CN110611014B - Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof - Google Patents

Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof Download PDF

Info

Publication number
CN110611014B
CN110611014B CN201910885570.6A CN201910885570A CN110611014B CN 110611014 B CN110611014 B CN 110611014B CN 201910885570 A CN201910885570 A CN 201910885570A CN 110611014 B CN110611014 B CN 110611014B
Authority
CN
China
Prior art keywords
film
ito glass
spin coating
precursor solution
mixed solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201910885570.6A
Other languages
Chinese (zh)
Other versions
CN110611014A (en
Inventor
唐孝生
曾凡菊
胡伟
张孟
叶怀宇
张国旗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Southern University of Science and Technology
Original Assignee
Shenzhen Third Generation Semiconductor Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Third Generation Semiconductor Research Institute filed Critical Shenzhen Third Generation Semiconductor Research Institute
Priority to CN201910885570.6A priority Critical patent/CN110611014B/en
Publication of CN110611014A publication Critical patent/CN110611014A/en
Application granted granted Critical
Publication of CN110611014B publication Critical patent/CN110611014B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Luminescent Compositions (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a Cs3Cu2I5The ultraviolet detector and the film preparation method comprise the step of adopting a differential spin coating method to coat Cs3Cu2I5Coating the precursor solution on ITO glass, and dropwise adding an anti-solvent within the last 5 seconds of spin coating; the differential speed is firstly slow and then fast. The film preparation technology has the advantages of short annealing time, low annealing temperature, uniform and compact film, high transmittance and high fluorescence quantum efficiency which reaches 76.1 percent and is stable in the air, and the luminous efficiency is still maintained at 76 percent after the film is stored in the air for 2 months.

Description

Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof
Technical Field
The invention belongs to the technical field of lead-free perovskite thin films, particularly relates to morphology control and a preparation method of a blue-light lead-free perovskite thin film, and particularly relates to a Cs3Cu2I5A method for preparing a film.
Background
Lead-halogen perovskite is widely applied to the fields of solar cells, LED illumination, laser, photoelectric detection and the like due to the excellent photoelectric property of lead-halogen perovskite, and is considered to be a material with excellent prospect. Firstly, in the aspect of luminescence, most of the green light thin film materials with higher and stable luminescence efficiency in the pre-halogen perovskite are researched, and the blue light luminescence efficiency of the lead-halogen perovskite thin film materials is not high, so that the research on the blue light thin film materials is not much; secondly, the lead-halogen perovskite is unstable in air and is easy to decompose; finally, and most critically, lead-halo perovskites contain lead atoms that are harmful to both the environment and humans, thereby limiting their practical application. In recent years, more and more researchers have generated great interest in lead-free perovskites, for example, there are reports on adopting Bi, Cu, Sb and the like to replace Pb atoms, wherein the toxicity of transition metal Cu is the lowest, and cesium copper iodine has an ultra-wide forbidden bandwidth of-3.8 eV as a novel non-toxic perovskite material, has strong response to deep ultraviolet light, and is relatively stable in air. Therefore, the research on the cesium copper iodine-based deep ultraviolet detector has important research value. Thus becoming the best material for replacing Pb. Therefore, the preparation of the high-efficiency and high-stability low-toxicity blue light film has a great promotion effect on the preparation of blue light LEDs and blue light lasers.
Disclosure of Invention
In order to solve the problems, the invention provides a method for preparing full-lead-free smooth and stable Cs by low-toxicity green anti-solvent assisted crystallization3Cu2I5The film prepared by the method is more uniform and compact, and the fluorescence quantum efficiency is higher and stable.
The technical scheme adopted by the invention is as follows:
cs (volatile organic Compounds)3Cu2I5The preparation method of the film adopts a differential spin coating method to coat Cs3Cu2I5Coating the precursor solution on ITO glass, and dropwise adding an anti-solvent within the last 5 seconds of spin coating; the differential speed is firstly slow and then fast.
Preferably, said Cs3Cu2I5The preparation method of the precursor solution is to dissolve CsI and CuI in a mixed solvent of DMF and DMSO.
Preferably, the dissolving mode is heating and stirring at 50-70 ℃ for 0.5-1.2 h.
Preferably, the mass-to-volume ratio of CsI, CuI, DMF and DMSO is 2g:1g:3-3.5ml:0.85-1.0 ml.
Preferably, the ITO glass is sequentially treated with detergent, deionized water, acetone, alcohol and isopropanol through ultrasonic treatment and UV ozone treatment.
Preferably, the ultrasonic time is 25-35min respectively; the UV ozone treatment time is 25-35 min.
Preferably, the differential speed spin coating is specifically:
1) mixing the Cs3Cu2I5Dripping precursor solution at the central position of the ITO glass;
2) in the center of the ITO glass, Cs is slowly spin-coated at the rotating speed of 800-3Cu2I5Precursor solutionLiquid for 10-20 s;
3) at the center of the ITO glass, the rotation speed of 3000 plus 5000r/min, Cs is quickly spin-coated3Cu2I5Precursor solution for 20-40 s;
4) 3) quickly dripping methyl acetate in the center of the ITO glass within the last 5s or 5s of spin coating; for the mixed solution, the total vapor pressure of the solution is equal to the sum of the vapor pressures of the individual partial solvents, and the total boiling point is lower than the lowest boiling solvent in the mixed solution. Therefore, the introduction of a solution having a high vapor pressure and a low boiling point as an anti-solvent helps accelerate the evaporation of DMF and DMSO in the perovskite precursor solution to accelerate the crystallization of perovskite and form a uniform and dense perovskite thin film. Compared with the common anti-solvent such as toluene, chlorobenzene, isopropanol and the like, the low-toxicity methyl acetate solution has higher vapor pressure (28.8kPa) and lower boiling point (56.9 ℃), so that the uniform and compact total lead-free Cs can be effectively prepared by dropwise adding methyl acetate as the anti-solvent in the spin coating3Cu2I5A perovskite thin film.
5) Heating the ITO glass prepared in the step 4) at the temperature of 50-70 ℃ for 0.5-1.5h, and cooling to obtain Cs3Cu2I5A film.
Preferably, said Cs3Cu2I5The volume ratio of the precursor solution to the methyl acetate is 2-3: 5.
The deep ultraviolet photoelectric detector of the film prepared based on the method.
The invention has the beneficial effects that:
1. the differential step spin coating method is adopted during spin coating, wherein the low-speed spin coating can enable the precursor solution to be flatly spread on the substrate according to a certain thickness, and the relatively high speed in the second stage is favorable for uniformly flatly spreading the film on the substrate and is favorable for evaporating the solvent in the solution;
2. methyl acetate is dripped into the last 5s of the spin coating to be used as an anti-solvent for accelerating the evaporation of perovskite precursor solution solvents dimethyl formamide (DMF) and dimethyl sulfoxide (DMSO);
3. the method has the advantages of short required annealing time, low annealing temperature, uniform and compact film and high transmittance;
4. the film prepared by the invention has high fluorescence quantum efficiency which reaches 76.1 percent and is stable in the air, and the luminous efficiency is still maintained at 76 percent after the film is stored in the air for 2 months.
5. The invention adopts an anti-solvent auxiliary crystallization method to prepare the full-lead-free low-toxicity green perovskite thin film and the deep ultraviolet photoelectric detector.
Drawings
FIG. 1 shows an embodiment of the present invention Cs3Cu2I5Scanning electron microscope pictures of the surface and the cross section of the film;
FIG. 2 shows an embodiment of the present invention Cs3Cu2I5Mapping pictures on the surface of the film;
FIG. 3 shows an embodiment of the present invention Cs3Cu2I5Film EDS pictures;
FIG. 4 shows an embodiment of the present invention Cs3Cu2I5Atomic force microscopy pictures of the thin film;
FIG. 5 shows an embodiment of the present invention Cs3Cu2I5An X-ray diffraction pattern of the film;
FIG. 6 shows an embodiment of the present invention Cs3Cu2I5A fluorescence spectrum and an absorption spectrum of the film;
FIG. 7 shows an embodiment of the present invention Cs3Cu2I5A fluorescence quantum yield map of the thin film;
FIG. 8 shows an embodiment of the present invention Cs3Cu2I5Fluorescence quantum yield stability plots for thin films (samples stored in air).
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
This embodiment provides a method for producing Cs3Cu2I5The preparation method of the film comprises the following specific steps:
1) and mixing CsI: 469mg, CuI: 229mg of the precursor solution was dissolved in a mixed solvent of DMF and DMSO, wherein the DMF was 800. mu.L and the DMSO was 200. mu.L, and the precursor solution was completely dissolved by heating and stirring at 60 ℃ for 1 hour;
2) respectively ultrasonically cleaning ITO glass by using detergent, deionized water, acetone, alcohol and isopropanol for 30 minutes, and then treating by using UV ozone for 30 minutes for later use;
3) taking 60 mu L of precursor completely dissolved by a liquid transfer gun, dropping the precursor liquid at the center of the ITO glass, starting spin coating after the precursor liquid is completely spread, wherein the spin coating adopts step spin coating, the spin coating speed of the first stage is 1000 rpm, the spin coating time is 15 seconds, the spin coating speed of the second stage is 4000 rpm, the spin coating time is 30 seconds, in addition, 100 mu L of methyl acetate is quickly dropped at the center of the ITO as an anti-solvent for auxiliary crystallization in the last 5 seconds of the second stage, finally, the film is placed on a heating table at 60 ℃ for heating for 1 hour, after the heating is finished, the sample with the ultra-smooth film is cooled to room temperature and taken down, and the ultra-smooth Cs can be obtained3Cu2I5A film.
The prepared films were characterized as follows: FIG. 1(a) is an SEM topography of the surface of the film, the particle size is uniform and dense; FIG. 1(b) is a cross-sectional view of a thin film having a thickness of about 350 nm. FIG. 2 is a graph showing that the elements Cs, Cu and I are uniformly distributed on the surface of the film. FIG. 3EDS pictures, Cs, Cu, I are distributed on the surface of the film in a ratio close to 3:2: 5. FIG. 4 is an AFM image of a thin film that is uniform and dense with a root mean square roughness of 17.5 nm. FIG. 5 is an XRD pattern of the film, and the diffraction peak positions are matched with the PDF card No.45-0077, which proves that the film is Cs3Cu2I5A material. FIG. 6 is a UV-VIS absorption and fluorescence spectrum of a thin film having an absorption peak at 290nm and a fluorescence spectrum peak at 445 nm. FIG. 7 is a PLQY spectrum of a thin film with a fluorescence quantum yield of 76.1%. FIG. 8 shows the result of the quantum yield stability test of the fluorescence of the thin film, the sample is stored in the air and tested for 2 months at irregular intervals, and the quantum yield of the thin film is almost kept unchanged.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.

Claims (4)

1. Cs (volatile organic Compounds)3Cu2I5The preparation method of the film is characterized by comprising the following steps: applying differential spin coating method to coat Cs3Cu2I5Coating the precursor solution on ITO glass, and dropwise adding an anti-solvent within the last 5 seconds of spin coating; the differential speed is firstly slow and then fast; the antisolvent is selected from the group consisting of3Cu2I5Methyl acetate with the volume ratio of the precursor solution being 5:3-2 to form a uniform and compact film, and annealing the spin-coated ITO glass at 50-60 ℃ for 0.5-1 h;
the Cs3Cu2I5The preparation method of the precursor solution comprises the steps of dissolving CsI and CuI in a mixed solution of DMF and DMSO;
the dissolving mode is heating and stirring for 0.5-1.2h at 50-70 ℃;
the mass-volume ratio of the CsI to the CuI to the DMF to the DMSO is 2g to 1g to 3-3.5ml to 0.85-1.0 ml;
the differential speed spin coating comprises the following specific steps:
1) mixing the Cs3Cu2I5Dripping precursor solution at the central position of the ITO glass;
2) in the center of the ITO glass, Cs is slowly spin-coated at the rotating speed of 800-3Cu2I5Precursor solution for 10-20 s;
3) at the center of the ITO glass, the rotation speed of 3000 plus 5000r/min, Cs is quickly spin-coated3Cu2I5Precursor solution for 20-40 s;
4) quickly dripping methyl acetate in the center of the ITO glass within the last 5 seconds of the quick spin coating in the step 3) to obtain a mixed solution;
for the mixed solution, the total vapor pressure of the mixed solution is equal to the sum of the vapor pressures of all the component solvents in the mixed solution, and the total boiling point is lower than the solvent with the lowest boiling point in the mixed solution;
5) heating the ITO glass prepared in the step 4) at 50-60 ℃ for 0.5-1h, and cooling to obtain Cs3Cu2I5A film.
2. The Cs of claim 13Cu2I5The preparation method of the film is characterized by comprising the following steps: and (3) carrying out ultrasonic treatment on the ITO glass by using a detergent, deionized water, acetone, alcohol and isopropanol in sequence and carrying out UV ozone treatment.
3. The Cs of claim 23Cu2I5The preparation method of the film is characterized by comprising the following steps: the ultrasonic time is 25-35 min; the UV ozone treatment time is 25-35 min.
4. Cs (volatile organic Compounds)3Cu2I5A film prepared by the method of any one of claims 1 to 3, wherein: the film is used for a deep ultraviolet photodetector.
CN201910885570.6A 2019-09-19 2019-09-19 Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof Expired - Fee Related CN110611014B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910885570.6A CN110611014B (en) 2019-09-19 2019-09-19 Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910885570.6A CN110611014B (en) 2019-09-19 2019-09-19 Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof

Publications (2)

Publication Number Publication Date
CN110611014A CN110611014A (en) 2019-12-24
CN110611014B true CN110611014B (en) 2021-10-29

Family

ID=68891579

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910885570.6A Expired - Fee Related CN110611014B (en) 2019-09-19 2019-09-19 Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof

Country Status (1)

Country Link
CN (1) CN110611014B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111721744B (en) * 2020-01-19 2022-06-07 中国科学院上海微系统与信息技术研究所 Preparation method of fluorescent film sensor
CN111293218B (en) * 2020-02-28 2022-11-08 重庆大学 Resistive random access memory based on cesium copper iodoperovskite thin film and preparation method thereof
CN111592232A (en) * 2020-05-28 2020-08-28 重庆师范大学 One-dimensional lead-free cesium copper iodine perovskite yellow light film and preparation method thereof
CN112048764B (en) * 2020-08-17 2021-12-07 南京航空航天大学 Zero-dimensional Cs3Cu2I5Perovskite scintillation crystal and application thereof
CN112820825A (en) * 2021-01-13 2021-05-18 福州大学 Preparation method of artificial synapse device based on lead-free perovskite
CN113013328B (en) * 2021-02-09 2022-08-26 凯里学院 Cesium-copper-iodine-calcium-titanium ore resistive random access memory with excellent resistance performance and preparation method thereof
CN113054067B (en) * 2021-03-15 2022-09-02 南京邮电大学 Perovskite light emitting diode and method for smoothly orienting perovskite thin film thereof
CN114592239B (en) * 2022-03-04 2023-03-31 广州大学 Method for improving performance of deep ultraviolet photoelectric detector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108269918A (en) * 2016-12-31 2018-07-10 中国科学院上海硅酸盐研究所 Porous perovskite thin film, carbon pastes and the solar cell based on carbon electrode
CN109860403A (en) * 2019-04-10 2019-06-07 西南石油大学 Obtain post-processing method and its application of big crystal grain high quality perovskite thin film
CN109950407A (en) * 2019-04-01 2019-06-28 广州新视界光电科技有限公司 A kind of perovskite thin film and preparation method thereof
CN110164998A (en) * 2019-04-11 2019-08-23 北京宏泰创新科技有限公司 A kind of full-inorganic calcium titanium ore bed and its preparation method and application
CN110165000A (en) * 2019-07-10 2019-08-23 合肥工业大学 A kind of deep ultraviolet light electric explorer and preparation method thereof based on the unleaded perovskite caesium copper iodine microcrystalline film in broad stopband

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10319533B2 (en) * 2017-01-12 2019-06-11 Ricoh Company, Ltd. Photoelectric conversion element and solar cell
CN108649121B (en) * 2018-05-11 2021-07-16 南京理工大学 Method for preparing perovskite film by dynamic spin coating
CN108726583B (en) * 2018-07-17 2020-05-19 中山大学 Stable lead-free low-band-gap all-inorganic perovskite A2PdX6Nanocrystalline and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108269918A (en) * 2016-12-31 2018-07-10 中国科学院上海硅酸盐研究所 Porous perovskite thin film, carbon pastes and the solar cell based on carbon electrode
CN109950407A (en) * 2019-04-01 2019-06-28 广州新视界光电科技有限公司 A kind of perovskite thin film and preparation method thereof
CN109860403A (en) * 2019-04-10 2019-06-07 西南石油大学 Obtain post-processing method and its application of big crystal grain high quality perovskite thin film
CN110164998A (en) * 2019-04-11 2019-08-23 北京宏泰创新科技有限公司 A kind of full-inorganic calcium titanium ore bed and its preparation method and application
CN110165000A (en) * 2019-07-10 2019-08-23 合肥工业大学 A kind of deep ultraviolet light electric explorer and preparation method thereof based on the unleaded perovskite caesium copper iodine microcrystalline film in broad stopband

Also Published As

Publication number Publication date
CN110611014A (en) 2019-12-24

Similar Documents

Publication Publication Date Title
CN110611014B (en) Cs (volatile organic Compounds)3Cu2I5Ultraviolet detector and film preparation method thereof
JP6725136B2 (en) Air-stable surface-passivated perovskite quantum dots (QDs), methods of making the QDs and methods of using the QDs
Wang et al. Steering the crystallization of perovskites for high-performance solar cells in ambient air
CN107032392B (en) A kind of full-inorganic perovskite nanometer sheet and its preparation method and application
US11306245B2 (en) Method for preparing CsPbX3 perovskite quantum dot film by one-step crystallization
US9680066B2 (en) Phosphor, light emitting element, and light emitting device
CN107681054A (en) A kind of preparation method of perovskite crystal nano wire
Hu et al. Discovery of a new intermediate enables one‐step deposition of high‐quality perovskite films via solvent engineering
CN112080276A (en) Preparation method of cesium-lead halogen perovskite nanocrystalline thin film with high luminous efficiency
Pang et al. Luminescent properties of rare-earth-doped CaWO4 phosphor films prepared by the Pechini sol–gel process
WO2019099657A1 (en) Doped perovskite structures for light-emitting devices and other applications
CN106282922A (en) A kind of coevaporation prepares the method for inorganic non-lead halogenide perovskite thin film
Hasabeldaim et al. Surface characterization and cathodoluminescence degradation of ZnO thin films
WO2022161117A1 (en) Germanium-based perovskite photoelectric material, application thereof and preparation method therefore, and device and manufacturing method therefor
He et al. Enhanced Cyan Photoluminescence and Stability of CsPbBr3 Quantum Dots Via Surface Engineering for White Light‐Emitting Diodes
Lin et al. Remanent solvent management engineering of perovskite films for PEDOT: PSS-based inverted solar cells
CN111592232A (en) One-dimensional lead-free cesium copper iodine perovskite yellow light film and preparation method thereof
Yang et al. Phase segregation in mixed halide perovskite by post-treatment of methylammonium halides
CN112374965A (en) Halogen bond eutectic material and preparation method and application thereof
US20080050857A1 (en) Group III nitride coatings and methods
CN114507519B (en) Normal-temperature green synthesis method of deep blue perovskite quantum dots and application of deep blue perovskite quantum dots in preparation of perovskite light-emitting diode
CN110746967A (en) Near-infrared long-afterglow nano luminescent material and preparation method and application thereof
Gogoi et al. Understanding the crystallization of triple-cation perovskites assisted by mixed antisolvents for improved solar cell device performance
WO2006060660A2 (en) Group iii nitride coatings and methods
Fatehmulla et al. Bandgap Tuning and Blue-Green Band Emissions of Sol–Gel Synthesized ZnO Films by High Cu Doping

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20230418

Address after: No. 1088, Xueyuan Avenue, Taoyuan Street, Nanshan District, Shenzhen City, Guangdong Province

Patentee after: Southern University of Science and Technology

Address before: Taizhou building, No. 1088, Xueyuan Avenue, Xili University Town, Nanshan District, Shenzhen City, Guangdong Province

Patentee before: SHENZHEN THIRD GENERATION SEMICONDUCTOR Research Institute

TR01 Transfer of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20211029

CF01 Termination of patent right due to non-payment of annual fee