CN110631998A - Reference arm optical path structure and OCT imaging system - Google Patents

Reference arm optical path structure and OCT imaging system Download PDF

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Publication number
CN110631998A
CN110631998A CN201911036363.XA CN201911036363A CN110631998A CN 110631998 A CN110631998 A CN 110631998A CN 201911036363 A CN201911036363 A CN 201911036363A CN 110631998 A CN110631998 A CN 110631998A
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light beam
light
arm optical
optical path
galvanometer
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苏胜飞
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Shenzhen Zhongtou Huaxun Terahertz Technology Co., Ltd
Shenzhen Institute of Terahertz Technology and Innovation
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Shenzhen Institute of Terahertz Technology and Innovation
Shenzhen Huaxun Ark Technology Co Ltd
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Priority to CN201911036363.XA priority Critical patent/CN110631998A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems

Abstract

The invention belongs to the technical field of optical coherence tomography, and particularly relates to a reference arm optical path structure and an OCT imaging system. The reference arm optical path structure includes: the first vibrating mirror is used for the incidence of the first light beam and the outward polarization reflection of the first light beam, and has a first deflection state and a second deflection state; the plane reflection structure is used for receiving the first light beam from the first galvanometer and reflecting the first light beam to the first galvanometer when the first galvanometer is in a first deflection state; and the light filtering reflection structure comprises at least two light filtering reflection films which are arranged in a stacked mode, each light filtering reflection film is used for reflecting the first light beam in the preset wavelength interval to the first vibrating mirror, and the transmission of the first light beam in other wavelength intervals is not limited, wherein any two adjacent light filtering reflection films are arranged at a preset distance, and the wavelength intervals of the first light beams reflected by any two light filtering reflection films are different. The invention can realize the adjustment of the scanning depth of the OCT imaging system by arranging a plurality of layers of light filtering reflection films.

Description

Reference arm optical path structure and OCT imaging system
Technical Field
The invention belongs to the technical field of optical coherence tomography, and particularly relates to a reference arm optical path structure and an OCT imaging system.
Background
Currently, Optical Coherence Tomography (OCT) is an emerging imaging technology in recent decades, and attracts more and more attention because of its advantages such as high resolution, non-invasive, non-contact measurement, etc. The method utilizes the basic principle of a weak coherent optical interferometer, and the core components of the method are a broadband light source and a Michelson interferometer. In the signal acquisition process, coherent light from a broadband light source is divided into two parts in a Michelson interferometer, one part is that reference light is reflected by a detector, the other part enters a sample as detection light, and reflected light or scattered light of different sample depths forms interference with the reference light, so that depth information of the sample can be obtained by detecting the interference signal. And controlling the collection point to move on the sample to obtain the three-dimensional information of the sample.
An OCT imaging system can be divided into two types due to its different structure: time domain OCT (TD-OCT) and frequency domain OCT (SD-OCT). TD-OCT was the first generation OCT that detected spectra in a way that the intensity of light could be detected directly to the depth information of the sample by moving the mirror of the reference arm while detecting the intensity. And the SD-OC indirectly detects the interference spectrum of the sample reflected light and the reference light by using a high-speed spectrometer, and obtains the depth information of the sample through Fourier transformation.
For a frequency-domain OCT imaging system, the scan depth of the sample is determined by the wavelength resolution of the spectrometer:
Figure BDA0002251607520000011
wherein Z ismaxIs the scanning depth of the OCT imaging system, n is the refractive index of the sample to be measured, lambda0Is the center wavelength, R, of a broadband light sourceλIs the wavelength resolution of the spectrometer. Therefore, in a general OCT imaging system, the wavelength resolution of the spectrometer can only be reduced when the scanning depth is increased, which means that the system needs to be replaced, and further, if two modes of high scanning depth and low scanning depth are integrated in one OCT imaging system, only two spectrometers can be used in one OCT imaging system, which undoubtedly greatly increases the cost of the system.
Disclosure of Invention
The invention aims to provide a reference arm optical path structure, aiming at solving the problem of how to adjust the scanning depth of an OCT imaging system.
The invention provides a reference arm optical path structure, which is used for being matched with a broadband light source, a coupler and a sample arm optical path structure for use, wherein the broadband light source emits a source light beam, the coupler is used for dividing the source light beam into a first light beam which enters the reference arm optical path structure and a second light beam which enters the sample arm optical path structure, and the reference arm optical path structure comprises:
the first galvanometer is used for enabling the first light beam to enter and reflecting the first light beam in an outward polarization mode and has a first deflection state and a second deflection state;
a planar reflecting structure for receiving the first light beam from the first galvanometer and reflecting the first light beam toward the first galvanometer when the first galvanometer is in the first deflection state; and
the light filtering reflection structure comprises at least two light filtering reflection films which are arranged in a stacked mode, each light filtering reflection film can receive the first light beam from the first vibrating mirror and reflect the first light beam to the first vibrating mirror when the first vibrating mirror is in the second deflection state, each light filtering reflection film is used for reflecting the first light beam in a preset wavelength range to the first vibrating mirror and does not limit the transmission of the first light beam in other wavelength ranges, any two adjacent light filtering reflection films are arranged at a preset distance, and the wavelength ranges of the first light beams reflected by any two light filtering reflection films are different.
The invention has the technical effects that: when the first galvanometer is in a first deflection state, the depth resolution of the OCT imaging system is high, and the scanning depth is low, namely a high-resolution low-scanning depth mode; when the first galvanometer is in the second deflection state, the depth resolution of the OCT imaging system is reduced by arranging the plurality of layers of light filtering reflection films, so that the scanning depth is improved, namely a low-resolution high-scanning depth mode is realized, and finally the scanning depth of the OCT imaging system is adjusted.
Drawings
FIG. 1 is a schematic diagram of an OCT imaging system provided by an embodiment of the invention;
fig. 2 is a schematic structural view of the light filtering reflection structure of fig. 1 provided with two light filtering reflection films;
fig. 3 is a schematic structural diagram of a filter reflection structure provided with m filter reflection films.
The correspondence between reference numbers and names in the drawings is as follows:
100. an OCT imaging system; 100', reference arm optical path structure; 100' and a sample arm optical path structure; 10. a broadband light source; 20. a spectrum analyzer; 30. a coupler; 101. a first light beam; 102. a second light beam; 103. a sample to be tested; 40. a first collimating lens; 50. a first galvanometer; 50', a first deflected state; 50 ", a second deflected state; 61. a planar reflective structure; 62. a light filtering reflective structure; 70. a second galvanometer; 90. a focusing lens; 80. a second collimating lens; 63. a light filtering reflection film; 64. a light filtering reflection sheet;
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "thickness", "upper", "lower", "vertical", "parallel", "bottom", "angle", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship.
Referring to fig. 1 to fig. 3, an embodiment of the invention provides a reference arm optical path structure 100' and an OCT imaging system 100 having the same, where the OCT imaging system 100 is used for performing imaging scanning on a sample 103 to be measured. OCT imaging system 100 further includes: sample arm optical path structure 100 ", broadband light source 10, coupler 30, and spectrum analyzer 20. The broadband light source 10 emits a source light beam and the source light beam is split by the coupler 30 into a first light beam 101 and a second light beam 102, the first light beam 101 being incident on the reference arm optical path structure 100' and the second light beam 102 being incident on the sample arm optical path structure 100 ". The total wavelength interval of the first light beam 101 is equal to the total wavelength interval of the second light beam 102, and optionally, the total wavelength interval of the first light beam 101 is defined as [ ω [ ]0,ωλ]. Coupler 30 is also used to process and transmit to spectrum analyzer 20 first and second beams 101 and 102 reflected back from reference arm optical path structure 100' and sample arm optical path structure 100 ", respectively.
The reference arm optical path structure 100' includes: a first galvanometer 50, a planar reflective structure 61, and a filtering reflective structure 62. The first light beam 101 enters the first galvanometer 50, and the first galvanometer 50 polarizes and reflects the first light beam 101 toward the planar reflective structure 61 or the filtering reflective structure 62, receives the first light beam 101 reflected from the planar reflective structure 61 or the filtering reflective structure 62, and reflects the first light beam 101 to the coupler 30. The first galvanometer 50 has a first deflected state 50' and a second deflected state 50 ".
Optionally, coupler 30 is a 2x2 fiber optic coupler.
When the first galvanometer 50 is in the first deflected state 50', the planar reflective structure 61 receives the first light beam 101 from the first galvanometer 50 and reflects the first light beam 101 toward the first galvanometer 50. Alternatively, the planar reflective structure 61 may be a planar mirror. It will be appreciated that the planar reflective structure 61 reflects the first light beam 101 back to the coupler 30, and is processed by the coupler 30 and the second light beam 102 for transmission to the spectrum analyzer 20. The mathematical processing method of the spectrum analyzer 20 on the interference spectrum is the same as that of the ordinary frequency domain OCT, i.e. the interference spectrum is fourier transformed, and thus, the depth resolution of the OCT imaging system 100 is:
Figure BDA0002251607520000041
wherein, the detection depth (optical path) is:
Figure BDA0002251607520000042
when the first galvanometer 50 is in the second deflected state 50 ", the filtering reflective structure 62 receives the first light beam 101 from the first galvanometer 50 and emits the first light beam 101 toward the first galvanometer 50. Specifically, the filtering reflection structure 62 includes a filtering reflection film 63, and the filtering reflection film 63 is used for reflecting the first light beam 101 located in a predetermined wavelength interval toward the first galvanometer 50 and not limiting the transmission of the first light beam 101 located in other wavelength intervals. At least two light filtering reflection films 63 are stacked, any two adjacent light filtering reflection films 63 are arranged at a preset distance, and the wavelength intervals of the first light beams 101 reflected by any two light filtering reflection films 63 are different, that is, any one light filtering reflection film 63 only reflects the first light beam 101 in a certain wavelength interval corresponding to the light filtering reflection film, and does not limit other wavelengths, the wavelength interval is located in the total wavelength interval, and no overlapping part exists in each wavelength interval. It is understood that the plurality of light filtering reflection films 63 reflect the first light beam 101 in a plurality of wavelength bands in a predetermined wavelength interval. The first galvanometer 50 is further configured to receive the first light beam 101 from the planar reflective structure 61 or the filtered reflective structure 62 and reflect the first light beam 101 to the coupler 30.
Referring to fig. 1 to 3, in particular, the number of the light filtering reflective films 63 is m, m is a natural number, and m > is 2. Then, the filtering and reflecting structure 62 respectively reflects the first light beam 101 in m wavelength bands, and the depth resolution in each wavelength band sequentially is as follows according to the incident direction of the first light beam 101:
Figure BDA0002251607520000051
Figure BDA0002251607520000052
Figure BDA0002251607520000053
wherein, [ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1]The range values of the wavelength ranges of the first light beam corresponding to the first light filtering reflection film and the mth light filtering reflection film … are sequentially arranged along the incident direction of the first light beam.
It can be understood that, when the first galvanometer is in the second deflection state, the depth resolution of the OCT imaging system is:
Figure BDA0002251607520000061
because, max ([ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1])<[ω0,ωλ]Therefore R1λ>R2λ
Thus, when the first galvanometer 50 is in the first deflected state 50', the depth resolution of the OCT imaging system 100 is high and the scan depth is low, i.e., a high resolution low scan depth mode; when the first galvanometer 50 is in the second deflection state 50 ″, the depth resolution of the OCT imaging system 100 is reduced, so that the scanning depth is increased, i.e., in a low-resolution high-scanning-depth mode, and finally, the adjustment of the scanning depth of the OCT imaging system 100 is achieved.
In one embodiment, the wavelength ranges of the first light beam 101 corresponding to the light filtering reflection films 63 are sequentially and continuously arranged along the incident direction of the first light beam 101. Specifically, [ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1]In the total wavelength interval [ omega ]0,ωλ]In a continuous distribution, i.e. ω11=ω20、ω21=ω30...ω(m-1)1=ωm0. Further, ω is0=ω10、ωm1=ωλ
Specifically, in one embodiment, m is 2, ω11=ω20,ω0=ω10、ω21=ωλAnd ω is1110=ω2120. I.e. the total wavelength interval is divided into two equal parts.
When the first galvanometer 50 is in the first deflected state,
when the first galvanometer 50 is in the second deflected state,
Figure BDA0002251607520000063
10,ω11]and [ omega ]20,ω21]The first light beams 101 in the two wavelength ranges are reflected by the two corresponding filter reflection films 63 to the first vibrating mirror 50, and finally, the interference spectra in the two wavelength bands are recorded by the spectrum analyzer 20. In the scanning depth mode, the mathematical processing method for the interference spectrum is different from the common frequency domain OCT, and the spectrum needs to be segmented: for [ omega ]10,ω11]Fourier transform is carried out on the interference spectrum in the wavelength interval, and the optical path of the obtained sample is from 0 to
Figure BDA0002251607520000064
Depth information of [ omega ]20,ω21]Fourier transform is carried out on the interference spectrum in the wavelength interval to obtain the optical path of the sample
Figure BDA0002251607520000065
ToDepth information, depth resolution at both bands
Figure BDA0002251607520000071
OrIt can be seen that the depth resolution in this scanning depth mode is reduced and the overall probe depth is doubled compared to the high resolution mode.
Referring to fig. 1-3, in one embodiment, the filtering reflective structure 62 further includes a plurality of filtering reflective sheets 64, it being understood that the number of filtering reflective sheets is m-1. A light filtering radiation sheet is arranged between any two adjacent light filtering reflection films 63, and the two adjacent light filtering reflection films 63 are respectively plated on the two side surfaces of the same light filtering reflection sheet 64. Specifically, the thickness of each filter reflection sheet 64 is set to a predetermined value, that is:
Figure BDA0002251607520000073
wherein the content of the first and second substances,
Drthe thickness value of the r-th light filtering reflection sheet along the incident direction of the first light beam is shown, wherein r is more than or equal to 2 and less than or equal to m;
Nrthe r is the refractive index of the light filtering reflecting sheet;
λ0is the center wavelength of the source beam;
Rλis the wavelength resolution of the spectrometer.
In one embodiment, the lengths of the wavelength ranges corresponding to the light filtering reflection films 63 are all equal. Specifically, ω1110=ω2120=...=ωm1m0That is, the total wavelength interval is divided into m equal parts, and the wavelength resolution corresponding to each wavelength interval is the same.
In one embodiment, the light filtering reflection films 63 are sequentially disposed at equal intervals. I.e., the thickness of each filter reflection sheet 64 is the same.
In one embodiment, the reference arm optical path structure 100' further includes a first collimating lens 40, and the first collimating lens 40 is configured to collimate the first light beam 101 incident on the first galvanometer 50. The first light beam 101 incident on the first galvanometer 50 is arranged as parallel light by passing through the first collimating lens 40.
In one embodiment, the reference arm optical path structure 100' further includes a first driver for driving the first galvanometer 50 to move in a deflecting manner, and optionally, the first driver may be a smart computer.
In one embodiment, the sample arm optical path structure 100 ″ includes a second galvanometer 70 and a focusing lens 90, the second light beam 102 enters the second galvanometer 70 and is deflected and reflected by the second galvanometer 70 to the focusing lens 90 to perform imaging scanning on the sample 103 to be measured, and the second galvanometer 70 is further configured to receive the second light beam 102 from the sample 103 to be measured and reflect the second light beam 102 to the spectrum analyzer 20.
In one embodiment, the sample arm optical path structure 100 "further comprises a second actuator for driving the second galvanometer 70 to move in a deflection, optionally the second actuator may be a smart computer.
In one embodiment, second galvanometer 70 deflects second light beam 102 in a first direction and/or a second direction, wherein the first direction is disposed orthogonal to the second direction. Specifically, the first direction is defined as an X direction, the second direction is defined as a Y direction, and the second galvanometer 70 scans in the X direction and/or the Y direction under the driving of the second driver.
In one embodiment, the sample arm optical path structure 100 "further comprises a second collimating lens 80, the second collimating lens 80 being configured to collimate a second light beam 102 incident on the second galvanometer 70. The second light beam 102 incident on the second galvanometer 70 is made to be parallel light by the second collimating lens 80.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A reference arm optical path structure for use with a broadband light source that emits a source beam, a coupler for splitting the source beam into a first beam incident on the reference arm optical path structure and a second beam incident on the sample arm optical path structure, and a sample arm optical path structure, the reference arm optical path structure comprising:
the first galvanometer is used for enabling the first light beam to enter and reflecting the first light beam in an outward polarization mode and has a first deflection state and a second deflection state;
a planar reflecting structure for receiving the first light beam from the first galvanometer and reflecting the first light beam toward the first galvanometer when the first galvanometer is in the first deflection state; and
the light filtering reflection structure comprises at least two light filtering reflection films which are arranged in a stacked mode, each light filtering reflection film can receive the first light beam from the first vibrating mirror and reflect the first light beam to the first vibrating mirror when the first vibrating mirror is in the second deflection state, each light filtering reflection film is used for reflecting the first light beam in a preset wavelength range to the first vibrating mirror and does not limit the transmission of the first light beam in other wavelength ranges, any two adjacent light filtering reflection films are arranged at a preset distance, and the wavelength ranges of the first light beams reflected by any two light filtering reflection films are different.
2. The reference arm optical path structure of claim 1, wherein: the wavelength intervals of the first light beams corresponding to the light filtering reflection films are sequentially and continuously arranged along the incidence direction of the first light beams.
3. The reference arm optical path structure of claim 1, wherein: the filtering reflection structure further comprises a plurality of filtering reflection sheets, one filtering radiation sheet is arranged between any two adjacent filtering reflection films, and the two adjacent filtering reflection films are respectively plated on the two side surfaces of the same filtering reflection sheet.
4. The reference arm optical path structure of claim 1, wherein: the lengths of the wavelength intervals corresponding to the light filtering reflection films are equal.
5. The reference arm optical path structure of claim 1, wherein: the light filtering reflection films are arranged at equal intervals in sequence.
6. The reference arm optical path structure according to any one of claims 1 to 5, wherein: the reference arm optical path structure further comprises a first collimating lens, and the first collimating lens is used for collimating the first light beam incident to the first galvanometer.
7. An OCT imaging system for performing an imaging scan of a sample to be measured, the OCT imaging system comprising: the reference arm optical circuit structure of any one of claims 1-6, a sample arm optical circuit structure, a broadband light source, a coupler, and a spectrum analyzer, the broadband light source for emitting a source light beam, and the source light beam being split by the coupler into a first light beam incident on the reference arm optical circuit structure and a second light beam incident on the sample arm optical circuit structure, the spectrum analyzer for receiving and analyzing the first light beam reflected back from the reference arm optical circuit structure and the second light beam reflected back from the sample arm optical circuit structure.
8. The OCT imaging system of claim 7, wherein: the sample arm optical path structure comprises a second galvanometer and a focusing lens, the second light beam is incident on the second galvanometer and deflected and reflected to the focusing lens to be scanned, and the second galvanometer is also used for receiving the second light beam from the sample to be detected and reflecting the second light beam to the spectrum analyzer.
9. The OCT imaging system of claim 8, wherein: the second galvanometer deflects the second light beam in a first direction and/or a second direction, wherein the first direction is orthogonal to the second direction.
10. The OCT imaging system of claim 8, wherein: the sample arm optical path structure further comprises a second collimating lens, and the second collimating lens is used for collimating the second light beam incident to the second galvanometer.
CN201911036363.XA 2019-10-29 2019-10-29 Reference arm optical path structure and OCT imaging system Pending CN110631998A (en)

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