CN110629165A

CN110629165A - Mask plate

Info

Publication number: CN110629165A
Application number: CN201911056321.2A
Authority: CN
Inventors: 张志远
Original assignee: Kunshan Guoxian Photoelectric Co Ltd
Current assignee: Kunshan Govisionox Optoelectronics Co Ltd; Kunshan Guoxian Photoelectric Co Ltd
Priority date: 2019-10-31
Filing date: 2019-10-31
Publication date: 2019-12-31
Anticipated expiration: 2039-10-31
Also published as: CN110629165B

Abstract

The embodiment of the invention discloses a mask. The method comprises the following steps: a bezel and an opening surrounded by the bezel; the supporting part is in a grid shape and corresponds to an area between adjacent pixel units on the substrate to be evaporated. The embodiment of the invention effectively realizes the stable support of the shielding part designed offshore by utilizing the supporting part, ensures that the corresponding area of the pixel unit on the display panel can be coated with the corresponding film layer structure by evaporation, and improves the display effect of the display panel.

Description

Mask plate

Technical Field

The embodiment of the invention relates to a mask technology, in particular to a mask.

Background

With the progress of display technology, the application field of display panels is becoming wider and wider, and the demand for the variety of display panels is also becoming more and more.

Display panel display area has different display effect, if dig hole screen, has become a new development trend, however, the current hole screen of digging makes the degree of difficulty great, and the display effect is not good.

Disclosure of Invention

The mask provided by the invention has the advantages that the stable support of the shielding part designed offshore is effectively realized by utilizing the supporting part, the corresponding film layer structure can be ensured to be evaporated in the area corresponding to the pixel unit on the display panel, and the display effect of the display panel is improved.

The embodiment of the invention provides a mask plate, which comprises a frame and an opening surrounded by the frame; the supporting part is in a grid shape and corresponds to an area between adjacent pixel units on the substrate to be evaporated. The area corresponding to the pixel unit on the display panel can be ensured to be coated with a film layer structure (such as a cathode layer) by evaporation, so that the normal display of the display panel is ensured.

Optionally, the support occupies part of the opening arrangement. Different regions on the display panel may need to be evaporated with different materials, for example, when the cathode layer is evaporated in the region corresponding to the grid-shaped support portion, a material with better conductivity is evaporated.

Optionally, the latticed supporting portion forms a plurality of hollow areas, and the hollow areas are arranged corresponding to at least one pixel unit. The area occupied by the supporting part can be reduced, and the upper film layer structure is evaporated in the area as much as possible on the display panel.

Alternatively, the support portion is integrally formed with the shielding portion, or the support portion is welded to the shielding portion.

Optionally, in a direction perpendicular to the mask, the support portion includes a first portion close to the substrate to be evaporated and a second portion far away from the substrate to be evaporated, a vertical projection of the second portion covers a vertical projection of the first portion, and the first portion is parallel to the cross-sectional area of the mask and gradually decreases in the direction close to the substrate to be evaporated. The display panel can be coated with the upper film layer structure in the area corresponding to the supporting part, and the area corresponding to the shielding part on the display panel can not be coated with the upper film layer structure in the evaporation way, so that the display panel with different display effects can be manufactured simply and efficiently.

Optionally, in a direction perpendicular to the mask, the cross-sectional area of the second portion parallel to the mask gradually decreases in a direction away from the substrate to be evaporated. The structure of more films on the display panel close to the area corresponding to the supporting part area can be ensured, the uneven thickness of the films of each part of the display panel is avoided, and the display effect is further improved.

Optionally, the surface of the shielding portion close to the substrate to be vapor-deposited is provided with at least one first groove, and/or the surface of the shielding portion far away from the substrate to be vapor-deposited is provided with at least one first groove. The weight of the shielding part can be reduced, the phenomenon that the shielding part is too heavy to cause too large sagging amount of the shielding part is avoided, and the fact that the area corresponding to the shielding part on the display panel cannot be subjected to evaporation coating to form the upper film layer structure is guaranteed.

Optionally, the shielding portion includes a middle region and an edge region surrounding the middle region, and the first groove is located in the middle region. The edge of the shielding part can be ensured to be thicker, so that a part of evaporation materials are prevented from being evaporated to the area, corresponding to the shielding part, on the display panel from the oblique direction during evaporation, and the yield of the display panel is improved.

Optionally, at least one second groove is formed in the surface, close to the substrate to be vapor-deposited, of the support portion, and/or at least one second groove is formed in the surface, far away from the substrate to be vapor-deposited, of the support portion. The weight of the supporting part can be reduced, the phenomenon that the supporting part is too large in weight and droops and the shielding part is too much drooped is avoided, and the fact that the area corresponding to the shielding part on the display panel cannot be coated with the upper film layer structure by evaporation is further guaranteed.

Optionally, at least one second groove is formed in the surface, close to the substrate to be evaporated, of the support portion, and a plurality of protruding structures are arranged in the second groove; preferably, the heights of the convex structures are the same along the direction vertical to the mask plate; preferably, the plurality of raised structures are evenly distributed. During evaporation, the raised structures can prevent the mask plate from being completely attached to the substrate to be evaporated, and evaporation materials can be evaporated in gaps among the raised structures, so that the region, corresponding to the support part, on the display panel can be ensured to be evaporated with an upper film layer structure; and can make supporting part weight distribution more even, guarantee that the extending direction of supporting part is on a parallel with treats the coating by vaporization base plate, and then guarantee that shielding part can not take place the slope, further guarantee on the display panel corresponding to the region of shielding part can not the coating by vaporization upper film layer structure.

The mask plate adopted by the embodiment comprises a frame and an opening surrounded by the frame; the shielding part is positioned in the opening, the supporting part is in a grid shape and is arranged corresponding to an area between adjacent pixel units on the substrate to be evaporated. Utilize the supporting part to effectively realize the firm support to the shielding part of offshore design, and the membranous layer structure on evaporation coating display panel, if during the cathode layer, can guarantee that the region that pixel unit on the display panel corresponds is not sheltered from by the supporting part, corresponding membranous layer structure can be evaporated in the region that also pixel unit corresponds, guarantee that pixel unit can normal luminous display, the membranous layer structure can't be evaporated and coated in the position department that avoids corresponding with pixel unit on the display panel, and lead to the relatively poor problem of display panel display quality.

Drawings

Fig. 1 is a schematic structural diagram of a mask according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a display panel manufactured by using a mask according to an embodiment of the present invention;

FIG. 3 is a cross-sectional view taken along line A1A2 in FIG. 1;

FIG. 4 is a schematic diagram of an evaporation process according to an embodiment of the present invention;

FIG. 5 is a further cross-sectional view taken along line A1A2 in FIG. 1;

FIG. 6 is a schematic diagram of another evaporation process according to an embodiment of the present invention;

FIG. 7 is a further cross-sectional view taken along line A1A2 in FIG. 1;

FIG. 8 is a cross-sectional view taken along line A3A4 in FIG. 1;

FIG. 9 is a further cross-sectional view taken along line A1A2 in FIG. 1;

FIG. 10 is a further cross-sectional view taken along line A1A2 in FIG. 1;

fig. 11 is a view of the supporting portion provided in the embodiment of the present invention, along a direction perpendicular to the extending direction of the supporting portion.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

Just as there is the big preparation degree of difficulty and the not good problem of display effect in the current screen of digging a hole that mentions in the background art, inventor's careful study finds that the reason that produces this technical problem lies in: the existing production process of the hole digging screen is to firstly evaporate a whole layer of film layer structure and then carry out laser drilling on the area needing hole digging to prepare the hole digging screen. However, the difficulty of laser drilling is high, and the entire film structure of the display panel is easily damaged, resulting in poor display quality of the display panel.

Based on the technical problem, the invention provides the following solution:

fig. 1 is a schematic structural diagram of a mask according to an embodiment of the present invention, and referring to fig. 1, the mask includes a frame 101 and an opening 102 surrounded by the frame 101; the shielding portion 103 and the supporting portion 104 for fixedly supporting the shielding portion 103, the shielding portion 103 is located in the opening, the supporting portion 104 is in a grid shape, and the supporting portion 104 is disposed corresponding to an area between adjacent pixel units on the substrate to be evaporated.

Specifically, a mask may be used to fabricate a display panel, one mask may include a plurality of openings 102, only one opening 102 is exemplarily shown in fig. 1, each opening 102 may correspond to one display panel, and the shielding portion 103 disposed in the opening 102 is used to prevent an evaporation material from being evaporated to an area of the display panel where a corresponding film layer of the evaporation material is not required to be formed, for example, a specific area (e.g., a hole digging area) different from other display areas, when the film layer of the display panel is evaporated, so as to avoid a problem that a whole complete film layer is fabricated first and then the film layer is damaged due to laser drilling, thereby affecting the display quality of the display panel. As shown in fig. 2, fig. 2 is a schematic view of a display panel structure manufactured by using a mask provided by an embodiment of the present invention, a display panel 201 includes a plurality of pixel units 202, a spacing region 203 is formed between the plurality of pixel units 202, and a supporting portion 104 is disposed corresponding to the spacing region 203, that is, each portion of the supporting portion 104 corresponds to a partial region of the spacing region 203, so that when a film structure on the display panel is evaporated, it is ensured that the region corresponding to the pixel unit 202 on the display panel is not blocked by the supporting portion 104, that is, a corresponding film structure (such as a cathode layer) can be evaporated, thereby ensuring that the pixel unit 202 can normally emit light for display, and avoiding a problem that the display quality of the display panel 201 is poor due to the fact that the film structure cannot be evaporated at a position corresponding to the pixel unit 202 on the display panel 201.

According to the technical scheme of the embodiment, the adopted mask comprises a frame and an opening surrounded by the frame; the shielding part is positioned in the opening, the supporting part is in a grid shape and is arranged corresponding to an area between adjacent pixel units on the substrate to be evaporated. Film layer structure on the evaporation coating display panel, like during the cathode layer, can guarantee that the region that pixel element on the display panel corresponds is not sheltered from by the supporting part, also the region that pixel element corresponds can the evaporation coating go up film layer structure, guarantees that pixel element can normally give out light and show, avoids the unable evaporation coating of position department that corresponds with pixel element on the display panel to go up film layer structure, and leads to the relatively poor problem of display panel display quality.

Alternatively, as shown in fig. 1, a lattice-shaped support 104 is provided occupying part of the opening 102.

Specifically, the regions in the openings 201 except for the regions occupied by the grid-shaped supporting portions 104 may be completely blocked as needed, and the regions occupied by the grid-shaped supporting portions 104 on the display panel may need to be deposited with different materials from other regions, for example, when a cathode layer is manufactured, the regions corresponding to the regions occupied by the supporting portions 104 may need to be deposited with materials having better conductivity, and at this time, other regions where the openings 102 may be disposed are completely blocked, and during the deposition, the cathode layer is deposited only in the regions corresponding to the supporting portions 104. The latticed supporting parts 104 can be arranged to occupy all the openings 102, and the supporting force provided by the supporting parts 104 is large at this time, so that the shielding part 103 can be supported, and the problem that the sagging amount of the shielding part 103 is too large, and further the area on the display panel corresponding to the shielding part 103 is coated with the upper film layer structure by evaporation, and the yield of the display panel is reduced is solved.

Optionally, with continued reference to fig. 1, the grid-shaped supporting portion 104 forms a plurality of hollow areas 105, and the hollow areas 105 are disposed corresponding to at least one pixel unit.

Set up like this, can guarantee that supporting part 104 is corresponding to the regional setting between the adjacent pixel cell on treating the evaporation plating base plate, in addition, can set up hollow area 105 and correspond a plurality of pixel cell settings, the shared proportion of hollow area 105 is great this moment, the shared proportion of crisscross stripe structure of the level and the length that also forms supporting part 104 is less, can reduce the use amount of the material that forms supporting part 104 on the one hand, on the other hand reduces the region that the stripe structure sheltered from, can evaporate plating material as much as possible on the display panel except that corresponding to shelter from portion 103 on making the evaporation plating time (like when evaporation plating the cathode layer), make display panel's demonstration more even.

Specifically, the supporting portion and the shielding portion are integrally formed, for example, the supporting portion and the shielding portion can be manufactured through an etching FMM manufacturing process or a laser Mask process, so that a manufacturing process can be saved, and the process cost can be reduced. The supporting part is welded on the shielding part, the supporting part can be manufactured firstly, then the shielding part which is manufactured separately is welded with the supporting part, and the relative position of the shielding part and the supporting part can be selected as required, so that the flexibility of the design of the mask is improved.

Alternatively, fig. 3 is a cross-sectional view taken along a direction A1a2 in fig. 1, and referring to fig. 1 and fig. 3, the supporting portion 104 includes a first portion 1041 close to the substrate to be evaporated and a second portion 1042 far from the substrate to be evaporated, a vertical projection of the second portion 1042 covers a vertical projection of the first portion 1041, and a cross-sectional area of the first portion 1041 parallel to the mask plate is gradually reduced along a direction close to the substrate to be evaporated.

Specifically, the gradual reduction of the cross-sectional area of the first portion 1041 parallel to the mask plate along the direction close to the substrate to be evaporated may be understood as the gradual reduction of the width of the cross-section of the first portion 1041, and fig. 3 exemplarily shows that the left and right sides of the supporting portion 104 are symmetrical, and in other embodiments, only the supporting portion 104 may be provided as an asymmetrical structure. Fig. 4 is a schematic diagram of an evaporation process provided by an embodiment of the present invention, and referring to fig. 3 and fig. 4, when a mask is used to evaporate a film layer of a display panel, a substrate 301 to be evaporated is disposed above the mask, the substrate 301 to be evaporated includes a shielding region 3011 and a non-shielding region 3012 that are shielded by a support portion 104, for example, when the mask provided by the embodiment of the present invention is used to evaporate a cathode layer in the display panel, only a hole-digging region, i.e., a region corresponding to the shielding portion 103 on the substrate to be evaporated needs to use the shielding portion 103 to avoid forming a cathode material in the region, and the remaining regions need to form a cathode material, i.e., the shielding region 3011 and the non-shielding region 3012 need to evaporate corresponding film layer structures, when evaporation is performed, the evaporation material is applied to the substrate 301 to be evaporated from bottom to top, because the first portion 1041 is parallel to the cross-sectional area of the mask and gradually decreases along the direction close to the substrate to be evaporated, except that the non, the shielding region 3011 can be formed by obliquely evaporating an upper film layer structure, so that the problem that the display effect of the display panel is affected due to the fact that materials are not evaporated at the position, corresponding to the supporting portion 104, on the display panel is solved.

It should be noted that, a boundary between the first portion 1041 and the second portion 1042 of the connection portion 104 along a direction perpendicular to the mask is not specifically limited in the embodiment of the present invention, and it is sufficient to ensure that the cross-sectional area of the first portion 1041 parallel to the mask gradually decreases along a direction close to the substrate to be evaporated.

Alternatively, fig. 5 is a cross-sectional view taken along a direction A1a2 in fig. 1, and referring to fig. 5, the cross-sectional area of the second portion 1042 is gradually reduced parallel to the mask along a direction perpendicular to the mask along a direction away from the substrate to be evaporated.

Specifically, fig. 6 is a schematic diagram of another evaporation process provided in an embodiment of the present invention, and with reference to fig. 5 and fig. 6, an upper film structure needs to be evaporated on both the blocking area 3011 and the non-blocking area 3012, when evaporation is performed, a material is evaporated onto the substrate 301 to be evaporated from bottom to top, an area on the non-blocking area 3012 far from the blocking area 3011 can be evaporated with the upper film structure in the vertical direction, and can also be evaporated with a part of the film structure in an oblique direction, while an area close to the blocking area 3011 is blocked by the support portion 104, and can only be evaporated with the upper film structure in the vertical direction, that is, relatively speaking, the thickness of the film layer of the non-blocking area 3012 close to the blocking area 3011 may be smaller than that of the area far from the blocking area 3011, so that the thickness of the film of the. Through setting up the direction along perpendicular to mask version, second portion 1042 is on a parallel with the cross-sectional area of mask version and reduces along the direction of keeping away from treating the coating by vaporization base plate gradually, it is less that second portion 1042 is to coating by vaporization material from the regional slant coating by vaporization that connecting portion 104 corresponds to not sheltering from the region that district 2012 is close to sheltering from the district 2011 sheltering from, can make not sheltering from the district 3012 and be close to certain membranous layer structure of the regional coating structure of sheltering from district 3011 of evaporating through the slant mode, reduce and keep away from the difference of the regional membranous layer structure thickness of sheltering from district 3011, thereby improve the homogeneity of membranous layer thickness on the display panel, and then improve the homogeneity of demonstration, further improve display effect.

It should be noted that the cross-sectional views shown in fig. 3 and fig. 5 are only an example, and in other embodiments, the cross-sectional area of the first portion parallel to the mask plate may decrease non-linearly in a direction close to the substrate to be evaporated, and the cross-sectional area of the second portion parallel to the mask plate may decrease non-linearly in a direction away from the substrate to be evaporated, for example, fig. 7 is another cross-sectional view of fig. 1 in a direction A1a2, as shown in fig. 7, the side edges of the first portion 1041 and the second portion 1042 may have an arc-shaped structure, so as to reduce the manufacturing difficulty of the supporting portion and save the manufacturing cost.

Optionally, fig. 8 is a cross-sectional view taken along a direction A3a4 in fig. 1, and with reference to fig. 1 and 8, at least one first groove is provided on a surface of the shielding portion 103 close to the substrate to be evaporated, and/or at least one first groove is provided on a surface of the shielding portion 103 away from the substrate to be evaporated, fig. 7 exemplarily provides that only a surface of the shielding portion 103 close to the substrate to be evaporated is provided with one first groove 1031, that is, an upper surface of the shielding portion 103 is provided with one first groove 1031, and embodiments of the present invention do not specifically limit the number of the first grooves 1031 provided on a certain surface of the shielding portion 103 and the number of the surfaces of the shielding portion 103 provided with the first grooves 1031.

Specifically, the shielding portion 103 corresponds to an area of the display panel where holes need to be dug, and the partial area does not need to be evaporated to form a corresponding film structure (such as a cathode layer or a thin film encapsulation layer), and if the shielding portion 103 is too heavy, the shielding portion 103 is easily deformed due to gravity, so that the partial area of the display panel corresponding to the shielding portion 103 may be evaporated to form the film structure, which affects the film structure of the area of the display panel corresponding to the shielding portion 103 and reduces the yield of the display panel. In addition, the connection portion 104 supporting the shielding portion 103 is easily deformed due to the excessive weight of the shielding portion 103, and the evaporation effect of the display panel corresponding to the area of the connection portion 104 is affected. According to the embodiment of the invention, the surface of the shielding part 103 close to the substrate to be vapor-deposited is provided with at least one first groove, and/or the surface of the shielding part 103 far away from the substrate to be vapor-deposited is provided with at least one first groove, so that the weight of the shielding part 103 is reduced, the probability of deformation of the shielding part 103 and the connecting part 104 is reduced, the vapor deposition effect of the display panel corresponding to the areas of the shielding part 103 and the connecting part 104 is optimized, and the display effect of the display panel is further optimized.

Optionally, with continued reference to fig. 8, the curtain 103 includes a middle region 1032 and an edge region 1033 surrounding the middle region 1032, the first recess 1031 being located in the middle region 1032.

Specifically, the shielding portion 103 may be circular, the edge region 1033 may be circular, and if the thickness of the edge region 1033 is too thin, too much evaporation material may reach the position corresponding to the shielding portion on the display panel in an oblique manner during evaporation, so that the region corresponding to the shielding portion on the display panel without forming the corresponding film layer forms the corresponding film layer material, thereby reducing the yield of the display panel. In the embodiment of the invention, the first recess 1031 is arranged in the middle region 1032, so that the thickness of the edge region 1033 is higher than that of the middle region 1032, the thickness of the edge region 1033 is not too thin, the probability that the evaporation material is evaporated onto the region, corresponding to the shielding part, of the display panel in an oblique manner during evaporation is reduced, and the yield of the display panel is further improved.

Alternatively, fig. 9 is a further cross-sectional view along a direction A1a2 in fig. 1, and referring to fig. 9, the surface of the support portion 104 close to the substrate to be evaporated is provided with at least one second groove, and/or the surface of the support portion 104 far from the substrate to be evaporated is provided with at least one second groove. Fig. 8 exemplarily shows that only the surface of the connecting portion 104 close to the substrate to be evaporated is provided with one second groove 1043, that is, the upper surface of the connecting portion 104 is provided with one second groove 1043, and the number of the second grooves 1043 on one surface of the connecting portion 104 and the number of the surfaces of the connecting portion 104 provided with the second grooves 1043 are not particularly limited in the embodiment of the present invention.

Specifically, if the weight of the connecting portion 104 is too heavy, the connecting portion 104 is easily deformed due to its own weight, which affects the film structure of the display panel corresponding to the connecting portion 104, and reduces the yield of the display panel. In addition, the connecting portion 104 plays a role of fixing and supporting the shielding portion 103, the deformation of the connecting portion 104 reduces the supporting capability of the connecting portion 104 on the shielding portion 103, and the deformation of the connecting portion 104 may cause the change of the position of the shielding portion 103, which affects the evaporation effect of the display panel corresponding to the region of the shielding portion 103. According to the embodiment of the invention, the surface of the connecting part 104 close to the substrate to be evaporated is provided with the at least one second groove, and/or the surface of the connecting part 104 far away from the substrate to be evaporated is provided with the at least one second groove, so that the weight of the connecting part 104 is reduced, the probability of deformation of the connecting part 104 is reduced, the evaporation effect of the area corresponding to the shielding part 103 and the connecting part 104 on the display panel is optimized, and the display effect of the display panel is further optimized.

Optionally, fig. 10 is a further cross-sectional view taken along a direction A1a2 in fig. 1, referring to fig. 10, at least one second groove 1043 is disposed on a surface of the support portion 104 close to the substrate to be evaporated, and a plurality of protrusion structures 1044 are disposed in the second groove 1043.

Specifically, when coating by vaporization display panel, need set up magnetic material in the one side of treating that the coating by vaporization base plate keeps away from the mask version to adsorb the mask version and avoid the mask version flagging, however, magnetic material may adsorb the mask version to treat on the coating by vaporization base plate, thereby make supporting part 104 and treat to have no clearance between the coating by vaporization base plate, can't be with the coating by vaporization material coating by vaporization display panel on the position that corresponds to supporting part 104 when the coating by vaporization, thereby cause the rete thickness inhomogeneous, influence the display effect. Through setting up a plurality of protruding structures 1044, when supporting part 104 is because receiving to attract and attached on waiting to evaporate the surface of coating by vaporization base plate, protruding structure 1044 can support supporting part 104, avoids supporting part 104 to attach completely on waiting to evaporate the surface of coating by vaporization base plate, but the membranous layer structure in the display panel's that the gap of a plurality of protruding structures 1044 corresponds regional evaporation coating, avoid display panel to lead to showing uneven phenomenon corresponding to the membranous layer structure in the unable evaporation coating in the region of supporting part, promote display effect.

It should be noted that, as shown in fig. 10, the plurality of protrusion structures 1044 may be arranged along a direction perpendicular to the extending direction of the supporting portion, or as shown in fig. 11, fig. 11 is a view of the supporting portion provided in the embodiment of the present invention along a direction perpendicular to the extending direction of the supporting portion, the plurality of protrusion structures 1044 may be arranged along the extending direction of the supporting portion 103, or the plurality of protrusion structures 1044 may be arranged along both the direction perpendicular to the extending direction of the connecting portion and the extending direction of the connecting portion 103. Exemplarily, a plurality of protruding structures 1044 can be arranged in a dot matrix, that is, each protruding structure 1044 is an isolated island-shaped structure, for example, fig. 10 can be configured with a protruding structure 1044 as a trapezoidal platform-shaped structure, that is, the shapes of the upper surface and the lower surface of the protruding structure 1044 can be circular, one side of the protruding structure 1044 close to the substrate to be evaporated can be parallel to the substrate to be evaporated, when the supporting portion 104 is attached on the surface of the substrate to be evaporated, the protruding structure 1044 can support the supporting portion 104, and the supporting portion 104 is prevented from being completely attached on the surface of the substrate to be evaporated. In addition, in fig. 10, only the cross section of the protrusion structure 1044 is exemplarily set to be a regular trapezoid, or the cross section of the protrusion structure 1044 may be set to be a rectangle or an inverted trapezoid, the shape of the cross section of the protrusion structure 1044 is not specifically limited in the embodiment of the present invention, and it is sufficient to ensure that a support platform is provided on one side of the protrusion structure 1044 facing the substrate to be evaporated.

Preferably, with continued reference to fig. 10 and 11, the height of the raised structures 1044 in a direction perpendicular to the reticle may be set to be the same; preferably, the plurality of raised structures 1044 are evenly distributed.

Specifically, the height of the plurality of protruding structures 1044 is the same, so that when the mask is attached to the substrate to be evaporated, each protruding structure 1044 supports the mask, and the supporting height is the same, so as to ensure that the extending direction of the supporting portion 104 is parallel to the substrate to be evaporated, and further ensure that the shielding portion 103 is also parallel to the substrate to be evaporated, thereby preventing the shielding portion 103 from tilting and enabling the display panel to have the upper film layer structure corresponding to the shielding portion 103 in the area evaporation. Simultaneously, can set up a plurality of protruding structures 1044 evenly distributed, protruding structure 1044 evenly arranges in the second recess, can make supporting part 104 weight distribution more even, avoids a certain part of supporting part 104 weight too big and lead to this part sag too big, and then leads to the phenomenon of shielding part 103 slope, further avoids the regional coating by vaporization upper film layer structure corresponding to shielding part 103 on the display panel.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A reticle, comprising:

a bezel and an opening surrounded by the bezel;

the supporting part is in a grid shape and corresponds to an area between adjacent pixel units on the substrate to be evaporated.

2. The reticle of claim 1, wherein the support portion occupies a portion of the opening.

3. The mask according to claim 1, wherein the supporting portion forms a plurality of hollow areas, and each hollow area is disposed corresponding to at least one of the pixel units.

4. The reticle of claim 1, wherein the support portion is integrally formed with or welded to the blocking portion.

5. The mask according to claim 1, wherein the support portion comprises, in a direction perpendicular to the mask, a first portion close to a substrate to be evaporated and a second portion far from the substrate to be evaporated, a vertical projection of the second portion covers a vertical projection of the first portion, and the first portion gradually decreases in a direction close to the substrate to be evaporated in parallel with a cross-sectional area of the mask.

6. The mask according to claim 5, wherein the second portion has a cross-sectional area parallel to the mask that decreases in a direction away from the substrate to be evaporated in a direction perpendicular to the mask.

7. The mask according to claim 1, wherein the surface of the shielding portion close to the substrate to be evaporated is provided with at least one first groove, and/or the surface of the shielding portion away from the substrate to be evaporated is provided with at least one first groove.

8. The reticle of claim 7, wherein the blocking portion is divided into a middle region and an edge region surrounding the middle region, and the first groove is located in the middle region.

9. The mask according to claim 1, wherein the surface of the support portion close to the substrate to be evaporated is provided with at least one second groove, and/or the surface of the support portion away from the substrate to be evaporated is provided with at least one second groove.

10. The mask according to claim 9, wherein the surface of the support portion, which is close to the substrate to be evaporated, is provided with at least one second groove, and a plurality of protruding structures are arranged in the second groove;

preferably, the heights of the convex structures are the same along the direction vertical to the mask plate;

preferably, the plurality of raised structures are evenly distributed.