CN110567405A - Flat panel detection device and flatness calculation method - Google Patents
Flat panel detection device and flatness calculation method Download PDFInfo
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- CN110567405A CN110567405A CN201910939996.5A CN201910939996A CN110567405A CN 110567405 A CN110567405 A CN 110567405A CN 201910939996 A CN201910939996 A CN 201910939996A CN 110567405 A CN110567405 A CN 110567405A
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- 238000001514 detection method Methods 0.000 title claims abstract description 77
- 238000004364 calculation method Methods 0.000 title claims abstract description 14
- 230000007246 mechanism Effects 0.000 claims description 54
- 238000007689 inspection Methods 0.000 claims description 37
- 238000012360 testing method Methods 0.000 claims description 18
- 238000005259 measurement Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
the invention provides a flat plate detection device and a flatness calculation method, relates to the technical field of measuring instruments, and aims to solve the technical problem that the conventional detection equipment can only detect flat plate workpieces with fixed sizes. The flat panel detection device includes: the sliding part is arranged on the detection platform and can slide over the flat workpiece placed on the detection platform; and the first detection assembly is arranged on the sliding part and used for measuring the distance between the first detection assembly and the upper surface of the flat workpiece. The flatness calculation method includes: establishing a three-dimensional rectangular coordinate system, and calculating coordinate values of all collection points on the flat plate workpiece according to the data collected by the first detection assembly; fitting a reference plane on the upper surface of the flat plate workpiece according to the coordinate values of all the acquisition points on the flat plate workpiece; calculating the offset of each acquisition point on the flat workpiece and the reference plane; and calculating the flatness of the upper surface of the flat workpiece. The technical scheme provided by the invention can detect and calculate the planeness of the flat plate workpieces with various sizes.
Description
Technical Field
the invention relates to the technical field of measuring instruments, in particular to a flat plate detection device and a flatness calculation method.
Background
In the production process, the requirements of flat workpieces such as mobile phone back plates, middle plates and the like on the flatness are strict, and the flatness of the flat workpieces needs to be detected.
The traditional contact type measuring method has complex device design, the height of a flat plate workpiece can be measured only by matching parts, and then the flatness is calculated, so that the detection efficiency is low, the influence of part processing errors and reading errors is avoided, and the requirement of high-precision measurement cannot be met; in recent years, a noncontact measuring apparatus has been developed, and although the design of the conventional noncontact measuring apparatus is simplified, the measurement of a flat workpiece having a small size is mainly performed, and the size of the flat workpiece that can be measured is fixed, so that the measurement requirement of a flat workpiece having no size cannot be satisfied.
disclosure of Invention
The invention aims to provide a flat plate detection device and a flatness calculation method, and aims to solve the technical problem that the existing detection equipment can only detect flat plate workpieces with fixed sizes.
In a first aspect, the present invention provides a flat panel testing device, comprising:
The sliding part is arranged on the detection platform and can slide over the flat workpiece placed on the detection platform;
And the first detection assembly is arranged on the sliding part and used for measuring the distance between the first detection assembly and the upper surface of the flat workpiece.
With reference to the first aspect, in a first possible implementation manner of the first aspect, the first detection component includes a plurality of first detectors;
the first detectors are arranged at intervals along the sliding direction perpendicular to the sliding part, and each first detector can measure the distance between the first detector and the upper surface of the flat workpiece.
With reference to the first aspect, in a second possible implementation manner of the first aspect, the flat panel detection device further includes a first driving mechanism, where the first driving mechanism is installed on the detection table and connected to the sliding member, and is capable of driving the sliding member to slide on the detection table.
with reference to the second possible implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the first driving mechanism includes a first driving element, a connecting element, and a first sliding rail;
The first sliding rail is arranged on the detection table and extends along the sliding direction of the sliding part;
one end of the connecting piece is connected with the sliding piece, and the other end of the connecting piece extends into the first sliding rail;
the first driving piece is installed on the detection table, is connected with the connecting piece and can drive the connecting piece to slide in the first sliding rail.
with reference to the third possible implementation manner of the first aspect, in a fourth possible implementation manner of the first aspect, the first driving component includes a first cylinder, a push rod of the first cylinder is connected to the connecting component, and a moving direction of the push rod of the first cylinder is parallel to an extending direction of the first sliding rail.
With reference to the first aspect, in a fifth possible implementation manner of the first aspect, two sliding tables are arranged on the detection table in parallel, and the sliding member is slidably arranged on the two sliding tables;
and a flat plate workpiece is placed between the two sliding tables.
with reference to the first aspect, in a sixth possible implementation manner of the first aspect, the flat panel detection apparatus further includes four side detection mechanisms, where the four side detection mechanisms are installed on the detection table and enclose a rectangular space for placing a flat panel workpiece;
The side face detection mechanism can measure the distance between the side face detection mechanism and the side face of the corresponding flat plate workpiece.
with reference to the sixth possible implementation manner of the first aspect, in a seventh possible implementation manner of the first aspect, the side detecting mechanism includes a second driving mechanism and a second detector;
the second detector is connected with the second driving mechanism and used for measuring the distance between the second detector and the side surface of the flat plate workpiece;
The second driving mechanism is mounted on the detection table and can drive the second detector to slide along the length direction of the side face of the flat workpiece.
with reference to the seventh possible implementation manner of the first aspect, in an eighth possible implementation manner of the first aspect, the second driving mechanism includes a second driving element and a second sliding rail;
The second slide rail extends along the length direction of the side surface of the flat workpiece, and the second detector is mounted on the second slide rail;
The second driving piece is connected with the second detector and can drive the second detector to slide along the second sliding rail.
In a second aspect, the present invention also provides a flatness calculation method for detecting a flat workpiece using the above flat detecting apparatus, the flatness calculation method including:
Establishing a three-dimensional rectangular coordinate system, and calculating coordinate values of all collection points on the flat plate workpiece according to the data collected by the first detection assembly;
Fitting a reference plane of the upper surface of the flat plate workpiece according to the coordinate values of the acquisition points on the flat plate workpiece;
calculating the offset of each acquisition point on the flat workpiece and the reference plane; and calculating the flatness of the upper surface of the flat workpiece.
By combining the technical scheme, the beneficial effects brought by the invention are analyzed as follows:
The invention provides a flat plate detection device which is a non-contact detection device, and a detection table can be used for placing flat plate workpieces with various sizes. When the flat plate detection device is used for detecting a flat plate, a flat plate workpiece to be detected is placed on the detection table, the sliding part slides over the flat plate workpiece, the first detection assembly can measure a plurality of distance data, and then the flatness of the upper surface of the detected flat plate workpiece can be calculated according to the data measured by the first detection assembly. The distance of the sliding part on the detection platform is adjusted, so that the first detection assembly on the detection platform can completely cover the detected flat plate workpiece, and the flat plate detection device can detect flat plate workpieces with various sizes.
The invention also provides a flatness calculation method using the flat plate detection device, and the flatness calculation method can calculate the flatness of the flat plate workpiece according to the data collected by the first detection assembly. Since the first detection assembly can collect flat workpieces with various sizes, the flatness calculation method can calculate the flatness of the flat workpieces with various sizes.
drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
fig. 1 is a schematic structural diagram of a flat panel inspection apparatus according to an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a side detection mechanism according to an embodiment of the present invention.
Icon: 10-a detection table; 11-a slide table; 20-a slide; 30-a first detection assembly; 31-a first detector; 40-a first drive mechanism; 41-a first driving member; 42-a connector; 43-a first slide rail; 50-a scaffold; 60-side detection mechanism; 61-a second drive mechanism; 611-a second drive member; 612-a second slide rail; 62-a second detector; 70-flat plate workpiece.
Detailed Description
the technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The present embodiment provides a flat panel testing device, please refer to fig. 1 and fig. 2 in the drawings of the specification together.
Referring to fig. 1, the flat panel inspection apparatus includes an inspection station 10, a slider 20, and a first inspection assembly 30. The inspection station 10 is used to place the flat plate workpiece 70, and can prevent flat plate workpieces 70 of various sizes. The slider 20 is provided on the test table 10 and can slide on the test table 10; when the flat plate workpiece 70 is placed on the inspection stage 10, the flat plate workpiece 70 is positioned below the slide member 20; the slider 20 can slide over the flat-plate workpiece 70 placed on the inspection stage 10. The first detection assembly 30 is mounted on the slide 20 and is used for measuring the distance between itself and the upper surface of the flat workpiece 70; as the slide 20 slides over the flat workpiece 70, the first sensing assembly 30 acquires a plurality of distance data along the sliding direction of the slide 20.
When the flat panel inspection apparatus is used to inspect a flat panel, the flat panel workpiece 70 to be inspected is placed on the inspection table 10, the slider 20 slides over the flat panel workpiece 70, the first inspection unit 30 then slides over the flat panel workpiece 70, the first inspection unit 30 can measure a plurality of distance data, and then the flatness of the upper surface of the flat panel workpiece 70 to be inspected can be calculated based on the data measured by the first inspection unit 30. The distance between the sliding member 20 and the inspection table 10 is adjusted so that the first inspection unit 30 on the inspection table 10 can completely cover the flat workpieces 70 to be inspected, and thus the flat panel inspection apparatus can inspect flat workpieces 70 of various sizes.
The flatness calculating method using the flat panel inspection apparatus includes: establishing a three-dimensional rectangular coordinate system, and calculating coordinate values of each collection point on the flat plate workpiece 70 according to the data collected by the first detection assembly 30; fitting a reference plane of the upper surface of the flat plate workpiece 70 according to the coordinate values of the acquisition points on the flat plate workpiece 70; calculating the offset of each acquisition point on the flat workpiece 70 and the reference plane; the flatness of the upper surface of the flat plate workpiece 70 is calculated.
When the three-dimensional rectangular coordinate system is established, any point can be used as the origin of coordinates, and the directions of the X axis, the Y axis and the Z axis can be determined at will without influencing the final calculation structure. After the three-dimensional rectangular coordinate system is established, the coordinate values of the collection points on the flat plate workpiece 70 can be calculated according to the data collected by the first detection assembly 30.
The general equation of a plane in a three-dimensional rectangular coordinate system is as follows:
Ax+By+Cz+D＝0
The above formula can be rewritten as:
Z＝ax+by+c
all measurement point data is substituted into the above equation and expressed in matrix:
The above formula can be written as:
Z＝SA
In the formula: a is a coefficient matrix of the reference plane equation.
with this plane as a reference plane, the amount of deviation from the plane of each measurement point can be found:
When the x and y coordinate values are large:
ei＝zij-axi-byi-c
Defined by the flatness error:
f＝max(ei)-min(ei)
f is the flatness, and the result is not influenced by the surface pose of the plate because the measuring surface is obtained by adopting a plane fitting mode.
When the flat plate detection device detects the flat plate workpiece 70, the first detection assembly 30 can be electrically connected to an upper computer, the first detection assembly 30 transmits a plurality of acquired distance data to the upper computer, and after a three-dimensional rectangular coordinate system is set in the upper computer in advance, the upper computer automatically calculates the flatness of the upper surface of the flat plate workpiece 70 according to the plurality of acquired distance data of the first detection assembly 30 and the calculation formula.
Fig. 1 shows a specific structure of a first detection assembly 30, the first detection assembly 30 including a plurality of first detectors 31; the plurality of first detectors 31 are arranged at intervals along a sliding direction perpendicular to the sliding member 20, each first detector 31 is capable of measuring a distance between itself and the upper surface of the flat workpiece 70, specifically, a plurality of through holes arranged at intervals are formed in the sliding member 20 along the sliding direction perpendicular to the sliding member 20, a bracket 50 is installed at each through hole, and the plurality of first detectors 31 are placed in the plurality of through holes in a one-to-one correspondence manner and connected to the corresponding brackets 50. Fig. 1 shows a case where the first detecting assembly 30 includes three first detectors 31, and of course, the first detecting assembly 30 may include four, five, etc. other numbers of first detectors 31, and the number of first detectors 31 provided on the sliding member 20 is determined according to actual needs.
Still taking the three first detectors 31 shown in fig. 1 as an example, when the first detecting assembly 30 is located at a specific position above the flat workpiece 70, each first detector 31 can measure a distance data, each distance data corresponds to a point on the flat workpiece 70, the three first detectors 31 can measure three distance data, and the three distance data correspond to three points on the flat workpiece 70 which are arranged at intervals in a direction perpendicular to the sliding direction of the slider 20, and when the three first detectors 31 slide with the slider 20 from the flat workpiece 70, the points corresponding to the distance data detected by the three first detectors 31 can cover the entire flat workpiece 70.
Preferably, the first detector 31 is a laser ranging sensor, and the distance measurement using the laser ranging sensor can have a higher measurement accuracy and ensure a higher measurement efficiency, and through experiments, when the first detector 31 is the laser ranging sensor, the measurement accuracy can reach 50 μm, and the data acquisition only needs 10 s. Of course, the first detector 31 may be other sensors for measuring distance, such as an ultrasonic distance measuring sensor and an infrared distance measuring sensor.
referring to fig. 1, the flat panel inspection apparatus further includes a first driving mechanism 40, wherein the first driving mechanism 40 is mounted on the inspection table 10 and connected to the slider 20, and can drive the slider 20 to slide on the inspection table 10. An operator of the flat panel inspection apparatus controls the first driving mechanism 40 so that the first driving mechanism 40 drives the slider 20 to slide on the inspection table 10 and to slide over the flat panel workpiece 70.
fig. 1 shows a specific structure of the first driving mechanism 40, and the first driving mechanism 40 includes a first driving member 41, a connecting member 42, and a first slide rail 43; the first slide rail 43 is mounted on the inspection table 10 and extends in the sliding direction of the slider 20; one end of the connecting element 42 is connected to the sliding element 20, and the other end extends into the first sliding track 43, which defines the moving direction of the connecting element 42 and thus the moving direction of the sliding element 20, so as to prevent the sliding element 20 from shifting during sliding; the first driving member 41 is mounted on the inspection table 10, and is connected to the connecting member 42, so as to drive the connecting member 42 to slide in the first slide rail 43, and the connecting member 42 further drives the sliding member 20 to slide on the inspection table 10.
preferably, as shown in fig. 1, the first driving member 41 includes a first air cylinder, a push rod of the first air cylinder is connected to the connecting member 42, and a moving direction of the push rod of the first air cylinder is parallel to an extending direction of the first slide rail 43, when the push rod of the first air cylinder extends or shortens, the push rod drives the connecting member 42 to slide along the first slide rail 43, and the connecting member 42 drives the sliding member 20 to slide on the detecting table 10. Taking the installation position of the first cylinder in fig. 1 as an example, the first cylinder is located at one end of the first slide rail 43, the first cylinder is operated to extend the push rod of the first cylinder, the push rod drives the sliding member 20 to slide over the flat workpiece 70 through the connecting member 42, the first detection assembly 30 slides over the flat workpiece 70 along with the sliding member 20, then the first cylinder is operated to shorten the push rod of the first cylinder, the push rod drives the sliding member 20 to return to the original position through the connecting member 42, and the next measurement process is performed after the flat workpiece 70 is replaced.
of course, the first driving member 41 may be a hydraulic cylinder, a linear motor, or the like.
The specific structure of the first driving mechanism 40 is not limited to fig. 1 and the above description, and the specific structure of the first driving mechanism 40 is only required to realize the linear sliding of the driving slider 20 on the detecting table 10. For example, the first driving mechanism 40 includes a motor, a screw rod and a nut, the motor is installed on the detection table 10, the screw rod is connected to a rotating shaft of the motor and extends along a sliding direction of the sliding part 20, the nut is connected to the sliding part 20 and sleeved on the screw rod, the motor drives the screw rod to rotate, the screw rod drives the nut to move along the length direction of the screw rod, and then the sliding part 20 is driven to slide on the detection table 10.
referring to fig. 1, two sliding tables 11 are arranged on a detection table 10 in parallel, and a sliding member 20 is arranged on the two sliding tables 11 in a sliding manner; between the two slide tables 11, a flat plate workpiece 70 is placed, and as shown in fig. 1, the slide table 11 is higher than the flat plate workpiece 70 placed on the inspection table 10, the slide member 20 can slide on the slide table 11 over the flat plate workpiece 70.
Referring to fig. 1, the flat panel inspection apparatus further includes four side inspection mechanisms 60, the four side inspection mechanisms 60 are mounted on the inspection table 10 and enclose a rectangular space for placing the flat panel workpiece 70, and when the flat panel workpiece 70 is placed, the flat panel workpiece 70 is placed in the rectangular space enclosed by the four side inspection mechanisms 60; each side surface detection mechanism 60 can measure the distance between itself and the corresponding side surface of the flat plate workpiece 70, and can further calculate the perpendicularity of each side surface with reference to the reference plane of the upper surface of the flat plate workpiece 70.
when the verticality of the side surface of the flat plate workpiece 70 is calculated, firstly, the coordinate values of all the collection points on the side surface of the flat plate workpiece 70 are calculated according to the established three-dimensional rectangular coordinate system; calculating a vertical plane perpendicular to the reference passing through each acquisition point according to the coordinate values of each acquisition point on the side surface of the flat workpiece 70; and calculating the distance between every two vertical planes, wherein the maximum distance value is the verticality of the side surface.
when the flat plate detection device detects the flat plate workpiece 70, the four side detection mechanisms 60 can be electrically connected to an upper computer, the four side detection mechanisms 60 transmit a plurality of distance data acquired respectively to the upper computer, and the upper computer automatically calculates the verticality of each side of the flat plate workpiece 70.
Fig. 2 shows a specific structure of the side surface detecting mechanism 60, and the side surface detecting mechanism 60 includes a second driving mechanism 61 and a second detector 62; the second detector 62 is connected to the second driving mechanism 61, and is used for measuring the distance between itself and the side surface of the flat workpiece 70; the second driving mechanism 61 is attached to the inspection table 10 and can drive the second detector 62 to slide in the longitudinal direction of the side surface of the flat workpiece 70.
When the second driving mechanism 61 drives the second detector 62 to slide along the length direction of the side surface of the flat plate workpiece 70, the second detector 62 can acquire a plurality of distance data along the length direction of the side surface of the flat plate workpiece 70, and then the perpendicularity of each side surface of the flat plate workpiece 70 can be calculated according to the plurality of distance data.
preferably, the second detector 62 is a laser ranging sensor, and the use of the laser ranging sensor for ranging can ensure high measurement accuracy and high measurement efficiency. Of course, the second detector 62 may be other sensors for measuring distance, such as an ultrasonic distance measuring sensor and an infrared distance measuring sensor.
fig. 2 also shows a specific structure of the second driving mechanism 61, and the second driving mechanism 61 includes a second driving member 611 and a second sliding rail 612; the second slide rail 612 extends along the length direction of the side surface of the flat workpiece 70, and the second detector 62 is mounted on the second slide rail 612; the second driving member 611 is connected to the second detector 62, the second driving member 611 provides power for the sliding of the second detector 62, and can drive the second detector 62 to slide along the second sliding rail 612, and the second sliding rail 612 defines the sliding direction of the second detector 62, so as to prevent the second detector 62 from shifting when sliding.
preferably, as shown in fig. 2, the second driving element 611 includes a second cylinder, a push rod of the second cylinder is connected to the second detector 62, and a moving direction of the push rod of the second cylinder is parallel to an extending direction of the second sliding rail 612, and when the push rod of the second cylinder extends or shortens, the push rod drives the second detector 62 to slide along the second sliding rail 612. Taking the installation position of the second cylinder in fig. 2 as an example, the second cylinder is located at one end of the second slide rail 612, the second cylinder is operated to extend the push rod of the second cylinder, the push rod drives the second detector 62 to slide along the second slide rail 612 and acquire a plurality of distance data, then the second cylinder is operated to shorten the push rod of the second cylinder, the push rod drives the original position of the second detector 62 to return, and the next measurement process is performed after the flat plate workpiece 70 is replaced.
Of course, the second driving member 611 may be a hydraulic cylinder, a linear motor, or the like.
The specific structure of the second driving mechanism 61 is not limited in fig. 2 and the above description, and the specific structure of the second driving mechanism 61 is only required to drive the second detector 62 to slide along the second sliding rail 612. For example, the second driving mechanism 61 includes a motor, a screw rod and a nut, the motor is installed on the detection table 10, the screw rod is connected to a rotating shaft of the motor and extends along the sliding direction of the sliding member 20, the nut is connected to the second detector 62 and is sleeved on the screw rod, the motor drives the screw rod to rotate, the screw rod drives the nut to move along the length direction of the screw rod, and then the second detector 62 is driven to slide along the second sliding rail 612.
finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A flat panel testing device, comprising:
A slider (20) which is provided on the inspection table (10) and can slide over a flat workpiece (70) placed on the inspection table (10);
and the first detection assembly (30) is mounted on the sliding piece (20) and is used for measuring the distance between the first detection assembly and the upper surface of the flat workpiece (70).
2. A flat panel testing device according to claim 1, characterized in that said first testing assembly (30) comprises a plurality of first detectors (31);
A plurality of the first detectors (31) are arranged at intervals along the sliding direction perpendicular to the sliding part (20), and each first detector (31) can measure the distance between itself and the upper surface of the flat workpiece (70).
3. The flat panel testing device according to claim 1, further comprising a first driving mechanism (40), wherein the first driving mechanism (40) is mounted on the testing table (10) and connected with the sliding member (20), and can drive the sliding member (20) to slide on the testing table (10).
4. a flat panel testing device according to claim 3, wherein the first driving mechanism (40) comprises a first driving member (41), a connecting member (42) and a first slide rail (43);
The first sliding rail (43) is arranged on the detection table (10) and extends along the sliding direction of the sliding part (20);
one end of the connecting piece (42) is connected with the sliding piece (20), and the other end of the connecting piece extends into the first sliding rail (43);
the first driving piece (41) is installed on the detection table (10), is connected with the connecting piece (42), and can drive the connecting piece (42) to slide in the first sliding rail (43).
5. The flat panel testing device according to claim 4, wherein the first driving member (41) comprises a first air cylinder, a push rod of the first air cylinder is connected with the connecting member (42), and a moving direction of the push rod of the first air cylinder is parallel to an extending direction of the first slide rail (43).
6. The flat panel testing device according to claim 1, wherein two sliding tables (11) are arranged in parallel on the testing table (10), and the sliding member (20) is slidably arranged on the two sliding tables (11);
And a flat plate workpiece (70) is placed between the two sliding tables (11).
7. The flat panel testing device according to claim 1, further comprising four side testing mechanisms (60), wherein the four side testing mechanisms (60) are mounted on the testing table (10) and enclose a rectangular space for placing the flat panel workpiece (70);
The side detection mechanism (60) can measure the distance between the side detection mechanism and the corresponding side of the flat workpiece (70).
8. The flat panel inspection device according to claim 7, wherein the side inspection mechanism (60) includes a second driving mechanism (61) and a second detector (62);
The second detector (62) is connected to the second driving mechanism (61) and is used for measuring the distance between the second detector and the side surface of the flat workpiece (70);
The second driving mechanism (61) is mounted on the detection table (10) and can drive the second detector (62) to slide along the length direction of the side surface of the flat workpiece (70).
9. The flat panel inspection device according to claim 8, wherein the second driving mechanism (61) comprises a second driving member (611) and a second sliding rail (612);
the second slide rail (612) extends along the length direction of the side surface of the flat workpiece (70), and the second detector (62) is mounted on the second slide rail (612);
The second driving member (611) is connected with the second detector (62) and can drive the second detector (62) to slide along the second sliding rail (612).
10. A flatness calculation method for inspecting a flat workpiece using the flat inspecting apparatus according to any one of claims 1 to 9, comprising:
Establishing a three-dimensional rectangular coordinate system, and calculating coordinate values of all collection points on the flat plate workpiece (70) according to the data collected by the first detection assembly (30);
fitting a reference plane of the upper surface of the flat workpiece (70) according to the coordinate values of the acquisition points on the flat workpiece (70);
calculating the offset of each acquisition point on the flat workpiece (70) and the reference plane; calculating the flatness of the upper surface of the flat workpiece (70).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097610A (en) * | 2020-09-11 | 2020-12-18 | 宁波敏实汽车零部件技术研发有限公司 | Skylight guide rail fine sawing machine inspection device |
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