CN110596914B - Array waveguide grating with adjustable wavelength and bandwidth and adjusting method thereof - Google Patents
Array waveguide grating with adjustable wavelength and bandwidth and adjusting method thereof Download PDFInfo
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Abstract
The invention relates to the technical field of optical communication, in particular to an arrayed waveguide grating with adjustable wavelength and bandwidth and an adjusting method thereof, wherein the arrayed waveguide grating comprises an input waveguide region, a first slab waveguide region, an arrayed waveguide region, a second slab waveguide region and an output waveguide region which are sequentially connected; the optical signal enters from the input waveguide and is transmitted to the first slab waveguide, then is transmitted to a plurality of waveguides in the array waveguide region, and then is transmitted to the second slab waveguide to be diffracted and interfered, and finally is output from a plurality of output waveguides; each waveguide in the arrayed waveguide region is provided with a heating electrode for changing the temperature of the corresponding waveguide, so as to change the effective refractive index of the corresponding waveguide, and change the wavelength and bandwidth output by the arrayed waveguide grating. The invention makes the wavelength and bandwidth of the array waveguide grating adjustable by the arrangement of the heating electrode, has simple structure and easy control, and can meet the use requirement of a DWDM system.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of optical communication, in particular to an array waveguide grating with adjustable wavelength and bandwidth and an adjusting method thereof.
[ background of the invention ]
A Dense Wavelength Division Multiplexing (DWDM) system is a common optical layer networking system, and implements multi-channel signal transmission by Multiplexing and demultiplexing. An Arrayed Waveguide Grating (AWG) based on a Planar Lightwave Circuit (PLC) technology is an important device for realizing multiplexing/demultiplexing in a DWDM system, and the method includes depositing a silicon dioxide film on a silicon wafer, and then fabricating the AWG by using a photolithography process and a reactive ion etching method. Compared with Fiber Bragg Gratings (FBGs) and Thin Film Filters (TFFs), the AWG has the advantages of high integration level, large number of wavelength channels, small channel interval, no need of optical isolators, easiness in batch automatic production and the like.
With the rapid growth of communication services and the diversity and uncertainty of data services, operators put higher demands on the flexibility of network topology. Conventional DWDM systems are typically fixed bandwidth and have become increasingly unable to meet market traffic demands with respect to networking flexibility and dynamic allocation capabilities. The arrayed waveguide grating AWG is used as a key transmission unit in a DWDM system, and an arrayed waveguide grating with adjustable bandwidth and wavelength is urgently needed at present in order to meet the higher use requirement of the DWDM system.
In view of the above, it is an urgent problem in the art to overcome the above-mentioned drawbacks of the prior art.
[ summary of the invention ]
The technical problems to be solved by the invention are as follows:
the arrayed waveguide grating is a key transmission unit in a DWDM system, and the networking flexibility and the dynamic allocation capacity of the traditional DWDM system with fixed bandwidth cannot meet the requirements of market communication services, so that the arrayed waveguide grating with adjustable bandwidth and wavelength is urgently needed at present.
The invention achieves the above purpose by the following technical scheme:
in a first aspect, the present invention provides an arrayed waveguide grating with adjustable wavelength and bandwidth, which includes an input waveguide region 1, a first slab waveguide region 2, an arrayed waveguide region 3, a second slab waveguide region 4, and an output waveguide region 5, which are connected in sequence;
after entering from the input waveguide 11 of the input waveguide region 1 and being transmitted to the first slab waveguide region 2, the optical signal is uniformly transmitted to the plurality of waveguides 30 of the array waveguide region 3, and then is transmitted to the second slab waveguide region 4 to be diffracted and interfered, and the wavelength of each interference enhancement is output from the plurality of output waveguides 51 of the output waveguide region 5;
each waveguide 30 of the arrayed waveguide region 3 is provided with a heating electrode 6, and the heating electrodes are used for controlling and changing the temperature of the corresponding waveguide 30 in an electrode heating mode, so that the effective refractive index of the corresponding waveguide 30 is changed, and the wavelength and the bandwidth output by the arrayed waveguide grating are changed.
Preferably, when wavelength modulation is performed, the temperature of the plurality of waveguides 30 is controlled by the heating electrode 6 to synchronously change, so that the wavelength output by the arrayed waveguide grating changes; wherein the central wavelength of the arrayed waveguide grating changes by d lambda 0 The following relation is satisfied with the temperature change dT:
wherein alpha is si Is the coefficient of thermal expansion, n, of the waveguide 30 c Is the effective refractive index, λ, of the waveguide 30 0 Is the central wavelength of the arrayed waveguide grating.
Preferably, the plurality of waveguides 30 of the arrayed waveguide region 3 are divided into the same plurality of groups according to the arrangement sequence, and each group includes N adjacent waveguides 30; wherein N is more than or equal to 2;
when the bandwidth is adjusted, the heating electrode 6 controls the temperature of the N waveguides 30 in each group to be different, and the temperature of the ith waveguide 30 in different groups is the same; wherein i is more than or equal to 1 and less than or equal to N;
when the temperature difference between the N waveguides 30 in each group is controlled to change through the heating electrode 6, the output bandwidth of the arrayed waveguide grating changes.
Preferably, the N waveguides 30 in each group have different temperatures while the ith waveguide 30 in different groups has the same temperature when bandwidth adjustment is performed, so that the arrayed waveguide grating is equivalent to N sub-AWGs; the larger the N value is, the larger the bandwidth adjustable range of the arrayed waveguide grating is.
Preferably, when N is 2, the N waveguides 30 in each group include adjacent first and second waveguides 31 and 32;
the first waveguide 31 and the second waveguide 32 have different temperatures and thus different effective refractive indices under the control of the corresponding heating electrodes 6; the temperature difference between the first waveguide 31 and the second waveguide 32 is adjusted by the heating electrode 6, so that the output bandwidth of the arrayed waveguide grating is changed.
Preferably, the bandwidth Δ λ of the output of the arrayed waveguide grating satisfies the following relationship:
where δ n represents a difference in effective refractive index between the first waveguide 31 and the second waveguide 32, Δ L represents a difference in length between the first waveguide 31 and the second waveguide 32, and m represents a diffraction order.
Preferably, when N is 3, the N waveguides 30 in each group include a first waveguide 31, a second waveguide 32 and a third waveguide 33 which are adjacent in sequence;
the first waveguide 31, the second waveguide 32 and the third waveguide 33 have different temperatures and thus different effective refractive indices under the control of the corresponding heating electrodes 6;
the temperature difference between the first waveguide 31 and the second waveguide 32 and the temperature difference between the second waveguide 32 and the third waveguide 33 are adjusted through the heating electrode 6, so that the bandwidth of the output of the arrayed waveguide grating is changed.
Preferably, in the arrayed waveguide region 3, the optical lengths of the plurality of waveguides 30 decrease or increase sequentially in the order of arrangement, and each two adjacent waveguides 30 have the same length difference.
Preferably, the plurality of waveguides 30 of the arrayed waveguide region 3 are made of silicon dioxide or silicon material.
In a second aspect, the present invention provides a method for adjusting an arrayed waveguide grating with adjustable wavelength and bandwidth, where the method for adjusting an arrayed waveguide grating according to the first aspect is adopted, and the method for adjusting an arrayed waveguide grating includes:
the temperature of a plurality of waveguides 30 in the arrayed waveguide region 3 is controlled to synchronously change through the heating electrode 6, so that the wavelength output by the arrayed waveguide grating is changed;
the temperature difference of each group of adjacent N waveguides 30 is controlled by the heating electrode 6, and the output bandwidth of the arrayed waveguide grating is changed by adjusting the temperature difference among the N waveguides 30.
The invention has the beneficial effects that:
in the arrayed waveguide grating provided by the invention, each waveguide in the arrayed waveguide region is provided with the heating electrode, the temperature of the corresponding waveguide can be changed through the heating electrode, the effective refractive index of the corresponding waveguide is further changed through a photoelectric effect, and finally the wavelength and the bandwidth output by the arrayed waveguide grating are changed. The heating electrode is arranged, so that the wavelength and the bandwidth of the arrayed waveguide grating can be adjusted, the structure is simple, the control is easy, and the market communication service requirement of a DWDM system can be met.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic structural diagram of an arrayed waveguide grating with tunable wavelength and bandwidth according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another wavelength and bandwidth tunable arrayed waveguide grating provided by an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an arrayed waveguide grating with adjustable wavelength and bandwidth according to an embodiment of the present invention (N ═ 2);
fig. 4 is a schematic structural diagram of an arrayed waveguide grating with adjustable wavelength and bandwidth according to an embodiment of the present invention (N ═ 3);
FIG. 5 is a graph of the center wavelength spectrum for electrode temperatures of 20 deg.C and 30 deg.C, respectively, according to an embodiment of the present invention;
fig. 6 is a spectrum chart of the electrode temperature difference Δ T ═ 0 ℃ and Δ T ═ 10 ℃ respectively according to the example of the present invention;
FIG. 7 shows an example of an electrode temperature difference Δ T 12 ＝ΔT 23 Spectrogram at 10 ℃;
fig. 8 is a flowchart of a method for adjusting the wavelength and the bandwidth of an arrayed waveguide grating according to an embodiment of the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, the terms "inside", "outside", "longitudinal", "lateral", "upper", "lower", "top", "bottom", "left", "right", "front", "rear", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention but do not require that the present invention must be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other. The invention will be described in detail below with reference to the figures and examples.
An embodiment of the present invention provides an arrayed waveguide grating with adjustable wavelength and bandwidth, as shown in fig. 1 and fig. 2, including an input waveguide region 1, a first slab waveguide region 2, an arrayed waveguide region 3, a second slab waveguide region 4, and an output waveguide region 5, which are connected in sequence. The input waveguide region 1 is provided with an input waveguide 11, the first slab waveguide region 2 is provided with a first slab waveguide 21, the array waveguide region 3 is provided with a plurality of waveguides 30 arranged in an array, the second slab waveguide region 4 is provided with a second slab waveguide 41, and the output waveguide region 5 is provided with a plurality of output waveguides 51.
The optical signal enters from the input waveguide 11 and is transmitted to the first slab waveguide 21, then the first slab waveguide 21 uniformly transmits the optical signal to the plurality of waveguides 30 of the arrayed waveguide region 3, the plurality of waveguides 30 continue to transmit the optical signal to the second slab waveguide 41 for diffraction and interference, and finally, the wavelength of each interference enhancement is respectively output from the plurality of output waveguides 51. The optical lengths of the plurality of waveguides 30 are sequentially decreased or increased according to the arrangement order of the waveguides, and the same length difference Δ L is provided between every two adjacent waveguides 30, so that the optical signals generate corresponding phase differences after passing through the plurality of waveguides 30 of the arrayed waveguide region 3.
In order to realize adjustable wavelength and bandwidth, each waveguide 30 of the arrayed waveguide region 3 is provided with a heating electrode 6 for controlling and changing the temperature of the corresponding waveguide 30 in an electrode heating mode, and further, the effective refractive index of the corresponding waveguide 30 is changed due to the thermo-optic effect of the waveguide, so that the wavelength and bandwidth output by the arrayed waveguide grating are changed finally. The heating electrode 6 may be disposed at any position corresponding to the waveguide 30, as shown in fig. 1 and 2, and is not limited in detail.
In order to satisfy the requirement that the effective refractive index changes with the change of temperature, the plurality of waveguides 30 of the arrayed waveguide region 3 can be made of silicon dioxide or silicon material.
In the arrayed waveguide grating provided by the embodiment of the invention, each waveguide in the arrayed waveguide region is provided with the heating electrode, and the temperature of the corresponding waveguide can be changed through the heating electrode, so that the effective refractive index of the corresponding waveguide is changed, and finally, the wavelength and the bandwidth output by the arrayed waveguide grating are changed. The heating electrode is arranged, so that the wavelength and the bandwidth of the arrayed waveguide grating can be adjusted, the structure is simple, the control is easy, and the market communication service requirement of a DWDM system can be met.
In a first aspect, the embodiments of the present invention introduce the adjustment of the wavelength of the arrayed waveguide grating:
when wavelength adjustment is carried out, the heating electrode 6 controls the temperature of the plurality of waveguides 30 to synchronously change, further the effective refractive indexes of the plurality of waveguides 30 synchronously change due to the thermo-optic effect of the waveguides, and finally the wavelength output by the arrayed waveguide grating changes; in the adjusting process, the term "synchronously changing" means that the temperature changes of the plurality of waveguides 30 need to be kept consistent, that is, each waveguide 30 is adjusted to the same temperature value by the corresponding heating electrode 6.
Wherein the central wavelength of the arrayed waveguide grating varies by d lambda 0 The following relation is satisfied with the temperature change dT:
in the above formula (1), α si Is the coefficient of thermal expansion, n, of the waveguide 30 c Is the effective refractive index, λ, of the waveguide 30 0 Is the wavelength input from the central input waveguide and output from the central output waveguide, i.e. the central wavelength of the arrayed waveguide grating. Therefore, the wavelength of the arrayed waveguide grating can be adjusted by adjusting the temperature of the plurality of waveguides 30 to be synchronously changed through the heating electrode 6.
In a specific embodiment, in the case where each heating electrode 6 is not heated, the effective refractive index of the arrayed waveguide is 1.451, the effective refractive index of the first slab waveguide 21 and the second slab waveguide 41 is 1.455, the diffraction order is 53, the length difference between adjacent arrayed waveguides is 56.6 μm, the distance between adjacent arrayed waveguides is 13.8 μm, the center wavelength of the arrayed waveguide grating is 1550.1nm, the waveguide length of the first slab waveguide 21 and the second slab waveguide 41 is 16.3mm, and the output waveguide distance is 17.2 μm. When the temperature of each waveguide 30 is respectively 20 ℃ and 30 ℃ through each heating electrode 6, the central wavelength spectrum of the arrayed waveguide grating obtained through simulation is shown in fig. 5. Therefore, when the temperature of the arrayed waveguide is different, the wavelength of the arrayed waveguide grating is different, and wavelength adjustment is achieved.
In a second aspect, the embodiments of the present invention introduce the adjustment of the bandwidth of the arrayed waveguide grating:
the plurality of waveguides 30 of the arrayed waveguide region 3 are divided into the same multiple groups according to the arrangement sequence, and each group comprises N adjacent waveguides 30; wherein N is more than or equal to 2. When the bandwidth is adjusted, the heating electrode 6 controls the temperature of the N waveguides 30 in each group to be different (so that the effective refractive indexes of the N waveguides 30 are different), and the temperature of the ith waveguide 30 in different groups is the same; wherein i is more than or equal to 1 and less than or equal to N. When the heating electrode 6 controls the temperature difference between the N waveguides 30 in each group to change, the difference of the effective refractive indexes between the N waveguides 30 changes due to the thermo-optic effect of the waveguides, and finally the bandwidth output by the arrayed waveguide grating changes.
When grouped, the N waveguides 30 in each group have different temperatures, and the ith waveguide 30 in different groups has the same temperature, so that the arrayed waveguide grating is equivalent to N sub-AWGs; the larger the N value is, the larger the bandwidth adjustable range of the arrayed waveguide grating is. The bandwidth adjustment will be further explained by two specific examples.
Referring to fig. 3, in the first specific embodiment, when the waveguides are grouped, N is 2, that is, each group includes two waveguides, the two waveguides in each group include adjacent first waveguide 31 and second waveguide 32; the first waveguide 31 may also be referred to as an odd waveguide, and the second waveguide 32 may also be referred to as an even waveguide, i.e., the plurality of waveguides are divided into two types, i.e., an odd waveguide and an even waveguide.
The first waveguide 31 and the second waveguide 32 have different temperatures and thus different effective refractive indices under the control of the corresponding heating electrodes 6; it should be noted that, although the temperatures of the adjacent first waveguides 31 and the second waveguides 32 are different, the temperature of each first waveguide 31 is the same and the temperature of each second waveguide 32 is the same in the arrayed waveguide region 3. In this way, an equivalent sub AWG is composed of the input waveguide 11, the first slab waveguide 21, the first waveguide 31, the second slab waveguide 41, and the output waveguide 51; another equivalent sub AWG is composed of the input waveguide 11, the first slab waveguide 21, the second waveguide 32, the second slab waveguide 41, and the output waveguide 51.
The effective refractive indexes of the array waveguides in the two sub AWGs are respectively recorded as n c And n c + δ n, i.e., δ n, represents the difference in effective refractive index between the first waveguide 31 and the second waveguide 32, the grating equations for the two sub-AWGs can be expressed as:
in the above formulae (2) and (3), n s 、n c Respectively the effective refractive index of the slab waveguide and the effective refractive index of the arrayed waveguide, d 0 Is the distance between adjacent arrayed waveguides, Δ L is the length difference between adjacent arrayed waveguides, Δ x i 、Δx o Respectively an input waveguide spacing and an output waveguide spacing, L f M is the diffraction order, and lambda' respectively represent the output wavelengths of the two sub-AWGs.
When an optical signal is input from the central input waveguide and output from the central output waveguide, there are:
n c ΔL＝mλ 0 (4)
(n c +δn)ΔL＝mλ 0 ' (5)
in the above formulas (4), (5), λ 0 、λ 0 ' denotes the center wavelengths of the two sub-AWGs, respectively. Let Δ λ be λ 0 '-λ 0 Then, combining the above equations (4) and (5), it can be known that the bandwidth Δ λ of the output of the arrayed waveguide grating satisfies the following relationship:
from the formulas (4) and (5), the original arrayed waveguide grating equivalent to two sub-AWGs has two diffraction main maximum wavelengths corresponding to the same diffraction order, namely, two diffraction peaks exist near the main maximum wavelengths in the transmission spectrum, and the overlapping effect of the two diffraction peaks widens the bandwidth of the original AWG. As can be seen from equation (6), the distance between the two diffraction peaks can be changed by controlling the magnitude of δ n, thereby playing a role in adjusting the bandwidth. That is, by adjusting the magnitude of the temperature difference between the first waveguide 31 and the second waveguide 32 by the heating electrode 6, the magnitude of the difference δ n in effective refractive index between the two waveguides can be adjusted, so that the bandwidth Δ λ of the output of the arrayed waveguide grating changes.
In this embodiment, when each heating electrode 6 is not heated, the effective refractive index of the arrayed waveguide is 1.451, the effective refractive indices of the first slab waveguide 21 and the second slab waveguide 41 are 1.455, the number of diffraction orders is 53, the length difference between adjacent arrayed waveguides is 56.6 μm, the distance between adjacent arrayed waveguides is 13.8 μm, the center wavelength of the arrayed waveguide grating is 1550.1nm, the waveguide length of the first slab waveguide 21 and the second slab waveguide 41 is 16.3mm, and the output waveguide distance is 17.2 μm, and at this time, the wavelength interval of the AWG is 0.8nm (i.e., 100 GHz).
In the case where each heating electrode 6 is not heated, the electrode temperature difference Δ T between the first waveguide 31 and the second waveguide 32 is 0 ℃, and the 3dB bandwidth of the spectrum is 0.373; when the electrode temperature difference Δ T between the first waveguide 31 and the second waveguide 32 is 10 ℃ by the control action of the corresponding heating electrode 6, the corresponding 3dB bandwidth is 0.587, and the simulated spectrum of the arrayed waveguide grating is as shown in fig. 6. Therefore, when the temperature difference between the first waveguide 31 and the second waveguide 32 is different, the bandwidth of the arrayed waveguide grating is different, so that the bandwidth can be adjusted by controlling the temperature difference.
With continued reference to fig. 4, in a second specific embodiment, when the waveguides are grouped, N is 3, that is, each group includes 3 waveguides, and the 3 waveguides in each group include a first waveguide 31, a second waveguide 32, and a third waveguide 33 which are adjacent to each other in sequence.
The first waveguide 31, the second waveguide 32 and the third waveguide 33 have different temperatures and thus different effective refractive indices under the control of the corresponding heating electrodes 6; it is to be noted that, although the temperatures of the adjacent first waveguide 31, second waveguide 32, and third waveguide 33 are different, in the arrayed waveguide region 3, the temperature of each first waveguide 31 is the same, the temperature of each second waveguide 32 is the same, and the temperature of each third waveguide 33 is the same. In this way, an equivalent sub AWG is composed of the input waveguide 11, the first slab waveguide 21, the first waveguide 31, the second slab waveguide 41, and the output waveguide 51; another equivalent sub AWG is composed of the input waveguide 11, the first slab waveguide 21, the second waveguide 32, the second slab waveguide 41, and the output waveguide 51; a third equivalent sub AWG is composed of the input waveguide 11, the first slab waveguide 21, the third waveguide 33, the second slab waveguide 41, and the output waveguide 51.
In this embodiment, when each heating electrode 6 is not heated, the effective refractive index of the arrayed waveguide is 1.451, the effective refractive indices of the first slab waveguide 21 and the second slab waveguide 41 are 1.455, the number of diffraction orders is 53, the length difference between adjacent arrayed waveguides is 56.6 μm, the distance between adjacent arrayed waveguides is 13.8 μm, the center wavelength of the arrayed waveguide grating is 1550.1nm, the waveguide length of the first slab waveguide 21 and the second slab waveguide 41 is 16.3mm, and the output waveguide distance is 17.2 μm, and at this time, the wavelength interval of the AWG is 0.8nm (i.e., 100 GHz).
When each heating electrode 6 is not heated, the electrode temperature difference Δ T between the first waveguide 31 and the second waveguide 32 is 0 ℃, and the 3dB bandwidth of the spectrum is 0.373; when the electrode temperature difference Δ T between the first waveguide 31 and the second waveguide 32 is 10 ℃ by heating of the corresponding heating electrode 6, the corresponding 3dB bandwidth is 0.587 (i.e., corresponding to the first embodiment described above); when heated by the corresponding heating electrode 6, the electrode temperature difference Delta T between the first waveguide 31 and the second waveguide 32 is caused 12 10 ℃, the difference in electrode temperature Δ T between the second waveguide 32 and the third waveguide 33 23 10 ℃, the difference in electrode temperature between the first waveguide 31 and the third waveguide 33ΔT 13 The 3dB bandwidth is 0.93nm at 20 ℃, and the simulated spectrum of the arrayed waveguide grating is shown in fig. 7.
Therefore, the bandwidth of the output of the arrayed waveguide grating can be changed by adjusting the temperature difference between the first waveguide 31 and the second waveguide 32 and the temperature difference between the second waveguide 32 and the third waveguide 33 through the heating electrode 6. Moreover, as compared with the case where N is 2 in the first embodiment, the larger the value of N, the larger the bandwidth tunable range of the arrayed waveguide grating.
In view of the wavelength and bandwidth adjustable arrayed waveguide grating provided in the foregoing embodiments, an embodiment of the present invention further provides a wavelength and bandwidth adjusting method, which is specifically implemented by using the foregoing arrayed waveguide grating, and as shown in fig. 8, the adjusting method specifically includes:
in step 201, the temperature of the plurality of waveguides 30 in the arrayed waveguide region 3 is controlled to change synchronously by the heating electrode 6, so that the wavelength output by the arrayed waveguide grating changes.
The step is mainly directed to the adjustment of the wavelength, and it should be noted that the temperature of each waveguide 30 needs to be kept "synchronously changed" in the adjustment process, that is, the electrode temperature of each heating electrode 6 is consistent, so that the effective refractive index of each waveguide 30 keeps "synchronously changed", and finally the wavelength is changed. Wherein, the central wavelength variation and the temperature variation of the arrayed waveguide grating satisfy the formula (1), which is not described herein again.
This step is mainly directed to the adjustment of the bandwidth, and it should be noted that although the temperature of the N waveguides 30 in each group is different, the temperature of the ith waveguide 30 in different groups is the same, so that the arrayed waveguide grating can be equivalent to N sub-AWGs. When N is 2, the bandwidth of the arrayed waveguide grating satisfies equation (6), and the difference δ N of the effective refractive index can be changed by adjusting the temperature difference between the odd number waveguide and the even number waveguide, so that the bandwidth of the arrayed waveguide grating is changed. When N is 3, the bandwidth of the arrayed waveguide grating is changed by adjusting the temperature difference among the three waveguides, and the adjustable range of the bandwidth is larger than that when N is 2; reference may be made to the related descriptions in the above embodiments, which are not repeated herein.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. An arrayed waveguide grating with adjustable wavelength and bandwidth is characterized by comprising an input waveguide region (1), a first slab waveguide region (2), an arrayed waveguide region (3), a second slab waveguide region (4) and an output waveguide region (5) which are sequentially connected;
after entering from an input waveguide (11) of the input waveguide region (1) and being conveyed to a first slab waveguide region (2), optical signals are uniformly conveyed to a plurality of waveguides (30) of the array waveguide region (3) and then conveyed to the second slab waveguide region (4) to be diffracted and interfered, and the wavelength of each interference enhancement is respectively output from a plurality of output waveguides (51) of the output waveguide region (5);
each waveguide (30) of the array waveguide region (3) is provided with a heating electrode (6) which is used for controlling and changing the temperature of the corresponding waveguide (30) in an electrode heating mode so as to change the effective refractive index of the corresponding waveguide (30) and change the wavelength and the bandwidth output by the array waveguide grating;
the plurality of waveguides (30) of the arrayed waveguide region (3) are divided into the same multiple groups according to the arrangement sequence, and each group comprises N adjacent waveguides (30); wherein N is more than or equal to 2;
controlling the temperature of the N waveguides (30) in each group to be different through the heating electrode (6) when the bandwidth is adjusted, and controlling the temperature of the ith waveguide (30) in different groups to be the same; wherein i is more than or equal to 1 and less than or equal to N;
when the temperature difference between the N waveguides (30) in each group is controlled to change through the heating electrode (6), the output bandwidth of the arrayed waveguide grating changes.
2. The wavelength and bandwidth tunable arrayed waveguide grating according to claim 1, wherein the temperature of the plurality of waveguides (30) is controlled by the heating electrode (6) to change synchronously during wavelength tuning, so that the wavelength output by the arrayed waveguide grating changes; wherein the central wavelength of the arrayed waveguide grating varies by d lambda 0 The following relation is satisfied with the temperature change dT:
wherein alpha is si Is the coefficient of thermal expansion, n, of the waveguide (30) c Is the effective refractive index, lambda, of the waveguide (30) 0 Is the central wavelength of the arrayed waveguide grating.
3. The wavelength and bandwidth tunable arrayed waveguide grating of claim 1, wherein the N waveguides (30) in each group have different temperatures while the ith waveguide (30) in different groups has the same temperature when performing bandwidth tuning, such that the arrayed waveguide grating is equivalent to N sub-AWGs; the larger the N value is, the larger the bandwidth adjustable range of the arrayed waveguide grating is.
4. The wavelength and bandwidth tunable arrayed waveguide grating of claim 1, wherein when N-2, the N waveguides (30) in each group comprise adjacent first (31) and second (32) waveguides;
-said first waveguide (31) and said second waveguide (32) have different temperatures, and therefore different effective refractive indices, under the control of the corresponding heating electrode (6); the temperature difference between the first waveguide (31) and the second waveguide (32) is adjusted through the heating electrode (6), so that the bandwidth of the output of the arrayed waveguide grating is changed.
5. The wavelength and bandwidth tunable arrayed waveguide grating of claim 4, wherein the output bandwidth Δ λ of the arrayed waveguide grating satisfies the following relation:
wherein δ n represents a difference in effective refractive index between the first waveguide (31) and the second waveguide (32), Δ L represents a difference in length between the first waveguide (31) and the second waveguide (32), and m represents a diffraction order.
6. The arrayed waveguide grating of claim 1, wherein when N is 3, the N waveguides (30) in each group comprise a first waveguide (31), a second waveguide (32) and a third waveguide (33) which are adjacent in sequence;
-the first waveguide (31), the second waveguide (32) and the third waveguide (33) have different temperatures, and thus different effective refractive indices, under the control of the corresponding heating electrode (6);
the temperature difference between the first waveguide (31) and the second waveguide (32) and the temperature difference between the second waveguide (32) and the third waveguide (33) are adjusted through the heating electrode (6), so that the bandwidth of the output of the arrayed waveguide grating is changed.
7. The wavelength and bandwidth tunable arrayed waveguide grating of any one of claims 1 to 6, wherein the optical lengths of the plurality of waveguides (30) in the arrayed waveguide region (3) are sequentially decreased or increased in the order of arrangement, and the same length difference is provided between every two adjacent waveguides (30).
8. The wavelength and bandwidth tunable arrayed waveguide grating of any one of claims 1 to 6, wherein the plurality of waveguides (30) of the arrayed waveguide region (3) are made of silicon dioxide or silicon material.
9. A method for tuning an arrayed waveguide grating with tunable wavelength and bandwidth, wherein the arrayed waveguide grating according to any one of claims 1 to 8 is used, the tuning method comprising:
controlling the synchronous temperature change of a plurality of waveguides (30) in the arrayed waveguide region (3) through the heating electrode (6), so that the wavelength output by the arrayed waveguide grating is changed;
the temperature difference of each group of adjacent N waveguides (30) is controlled by a heating electrode (6), and the output bandwidth of the arrayed waveguide grating is changed by adjusting the temperature difference among the N waveguides (30).
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| JPH10319445A (en) * | 1997-01-09 | 1998-12-04 | Nippon Telegr & Teleph Corp <Ntt> | Thermo-optic device |
| JP2000249993A (en) * | 1999-03-01 | 2000-09-14 | Nippon Telegr & Teleph Corp <Ntt> | Array optical waveguide thermooptical phase shifter, array optical waveguide grating wavelength variable filter and array optical waveguide optical switch |
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| US20050063631A1 (en) * | 2003-09-24 | 2005-03-24 | Junnarkar Mahesh R. | Temperature tuned arrayed waveguide grating |
| ES2398113B1 (en) * | 2011-05-11 | 2014-01-27 | Universidad Politécnica De Valencia | AWG DEVICE (Arrayed Waveguide Grating) FOR MULTIPLEXATION AND DEMULTIPLEXATION OF TUNING SIGNALS AND TUNING METHOD OF SUCH DEVICE |
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| JPH10319445A (en) * | 1997-01-09 | 1998-12-04 | Nippon Telegr & Teleph Corp <Ntt> | Thermo-optic device |
| JP2000249993A (en) * | 1999-03-01 | 2000-09-14 | Nippon Telegr & Teleph Corp <Ntt> | Array optical waveguide thermooptical phase shifter, array optical waveguide grating wavelength variable filter and array optical waveguide optical switch |
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