CN110632533B

CN110632533B - Power detection system of RF (radio frequency) power supply

Info

Publication number: CN110632533B
Application number: CN201910731458.7A
Authority: CN
Inventors: 王璐菊; 杨章静; 吴海荣; 耿广善; 刘天瑞
Original assignee: Suzhou Bowei Instrument Technology Co ltd
Current assignee: Suzhou Bowei Instrument Technology Co ltd
Priority date: 2019-08-08
Filing date: 2019-08-08
Publication date: 2022-09-27
Anticipated expiration: 2039-08-08
Also published as: CN110632533A

Abstract

The invention discloses a power detection system of an RF (radio frequency) power supply, which comprises a directional coupling system and a main control system, wherein the directional coupling system comprises an input port, an output port and a coupling output port, the input port is used for transmitting incident power, the output port is used for outputting reflected power, the directional coupling system also comprises an operational circuit of an incident power detection signal and an operational circuit of a reflected power detection signal, the incident and reflected proportional signals coupled out by the directional coupling system are filtered and amplified, and then the detected signals are transmitted to the main control system. According to the invention, the power detection design is directly integrated in the radio frequency power supply, so that the size is small and the cost is low; the alternating current signal with high power output is converted into a low-voltage direct current signal, so that the system can conveniently detect the working state of the radio frequency power supply.

Description

Power detection system of RF (radio frequency) power supply

Technical Field

The invention relates to the technical field of power detection, in particular to a power detection system of an RF (radio frequency) power supply.

Background

In a radio frequency power supply, a core part is a power amplification module, a power detection circuit for detecting the amplification power of the power amplification module is often connected behind the power amplification module, and for the radio frequency power supply power detection circuit, the performance of the power detection circuit directly influences the accuracy of the output power of the power amplification module.

At present, most of existing power detection instruments are externally connected to test, and detection is troublesome.

Disclosure of Invention

The present invention is directed to a power detection system for an RF power supply to solve the problems of the prior art.

In order to achieve the purpose, the invention provides the following technical scheme: the directional coupling system comprises an input port, an output port and a coupling output port, wherein the input port is used for transmitting incident power, the output port is used for outputting reflected power, the directional coupling system also comprises an operational circuit of an incident power detection signal and an operational circuit of a reflected power detection signal, the incident and reflected proportional signals coupled out by the directional coupling system are filtered and amplified, and then the detected signals are transmitted to the main control system.

Preferably, the operational circuit of the incident power detection signal performs filtering and proportional operation on the incident power coupling signal, and then feeds back the incident power coupling signal to the main control system for power value monitoring.

Preferably, the operation circuit of the reflected power detection signal performs filtering and proportional operation on the reflected power coupling signal, and then feeds back the filtered reflected power coupling signal to the main control system to perform power value monitoring.

Preferably, R3, R10, and R11 in the operational circuit of the incident power detection signal are potentiometers for coarsely and finely adjusting the feedback signal.

Preferably, R23, R18, and R19 in the arithmetic circuit for the reflected power detection signal are potentiometers for coarsely and finely adjusting the feedback signal.

Preferably, the power output radio frequency head further comprises a shell and a power output radio frequency head, wherein a power detection plate and an induction coil are arranged in the shell, the induction coil is located at an opening of the power detection plate, and the power output radio frequency head is connected with the induction coil through an output power line.

Compared with the prior art, the invention has the beneficial effects that: the invention integrates the power detection design directly inside the radio frequency power supply, and has small volume and low cost; the alternating current signal with high power output is converted into a low-voltage direct current signal, so that the system can conveniently detect the working state of the radio frequency power supply.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a directional coupling circuit of the present invention;

FIG. 2 is a circuit for computing incident power detection signals according to the present invention;

FIG. 3 is a circuit for calculating a reflected power detection signal according to the present invention;

FIG. 4 is a front view of the present invention;

FIG. 5 is a left side view of the present invention;

fig. 6 is a top view of the present invention.

In the figure: 1. a power detection board; 2. a housing; 3. an induction coil; 4. an output power line; 5. and outputting the power to the radio frequency head.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

The invention is mainly applied to the detection of the output of the radio frequency power supply with the output of 27.12Mhz frequency and 50 ohm impedance.

Referring to fig. 1-6, in an embodiment of the present invention, a power detection system of an RF power source includes a directional coupling system and a main control system, the directional coupling system includes an input port, an output port and a coupling output port, the input port is for transmitting incident power, the output port is for outputting reflected power, the directional coupling system further includes an operation circuit of an incident power detection signal and an operation circuit of a reflected power detection signal, filtering and amplifying an incident and reflected proportional signal coupled by the directional coupling system, and then transmitting a detected signal to the main control system, the operation circuit of the incident power detection signal filters and performs proportional operation on the incident power coupling signal, and then feeds back the incident power coupling signal to the main control system for power value monitoring, the operation circuit of the reflected power detection signal filters and performs proportional operation on the reflected power coupling signal, then feeding back to a master control system for monitoring the magnitude of a power value, wherein R3, R10 and R11 in an operational circuit of an incident power detection signal are potentiometers for coarsely and finely adjusting a feedback signal, R23, R18 and R19 in an operational circuit of a reflected power detection signal are potentiometers for coarsely and finely adjusting the feedback signal, the electronic ballast further comprises a shell 2 and a power output radio frequency head 5, a power detection board 1 and an induction coil 3 are arranged in the shell 2, the induction coil 3 is positioned at an opening of the power detection board 1, and the power output radio frequency head 5 is connected with the induction coil 3 through an output power line 4;

the output signal of the ideal directional coupler is relatively stable in the frequency use range and has certain directivity; there are basically two types of directional couplers in common use: one is a mode similar to a high-frequency impedance bridge consisting of lumped parameter components; the other is a microstrip mode using a distributed parameter circuit. The former has a frequency characteristic of a relatively high number, the directional coupling coefficient is basically constant in a relatively wide frequency band, but the directional coupling coefficient is limited by the characteristics of a separation component, so that the directional coupling coefficient cannot be used in an ultra-high frequency band and can only be used in 1.5-60 MHZ; the latter is composed of microstrip lines, has better impedance continuity and simple circuit, and has the defect of sensitivity to frequency change.

The working principle of the invention is as follows: the power signal of 27.12Mhz is mainly filtered and amplified by the incident and reflected proportional signal coupled out by the directional coupling circuit, and then the detected signal is transmitted to a control system; the operational circuit of the incident power detection signal carries out filtering and proportional operation on the incident power coupling signal, and then feeds the incident power coupling signal back to the main control system for power value monitoring, the operational circuit of the reflected power detection signal carries out filtering and proportional operation on the reflected power coupling signal, and then feeds the reflected power coupling signal back to the main control system for power value monitoring, R3, R10 and R11 in the operational circuit of the incident power detection signal are potentiometers for coarse adjustment and fine adjustment of the feedback signal, and R23, R18 and R19 in the operational circuit of the reflected power detection signal are potentiometers for coarse adjustment and fine adjustment of the feedback signal.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A power detection system of an RF (radio frequency) power supply comprises a directional coupling system and a main control system, and is characterized in that: the directional coupling system comprises an input port, an output port and a coupling output port, wherein the input port is used for transmitting incident power, the output port is used for outputting reflected power, the directional coupling system also comprises an operational circuit for detecting signals of the incident power and an operational circuit for detecting signals of the reflected power, the incident and reflected proportional signals coupled out by the directional coupling system are filtered and amplified, and then the detected signals are transmitted to the main control system; the operational circuit of the incident power detection signal carries out filtering and proportional operation on the incident power coupling signal, and then feeds back the incident power coupling signal to the main control system for power value monitoring; the operation circuit of the reflected power detection signal carries out filtering and proportional operation on the reflected power coupling signal, and then feeds the reflected power coupling signal back to the main control system for power value monitoring; r3, R10 and R11 in the operational circuit of the incident power detection signal are potentiometers for coarse adjustment and fine adjustment of a feedback signal; r23, R18 and R19 in the operational circuit of the reflected power detection signal are potentiometers for coarse adjustment and fine adjustment of a feedback signal; the power output radio frequency head is characterized by further comprising a shell (2) and a power output radio frequency head (5), wherein a power detection board (1) and an induction coil (3) are arranged in the shell (2), the induction coil (3) is located at an opening of the power detection board (1), and the power output radio frequency head (5) is connected with the induction coil (3) through an output power line (4).