CN110600411A - Single crystal flower basket for rapid texturing and inserting piece rod thereof - Google Patents
Single crystal flower basket for rapid texturing and inserting piece rod thereof Download PDFInfo
- Publication number
- CN110600411A CN110600411A CN201910880611.2A CN201910880611A CN110600411A CN 110600411 A CN110600411 A CN 110600411A CN 201910880611 A CN201910880611 A CN 201910880611A CN 110600411 A CN110600411 A CN 110600411A
- Authority
- CN
- China
- Prior art keywords
- rod
- single crystal
- flower basket
- blade
- rapid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 45
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 14
- 210000002268 wool Anatomy 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 19
- 239000011241 protective layer Substances 0.000 claims description 17
- 239000010410 layer Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 235000008216 herbs Nutrition 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 238000001035 drying Methods 0.000 abstract description 7
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 15
- 238000005406 washing Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 239000005871 repellent Substances 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000000861 blow drying Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
Abstract
The invention discloses a single crystal flower basket for rapid texture making and an inserting rod thereof. Through the compound hydrophobic layer of surface at inserted sheet pole body for the moisture of the position of inserted sheet pole and single wafer contact is taken away by drying more easily, thereby at quick system wool in-process, has avoided the position of inserted sheet pole and single wafer contact to appear drying not dry the condition emergence.
Description
Technical Field
The invention relates to the technical field of single crystal texture etching, in particular to a single crystal flower basket for rapid texture etching and a piece inserting rod thereof.
Background
At present, a single crystal PERC battery becomes mainstream, while the production of a battery piece needs to be carried out through a single crystal texturing procedure, and during the texturing procedure, the battery piece needs to be subjected to the procedures of texturing groove, water washing, alkali washing, water washing, acid washing, water washing, blow drying and the like, so that the surface of the battery piece is textured, and the light reflection index is increased. In the process, a single crystal basket is generally required to load the cell, the structure of the single crystal basket generally comprises two side plates which are arranged oppositely in parallel and an inserting rod which stretches across between the two side plates, and a plurality of inserting rods which are arranged in parallel form a framework for loading the single crystal.
Single crystal texturing is currently more rapid texturing because of the higher throughput of rapid texturing than conventional texturing. However, due to the short drying time of the fast texturing process, the contact position of the wafer inserting rod and the single wafer is easy to be dried.
In summary, how to solve the problem that the contact position of the wafer-inserting rod and the single wafer is easy to be dried has become a technical problem that needs to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a single crystal flower basket for rapid texture making and a slice inserting rod thereof, so as to solve the problem that the contact position of the slice inserting rod and a single crystal slice is easy to be dried.
In order to achieve the aim, the invention provides an insert rod of a single crystal flower basket for rapid texture surface making, which comprises an insert rod body, wherein a hydrophobic layer is compounded on the outer surface of the insert rod body.
Preferably, the insert rod body comprises a metal rod and a protective layer wrapping the outer surface of the metal rod, and the hydrophobic layer is compounded on the outer surface of the protective layer.
Preferably, the metal rod piece comprises a solid section and a hollow section, the solid section is located in the middle of the metal rod piece, the hollow section is located at two ends of the metal rod piece, and the protective material of the protective layer is filled in the inner cavity of the hollow section.
Preferably, the distance that the protective material extends out of the outer end face of the hollow section is not less than 2 cm.
Preferably, the lengths of the hollow sections at the two ends of the metal rod piece are both 4cm +/-1 cm.
Preferably, the material of the protection layer is a PDVF material.
Preferably, the protective layer is injection molded on the metal rod.
Preferably, the hydrophobic layer is made of a nano fluorine material.
Compared with the introduction content of the background technology, the insert rod of the single crystal flower basket for rapid texturing comprises an insert rod body, and the outer surface of the insert rod body is compounded with a hydrophobic layer. Through the compound hydrophobic layer of surface at inserted sheet pole body for the moisture of the position of inserted sheet pole and single wafer contact is taken away by drying more easily, thereby at quick system wool in-process, has avoided the position of inserted sheet pole and single wafer contact to appear drying not dry the condition emergence.
In addition, the invention also provides a single crystal flower basket for rapid texture surface making, which comprises two side plates which are arranged oppositely in parallel and an inserting piece rod which spans between the two side plates, wherein the inserting piece rod is the inserting piece rod described in any scheme. Since the blade bar has the technical effects, the single crystal flower basket with the blade bar also has the corresponding technical effects, which are not described herein again.
Preferably, the blade insertion rods comprise a lower blade insertion rod, a side blade insertion rod and an upper blade insertion rod;
the lower inserting piece rod spans the bottoms of the two side plates in a plurality of parallel coplanar modes;
the side inserting piece rod spans the front side end or the rear side end of the two side plates;
the upper inserting sheet rod is transverse to the tops of the two side plates.
Drawings
FIG. 1 is a schematic cross-sectional view of a blade bar according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a metal rod according to an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating the arrangement positions of the blade bars of the single crystal flower basket for rapid texture surface making according to the embodiment of the invention.
In the above figures 1-3 of the drawings,
the water-repellent coating comprises a blade inserting rod body 1, a water-repellent layer 2, a metal rod 3, a protective layer 4, a solid section 5, a hollow section 6, a side plate 7, a lower blade inserting rod 8, a side blade inserting rod 9 and an upper blade inserting rod 10.
Detailed Description
The core of the invention is to provide a single crystal flower basket for rapid texture surface making and a slice inserting rod thereof, so as to solve the problem that the contact position of the slice inserting rod and a single crystal slice is easy to be dried.
In order to make those skilled in the art better understand the technical solutions provided by the present invention, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-3, an insert rod for a single crystal flower basket for rapid texturing according to an embodiment of the present invention includes an insert rod body 1, and a hydrophobic layer 2 is compounded on an outer surface of the insert rod body 1.
This insert piece pole of single crystal flower basket is at the practical application in-process, through the compound hydrophobic layer of surface at insert piece pole body for the moisture of the position of insert piece pole and single wafer contact is taken away by drying more easily, thereby at quick system wool in-process, has avoided the condition emergence of drying by fire not dry in the position of insert piece pole with the single wafer contact.
It should be noted that the hydrophobic layer 2 is generally made of a relatively coarse material, such as a nano-fluorine material, and may be made of other hydrophobic materials commonly used by those skilled in the art to meet the requirement of rapid texturing, and may be selected according to actual requirements in practical applications.
It should be noted that, the specific structure of the blade inserting rod body 1 generally includes a metal rod 3 and a protective layer 4 wrapped on the outer surface of the metal rod 3, and the hydrophobic layer 2 is compounded on the outer surface of the protective layer 4. Through designing into metal pole with inserted sheet pole body, when inserted sheet pole is applied to single crystal basket of flowers, can promote the whole counter weight of single crystal basket of flowers, help reducing the risk of basket of flowers, in addition through at metal pole surface parcel protective layer, can carry out fine protection guard action to metal pole, avoid producing the corruption to metal pole in the operation of drenching with washing, the technical personnel in the field should understand of course, here the protective layer is that certain corrosion resistance intensity needs to be satisfied, can guarantee that single crystal basket of flowers is in each processing procedure, can not produce chemical reaction and can not suffer destruction.
In addition, the material of the protective layer may generally be PDVF (polyvinylidene fluoride), but it should be understood that other protective materials commonly used by those skilled in the art may also be selected in practical application, as long as the protection of the metal rod is ensured and the metal rod is not corroded. When PDVF (polyvinylidene fluoride) is used as the protective layer, it is preferably formed by injection molding to wrap the outer surface of the metal rod 3.
In some specific embodiments, the structure of the metal rod 3 may specifically include a solid section 5 and a hollow section 6, wherein the solid section 5 is located at the middle position of the metal rod 3, the hollow section 6 is located at the two end positions of the metal rod 3, and the protective material of the protective layer 4 is filled into the inner cavity of the hollow section 6. Set to hollow section through the both ends with metal member to the protective material fills to hollow section, thereby makes protective material more firm with metal member's fixed, and can strengthen the anti performance of falling of inserted sheet pole, avoids because falling to collide with but the metal is exposed, because the exposed back of metal is corroded very easily and influences the life of inserted sheet pole.
In a further embodiment, for most of the specifications of the insert rod used for the single crystal flower basket, the distance of the protective material used for the insert rod body extending out of the outer end face of the hollow section 6 is generally not less than 2 cm. And the length of the hollow section 6 at both ends of the metal rod 3 is preferably 4cm + -1 cm in general. It is understood that the above-mentioned size values are merely preferred examples of the embodiments of the present invention, and other corresponding size values may be selected according to actual requirements in the practical application process.
In addition, the invention also provides a single crystal flower basket for rapid texture surface making, which comprises two side plates 7 arranged in parallel and oppositely and an inserting piece rod spanning between the two side plates 7, wherein the inserting piece rod is the inserting piece rod described in any scheme. Since the blade bar has the technical effects, the single crystal flower basket with the blade bar also has the corresponding technical effects, which are not described herein again.
In a further embodiment, the blade bars include a lower blade bar 8, a side blade bar 9, and an upper blade bar 10; the lower inserting piece rod 8 spans the bottoms of the two side plates 7 in a plurality of parallel coplanar modes; the side inserting sheet rod 9 crosses the front side end or the rear side end of the two side plates 7; the upper blade bar 10 is transverse to the top of the two side plates 7. Compared with the traditional insert rod framework, the structural member formed by the arrangement mode of the insert rods is mainly different in that the traditional insert rod framework is realized by arranging the pressure rod capable of acting at the top of the single crystal flower basket in order to avoid the problem of floating of the wafers, but the pressure rod capable of acting can damage the single crystal wafers very easily. However, the framework formed by the insert rods of the invention adopts the structure that the insert rods are not arranged at the front side end or the rear side end of the single crystal flower basket, when a single crystal wafer is loaded, the single crystal wafer is loaded from the side surface, a plurality of lower insert rods arranged in a parallel coplanar manner can well support the single crystal wafer, the side insert rods 9 can carry out limit protection on the side parts of the single crystal wafer, the upper insert rods 10 can carry out limit protection on the top parts of the single crystal wafer, and the upper insert rods do not need to act, so that the risk that the insert rods crush the single crystal wafer can be reduced.
The monocrystalline flower basket for rapid texture surface making and the inserting rod thereof provided by the invention are described in detail above. It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other.
It is also noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in an article or device that comprises the element.
The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the core concepts of the present invention. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (10)
1. The utility model provides an insert pole that is used for quick monocrystalline flower basket of making herbs into wool, includes insert pole body (1), its characterized in that, the surface complex of insert pole body (1) has hydrophobic layer (2).
2. The insert rod for the monocrystalline flower basket for rapid wool making according to claim 1, wherein the insert rod body (1) comprises a metal rod piece (3) and a protective layer (4) wrapping the outer surface of the metal rod piece (3), and the hydrophobic layer (2) is compounded on the outer surface of the protective layer (4).
3. The blade bar of the single crystal flower basket for rapid texture etching according to claim 2, wherein the metal bar member (3) comprises a solid section (5) and a hollow section (6), the solid section (5) is located at the middle position of the metal bar member (3), the hollow section (6) is located at the two end positions of the metal bar member (3), and the protective material of the protective layer (4) is filled into the inner cavity of the hollow section (6).
4. The blade bar of the single crystal flower basket for rapid texture etching according to claim 3, wherein the distance of the protective material protruding from the outer end face of the hollow section (6) is not less than 2 cm.
5. The blade bar of the single crystal flower basket for rapid texture etching according to claim 3, wherein the length of the hollow section (6) at both ends of the metal bar member (3) is 4cm ± 1 cm.
6. The blade bar of the single crystal flower basket for rapid texture etching according to claim 3, wherein the material of the protective layer (4) is PDVF material.
7. The blade bar of the single crystal flower basket for rapid texture etching according to claim 6, wherein the protective layer (4) is injection molded on the metal bar member (3).
8. The insert rod of the single crystal flower basket for rapid texture etching according to claim 1, wherein the hydrophobic layer (2) is made of nano fluorine material.
9. A single crystal flower basket for rapid texture surface making, comprising two side plates (7) which are arranged oppositely in parallel and a blade inserting rod which spans between the two side plates (7), wherein the blade inserting rod is the blade inserting rod as claimed in any one of claims 1 to 8.
10. The single crystal basket for rapid texture etching according to claim 9, wherein the blade bars comprise a lower blade bar (8), a side blade bar (9) and an upper blade bar (10);
the lower inserting piece rod (8) spans the bottoms of the two side plates (7) in a plurality of parallel coplanar modes;
the side inserting piece rod (9) crosses the front side end or the rear side end of the two side plates (7);
the upper inserting piece rod (10) is transverse to the tops of the two side plates (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910880611.2A CN110600411A (en) | 2019-09-18 | 2019-09-18 | Single crystal flower basket for rapid texturing and inserting piece rod thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910880611.2A CN110600411A (en) | 2019-09-18 | 2019-09-18 | Single crystal flower basket for rapid texturing and inserting piece rod thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110600411A true CN110600411A (en) | 2019-12-20 |
Family
ID=68860570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910880611.2A Pending CN110600411A (en) | 2019-09-18 | 2019-09-18 | Single crystal flower basket for rapid texturing and inserting piece rod thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110600411A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2833883Y (en) * | 2005-11-08 | 2006-11-01 | 深圳市捷佳创精密设备有限公司 | Silicon wafer basket |
| CN101632163A (en) * | 2006-12-21 | 2010-01-20 | 朗姆研究公司 | Hybrid composite wafer carrier for wet clean equipment |
| KR20110090101A (en) * | 2010-02-02 | 2011-08-10 | (주)상아프론테크 | Cassette for receiving thin plate |
| CN102176422A (en) * | 2011-03-23 | 2011-09-07 | 北京市塑料研究所 | Flower basket for bearing high-capacity square silicon pieces and manufacturing method thereof |
| CN103165498A (en) * | 2012-07-27 | 2013-06-19 | 北京市塑料研究所 | Manufacturing method of silicon slice load receptor |
| CN108321220A (en) * | 2017-12-28 | 2018-07-24 | 江苏浠吉尔装备科技有限公司 | A kind of monocrystalline making herbs into wool cleaning |
| CN108346714A (en) * | 2017-12-28 | 2018-07-31 | 江苏浠吉尔装备科技有限公司 | A kind of monocrystalline etching cleaning machine |
| CN207765470U (en) * | 2017-11-17 | 2018-08-24 | 太极能源科技（昆山）有限公司 | A kind of slot type silicon wafer wool making board carrier |
| CN208028032U (en) * | 2017-11-17 | 2018-10-30 | 太极能源科技（昆山）有限公司 | A kind of making herbs into wool carrier of single crystal battery piece |
| CN110176421A (en) * | 2018-11-07 | 2019-08-27 | 北京市塑料研究所 | A kind of hydrophobic quick-dry type silicon wafer carrier and preparation method thereof |
-
2019
- 2019-09-18 CN CN201910880611.2A patent/CN110600411A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2833883Y (en) * | 2005-11-08 | 2006-11-01 | 深圳市捷佳创精密设备有限公司 | Silicon wafer basket |
| CN101632163A (en) * | 2006-12-21 | 2010-01-20 | 朗姆研究公司 | Hybrid composite wafer carrier for wet clean equipment |
| KR20110090101A (en) * | 2010-02-02 | 2011-08-10 | (주)상아프론테크 | Cassette for receiving thin plate |
| CN102176422A (en) * | 2011-03-23 | 2011-09-07 | 北京市塑料研究所 | Flower basket for bearing high-capacity square silicon pieces and manufacturing method thereof |
| CN103165498A (en) * | 2012-07-27 | 2013-06-19 | 北京市塑料研究所 | Manufacturing method of silicon slice load receptor |
| CN207765470U (en) * | 2017-11-17 | 2018-08-24 | 太极能源科技（昆山）有限公司 | A kind of slot type silicon wafer wool making board carrier |
| CN208028032U (en) * | 2017-11-17 | 2018-10-30 | 太极能源科技（昆山）有限公司 | A kind of making herbs into wool carrier of single crystal battery piece |
| CN108321220A (en) * | 2017-12-28 | 2018-07-24 | 江苏浠吉尔装备科技有限公司 | A kind of monocrystalline making herbs into wool cleaning |
| CN108346714A (en) * | 2017-12-28 | 2018-07-31 | 江苏浠吉尔装备科技有限公司 | A kind of monocrystalline etching cleaning machine |
| CN110176421A (en) * | 2018-11-07 | 2019-08-27 | 北京市塑料研究所 | A kind of hydrophobic quick-dry type silicon wafer carrier and preparation method thereof |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191220 |
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| RJ01 | Rejection of invention patent application after publication |