 51, the containing box 53 is fixed on the cleaning frame 51 through the fixing block 52, cleaning liquid is poured into the cleaning box 1, the motor 3 is operated to drive the cleaning device 5 to rotate through the rotating shaft 4, the cleaning device 5 rotates, the cleaning liquid enters the cleaning device 5 through the leaking net 6, the monocrystalline silicon is cleaned, after cleaning is completed, the hydraulic telescopic rod 9 is operated to drive the pull rope 12 to move downwards through the fixing plate 10, the pull rope 12 limits the movement track through the limiting plate 11, the pull rope 12 moves downwards to enable the magnet 13 to be connected with the iron block 55 on the cleaning device 5, the hydraulic telescopic rod 9 is operated again to drive the pull rope 12 to move upwards, the cleaning frame 51 with the monocrystalline silicon is lifted to the draining box 7, and the air cooler 8 is operated to drain the monocrystalline silicon in the cleaning frame 51.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a monocrystalline silicon belt cleaning device with drip dry function, includes washs case (1), its characterized in that: the bottom of the cleaning box (1) is provided with a casing (2), the bottom of an inner cavity of the casing (2) is provided with a motor (3), the output end of the motor (3) is connected with a rotating shaft (4), the top end of the rotating shaft (4) penetrates through the inner cavity of the cleaning box (1) and is connected with a cleaning device (5), a bearing is arranged at the joint of the rotating shaft (4) and the cleaning box (1), the outer wall of the cleaning device (5) is uniformly provided with a leakage net (6), the top of the cleaning box (1) is provided with a draining box (7), the inner walls of the left side and the right side of the draining box (7) are respectively provided with an air cooler (8), the top of the inner cavity of the draining box (7) is provided with a hydraulic telescopic rod (9), the output end of the hydraulic telescopic rod (9) is connected with a fixing plate (10), the outer walls of the left side and the right side of the fixing plate, limiting plates (11) are arranged on the left side and the right side of the top of the inner cavity of the draining box (7), and pull ropes (12) are movably arranged on the limiting plates (11).
2. The monocrystalline silicon cleaning device with the draining function as claimed in claim 1, wherein: belt cleaning device (5) include washing frame (51) of being connected with pivot (4), the left and right sides inner wall of washing frame (51) all sets up fixed block (52), the interior wall connection who washs frame (51) holds box (53), the bottom inner wall that holds box (53) evenly sets up spacing loop bar (54), both ends all set up iron plate (55) with magnet (13) matching around fixed block (52).
3. The monocrystalline silicon cleaning device with the draining function as claimed in claim 2, wherein: the top of the fixed block (52) is provided with a limiting guide sleeve, and a guide column matched with the limiting guide sleeve is arranged at the joint of the containing box (53) and the fixed block (52).
4. The monocrystalline silicon cleaning device with the draining function as claimed in claim 1, wherein: both sides all set up spacing hole around the top of limiting plate (11), and the inner wall in spacing hole bonds the protection rubber sleeve, and stay cord (12) include with spacing hole matching two sets of branch ropes.
5. The monocrystalline silicon cleaning device with the draining function as claimed in claim 1, wherein: the top of magnet (13) sets up the snap ring, and the junction winding of stay cord (12) and magnet (13) is at the outer wall of snap ring.
6. The monocrystalline silicon cleaning device with the draining function as claimed in claim 2, wherein: the inner wall of the limiting sleeve rod (54) is provided with a fastening sleeve ring, and the inner wall of the fastening sleeve ring is uniformly provided with elastic rubber balls.
CN201810670684.4A 2018-06-26 2018-06-26 Monocrystalline silicon belt cleaning device with drip dry function Pending CN110639885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810670684.4A CN110639885A (en) 2018-06-26 2018-06-26 Monocrystalline silicon belt cleaning device with drip dry function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810670684.4A CN110639885A (en) 2018-06-26 2018-06-26 Monocrystalline silicon belt cleaning device with drip dry function

Publications (1)

Publication Number Publication Date
CN110639885A true CN110639885A (en) 2020-01-03

Family

ID=68988950

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810670684.4A Pending CN110639885A (en) 2018-06-26 2018-06-26 Monocrystalline silicon belt cleaning device with drip dry function

Country Status (1)

Country Link
CN (1) CN110639885A (en)

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WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20200103

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