CN110568701A - Combined secondary imaging visual light source - Google Patents
Combined secondary imaging visual light source Download PDFInfo
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- CN110568701A CN110568701A CN201910913477.1A CN201910913477A CN110568701A CN 110568701 A CN110568701 A CN 110568701A CN 201910913477 A CN201910913477 A CN 201910913477A CN 110568701 A CN110568701 A CN 110568701A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 58
- 230000000007 visual effect Effects 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 238000004026 adhesive bonding Methods 0.000 claims description 8
- 230000000295 complement effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
- G03B15/02—Illuminating scene
- G03B15/03—Combinations of cameras with lighting apparatus; Flash units
Abstract
The invention discloses a combined secondary imaging visual light source, which comprises an upper concave lens, a lower concave lens, an upper annular light source, a lower annular light source, an upper double-cemented right-angle prism, a four-in-one prism and a lower double-cemented right-angle prism, wherein the upper double-cemented right-angle prism, the four-in-one prism and the lower double-cemented right-angle prism are positioned between the upper annular light source and the lower annular light source and are sequentially superposed from top to bottom; during measurement, the light path of an upper object positioned above the upper concave lens directly enters the four-in-one prism through the upper concave lens and the upper double-cemented right-angle prism, is refracted at a right angle through an upper refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and then directly enters the imaging camera for imaging; the light path of the object below the lower concave lens directly enters the four-in-one prism through the lower concave lens and the lower double-cemented right-angle prism, is refracted at a right angle through the lower refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and then directly enters the imaging camera for imaging. The four-in-one prism light path is adopted, optical path difference is avoided, and the imaging quality of an upper object and the imaging quality of a lower object are completely consistent.
Description
Technical Field
The invention relates to the technical field of light sources, in particular to a combined secondary imaging visual light source for a coaxial alignment system.
background
The high-precision alignment system needs to perform coordinate positioning on 2 objects needing alignment, and the precision requirement is quite high. The shooting of the upper and lower mark points is desirably completed under the same optical axis, and a high-precision optical path system is required. Meanwhile, the aligned objects are made of various materials, and a corresponding light source system is needed to acquire high-quality images.
Referring to fig. 1, the secondary imaging visual light source for a coaxial alignment system shown in the figure comprises an upper concave lens 1, an upper annular light source 2, an upper right-angle prism 3, a lower right-angle prism 4, a lower annular light source 5 and a lower concave lens 6, wherein an inclined surface of the upper right-angle prism 3 and an inclined surface of the lower right-angle prism 4 are glued together to form a double-gluing right-angle prism 9, a total reflection coating film 8 is pasted on a straight surface 3a of the upper right-angle prism 3, which is opposite to an imaging camera 7, the upper annular light source 2 is positioned above the double-gluing right-angle prism 9, the upper concave lens 1 is positioned above the upper annular light source 2, the lower annular light source 5 is positioned below the double-gluing right-angle prism 9, and the lower concave lens 6 is positioned below the lower annular. In photographing, an upper object 10 is placed above the upper concave lens 1, and a lower object 11 is placed below the lower concave lens 6. Thus, the reflected light 10a of the upper object 10 is reflected by the upper concave lens 1, the upper right-angle prism 3 and the bonding surface 9a of the double-bonding right-angle prism 9, reflected by the total reflection coating 8, and reflected to the imaging camera 7 through the upper right-angle prism 3 and the lower right-angle prism 4 again for imaging; the reflected light 11a of the lower object 11 is reflected by the lower concave lens 6, the lower right-angle prism 4 and the bonding surface 9a of the double-bonding right-angle prism 9, and then is reflected by the lower right-angle prism 4 to the imaging camera 7 for imaging; therefore, the optical path difference exists between the upper and lower objects 10, 11 in the secondary imaging visual light source for the alignment system with the same optical axis, and the difference between the imaging brightness and the contrast of the upper and lower objects 10, 11 is large due to the optical path difference, which is not beneficial to the post-image processing.
Referring to fig. 2, another secondary imaging vision light source for a coaxial alignment system is shown, which comprises an upper concave lens 21, an upper annular light source 22, upper right-angle prisms 23 and 24, lower right-angle prisms 25 and 26, a lower annular light source 27 and a lower concave lens 28, wherein the inclined surface of the upper right-angle prism 23 and the inclined surface of the lower right-angle prism 25 are glued together to form a double-glued right-angle prism 29, the inclined surface of the upper right-angle prism 24 and the inclined surface of the lower right-angle prism 26 are glued together to form a double-glued right-angle prism 30, and the straight surface 25a of the lower right-angle prism 25 and the straight surface 24a of the upper right-angle prism 24 are glued together, so that the double-glued right-angle prisms 29 and 30 are stacked up.
Upper annular light source 22 is located above double cemented right angle prism 29, upper concave lens 21 is located above upper annular light source 22, lower annular light source 27 is located below double cemented right angle prism 30, and lower concave lens 28 is located below lower annular light source 27. In photographing, the upper object 10 is placed above the upper concave lens 21, and the lower object 11 is placed below the lower concave lens 28. Thus, the reflected light 10b of the upper object 10 is reflected to the imaging camera 7 through the upper right-angle prism 23 after being refracted by the upper concave lens 21, the upper right-angle prism 23 and the bonding surface 29a of the double-bonded right-angle prism 29; the reflected light 11b of the lower object 11 is reflected by the lower concave lens 28, the lower right-angle prism 26 and the bonding surface 30a of the double-bonded right-angle prism 30, and then reflected by the lower right-angle prism 26 to the imaging camera 7 for imaging; therefore, the upper and lower objects 10, 11 in the secondary imaging vision light source for the alignment system with the same optical axis. The shooting of the mark points of the upper object 10 and the lower object 11 of the secondary imaging visual light source for the coaxial alignment system is not completed under the same optical axis, so that high-quality images cannot be obtained, and the later-stage image processing is not facilitated.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a combined secondary imaging visual light source for a coaxial alignment system, which can enable the shooting of upper and lower mark points of an upper object and a lower object to be completed under the same optical axis, has no optical path difference, has consistent imaging brightness of the upper object and the lower object, facilitates subsequent image processing, and is suitable for the imaging of objects made of different materials.
The technical problem to be solved by the invention can be realized by the following technical scheme:
A combined secondary imaging visual light source comprises an upper concave lens, a lower concave lens, an upper annular light source and a lower annular light source, wherein the upper concave lens is positioned above the upper annular light source, and the lower concave lens is positioned below the lower annular light source; during measurement, the light path of an upper object positioned above the upper concave lens directly enters the four-in-one prism through the upper concave lens and the upper double-cemented right-angle prism, is refracted at a right angle by an upper refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and then directly enters the imaging camera for imaging, and the light path of a lower object positioned below the lower concave lens directly enters the four-in-one prism through the lower concave lens and the lower double-cemented right-angle prism, is refracted at a right angle by a lower refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and finally directly enters the imaging camera for.
In a preferred embodiment of the present invention, the light path of the upper object above the upper concave lens directly enters the four-in-one prism through the upper concave lens and the upper double-cemented right-angle prism, and the light path of the lower object below the lower concave lens directly enters the four-in-one prism through the lower concave lens and the lower double-cemented right-angle prism, which are coaxial; the light path which is refracted at right angle by the upper refraction surface in the four-in-one prism, then directly penetrates through the four-in-one prism and then directly enters the imaging camera for imaging is parallel to the light path which is refracted at right angle by the lower refraction surface in the four-in-one prism, then directly penetrates through the four-in-one prism and then directly enters the imaging camera for imaging.
In a preferred embodiment of the present invention, each of the upper double-cemented right-angle prism and the lower double-cemented right-angle prism is formed by cementing an upper right-angle prism and a lower right-angle prism, wherein the cemented surfaces of the upper right-angle prism and the lower right-angle prism are the inclined surface of the upper right-angle prism and the inclined surface of the lower right-angle prism.
In a preferred embodiment of the invention, the four-in-one prism is formed by gluing four right-angle triangular prisms with identical shapes and sizes, and the right angles of the four right-angle triangular prisms are complementary angles; the four right-angle triangular prisms are divided into an upper right-angle triangular prism, a lower right-angle triangular prism, a left right-angle triangular prism and a right-angle triangular prism, and the upper refraction surface is formed by combining straight surfaces of the upper right-angle triangular prism and the right-angle triangular prism which are attached to each other; the lower refraction surface is formed by combining straight surfaces of the lower right-angle triangular prism and the right-angle triangular prism which are attached to each other.
In a preferred embodiment of the present invention, the dual-cemented dual-right-angle prism further comprises an upper coaxial light source and a lower coaxial light source, wherein the upper coaxial light source is located outside a straight surface of an upper right-angle prism in the upper dual-cemented right-angle prism, which is parallel to optical axes of the upper concave lens and the lower concave lens, and light of the upper coaxial light source enters the upper right-angle prism in the upper dual-cemented right-angle prism, is folded by a cemented surface in the upper dual-cemented right-angle prism, and then passes through the upper right-angle prism in the upper dual-cemented right-angle prism and the upper concave lens to irradiate on the upper object; the lower coaxial light source is positioned on the straight-surface outer side of the lower right-angle prism in the lower double-cemented right-angle prism and is parallel to the optical axis of the upper concave lens and the lower concave lens, the light of the lower coaxial light source enters the lower right-angle prism in the lower double-cemented right-angle prism and passes through the lower cemented surface in the lower double-cemented right-angle prism for refraction and then passes through the lower right-angle prism in the lower double-cemented right-angle prism and the lower concave lens to irradiate on the object below.
Due to the adoption of the technical scheme, the four-in-one prism light path is adopted, the optical path difference is avoided, and the imaging quality of the upper object and the imaging quality of the lower object are completely consistent. Meanwhile, an annular angle light source and a coaxial light source are provided to correspond to different materials.
Drawings
Fig. 1 is a schematic diagram of a structure and an optical path of a secondary imaging vision light source for a co-optical axis alignment system in the prior art.
Fig. 2 is a schematic diagram of a structure and an optical path of another conventional secondary imaging vision light source for a coaxial alignment system.
FIG. 3 is a schematic diagram of the structure and optical path of the combined secondary imaging vision light source for the coaxial alignment system of the present invention.
Detailed Description
The invention is further described below in conjunction with the appended drawings and detailed description.
Referring to fig. 3, the combined secondary imaging vision light source for the alignment system with the same optical axis comprises an upper concave lens 100, a lower concave lens 200, an upper annular light source 300 and a lower annular light source 400, wherein the upper concave lens 100 is located above the upper annular light source 300, the lower concave lens 200 is located below the lower annular light source 400, and during measurement, an upper object 500 is located above the upper concave lens 100, and a lower object 600 is located below the upper concave lens 200.
The invention is characterized in that: the dual-cemented rectangular prism comprises an upper dual-cemented rectangular prism 700, a four-cemented rectangular prism 800 and a lower dual-cemented rectangular prism 900, which are arranged between the upper annular light source 300 and the lower annular light source 400 and are sequentially superposed from top to bottom.
The upper double-glued right-angle prism 700 and the lower double-glued right-angle prism 900 are both formed by gluing one upper right-angle prism 710, 910 with one lower right-angle prism 720, 920, wherein the gluing surface A, B of the upper right-angle prism 710, 910 and the lower right-angle prism 720, 920 is formed by combining the inclined surfaces 711, 911 of the upper right-angle prisms 710, 910 and the inclined surfaces 721, 921 of the lower right-angle prisms 720, 920.
The quadrangle prism 800 is formed by gluing four right-angle triangular prisms having the same shape and size, and the four right-angle triangular prisms are divided into an upper right-angle triangular prism 810, a lower right-angle triangular prism 820, a left right-angle triangular prism 830 and a right-angle triangular prism 840. The right angles of the upper right-angle triangular prism 810, the lower right-angle triangular prism 820, the left right-angle triangular prism 830 and the right-angle triangular prism 840 are complementary angles.
The straight surfaces 811 and 841 of the upper right-angle triangular prism 810 and the right-angle triangular prism 840 are combined to form an upper refraction surface C, and the straight surfaces 821 and 842 of the lower right-angle triangular prism 820 and the right-angle triangular prism 840 are combined to form an upper refraction surface D.
The straight face 722 of the lower right-angle prism 720 in the upper double-cemented right-angle prism 700 is attached to the inclined face 812 of the upper right-angle triangular prism 810 in the quadruple prism 800, and the straight face 912 of the upper right-angle prism 910 in the lower double-cemented right-angle prism 900 is attached to the inclined face 822 of the lower right-angle triangular prism 820 in the quadruple prism 800.
During measurement, the light path E of the upper object 500 above the upper concave lens 100 passes through the upper concave lens 100, the upper right-angle prism 710 of the upper double cemented right-angle prism 700, the cemented surface a, the lower right-angle prism 720, the straight surface 722 of the lower right-angle prism 720, and the inclined surface 812 of the upper right-angle triangular prism 810 in the four-in-one prism 800, is directly incident into the upper right-angle triangular prism 810 of the four-in-one prism 800, is perpendicularly refracted by the upper refractive surface C in the four-in-one prism 800, is directly incident through the right-angle triangular prism 840 in the four-in-one prism 800, and is directly incident into the imaging camera 1000.
The light path F of the lower object 600 located below the concave lens 200 passes through the concave lens 200, the lower right-angle prism 920 of the lower double cemented right-angle prism 900, the cemented surface B, the upper right-angle prism 910, the straight surface 912 of the upper right-angle prism 910, and the inclined surface 822 of the lower right-angle triangular prism 820 in the four-in-one prism 800 to be directly incident into the lower right-angle triangular prism 820 of the four-in-one prism 800, and after being refracted at right angle by the lower refracting surface D in the four-in-one prism 800, to be directly incident to pass through the right-angle triangular prism 840 in the four-in-one prism 800 and then to be.
The light path E of the upper object 500 located above the upper concave lens 100 passes through the upper concave lens 100, the upper right-angle prism 710, the adhesive surface a, the lower right-angle prism 720, the straight surface 722 of the lower right-angle prism 720, the inclined surface 812 of the upper right-angle triangular prism 810 in the four-in-one prism 800 and is directly incident into the light path E1 in the upper right-angle triangular prism 810 of the four-in-one prism 800, and the light path F of the lower object 600 located below the lower concave lens 200 passes through the lower concave lens 200, the lower right-angle prism 920, the adhesive surface B, the upper right-angle prism 910, the straight surface 912 of the upper right-angle prism 910, and the inclined surface 822 of the lower right-angle triangular prism 820 in the four-in-one prism 800 and is directly incident into the light path F1 in the lower right-angle triangular prism 820 of the four-in-.
The light path E2 which is reflected by the lower refracting surface D in the four-in-one prism 800 at a right angle and then directly enters the imaging camera 1000 after passing through the right-angle triangular prism 840 in the four-in-one prism 800, and the light path F2 which is reflected by the lower refracting surface D in the four-in-one prism 800 at a right angle and then directly enters the imaging camera 1000 after passing through the right-angle triangular prism 840 in the four-in-one prism 800 are parallel.
In order to adapt to the upper object 500 and the lower object 600 with different materials, the invention is further characterized in that: also included are upper and lower coaxial light sources 2000 and 3000.
The upper coaxial light source 2000 is located outside a straight surface 712 of the upper right-angle prism 710 in the upper double-cemented right-angle prism 700, which is parallel to the optical axes of the upper concave lens 100 and the lower concave lens 200, and a light ray 2100 of the upper coaxial light source 2000 enters the upper right-angle prism 710 in the upper double-cemented right-angle prism 700, is folded by a cemented surface a in the upper double-cemented right-angle prism 700, passes through the upper right-angle prism 710 in the upper double-cemented right-angle prism 700, and irradiates on the upper object 500.
The lower coaxial light source 2000 is located outside a straight surface 922 of the lower right-angle prism 920 in the lower double-cemented right-angle prism 900, which is parallel to the optical axes of the upper concave lens 100 and the lower concave lens 200, and a light ray 2100 of the lower coaxial light source 2000 enters the lower right-angle prism 920 in the lower double-cemented right-angle prism 900, is refracted by a cemented surface B in the lower double-cemented right-angle prism 900, passes through the lower right-angle prism 920 in the lower double-cemented right-angle prism 900 and the lower concave lens 200, and then irradiates on the lower object 600.
Claims (7)
1. A combined secondary imaging visual light source comprises an upper concave lens, a lower concave lens, an upper annular light source and a lower annular light source, wherein the upper concave lens is positioned above the upper annular light source, and the lower concave lens is positioned below the lower annular light source; during measurement, the light path of an upper object positioned above the upper concave lens directly enters the four-in-one prism through the upper concave lens and the upper double-cemented right-angle prism, is refracted at a right angle by an upper refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and then directly enters the imaging camera for imaging, and the light path of a lower object positioned below the lower concave lens directly enters the four-in-one prism through the lower concave lens and the lower double-cemented right-angle prism, is refracted at a right angle by a lower refraction surface in the four-in-one prism, then directly penetrates the four-in-one prism, and finally directly enters the imaging camera for.
2. The combined secondary imaging visual light source of claim 1, wherein the optical path of the upper object above the upper concave lens through the upper concave lens and the upper double-cemented right-angle prism directly into the four-in-one prism is coaxial with the optical path of the lower object below the lower concave lens through the lower concave lens and the lower double-cemented right-angle prism directly into the four-in-one prism; the light path which is refracted at right angle by the upper refraction surface in the four-in-one prism, then directly penetrates through the four-in-one prism and then directly enters the imaging camera for imaging is parallel to the light path which is refracted at right angle by the lower refraction surface in the four-in-one prism, then directly penetrates through the four-in-one prism and then directly enters the imaging camera for imaging.
3. The combined secondary imaging visual light source of claim 1 or 2, wherein the upper double cemented right-angle prism and the lower double cemented right-angle prism are formed by cementing an upper right-angle prism and a lower right-angle prism, wherein the cementing surfaces of the upper right-angle prism and the lower right-angle prism are the inclined surfaces of the upper right-angle prism and the inclined surfaces of the lower right-angle prism.
4. The combined secondary imaging visual light source of claim 3, wherein the four-in-one prism is formed by gluing four right-angle triangular prisms with identical shapes and sizes, and the right angles of the four right-angle triangular prisms are complementary angles; the four right-angle triangular prisms are divided into an upper right-angle triangular prism, a lower right-angle triangular prism, a left right-angle triangular prism and a right-angle triangular prism, and the upper refraction surface is formed by combining straight surfaces of the upper right-angle triangular prism and the right-angle triangular prism which are attached to each other; the lower refraction surface is formed by combining straight surfaces of the lower right-angle triangular prism and the right-angle triangular prism which are attached to each other.
5. The combined secondary imaging visual light source of claim 1 or 2, further comprising an upper coaxial light source and a lower coaxial light source, wherein the upper coaxial light source is located outside a straight surface of the upper right-angle prism of the upper double-cemented right-angle prism parallel to the optical axes of the upper concave lens and the lower concave lens, and the light of the upper coaxial light source enters the upper right-angle prism of the upper double-cemented right-angle prism, is folded by the cemented surface of the upper double-cemented right-angle prism, passes through the upper right-angle prism of the upper double-cemented right-angle prism and the upper concave lens, and is irradiated on the upper object; the lower coaxial light source is positioned on the straight-surface outer side of the lower right-angle prism in the lower double-cemented right-angle prism and is parallel to the optical axis of the upper concave lens and the lower concave lens, the light of the lower coaxial light source enters the lower right-angle prism in the lower double-cemented right-angle prism and passes through the lower cemented surface in the lower double-cemented right-angle prism for refraction and then passes through the lower right-angle prism in the lower double-cemented right-angle prism and the lower concave lens to irradiate on the object below.
6. The combined secondary imaging visual light source of claim 3, further comprising an upper coaxial light source and a lower coaxial light source, wherein the upper coaxial light source is located outside a straight surface of the upper right-angle prism of the upper double-cemented right-angle prism parallel to the optical axes of the upper concave lens and the lower concave lens, and light of the upper coaxial light source enters the upper right-angle prism of the upper double-cemented right-angle prism, is folded by the cemented surface of the upper double-cemented right-angle prism, passes through the upper right-angle prism of the upper double-cemented right-angle prism and the upper concave lens, and is irradiated on the upper object; the lower coaxial light source is positioned on the straight-surface outer side of the lower right-angle prism in the lower double-cemented right-angle prism and is parallel to the optical axis of the upper concave lens and the lower concave lens, the light of the lower coaxial light source enters the lower right-angle prism in the lower double-cemented right-angle prism and passes through the lower cemented surface in the lower double-cemented right-angle prism for refraction and then passes through the lower right-angle prism in the lower double-cemented right-angle prism and the lower concave lens to irradiate on the object below.
7. The combined secondary imaging visual light source of claim 4, further comprising an upper coaxial light source and a lower coaxial light source, wherein the upper coaxial light source is located outside a straight surface of the upper right-angle prism of the upper double-cemented right-angle prism parallel to the optical axes of the upper concave lens and the lower concave lens, and light of the upper coaxial light source enters the upper right-angle prism of the upper double-cemented right-angle prism, is folded by the cemented surface of the upper double-cemented right-angle prism, passes through the upper right-angle prism of the upper double-cemented right-angle prism and the upper concave lens, and is irradiated on the upper object; the lower coaxial light source is positioned on the straight-surface outer side of the lower right-angle prism in the lower double-cemented right-angle prism and is parallel to the optical axis of the upper concave lens and the lower concave lens, the light of the lower coaxial light source enters the lower right-angle prism in the lower double-cemented right-angle prism and passes through the lower cemented surface in the lower double-cemented right-angle prism for refraction and then passes through the lower right-angle prism in the lower double-cemented right-angle prism and the lower concave lens to irradiate on the object below.
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USD912637S1 (en) * | 2018-04-27 | 2021-03-09 | Lg Electronics Inc. | HiFi audio and television receiver |
CN110987964A (en) * | 2019-12-26 | 2020-04-10 | 泉州师范学院 | Method for obtaining complete equal illumination of opposite two sides of semiconductor crystal grain through optical detection |
CN110987964B (en) * | 2019-12-26 | 2023-05-09 | 泉州师范学院 | Method for obtaining optical detection completely equal illumination of opposite two sides of semiconductor crystal grain |
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