CN110565171A - polycrystalline silicon thermal field crucible device - Google Patents

polycrystalline silicon thermal field crucible device Download PDF

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Publication number
CN110565171A
CN110565171A CN201910842812.3A CN201910842812A CN110565171A CN 110565171 A CN110565171 A CN 110565171A CN 201910842812 A CN201910842812 A CN 201910842812A CN 110565171 A CN110565171 A CN 110565171A
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sets
limiting
plate
column
groups
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CN201910842812.3A
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Chinese (zh)
Inventor
朱建峰
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Datong Xincheng New Material Co Ltd
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Datong Xincheng New Material Co Ltd
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Priority to CN201910842812.3A priority Critical patent/CN110565171A/en
Publication of CN110565171A publication Critical patent/CN110565171A/en
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to the technical field of polysilicon heating auxiliary devices, in particular to a polysilicon thermal field crucible device, wherein the interior of a working kettle can be conveniently observed, so that the practicability of the polysilicon thermal field crucible device is improved; the device comprises a working kettle, wherein a working cavity is arranged in the working kettle, the top end of the working kettle is communicated with a taking and placing opening, and a blocking cover is screwed on a bolt at the taking and placing opening; keep off lid top intercommunication and be provided with the observation hole to be provided with transparent observation plate in observation hole department, keep off lid top left side and be provided with the front and back intercommunication mouth, still include the slider, drive the post, drive the board, mounting panel and sponge are wiped, still include the after-fixing board, the before-fixing board, the handle, link and lead screw, the before-fixing board rear end is provided with primary shaft bearing, and be provided with first ball bearing and first spacing piece in primary shaft bearing, primary shaft bearing rear end is provided with first separation blade, still include the first cover spring of multiunit and the first flexible pipe of multiunit.

Description

Polycrystalline silicon thermal field crucible device
Technical Field
The invention relates to the technical field of polysilicon heating auxiliary devices, in particular to a polysilicon thermal field crucible device.
Background
As is well known, a polysilicon thermal field crucible device is an auxiliary device used for heating a semi-finished product in the production and processing process of polysilicon so as to better perform subsequent treatment on the semi-finished product, and is widely used in the field of polysilicon heating; the existing polycrystalline silicon thermal field crucible device comprises a working kettle, wherein a working cavity is arranged in the working kettle, the top end of the working kettle is communicated with a taking and placing opening, and a blocking cover is screwed on a bolt at the taking and placing opening; when the existing polycrystalline silicon thermal field crucible device is used, a semi-finished product is taken and placed through a taking and placing opening, and a working kettle is placed above a heat source to be heated so that the semi-finished product in the working kettle reacts; the existing polycrystalline silicon thermal field crucible device is found in use that the interior of a working kettle cannot be conveniently observed, so that the practicability of the polycrystalline silicon thermal field crucible device is poor.
Disclosure of Invention
In order to solve the technical problems, the invention provides the polycrystalline silicon thermal field crucible device which can be conveniently observed in a working kettle, so that the practicability of the polycrystalline silicon thermal field crucible device is improved.
the polycrystalline silicon thermal field crucible device comprises a working kettle, wherein a working cavity is arranged in the working kettle, the top end of the working kettle is communicated with a taking and placing opening, and a blocking cover is screwed on a bolt at the taking and placing opening; the top end of the blocking cover is communicated with an observation hole, a transparent observation plate is arranged at the observation hole, a front-back communication port is arranged on the left side of the top end of the blocking cover, the sponge eraser comprises a sliding block, a driving column, a driving plate, a mounting plate and a sponge eraser, the top end of the driving column is connected with the sliding block, the bottom end of the driving column penetrates through the front-back communication port and extends into the working kettle to be connected with the left side of the top end of the driving plate, the sponge eraser is arranged at the top end of the mounting plate and is tightly attached to the bottom side wall of the transparent observation plate, the sponge eraser further comprises a rear fixing plate, a front fixing plate, a handle, a connecting frame and a lead screw, the rear fixing plate and the front fixing plate are respectively arranged at the rear side and the front side of the left side of the top end of the blocking cover, a first bearing seat is arranged at the rear end of the front fixing plate, the lead screw front end passes rear fixed plate rear side wall and stretches out to rear fixed plate the place ahead, the lead screw front end passes first separation blade and inserts and be connected with first spacing piece to first ball bearing is inside, the slider spiral shell cover is in the lead screw outside, still include the first flexible pipe of the first cover spring of multiunit and multiunit, the one end of the first cover spring of multiunit all is connected with the mounting panel, the other end of the first cover spring of multiunit all with drive the board and be connected, the one end of the first flexible pipe of multiunit all is connected with the mounting panel, the other end of the first flexible pipe of multiunit all with drive the board and be connected, the first cover spring of multiunit is the suit respectively in the first flexible outside.
The polycrystalline silicon thermal field crucible device further comprises a rotating handle, a rotating frame, an inserting column, an inserting tube, a driving shaft and a stirring blade group, wherein the rotating handle and the rotating frame are positioned on the outer side of the working kettle, the rotating handle is installed on the rotating frame, the stirring blade group is positioned in the working cavity, the top end of the inserting column is connected with the rotating frame, the driving shaft is installed at the bottom end of the inserting tube, and the stirring blade group is installed on the driving shaft.
The polycrystalline silicon thermal field crucible device further comprises a limiting column, two groups of limiting springs and two groups of positioning blocks, wherein the bottom end of the inserting column is inserted into the top end of the inserting tube, a limiting cavity is arranged below the inner part of the inserting column, a left through hole and a right through hole are formed in the left side wall and the right side wall of the inserting column, a left limiting hole and a right limiting hole are respectively formed in the left side wall and the right side wall of the inserting tube, the limiting column is installed on the bottom side wall in the limiting cavity, the two groups of limiting springs are located in the limiting cavity, one ends of the two groups of limiting springs are respectively connected with the left side and the right side of the limiting column, one ends of the two groups of positioning blocks are respectively installed at the other ends of the two groups of limiting springs, the other ends of the two.
The polycrystalline silicon thermal field crucible device further comprises a pulley block, a limiting ring and a limiting rod group, wherein the limiting ring is sleeved on the outer side of the driving shaft, one end of the limiting rod group is connected with the limiting ring, the other end of the limiting rod group is connected with the bottom side wall of the blocking cover, one end of the pulley block is connected with the inner side of the limiting ring, and the other end of the pulley block is in close contact with the outer side of the driving shaft.
The invention relates to a polycrystalline silicon thermal field crucible device, which further comprises a connecting rod, an installation sheet, a hanging plate, a fixing plate, a second set spring and a second telescopic pipe, wherein the connecting rod is installed above the rear side of a working kettle, the front end of the installation sheet is connected with the upper side of the rear side of the connecting rod, the hanging plate is installed at the rear end of the installation sheet, the rear side of the second set spring is connected with the front side of the hanging plate, the fixing plate is installed at the front side of the second set spring, the rear side of the second telescopic pipe is connected with the front side of the hanging plate, the fixing plate is installed at the front side of the second telescopic pipe, and the.
The polycrystalline silicon thermal field crucible device also comprises four groups of supporting tables, four groups of lifting columns and four groups of lifting rings, wherein the four groups of supporting tables are respectively arranged at the left side, the front side, the right side and the rear side of the working kettle, the top ends of the four groups of supporting tables are respectively provided with a second bearing seat, a second ball bearing and a second limiting plate are respectively arranged in the four groups of second bearing seats, the top ends of the four groups of second bearing seats are respectively provided with a second baffle, the bottom ends of the four groups of lifting columns respectively penetrate through the four groups of second baffle plates and are respectively inserted into the four groups of second ball bearings to be connected with the four groups of second limiting plates, and the four groups of lifting rings are respectively.
The polycrystalline silicon thermal field crucible device comprises four groups of lifting rings, four groups of extrusion plates, four groups of third telescopic pipes and four groups of third springs, wherein the four groups of lifting rings are provided with gaps, one ends of the four groups of third telescopic pipes are respectively connected with one ends of the four groups of gaps, the other ends of the four groups of third telescopic pipes are respectively connected with the four groups of extrusion plates, one ends of the four groups of third springs are respectively connected with one ends of the four groups of gaps, the other ends of the four groups of third springs are respectively connected with the four groups of extrusion plates, the four groups of third springs are sleeved on the outer sides of the four groups of third telescopic pipes, and the four groups of extrusion plates are respectively attached to the other ends.
According to the polycrystalline silicon thermal field crucible device, the blocking cover is longitudinally provided with the through groove, the ball group is rotatably fixed on the inner side wall of the through groove, the bottom end of the inserting column penetrates through the ball group and extends into the working kettle, two fixing rings are fixedly sleeved on the outer side of the inserting column, the inner sides of the two fixing rings are respectively provided with the two movable wheel groups, and the two movable wheel groups are respectively in close contact with the two sides of the top bottom of the blocking cover.
compared with the prior art, the invention has the beneficial effects that: the inside of the working kettle 1 can be conveniently observed through the transparent observation plate 3, so that the practicability of the working kettle is improved, when the transparent observation plate 3 is dirty, the sponge wiper 8 on the mounting plate 7 can move forwards and backwards through the sliding block 4, so as to wipe the transparent observation plate 3, and the handle 11 is more practical, the handle 11 is manually rotated to drive the screw 13 on the connecting frame 12 to rotate, so as to drive the sliding block 4 to move forwards and backwards, and the sliding block 4 does not rotate along with the rotation of the screw 13 when moving forwards and backwards because the driving post 5 passes through the forward and backward communication port, the rotation of the screw 13 is facilitated due to the design that the handle 11 can rotate, so that the screw 13 is more labor-saving to rotate, the first limiting piece limits the screw 13, the screw 13 is prevented from exiting out of the first bearing seat, and is rigidly connected with the screw 13, when the screw 13 rotates, the first limiting piece rotates along with the screw, and the first ball bearing is clamped between the first blocking piece 14 and the first, thereby can not leap out first bearing frame, can mechanical locking between first spacing piece and the first bearing frame to make things convenient for first spacing piece further to fix, the first set of spring 15 extrusion mounting panel 7 of multiunit makes it extrude the sponge and wipe 8, makes the sponge wipe 8 paste tight transparent observation board 3 all the time.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a top view of the shield cap;
FIG. 3 is a right side view of the connection of the connecting rod, mounting plate and clevis;
FIG. 4 is an enlarged partial view of portion A of FIG. 1;
FIG. 5 is an enlarged view of part B of FIG. 1;
FIG. 6 is an enlarged partial view of portion C of FIG. 1;
In the drawings, the reference numbers: 1. a working kettle; 2. a blocking cover; 3. a transparent viewing plate; 4. a slider; 5. driving the column; 6. driving the plate; 7. mounting a plate; 8. sponge wiping; 9. a rear fixing plate; 10. a front fixing plate; 11. a handle; 12. a connecting frame; 13. a lead screw; 14. a first baffle plate; 15. a first set of springs; 16. turning a handle; 17. a rotating frame; 18. inserting a column; 19. inserting a tube; 20. driving a shaft; 21. stirring the leaf group; 22. a limiting column; 23. positioning blocks; 24. a pulley block; 25. a limiting ring; 26. a limit rod group; 27. a connecting rod; 28. mounting a sheet; 29. hanging the plate; 30. a fixing plate; 31. a second set of springs; 32. a support table; 33. lifting the lifting column; 34. lifting a lifting ring; 35. a second baffle plate; 36. a pressing plate; 37. a third set of springs; 38. a fixing ring; 39. and moving the wheel set.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1 to 6, in the polycrystalline silicon thermal field crucible device of the present invention, when the polycrystalline silicon thermal field crucible device is operated, the inside of the working kettle 1 can be conveniently observed through the transparent observation plate 3, so as to improve the practicability, when the transparent observation plate 3 is dirty, the sponge wiper 8 on the mounting plate 7 can be moved forward and backward by sliding the slider 4, so as to wipe the transparent observation plate 3, and more practically, the handle 11 is manually rotated to drive the lead screw 13 on the connecting frame 12 to rotate, so as to drive the slider 4 to move forward and backward, and because the driving post 5 passes through the forward and backward communicating port, the slider 4 is not rotated along with the rotation of the lead screw 13 when moving forward and backward, the design that the handle 11 can rotate makes the lead screw 13 more labor-saving, the first limiting piece limits the lead screw 13, so as to prevent the lead screw 13 from exiting the first bearing seat, and the first limiting piece is rigidly connected with the lead screw 13, when the screw 13 rotates, the first limiting piece rotates together with the screw, and the first ball bearing is clamped between the first blocking piece 14 and the first limiting piece, so that the first limiting piece cannot be spread out of the first bearing seat, the first limiting piece and the first bearing seat can be mechanically locked, so that the first limiting piece is further fixed conveniently, and the mounting plate 7 is extruded by the multiple groups of first set springs 15 to extrude the sponge eraser 8, so that the sponge eraser 8 is always attached to the transparent observation plate 3; the rotating handle 16 can be rotated manually to drive the stirring blade group 21 on the driving shaft 20 to stir the semi-finished product, so that the semi-finished product is heated more uniformly; the stirring blade group 21 can be disassembled by matching the inserting column 18 and the inserting tube 19, only two groups of positioning blocks 23 need to be pressed inwards manually during disassembly, so that the two groups of positioning blocks 23 are drilled out from a left limiting hole and a right limiting hole, the inserting tube 19 is convenient to longitudinally move, disassemble or assemble, the two groups of positioning blocks 23 are drilled into the left limiting hole and the right limiting hole under the action of two groups of limiting springs after adjustment, the fixing effect is achieved, the side wall of the inserting column 18 is tightly attached to the inner side wall of the inserting tube 19, the inserting tube 19 is convenient to shake randomly, and the blocking cover 2 is opened before the inserting column 18 and the inserting; the position of the limiting ring 25 can be limited through the limiting rod group 26, the limiting ring 25 can play a certain limiting role in the rotation of the driving shaft 20, the use reliability is improved, the shaking of the driving shaft 20 is reduced, the pulley block 24 assists in rotating more smoothly, and the supporting effect is improved; when the working kettle 1 is integrally fixed, the auxiliary working kettle 1 can be conveniently and stably fixed through the connection and the cooperation among the connecting rod 27, the mounting piece 28 and the hanging plate 29, and when the working kettle is fixed, the fixing plate 30 is driven by the second spring 31 to be conveniently adjusted in the front-back direction, so that the distance between the fixing plate 30 and the connecting rod 27 is adapted to external plate-shaped fixing materials with different thicknesses, and the adaptability is improved; the hoisting device can be conveniently integrally hoisted through the two groups of hoisting rings 34, the hoisting rings 34 can be conveniently rotated through the four groups of second ball bearings, the adaptability is improved, the second limiting piece limits the hoisting column 33 to prevent the hoisting column 33 from jumping out of the second bearing seat, the second limiting piece is rigidly connected with the hoisting column 33, the second limiting piece rotates along with the hoisting column 33 when the hoisting column 33 rotates, and the second ball bearings are clamped between the second blocking piece 35 and the second limiting piece, so that the second bearing seat cannot be jumped out, and the second limiting piece and the second bearing seat can be mechanically locked, so that the second limiting piece can be further fixed conveniently; the lifting ring 34 can be conveniently hung at any position through the notch on the lifting ring 34, the third sleeve spring 37 drives the extrusion plate 36 to block the notch, the use reliability is improved, the third telescopic pipe assists the third sleeve spring 37 to be difficult to extrude and deform, the hanging limitation of the four lifting rings 34 is reduced, and the adaptability of the lifting ring is improved; can assist the post 18 of inserting through the ball group to rotate more smoothly, two sets of solid fixed rings 38 are injectd post 18 longitudinal position, make it only rotate and not mobilizable, move the convenient rotation of wheelset 39 and improve the support effect.
The polycrystalline silicon thermal field crucible device provided by the invention has the advantages that the installation modes, the connection modes or the arrangement modes of all the components are welding, riveting or other common mechanical modes, the sliding/rotating fixation is that the components do not fall off under the sliding/rotating state, the sealing communication is that the two connecting pieces are communicated and simultaneously sealed, the specific structures, the models and the coefficient indexes of all the components are self-contained technologies, the beneficial effects can be realized, all the electric modules and the electric appliances are common electric appliances in the market, the electric modules can be used only by being electrically connected with each other according to the purchased instructions when bought back for use, and the control module is the common self-contained module, so the details are not repeated.
In the polycrystalline silicon thermal field crucible device of the present invention, unless otherwise specified, the terms "up, down, left, right, front, back, inner, and vertical, horizontal" and the like are included in the terms and the terms only represent the orientation of the terms in the normal use state, or be a trivial term understood by those skilled in the art, and should not be considered as limiting the term, at the same time, the numerical terms "first," "second," and "third," etc. do not denote any particular quantity or order, but rather are used to distinguish one from another, furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements, but also includes other elements not expressly listed or inherent to such process, method, article, or apparatus.
the above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (8)

1. A polycrystalline silicon thermal field crucible device comprises a working kettle (1), wherein a working cavity is arranged in the working kettle (1), the top end of the working kettle (1) is communicated with a taking and placing opening, and a blocking cover (2) is screwed on a bolt at the taking and placing opening; it is characterized in that the top end of the blocking cover (2) is communicated with an observation hole, a transparent observation plate (3) is arranged at the observation hole, a front-back communication port is arranged on the left side of the top end of the blocking cover (2), the device also comprises a slide block (4), a driving column (5), a driving plate (6), a mounting plate (7) and a sponge wiper (8), the top end of the driving column (5) is connected with the slide block (4), the bottom end of the driving column (5) passes through the front-back communication port and extends into the working kettle (1) to be connected with the left side of the top end of the driving plate (6), the sponge wiper (8) is arranged on the top end of the mounting plate (7), the sponge wiper (8) is tightly attached to the bottom side wall of the transparent observation plate (3), the device also comprises a rear fixing plate (9), a front fixing plate (10), a handle (11), a connecting frame (12) and a lead screw (13), the rear fixing plate, the rear end of the front fixing plate (10) is provided with a first bearing seat, a first ball bearing and a first limiting sheet are arranged in the first bearing seat, the rear end of the first bearing seat is provided with a first blocking piece (14), a handle (11) is rotatably fixed at the rear end of the connecting frame (12), the rear end of the lead screw (13) is connected with the front part of the connecting frame (12), the front end of the lead screw (13) penetrates through the rear side wall of the rear fixing plate (9) and extends to the front part of the rear fixing plate (9), the front end of the lead screw (13) penetrates through the first blocking piece (14) and is inserted into the first ball bearing to be connected with the first limiting sheet, the sliding block (4) is sleeved outside the lead screw (13) in a threaded manner, the front-end-adjustable telescopic pipe device further comprises a plurality of groups of first sleeve springs (15) and a plurality of groups of first telescopic pipes, one end of the plurality of groups of first sleeve springs (15) is connected with the mounting plate (7), the other end of the groups of first sleeve springs, the other ends of the plurality of groups of first telescopic pipes are connected with the driving plate (6), and the plurality of groups of first sleeve springs (15) are respectively sleeved outside the plurality of groups of first telescopic pipes.
2. The polycrystalline silicon thermal field crucible device as claimed in claim 1, further comprising a rotating handle (16), a rotating frame (17), an inserting column (18), an inserting tube (19), a driving shaft (20) and a stirring blade set (21), wherein the rotating handle (16) and the rotating frame (17) are both positioned at the outer side of the working kettle (1), the rotating handle (16) is installed on the rotating frame (17), the stirring blade set (21) is positioned in the working cavity, the top end of the inserting column (18) is connected with the rotating frame (17), the driving shaft (20) is installed at the bottom end of the inserting tube (19), and the stirring blade set (21) is installed on the driving shaft (20).
3. The crucible device for the polysilicon thermal field according to claim 2, wherein the bottom end of the insertion column (18) is inserted into the top end of the insertion tube (19), and further comprising a limiting column (22), two sets of limiting springs and two sets of positioning blocks (23), a limiting cavity is arranged below the inner part of the insertion column (18), a left through hole and a right through hole are arranged on the left side wall and the right side wall of the insertion column (18), a left limiting hole and a right limiting hole are respectively arranged on the left side wall and the right side wall of the insertion tube (19), the limiting column (22) is arranged on the bottom side wall in the limiting cavity, the two sets of limiting springs are located in the limiting cavity, one end of each set of limiting spring is respectively connected with the left side and the right side of the limiting column (22), one end of each set of the two sets of positioning blocks (23) is respectively arranged at the other end of the two sets, and the other ends of the two groups of positioning blocks (23) are respectively inserted into the left limiting hole and the right limiting hole.
4. The crucible device for the polysilicon thermal field according to claim 3, further comprising a pulley block (24), a limiting ring (25) and a limiting rod set (26), wherein the limiting ring (25) is sleeved outside the driving shaft (20), one end of the limiting rod set (26) is connected with the limiting ring (25), the other end of the limiting rod set (26) is connected with the bottom side wall of the baffle cover (2), one end of the pulley block (24) is connected with the inner side of the limiting ring (25), and the other end of the pulley block (24) is in close contact with the outer side of the driving shaft (20).
5. the crucible device for the thermal field of polycrystalline silicon according to claim 4, further comprising a connecting rod (27), a mounting plate (28), a hanging plate (29), a fixing plate (30), a second spring set (31) and a second telescopic tube, wherein the connecting rod (27) is installed above the rear side of the working kettle (1), the front end of the mounting plate (28) is connected above the rear side of the connecting rod (27), the hanging plate (29) is installed at the rear end of the mounting plate (28), the rear side of the second spring set (31) is connected with the front side of the hanging plate (29), the fixing plate (30) is installed at the front side of the second spring set (31), the rear side of the second telescopic tube is connected with the front side of the hanging plate (29), the fixing plate (30) is installed at the front side of the second telescopic tube, and the second spring set (31) is sleeved outside the second telescopic tube.
6. The crucible device for the polysilicon thermal field as set forth in claim 5, further comprising four sets of support tables (32), four sets of lifting columns (33) and four sets of lifting rings (34), wherein the four sets of support tables (32) are respectively installed at the left side, the front side, the right side and the rear side of the work kettle (1), the top ends of the four sets of support tables (32) are respectively provided with a second bearing seat, a second ball bearing and a second limiting plate are respectively arranged in the four sets of second bearing seats, the top ends of the four sets of second bearing seats are respectively provided with a second blocking plate (35), the bottom ends of the four sets of lifting columns (33) respectively penetrate through the four sets of second blocking plates (35) and are respectively inserted into the four sets of second ball bearings to be connected with the four sets of second limiting plates, and the four sets of lifting rings (34) are respectively installed at.
7. the crucible device for the polysilicon thermal field according to claim 6, wherein the four lifting rings (34) are provided with notches, and further comprises four sets of pressing plates (36), four sets of third telescopic tubes and four sets of third springs (37), one end of each of the four sets of third telescopic tubes is connected with one end of each of the four sets of notches, the other end of each of the four sets of third telescopic tubes is connected with one end of each of the four sets of pressing plates (36), one end of each of the four sets of third springs (37) is connected with one end of each of the four sets of notches, the other end of each of the four sets of third springs (37) is connected with each of the four sets of pressing plates (36), the four sets of third springs (37) are sleeved outside the four sets of third telescopic tubes, and the four sets of pressing plates (36) are respectively attached.
8. The crucible device for the thermal field of polysilicon as claimed in claim 7, wherein the retaining cover (2) is longitudinally provided with a through slot, the inner side wall of the through slot is rotatably fixed with a ball set, the bottom end of the insert column (18) passes through the ball set and extends into the working kettle (1), two sets of fixing rings (38) are fixedly sleeved outside the insert column (18), the inner sides of the two sets of fixing rings (38) are respectively provided with a moving wheel set (39), and the two sets of moving wheel sets (39) are respectively in close contact with the two sides of the top and the bottom of the retaining cover (2).
CN201910842812.3A 2019-09-06 2019-09-06 polycrystalline silicon thermal field crucible device Pending CN110565171A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111926392A (en) * 2020-07-06 2020-11-13 大同新成新材料股份有限公司 Semiconductor graphite crucible with automatic dumping function and dumping method thereof

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