CN110576018A - Air curtain isolating device based on mask plate cleaning application - Google Patents
Air curtain isolating device based on mask plate cleaning application Download PDFInfo
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- CN110576018A CN110576018A CN201910735050.7A CN201910735050A CN110576018A CN 110576018 A CN110576018 A CN 110576018A CN 201910735050 A CN201910735050 A CN 201910735050A CN 110576018 A CN110576018 A CN 110576018A
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- cavity
- air
- device based
- air curtain
- corrugated pipe
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
the invention discloses an air curtain isolation device based on mask cleaning application, which comprises a groove body with a rectangular cross section and an air pump, wherein two opposite inner walls of the groove body are respectively provided with a fixed plate, the other two opposite inner parts of the groove body are respectively provided with a movable plate, the movable plates can rotate on the inner walls of the groove body along a horizontal plane, the side walls of the fixed plates are respectively provided with a plurality of fixed nozzles, two sides of the movable plates are respectively provided with a plurality of corrugated pipes, the corrugated pipes can be retracted into the movable plates, second cavities are arranged in the corrugated pipes, and first cavities with closed structures are arranged in the second cavities; the output end of the air pump is provided with a first air conveying pipe and a second air conveying pipe, air in the first air conveying pipe can be blown out through the fixed nozzle and the corrugated pipe, air in the second air conveying pipe can enter the first cavity, and the corrugated pipe can stretch towards the direction of the fixed nozzle after being inflated in the first cavity.
Description
Technical Field
The invention relates to the technical field of mask cleaning equipment, in particular to an air curtain isolation device based on mask cleaning application.
background
As the area of a semiconductor chip becomes smaller and smaller with the development of a semiconductor manufacturing process, the precision of the semiconductor process becomes more important. In the manufacturing process of the mask, the washing basket provided with the mask workpiece needs to be put into the washing tank for soaking for a period of time so as to remove impurities attached to the mask workpiece, however, because the cleaning tank is filled with volatile chemical liquid, the volatile solution is easy to volatilize from the cleaning tank in the process of soaking the mask plate, usually, a plurality of air nozzles are arranged on the inner wall of the tank body and connected with an air pump, high-pressure air generated by the high-pressure air pump is sprayed out from the air nozzles to form an air curtain, used for isolating the volatile solution in the cleaning tank, avoiding the volatile to the outside and polluting the ring shape, however, since the washing tank has a large cross-sectional size for easy placement of the washing basket, the air pressure in such a structure decreases with the increase of the distance of the air nozzle, resulting in insufficient sealing performance in the central region of the tank body, and volatile solution is easily volatilized from the region.
disclosure of Invention
the invention aims to overcome the defects in the prior art and provide an air curtain isolation device based on mask cleaning application, which is convenient for placing a cleaning basket into a tank body and can improve the sealing effect on volatile solution.
The invention is realized by the following technical scheme:
an air curtain isolation device based on mask cleaning application comprises a groove body with a rectangular cross section and an air pump, wherein two opposite inner walls of the groove body are provided with a fixed plate, the other two opposite inner parts of the groove body are provided with movable plates, the movable plates can rotate on the inner walls of the groove body along a horizontal plane, the side walls of the fixed plates are provided with a plurality of fixed nozzles, two sides of each movable plate are provided with a plurality of corrugated pipes, the corrugated pipes can retract into the movable plates, second cavities are formed in the corrugated pipes, and first cavities with closed structures at one ends are formed in the second cavities; the output end of the air pump is provided with a first air conveying pipe and a second air conveying pipe, air in the first air conveying pipe can be blown out through the fixed nozzle and the corrugated pipe, air in the second air conveying pipe can enter the first cavity, and the corrugated pipe can stretch towards the direction of the fixed nozzle after being inflated in the first cavity.
When the mask in the cleaning basket is soaked and cleaned, the two movable plates can rotate in the tank body and rotate 90 degrees to be in contact with the inner wall of the tank body, so that the cleaning basket can be smoothly placed into the tank body, after the cleaning basket is placed into the tank body, the two movable plates are rotated to initial positions, the two movable plates are positioned on the same straight line, high-pressure air flows generated by an air pump respectively enter the fixed nozzle on the fixed plate and the corrugated pipe on the movable plate, the high-pressure air flows are sprayed out from the fixed nozzle and the movable nozzle to form an air curtain, and volatile solution below the two movable plates can be isolated from volatilizing; simultaneously the air current that the air pump produced gets into to first cavity in, high-pressure gas produces the effort to the second cavity, utilize the bellows to have flexible characteristic, force the bellows to take place to stretch towards fixed nozzle direction, do not influence under the prerequisite of gas tightness again, can reduce the interval between bellows and the fixed nozzle, further improve the sealed effect of bellows and fixed nozzle to volatile solution, it is longer to avoid the length of cell body, it is relatively poor to lead to the leakproofness of cell body central point department, all be equipped with the valve in first gas-supply pipe and the second gas-supply pipe, be used for opening and closing of control nozzle blowout air current.
Furthermore, the number of the fixed plates and the movable plates is four, the four fixed plates are uniformly distributed on two opposite inner walls of the groove body, the four movable plates are uniformly distributed on the other two opposite inner walls of the groove body, and the movable plates and the fixed plates are positioned on the same horizontal plane.
The purpose of setting the fixed plates and the movable plates as four is to enable the tank body to form an upper layer of air curtain and a lower layer of air curtain, the distance between the two fixed plates on the same inner wall is larger than the height of the cleaning basket, the distance between the two movable plates on the same inner wall is also larger than the height of the cleaning basket, the traditional cleaning tank is only provided with one layer of air curtain, so that in the process of placing or taking out the cleaning basket, a part of volatile solution can volatilize with the gap between the cleaning basket and the air curtain, and the technical scheme is provided with the upper layer of air curtain and the lower layer of air curtain, when the cleaning basket is placed into the tank body, the two movable plates on the upper layer are rotated first, so that the cleaning basket firstly enters the tank body, and is positioned above the air curtain on the lower layer, then the movable plates on the upper layer are restored to the initial position again, the air curtain above the cleaning basket is ensured to be formed again, and then the two movable plates, make the washing basket can soak to the cell body in the solution, resume two fly leafs of lower floor to initial position again at last, guarantee that the air curtain of lower floor also reforms, consequently, set up two-layer air curtain and can enough improve the sealed effect to volatile solution, but also guaranteed placing and take out the in-process of washing the basket, volatile solution is difficult for leaking.
Further, the lateral wall both sides of cell body all are equipped with two motors, and equal worm on the output of motor, be equipped with the turbine that matches with the worm on the worm, the centre of a circle department of turbine is equipped with the axis of rotation, and axis of rotation one end is connected with the turbine, and the other end is connected with the fly leaf.
The four motors that set up respectively with four fly leafs one-to-one, the turbine on every motor is connected with the pivot on every fly leaf promptly, and each motor can the rotation of independent control fly leaf to make the upper and lower both sides air curtain on the cell body can independently open, do not have the interference each other, thereby guarantee that the washing basket can put into to the cell body smoothly.
Furthermore, a first cavity is arranged inside the movable plate, a second cavity of the corrugated pipe is communicated with the first cavity, a connecting plate is arranged in the first cavity, the connecting plate is arranged in the first cavity along the long axis direction of the movable plate, a plurality of elastic pieces are arranged on two sides of the movable plate, one end of each elastic piece is connected with the movable plate, and the other end of each elastic piece extends into the second cavity of the corrugated pipe to be connected with the tail end of the corrugated pipe.
After gas that lets in to the first cavity passes through the discharge, the elasticity that the elastic component produced can stimulate the bellows to retract in the first cavity of fly leaf, avoid the bellows to stretch out in fly leaf one side, lead to the fly leaf can't effectively rotate to parallel with the inner wall of cell body, thereby make the washing basket can effectively put into to the cell body through the clearance between two fly leaves, and simultaneously, the elastic component of setting can support the bellows horizontal direction, guarantee the bellows at flexible in-process, guarantee all the time in same horizontal direction, thereby make the air current that blows off from the bellows can distribute away along the horizontal direction.
Furthermore, the inside of connecting plate is equipped with the second cavity, second gas-supply pipe and second cavity intercommunication, the both sides of connecting plate all are equipped with a plurality of third gas-supply pipes, and third gas-supply pipe one end and second cavity intercommunication, the other end and first cavity intercommunication.
the connecting plate that sets up both was used for the support to the elastic component, can be for third gas-supply pipe carrier gas again, the high-pressure gas that the air pump produced gets into to the second cavity of connecting plate in through the second gas-supply pipe, then the gas in the second cavity gets into to first cavity in through the third gas-supply pipe respectively, carry high-pressure gas for first cavity, because the bellows has flexible characteristic, take place tensile after making the first cavity in the bellows ventilate, thereby make the bellows can take place tensile towards fixed nozzle direction, change the length of bellows, reduce the interval between bellows and the fixed nozzle, thereby the intensity of formation air curtain between bellows and the fixed nozzle has been improved, the sealing performance of air curtain to volatile solution has been improved.
furthermore, a plurality of air holes in the shape of a horn mouth are formed in the two sides of the corrugated pipe, the air holes are uniformly distributed along the axial direction of the corrugated pipe, and the air holes are communicated with the second cavity.
Because the bellows is in tensile state, in order to avoid the regional air curtain effect between the bellows not good, consequently set up a plurality of gas pockets on the bellows, when making the bellows be in tensile state, the air current that blows off from the gas pocket between the bellows forms the air curtain, thereby the air curtain leakproofness between the bellows has been improved, and simultaneously, because the gas pocket adopts the horn mouth structure, make the air current can disperse all around through the gas pocket of horn mouth shape and be in, make the air current that blows off of the gas pocket on the same bellows can form the interference each other, thereby form the air curtain, the air curtain leakproofness between the bellows has further been improved.
Furthermore, the end face of the corrugated pipe is of a closed structure, a nozzle in a horn mouth shape is arranged on the end face of the corrugated pipe, and the nozzle is communicated with the second cavity.
The nozzle that sets up and the second cavity intercommunication of bellows, the high-pressure gas that the air pump produced enters into to the first cavity of fly leaf through first gas-supply pipe in, the air current in the first cavity reenters to the second cavity of bellows in, the high-pressure gas of first part blows out through the gas pocket in the bellows, partly gas blows out through the spout, form the air curtain with the gas that fixed nozzle blew out, and simultaneously, it forms to the horn mouth with the spout also to set to, make the air current that blows out from the spout can take place to all around, thereby make and to disturb between the air current that the spout blew out on two adjacent bellows, form the air curtain, thereby improve the sealed effect to volatile solution in the cell body.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. According to the air curtain isolation device based on mask cleaning application, the cleaning basket is conveniently placed into the tank body by the aid of the arranged movable plate, and meanwhile, the sealing performance of volatile solution in the tank body can be improved;
2. According to the air curtain isolation device based on mask cleaning application, the upper air curtain and the lower air curtain can be formed in the tank body, so that the two air curtains are respectively opened when the cleaning basket is put in or taken out, the leakage of volatile solution in the tank body can be effectively avoided, and the sealing property of the tank body is improved;
3. According to the air curtain isolation device based on mask cleaning application, the arranged corrugated pipe can be stretched after being inflated, so that the distance between the corrugated pipe and the fixed nozzle is changed, the application to the groove bodies with different lengths is met, and meanwhile, the arranged corrugated pipe can be retracted into the movable plate under the action of the elastic piece, so that the movable plate can be ensured to smoothly rotate to be parallel to the inner wall of the groove body.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a top view of a structure of the present invention;
FIG. 2 is a top view of the structure of the present invention in another state;
FIG. 3 is a front view of the structure of the present invention;
FIG. 4 is a schematic view of the internal structure of the movable plate of the present invention;
FIG. 5 is a schematic view of the bellows of the present invention;
Fig. 6 is a schematic view of the internal structure of the bellows of the present invention.
Reference numbers and corresponding part names in the drawings:
1-corrugated pipe, 2-groove body, 3-rotating shaft, 4-fixed plate, 5-movable plate, 6-fixed nozzle, 7-elastic piece, 8-first cavity, 9-first air pipe, 10-second air pipe, 11-connecting plate, 12-third air pipe, 14-nozzle, 15-first cavity, 16-second cavity and 17-cleaning basket.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
As shown in fig. 1 to 6, the air curtain isolation device based on mask cleaning application of the present invention includes a tank 2 with a rectangular cross section and an air pump, wherein two opposite inner walls of the tank 2 are both provided with a fixed plate 4, the other two opposite inner walls are both provided with a movable plate 5, the movable plate 5 can rotate on the inner wall of the tank 2 along a horizontal plane, the side wall of the fixed plate 4 is both provided with a plurality of fixed nozzles 6, both sides of the movable plate 5 are both provided with a plurality of corrugated pipes 1, the corrugated pipes 1 can be retracted into the movable plate 5, a second cavity 16 is arranged in the corrugated pipe 1, and a first cavity 15 with a closed structure at one end is arranged in the second cavity 16; the output end of the air pump is provided with a first air conveying pipe 9 and a second air conveying pipe 10, air in the first air conveying pipe 9 can be blown out through the fixed nozzle 6 and the corrugated pipe 1, air in the second air conveying pipe 10 can enter the first cavity 15, and the first cavity 15 of the corrugated pipe 1 can be stretched towards the direction of the fixed nozzle 6 after being inflated.
Example 2
On the basis of the embodiment 1, the number of the fixed plates 4 and the movable plates 5 is four, four fixed plates 4 are uniformly distributed on two opposite inner walls of the tank body 2, four movable plates 5 are uniformly distributed on the other two opposite inner walls of the tank body 2, and the movable plates 5 and the fixed plates 4 are located on the same horizontal plane.
Example 3
on embodiment 2's basis, the lateral wall both sides of cell body 2 all are equipped with two motors, equal worm on the output of motor, be equipped with the turbine that matches with the worm on the worm, the centre of a circle department of turbine is equipped with axis of rotation 3, and 3 one end of axis of rotation are connected with the turbine, and the other end is connected with fly leaf 5.
example 4
On the basis of embodiment 1, the inside of the movable plate 5 is provided with a first cavity 8, a second cavity 16 of the corrugated pipe 1 is communicated with the first cavity 8, the first cavity 8 is internally provided with a connecting plate 11, the connecting plate 11 is arranged in the first cavity 8 along the long axis direction of the movable plate 5, two sides of the movable plate 5 are respectively provided with a plurality of elastic members 7, one end of each elastic member 7 is connected with the movable plate 5, and the other end of each elastic member 7 extends into the second cavity 16 of the corrugated pipe 1 and is connected with the tail end of the corrugated pipe 1. The inside of connecting plate 11 is equipped with the second cavity, second air-supply pipe 10 and second cavity intercommunication, the both sides of connecting plate 11 all are equipped with a plurality of third air-supply pipes 12, and third air-supply pipe 12 one end and second cavity intercommunication, the other end and first cavity 15 intercommunication. Both sides of the corrugated pipe 1 are provided with a plurality of horn-shaped air holes 13, the air holes 13 are uniformly distributed along the axial direction of the corrugated pipe 1, and the air holes 13 are communicated with the second cavity 16. The end face of the corrugated pipe 1 is of a closed structure, a nozzle 14 in a bell mouth shape is arranged on the end face of the corrugated pipe 1, and the nozzle 14 is communicated with the second cavity 16.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. An air curtain isolation device based on mask cleaning application comprises a tank body (2) with a rectangular cross section and an air pump, and is characterized in that two opposite inner walls of the tank body (2) are provided with fixed plates (4), the other two opposite inner parts of the tank body are provided with movable plates (5), the movable plates (5) can rotate on the inner walls of the tank body (2) along a horizontal plane, the side walls of the fixed plates (4) are provided with a plurality of fixed nozzles (6), two sides of each movable plate (5) are provided with a plurality of corrugated pipes (1), each corrugated pipe (1) can retract into the corresponding movable plate (5), a second cavity (16) is formed in each corrugated pipe (1), and a first cavity (15) with a closed structure at one end is formed in each second cavity (16);
The output end of the air pump is provided with a first air conveying pipe (9) and a second air conveying pipe (10), air in the first air conveying pipe (9) can be blown out through a fixed nozzle (6) and the corrugated pipe (1), air in the second air conveying pipe (10) can enter into the first cavity (15), and the first cavity (15) of the corrugated pipe (1) is inflated and then can be stretched towards the direction of the fixed nozzle (6).
2. the air curtain isolation device based on mask cleaning application of claim 1, wherein the number of the fixed plates (4) and the movable plates (5) is four, the four fixed plates (4) are uniformly distributed on two opposite inner walls of the tank body (2), the four movable plates (5) are uniformly distributed on the other two opposite inner walls of the tank body (2), and the movable plates (5) and the fixed plates (4) are positioned on the same horizontal plane.
3. The air curtain isolation device based on mask plate cleaning application of claim 2, wherein two motors are arranged on two sides of the side wall of the groove body (2), a worm is arranged on the output end of each motor, a turbine matched with the worm is arranged on each worm, a rotating shaft (3) is arranged at the center of each circle of the turbine, one end of each rotating shaft (3) is connected with the corresponding turbine, and the other end of each rotating shaft is connected with the corresponding movable plate (5).
Is provided with a rotating shaft (3), and the two rotating shafts (3) are distributed and connected with two movable plates (5) in the same vertical direction in sequence.
4. the air curtain isolation device based on mask cleaning application according to claim 1, wherein a first cavity (8) is formed inside the movable plate (5), the second cavity (16) of the bellows (1) is communicated with the first cavity (8), a connecting plate (11) is arranged in the first cavity (8), the connecting plate (11) is arranged in the first cavity (8) along the long axis direction of the movable plate (5), a plurality of elastic pieces (7) are arranged on two sides of the movable plate (5), one end of each elastic piece (7) is connected with the movable plate (5), and the other end of each elastic piece extends into the second cavity (16) of the bellows (1) and is connected with the tail end of the bellows (1).
5. The air curtain isolation device based on mask cleaning application of claim 4, wherein a second cavity is arranged inside the connecting plate (11), the second air conveying pipe (10) is communicated with the second cavity, a plurality of third air conveying pipes (12) are arranged on two sides of the connecting plate (11), one end of each third air conveying pipe (12) is communicated with the second cavity, and the other end of each third air conveying pipe is communicated with the first cavity (15).
6. the air curtain isolation device based on mask cleaning application is characterized in that a plurality of bell-mouth-shaped air holes (13) are formed in two sides of the corrugated pipe (1), the air holes (13) are uniformly distributed along the axial direction of the corrugated pipe (1), and the air holes (13) are communicated with the second cavity (16).
7. The air curtain isolation device based on the mask plate cleaning application is characterized in that the end face of the corrugated pipe (1) is of a closed structure, a nozzle (14) in a bell mouth shape is arranged on the end face of the corrugated pipe (1), and the nozzle (14) is communicated with the second cavity (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910735050.7A CN110576018B (en) | 2019-08-09 | 2019-08-09 | Air curtain isolating device based on mask plate cleaning application |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910735050.7A CN110576018B (en) | 2019-08-09 | 2019-08-09 | Air curtain isolating device based on mask plate cleaning application |
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| Publication Number | Publication Date |
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| CN110576018A true CN110576018A (en) | 2019-12-17 |
| CN110576018B CN110576018B (en) | 2020-07-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910735050.7A Active CN110576018B (en) | 2019-08-09 | 2019-08-09 | Air curtain isolating device based on mask plate cleaning application |
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| CN (1) | CN110576018B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117550177A (en) * | 2024-01-12 | 2024-02-13 | 烟台洛姆电子有限公司 | Energy-saving type rapid shaping film packaging machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117550177A (en) * | 2024-01-12 | 2024-02-13 | 烟台洛姆电子有限公司 | Energy-saving type rapid shaping film packaging machine |
| CN117550177B (en) * | 2024-01-12 | 2024-04-12 | 烟台洛姆电子有限公司 | Energy-saving type rapid shaping film packaging machine |
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| CN110576018B (en) | 2020-07-24 |
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