Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "thickness", "upper", "lower", "vertical", "parallel", "bottom", "angle", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship.
Referring to fig. 1 to fig. 3, an embodiment of the invention provides a reference arm optical path structure 100' and an OCT imaging system 100 having the same, where the OCT imaging system 100 is used for performing imaging scanning on a sample 103 to be measured. OCT imaging system 100 further includes: sample arm optical path structure 100 ", broadband light source 10, coupler 30, and spectrum analyzer 20. The broadband light source 10 emits a source light beam and the source light beam is split by the coupler 30 into a first light beam 101 and a second light beam 102, the first light beam 101 being incident on the reference arm optical path structure 100' and the second light beam 102 being incident on the sample arm optical path structure 100 ". The total wavelength interval of the first light beam 101 is equal to the total wavelength interval of the second light beam 102, and optionally, the total wavelength interval of the first light beam 101 is defined as [ ω [ ]0,ωλ]. Coupler 30 is also used to process and transmit to spectrum analyzer 20 first and second beams 101 and 102 reflected back from reference arm optical path structure 100' and sample arm optical path structure 100 ", respectively.
The reference arm optical path structure 100' includes: a first galvanometer 50, a planar reflective structure 61, and a filtering reflective structure 62. The first light beam 101 enters the first galvanometer 50, and the first galvanometer 50 polarizes and reflects the first light beam 101 toward the planar reflective structure 61 or the filtering reflective structure 62, receives the first light beam 101 reflected from the planar reflective structure 61 or the filtering reflective structure 62, and reflects the first light beam 101 to the coupler 30. The first galvanometer 50 has a first deflected state 50' and a second deflected state 50 ".
Optionally, coupler 30 is a 2x2 fiber optic coupler.
When the first galvanometer 50 is in the first deflected state 50', the planar reflective structure 61 receives the first light beam 101 from the first galvanometer 50 and reflects the first light beam 101 toward the first galvanometer 50. Alternatively, the planar reflective structure 61 may be a planar mirror. It will be appreciated that the planar reflective structure 61 reflects the first light beam 101 back to the coupler 30, and is processed by the coupler 30 and the second light beam 102 for transmission to the spectrum analyzer 20. The mathematical processing method of the spectrum analyzer 20 on the interference spectrum is the same as that of the ordinary frequency domain OCT, i.e. the interference spectrum is fourier transformed, and thus, the depth resolution of the OCT imaging system 100 is:
wherein, the detection depth (optical path) is:
when the first galvanometer 50 is in the second deflected state 50 ", the filtering reflective structure 62 receives the first light beam 101 from the first galvanometer 50 and emits the first light beam 101 toward the first galvanometer 50. Specifically, the filtering reflection structure 62 includes a filtering reflection film 63, and the filtering reflection film 63 is used for reflecting the first light beam 101 located in a predetermined wavelength interval toward the first galvanometer 50 and not limiting the transmission of the first light beam 101 located in other wavelength intervals. At least two light filtering reflection films 63 are stacked, any two adjacent light filtering reflection films 63 are arranged at a preset distance, and the wavelength intervals of the first light beams 101 reflected by any two light filtering reflection films 63 are different, that is, any one light filtering reflection film 63 only reflects the first light beam 101 in a certain wavelength interval corresponding to the light filtering reflection film, and does not limit other wavelengths, the wavelength interval is located in the total wavelength interval, and no overlapping part exists in each wavelength interval. It is understood that the plurality of light filtering reflection films 63 reflect the first light beam 101 in a plurality of wavelength bands in a predetermined wavelength interval. The first galvanometer 50 is further configured to receive the first light beam 101 from the planar reflective structure 61 or the filtered reflective structure 62 and reflect the first light beam 101 to the coupler 30.
Referring to fig. 1 to 3, in particular, the number of the light filtering reflective films 63 is m, m is a natural number, and m > is 2. Then, the filtering and reflecting structure 62 respectively reflects the first light beam 101 in m wavelength bands, and the depth resolution in each wavelength band sequentially is as follows according to the incident direction of the first light beam 101:
…
wherein, [ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1]The range values of the wavelength ranges of the first light beam corresponding to the first light filtering reflection film and the mth light filtering reflection film … are sequentially arranged along the incident direction of the first light beam.
It can be understood that, when the first galvanometer is in the second deflection state, the depth resolution of the OCT imaging system is:
because, max ([ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1])<[ω0,ωλ]Therefore R1λ>R2λ。
Thus, when the first galvanometer 50 is in the first deflected state 50', the depth resolution of the OCT imaging system 100 is high and the scan depth is low, i.e., a high resolution low scan depth mode; when the first galvanometer 50 is in the second deflection state 50 ″, the depth resolution of the OCT imaging system 100 is reduced, so that the scanning depth is increased, i.e., in a low-resolution high-scanning-depth mode, and finally, the adjustment of the scanning depth of the OCT imaging system 100 is achieved.
In one embodiment, the wavelength ranges of the first light beam 101 corresponding to the light filtering reflection films 63 are sequentially and continuously arranged along the incident direction of the first light beam 101. Specifically, [ omega ]10,ω11]、[ω20,ω21]…[ωm0,ωm1]In the total wavelength interval [ omega ]0,ωλ]In a continuous distribution, i.e. ω11=ω20、ω21=ω30...ω(m-1)1=ωm0. Further, ω is0=ω10、ωm1=ωλ。
Specifically, in one embodiment, m is 2, ω11=ω20,ω0=ω10、ω21=ωλAnd ω is11-ω10=ω21-ω20. I.e. the total wavelength interval is divided into two equal parts.
When the first galvanometer 50 is in the first deflected state,
when the first galvanometer 50 is in the second deflected state,
[ω
10,ω
11]and [ omega ]
20,ω
21]The first light beams 101 in the two wavelength ranges are reflected by the two corresponding
filter reflection films 63 to the first vibrating
mirror 50, and finally, the interference spectra in the two wavelength bands are recorded by the
spectrum analyzer 20. In the scanning depth mode, the mathematical processing method for the interference spectrum is different from the common frequency domain OCT, and the spectrum needs to be segmented: for [ omega ]
10,ω
11]Fourier transform is carried out on the interference spectrum in the wavelength interval, and the optical path of the obtained sample is from 0 to
Depth information of [ omega ]
20,ω
21]Fourier transform is carried out on the interference spectrum in the wavelength interval to obtain the optical path of the sample
To
Depth information, depth resolution at both bands
Or
It can be seen that the depth resolution in this scanning depth mode is reduced and the overall probe depth is doubled compared to the high resolution mode.
Referring to fig. 1-3, in one embodiment, the filtering reflective structure 62 further includes a plurality of filtering reflective sheets 64, it being understood that the number of filtering reflective sheets is m-1. A light filtering radiation sheet is arranged between any two adjacent light filtering reflection films 63, and the two adjacent light filtering reflection films 63 are respectively plated on the two side surfaces of the same light filtering reflection sheet 64. Specifically, the thickness of each filter reflection sheet 64 is set to a predetermined value, that is:
wherein the content of the first and second substances,
Drthe thickness value of the r-th light filtering reflection sheet along the incident direction of the first light beam is shown, wherein r is more than or equal to 2 and less than or equal to m;
Nrthe r is the refractive index of the light filtering reflecting sheet;
λ0is the center wavelength of the source beam;
Rλis the wavelength resolution of the spectrometer.
In one embodiment, the lengths of the wavelength ranges corresponding to the light filtering reflection films 63 are all equal. Specifically, ω11-ω10=ω21-ω20=...=ωm1-ωm0That is, the total wavelength interval is divided into m equal parts, and the wavelength resolution corresponding to each wavelength interval is the same.
In one embodiment, the light filtering reflection films 63 are sequentially disposed at equal intervals. I.e., the thickness of each filter reflection sheet 64 is the same.
In one embodiment, the reference arm optical path structure 100' further includes a first collimating lens 40, and the first collimating lens 40 is configured to collimate the first light beam 101 incident on the first galvanometer 50. The first light beam 101 incident on the first galvanometer 50 is arranged as parallel light by passing through the first collimating lens 40.
In one embodiment, the reference arm optical path structure 100' further includes a first driver for driving the first galvanometer 50 to move in a deflecting manner, and optionally, the first driver may be a smart computer.
In one embodiment, the sample arm optical path structure 100 ″ includes a second galvanometer 70 and a focusing lens 90, the second light beam 102 enters the second galvanometer 70 and is deflected and reflected by the second galvanometer 70 to the focusing lens 90 to perform imaging scanning on the sample 103 to be measured, and the second galvanometer 70 is further configured to receive the second light beam 102 from the sample 103 to be measured and reflect the second light beam 102 to the spectrum analyzer 20.
In one embodiment, the sample arm optical path structure 100 "further comprises a second actuator for driving the second galvanometer 70 to move in a deflection, optionally the second actuator may be a smart computer.
In one embodiment, second galvanometer 70 deflects second light beam 102 in a first direction and/or a second direction, wherein the first direction is disposed orthogonal to the second direction. Specifically, the first direction is defined as an X direction, the second direction is defined as a Y direction, and the second galvanometer 70 scans in the X direction and/or the Y direction under the driving of the second driver.
In one embodiment, the sample arm optical path structure 100 "further comprises a second collimating lens 80, the second collimating lens 80 being configured to collimate a second light beam 102 incident on the second galvanometer 70. The second light beam 102 incident on the second galvanometer 70 is made to be parallel light by the second collimating lens 80.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.