CN110627071B - Polychlorosilane processing apparatus in polycrystalline silicon production - Google Patents
Polychlorosilane processing apparatus in polycrystalline silicon production Download PDFInfo
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- CN110627071B CN110627071B CN201911101620.3A CN201911101620A CN110627071B CN 110627071 B CN110627071 B CN 110627071B CN 201911101620 A CN201911101620 A CN 201911101620A CN 110627071 B CN110627071 B CN 110627071B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
Abstract
The invention discloses a device for treating polychlorosilane waste in polysilicon production, which comprises: the cracking tank is provided with a polychlorosilane waste inlet and a hydrogen chloride inlet, wherein the polychlorosilane waste inlet is used for the polychlorosilane waste to enter, and the hydrogen chloride inlet is used for the hydrogen chloride to enter; the inlet of the evaporating pot is communicated with the outlet of the cracking pot; trichlorosilane collecting vessel and tetrachlorosilane collecting vessel, the export of evaporating pot and trichlorosilane collecting vessel and tetrachlorosilane collecting vessel intercommunication. In the invention, the cracking tank is filled with resin, and the polychlorosilane waste and hydrogen chloride are subjected to chemical reaction under the catalysis of the resin to produce trichlorosilane and silicon tetrachloride. And reactants enter an evaporating pot, and under the evaporation action of the evaporating pot, trichlorosilane and silicon tetrachloride are separated and respectively enter a trichlorosilane collecting pot and a tetrachlorosilane collecting pot. The treatment device can recover chlorosilane in the polychlorosilane waste, thereby saving energy and reducing discharge.
Description
Technical Field
The invention relates to the field of polycrystalline silicon production, in particular to a polychlorosilane processing device in polycrystalline silicon production.
Background
Polychlorosilane waste is generated in the production of polycrystalline silicon. In the prior art, the polychlorosilane waste is not degraded, but is directly discharged after being hydrolyzed. Therefore, the discharge amount is increased, and chlorosilane in the polychlorosilane waste cannot be recycled, thereby causing energy waste.
Therefore, how to design a polychlorosilane treatment device in polysilicon production, which can recover chlorosilane in polychlorosilane waste material, thereby saving energy and reducing discharge, is a key problem to be solved by technical personnel in the field.
Disclosure of Invention
The invention aims to provide a polychlorosilane treatment device in polysilicon production, which can recover chlorosilane in polychlorosilane waste materials, thereby saving energy and reducing discharge.
A processing apparatus of polychlorosilane waste material in polycrystalline silicon production, includes:
the device comprises a cracking tank, a waste gas inlet and a hydrogen chloride inlet, wherein the cracking tank is provided with a polychlorosilane waste inlet and a hydrogen chloride inlet, the polychlorosilane waste inlet is used for the entrance of polychlorosilane waste, and the hydrogen chloride inlet is used for the entrance of hydrogen chloride;
the inlet of the evaporation tank is communicated with the outlet of the cracking tank;
trichlorosilane collecting vessel and tetrachlorosilane collecting vessel, the export of evaporating pot with trichlorosilane collecting vessel with the tetrachlorosilane collecting vessel intercommunication.
Preferably, the system further comprises a rectifying tower and a cooler, wherein the cooler is used for cooling the polychlorosilane waste before entering the cracking tank, and the rectifying tower is used for purifying the polychlorosilane waste before entering the cooler.
Preferably, a cooling liquid flows through the cooler, a flow regulating valve is arranged on a cooling liquid pipeline of the cooler, a temperature detector is arranged on a polychlorosilane waste material outflow pipeline of the cooler, and the flow regulating valve is controlled by the temperature detector.
Preferably, the cracking tank comprises a plurality of cracking tanks, the plurality of cracking tanks are arranged in parallel, or one part of cracking tanks are arranged in parallel and then are connected with the other part of cracking tanks in series.
Preferably, the cracking tank comprises a first cracking tank, a second cracking tank and a third cracking tank, a first feeding pipe is installed at a polychlorosilane waste inlet of the first cracking tank, a first discharging pipe is installed at an outlet of the first cracking tank, and the first discharging pipe is communicated with an inlet of the evaporating tank;
a second feeding pipe is arranged at the inlet of the polychlorosilane waste material of the second cracking tank, a second discharging pipe is arranged at the outlet of the second cracking tank, and the second discharging pipe is communicated with the inlet of the evaporating tank;
and a third feeding pipe is arranged at the inlet of the polychlorosilane waste material of the third cracking tank, a third discharging pipe is arranged at the outlet of the third cracking tank, and the third discharging pipe is communicated with the inlet of the evaporating tank.
Preferably, the first and second electrodes are formed of a metal,
further comprising: the first communicating pipe is used for communicating the first discharging pipe with the second feeding pipe, a first valve is arranged on the first communicating pipe, and the first valve is used for communicating or stopping the first discharging pipe and the first communicating pipe;
a second communicating pipe for communicating the first discharge pipe and the third feed pipe, wherein a second valve is arranged on the second communicating pipe and used for communicating or stopping the first discharge pipe and the second communicating pipe;
and a third valve is arranged on the first discharging pipe and used for conducting or stopping the first discharging pipe and the steam tank.
Preferably, the third discharging pipe can be further communicated with the first feeding pipe and the second feeding pipe, a fourth valve is arranged on the third discharging pipe, and the fourth valve is used for conducting or stopping the third discharging pipe and the steam tank.
Preferably, the third discharge pipe is communicated with the second communicating pipe through a third communicating pipe, a fifth valve is arranged on the third communicating pipe, and the fifth valve is used for communicating or stopping the third communicating pipe and the third discharge pipe;
the second communicating pipe is communicated with the first feeding pipe through a fourth communicating pipe, a sixth valve is arranged on the fourth communicating pipe, and the sixth valve is used for communicating or stopping the fourth communicating pipe and the second communicating pipe;
the second communicating pipe is also provided with a seventh valve, and the seventh valve is used for conducting or stopping the second communicating pipe and the third feeding pipe;
the inlet end of the first communicating pipe is communicated with the second communicating pipe, an eighth valve is arranged on the second communicating pipe close to the first discharging pipe, and the eighth valve is used for communicating or stopping the second communicating pipe and the first discharging pipe.
Preferably, the second discharge pipe comprises a second discharge pipe and a second discharge pipe which are connected in parallel, the second discharge pipe is connected with the first discharge pipe, the second discharge pipe is connected with the third discharge pipe, a ninth valve is arranged on the second discharge pipe, a tenth valve is arranged on the second discharge pipe, the ninth valve is used for switching on or off the second discharge pipe and the first discharge pipe, and the tenth valve is used for switching on or off the second discharge pipe and the third discharge pipe.
Preferably, the cracking tank is further provided with a drain pipe, and an outlet of the drain pipe is communicated with the sewage collection tank.
Preferably, the blow-off pipe is arranged at a hydrogen chloride inlet of the cracking tank, and the hydrogen chloride inlet pipe is communicated with the blow-off pipe.
Preferably, the cracking tank is also provided with a maintenance discharge pipe.
According to the technical scheme, the polychlorosilane waste enters the cracking tank through the polychlorosilane waste inlet, and the hydrogen chloride enters the cracking tank through the hydrogen chloride inlet. Resin is arranged in the cracking tank, and the polychlorosilane waste and hydrogen chloride are subjected to chemical reaction under the catalysis of the resin to produce trichlorosilane and silicon tetrachloride. And reactants enter an evaporating pot, and under the evaporation action of the evaporating pot, trichlorosilane and silicon tetrachloride are separated and respectively enter a trichlorosilane collecting pot and a tetrachlorosilane collecting pot. The treatment device can recover chlorosilane in the polychlorosilane waste, thereby saving energy and reducing discharge.
Drawings
In order to more clearly illustrate the solution of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without inventive efforts.
FIG. 1 is a schematic view of an overall apparatus for treating waste polychlorosilane from the production of polysilicon according to one embodiment of the present invention;
fig. 2 is a structural diagram of a first cracking tank, a second cracking tank and a third cracking tank which are connected in parallel according to an embodiment of the present invention;
FIG. 3 is a block diagram of a first cracking tank and a second cracking tank and a third cracking tank connected in parallel and connected in series according to an embodiment of the present invention;
fig. 4 is a structural diagram of a third cracking tank and a first cracking tank and a second cracking tank connected in parallel and connected in series according to an embodiment of the present invention.
Wherein, 1 is an evaporation tank, 2 is a cooler, 3 is a flow control valve, 4 is a first cracking tank, 5 is a second cracking tank, 6 is a third cracking tank, 7 is a first feeding pipe, 8 is a second feeding pipe, 9 is a third feeding pipe, 10 is a first discharging pipe, 11 is a second discharging pipe, 12 is a second discharging pipe, 13 is a third discharging pipe, 14 is a first communicating pipe, 15 is a second communicating pipe, 16 is a first valve, 17 is a second valve, 18 is a third valve, 19 is a fourth valve, 20 is a third communicating pipe, 21 is a fifth valve, 22 is a fourth communicating pipe, 23 is a sixth valve, 24 is a seventh valve, 25 is an eighth valve, 26 is a ninth valve, 27 is a tenth valve, 28 is a drain pipe, 29 is a hydrogen chloride inlet pipe, and 30 is a maintenance drain pipe.
Detailed Description
The invention discloses a polychlorosilane treatment device in polysilicon production, which can recover chlorosilane in polychlorosilane waste, thereby saving energy and reducing discharge.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
In one embodiment of the present invention, a device for treating waste polychlorosilane in the production of polysilicon comprises: cracking tank, evaporating pot 1, trichlorosilane collecting tank and tetrachlorosilane collecting tank. The cracking tank is provided with a polychlorosilane waste inlet and a hydrogen chloride inlet. The polychlorosilane waste inlet is used for the polychlorosilane waste to enter. The hydrogen chloride inlet is used for hydrogen chloride to enter. The inlet of the evaporating pot 1 is communicated with the outlet of the cracking pot. The outlet of the evaporating pot 1 is communicated with a trichlorosilane collecting pot and a tetrachlorosilane collecting pot.
In this example, the polychlorosilane waste was passed into the cracking tank through the polychlorosilane waste inlet and the hydrogen chloride was passed into the cracking tank through the hydrogen chloride inlet. Resin is arranged in the cracking tank, and the polychlorosilane waste and hydrogen chloride are subjected to chemical reaction under the catalysis of the resin to produce trichlorosilane and silicon tetrachloride. And then the reactant enters an evaporating pot 1, trichlorosilane and silicon tetrachloride are separated under the evaporation action of the evaporating pot 1, and the reactant respectively enters a trichlorosilane collecting pot and a tetrachlorosilane collecting pot. The treatment device in the embodiment can recover chlorosilane in the polychlorosilane waste, thereby saving energy and reducing discharge.
Further, the device for treating the polychlorosilane waste material in the production of polysilicon also comprises a rectifying tower and a cooler 2. The cooler 2 is used for cooling the polychlorosilane waste. The rectifying tower is used for purifying the polychlorosilane waste material. The polychlorosilane waste material produced in the production of polysilicon firstly enters into a rectifying tower, and the rectifying tower separates out fine silicon powder and heavy metal in the polychlorosilane waste material, thereby avoiding the fine silicon powder and heavy metal from damaging resin in a cracking tank. The cooler 2 cools the purified polychlorosilane waste material to reduce the temperature of the polychlorosilane waste material to about 65 ℃. The optimal temperature for the pyrolysis reaction of the polychlorosilane waste is about 65 ℃.
Further, a coolant flows through the cooler 2. The cooling liquid passing through the cooler 2 takes away the heat in the polychlorosilane waste material, thereby realizing the cooling of the polychlorosilane waste material. A flow regulating valve 3 is arranged on a cooling liquid pipeline of the cooler 2. A temperature detector is arranged on the polychlorosilane waste outflow pipeline of the cooler 2. The flow regulating valve 3 is controlled by a temperature detector. When the temperature detector detects that the temperature of the polychlorosilane waste in the polychlorosilane waste outflow pipeline is greater than 65 ℃, the opening degree of the flow regulating valve 3 becomes large, and the cooling force to the polychlorosilane waste is increased. When the temperature detector detects that the temperature of the polychlorosilane waste in the polychlorosilane waste outflow pipeline is less than 65 ℃, then the opening degree of the flow regulating valve 3 is reduced, and the cooling force to the polychlorosilane waste is reduced. The interaction of the temperature detector with the flow control valve 3 ensures that the temperature of the polychlorosilane waste flowing into the cracking tank is constant at 65 ℃.
Further, the cracking tank is provided in plurality. A plurality of cracking tanks can be connected in parallel, so that the treatment efficiency of the polychlorosilane waste can be improved. As the cracking reaction proceeds, the catalytic efficiency of the resin in the cracking tank decreases, and thus the plurality of cracking tanks may be divided into two parts, a first part cracking tank and a second part cracking tank, respectively. The second part of cracking tanks are mutually connected in parallel, and the first part of cracking tanks and the second part of cracking tanks are connected in series. In this manner, the output of the pyrolysis tank in the first portion of the pyrolysis tanks is greater than the output of the pyrolysis tank in the second portion of the pyrolysis tanks over the same period of time. The cracking tank with large output quantity has short service life, so that the cracking tanks in the first part are connected in parallel after operating for a period of time, and then are connected in series with the cracking tanks in the second part.
Specifically, the cracking tanks may be provided in three, which are the first cracking tank 4, the second cracking tank 5, and the third cracking tank 6, respectively.
A first feeding pipe 7 is arranged at the inlet of the polychlorosilane waste material of the first cracking tank 4. The polychlorosilane waste enters the first cleavage tank 4 via a first feed line 7. A first discharging pipe 10 is installed at the outlet of the first cracking tank 4, and the first discharging pipe 10 is communicated with the inlet of the evaporating tank 1. The reacted reactants enter the evaporator 1 via a first outlet pipe 10.
A second feeding pipe 8 is arranged at the inlet of the polychlorosilane waste material of the second cracking tank 5. The polychlorosilane waste enters the second cleavage tank 5 through a second feed pipe 8. And a second discharging pipe is arranged at the outlet of the second cracking tank 5 and is communicated with the inlet of the evaporating tank 1. The reacted reactants enter the evaporator 1 through a second discharge pipe.
A third feeding pipe 9 is arranged at the inlet of the polychlorosilane waste material of the third cracking tank 6. The polychlorosilane waste enters the third cleavage tank 6 via a third feed conduit 9. A third discharging pipe 13 is arranged at the outlet of the third cracking tank 6, and the third discharging pipe 13 is communicated with the inlet of the evaporating tank 1. The reacted reactants enter the evaporator 1 via a third outlet pipe 13.
The first cracking tank 4, the second cracking tank 5 and the third cracking tank 6 are arranged in parallel. The first cracking tank 4, the second cracking tank 5 and the third cracking tank 6 can be connected in parallel through a second cracking tube and a third connecting tank, and the first cracking tank 4 and the second cracking tank 5 and the third cracking tank 6 which are connected in parallel are connected in series. The specific connection mode is as follows:
in this embodiment, the first communication pipe 14 and the second communication pipe 15 are added to the above structure. The first connecting line 14 is used to connect the first outlet pipe 10 to the second inlet pipe 8. The first communication pipe 14 is provided with a first valve 16. When the first valve 16 is opened, the first outlet pipe 10, the first connection and the second inlet pipe 8 are connected. When the first valve 16 is closed, the first outlet pipe 10 is not connected to the second inlet pipe 8. The second connection pipe 15 is used to connect the first discharge pipe 10 and the third feed pipe 9. The second communication pipe 15 is provided with a second valve 17. When the second valve 17 is opened, the first discharging pipe 10, the second communicating pipe and the third feeding pipe 9 are communicated. When the second valve 17 is closed, no communication is established between the first outlet pipe 10 and the third inlet pipe 9. In addition, a third valve 18 is also provided on the first tapping pipe 10. The third valve 18 is used to open or close the first tapping pipe 10 and the steam tank.
In this embodiment, the first cracking tank 4 can be connected in series with the second cracking tank 5 and the third cracking tank 6 after being connected in parallel by closing the third valve 18 and opening the first valve 16 and the second valve 17. The reactant flowing out of the first cracker tank 4 is introduced into the second cracker tank 5 and the third cracker tank 6 through the first communicating tube 14 and the second communicating tube 15, respectively.
Because the second cracking tank 5 and the third cracking tank 6 are connected in parallel, the output quantity of the second cracking tank 5 and the third cracking tank 6 is less than that of the first cracking tank 4 in the same time, so that the service life of the second cracking tank 5 and the third cracking tank 6 is longer than that of the first cracking tank 4, after the second cracking tank 4 and the second cracking tank 5 are connected in parallel after being used for a period of time, and the third cracking tank 6 is connected in series with the first cracking tank 4 and the second cracking tank 5 which are connected in parallel. In a specific operation, the fourth valve 19 of the third tapping pipe 13 is closed to cut off the passage between the third tapping pipe 13 and the steam tank, and then the third tapping pipe 13 is conducted to the first feeding pipe 7 and the second feeding pipe 8. The third outlet pipe 13 is connected to the first inlet pipe 7 and the second inlet pipe 8 in the following manner:
in the present embodiment, the third communication pipe 20 and the fourth communication pipe 22 are added to the above-described structure. The third discharge pipe 13 communicates with the second communication pipe 15 via a third communication pipe 20. The third communicating pipe 20 is provided with a fifth valve 21. The fifth valve 21 is used to control the on-off of the third connecting pipe 20 and the third tapping pipe 13. The second communicating tube 15 communicates with the first feed pipe 7 through the fourth communicating tube 22. A sixth valve 23 is provided in the fourth communication pipe 22. And the sixth valve 23 is used for controlling the on-off of the fourth communicating pipe 22 and the second communicating pipe 15. The second communicating pipe 15 is further provided with a seventh valve 24, and the seventh valve 24 is used for controlling the on-off of the second communicating pipe 15 and the third feeding pipe 9. If the third discharge pipe 13 is to be connected to the first cracking tank 4, the fourth valve 19 is closed, the seventh valve 24 is closed, the fifth valve 21 is opened and the sixth valve 23 is opened.
In addition, the inlet end of the first communicating pipe 14 is communicated with the second communicating pipe 15, an eighth valve 25 is arranged on the second communicating pipe 15 near the first discharging pipe 10, and the eighth valve 25 is used for controlling the on-off of the second communicating pipe 15 and the first discharging pipe 10. If the third discharge pipe 13 is to be connected to the second cracking tank 5, the eighth valve 25 is closed to prevent the material in the second connecting pipe 15 from entering the evaporator tank 1 along the first discharge pipe 10, so that the material in the second connecting pipe 15 enters the second cracking tank 5 along the first connecting pipe 14.
In the present embodiment, the third discharge pipe 13 enters the first cracking tank 4 through the third communicating pipe 20, the second communicating pipe 15, the fourth communicating pipe 22 and the first feed pipe 7. The second discharge tube enters the second cracking tank 5 through the third communicating tube 20, the second communicating tube 15, the first communicating tube 14 and the second feed tube 8, so that the connection mode of the third cracking tank 6 and the first cracking tank 4 and the second cracking tank 5 which are connected in parallel in series is realized.
Furthermore, the second discharging pipe is two pipes arranged in parallel, namely a second first discharging pipe 11 and a second discharging pipe 12. The second first discharge pipe 11 is connected to the first discharge pipe 10. The second discharge pipe 12 is connected to a third discharge pipe 13. The ninth valve 26 and the tenth valve 27 are respectively provided on the second first discharge pipe 11 and the second discharge pipe 12. The ninth valve 26 is used to control the connection and disconnection of the second tapping pipe 11 and the first tapping pipe 10. The tenth valve 27 is used to control the connection and disconnection of the second discharge pipe 12 and the third discharge pipe 13.
In summary, referring to fig. 2, when the waste polychlorosilane is connected in parallel, the waste polychlorosilane enters the first cracking tank 4, the second cracking tank 5 and the third cracking tank 6 through the first feeding pipe 7, the second feeding pipe 8 and the third feeding pipe 9, respectively. After the cracking reaction is finished, reactants in the first cracking tank 4, the second cracking tank 5 and the third cracking tank 6 respectively enter the evaporating tank 1 through the first discharging pipe 10, the second discharging pipe 12 and the third discharging pipe 13, and the evaporating tank 1 carries out evaporation separation on the reactants so that trichlorosilane and tetrachlorosilane respectively enter the trichlorosilane collecting tank and the tetrachlorosilane collecting tank.
In the connection mode of the first cracking tank 4 and the second cracking tank 5 and the third cracking tank 6 connected in parallel, please refer to fig. 3, the polychlorosilane waste material enters the first cracking tank 4 through the first feeding pipe 7, then the reactant enters the second cracking tank 5 through the first discharging pipe 10, the first communicating pipe 14 and the second feeding pipe 8, and simultaneously enters the third cracking tank 6 through the first discharging pipe 10, the second communicating pipe 15 and the third feeding pipe 9. The reactant flowing out of the second cracking tank 5 then enters the evaporator 1 through the second outlet pipe 12 and the third outlet pipe 13. The reaction product flowing out of the third cracking tank 6 is fed into the evaporator 1 via a third outlet pipe 13.
In the mode that the third cracking tank 6 is connected in series with the first cracking tank 4 and the second cracking tank 5 after being connected in parallel, please refer to fig. 4, the polychlorosilane waste enters the third cracking tank 6 through the third feeding pipe 9, then the reactant flowing out from the third cracking tank 6 enters the first cracking tank 4 along the third discharging pipe 13, the third communicating pipe 20, the second communicating pipe 15, the fourth communicating pipe 22, and the first feeding pipe 7, and simultaneously the reactant also enters the second cracking tank 5 along the third discharging pipe 13, the third communicating pipe 20, the second communicating pipe 15, the first communicating pipe 14, and the second feeding pipe 8. The reactant flowing out of the second cracking tank 5 then enters the evaporator 1 along the second first outlet pipe 11 and the first outlet pipe 10. The reactants flowing out of the first cracking tank 4 are introduced into the evaporator tank 1 along the first outlet pipe 10.
Furthermore, a sewage discharge pipe 28 can be arranged on the cracking tank, and the outlet of the sewage discharge pipe 28 is communicated with the sewage collection tank. When the cracking tank is cleaned, the sewage discharge pipe 28 is opened, and the sewage in the cracking tank is discharged. If there are more than one cracker tank, each cracker tank is provided with a drain 28.
Further, a drain 28 is installed at the hydrogen chloride inlet of the cracking tank, and a hydrogen chloride inlet pipe 29 is communicated with the drain 28. Namely, in the normal operation process, the hydrogen chloride enters the cracking tank through the hydrogen chloride inlet pipe 29 and the blow-off pipe 28. When blowdown is required, the wastewater exits the cracker tank through blowdown pipe 28. With this arrangement, the structure can be simplified.
Furthermore, a maintenance discharge pipe 30 can be arranged on the cracking tank. When the cracking tank needs to be overhauled, reactants in the cracking tank are discharged through an overhauling discharge pipe 30.
Finally, it should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A processing apparatus of polychlorosilane waste material in polycrystalline silicon production, which comprises:
the device comprises a cracking tank, a waste gas inlet and a hydrogen chloride inlet, wherein the cracking tank is provided with a polychlorosilane waste inlet and a hydrogen chloride inlet, the polychlorosilane waste inlet is used for the entrance of polychlorosilane waste, and the hydrogen chloride inlet is used for the entrance of hydrogen chloride;
an inlet of the evaporation tank (1) is communicated with an outlet of the cracking tank;
the outlet of the evaporation tank (1) is communicated with the trichlorosilane collection tank and the tetrachlorosilane collection tank;
the cracking tanks comprise a plurality of cracking tanks, the plurality of cracking tanks are arranged in parallel, or one part of cracking tanks are connected in parallel and then are connected with the other part of cracking tanks in series;
the cracking tank comprises a first cracking tank (4), a second cracking tank (5) and a third cracking tank (6), a first feeding pipe (7) is installed at the inlet of the polychlorosilane waste material of the first cracking tank (4), a first discharging pipe (10) is installed at the outlet of the first cracking tank (4), and the first discharging pipe (10) is communicated with the inlet of the evaporating tank (1);
a second feeding pipe (8) is installed at the inlet of the polychlorosilane waste material of the second cracking tank (5), a second discharging pipe is installed at the outlet of the second cracking tank (5), and the second discharging pipe is communicated with the inlet of the evaporating tank (1);
a third feeding pipe (9) is installed at the inlet of the polychlorosilane waste material of the third cracking tank (6), a third discharging pipe (13) is installed at the outlet of the third cracking tank (6), and the third discharging pipe (13) is communicated with the inlet of the evaporating tank (1);
further comprising: a first communicating pipe (14) used for communicating the first discharging pipe (10) and the second feeding pipe (8), wherein a first valve (16) is arranged on the first communicating pipe (14), and the first valve (16) is used for communicating or stopping the first discharging pipe (10) and the first communicating pipe (14);
a second communicating pipe (15) for communicating the first discharging pipe (10) with the third feeding pipe (9), wherein a second valve (17) is arranged on the second communicating pipe (15), and the second valve (17) is used for switching on or off the first discharging pipe (10) and the second communicating pipe (15);
a third valve (18) is arranged on the first discharging pipe (10), and the third valve (18) is used for conducting or stopping the first discharging pipe (10) and the steam tank;
the third discharging pipe (13) can be communicated with the first feeding pipe (7) and the second feeding pipe (8), a fourth valve (19) is arranged on the third discharging pipe (13), and the fourth valve (19) is used for conducting or stopping the third discharging pipe (13) and the steam tank;
the third discharge pipe (13) is communicated with the second communicating pipe (15) through a third communicating pipe (20), a fifth valve (21) is arranged on the third communicating pipe (20), and the fifth valve (21) is used for conducting or stopping the third communicating pipe (20) and the third discharge pipe (13);
the second communicating pipe (15) is communicated with the first feeding pipe (7) through a fourth communicating pipe (22), a sixth valve (23) is arranged on the fourth communicating pipe (22), and the sixth valve (23) is used for conducting or stopping the fourth communicating pipe (22) and the second communicating pipe (15);
the second communicating pipe (15) is also provided with a seventh valve (24), and the seventh valve (24) is used for conducting or stopping the second communicating pipe (15) and the third feeding pipe (9);
the inlet end of the first communicating pipe (14) is communicated with the second communicating pipe (15), an eighth valve (25) is arranged on the portion, close to the first discharging pipe (10), of the second communicating pipe (15), and the eighth valve (25) is used for conducting or stopping the second communicating pipe (15) and the first discharging pipe (10).
2. The device for treating the polychlorosilane waste in the production of polysilicon according to claim 1, further comprising a rectifying tower and a cooler (2), wherein the cooler (2) is used for cooling the polychlorosilane waste before entering the cracking tank, and the rectifying tower is used for purifying the polychlorosilane waste before entering the cooler (2).
3. The device for treating the polychlorosilane waste material in the production of polysilicon according to claim 2, wherein a cooling liquid is circulated in the cooler (2), a flow control valve (3) is disposed on a cooling liquid pipeline of the cooler (2), a temperature detector is disposed on a polychlorosilane waste material outflow pipeline of the cooler (2), and the flow control valve (3) is controlled by the temperature detector.
4. The device for processing polychlorosilane waste in polysilicon production according to claim 1, wherein the second discharge pipe comprises a second first discharge pipe (11) and a second discharge pipe (12) arranged in parallel, the second first discharge pipe (11) is connected to the first discharge pipe (10), the second discharge pipe (12) is connected to the third discharge pipe (13), a ninth valve (26) is arranged on the second first discharge pipe (11), a tenth valve (27) is arranged on the second discharge pipe (12), the ninth valve (26) is used for connecting or disconnecting the second first discharge pipe (11) and the first discharge pipe (10), and the tenth valve (27) is used for connecting or disconnecting the second discharge pipe (12) and the third discharge pipe (13).
5. The device for treating the polychlorosilane waste material in the production of polysilicon according to claim 1, wherein the cracking tank is further provided with a drain pipe (28), and the outlet of the drain pipe (28) is communicated with a sewage collecting tank.
6. The device for treating the polychlorosilane waste material in the production of polysilicon according to claim 5, wherein the blow off pipe (28) is installed at the hydrogen chloride inlet of the cracking tank, and the hydrogen chloride inlet pipe (29) is communicated with the blow off pipe (28).
7. The device for treating the waste material of the polychlorosilane in the production of polysilicon according to claim 1, wherein the pyrolysis tank is further provided with a maintenance discharge pipe (30).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911101620.3A CN110627071B (en) | 2019-11-12 | 2019-11-12 | Polychlorosilane processing apparatus in polycrystalline silicon production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911101620.3A CN110627071B (en) | 2019-11-12 | 2019-11-12 | Polychlorosilane processing apparatus in polycrystalline silicon production |
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| Publication Number | Publication Date |
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| CN110627071A CN110627071A (en) | 2019-12-31 |
| CN110627071B true CN110627071B (en) | 2021-08-10 |
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Application publication date: 20191231 Assignee: Sichuan Yongxiang Energy Technology Co.,Ltd. Assignor: SICHUAN YONGXIANG NEW ENERGY Co.,Ltd. Contract record no.: X2023510000014 Denomination of invention: A Polychlorosilane Treatment Device for Polycrystalline Silicon Production Granted publication date: 20210810 License type: Common License Record date: 20230816 |