CN110592680A - Monocrystalline silicon corrosion cleaning device and corrosion cleaning method - Google Patents
Monocrystalline silicon corrosion cleaning device and corrosion cleaning method Download PDFInfo
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- CN110592680A CN110592680A CN201910851397.8A CN201910851397A CN110592680A CN 110592680 A CN110592680 A CN 110592680A CN 201910851397 A CN201910851397 A CN 201910851397A CN 110592680 A CN110592680 A CN 110592680A
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- monocrystalline silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/10—Etching in solutions or melts
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
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- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a monocrystalline silicon corrosion cleaning device and a corrosion cleaning method, and the structure of the monocrystalline silicon corrosion cleaning device comprises a cleaning box, wherein a driving motor, a fixed box, a sealing door body, a liquid placing box and a liquid discharging valve are arranged outside the cleaning box, the driving motor is connected with the right end of the cleaning box through a rivet, the fixed box is connected with the left end of the cleaning box through a rivet, the sealing door body is movably connected right in front of the cleaning box, the liquid placing box is connected with the upper end of the cleaning box through a rivet, the liquid discharging valve is connected with the middle of the bottom of the cleaning box through a rivet, a coupler, a fixed frame and a slope plate are arranged inside the cleaning box, the coupler is symmetrically arranged on the left side and the right side inside the cleaning box, and the fixed frame is. The invention accelerates the convenience of the monocrystalline silicon body during the fixing, enhances the stability of the monocrystalline silicon body during the cleaning, avoids using a dismounting tool to fix the monocrystalline silicon body, and reduces the labor intensity of operators during the fixing of the monocrystalline silicon body.
Description
Technical Field
The invention relates to the technical field of corrosion cleaning devices, in particular to a monocrystalline silicon corrosion cleaning device and a corrosion cleaning method.
Background
At present, the existing monocrystalline silicon corrosion cleaning device has some defects, such as; the existing monocrystalline silicon corrosion cleaning device is troublesome in fixing the monocrystalline silicon body, the stability of the monocrystalline silicon body in cleaning is weakened, a dismounting tool is needed to fix the monocrystalline silicon body, the labor intensity of operators for fixing the monocrystalline silicon body is improved, the spray cleaning area of the existing monocrystalline silicon corrosion cleaning device for the monocrystalline silicon body in corrosion cleaning is limited, the phenomenon that the monocrystalline silicon body is not thoroughly cleaned easily occurs in corrosion cleaning, the efficiency of the monocrystalline silicon body in corrosion cleaning is reduced, the time of the monocrystalline silicon body in corrosion and drying is prolonged, and the efficiency of the corrosion cleaning device for the monocrystalline silicon body in corrosion cleaning is reduced.
Disclosure of Invention
The invention aims to provide a monocrystalline silicon corrosion cleaning device and a corrosion cleaning method, which solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a monocrystalline silicon corrosion cleaning device and a corrosion cleaning method comprise a cleaning box, wherein a driving motor, a fixed box, a sealing door body, a liquid placing box and a liquid discharge valve are arranged outside the cleaning box, the driving motor is connected with the right end of the cleaning box through a rivet, the fixed box is connected with the left end of the cleaning box through a rivet, the sealing door body is movably connected right ahead of the cleaning box, the liquid placing box is connected with the upper end of the cleaning box through a rivet, the liquid discharge valve is connected with the middle of the bottom of the cleaning box through a rivet, a coupler, a fixed frame and a slope plate are arranged inside the cleaning box, the coupler is symmetrically arranged on the left side and the right side inside the cleaning box, the fixed frame is connected with the upper part inside the cleaning box through a rivet, and the slope plate is connected with the bottom;
the fixed box is provided with a controller, an air extractor and an air heater, the controller is connected with the right front part of the outer surface of the fixed box through rivets, the air extractor is connected with the upper part of the inside of the fixed box through the rivets, the air heater is connected with the lower part of the inside of the fixed box through the rivets, the air extractor is provided with an air outlet pipe and an air suction pipe, the left end of the air outlet pipe is positioned outside the fixed box, the other end of the air outlet pipe is connected with the air extractor through the rivets, one end of the air suction pipe is connected with the air extractor through the rivets, the other end of the air suction pipe is connected with the upper right part of the cleaning box through the rivets and is communicated with the;
the cleaning liquid adding device comprises a liquid placing box, a cleaning liquid adding hopper, a corrosive liquid adding hopper, a cleaning liquid placing groove, a corrosive liquid placing groove and a booster pump, wherein the lower end of the cleaning liquid adding hopper is connected with the left side of the upper surface of the liquid placing box through welding and is communicated with the inside of the cleaning liquid placing groove;
the coupler is characterized in that a connecting shaft is arranged in the coupler, a monocrystalline silicon fixing frame is arranged on the connecting shaft, a sliding groove and a built-in groove are arranged on the monocrystalline silicon fixing frame, the sliding groove is located on the left side and the right side of the interior of the monocrystalline silicon fixing frame, the built-in groove is located on the upper side and the lower side of the monocrystalline silicon fixing frame, a baffle is arranged in the sliding groove, a reset spring, a placing plate and a monocrystalline silicon body are arranged in the built-in groove, one end of the reset spring is connected with the interior of the built-in groove through a rivet, the other end of the reset spring;
be provided with display screen and control button on the controller, the display screen is connected with the inside top of controller through the rivet, and control button is connected with the below of controller through the rivet, and the controller is connected with air heater, air extractor, control button, driving motor, booster pump, solenoid valve I and solenoid valve II respectively through the wire.
In a preferred embodiment of the present invention, the ramp plate is made of alloy steel and forms an angle of 30 degrees with the bottom of the cleaning tank.
In a preferred embodiment of the present invention, the air outlet pipe and the air intake pipe are made of aluminum alloy.
As a preferred embodiment of the present invention, the air duct is made of PVC, one end of the air duct is connected to the air heater by a rivet, and the other end of the air duct is connected to the cleaning tank by a rivet and is communicated with the inside of the cleaning tank.
In a preferred embodiment of the present invention, the pipette and the infusion tube are made of titanium alloy, and the infusion tube is in an inverted T shape.
In a preferred embodiment of the present invention, the driving motor is connected to the connecting shaft through a coupling, one end of the connecting shaft is fitted into the coupling, and the other end of the connecting shaft is connected to the single crystal silicon fixing frame through a rivet.
In a preferred embodiment of the present invention, the slide groove is formed in a convex shape, and the baffle is fitted in the slide groove and fitted in the slide groove.
In a preferred embodiment of the present invention, the placing plate is made of a titanium alloy and has a mesh shape.
In a preferred embodiment of the present invention, a front side of the display screen is on the same horizontal plane as a front side of the controller.
In a preferred embodiment of the present invention, the method for etching and cleaning a silicon single crystal etching and cleaning apparatus includes:
a. firstly, placing a monocrystalline silicon body on a placing plate, then extruding the placing plate, compressing a return spring at the moment, then drawing out a half part of a baffle from the inside of a sliding groove, then loosening a hand for pressing the placing plate, enabling the reset spring to place the plate to generate rebound force, and enabling the upper surface of the monocrystalline silicon body to be resisted on the baffle for fixing;
b. after the step a is finished, closing the sealing door body, controlling the driving motor to operate by a control button on the controller, driving the connecting shaft to rotate by the driving motor through the coupler, and simultaneously enabling the monocrystalline silicon fixing frame to rotate along with the connecting shaft;
c. after the step b is finished, the solenoid valve I is controlled by the control button to process an open state, the solenoid valve II is controlled to process a closed state, the booster pump is controlled to operate, the booster pump sucks out corrosive liquid in the corrosive liquid placing groove through the liquid suction pipe, then the corrosive liquid is conveyed to the spray head through the liquid conveying pipe to spray the monocrystalline silicon body, so that the monocrystalline silicon body is corroded, the control button can control the hot air blower to operate in the process of corroding the monocrystalline silicon body, and heat generated by the hot air blower is conveyed to the inside of the cleaning box through the air conveying pipe to heat the monocrystalline silicon body when the monocrystalline silicon body is corroded;
d. after the step c is finished, controlling the hot air blower to stop operating by the control button after the monocrystalline silicon body is corroded, controlling the air blower to operate, pumping hot air in the cleaning box out by the air pump through the air suction pipe, then discharging the hot air out of the cleaning box through the air outlet pipe, controlling the electromagnetic valve I to be closed by the control button, opening the electromagnetic valve II, sucking cleaning liquid in the cleaning liquid placing groove by the booster pump through the liquid suction pipe, and then conveying the cleaning liquid to the spray head through the liquid conveying pipe to spray the monocrystalline silicon body so as to clean the monocrystalline silicon body;
e. and d, after the step d is finished, controlling the air heater to operate by the control button so that heat generated by the air heater is conveyed to the inside of the cleaning box through the air conveying pipe to heat and dry the monocrystalline silicon when the monocrystalline silicon is corroded, controlling the air extractor to operate simultaneously, and extracting hot air in the cleaning box by the air extractor through the air suction pipe and then discharging the hot air through the air outlet pipe.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the combination of the sliding groove, the built-in groove, the baffle, the reset spring and the placing plate, the monocrystalline silicon body is placed on the placing plate, then the placing plate is extruded, at the moment, the reset spring can be compressed, then, a half part of the baffle is drawn out from the inside of the sliding groove, then, a hand for pressing the placing plate is loosened, the reset spring can generate the bounce force on the placing plate, so that the upper surface of the monocrystalline silicon body is resisted on the baffle to be fixed, the convenience in the process of fixing the monocrystalline silicon body is effectively accelerated, the stability of the monocrystalline silicon body in the process of cleaning is enhanced, the fixation of the monocrystalline silicon body by using a dismounting tool is avoided, and the labor intensity of operators in the process of fixing the monocrystalline silicon body is reduced.
2. According to the invention, through the combination of the driving motor, the coupler and the connecting shaft, the driving motor drives the connecting shaft to rotate through the coupler when the monocrystalline silicon body is subjected to corrosion cleaning, and the monocrystalline silicon fixing frame can rotate along with the connecting shaft, so that the spraying area of the monocrystalline silicon body during corrosion cleaning is effectively increased, the phenomenon of incomplete cleaning of the monocrystalline silicon body during corrosion cleaning is avoided, and the efficiency of the monocrystalline silicon body during corrosion cleaning is improved.
3. The invention adds the air pump and the air heater, the control button can control the air heater to operate in the process of corroding the monocrystalline silicon body, so that the heat generated by the air heater is conveyed to the inside of the cleaning box through the air conveying pipe to heat the monocrystalline silicon body when the corrosion of the monocrystalline silicon body is finished, the control button controls the air heater to stop operating after the corrosion of the monocrystalline silicon body is finished, and controls the air pump to operate, the air pump can pump out the hot air in the cleaning box through the air suction pipe, after the cleaning of the monocrystalline silicon body is finished, the control button can control the air heater to operate, so that the heat generated by the air heater is conveyed to the inside of the cleaning box through the air conveying pipe to heat and dry the monocrystalline silicon body when the corrosion of the monocrystalline silicon body is finished, and simultaneously controls the air pump to operate, the air pump can pump out the hot air in the cleaning box through the air suction pipe and then exhaust the air from the air outlet pipe, thereby effectively saving the, the efficiency of the corrosion cleaning device for cleaning the monocrystalline silicon body is improved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a cross-sectional view of a cleaning tank for a single crystal silicon etching cleaning apparatus and an etching cleaning method according to the present invention;
FIG. 2 is a front view of a single crystal silicon holder for a single crystal silicon etching apparatus and an etching method according to the present invention;
FIG. 3 is a front view of a single crystal silicon etching cleaning apparatus and etching cleaning method according to the present invention;
FIG. 4 is a control flow chart of a single crystal silicon etching cleaning device and an etching cleaning method according to the present invention.
In the figure: the cleaning device comprises a cleaning box 1, a driving motor 2, a fixed box 3, a sealing door body 4, a liquid placing box 5, a liquid discharge valve 6, a coupling 7, a fixed frame 8, a slope plate 9, a controller 10, an air extractor 11, a hot air blower 12, an air outlet pipe 13, an air suction pipe 14, an air conveying pipe 15, a cleaning liquid adding hopper 16, a corrosive liquid adding hopper 17, a cleaning liquid placing groove 19, a corrosive liquid placing groove 20, a booster pump 21, a liquid suction pipe 22, a liquid conveying pipe 23, a spray head 24, a monocrystalline silicon fixed frame 25, an electromagnetic valve I30, an electromagnetic valve II31, a connecting shaft 32, a sliding groove 33, an internal groove 34, a baffle 35, a reset spring 36, a placing plate 37, a monocrystalline silicon body 38, a display screen 39.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a monocrystalline silicon corrosion cleaning device and a corrosion cleaning method comprise a cleaning box 1, wherein a driving motor 2, a fixed box 3 and a sealing door body 4 are arranged outside the cleaning box 1, the cleaning device comprises a liquid placing box 5 and a liquid discharging valve 6, a driving motor 2 is connected with the right end of a cleaning box 1 through a rivet, a fixing box 3 is connected with the left end of the cleaning box 1 through a rivet, a sealing door body 4 is movably connected right ahead of the cleaning box 1, the liquid placing box 5 is connected with the upper end of the cleaning box 1 through a rivet, the liquid discharging valve 6 is connected with the middle of the bottom of the cleaning box 1 through a rivet, a coupler 7, a fixing frame 8 and a slope plate 9 are arranged inside the cleaning box 1, the coupler 7 is symmetrically arranged on the left side and the right side inside the cleaning box 1, the fixing frame 8 is connected with the upper part inside the cleaning box 1 through a rivet, and the slope plate 9 is connected with the bottom inside the;
the cleaning machine is characterized in that a controller 10, an air pump 11 and an air heater 12 are arranged on the fixed box 3, the controller 10 is connected with the right front part of the outer surface of the fixed box 3 through rivets, the air pump 11 is connected with the upper part of the inside of the fixed box 3 through rivets, the air heater 12 is connected with the lower part of the inside of the fixed box 3 through rivets, an air outlet pipe 13 and an air suction pipe 14 are arranged on the air pump 11, the left end of the air outlet pipe 13 is positioned outside the fixed box 3, the other end of the air outlet pipe 13 is connected with the air pump 11 through rivets, one end of the air suction pipe 14 is connected with the air pump 11 through rivets, the other end of the air suction pipe 14 is connected with the upper right part of the cleaning box 1 through rivets and communicated with the inside of;
the liquid placing box 5 is provided with a cleaning liquid adding hopper 16, a corrosive liquid adding hopper 17, a cleaning liquid placing groove 19, a corrosive liquid placing groove 20 and a booster pump 21, the lower end of the cleaning liquid adding hopper 16 is connected with the left side of the upper surface of the liquid placing box 5 by welding, and is communicated with the inside of the cleaning solution placing groove 19, the lower end of the corrosive solution adding bucket 17 is connected with the right side of the upper surface of the liquid placing box 5 by welding, the device is communicated with the inside of the corrosive liquid placing groove 20, the booster pump 21 is connected with the lower part of the inside of the liquid placing box 5 through rivets, a pipette 22 and a transfusion tube 23 are arranged on the booster pump 21, one end of the pipette 22 is respectively connected with the bottom parts of the cleaning liquid placing groove 19 and the corrosive liquid placing groove 20 through rivets, the other end of the pipette 22 is connected with the booster pump 21 through rivets, a spray head 24 is arranged at the lower end of the transfusion tube 23, and an electromagnetic valve I30 and an electromagnetic valve II31 are respectively arranged on the pipette 22;
a connecting shaft 32 is arranged in the coupler 7, a monocrystalline silicon fixing frame 25 is arranged on the connecting shaft 32, a sliding chute 33 and an internal groove 34 are arranged on the monocrystalline silicon fixing frame 25, the sliding chute 33 is positioned on the left side and the right side in the monocrystalline silicon fixing frame 25, the internal groove 34 is positioned on the upper side and the lower side of the monocrystalline silicon fixing frame 25, a baffle 35 is arranged in the sliding chute 33, a return spring 36, a placing plate 37 and a monocrystalline silicon body 38 are arranged in the internal groove 34, one end of the return spring 36 is connected with the internal part of the internal groove 34 through a rivet, the other end of the return spring 36 is connected with the placing plate 37 through a rivet, and the monocrystalline silicon body 38;
the controller 10 is provided with a display screen 39 and a control button 40, the display screen 39 is connected with the upper part inside the controller 10 through a rivet, the control button 40 is connected with the lower part of the controller 10 through a rivet, and the controller 10 is respectively connected with the hot air blower 12, the air extractor 11, the control button 40, the driving motor 2, the booster pump 21, the electromagnetic valve I30 and the electromagnetic valve II31 through a lead 41.
Further, the slope plate 9 is made of alloy steel and forms an angle of 30 degrees with the bottom inside the cleaning box 1.
Further, the air outlet pipe 13 and the air suction pipe 14 are both made of aluminum alloy.
Further, the air delivery pipe 15 is made of PVC, one end of the air delivery pipe 15 is connected with the air heater 12 through a rivet, and the other end of the air delivery pipe 15 is connected with the cleaning box 1 through a rivet and communicated with the inside of the cleaning box 1.
Further, the pipette 22 and the infusion tube 23 are both made of titanium alloy, and the infusion tube 23 is in an inverted T shape.
Further, the driving motor 2 is connected with the connecting shaft 32 through the coupler 7, one end of the connecting shaft 32 is embedded in the coupler 7, and the other end of the connecting shaft 32 is connected with the monocrystalline silicon fixing frame 25 through a rivet.
Further, the slide groove 33 is convex, and the baffle 35 is fitted in the slide groove 33 and fits in the slide groove 33.
Further, the placing plate 37 is made of a titanium alloy and is in a net shape.
Further, the front of the display screen 39 is on the same horizontal plane as the front of the controller 10.
Further, the corrosion cleaning method of the monocrystalline silicon corrosion cleaning device comprises the following corrosion cleaning steps:
a. firstly, placing the monocrystalline silicon body 38 on the placing plate 37, then extruding the placing plate 37, compressing the return spring 36, then drawing out a half part of the baffle 35 from the inside of the chute 33, then loosening the hand pressing the placing plate 37, enabling the return spring 36 to place the plate 37 to generate rebound force, and enabling the upper surface of the monocrystalline silicon body 38 to be propped against the baffle 35 to be fixed;
b. after the step a is finished, the sealing door body 4 is closed, the control button 40 on the controller 10 controls the driving motor 2 to operate, at this time, the driving motor 2 drives the connecting shaft 32 to rotate through the coupler 7, and meanwhile, the monocrystalline silicon fixing frame 25 rotates along with the connecting shaft 32;
c. after the step b is finished, the control button 40 controls the electromagnetic valve I30 to process an open state, the electromagnetic valve II31 processes a closed state, and simultaneously controls the booster pump 21 to operate, the booster pump 21 sucks out the corrosive liquid in the corrosive liquid placing groove 20 through the pipette 22, then the corrosive liquid is conveyed to the spray head 24 through the liquid conveying pipe 23 to spray the monocrystalline silicon body 38, so that the monocrystalline silicon body 38 is corroded, the control button 40 controls the hot air blower 12 to operate in the corrosion process of the monocrystalline silicon body 38, and the heat generated by the hot air blower 12 is conveyed to the inside of the cleaning box 1 through the air conveying pipe 15 to heat the monocrystalline silicon body 38 when the corrosion is carried out;
d. after the step c is completed, after the monocrystalline silicon body 38 is corroded, the control button 40 controls the hot air blower 12 to stop operating, and controls the air extractor 11 to operate, the air extractor 11 can extract hot air in the cleaning box 1 through the air suction pipe 14 and then exhaust the hot air through the air outlet pipe 13, meanwhile, the control button 40 controls the electromagnetic valve I30 to be closed, the electromagnetic valve II31 is opened, the booster pump 21 sucks out cleaning liquid in the cleaning liquid placing groove 19 through the liquid suction pipe 22, and then the cleaning liquid is conveyed to the spray head 24 through the liquid conveying pipe 23 to spray the monocrystalline silicon body 38, so that the monocrystalline silicon body 38 is cleaned;
e. after the step d is completed, the control button 40 controls the operation of the air heater 12, so that the heat generated by the air heater 12 is transported to the inside of the cleaning box 1 through the air transporting pipe 15 to heat and dry the monocrystalline silicon 38 when the monocrystalline silicon is corroded, and at the same time, the operation of the air pump 11 is controlled, and the air pump 11 pumps out the hot air in the cleaning box 1 through the air suction pipe 14 and then discharges the hot air through the air outlet pipe 13.
The cleaning box 1, the driving motor 2, the fixed box 3, the sealing door 4, the liquid placing box 5, the liquid discharge valve 6, the coupling 7, the fixed frame 8, the slope board 9, the controller 10, the air extractor 11, the hot air blower 12, the air outlet pipe 13, the air suction pipe 14, the air delivery pipe 15, the cleaning liquid adding hopper 16, the corrosive liquid adding hopper 17, the cleaning liquid placing groove 19, the corrosive liquid placing groove 20, the booster pump 21, the liquid suction pipe 22, the liquid delivery pipe 23, the spray head 24, the monocrystalline silicon fixed frame 25, the electromagnetic valve I30, the electromagnetic valve II31, the connecting shaft 32, the sliding chute 33, the built-in groove 34, the baffle 35, the return spring 36, the placing board 37, the monocrystalline silicon body 38, the display screen 39, the control button 40, the lead wire 41 and other parts of the invention are all common standard parts or parts known by the skilled person, and the structure and principle of the invention can be known by, through the combination of the sliding chute 33, the built-in groove 34, the baffle 35, the return spring 36 and the placing plate 37, the monocrystalline silicon body 38 is placed on the placing plate 37, then the placing plate 37 is extruded, at the moment, the return spring 36 is compressed, then, half of the baffle 35 is drawn out from the inside of the sliding chute 33, then, a hand pressing the placing plate 37 is loosened, the return spring 36 can place the plate 37 to generate bounce force, so that the upper surface of the monocrystalline silicon body 38 is propped against the baffle 35 to be fixed, the convenience of the monocrystalline silicon body 38 in the fixing process is effectively accelerated, the stability of the monocrystalline silicon body 38 in the cleaning process is enhanced, the monocrystalline silicon body 38 is prevented from being fixed by using a dismounting tool, the labor intensity of operators in the fixing process of the monocrystalline silicon body 38 is reduced, through the combination of the driving motor 2, the coupler 7 and the connecting shaft 32, the driving motor 2 drives the connecting shaft 32 to rotate through the coupler 7 when the monocrystalline silicon body 38 is corroded and cleaned, meanwhile, the monocrystalline silicon fixing frame 25 can rotate along with the connecting shaft 32, the spraying area of the monocrystalline silicon body 38 during corrosion cleaning is effectively increased, the phenomenon that the monocrystalline silicon body 38 is not completely cleaned during corrosion cleaning is avoided, the efficiency of the monocrystalline silicon body 38 during corrosion cleaning is improved, through the addition of the air pump 11 and the air heater 12, the control button 40 can control the air heater 12 to operate in the corrosion process of the monocrystalline silicon body 38, so that heat generated by the air heater 12 is conveyed into the cleaning box 1 through the air conveying pipe 15 to heat the monocrystalline silicon body 38 during corrosion, after the corrosion of the monocrystalline silicon body 38 is finished, the control button 40 controls the air heater 12 to stop operating, the air pump 11 is controlled to operate, the air pump 11 can pump out hot air in the cleaning box 1 through the air suction pipe 14, and after the cleaning of the monocrystalline silicon body 38 is finished, the control button 40 can control the air heater 12 to operate, so that the heat generated by the air heater 12 is transmitted to the inside of the cleaning box 1 through the air transmission pipe 15 to heat and dry the monocrystalline silicon body 38 when the monocrystalline silicon body 38 is corroded, and the air pump 11 is controlled to operate, the air pump 11 can pump out the hot air in the cleaning box 1 through the air suction pipe 14 and then discharge the hot air through the air outlet pipe 13, thereby effectively saving the time of corroding and drying the monocrystalline silicon body 38 and improving the efficiency of corroding and cleaning the monocrystalline silicon body 38 by the corrosion cleaning device.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. The utility model provides a monocrystalline silicon corrodes belt cleaning device, includes washs case (1), its characterized in that: the cleaning device is characterized in that a driving motor (2), a fixed box (3), a sealing door body (4), a liquid placing box (5) and a liquid discharging valve (6) are arranged outside the cleaning box (1), the driving motor (2) is connected with the right end of the cleaning box (1) through rivets, the fixed box (3) is connected with the left end of the cleaning box (1) through rivets, the sealing door body (4) is movably connected right ahead the cleaning box (1), the liquid placing box (5) is connected with the upper end of the cleaning box (1) through rivets, the liquid discharging valve (6) is connected with the middle of the bottom of the cleaning box (1) through rivets, a coupler (7), a fixed frame (8) and a slope plate (9) are arranged inside the cleaning box (1), the coupler (7) is symmetrically arranged on the left side and the right side inside the cleaning box (1), the fixed frame (8) is connected with the upper side inside the cleaning box (1) through rivets, the slope plate (9) is connected with the bottom inside the cleaning box (1) by welding;
the cleaning device is characterized in that a controller (10), an air pump (11) and an air heater (12) are arranged on the fixed box (3), the controller (10) is connected with the front of the outer surface of the fixed box (3) through rivets, the air pump (11) is connected with the upper part inside the fixed box (3) through rivets, the air heater (12) is connected with the lower part inside the fixed box (3) through rivets, an air outlet pipe (13) and an air suction pipe (14) are arranged on the air pump (11), the left end of the air outlet pipe (13) is positioned outside the fixed box (3), the other end of the air outlet pipe (13) is connected with the air pump (11) through rivets, one end of the air suction pipe (14) is connected with the air pump (11) through rivets, and the other end of the air suction pipe (14) is connected with the upper right part of the cleaning box (, and is communicated with the inside of the cleaning box (1), and an air delivery pipe (15) is arranged on the air heater (12);
the cleaning solution adding device is characterized in that a cleaning solution adding hopper (16), a corrosive solution adding hopper (17), a cleaning solution placing groove (19), a corrosive solution placing groove (20) and a booster pump (21) are arranged on the liquid placing box (5), the lower end of the cleaning solution adding hopper (16) is connected with the left side of the upper surface of the liquid placing box (5) through welding and is communicated with the inside of the cleaning solution placing groove (19), the lower end of the corrosive solution adding hopper (17) is connected with the right side of the upper surface of the liquid placing box (5) through welding and is communicated with the inside of the corrosive solution placing groove (20), the booster pump (21) is connected with the lower part of the inside of the liquid placing box (5) through rivets, a liquid suction pipe (22) and a liquid conveying pipe (23) are arranged on the booster pump (21), one end of the liquid suction pipe (22) is respectively connected with the bottoms of the cleaning solution placing groove, the other end of the pipette (22) is connected with the booster pump (21) through a rivet, the lower end of the infusion tube (23) is provided with a spray head (24), and the pipette (22) is respectively provided with an electromagnetic valve I (30) and an electromagnetic valve II (31);
a connecting shaft (32) is arranged in the coupler (7), a monocrystalline silicon fixing frame (25) is arranged on the connecting shaft (32), a sliding groove (33) and a built-in groove (34) are arranged on the monocrystalline silicon fixing frame (25), the sliding groove (33) is located on the left side and the right side of the interior of the monocrystalline silicon fixing frame (25), the built-in groove (34) is located on the upper side and the lower side of the monocrystalline silicon fixing frame (25), a baffle (35) is arranged in the sliding groove (33), a return spring (36), a placing plate (37) and a monocrystalline silicon body (38) are arranged in the built-in groove (34), one end of the return spring (36) is connected with the interior of the built-in groove (34) through a rivet, the other end of the return spring (36) is connected with the rivet placing plate (37), and the monocrystalline silicon body (38;
be provided with display screen (39) and control button (40) on controller (10), display screen (39) are connected with the inside top of controller (10) through the rivet, and control button (40) are connected with the below of controller (10) through the rivet, and controller (10) are connected with air heater (12), air extractor (11), control button (40), driving motor (2), booster pump (21), solenoid valve I (30) and solenoid valve II (31) respectively through wire (41).
2. The monocrystalline silicon etching cleaning device of claim 1, wherein: the slope plate (9) is made of alloy steel and forms an angle of 30 degrees with the bottom inside the cleaning box (1).
3. The monocrystalline silicon etching cleaning device of claim 1, wherein: the air outlet pipe (13) and the air suction pipe (14) are both made of aluminum alloy.
4. The monocrystalline silicon etching cleaning device of claim 1, wherein: the air delivery pipe (15) is made of PVC materials, one end of the air delivery pipe (15) is connected with the air heater (12) through a rivet, and the other end of the air delivery pipe (15) is connected with the cleaning box (1) through a rivet and communicated with the inside of the cleaning box (1).
5. The monocrystalline silicon etching cleaning device of claim 1, wherein: the pipette (22) and the infusion tube (23) are both made of titanium alloy, and the infusion tube (23) is in an inverted T shape.
6. The monocrystalline silicon etching cleaning device of claim 1, wherein: the driving motor (2) is connected with the connecting shaft (32) through the coupler (7), one end of the connecting shaft (32) is embedded in the coupler (7), and the other end of the connecting shaft (32) is connected with the monocrystalline silicon fixing frame (25) through a rivet.
7. The monocrystalline silicon etching cleaning device of claim 1, wherein: the sliding groove (33) is in a convex shape, and the baffle (35) is embedded in the sliding groove (33) and is matched with the inside of the sliding groove (33).
8. The monocrystalline silicon etching cleaning device of claim 1, wherein: the placing plate (37) is made of titanium alloy and is in a net shape.
9. The monocrystalline silicon etching cleaning device of claim 1, wherein: the right front of the display screen (39) and the right front of the controller (10) are on the same horizontal plane.
10. The method for etching and cleaning a silicon single crystal according to claim 1, wherein: the etching and cleaning steps are as follows:
a. firstly, placing a monocrystalline silicon body (38) on a placing plate (37), then extruding the placing plate (37), compressing a return spring (36), then drawing out a half part of a baffle plate (35) from the inside of a chute (33), then loosening a hand pressing the placing plate (37), enabling the return spring (36) to place the plate (37) to generate a rebound force, and enabling the upper surface of the monocrystalline silicon body (38) to be propped against the baffle plate (35) to be fixed;
b. after the step a is finished, the sealing door body (4) is closed, a control button (40) on the controller (10) controls the driving motor (2) to operate, at the moment, the driving motor (2) drives the connecting shaft (32) to rotate through the coupler (7), and meanwhile, the monocrystalline silicon fixing frame (25) can rotate along with the connecting shaft (32);
c. after the step b is finished, the control button (40) controls the electromagnetic valve I30 to process an open state, the electromagnetic valve II (31) processes a closed state, and simultaneously controls the booster pump (21) to operate, the booster pump (21) sucks out the corrosive liquid in the corrosive liquid placing groove (20) through the pipette (22), then the corrosive liquid is conveyed to the spray head (24) through the liquid conveying pipe (23) to spray the monocrystalline silicon body (38), so that the monocrystalline silicon body (38) is corroded, and the control button (40) controls the hot air blower (12) to operate in the corrosion process of the monocrystalline silicon body (38), so that the heat generated by the hot air blower (12) is conveyed to the inside of the cleaning box (1) through the air conveying pipe (15) to heat the monocrystalline silicon body (38) during corrosion;
d. after the step c is finished, after the monocrystalline silicon body (38) is corroded, the operation of the hot air blower (12) is controlled by the control button (40) to stop, the operation of the air extractor (11) is controlled, the air extractor (11) can extract hot air in the cleaning box (1) through the air suction pipe (14), then the hot air is exhausted through the air outlet pipe (13), meanwhile, the control button (40) controls the electromagnetic valve I30 to be closed, the electromagnetic valve II (31) is opened, the booster pump (21) sucks out cleaning liquid in the cleaning liquid placing groove (19) through the pipette (22), and then the cleaning liquid is conveyed to the spray head (24) through the liquid conveying pipe (23) to spray the monocrystalline silicon body (38), so that the monocrystalline silicon body (38) is cleaned;
e. after the step d is finished, the control button (40) can control the air heater (12) to operate, so that heat generated by the air heater (12) is conveyed to the inside of the cleaning box (1) through the air conveying pipe (15) to heat and dry the monocrystalline silicon body (38) when the monocrystalline silicon body is corroded, the air pump (11) is controlled to operate, the air pump (11) can pump out hot air in the cleaning box (1) through the air suction pipe (14), and then the hot air is discharged through the air outlet pipe (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910851397.8A CN110592680A (en) | 2019-09-10 | 2019-09-10 | Monocrystalline silicon corrosion cleaning device and corrosion cleaning method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910851397.8A CN110592680A (en) | 2019-09-10 | 2019-09-10 | Monocrystalline silicon corrosion cleaning device and corrosion cleaning method |
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| CN110592680A true CN110592680A (en) | 2019-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910851397.8A Pending CN110592680A (en) | 2019-09-10 | 2019-09-10 | Monocrystalline silicon corrosion cleaning device and corrosion cleaning method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115094517A (en) * | 2022-06-09 | 2022-09-23 | 陈统 | Corrosion equipment for processing silicon carbide wafer |
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| CN102212824A (en) * | 2010-04-09 | 2011-10-12 | 中国科学院微电子研究所 | Single-side silicon wafer wet etching equipment |
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Application publication date: 20191220 |