CN110627820A - Diborane synthesis system and method thereof - Google Patents
Diborane synthesis system and method thereof Download PDFInfo
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- CN110627820A CN110627820A CN201910910709.8A CN201910910709A CN110627820A CN 110627820 A CN110627820 A CN 110627820A CN 201910910709 A CN201910910709 A CN 201910910709A CN 110627820 A CN110627820 A CN 110627820A
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- 238000000034 method Methods 0.000 title claims abstract description 21
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 20
- 238000003786 synthesis reaction Methods 0.000 title claims abstract description 20
- 239000007789 gas Substances 0.000 claims abstract description 88
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims abstract description 85
- 239000007788 liquid Substances 0.000 claims abstract description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 238000001179 sorption measurement Methods 0.000 claims abstract description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 13
- 238000002156 mixing Methods 0.000 claims abstract description 12
- 238000011049 filling Methods 0.000 claims abstract description 10
- 239000002253 acid Substances 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 claims description 20
- 239000012279 sodium borohydride Substances 0.000 claims description 18
- 229910000033 sodium borohydride Inorganic materials 0.000 claims description 18
- 239000012495 reaction gas Substances 0.000 claims description 15
- 238000003756 stirring Methods 0.000 claims description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 13
- 239000002202 Polyethylene glycol Substances 0.000 claims description 10
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 10
- 229920001223 polyethylene glycol Polymers 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 9
- 239000010812 mixed waste Substances 0.000 claims description 8
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 5
- 238000002309 gasification Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 230000002194 synthesizing effect Effects 0.000 claims description 5
- 238000000746 purification Methods 0.000 abstract description 2
- 230000036632 reaction speed Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 239000013067 intermediate product Substances 0.000 description 3
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- -1 and diborane Chemical compound 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910000085 borane Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006477 desulfuration reaction Methods 0.000 description 1
- 230000023556 desulfurization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/02—Boron compounds
- C07F5/027—Organoboranes and organoborohydrides
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
Abstract
The invention provides a diborane synthesis system and a method thereof, which comprises a reaction kettle, wherein the reaction kettle is provided with an air inlet, a first air outlet and a first charging opening, second charge door and discharge gate, air inlet pipe connection has nitrogen cylinder and gas mixing device, discharge gate pipe connection has the feed inlet of reactor, the reactor is equipped with the discharge gate, dropwise add device and second gas outlet, discharge gate pipe connection has the processing pond, dropwise add device pipe connection has the acid chest, second gas outlet pipe connection has the adsorption tower, adsorption tower top pipe connection has first cold hydrazine, first cold hydrazine pipe connection has first gas collecting tank and liquid collecting tank, be equipped with heating device in the liquid collecting tank, gas outlet pipe connection has the cold hydrazine of second, the cold hydrazine pipe connection of second has the gaseous collecting tank of second, the cold hydrazine of second and liquid collecting tank pipe connection, liquid collecting tank pipe connection has the filling device. The invention has the advantages of high reaction speed, high purification efficiency and the like.
Description
Technical Field
The invention relates to the field of industrial gas production, in particular to a diborane synthesis system and a method thereof.
Background
Diborane is a gas with a boiling point of-92.5 ℃, has the characteristic of strong ignitability, can be used as a propellant of fuel and rocket, is mainly used as a dopant for diffusion and oxidation in semiconductor manufacture in the electronic industry, is widely applied to industries such as semiconductor Integrated Circuits (IC), Liquid Crystal Displays (LCD), semiconductor light-emitting devices (LED) and solar cells (PV), can be used as a mixed gas when a boron-phosphorus-silicon glass insulating film is formed, and can be diluted by using gases such as nitrogen, helium, hydrogen and the like when used as the mixed gas, and can be used after being converted into a stable processed form by using high-grade borane, amine accessories and the like.
In recent years, with the gradual reduction of energy resources such as global petroleum and the like, environmental pollution, the influence of greenhouse effect on climate, the development of clean energy and energy-saving technology in various countries in the world is vigorous, low-carbon economy is focused, under the background, solar cells, semiconductor light-emitting devices and energy-saving technology in China are focused, and under the background, the solar cells, the semiconductor light-emitting devices and related industries in China are rapidly developed, the diborane market for the electronic industry is very wide, the existing diborane preparation device is unreasonable in design, difficult to use, low in extraction purity and high in purification difficulty.
Disclosure of Invention
The invention aims to provide a diborane synthesis system and a method thereof, which have the advantages of high reaction speed, high extraction purity and more adaptability to users.
In order to solve the technical problems, the invention adopts the technical scheme that: the utility model provides a diborane synthesis system, includes reation kettle, reation kettle is equipped with air inlet, first gas outlet, first charge door, second charge door and discharge gate, air inlet pipe connection has nitrogen cylinder and gas mixing arrangement, discharge gate pipe connection has the feed inlet of reactor, the reactor is equipped with discharge gate, dropwise add device and second gas outlet, dropwise add device pipe connection has the acid chest, second gas outlet pipe connection has the adsorption tower, adsorption tower top end pipe connection has first cold hydrazine, first cold hydrazine pipe connection has first gas collecting tank and liquid collecting tank, be equipped with heating device in the liquid collecting tank, gas outlet pipe connection has the cold hydrazine of second, the cold hydrazine of second with liquid collecting tank pipe connection, liquid collecting tank pipe connection has the filling device.
Furthermore, the discharge hole is connected with a treatment pool through a pipeline.
Further, the second cold hydrazine pipeline is connected with a second gas collecting tank.
Further, the liquid collecting tank and the second gas collecting tank are connected with the gas mixing device through pipelines.
A method for synthesizing diborane comprising the steps of:
the method comprises the following steps: introducing inert gas into the reaction kettle for internal environment replacement, ventilating for 10-15min, adding dimethyl ether polyethylene glycol, stirring, adding solid sodium borohydride into the reaction kettle, and continuing stirring to uniformly mix the sodium borohydride and the dimethyl ether polyethylene glycol;
step two: introducing mixed gas of diborane and nitrogen into the reaction kettle in the first step according to the mass ratio of 2:3, wherein the introducing speed of diborane gas is 50g/min, and generating an intermediate;
step three: introducing the intermediate in the second step into a reactor, slowly dropwise adding sulfuric acid into the reactor under the condition of stirring, and collecting reaction gas to obtain diborane crude gas A;
step four: introducing the reaction gas into an adsorption tower, and absorbing sulfide impurities in the reaction gas to obtain diborane crude gas B;
step five: introducing diborane crude gas B in the fourth step into a first cold hydrazine for precooling, and removing small molecular gas in the first cold hydrazine by using a vacuum pump, wherein the small molecular gas is hydrogen in the second step to obtain liquid diborane;
step six: and (4) carrying out endothermic gasification on the liquid diborane in the step five at the temperature of 25-40 ℃ to obtain diborane gas.
Further, the mass ratio of the sodium borohydride to the diborane is 2: 1.
Further, the precooling temperature of the first cold hydrazine in the fifth step is-100 ℃.
And further, introducing the mixed waste gas in the second step into a second cold hydrazine for separation.
Further, the temperature of the reaction kettle is set to be 0-40 ℃.
Further, in the sixth step, the product is mixed with hydrogen in different proportions to prepare diborane mixed gas with a molar concentration of 5-40, and then filling is carried out.
Compared with the prior art, the invention has the advantages and positive effects that:
1. according to the method, the intermediate product is generated by sodium borohydride and diborane, and the intermediate product reacts with the acid to generate diborane, so that the generation of impurities in the production process can be effectively reduced, the overall performance of the whole device is greatly improved, and the requirements of users can be met.
2. According to the invention, impurities in the production process can be effectively removed through the first cold hydrazine, the second cold hydrazine and the adsorption tower, so that 5N-grade diborane can be produced, the overall performance of the whole device is greatly improved, and the requirements of users can be met.
3. The invention can store hydrogen and nitrogen separately, can effectively reduce the input of raw materials, can realize continuous large-scale production, greatly improves the overall performance of the whole device, and can better meet the requirements of users.
Drawings
FIG. 1 is a schematic diagram of the flue gas desulfurization system of the present invention.
In the figure: the device comprises a reaction kettle-1, a nitrogen gas bottle-2, a gas mixing device-3, a reactor-4, a dripping device-5, an acid pool-6, an adsorption tower-7, a first cold hydrazine-8, a first gas collecting tank-9, a liquid collecting tank-10, a heating device-11, a second cold hydrazine-12, a filling device-13, a treatment pool-14 and a second gas collecting tank-15.
Detailed Description
For a better understanding of the present invention, reference is made to the following detailed description and accompanying drawings that illustrate the invention.
Example 1:
as shown in figure 1, a diborane synthesis system comprises a reaction kettle 1, wherein the reaction kettle 1 is provided with an air inlet, a first air outlet, a first feed inlet, a second feed inlet and a discharge outlet, the air inlet is connected with a nitrogen cylinder 2 and a gas mixing device 3 through pipelines, the discharge outlet is connected with a feed inlet of a reactor 4 through a pipeline, the reactor 4 is provided with a discharge outlet, a dripping device 5 and a second air outlet, the discharge outlet is connected with a treatment pool 14 through a pipeline, the dripping device 5 is connected with an acid pool 6 through a pipeline, the second air outlet is connected with an adsorption tower 7 through a pipeline, the top end of the adsorption tower 7 is connected with a first cold hydrazine 8 through a pipeline, the first cold hydrazine 8 is connected with a first gas collection tank 9 and a liquid collection tank 10 through a pipeline, a heating device 11 is arranged in the liquid collection tank 10, the air outlet is connected with a second cold hydrazine 12 through a pipeline, the second cold hydrazine 12 is connected, the liquid collecting tank 10 is connected with a filling device 13 through a pipeline, and the liquid collecting tank 10 and the second gas collecting tank 15 are both connected with the gas mixing device 3 through a pipeline.
A method for synthesizing diborane comprising the steps of:
the method comprises the following steps: introducing inert gas into the reaction kettle 1 for internal environment replacement, setting the temperature of the reaction kettle 1 to be 0 ℃, ventilating for 10min, adding dimethyl ether polyethylene glycol, stirring, adding solid sodium borohydride into the reaction kettle 1, and continuously stirring to uniformly mix the sodium borohydride and the dimethyl ether polyethylene glycol;
step two: introducing mixed gas of diborane and nitrogen according to the mass ratio of 2:3 into the reaction kettle 1 in the first step, wherein the introduction speed of the diborane gas is 50g/min, the mass ratio of sodium borohydride to diborane is 2:1, generating an intermediate and mixed waste gas, and introducing the mixed waste gas into a second cold hydrazine 12 for separation;
step three: introducing the intermediate in the step two into a reactor 4, slowly dropwise adding sulfuric acid into the reactor 4 under the condition of stirring, and collecting reaction gas to obtain diborane crude gas A;
step four: introducing the reaction gas into an adsorption tower 7, and absorbing sulfide impurities in the reaction gas to obtain diborane crude gas B;
step five: introducing diborane crude gas B in the fourth step into a first cold hydrazine 8 pre-cooled to-100 ℃, and removing small molecular gas in the first cold hydrazine 8 by using a vacuum pump, wherein the small molecular gas is hydrogen in the second step to obtain liquid diborane;
step six: and (5) performing endothermic gasification on the liquid diborane in the step five at 25 ℃ to obtain diborane gas, mixing the diborane gas with hydrogen in different proportions to prepare diborane mixed gas with the molar concentration of 5, and filling.
In the embodiment of the invention, the production method of firstly mixing diborane and sodium borohydride in a certain proportion to generate an intermediate, and then reacting the intermediate with acid to generate diborane again is utilized, so that the generation of other byproducts can be effectively reduced. The improvement according to the production mode can have the characteristic of less byproducts, and the product is collected by adding cold hydrazine, and diborane, nitrogen and the like are recycled to improve the synthesis efficiency of diborane gas. Specifically, the method for producing the diborane by the sodium borohydride and the diborane and reacting the intermediate product with the acid can effectively reduce the generation of impurities in the production process, greatly improve the overall performance of the whole device and meet the requirements of users; in addition, the impurities in the production process can be effectively removed through the first cold hydrazine, the second cold hydrazine and the adsorption tower, so that 5N-grade diborane can be produced, the overall performance of the whole device is greatly improved, and the requirements of users can be met; the invention can store hydrogen and nitrogen separately, can effectively reduce the input of raw materials, can realize continuous large-scale production, greatly improves the overall performance of the whole device, and can better meet the requirements of users.
Example 2:
diborane synthesis system, as in example 1.
A method for synthesizing diborane comprising the steps of:
the method comprises the following steps: introducing inert gas into the reaction kettle 1 for internal environment replacement, setting the temperature of the reaction kettle 1 to be 20 ℃, ventilating for 12min, adding dimethyl ether polyethylene glycol, stirring, adding solid sodium borohydride into the reaction kettle 1, and continuously stirring to uniformly mix the sodium borohydride and the dimethyl ether polyethylene glycol;
step two: introducing mixed gas of diborane and nitrogen according to the mass ratio of 2:3 into the reaction kettle 1 in the first step, wherein the introduction speed of the diborane gas is 50g/min, the mass ratio of sodium borohydride to diborane is 2:1, generating an intermediate and mixed waste gas, and introducing the mixed waste gas into a second cold hydrazine 12 for separation;
step three: introducing the intermediate in the step two into a reactor 4, slowly dropwise adding sulfuric acid into the reactor 4 under the condition of stirring, and collecting reaction gas to obtain diborane crude gas A;
step four: introducing the reaction gas into an adsorption tower 7, and absorbing sulfide impurities in the reaction gas to obtain diborane crude gas B;
step five: introducing diborane crude gas B in the fourth step into a first cold hydrazine 8 pre-cooled to-100 ℃, and removing small molecular gas in the first cold hydrazine 8 by using a vacuum pump, wherein the small molecular gas is hydrogen in the second step to obtain liquid diborane;
step six: and (5) performing endothermic gasification on the liquid diborane in the step five at 32 ℃ to obtain diborane gas, mixing the diborane gas with hydrogen in different proportions to prepare diborane mixed gas with the molar concentration of 27, and filling.
Example 3:
diborane synthesis system, as in example 1.
A method for synthesizing diborane comprising the steps of:
the method comprises the following steps: introducing inert gas into the reaction kettle 1 for internal environment replacement, setting the temperature of the reaction kettle 1 to be 40 ℃, ventilating for 15min, adding dimethyl ether polyethylene glycol, stirring, adding solid sodium borohydride into the reaction kettle 1, and continuously stirring to uniformly mix the sodium borohydride and the dimethyl ether polyethylene glycol;
step two: introducing mixed gas of diborane and nitrogen according to the mass ratio of 2:3 into the reaction kettle 1 in the first step, wherein the introduction speed of the diborane gas is 50g/min, the mass ratio of sodium borohydride to diborane is 2:1, generating an intermediate and mixed waste gas, and introducing the mixed waste gas into a second cold hydrazine 12 for separation;
step three: introducing the intermediate in the step two into a reactor 4, slowly dropwise adding sulfuric acid into the reactor 4 under the condition of stirring, and collecting reaction gas to obtain diborane crude gas A;
step four: introducing the reaction gas into an adsorption tower 7, and absorbing sulfide impurities in the reaction gas to obtain diborane crude gas B;
step five: introducing diborane crude gas B in the fourth step into a first cold hydrazine 8 pre-cooled to-100 ℃, and removing small molecular gas in the first cold hydrazine 8 by using a vacuum pump, wherein the small molecular gas is hydrogen in the second step to obtain liquid diborane;
step six: and D, performing endothermic gasification on the liquid diborane in the step V at 40 ℃ to obtain diborane gas, mixing the diborane gas with hydrogen in different proportions to prepare diborane mixed gas with the molar concentration of 40, and filling.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made within the scope of the present invention should be covered by the present patent.
Claims (10)
1. A diborane synthesis system, comprising: comprises a reaction kettle (1), wherein the reaction kettle (1) is provided with an air inlet, a first air outlet, a first feed inlet, a second feed inlet and a discharge outlet, the air inlet is connected with a nitrogen cylinder (2) and a gas mixing device (3) through a pipeline, the discharge outlet is connected with a feed inlet of a reactor (4) through a pipeline, the reactor (4) is provided with a discharge outlet, a dripping device (5) and a second air outlet, the dripping device (5) is connected with an acid pool (6) through a pipeline, the second air outlet is connected with an adsorption tower (7) through a pipeline, the top end of the adsorption tower (7) is connected with a first cold hydrazine (8), the first cold hydrazine (8) is connected with a first gas collecting tank (9) and a liquid collecting tank (10) through a pipeline, a heating device (11) is arranged in the liquid collecting tank (10), the air outlet is connected with a second cold hydrazine (12), and the second cold hydrazine (12) is connected with the liquid collecting tank (, the liquid collecting tank (10) is connected with a filling device (13) through a pipeline.
2. A diborane synthesis system according to claim 1, wherein: the discharge hole pipeline is connected with a treatment pool (14).
3. A diborane synthesis system according to claim 1, wherein: and the second cold trap (12) is connected with a second gas collecting tank (15) through a pipeline.
4. A diborane synthesis system according to claim 3, wherein: the liquid collecting tank (10) and the second gas collecting tank (15) are connected with the gas mixing device (3) through pipelines.
5. A method for synthesizing diborane is characterized by comprising the following steps: use of a diborane synthesis system according to any one of claims 1 to 4, comprising the steps of:
the method comprises the following steps: introducing inert gas into the reaction kettle (1) to perform internal environment replacement, ventilating for 10-15min, adding dimethyl ether polyethylene glycol, stirring, adding solid sodium borohydride into the reaction kettle (1), and continuously stirring to uniformly mix the sodium borohydride and the dimethyl ether polyethylene glycol;
step two: introducing mixed gas of diborane and nitrogen according to the mass ratio of 2:3 into the reaction kettle (1) in the step I, wherein the introducing speed of diborane gas is 50g/min, and generating an intermediate;
step three: introducing the intermediate in the second step into a reactor (4), slowly dropwise adding sulfuric acid into the reactor (4) under the condition of stirring, and collecting reaction gas to obtain diborane crude gas A;
step four: introducing the reaction gas into an adsorption tower (7), and absorbing sulfide impurities in the reaction gas to obtain diborane crude gas B;
step five: introducing diborane crude gas B in the fourth step into a first cold hydrazine (8) for precooling, and removing small molecular gas in the first cold hydrazine (8) by using a vacuum pump, wherein the small molecular gas is hydrogen in the second step to obtain liquid diborane;
step six: and (4) carrying out endothermic gasification on the liquid diborane in the step five at the temperature of 25-40 ℃ to obtain diborane gas.
6. A diborane synthesis process according to claim 5, wherein: the mass ratio of the sodium borohydride to the diborane is 2: 1.
7. A diborane synthesis process according to claim 5, wherein: and the precooling temperature of the first cold hydrazine (8) in the fifth step is-100 ℃.
8. A diborane synthesis system and method thereof according to claim 5, wherein: and introducing the mixed waste gas in the second step into the second cold hydrazine (12) for separation.
9. A diborane synthesis process according to claim 5, wherein: the temperature of the reaction kettle (1) is set to be 0-40 ℃.
10. A diborane synthesis process according to claim 5, wherein: and in the sixth step, the product is mixed with hydrogen in different proportions to prepare diborane mixed gas with the molar concentration of 5-40, and then filling is carried out.
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---|---|---|---|---|
JP2011098862A (en) * | 2009-11-06 | 2011-05-19 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
JP2011162363A (en) * | 2010-02-05 | 2011-08-25 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
JP2011162362A (en) * | 2010-02-05 | 2011-08-25 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
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JP2011098862A (en) * | 2009-11-06 | 2011-05-19 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
JP2011162363A (en) * | 2010-02-05 | 2011-08-25 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
JP2011162362A (en) * | 2010-02-05 | 2011-08-25 | Sumitomo Seika Chem Co Ltd | Method for producing diborane |
CN109867262A (en) * | 2019-04-15 | 2019-06-11 | 包头市海科福鹏电子材料有限公司 | A kind of synthesis system and synthetic method of diborane |
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