CN110632753B - Step drive signal control method and device - Google Patents

Step drive signal control method and device Download PDF

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CN110632753B
CN110632753B CN201810641677.1A CN201810641677A CN110632753B CN 110632753 B CN110632753 B CN 110632753B CN 201810641677 A CN201810641677 A CN 201810641677A CN 110632753 B CN110632753 B CN 110632753B
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mirror
mems micro
driving signal
mems
micro
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CN110632753A (en
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方楚
邢界江
蒋臣迪
龚健敏
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Huawei Technologies Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Abstract

A step driving signal control method and device are disclosed, the method is applied to a Micro Electro Mechanical System (MEMS), the MEMS comprises a MEMS micro-mirror, the method comprises the following steps: determining the step number m of applying the step driving signal to the MEMS micro-mirror, the amplitude value of each step driving signal, and the kth time interval of applying the step driving signal from the kth step to the (k + 1) th step, wherein k is 1, 2, … …, m-1; step driving signals are applied to the MEMS micro-mirror at the kth time according to the amplitude values; and after the k time interval, applying a step driving signal to the (k + 1) th time of the MEMS micro-mirror according to the amplitude value. The method controls the time and amplitude value of applying the step drive signal to the MEMS micro-mirror each time according to the determined steps, thereby eliminating the oscillation frequency, enabling the MEMS micro-mirror to quickly reach the target angle and reducing the oscillation time of the MEMS micro-mirror.

Description

Step drive signal control method and device
Technical Field
The present application relates to the field of optical communications technologies, and in particular, to a method and an apparatus for controlling a step driving signal.
Background
With the increasing speed and capacity of information transmission in optical fiber communication links, the demand for information exchange speed and capacity in optical communication networks (such as metropolitan area networks, data centers, and other application scenarios) also increases, and all-optical exchange becomes a trend of development. The Optical switch is a key device for realizing an all-Optical switching system, and can realize the functions of routing selection, wavelength selection, Optical Cross-connection (OXC), self-healing protection and the like of an all-Optical layer. Optical switches that have been implemented at present include conventional mechanical structure optical switches, Micro Electro Mechanical System (MEMS) optical switches, liquid crystal optical switches, waveguide type optical switches, and semiconductor optical amplifier optical switches.
The MEMS optical switch is generally based on a MEMS micro-mirror structure, and has advantages of low insertion loss, small crosstalk, high extinction ratio, good expandability, and simple control. The MEMS micro-mirrors can be divided into: electrostatic MEMS micro-mirrors, piezoelectric MEMS micro-mirrors, thermoelectric MEMS micro-mirrors, electromagnetic MEMS micro-mirrors, and the like.
For example, a typical electromagnetic MEMS micro-mirror, as shown in fig. 1a, includes a permanent magnet, a mirror, a rotating shaft 1, a rotating shaft 2, a coil, and other main structures. When current passes through the coil, Lorentz force is generated under the action of the magnetic field of the permanent magnet, and the Lorentz force enables the MEMS micro-mirror to deflect in two directions perpendicular to each other. However, since the damping of the MEMS micro-mirror structure is small, after applying a step driving signal to the MEMS micro-mirror structure, the micro-mirror will gradually stabilize after a period of oscillation, as shown in fig. 1b, the oscillation phenomenon causes the signal light to oscillate near the output port for a long time, which makes the switching time of the MEMS micro-mirror long, and is not favorable for the fast establishment of the optical signal channel.
Disclosure of Invention
The application provides a step drive signal control method and device, which are used for inhibiting the oscillation phenomenon of a micro-reflector in an all-optical switch based on an MEMS (micro-electromechanical system), and the problem of long signal channel switching time caused by the oscillation phenomenon is solved.
Specifically, the application discloses the following technical scheme:
in a first aspect, the present application provides a step driving signal control method, which may be applied to a micro-electromechanical system MEMS, where the MEMS includes at least one MEMS micro-mirror, and further, the method includes: the controller determines the step number m of applying the step driving signal to the MEMS micro-mirror, the amplitude value of each step driving signal and the kth time interval of applying the step driving signal from the kth step to the k +1 step, wherein k is 1, 2, … …, m-1, and m is a positive integer not less than 2; step driving signals are applied to the MEMS micro-mirror at the kth time according to the amplitude values; and after the k time interval, applying a step driving signal to the (k + 1) th time of the MEMS micro-mirror according to the amplitude value.
According to the method provided by the aspect, according to the characteristic that sinusoidal signals with various frequency components are contained in common step drive signals, the amplitude value and the time interval of step drive signals applied to the MEMS micro-mirror at the kth time and the kth +1 time are controlled according to the determined step number, so that the frequency components causing micro-mirror oscillation are removed, the MEMS micro-mirror can quickly reach a target angle, and the oscillation time of the MEMS micro-mirror is greatly reduced.
With reference to the first aspect, in an implementation manner of the first aspect, in a case that at least two MEMS micro-mirrors are included in the MEMS, the determining a number of steps of applying a step drive signal to the MEMS micro-mirrors includes: acquiring the resonance frequency of each MEMS micro-reflector; determining the number of steps of the step drive signal to be 2 if the difference between the resonance frequencies of all the MEMS micro-mirrors is zeroNN is a positive integer greater than or equal to 1; determining the number of steps of the stepped drive signal to be 2 if the difference between the H different resonance frequencies is not zeroNH is a positive integer not less than 2, and N is a positive integer not less than H.
Optionally, if N is 1, two steps are required, that is, two step driving signals are applied, specifically including: and applying a step drive signal to the MEMS micro-mirror for the first time according to the predetermined amplitude value, and then applying the step drive signal to the MEMS micro-mirror for the second time according to the amplitude value after a first time interval.
Optionally, if N is 2, four steps of stepping, that is, applying four step driving signals, are required, which specifically includes: after the second time interval has elapsed after the application of the two step drive signals as described above, a third step drive signal is applied at the amplitude value, and after the third time interval has elapsed, a fourth step drive signal is applied to the MEMS micro-mirror. The first time interval, the second time interval and the third time interval may be the same or different in size.
Alternatively, if N is greater than 2, the step driving signal is continuously applied to the MEMS micro-mirror according to the above two-step or four-step procedure until all the step driving signals of the number m of steps are applied to the MEMS micro-mirror.
In this implementation, the step number of the step drive signal is set to 2NAnd further, oscillation is eliminated under the condition of minimum step number, so that the beneficial effect of quickly inhibiting the oscillation of the MEMS micro-reflector is achieved.
In addition, it should be noted that more steps, i.e. more than 2 steps, can be used in the process of determining the step number of applying the step driving signal to the MEMS micro-mirrorNTo suppress the oscillation, which is not limited in the present application.
With reference to the first aspect, in another implementation manner of the first aspect, the determining an amplitude value of the per-step driving signal includes: acquiring a rotation angle of the MEMS micro-mirror switched from an initial angle position to a target angle position; determining a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and the relation between the signal amplitude of the MEMS micro-mirror and the rotation angle; determining an amplitude value of the per-step drive signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
And determining the target signal amplitude as a voltage value, a current value or a charge quantity according to the corresponding relation, wherein the signal amplitude of the MEMS micro-mirror comprises a voltage value, a current value or a charge quantity and the like.
In the implementation mode, the target signal amplitude can be simply and quickly determined, so that the amplitude value of each step of step driving signal is quickly determined, and the step driving signal output efficiency is improved.
With reference to the first aspect, in a further implementation manner of the first aspect, the determining a time interval for applying the two adjacent step driving signals includes: if the resonance frequency of the MEMS micro-mirror is fR(k)，k≤2N-1，m＝2NWhen N is equal to 1, or N is equal to or more than 2 and fR(N)＞fR(N-1)In the case of (a), the time interval Δ t of applying the step drive signal from the kth step to the (k + 1) th step satisfies:
Figure BDA0001702551190000021
wherein i is such that k is equal to 2iThe maximum value of the integer division, j is all positive integers which can be taken by i, N is a positive integer, and the step number m of the step drive signal is equal to 2N。
Alternatively, if the resonance frequencies of the two MEMS micro-mirrors are the same, fR(N)＝fR(k)The time interval can be calculated by the expression of Δ t described above.
In addition, optionally, the error of the time interval Δ t is less than or equal to
Figure BDA0001702551190000022
I.e. said time interval Δ t is satisfied
Figure BDA0001702551190000031
In the implementation mode, the time interval of applying the step driving signal in each step is determined by using the relational expression, so that the oscillation can be completely inhibited, the switching time is greatly reduced, the method is not limited by the structure of the micro-reflector and the external environment, the time interval determined by the method can be suitable for various micro-reflectors, and the application range is wide.
With reference to the first aspect, in a further implementation manner of the first aspect, the applying a step drive signal to the MEMS micro-mirror for the kth time according to the amplitude value includes: and generating a step driving signal with the amplitude value, and sending the step driving signal to the MEMS micro-mirror at the kth time so that the MEMS micro-mirror switches from the initial angular position to the target angular position by using the step driving signal.
In a second aspect, the present application also provides a step drive signal control device, the device being disposed in a micro-electromechanical system MEMS, the MEMS including a MEMS micro-mirror, the device comprising: a processor and a transmitter;
the processor is used for determining the step number m of applying the step driving signal to the MEMS micro-mirror, the amplitude value of each step driving signal and the kth time interval from the kth step to the kth +1 step, wherein k is 1, 2, … …, m-1, and m is a positive integer not less than 2;
the transmitter is used for applying a step driving signal to the MEMS micro-mirror at the kth time according to the amplitude value; and after the k time interval, applying a step driving signal to the (k + 1) th time of the MEMS micro-mirror according to the amplitude value.
With reference to the second aspect, in an implementation manner of the second aspect, the apparatus further includes an acquirer, specifically, the acquirer is configured to acquire a resonance frequency of each MEMS micro-mirror in a case where the MEMS includes at least two MEMS micro-mirrors;
the processor is specifically configured to determine that the number of steps of the step drive signal is 2 when the difference between the resonance frequencies of all the MEMS micro-mirrors is zeroNN is a positive integer greater than or equal to 1; determining the number of steps of the stepped drive signal to be 2 if the difference between the H different resonance frequencies is not zeroNH is a positive integer not less than 2, and N is a positive integer not less than H.
With reference to the second aspect, in another implementation manner of the second aspect, the apparatus further includes an acquirer, specifically, the acquirer is configured to acquire a rotation angle of the MEMS micro-mirror switching from an initial angular position to a target angular position; the processor is specifically configured to determine a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and a relationship between the signal amplitude of the MEMS micro-mirror and the rotation angle; and determining the amplitude value of the per-step drive signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
Wherein the signal amplitude comprises a voltage value or a current value and the like.
In combination with the second aspect, in yet another implementation of the second aspectIn one form, the processor is specifically configured to operate at a resonance frequency f of the MEMS micro-mirrorR(k)，k≤2N-1，m＝2N；
When N is equal to 1, or N is equal to or more than 2 and fR(N)＞fR(N-1)In the case of (a), the time interval Δ t of applying the step drive signal from the kth step to the (k + 1) th step satisfies:
Figure BDA0001702551190000032
wherein i is such that k is equal to 2iThe maximum value of the integer division is set,
Figure BDA0001702551190000033
indicating the allowable error of the time interval at.
With reference to the second aspect, in a further implementation manner of the second aspect, the processor is specifically configured to generate a step driving signal with the magnitude value; the transmitter is used for transmitting the step driving signal to the MEMS micro-mirror for the kth time.
In a third aspect, the present application further provides a MEMS micro-mirror, where the MEMS micro-mirror is connected to a step driving signal control device, where the step driving signal control device is the device according to the second aspect or the various implementations of the second aspect, and is configured to apply step driving signals to the MEMS micro-mirror at the kth time and the (k + 1) th time;
the MEMS micro-mirror is used for receiving the step driving signal from the device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
In a fourth aspect, the present application further provides an optical cross-connect apparatus comprising at least two MEMS micro-mirrors and the step-drive-signal control apparatus according to the second aspect or the various implementations of the second aspect, wherein,
the step driving signal control device is used for generating a digital signal, converting the digital signal into a step driving signal and outputting the step driving signal to the at least one MEMS micro-mirror; each MEMS micro-mirror is used for receiving the step driving signal from the step driving signal control device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
In a fifth aspect, the present application further provides a computer storage medium, which may store a program that, when executed, may implement some or all of the steps in the embodiments of the step drive signal control method provided in the present application.
In a sixth aspect, the present application also provides a computer program product containing instructions for causing a computer to perform the method according to the first aspect and its various implementation modes when the computer program product runs on the computer.
According to the characteristic of sinusoidal signals of various frequency components contained in common step drive signals, the amplitude value and the time interval of step drive signals applied to the MEMS micro-mirror at the kth time and the kth +1 are controlled according to the determined steps, so that the frequency components causing the oscillation of the MEMS micro-mirror are removed, the micro-mirror can quickly reach a target angle, and the oscillation time of the MEMS micro-mirror is greatly reduced.
Drawings
Fig. 1a is a schematic structural diagram of an electromagnetic MEMS micro-mirror provided in the present application;
fig. 1b is a schematic diagram of applying a step driving signal and a response to a MEMS micro-mirror according to the present application;
fig. 2 is a schematic diagram of an optical switch provided herein;
FIG. 3 is a flow chart of a step driving signal control method provided in the present application;
FIG. 4 is a flow chart of a two-step drive signal control method provided herein;
fig. 5a is a schematic diagram of a response curve of a MEMS micro-mirror under control of a normal step driving signal according to the present application;
FIG. 5b is a schematic diagram of a response curve of a MEMS micro-mirror under the control of a two-step driving signal provided by the present application;
FIG. 6 is a flow chart of a four-step driving signal control method provided in the present application;
FIG. 7a is a schematic diagram of the response curve of a MEMS micro-mirror with a resonant frequency of 800Hz under the control of a four-step driving signal provided by the present application;
FIG. 7b is a schematic diagram of the response curve of a MEMS micro-mirror with a resonant frequency of 1100Hz under the control of a four-step driving signal according to the present application;
fig. 8 is a schematic structural diagram of a step driving signal control apparatus provided in the present application;
fig. 9 is a schematic diagram of an OXC module with a "Z" shaped optical path formed by two-dimensional MEMS micro-mirrors according to the present application.
Detailed Description
In order to make the technical solutions in the embodiments of the present application better understood and make the above objects, features and advantages of the embodiments of the present application more comprehensible, the technical solutions in the embodiments of the present application are described in further detail below with reference to the accompanying drawings.
Before describing the technical solution of the embodiment of the present application, an application scenario of the embodiment of the present application is first described with reference to the drawings.
The technical scheme of the application is applied to the field of optical switching, and as shown in fig. 2, the optical switching module is used for changing the direction of the light beam at the input port. And then output from the output port. The optical switching means directly switching an optical signal at an input end to an arbitrary optical output end without any photoelectric conversion. In modern communication networks, all optical networks are the development direction of future broadband communication networks. Because the full optical network can overcome the bottleneck limit of electronic switching on capacity, the network construction cost is greatly saved, and the flexibility and the reliability of the network are also improved.
Embodiments of the present application provide a step drive signal control method, which can suppress the oscillation phenomenon of a micro-mirror, thereby effectively reducing the switching time of a signal channel in an OXC.
Wherein, the switching time refers to: after applying the step drive signal to the MEMS micro-mirror, the time it takes for the MEMS micro-mirror to settle within 2% of the target angular position from the initial angular position.
Referring to fig. 3, a flowchart of a step driving signal control method according to an embodiment of the present application is provided. The method comprises the following steps:
step 301: the controller determines the number of steps m of applying the step drive signal to the MEMS micro-mirror, the amplitude value of each step drive signal, and the kth time interval of applying the step drive signal from the kth step to the k +1 step, k being 1, 2, … …, m-1, m ≧ 2.
Wherein, the kth step and the (k + 1) th step are any two adjacent steps in the step number m.
Step 302: and applying a step driving signal to the MEMS micro-mirror at the kth time according to the amplitude value.
Step 303: and after the k time interval, applying a step driving signal to the (k + 1) th time of the MEMS micro-mirror according to the amplitude value.
Step 304: and judging whether the step driving signals according to the determined step number are completely applied, if so, ending the process, and if not, continuing to apply the step driving signals to the MEMS micro-mirror according to the predetermined time interval and the amplitude value.
In this embodiment, the kth time and the (k + 1) th time may be the first time and the second time of applying the step driving signal, and the corresponding time interval is a first time interval Δ t 1; if the k and k +1 times are two intermediate applying processes, for example, the second and third times, i.e., k is 2, the method further includes, before applying the second step driving signal to the MEMS micro-mirror: and the controller applies a step drive signal to the MEMS micro-mirror for the first time according to the preset amplitude value.
Optionally, in step 301, determining the number of steps (denoted by m) for applying the step driving signal to the MEMS micro-mirror specifically includes: the resonant frequency of each MEMS micro-mirror in the MEMS system is obtained, and the step number of the step driving signal applied to each MEMS micro-mirror is determined according to the resonant frequency.
For example, if two MEMS micro-mirrors are included in a MEMS system and the resonant frequencies of the two micro-mirrors are the same, the step number of the step drive signal is determined to be 2NN is equal to 1, i.e. the number of steps is 2, two step drive signals need to be applied; alternatively, the 4-step or 8-step driving signal may be applied to the same two resonant frequencies, which is not particularly limited in the present embodiment. If the resonant frequencies of the two micromirrors are different, taking N equal to 2, i.e., the number of steps is 4, it is necessary to apply the drive signal in four steps with a tolerance of not more than. + -. 0.05 XV/2NFurthermore, N may be equal to 3, i.e. the number of steps m is 8, or a step driving signal with more steps (such as 16) may be applied to the MEMS micro-mirror, which is not limited in this application.
Specifically, whether 4-step or 8-step is adopted can be determined according to the oscillation suppression effect of the MEMS micro-mirror, and if the oscillation suppression effect is not good by adopting the 4-step driving signal, 8-step can be adopted, or a step driving signal is applied for a greater number of times to suppress the oscillation of the micro-mirror.
In addition, when there are more than two MEMS micro-mirrors with different resonant frequencies, the step number of the step drive signal may be determined according to the difference between the respective different resonant frequencies. For example, 10 MEMS micromirrors are provided, the difference between the respective resonance frequencies of the 10 micromirrors can be divided into 5 steps, and the number of steps of the step is determined to be 25(N equals 5), i.e., 32 times.
Optionally, the determining the amplitude value of the driving signal per step specifically includes: firstly, acquiring a rotation angle of each MEMS micro-reflector switched from an initial angle position to a target angle position; then determining a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and the relation between the signal amplitude of the MEMS micro-mirror and the rotation angle; the target signal amplitude comprises a voltage value or a current value of the micro-mirror; finally, determining the amplitude value of the per-step driving signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
The signal amplitude of the MEMS micro-mirror includes a voltage value, a current value, or a charge amount, and the target signal amplitude includes a voltage value, a current value, a charge, and may further include other physical quantities.
Optionally, the determining the time interval for applying the two adjacent step drive signals includes: if the resonance frequency of the MEMS micro-mirror is fR(k)，k≤2N-1, k is a positive integer, when N is 1, or N.gtoreq.2 and fR(N)＞fR(N-1)In the case where the time interval for applying the step drive signal from the k-th step to the k + 1-th step satisfies:
Figure BDA0001702551190000061
wherein i is such that k is equal to 2iThe maximum value of the integer division, j is all positive integers which can be taken by i, N is a positive integer, and the step number m of the step drive signal is equal to 2N。
Alternatively, if the resonance frequencies of the two MEMS micro-mirrors are the same, fR(N)＝fR(k)The time interval can be calculated by the expression of Δ t described above.
In addition, optionally, the error of the time interval Δ t is less than or equal to
Figure BDA0001702551190000062
I.e. said time interval Δ t is satisfied
Figure BDA0001702551190000063
Two types of MEMS micro-mirrors, such as an input MEMS micro-mirror and an output MEMS micro-mirror, are included in the MEMS system, specifically as follows:
firstly, the angle of deflection of the input MEMS micro-mirror and the output MEMS micro-mirror when starting a signal channel needs to be determined, and then a voltage (or current) -corner relation curve of the MEMS micro-mirror is searched to obtain the voltage (or current) which is applied to the MEMS micro-mirror when the MEMS micro-mirror can deflect to a target angle. Assuming that a signal path is established, it is necessary to apply a drive signal V1 to the input MEMS micro-mirror and a drive signal V2 to the output MEMS mirror.
Then, an amplitude of V1/2 is applied to the input MEMS micro-mirror at the time when the driving signal needs to be applied to the MEMS (time 0)NApplying a drive signal of amplitude V2/2 to the output MEMS micro-mirrorNThen 1/2fR(N)At time, an amplitude of V1/2 is applied to the input MEMS micro-mirrorNApplying a step drive signal of amplitude V2/2 to the output MEMS micro-mirrorNStep drive signal of (2), and so on.
Then sigma (-1)j/(2fR(N-i+j)) At time, an amplitude of V1/2 is applied to the input MEMS micro-mirrorNApplying a step drive signal of amplitude V2/2 to the output MEMS micro-mirrorNStep drive signal of up to 2NThe step signals are all applied.
According to the method provided by the embodiment, according to the characteristic of sinusoidal signals of various frequency components contained in common step drive signals, the time and amplitude value of the step drive signal applied to the micro-mirror each time are controlled according to the determined step number, so that the frequency components causing the micro-mirror to oscillate are removed, the micro-mirror can quickly reach a target angle, and the oscillation time of the micro-mirror is reduced.
It should be noted that, when determining the step number of the step driving signal, the amplitude value of each step driving signal, and the time interval for a plurality of MEMS micro-mirrors, a set of parameters including the step number, the amplitude value, and the time interval may be set individually for each micro-mirror; it is also possible to arrange for two or more micromirrors to use the same number of step steps and time intervals, but with different amplitude values for each step of the driving signal, or also to use other parameters, which is not limited in this application.
Detailed description of the preferred embodiment
The present embodiment takes two MEMS micro-mirrors as an example, such as an input MEMS micro-mirror and an output MEMS micro-mirror, and the resonant frequencies of the two micro-mirrors are both 500Hz, and the damping coefficient is less than 0.1. In the case where all the micromirrors in the array have the same resonant frequency, the problem of oscillation is generally suppressed by using two-step (N is 1, and m is 2) stepped driving signals.
As shown in fig. 4, the specific steps are as follows:
step 401: searching the relation curve of the voltage (or current) and the rotation angle of the MEMS micro-mirror, for example, in order to deflect the MEMS micro-mirror to the target angle position, a voltage of 5V needs to be applied to the input MEMS micro-mirror, a voltage of 3V needs to be applied to the output MEMS micro-mirror, and the amplitude value of the step drive signal applied to the input MEMS micro-mirror is determined to be 5/21Amplitude value of step drive signal applied to input MEMS micro-mirror is 3/2 ═ 2.5V11.5V, interval Δ t1 is:
Figure BDA0001702551190000071
step 402: at the time of 0ms, the digital signal output by the controller is converted by a conversion module, such as a da (digital to analog conversion) module, and then 2.5V is applied to the input MEMS micro-mirror, and 1.5V is applied to the output MEMS micro-mirror.
Step 403: at the first time, namely 1ms after the time interval Δ t1, the controller outputs a digital signal, the digital signal is converted by the DA module, and then 2.5V is applied to the input MEMS micro-mirror, and 1.5V is applied to the output MEMS micro-mirror.
The relation curve of the voltage (or the current) and the rotation angle of the MEMS micro-mirror is determined by the structure or the internal parameters of the micro-mirror, or the system is configured in advance and stored in a controller; the time interval 1ms between the step of applying the step driving signal for the first time in step 402 and the step of applying the step driving signal for the second time in step 403 may be calculated according to the formula in the foregoing embodiment, and this embodiment is not described in detail.
The method provided by the embodiment does not need structural modification or integration of a tiny high-precision angle sensor, but suppresses the oscillation problem of the under-damped system, namely the micro-mirror, by adjusting the amplitude and the time interval of the step drive signal, and specifically, controls the application of the two-step drive signal, including controlling the amplitude value and the time interval of the step drive signal, so that the frequency component causing the micro-mirror to oscillate is removed, thereby ensuring that the micro-mirror can smoothly reach a target angle.
As shown in fig. 5a, a schematic diagram of a response curve of the MEMS micro-mirror under the control of a normal step driving signal, and a schematic diagram of a response curve of the MEMS micro-mirror under the control of a two-step driving signal, shown in fig. 5b, two dashed lines near "1" deg in fig. 5a indicate a reference range that tends to be stable after the oscillation is eliminated, and a time interval of the oscillation process is about 0.07s (70ms) from the time 0.1s of the oscillation starting time to the time 0.17s of the oscillation tending to be stable in fig. 5 a; after the two-step drive control according to the present invention, as shown in fig. 5b, the time interval from the start time 0.1s to the time 0.103s at which the micromirror tends to stabilize is 0.003s (3ms), so it is relatively clear that the hunting phenomenon of the micromirror is suppressed after the two-step drive control, and the switching time from the initial position to the time at which the micromirror stabilizes near the target position is reduced from 70ms to 3ms, which greatly reduces the switching time.
Detailed description of the invention
The present embodiment takes two MEMS micro-mirrors as an example, such as an input MEMS micro-mirror and an output MEMS micro-mirror, and differs from the first embodiment in that the resonant frequencies of the two micro-mirrors are different.
The resonance frequency of one part of micro-mirrors (such as input MEMS mirrors) in the MEMS array in the OXC module is set to be 800Hz, the resonance frequency of the other part of micro-mirrors (such as output MEMS mirrors) is set to be 1200Hz, and the damping coefficient is smaller than 0.1. For the case that all the micromirrors in the array have two different resonant frequencies, the embodiment employs a 4-step driving signal to suppress the oscillation problem, and the specific steps are as follows, as shown in fig. 6:
step 601: the number of steps, the amplitude value of each step of the step drive signal to be applied to the MEMS micro-mirror, and at least one time interval for applying the two step drive signal are determined.
The method specifically comprises the following steps: the controller determines the target signal amplitude which needs to be applied to each MEMS micro-mirror according to the target angle which needs to be deflected by the input MEMS micro-mirror and the output MEMS micro-mirror and the relation curve between the voltage (or current) and the rotation angle of each MEMS.
In this embodiment, in order to deflect the MEMS micro-mirror to a target angle, it is necessary to apply a voltage of 4V to the input MEMS micro-mirror and a voltage of 2V to the output MEMS micro-mirror.
In addition, the controller determines that N is 2 and m is 224, i.e. 4 steps are required, 4 step drive signals are applied. Correspondingly, the amplitude value of the step drive signal applied to the input MEMS micro-mirror at a time is 4/22The amplitude value of the step drive signal applied to the output MEMS micro-mirror was 2/2 at 1V2＝0.5V。
According to the condition satisfied by the time interval Δ t:
Figure BDA0001702551190000081
(1) the first time interval Δ t1 from the first to the second application of the step drive signal is calculated and determined as:
Figure BDA0001702551190000082
wherein k is 1, i is 0, and j is 0.
(2) A second time interval Δ t2 of applying the step drive signal for the second to third times is calculated and determined as:
Figure BDA0001702551190000083
where k is 2, i is 1, j is 0 or j is 1.
(3) The third time interval Δ t3 for the third to fourth applied step drive signals is calculated and determined as:
Figure BDA0001702551190000084
wherein k is 3, i is 0, and j is 0.
Therefore, it is calculated that the time interval Δ t1 between the first and second application of the step drive signal is 0.417ms, the time interval Δ t2 between the second and third application is 0.208ms, and the time interval Δ t3 between the third and fourth application is 0.417 ms.
Wherein f isR(k)Denotes that the resonance frequency k of the MEMS micro-mirror is a positive integer and fR(N)＞fR(N-1)The time interval for applying the step drive signal from the kth step to the (k + 1) th step satisfies the above expression.
Step 602: at the time of 0ms, the controller outputs a digital signal, the digital signal is converted by a DA module, and 1V is applied to the input MEMS micro-mirror (4/2)21), 0.5V (2/2) is applied to the output MEMS micro-mirror2＝0.5)。
Step 603: at the time of 0.417ms, the controller outputs a digital signal, the digital signal is converted by the DA module, 1V is applied to the input MEMS micro-mirror, and 0.5V is applied to the output MEMS micro-mirror.
Step 604: at the time of 0.625ms (0.417ms +0.208ms), the controller outputs a digital signal, the digital signal is converted by the DA module, 1V is applied to the input MEMS micro-mirror, and 0.5V is applied to the output MEMS micro-mirror.
Step 605: at the moment of 1.042ms (0.625ms +0.417ms), the controller outputs a digital signal, the digital signal is converted by the DA module, 1V is applied to the input MEMS micro-mirror, and 0.5V is applied to the output MEMS micro-mirror.
The method provided by the embodiment does not need to make structural modification on the MEMS micro-mirror and integrate a tiny high-precision angle sensor, but inhibits the oscillation problem of an underdamped system, namely the micro-mirror, by adjusting the amplitude and the time interval of the step driving signal, and can greatly reduce the switching time of a signal channel by applying the step driving signal for four times.
As shown in fig. 7a and 7b, under the control of the four-step driving signal, the oscillation phenomenon of the micromirror with the resonant frequency of 800Hz or 1100Hz is suppressed, the starting time of oscillation is 0.1s, and the time for stabilizing is not more than 0.01s, so the switching time is less than 10ms, and the switching time is greatly reduced.
It should be noted that, in the embodiment of the present application, when determining the step number m of applying the step driving signal, the step driving signal may be determined according to the oscillation suppression effect of the micromirrors, and if the oscillation suppression effect is not good after applying 4 steps to the resonant frequencies f1 and f2 of two micromirrors with a large frequency difference, 8 steps or more steps of applying the step driving signal may be used to suppress the oscillation. For example, for two resonant frequencies of 800Hz and 1200Hz, when the oscillation suppression effect is not good by applying the step driving signal in 4 steps, 8 steps may be adopted, that is, N is 3, and one resonant frequency f3, for example, 1000Hz, needs to be arbitrarily selected between 800Hz and 1200Hz to calculate the amplitude value and the time interval of the step driving signal.
In this example, one of the two resonant frequencies of 800Hz and 1200Hz is selected as the newly added resonant frequency, so that the frequency difference between the newly added resonant frequency and the two frequencies of 800Hz and 1200Hz is reduced, that is, the interval between the resonant frequencies is reduced, which is beneficial to suppressing the oscillation of the micro-mirror.
Corresponding to the above method embodiments, this embodiment further provides a step driving signal control apparatus for performing the step driving signal control method provided in any of the foregoing embodiments, where the apparatus is disposed in a micro-electromechanical system MEMS, where the MEMS includes a MEMS micro-mirror, as shown in fig. 8, and the apparatus includes: an acquirer 801, a processor 802, and a transmitter 803, the apparatus may further include other functional units or devices, such as a storage unit and the like.
Further, the processor 802 is configured to determine a number of steps m of applying the step driving signal to the MEMS micro-mirror, an amplitude value of each step driving signal, and a k-th time interval of applying the step driving signal from the k-th step to the k + 1-th step, where k is 1, 2, … …, m-1; the transmitter 803 is configured to transmit a step driving signal to the MEMS micro-mirror for the kth time according to the amplitude value; and after the k time interval, sending a step driving signal to the MEMS micro-mirror at the k +1 th time according to the amplitude value.
Optionally, in a specific implementation manner of this embodiment, the acquirer 801 is configured to acquire a resonant frequency of each MEMS micro-mirror in a case that the MEMS includes at least two MEMS micro-mirrors.
The processor 802 is specifically configured to determine the number of steps of the step drive signal to be 2 when the resonance frequency of each of the MEMS micro-mirrors is the sameNN is a positive integer greater than or equal to 1; when two or more different resonant frequencies exist, the step number of the step driving signal is determined to be 2 according to the difference amplitude between the different resonant frequenciesNN is a positive integer greater than or equal to 2; and the tolerance is not more than +/-0.05 multiplied by V/2N。
Optionally, in a specific implementation manner of this embodiment, the acquirer 801 is configured to acquire a rotation angle of the MEMS micro-mirror switching from the initial angular position to the target angular position.
The processor 802 is specifically configured to determine a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and a relationship between the signal amplitude of the MEMS micro-mirror and the rotation angle; and determining the amplitude value of the per-step drive signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
Optionally, in a specific implementation manner of this embodiment, the processor 802 is specifically configured to set the resonant frequency of the MEMS micro-mirror to fR(k)K is a positive integer, k is less than or equal to2N-1, when N is 1, or N.gtoreq.2 and fR(N)＞fR(N-1)In the case where the determination is made that the time interval for applying the step drive signal from the kth step to the (k + 1) th step satisfies:
Figure BDA0001702551190000101
wherein i is such that k is equal to 2iThe maximum value of the integer division is set,
Figure BDA0001702551190000102
representing the allowed error value of the time interval.
It should be noted that the time interval between two adjacent step driving signals may also be determined by other relations, which is not limited in the embodiment of the present application.
Optionally, in a specific implementation manner of this embodiment, the apparatus further includes a transmitter 803.
The processor 802 is specifically configured to generate a step drive signal with the amplitude value, and the transmitter 803 is configured to transmit the step drive signal to the MEMS micro-mirror for the kth time.
Optionally, an embodiment of the present application further provides a MEMS micro-mirror, where the MEMS micro-mirror is connected to the step driving signal control device.
The step driving signal control device is the device shown in fig. 8, and is configured to apply step driving signals to the MEMS micro-mirror at the kth time and the (k + 1) th time, where the magnitude of each applied step driving signal is a preset amplitude value.
The MEMS micro-mirror is used for receiving the step driving signal from the device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
Optionally, an optical cross connect OXC device is further provided in an embodiment of the present application, where the OXC device includes at least one MEMS micro-mirror and the step drive signal control device as described above with reference to fig. 8.
The step driving signal control device is used for generating a digital signal, converting the digital signal into a step driving signal and outputting the step driving signal to the at least one MEMS micro-mirror.
The step driving signal control device may include a controller as shown in fig. 9, the controller is configured to execute the step driving signal control method described in the foregoing embodiment, and a DA module configured to convert the digital signal into a step driving signal and send the step driving signal to the input MEMS micro-mirror and the output MEMS micro-mirror.
Each MEMS micro-mirror is used for receiving the step driving signal from the step driving signal control device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
In a specific implementation level, as shown in fig. 9, an embodiment of the present application further provides an OXC module with a "Z" shaped optical path and formed by two-dimensional MEMS micro-mirrors, where the OXC module includes: the MEMS micro-mirror array comprises an input port array, an input MEMS micro-mirror, an output port array and a detector.
The OXC module may be configured in a MEMS system that includes a controller and a DA module, and may further include a memory unit or memory.
The controller is used for applying a step drive signal to the MEMS micro-mirror, specifically, the controller outputs a digital signal to the DA module, the DA module converts the digital signal into the step drive signal after receiving the digital signal, and then the step drive signal is respectively output to the input MEMS micro-mirror and the output MEMS micro-mirror so as to drive the input MEMS micro-mirror and the output MEMS micro-mirror to change the angle position.
The DA module is a conversion unit used for converting a digital signal from the controller into a driving signal.
In addition, the OXC module may further include three or more MEMS micro-mirrors, and in addition, the OXC module may further form a "V" shaped or "W" shaped optical path, which is not limited in this embodiment.
Further, the controller may be a processor, and the processor may be composed of an Integrated Circuit (IC), for example, a single packaged IC, or a plurality of packaged ICs connected with the same function or different functions. For example, the Processor may include only a Central Processing Unit (CPU), or may be a combination of a GPU, a Digital Signal Processor (DSP), a Field Programmable Gate Array (FPGA), and a control chip (e.g., a baseband chip).
In addition, a Memory or a storage medium may also be included, where the Memory may include a volatile Memory (volatile Memory), such as a Random Access Memory (RAM); non-volatile memory (non-volatile memory) may also be included, such as flash memory (flash memory), Hard disk (Hard disk Drive, HDD) or Solid-State Drive (SSD); the memory may also comprise a combination of memories of the kind described above. The memory may have stored therein a program or code that is transmitted to the controller so that the controller may perform a function of applying a step driving signal to the MEMS micro-mirror by executing the program or code.
In a specific implementation, the present application further provides a computer storage medium, where the computer storage medium may store a program, and the program may include some or all of the steps in the embodiments of the step drive signal control method provided in the present application when executed.
Those skilled in the art will readily appreciate that the techniques of the embodiments of the present invention may be implemented as software plus a required general purpose hardware platform. Based on such understanding, the technical solutions in the embodiments of the present invention may be essentially or partially implemented in the form of a software product, which may be stored in a storage medium, such as ROM/RAM, magnetic disk, optical disk, etc., and includes several instructions for enabling a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method according to the embodiments or some parts of the embodiments.
The same and similar parts in the various embodiments in this specification may be referred to each other. In particular, for the embodiment of the step driving signal control method apparatus, since it is basically similar to the method embodiment, the description is simple, and for the relevant points, refer to the description in the method embodiment.
The above-described embodiments of the present application do not limit the scope of the present application.

Claims (12)

1. A step driving signal control method is applied to a Micro Electro Mechanical System (MEMS), wherein the MEMS comprises a MEMS micro mirror, and the method comprises the following steps:
determining the step number m of step driving signals applied to the MEMS micro-mirror, the amplitude value of each step driving signal, and the kth time interval from the kth step to the kth +1 step of applying the step driving signals, wherein k is 1, 2, … …, m-1, and m is a positive integer not less than 2;
step driving signals are applied to the MEMS micro-mirror at the kth time according to the amplitude values;
after the k time interval, applying a step drive signal to the MEMS micro-mirror at the k +1 th time according to the amplitude value;
determining the step number m of applying the step driving signal to the MEMS micro-mirror, comprising: acquiring the resonance frequency of each MEMS micro-mirror in the micro-electro-mechanical system, and determining the step number of the step driving signal applied to each MEMS micro-mirror according to the resonance frequency of each MEMS micro-mirror.
2. The method of claim 1, wherein determining the number of steps of the step drive signal applied to each MEMS micro-mirror based on the resonant frequency of each MEMS micro-mirror comprises:
determining the number of steps of the step drive signal to be 2 if the difference between the resonance frequencies of all the MEMS micro-mirrors is zeroNN is a positive integer greater than or equal to 1;
determining the number of steps of the stepped drive signal to be 2 if the difference between the H different resonance frequencies is not zeroNH is a positive integer not less than 2, and N is a positive integer not less than H.
3. The method of claim 1, wherein determining the amplitude value of the per-step drive signal comprises:
acquiring a rotation angle of the MEMS micro-mirror switched from an initial angle position to a target angle position;
determining a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and the relation between the signal amplitude of the MEMS micro-mirror and the rotation angle;
determining an amplitude value of the per-step drive signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
4. The method of claim 1, wherein determining the kth time interval for applying the step drive signal from the kth step to the (k + 1) th step comprises:
if the resonance frequency of the MEMS micro-mirror is fR(k)，k≤2N-1，m＝2N，
When N is equal to 1, or N is equal to or more than 2 and fR(N)＞fR(N-1)In the case of (a) in (b),
the time interval Δ t for applying the step driving signal from the k step to the k +1 step satisfies:
Figure FDA0003126411060000011
wherein i is such that k is equal to 2iThe maximum value of the integer division, N is a positive integer.
5. The method according to any of claims 1 to 4, wherein said applying a step drive signal to said MEMS micro-mirror for the kth time according to said magnitude value comprises:
generating a step drive signal having the magnitude value;
sending the step driving signal to the MEMS micro-mirror for the kth time.
6. A step drive signal control device, wherein the device is provided in a micro-electromechanical system, MEMS, comprising a MEMS micro-mirror, the device comprising:
a processor for determining the step number m of step driving signal applied to the MEMS micro-mirror, the amplitude value of each step driving signal, and the kth time interval from the kth step to the kth +1 step, wherein k is 1, 2, … …, m-1, and m is a positive integer not less than 2;
the transmitter is used for transmitting the step driving signal to the MEMS micro-mirror for the kth time according to the amplitude value; after the k time interval, sending a step driving signal to the MEMS micro-mirror at the k +1 th time according to the amplitude value;
an acquirer for acquiring a resonance frequency of each MEMS micro-mirror in the MEMS;
and the processor is specifically used for determining the step number of the step driving signal applied to each MEMS micro-mirror according to the resonance frequency of each MEMS micro-mirror.
7. The apparatus of claim 6, wherein:
the processor is specifically configured to determine that the number of steps of the step drive signal is 2 when the difference between the resonance frequencies of all the MEMS micro-mirrors is zeroNN is a positive integer greater than or equal to 1; determining the number of steps of the stepped drive signal to be 2 if the difference between the H different resonance frequencies is not zeroNH is a positive integer not less than 2, and N is a positive integer not less than H.
8. The apparatus of claim 6, wherein:
the acquirer is used for acquiring a rotation angle of the MEMS micro-reflector switched from an initial angle position to a target angle position;
the processor is specifically configured to determine a target signal amplitude applied to the MEMS micro-mirror according to the rotation angle and a relationship between the signal amplitude of the MEMS micro-mirror and the rotation angle; and determining the amplitude value of the per-step drive signal as: the ratio of the target signal amplitude to the number of steps of applying the step drive signal to the MEMS micro-mirror.
9. The apparatus of claim 6,
the processor is specifically configured to operate at a resonance frequency f of the MEMS micro-mirrorR(k)，k≤2N-1，m＝2N；
When N is equal to 1, or N is equal to or more than 2 and fR(N)＞fR(N-1)In the case of (a) in (b),
the time interval Δ t for applying the step driving signal from the k step to the k +1 step satisfies:
Figure FDA0003126411060000021
wherein i is such that k is equal to 2iThe maximum value of the integer division, N is a positive integer.
10. The apparatus of any one of claims 6 to 9, further comprising: a transmitter for transmitting a signal to a receiver,
the processor is specifically configured to generate a step drive signal having the amplitude value;
the transmitter is used for transmitting the step driving signal to the MEMS micro-mirror for the kth time.
11. A MEMS micro-mirror is characterized in that the MEMS micro-mirror is connected with a step drive signal control device,
the step drive signal control device is a device according to any one of claims 6 to 10, for applying step drive signals to the MEMS micro-mirror at kth and (k + 1) th times;
the MEMS micro-mirror is used for receiving the step driving signal from the device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
12. An optical cross-connect apparatus comprising at least two MEMS micro-mirrors and a step drive signal control apparatus according to any of claims 6 to 10,
the step driving signal control device is used for generating a digital signal, converting the digital signal into a step driving signal and outputting the step driving signal to at least one MEMS micro-mirror;
each MEMS micro-mirror is used for receiving the step driving signal from the step driving signal control device and adjusting the MEMS micro-mirror to be switched from the initial angle position to the target angle position by using the step driving signal.
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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1769945A (en) * 2004-09-30 2006-05-10 富士胶片株式会社 Microelectromechanical modulation device and microelectromechanical modulation device array, and image forming apparatus
WO2008041512A1 (en) * 2006-09-29 2008-04-10 Brother Kogyo Kabushiki Kaisha Optical scanner and image display equipped with it and retina scanning type image display, and driving method of optical scanning element
CN101288137A (en) * 2005-10-14 2008-10-15 Nxp股份有限公司 Mems tunable device
CN101308248A (en) * 2007-05-17 2008-11-19 佳能株式会社 Oscillator device, optical deflector and image forming apparatus using the optical deflector
CN101539662A (en) * 2008-03-19 2009-09-23 株式会社日立制作所 Reflector driving method and display apparatus using same
CN100582828C (en) * 2004-04-16 2010-01-20 卡佩拉光子学公司 System and method for canceling disturbance in MEMS devices
WO2011122410A1 (en) * 2010-03-31 2011-10-06 ブラザー工業株式会社 Optical scanning device and image display device
CN104423380A (en) * 2013-08-28 2015-03-18 罗伯特·博世有限公司 Method for adapting the parameters of a controller for micromechanical actuators, and device
EP2940509A1 (en) * 2014-04-30 2015-11-04 Trilite Technologies GmbH Apparatus and method for driving and measuring a MEMS mirror system
CN105487224A (en) * 2014-10-02 2016-04-13 弗劳恩霍夫应用研究促进协会 Method for activating a deflection device for a projection device, a deflection device for a projection device, and a projection device
CN105824004A (en) * 2016-04-29 2016-08-03 深圳市虚拟现实科技有限公司 Method and system for positioning interactive space

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7612931B2 (en) * 2006-05-19 2009-11-03 Jds Uniphase Corporation MEMS control system gain normalization
CN104793333B (en) * 2015-04-29 2017-04-12 中国科学院光电技术研究所 Large stroke high-speed multi-stage drive inclined mirror
DE102016221966A1 (en) * 2016-11-09 2018-05-09 Robert Bosch Gmbh Method for controlling an actuator device and micromechanical device

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100582828C (en) * 2004-04-16 2010-01-20 卡佩拉光子学公司 System and method for canceling disturbance in MEMS devices
CN1769945A (en) * 2004-09-30 2006-05-10 富士胶片株式会社 Microelectromechanical modulation device and microelectromechanical modulation device array, and image forming apparatus
CN101288137A (en) * 2005-10-14 2008-10-15 Nxp股份有限公司 Mems tunable device
WO2008041512A1 (en) * 2006-09-29 2008-04-10 Brother Kogyo Kabushiki Kaisha Optical scanner and image display equipped with it and retina scanning type image display, and driving method of optical scanning element
CN101308248A (en) * 2007-05-17 2008-11-19 佳能株式会社 Oscillator device, optical deflector and image forming apparatus using the optical deflector
CN101539662A (en) * 2008-03-19 2009-09-23 株式会社日立制作所 Reflector driving method and display apparatus using same
WO2011122410A1 (en) * 2010-03-31 2011-10-06 ブラザー工業株式会社 Optical scanning device and image display device
CN104423380A (en) * 2013-08-28 2015-03-18 罗伯特·博世有限公司 Method for adapting the parameters of a controller for micromechanical actuators, and device
EP2940509A1 (en) * 2014-04-30 2015-11-04 Trilite Technologies GmbH Apparatus and method for driving and measuring a MEMS mirror system
CN105487224A (en) * 2014-10-02 2016-04-13 弗劳恩霍夫应用研究促进协会 Method for activating a deflection device for a projection device, a deflection device for a projection device, and a projection device
CN105824004A (en) * 2016-04-29 2016-08-03 深圳市虚拟现实科技有限公司 Method and system for positioning interactive space

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