CN110565076B - Liquid supplementing method - Google Patents
Liquid supplementing method Download PDFInfo
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- CN110565076B CN110565076B CN201810573694.6A CN201810573694A CN110565076B CN 110565076 B CN110565076 B CN 110565076B CN 201810573694 A CN201810573694 A CN 201810573694A CN 110565076 B CN110565076 B CN 110565076B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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Abstract
The invention provides a liquid supplementing method.A liquid supplementing device comprises a plurality of spare containers; the liquid supplementing method comprises the following steps: s1, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than a preset first liquid level; if yes, go to step S2; s2, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, enabling the detected standby container to be on-line, and supplementing liquid to the gas container; if yes, enabling the next spare container of the detected spare containers to be on line, and replenishing liquid to the gas container. The liquid supplementing method provided by the invention can automatically supplement the process gas into the steel cylinder under the condition of not needing equipment to stop, and can reduce the pollution on the gas inlet pipeline.
Description
Technical Field
The invention relates to the field of integrated circuits, in particular to a liquid supplementing method.
Background
At present, in the very large scale integrated circuit industry, many thin films are prepared by a Chemical Vapor Deposition (CVD) method, liquid process gas is used in the process, the process gas plays an important role in the process, and when the process gas is lacked, the process gas needs to be supplemented in time to ensure the normal preparation of the thin films.
In the prior art, process gas is usually filled in a steel cylinder in a liquid state, a plurality of steel cylinders are installed on the same equipment, when the steel cylinder lacks the process gas, a worker needs to shut down the equipment firstly, take the steel cylinder lacking the process gas down from the equipment, install a new steel cylinder filled with the process gas onto the equipment, and then start the equipment, so that the equipment can be continuously used.
However, in the above method, the process is complex in process procedure and the production line is large in scale in the current production environment, so that the process gas consumption speed is very high, the worker needs to frequently shut down the equipment to replace the steel cylinder and supplement the process gas, and the production efficiency is reduced.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art, and provides a liquid supplementing method which can automatically supplement process gas into a steel cylinder without equipment halt and can reduce pollution on an air inlet pipeline.
In order to achieve the purpose of the invention, the liquid supplementing method is provided, and the liquid supplementing device comprises a plurality of spare containers;
the liquid supplementing method comprises the following steps:
s1, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than a preset first liquid level; if yes, go to step S2;
s2, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, enabling the detected standby container to be on-line, and supplementing liquid to the gas container; if yes, enabling the next spare container of the detected spare containers to be on line, and replenishing liquid to the gas container.
Preferably, the step S1 specifically includes the following steps:
s11, detecting the current state of the process chamber when the process starts, and judging whether the current state of the process chamber is in an online state or an offline state; if the current state of the process chamber is an on-line state, performing an automatic process, and performing step S12; if the current state of the process chamber is an off-line state, performing a manual process, and performing step S13;
s12, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if so, taking the process chamber offline after the current process is completed, and performing step S2;
s13, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if yes, go to step 14;
s14, judging whether the liquid level of the gas container is lower than a preset third liquid level, wherein the third liquid level is lower than the first liquid level; if so, the process chamber is taken offline after the current process is completed and the step S2 is performed.
Preferably, the step S13 specifically includes the following steps:
s131, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if yes, go to step S132 and step S14;
and S132, carrying out liquid shortage prompt and giving an option of whether to continue the process for the user to select.
Preferably, the liquid supplementing equipment further comprises an air inlet pipeline, wherein air inlets of the air inlet pipeline are connected with an air source, and a plurality of air outlets of the air inlet pipeline are correspondingly connected with the air inlets of the standby containers one by one;
the step S2 specifically includes the following steps:
s21, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, enabling the detected standby container to be on-line; if so, enabling the next spare container of the detected spare containers to be online;
s22, detecting the pressure of the air inlet pipeline, and judging whether the pressure of the air inlet is higher than a preset pressure or not; if yes, go to step S23; if not, go to step S24;
s23, air suction is carried out on the air inlet pipeline through the air inlet of the air inlet pipeline, and then the step S24 is carried out;
s24, detecting the pressure in the pipeline between the on-line standby container and the gas container, and judging whether the pressure exceeds a preset threshold value, if so, executing the step S25; if not, go to step S26;
s25, performing air suction or inflation on the online standby container according to the judgment result, and then performing the step S26;
and S26, using the on-line spare container to replenish the gas container.
Preferably, the step S2 further includes the steps of:
s27, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container rises to a preset fourth liquid level; if yes, stopping the liquid supplementing work of the on-line standby container; if not, go to step S28;
s28, detecting the liquid level of the online standby container, judging whether the liquid level of the online standby container is lower than the second liquid level, and if not, continuing to perform the step S26; if yes, a liquid shortage prompt is performed, the next spare container is switched on line, and the step S26 is continued.
Preferably, the liquid supplementing method further comprises the following steps:
s3, making the liquid in all pipelines connected between the spare container and the gas container flow back to the spare container on line.
Preferably, the liquid supplementing equipment further comprises an air inlet pipeline, wherein air inlets of the air inlet pipeline are connected with an air source, and a plurality of air outlets of the air inlet pipeline are correspondingly connected with the air inlets of the standby containers one by one;
the step S3 specifically includes the following steps:
s31, respectively evacuating the on-line spare container and the gas container through the gas inlet of the gas inlet pipeline to reduce the pressure in the pipeline between the on-line spare container and the gas container and the process chamber;
s32, inflating the on-line spare container through the air inlet of the air inlet pipeline to enable the liquid in the air inlet pipeline to flow back to the on-line spare container;
s33, inflating the gas container through the gas inlet of the gas inlet pipeline to enable liquid in all pipelines connected between the standby container and the gas container which are online to flow back into the gas container.
Preferably, the step S3 is performed at least once.
Preferably, the step S31 specifically includes the following steps:
s311, respectively exhausting the online spare container and the online gas container through a gas inlet of the gas inlet pipeline so as to reduce the pressure in a pipeline between the online spare container and the online gas container and the pressure in a pipeline between the online spare container and the online gas container;
s312, judging whether the air pumping time reaches a preset time or not, or judging whether the pressure in a pipeline between the standby container and the gas container and the pressure in a pipeline between the gas container and the process chamber are lower than a preset pressure or not; if yes, go to step S32; if not, the step S311 is continued.
Preferably, in the step S2, the plurality of spare containers are numbered, and the liquid levels of the spare containers are detected one by one in the order of the numbers.
The invention has the following beneficial effects:
when the liquid level in the gas container is lower than the preset first liquid level, the liquid is automatically supplemented into the gas container by virtue of the plurality of spare containers, namely, the liquid process gas is automatically supplemented into the gas container from the spare containers under the condition that equipment does not need to be stopped, so that the liquid level in the gas container reaches the liquid level of normal operation of the equipment. In addition, when the liquid level of the online standby container is lower than the preset second liquid level, the automatic switching of the standby container can be realized, and the normal operation of the process is ensured. Moreover, the standby container which is not on-line can be replaced during the process without equipment halt, thereby ensuring the process efficiency.
Drawings
FIG. 1 is a block flow diagram of a fluid replacement method provided by the present invention;
FIG. 2 is a block flow diagram of a specific process of the fluid replacement method provided by the present invention;
FIG. 3 is a block flow diagram of another embodiment of the fluid replacement method provided by the present invention;
FIG. 4 is a block diagram of another specific process flow of the fluid replacement method provided by the present invention;
fig. 5 is a schematic structural diagram of a fluid infusion apparatus used in the fluid infusion method provided by the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes the fluid infusion method provided by the present invention in detail with reference to the accompanying drawings.
The liquid supplementing method provided by the invention adopts liquid supplementing equipment to supplement liquid for the gas container 1. The fluid replacement device comprises a plurality of spare containers 2.
The liquid supplementing method comprises the following steps:
s1, detecting the liquid level of the gas container 1, and judging whether the liquid level of the gas container 1 is lower than a preset first liquid level; if yes, the process proceeds to step S2.
S2, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, enabling the detected standby container to be on-line, and supplementing liquid to the gas container; if yes, enabling the next spare container of the detected spare containers to be on line, and replenishing liquid to the gas container.
In the above step S2, a plurality of reserve containers may be numbered, and the liquid levels of the reserve containers 2 may be detected one by one in the order of the numbers.
The above-described fluid replacement method is described in detail below. Specifically, as shown in fig. 1 and 5, the fluid infusion method includes the following steps:
s101, detecting the liquid level of the gas container 1;
s102, judging whether the liquid level of the gas container 1 is lower than a preset first liquid level or not; if yes, go to step S103; if not, returning to the step S101;
s103, detecting the liquid levels of the standby containers 2 one by one according to a preset sequence;
s104, judging whether the detected liquid level of the standby container 2 is lower than a preset second liquid level or not; if not, go to step S105; if yes, go to step S106;
s105, enabling the detected standby container 2 to be on-line;
s106, enabling the next spare container 2 of the detected spare containers 2 to be on line;
s107, liquid replacement is performed on the gas container 1.
When the liquid level in the gas container 1 is lower than the preset first liquid level, the liquid is automatically supplemented into the gas container 1 by means of the plurality of spare containers 2, namely, under the condition that equipment does not need to be stopped, the liquid process gas is automatically supplemented into the gas container 1 from the spare containers 2, so that the liquid level in the gas container 1 reaches the liquid level of normal work of the equipment, compared with the prior art, the gas container 1 and the gas inlet pipeline 3 do not need to be disassembled and assembled, the process efficiency can be improved, and the pollution to the gas inlet pipeline 3 can be reduced. In addition, when the liquid level of the online standby container 2 is lower than the preset second liquid level, the automatic switching of the standby container 2 can be realized, and the normal operation of the process is ensured. Moreover, the replacement of the spare container 2, which is not on-line, can be performed while the process is being performed, without the need for equipment shutdown, so that the process efficiency can be ensured.
It should be noted that the first liquid level may be set according to process requirements, as long as it is ensured that the liquid level of the liquid in the gas container 1 is located above the first liquid level, which can meet the process requirements, and the second liquid level may be set according to process requirements, as long as it is ensured that the liquid level of the liquid in the backup container 2 is located above the second liquid level, which can meet the process requirements.
The gas container 1 is used to supply a process gas to the reaction chamber, and is, for example, a steel cylinder. Further, the gas container 1 may be one or more, and one gas container 1 may be provided with at least two reserve containers 2 for replenishing it, and one gas container 1 may be provided with a dedicated reserve container 2, or a reserve container 2 may be used in combination with other gas containers 1.
As shown in fig. 2, the step S1 specifically includes the following steps:
s201, detecting the current state of the process chamber;
s202, judging whether the current state of the process chamber is an online state or an offline state; if the online status is true, go to step S203; if the status is off-line, go to step S204;
s203, automatic process;
the automatic process specifically comprises the following steps:
s2031, detecting the liquid level of the gas container 1;
s2032, judging whether the liquid level of the gas container 1 is lower than the first liquid level; if not, returning to the step S2031; if yes, go to step S2033;
s2033, the process chamber is taken off-line after the current process is completed.
S204, performing a manual process;
the manual process specifically comprises the following steps:
s2041, detecting the liquid level of the gas container 1;
s2042, judging whether the liquid level of the gas container 1 is lower than a first liquid level; if not, returning to the step S2041; if yes, go to step S2043;
s2043, carrying out liquid shortage prompting, and giving an option of whether to continue the process for a user to select; if the user selects to continue the process, go to step S2044; if the user chooses not to continue the process, go to step S2045;
s2044, judging whether the liquid level of the gas container 1 is lower than a preset third liquid level; if not, returning to the step S2041; if yes, go to step S2045;
s2045, the process chamber is taken off line after the current process is completed.
Specifically, the on-line state of the process chamber refers to that the process chamber automatically performs the process without being controlled by a worker, the off-line state refers to that the process chamber performs the process under the control of the worker, if the process chamber is in the on-line state, the automatic process is performed, if the process chamber is in the off-line state, the manual process is performed, and due to the lack of the control of the worker during the automatic process, the liquid needs to be timely supplemented to the gas container 1 at a preset first liquid level, so that the situation that no liquid exists in the gas container 1 is prevented from occurring, and the process cannot be continuously performed, but in the manual process, the worker can determine whether the process needs to be continuously performed according to the actual situation of the current process, so that the process can be continuously performed after the gas container 1 is lower than the preset first liquid level until the liquid level in the gas container 1 is in a very small number, no further treatment of the process can be carried out, i.e. a predetermined third liquid level, and then a liquid replenishment of the gas container 1 is carried out.
In the step S2043, when the manual process is performed, when the liquid level of the gas container 1 is lower than the preset first liquid level, a liquid shortage prompt is given for the user to select whether to continue the process, so that the user can know the liquid level state in the gas container 1, and the user can automatically determine whether to continue the process according to the current process. Of course, in practical applications, step S2043 may be omitted.
In this embodiment, the fluid infusion apparatus further includes an air inlet pipeline 3, an air inlet of the air inlet pipeline 3 is connected to the air source, and a plurality of air outlets of the air inlet pipeline 3 are connected to the air inlets of the plurality of spare containers 2 in a one-to-one correspondence manner. As shown in fig. 3, the step S2 specifically includes the following steps:
s301, detecting the liquid levels of the standby containers 2 one by one according to a preset sequence;
s302, judging whether the liquid level of the detected standby container 2 is lower than a preset second liquid level or not; if not, go to step S303; if yes, go to step S304;
s303, bringing the detected spare container 2 online;
s304, enabling the next spare container 2 of the detected spare containers to be on line;
s305, detecting the pressure of the intake port of the intake pipe 3;
s306, judging whether the pressure of the air inlet is higher than a preset pressure or not; if yes, go to step S307; if not, go to step S308;
s307, air suction is carried out on the air inlet pipeline 3 through an air inlet of the air inlet pipeline 3;
s308, detecting the pressure in the pipeline between the online standby container 2 and the gas container 1;
s309, judging whether the pressure exceeds a preset threshold value; if yes, go to step S310; if not, go to step S311;
s310, performing air suction or inflation on the online standby container 2 according to the judgment result;
s311, using the online spare container 2 to replenish the liquid in the gas container 1;
s312, detecting the liquid level of the gas container 1;
s313, judging whether the liquid level of the gas container 1 rises to a preset fourth liquid level; if yes, go to step S314; if not, go to step S315;
s314, stopping the liquid supplementing work of the online standby container 2;
s315, detecting the liquid level of the online standby container 2;
s316, judging whether the liquid level of the online standby container 2 is lower than a second liquid level; if yes, go to step S317; if not, returning to the step S311;
and S317, prompting the lack of liquid and switching the next standby container 2 to be on-line.
In practical application, if the pressure at the gas inlet of the gas inlet pipeline 3 and the pressure in the pipeline between the spare container 2 and the gas container 1 are too high, the flow rate of liquid is too high in the liquid supplementing process, and the pressure is too low, so that the liquid cannot enter the gas container 1, and therefore the pressure at the gas inlet of the gas inlet pipeline 3 and the pressure in the pipeline between the spare container 2 and the gas container 1 need to be adjusted, so that the pressure meets the pressure value, namely the preset threshold value, which can enable the liquid to stably enter the gas container 1 from the spare container 2.
In this embodiment, after the step S311 is completed, the rising degree of the liquid level of the gas container 1 may be monitored during the liquid replenishing process, that is, the steps S312, S313 and S314 stop the liquid replenishing operation of the online backup container 2 when the liquid level of the gas container 1 rises to a full state, that is, a preset fourth liquid level, and at this time, the liquid level of the gas container 1 already meets the process requirements of the process chamber, and the process may be continued for a period of time without continuing to replenish the gas container 1. In addition, when the step S313 or the step S314 is completed, the liquid level of the on-line reserve tank 2 may be monitored, that is, the steps S315 to S317. Through monitoring online reserve container 2's liquid level, can avoid reserve container 2's liquid level to hang down excessively, can't satisfy gas container 1's fluid infusion demand.
In this embodiment, after the step S2 is completed, the fluid infusion method further includes the following steps:
s3, the liquid in all the lines connected between the spare vessel 2 and the gas vessel 1 is returned to the spare vessel 2 on-line.
Since the plant needs to be maintained regularly, it is necessary to empty all the lines between the reserve tank 2 and the gas tank 1 of liquid, so that the liquid in all the lines is pressed back into the on-line reserve tank 2.
In this embodiment, the liquid replenishing equipment further comprises an air inlet pipeline 3, wherein air inlets of the air inlet pipeline 3 are connected with an air source, and a plurality of air outlets of the air inlet pipeline 3 are correspondingly connected with the air inlets of the standby containers 2 one by one; the step S3 specifically includes the following steps:
s401, respectively exhausting the online spare container 2 and the online gas container 1 through the gas inlet of the gas inlet pipeline 3;
s402, judging whether the air extraction time reaches preset time or not, or judging whether the pressure in a pipeline between the standby container 2 and the gas container 1 and the pressure in a pipeline between the gas container 1 and the process chamber are lower than preset pressure or not; if yes, go to step S403; if not, returning to the step S401;
s403, inflating the on-line reserve container 2 via the air inlet of the air intake duct 3;
s404, the gas container 1 is inflated via the gas inlet of the gas inlet line 3.
Firstly, the online spare container 2 and the online gas container 1 are respectively pumped through the gas inlet of the gas inlet pipeline 3, to reduce the pressure in the line between the on-line reserve container 2 and the gas container 1 and in the line between the gas container 1 and the process chamber, so that the liquid in the gas inlet line 3 is not impeded in its return flow, then the on-line reserve container 2 is aerated via the air inlet of the air inlet pipeline 3, so that the liquid in the air inlet pipeline 3 flows back to the reserve container 2, and since the reserve container 2 has a certain amount of liquid in the reserve container, the reserve container 2 may not be able to fully recover the liquid in the inlet line 3, so the gas container 1 is also charged via the inlet of the inlet line 3, so that the liquid in all the lines connected between the spare vessel 2 and the gas vessel 1 is returned to the gas vessel 1.
In this embodiment, the step S3 is performed at least once, that is, the steps 401 to 404 are performed at least once in a loop.
In order to better empty all the intake pipes 3 of liquid, step S3 needs to be performed several times to prevent residual liquid process gas from still existing in the intake pipes 3.
By means of the above-mentioned step 402, the pressure above the liquid level in the spare vessel 2 and the gas vessel 1 can be made to meet the requirements for liquid reflux. Of course, in practical applications, the step 402 can be omitted.
In summary, according to the liquid replenishing method provided by the present invention, when the liquid level in the gas container 1 is lower than the preset first liquid level, the spare container 2 higher than the preset second liquid level in the plurality of spare containers 2 automatically replenishes the liquid into the gas container 1, that is, the liquid process gas is automatically replenished into the gas container 1 from the spare container 2 without stopping the apparatus, so that the liquid level in the gas container 1 reaches the liquid level at which the apparatus normally works, in this process, only the spare container 2 needs to be replaced, and the gas container 1 and the gas inlet pipeline 3 do not need to be disassembled and assembled, thereby reducing the pollution on the gas inlet pipeline 3.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. The liquid supplementing method is characterized in that the liquid supplementing device comprises a plurality of spare containers;
the liquid supplementing method comprises the following steps:
s1, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than a preset first liquid level; if yes, go to step S2;
s2, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, enabling the detected standby container to be on-line, and supplementing liquid to the gas container; if so, enabling the next spare container of the detected spare containers to be on line, and supplementing liquid to the gas container;
the step S1 specifically includes the following steps:
s11, detecting the current state of the process chamber when the process starts, and judging whether the current state of the process chamber is in an online state or an offline state; if the current state of the process chamber is an on-line state, performing an automatic process, and performing step S12; if the current state of the process chamber is an off-line state, performing a manual process, and performing step S13;
s12, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if so, taking the process chamber offline after the current process is completed, and performing step S2;
s13, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if yes, go to step 14;
s14, judging whether the liquid level of the gas container is lower than a preset third liquid level, wherein the third liquid level is lower than the first liquid level; if so, the process chamber is taken offline after the current process is completed and the step S2 is performed.
2. The fluid replacement method according to claim 1, wherein the step S13 specifically comprises the steps of:
s131, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container is lower than the first liquid level; if yes, go to step S132 and step S14;
and S132, carrying out liquid shortage prompt and giving an option of whether to continue the process for the user to select.
3. The liquid supplementing method according to any one of claims 1-2, wherein the liquid supplementing device further comprises an air inlet pipeline, an air inlet of the air inlet pipeline is connected with an air source, and a plurality of air outlets of the air inlet pipeline are connected with air inlets of the plurality of spare containers in a one-to-one correspondence manner;
the step S2 specifically includes the following steps:
s21, detecting the liquid levels of the standby containers one by one according to a preset sequence, and judging whether the detected liquid level of the standby container is lower than a preset second liquid level after detecting the liquid level of each standby container; if not, the detected spare container is on line; if so, enabling the next spare container of the detected spare containers to be online;
s22, detecting the pressure of the air inlet pipeline, and judging whether the pressure of the air inlet is higher than a preset pressure or not; if yes, go to step S23; if not, go to step S24;
s23, air suction is carried out on the air inlet pipeline through the air inlet of the air inlet pipeline, and then the step S24 is carried out;
s24, detecting the pressure in the pipeline between the on-line standby container and the gas container, and judging whether the pressure exceeds a preset threshold value, if so, executing the step S25; if not, go to step S26;
s25, performing air suction or inflation on the online standby container according to the judgment result, and then performing the step S26;
and S26, using the on-line spare container to replenish the gas container.
4. The fluid replacement method according to claim 3, wherein the step S2 further comprises the steps of:
s27, detecting the liquid level of the gas container, and judging whether the liquid level of the gas container rises to a preset fourth liquid level; if yes, stopping the liquid supplementing work of the on-line standby container; if not, go to step S28;
s28, detecting the liquid level of the online standby container, judging whether the liquid level of the online standby container is lower than the second liquid level, and if not, continuing to perform the step S26; if yes, a liquid shortage prompt is performed, the next spare container is switched on line, and the step S26 is continued.
5. The fluid replacement method according to claim 1, further comprising the steps of:
s3, making the liquid in all pipelines connected between the spare container and the gas container flow back to the spare container on line.
6. The liquid supplementing method according to claim 5, wherein the liquid supplementing device further comprises an air inlet pipeline, an air inlet of the air inlet pipeline is connected with an air source, a plurality of air outlets of the air inlet pipeline are provided, and the air outlets of the air inlet pipeline are connected with the air inlets of the plurality of spare containers in a one-to-one correspondence manner;
the step S3 specifically includes the following steps:
s31, respectively evacuating the on-line spare container and the gas container through the gas inlet of the gas inlet pipeline to reduce the pressure in the pipeline between the on-line spare container and the gas container and the process chamber;
s32, inflating the on-line spare container through the air inlet of the air inlet pipeline to enable the liquid in the air inlet pipeline to flow back to the on-line spare container;
s33, inflating the gas container through the gas inlet of the gas inlet pipeline to enable liquid in all pipelines connected between the standby container and the gas container which are online to flow back into the gas container.
7. The fluid replacement method according to claim 5 or 6, wherein the step S3 is performed at least once.
8. The fluid replacement method according to claim 6, wherein the step S31 specifically comprises the steps of:
s311, respectively exhausting the online spare container and the online gas container through a gas inlet of the gas inlet pipeline so as to reduce the pressure in a pipeline between the online spare container and the online gas container and the pressure in a pipeline between the online spare container and the online gas container;
s312, judging whether the air pumping time reaches a preset time or not, or judging whether the pressure in a pipeline between the standby container and the gas container and the pressure in a pipeline between the gas container and the process chamber are lower than a preset pressure or not; if yes, go to step S32; if not, the step S311 is continued.
9. The fluid replacement method according to claim 1, wherein in the step S2, a plurality of the spare containers are numbered, and the fluid levels of the spare containers are detected one by one in the order of the numbering.
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| CN115074706B (en) * | 2022-06-17 | 2023-09-08 | 北京北方华创微电子装备有限公司 | Source bottle liquid supplementing method of semiconductor process equipment and semiconductor process equipment |
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