CN110596620B - Magnetic field generating device for magneto-optical Kerr measuring instrument - Google Patents
Magnetic field generating device for magneto-optical Kerr measuring instrument Download PDFInfo
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- CN110596620B CN110596620B CN201910966222.1A CN201910966222A CN110596620B CN 110596620 B CN110596620 B CN 110596620B CN 201910966222 A CN201910966222 A CN 201910966222A CN 110596620 B CN110596620 B CN 110596620B
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 288
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 238000003384 imaging method Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000005293 ferrimagnetic effect Effects 0.000 claims description 5
- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000012360 testing method Methods 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000005374 Kerr effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
- G01R33/0325—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect using the Kerr effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
The invention proposes a magnetic field generating device for a magneto-optical kerr measuring instrument, comprising: the magnetic pole comprises at least one magnetic pole, a magnetic conduction plate, at least one magnetic conduction column, a magnetic conduction base, an exciting coil and an exciting coil power supply unit, wherein one end of the magnetic pole is fixed on the magnetic conduction base, the magnetic conduction plate is arranged above the other end of the magnetic pole, one end of the magnetic conduction column is fixed with the magnetic conduction base, the other end of the magnetic conduction column is fixed with the magnetic conduction plate, the exciting coil is wound on the surface of the magnetic pole, and the exciting coil power supply unit is connected with the exciting coil and supplies current for the exciting coil. The invention reduces the loss of magnetic potential through the magnetic conduction effect of the magnetic conduction plate, the magnetic conduction column, the magnetic pole and the like, thereby allowing a larger magnetic field to be applied to a sample, more than 1T can be achieved through the test, and the magnetic conduction plate is provided with a through hole which can allow light to pass, so that the light path can be arranged above the magnetic conduction plate, and the test requirement of a magneto-optical Kerr measurement system is met, namely, the magnetic field is parallel to the incident direction of the light.
Description
Technical field:
the invention belongs to the technical field of test and measurement, and particularly relates to a magnetic field generating device for a magneto-optical Kerr measuring instrument.
The background technology is as follows:
The magneto-optical kerr measurement system refers to a system for optically characterizing the magnetization state of a magnetic sample by using the magneto-optical kerr effect. Applying a relatively uniform strong magnetic field around the test sample is a common test condition in magnetic sample testing. The electromagnet with iron core structure is a common device for generating uniform magnetic field. The iron core is a structure for magnetic conduction, in which a magnet structure contains magnetic elements such as cobalt, nickel, and iron. Common conventional electromagnets have one, two or three pairs of symmetrical poles with symmetrical field coils mounted adjacent the poles. In this structure, the magnetic field generated by a pair of magnetized poles is perpendicular to the pole faces of the poles, and the magnetic field strength is inversely proportional to the distance from the opposite poles, and the magnetic field uniformity decreases with increasing pole distance. Therefore, in order to obtain a large and uniform magnetic field, the distance facing the poles should be as small as possible. The electromagnet of the above type is capable of generating a large magnetic field, but is faced with problems in magneto-optical measurement, such as the fact that when the magnetization state of a sample is measured by using the polar magneto-optical kerr effect, light is required to be incident from a direction perpendicular to the surface to be measured of the sample, and at the same time, a magnetic field perpendicular to the surface of the sample, that is, the magnetic field is required to be applied in parallel with the direction of incidence of the light. In this case, the surface to be measured of the sample needs to be parallel to the magnetic pole face. Due to the blocking effect of the magnetic pole on the light, it is difficult to obtain normally incident light to achieve a measurement of the polar magneto-optical kerr effect in this case. Although some solutions have been proposed to partially solve this problem. For example, FIG. 5 refers to a scheme (US Patent No.: US9348000B 1): the magnet has a pair of magnetic poles, 2 exciting coils are wound around the outer sides of the 2 magnetic poles, and holes are punched in one of the magnetic poles, so that incident and reflected light rays pass through the magnetic poles from the holes, and magneto-optical measurement is realized. However, in this structure, a space between the optical path element and the sample to be measured must be provided with a magnetic pole and an exciting coil, and therefore, the device is only suitable for an application device in which the optical path element is far away from the sample to be measured. For devices requiring optical path elements closer to the sample, the above solution is no longer applicable, for example, when using a magneto-optical kerr microscope for magneto-optical imaging of the sample, the microscope system needs to be equipped with an objective lens or a convex lens (group), and the distance between the sample and the objective lens or lens is small enough to accommodate the magnetic pole and the exciting coil to which the figure belongs, so that the above magnet system cannot be close to the sample with the magneto-optical kerr microscope or other measuring devices requiring optical elements.
The invention comprises the following steps:
In order to solve the problem that an electromagnet is not compatible with a magneto-optical Kerr test light path in space, the invention provides a magnetic field generating device for a magneto-optical Kerr measuring instrument. The electromagnet structure configuration provided by the invention can obtain a larger uniform magnetic field and simultaneously allows the optical element in the test light path to have a closer distance from the tested sample, so that the magneto-optical test requirement is met under a larger magnetic field.
A magnetic field generating device for a magneto-optical kerr measurement system, comprising: at least one magnetic pole, a magnetic conduction plate, at least one magnetic conduction column, a magnetic conduction base, an excitation coil and an excitation coil power supply unit;
One end of the magnetic pole is fixed on the magnetic conduction base, a magnetic conduction plate is arranged above the other end of the magnetic pole, one end of the magnetic conduction column is fixed with the magnetic conduction base, the other end of the magnetic conduction column is fixed with the magnetic conduction plate, the exciting coil is wound on the surface of the magnetic pole, and the exciting coil power supply unit is connected with the exciting coil and supplies current for the exciting coil;
The magnetic conduction plate is provided with a light transmission hole.
The magnetic pole and the magnetic conduction plate form a magnetic conduction passage through the magnetic conduction base and the magnetic conduction column.
The magnetic conducting column can be replaced by a magnetic conducting wall which is a cylindrical magnetic wall surrounding the magnetic poles.
The magnetic pole, the magnetic conduction plate, the magnetic conduction column and the magnetic conduction base are integrally processed, or the magnetic pole, the magnetic conduction plate, the magnetic conduction column and the magnetic conduction base are spliced;
the magnetic conduction post or the joint of the magnetic conduction post and the magnetic conduction plate is provided with a dismounting structure, so that the magnetic conduction plate can be dismounted from the magnetic conduction post.
The magnetic pole, the magnetic conduction plate, the magnetic conduction base and the magnetic conduction column are made of ferromagnetic or ferrimagnetic substances.
The thickness of the magnetic conductive plate is between 1mm and 10cm.
The outer surface of the magnetic conduction column or the magnetic conduction wall is wound by an exciting coil, and a power supply unit of the exciting coil supplies current to the exciting coil.
If the magnetic field generating device is used in combination with an imaging system with an objective lens, the thickness of the magnetic conduction plate at the position corresponding to the magnetic pole cannot exceed the focal length of the objective lens, wherein the objective lens is arranged above the light transmission hole of the magnetic field generating device.
The magnetic pole is columnar.
The beneficial technical effects are as follows:
the invention provides a magnetic field generating device for a magneto-optical Kerr measuring instrument. The loss of magnetic potential is reduced through the magnetic conduction effect of the magnetic conduction plate, the magnetic conduction column, the magnetic pole and the like, so that a larger magnetic field is allowed to be applied to the sample, and the test can be carried out to reach more than 1T. In addition, the magnetic conduction plate is provided with a through hole which can allow light to pass through, so that an optical path can be arranged above the magnetic conduction plate, and the test requirement of the magneto-optical Kerr measuring system is met, namely, the magnetic field is basically parallel to the incident direction of the light. The thickness of the magnetically permeable plate may be determined as desired. The thickness of the magnetic conduction plate is reduced to be within the focal length of the objective lens, and the magnet system can be used for optical microscope imaging.
Description of the drawings:
FIG. 1 is a front view of a magnetic field generating device for a magneto-optical Kerr measuring apparatus according to an embodiment of the present invention;
FIG. 2 is a front view of a magnetic field generating device for a magneto-optical Kerr apparatus according to an embodiment of the present invention;
FIG. 3 is a top view of a magnetic field generating device for use in a magneto-optical Kerr measurement apparatus according to an embodiment of the invention;
FIG. 4 is a front view of a magnetic field generating device for a magneto-optical Kerr measuring apparatus with an optical module according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a referencing scheme in the background;
In the figure: the device comprises a 1-magnetic pole, a 2-magnetic conduction base, a 3-magnetic conduction plate, a 4-exciting coil, a 5-magnetic conduction column, a 6-light-passing hole, a 7-exciting coil power supply unit, an 8-objective lens, a 9-light beam, 10-other optical modules, 11-dismounting interfaces, 12-samples and 13-sample stages.
The specific embodiment is as follows:
the present invention will be described in detail below with reference to the drawings and the detailed description. A magnetic field generating device for a magneto-optical kerr measuring instrument, as shown in fig. 1, comprising: at least one magnetic pole 1, a magnetic conduction plate 3, at least one magnetic conduction column 5, a magnetic conduction base 2, an exciting coil 4 and an exciting coil power supply unit 7;
One end of the magnetic pole 1 is fixed on the magnetic conduction base 2, a magnetic conduction plate 3 is arranged above the other end of the magnetic pole 1, one end of the magnetic conduction column 5 is fixed with the magnetic conduction base 2, the other end of the magnetic conduction column is fixed with the magnetic conduction plate 3, the exciting coil 4 is wound on the surface of the magnetic pole 1, and an exciting coil power supply unit 7 is connected with the exciting coil 4 and supplies current to the exciting coil 4;
the magnetic conduction plate 3 is provided with a light transmission hole 6. The sample 12 is aligned under the light-transmitting hole 6, a sample table 13 is arranged under the sample, the sample table 13 is fixed on the magnetic conduction base, and the material of the sample table is an insulating material, as shown in fig. 4, this is only one possibility, if the design of the magnetic conduction base is different, the sample table 13 can also be fixed on a test table under the magnetic conduction base, and the magnetic conduction base is also placed on the test table;
The magnetic pole 1 and the magnetic conduction plate 3 form a magnetic conduction passage through the magnetic conduction base 2 and the magnetic conduction column 5.
The magnetic conducting posts 5 can be replaced by magnetic conducting walls, which are cylindrical magnetic walls surrounding the poles.
The magnetic pole 1, the magnetic conduction plate 3, the magnetic conduction column 5 and the magnetic conduction base 2 are integrally processed, or the magnetic pole 1, the magnetic conduction plate 3, the magnetic conduction column 5 and the magnetic conduction base 2 are spliced;
the magnetic conductive column 5 or the joint of the magnetic conductive column 5 and the magnetic conductive plate 3 is provided with a dismounting structure, so that the magnetic conductive plate can be dismounted from the magnetic conductive column, as shown in fig. 2, the connecting port 11 is dismounted.
The magnetic pole, the magnetic conduction plate, the magnetic conduction base and the magnetic conduction column are made of ferromagnetic or ferrimagnetic substances.
The thickness of the magnetic conduction plate 3 is 1mm to 10cm.
The outer surface of the magnetic conduction column 5 or the magnetic conduction wall is wound by an exciting coil, and a power supply unit of the exciting coil supplies current to the exciting coil.
If the magnetic field generating device is used in combination with an imaging system with an objective lens 8, the thickness of the magnetic conductive plate 3 at the corresponding position of the magnetic pole 1 cannot exceed the focal length of the objective lens 8, wherein the objective lens 8 is arranged above the light passing hole 6 of the magnetic field generating device.
The magnetic pole 1 is columnar.
Wherein the magnetic pole 1 is columnar, and the material of the magnetic pole 1 is ferromagnetic or ferrimagnetic substance, including but not limited to metal, alloy or compound containing iron, cobalt and nickel; the thickness of the magnetic conduction plate 3 is between 1mm and 10cm, the shape is arbitrary, as shown in fig. 3 is one possible case, a light transmission hole 6 is reserved on the region of the magnetic conduction plate 3 opposite to the pole face of the magnetic pole 1, and the magnetic conduction plate 3 is made of magnetic metal, alloy or compound; the magnetic pole 1 and the magnetic conduction plate 3 are connected through structures such as the magnetic conduction base 2 and the magnetic conduction column 5 to form a magnetic conduction passage, so that the loss of magnetic potential is reduced, wherein the magnetic conduction base 2 and the magnetic conduction column 5 are made of ferromagnetic or ferrimagnetic substances, including but not limited to metals, alloys or compounds containing iron, cobalt and nickel; wherein the number of the magnetic conductive posts 5 is greater than or equal to 1.
FIG. 3 is a top view of a magnetic field generating device for use in a magneto-optical Kerr measurement apparatus according to an embodiment of the invention; fig. 3 shows a possible structure, in which only 4 magnetic conductive columns are shown, N magnetic conductive columns can be actually designed, N is greater than or equal to 1, and the shape of the magnetic conductive base is different according to the design of the magnetic conductive columns, so long as the magnetic pole 1, the magnetic conductive base 2, the magnetic conductive column 5 and the magnetic conductive plate 3 are communicated to form a magnetic path.
An exciting coil 4 is wound around the magnetic pole 1. The magnetic pole 5 may or may not be wound with the exciting coil 4.
It should be noted that the magnetic pole 1, the magnetic conduction base 2, the magnetic conduction column 5 and the magnetic conduction plate 3 may be made of the same material or different materials, may be formed by splicing, or may be formed by integral processing, and are all within the scope of the present invention.
The exciting coils 4 are formed by winding metal conductors, wherein at least 1 exciting coil 4 is arranged outside the magnetic pole 1; the exciting coil 4 may be arranged around the magnetic conductive column 5, or the exciting coil 4 may not be added. The shape of the magnetic pole 5 is not limited. As shown in fig. 2, a possible example of the connection of the magnetic conductive plate 3 and the magnetic conductive post 5 is shown. The main component of the exciting coil power supply unit is a direct current or alternating current power source, in order to supply current to the exciting coil 4.
In addition, a detachable structure 11 can be arranged at the magnetic conduction column 5 or the joint of the magnetic conduction column 5 and the magnetic conduction plate 3, as shown in fig. 2, and the magnetic conduction plate 3 can be conveniently removed. Under this configuration, the sample 12 is placed near the magnetic pole 1, and the invented device can still apply a magnetic field to the sample 12, and has the advantages that no blocking of the magnetic conduction plate 3 exists at this time, and the test light path module can be infinitely close to the sample; the disadvantage is that the magnetic field amplitude is reduced compared to the arrangement with the magnetic conducting plate 3.
The magnetic pole 1, the magnetic conduction base 2, the magnetic conduction column 5, the magnetic conduction plate 3 and other components are communicated to form a magnetic path. In operation, the exciting coil power supply unit 7 applies a current to the exciting coil 4, and after the exciting coil 4 generates a magnetic field, a magnetic flux is formed in a magnetic path formed by the magnetic pole 1, the magnetic conductive plate 3, the magnetic conductive post 5 and the magnetic conductive plate 3 being communicated, and a strong magnetic field is generated near the position of the space where the magnetic pole 1 and the magnetic conductive plate 3 are opposed, that is, the sample 12 shown in fig. 4. The optical module is arranged near the magnet, the detection light beam 9 can be incident to the sample 12 through the light through hole 6, and the reflected light returns to the optical detection module through the through hole 6, so that the invention can support optical test of the sample under high magnetic field. It should be noted that the thickness of the magnetic conductive plate 3 may be designed according to the requirement, for example, if the present magnet is used in combination with an imaging system with an objective lens 8 (i.e. other optical module 10 except the objective lens), the thickness of the magnetic conductive plate 3 at the corresponding position of the magnetic pole 1 should not exceed the focal length of the objective lens 8, so that the sample 12 may be placed at the focal point of the objective lens for imaging. The light emitted by the objective lens can penetrate through the through hole 6, and the light reflected by the sample returns to the objective lens through the through hole 6, so that imaging and optical testing are completed.
While the applicant has described and illustrated the examples of the present invention in detail with reference to the drawings of the specification, it should be understood by those skilled in the art that the above examples are only preferred embodiments of the present invention, and the detailed description is only for the purpose of helping the reader to better understand the spirit of the present invention, but not for limiting the scope of the present invention, but any improvements or modifications based on the spirit of the present invention should fall within the scope of the present invention.
Claims (8)
1. A magnetic field generating device for a magneto-optical kerr measurement apparatus, comprising: at least one magnetic pole, magnetic conduction board, at least one magnetic conduction post, magnetic conduction base, exciting coil and exciting coil power supply unit, its characterized in that:
One end of the magnetic pole is fixed on the magnetic conduction base, a magnetic conduction plate is arranged above the other end of the magnetic pole, one end of the magnetic conduction column is fixed with the magnetic conduction base, the other end of the magnetic conduction column is fixed with the magnetic conduction plate, the exciting coil is wound on the surface of the magnetic pole, and the exciting coil power supply unit is connected with the exciting coil and supplies current for the exciting coil;
The magnetic pole and the magnetic conduction plate form a magnetic conduction passage through the magnetic conduction base and the magnetic conduction column;
if the magnetic field generating device is matched with an imaging system with an objective lens, the thickness of the magnetic conduction plate at the position corresponding to the magnetic pole cannot exceed the focal length of the objective lens, wherein the objective lens is arranged above a light passing hole of the magnetic field generating device;
The magnetic conduction plate is provided with a light transmission hole.
2. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
the magnetic conducting column can be replaced by a magnetic conducting wall which is a cylindrical magnetic wall surrounding the magnetic poles.
3. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
The magnetic pole, the magnetic conduction plate, the magnetic conduction column and the magnetic conduction base are integrally processed, or the magnetic pole, the magnetic conduction plate, the magnetic conduction column and the magnetic conduction base are spliced and processed.
4. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
the magnetic conduction post or the joint of the magnetic conduction post and the magnetic conduction plate is provided with a dismounting structure, so that the magnetic conduction plate can be dismounted from the magnetic conduction post.
5. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
The magnetic pole, the magnetic conduction plate, the magnetic conduction base and the magnetic conduction column are all made of ferromagnetic or ferrimagnetic substances.
6. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
the thickness of the magnetic conductive plate is between 1mm and 10cm.
7. A magnetic field generating device for a magneto-optical kerr measuring instrument according to claim 1 or claim 2, characterized in that:
The outer surface of the magnetic conduction column or the magnetic conduction wall is wound by an exciting coil, and a power supply unit of the exciting coil supplies current to the exciting coil.
8. The magnetic field generating device for a magneto-optical kerr measurement apparatus according to claim 1, characterized in that:
The magnetic pole is columnar.
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CN203338893U (en) * | 2013-07-29 | 2013-12-11 | 张莫南 | Small microcell high magnetic field device |
CN211478627U (en) * | 2019-10-12 | 2020-09-11 | 致真精密仪器(青岛)有限公司 | Magnetic field generating device for magneto-optical Kerr measuring instrument |
CN217306238U (en) * | 2022-03-04 | 2022-08-26 | 北京航空航天大学 | Electromagnet structure capable of enhancing magnetic field |
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JP3194838B2 (en) * | 1994-08-10 | 2001-08-06 | アルプス電気株式会社 | Magnetic field measuring method and magnetic field measuring device |
US8283622B2 (en) * | 2007-08-13 | 2012-10-09 | Agency For Science, Technology And Research | Method and apparatus for testing magnetic properties of magnetic media |
JP5550141B2 (en) * | 2010-07-27 | 2014-07-16 | Fdk株式会社 | Magneto-optical defect detection method |
US9348000B1 (en) * | 2012-12-20 | 2016-05-24 | Seagate Technology Llc | Magneto optic kerr effect magnetometer for ultra-high anisotropy magnetic measurements |
KR20160086463A (en) * | 2015-01-09 | 2016-07-20 | 서울대학교산학협력단 | Optical measurement of perpendicular magnetic anisotropy field of nano structure thin films by using of perpendicular magneto optical kerr effect (moke) microscope |
US10161856B1 (en) * | 2018-01-19 | 2018-12-25 | Ping-Chieh Wu | Magneto-optical bio-detection devices having high sensitivity |
US11037611B2 (en) * | 2018-03-23 | 2021-06-15 | Samsung Electronics Co., Ltd. | Magnetic property measuring systems, methods for measuring magnetic properties, and methods for manufacturing magnetic memory devices using the same |
CN109830356A (en) * | 2019-03-20 | 2019-05-31 | 中国科学技术大学 | A kind of magnet arrangement for magneto-optic measuring system |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN203338893U (en) * | 2013-07-29 | 2013-12-11 | 张莫南 | Small microcell high magnetic field device |
CN211478627U (en) * | 2019-10-12 | 2020-09-11 | 致真精密仪器(青岛)有限公司 | Magnetic field generating device for magneto-optical Kerr measuring instrument |
CN217306238U (en) * | 2022-03-04 | 2022-08-26 | 北京航空航天大学 | Electromagnet structure capable of enhancing magnetic field |
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