CN110565050A - mask assembly and evaporation device - Google Patents

mask assembly and evaporation device Download PDF

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Publication number
CN110565050A
CN110565050A CN201910995278.XA CN201910995278A CN110565050A CN 110565050 A CN110565050 A CN 110565050A CN 201910995278 A CN201910995278 A CN 201910995278A CN 110565050 A CN110565050 A CN 110565050A
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CN
China
Prior art keywords
mask
frame
opening
stripes
strips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910995278.XA
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Chinese (zh)
Inventor
肖志慧
宋平
王亚玲
单为健
杨志业
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yungu Guan Technology Co Ltd
Original Assignee
Yungu Guan Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yungu Guan Technology Co Ltd filed Critical Yungu Guan Technology Co Ltd
Priority to CN201910995278.XA priority Critical patent/CN110565050A/en
Publication of CN110565050A publication Critical patent/CN110565050A/en
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

the invention discloses a mask assembly and an evaporation device, the mask assembly comprises: at least one first mask strip, wherein at least one opening region is arranged on the first mask strip, and the opening region comprises at least two first openings for forming sub-pixels; a mask frame including a frame opening and a frame body, the first mask stripes extending in a first direction; the vertical projection of the opening area on the plane of the mask frame is positioned in the frame opening; at least one second mask strip having a first overlapping area with the at least one open area, the second mask strip for supporting the open area of the first mask strip; the second mask strips are provided with second openings, and the vertical projection of the first openings in the first overlapping area on the plane of the second mask strips is positioned in the second openings. The embodiment of the invention can avoid the problems that the net surface of the opening area of the first mask strip is too large and the net surface sags due to the dead weight of the net surface, thereby improving the evaporation quality.

Description

mask assembly and evaporation device
Technical Field
The present invention relates to the field of mask technologies, and in particular, to a mask assembly and an evaporation apparatus.
Background
when an OLED (Organic Light-Emitting Diode) device is manufactured, a high vacuum evaporation method is usually used to manufacture a Light-Emitting layer of the device, for example, a high precision metal Mask (FMM) is usually used to manufacture red, green, and blue sub-pixel Light-Emitting layers on an evaporation substrate in an evaporation process.
However, when the light emitting layer is manufactured by using the conventional high-precision metal mask, the evaporation material of a certain sub-pixel is easily diffused and mixed into the adjacent sub-pixels, and color mixing is caused.
Disclosure of Invention
The embodiment of the invention provides a mask assembly and an evaporation device, wherein a second mask strip supports the mesh surface of an opening area AA of a first mask strip, so that the problem that the mesh surface of the opening area AA of the first mask strip is too large and sags due to dead weight of the mesh surface is avoided, and the evaporation quality is improved.
In a first aspect, an embodiment of the present invention provides a mask assembly, including:
at least one first mask bar having at least one opening region disposed thereon, the opening region including at least two first openings for forming sub-pixels;
The mask frame comprises a frame opening and a frame body arranged around the frame opening, and the first mask strip extends along a first direction and is fixed on the mask frame; the vertical projection of the opening area on the plane of the mask frame is positioned in the frame opening;
at least one second mask strip, wherein the at least one second mask strip is fixed on the mask frame, and along a direction perpendicular to a plane of the mask frame, a first overlapping area exists between the second mask strip and at least one opening area, and the second mask strip is used for supporting the opening area of the first mask strip;
The second mask strips are provided with second openings, and the perpendicular projection of the first openings in the first overlapping area on the plane of the second mask strips is positioned in the second openings.
Optionally, a perpendicular projection of at least one of the first openings located in the first overlapping region on a plane where the second mask stripes are located is located in one of the second openings.
Optionally, the number of the second mask stripes overlapping at least one of the opening regions is at least two, and the at least two second mask stripes are arranged in parallel.
Optionally, the second mask stripes extend along a second direction, and the second direction is perpendicular to the first direction.
Optionally, the shape of the second opening includes a polygon, a circle, or an ellipse.
Optionally, the mask further comprises at least one third mask stripe extending along the first direction; the third mask strip is arranged between two adjacent first mask strips and used for blocking a gap between the two adjacent first mask strips; and/or the presence of a gas in the gas,
The frame body comprises end-to-end borders, and the third mask strips are arranged between the first mask strips and the borders close to the first mask strips and used for shielding gaps between the first mask strips and the borders close to the first mask strips.
optionally, the mask frame further comprises two fourth mask stripes, the fourth mask stripes extend along the first direction, and in a direction perpendicular to the plane of the mask frame, there is a second overlapping area between the fourth mask stripes and the frame body;
The fourth mask strip is provided with a first alignment mark positioned in the second overlapping area;
And a second alignment mark which is positioned in the second overlapping area and is used for aligning with the first alignment mark is arranged on the mask frame.
Optionally, the material of the first mask stripes and the second mask stripes comprises invar or SUS alloy.
Optionally, the open areas of the first mask stripes have diagonal lengths greater than or equal to 8 inches.
In a second aspect, an embodiment of the present invention provides an evaporation apparatus, including an evaporation source and the mask assembly provided in the first aspect of the present invention, wherein the evaporation source is disposed on a side of the mask frame away from the first mask stripes.
according to the mask assembly provided by the embodiment of the invention, along the direction perpendicular to the plane of the mask frame, the first overlapping area exists between the second mask strips and the opening areas of the first mask strips, the second mask strips are used for supporting the mesh surfaces of the opening areas AA of the first mask strips, so that the problem of color mixing caused by the fact that the mesh surfaces of the opening areas AA of the first mask strips are too large and the mesh surfaces sag due to dead weight of the mesh surfaces, and the first mask strips cannot be completely attached to an evaporation substrate to form a shadow effect is solved, and the evaporation quality is improved. The second mask strips are provided with second openings, and the vertical projection of the first openings in the first overlapping areas on the plane where the second mask strips are located is located in the second openings, so that the second mask strips can be prevented from blocking the first openings.
Drawings
the invention is explained in more detail below with reference to the figures and examples.
Fig. 1 is a schematic structural diagram of a first mask stripe according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a mask frame according to an embodiment of the present invention;
Fig. 3 is a schematic structural diagram of a second mask stripe according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a mask assembly according to an embodiment of the present invention;
FIG. 5 is a schematic view of the web sag of a prior art open area AA;
FIG. 6 is a schematic view of the sagging of the web side of the open area AA in an embodiment of the present invention;
FIG. 7 is a schematic diagram of another mask assembly according to an embodiment of the present invention;
FIG. 8 is an enlarged partial view of the overlapping portions of the second mask stripes and the open areas provided by an embodiment of the present invention;
FIG. 9 is another enlarged partial view of the overlapping portions of the second mask stripes and the open areas according to an embodiment of the present invention;
FIG. 10 is another enlarged partial view of overlapping portions of second mask stripes and open areas according to an embodiment of the present invention;
Fig. 11 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
in the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
in the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
When an OLED display panel is manufactured, a high vacuum evaporation method is generally used to manufacture a light emitting layer of the device. In the process of depositing the light emitting layer, the light emitting layers of a plurality of display panels are usually deposited by one mask, and after the fabrication is completed, the display panels are separated by cutting. One display panel generally includes a plurality of sub-pixels, and therefore, the mask is provided with opening regions respectively corresponding to the respective display panels, each of the opening regions is provided with a plurality of pixel openings corresponding one-to-one to the sub-pixels in the corresponding display panel, and an evaporation material for forming a light emitting layer is deposited on a substrate of the display panel through the pixel openings, thereby forming the sub-pixels.
The high-precision metal mask mainly comprises a mask frame and mask strips (Sheet), wherein the mask strips are metal diaphragms with the thickness of only dozens of micrometers, and openings for forming red, green and blue sub-pixels are formed in the mask strips. The mask frame is a specially designed metal frame, and the mask strips are welded on the mask frame one by one through stretching to finally form the metal mesh with accurate positions.
Since the mask strips are welded to the mask frame, when the opening area on the mask strips is large, the net surface of the opening area sags due to the weight of the net surface of the opening area, and the sagging of the center position of the opening area is particularly serious. Therefore, when the high-precision metal mask plate is attached to the evaporation substrate, the mask strips cannot be completely attached to the evaporation substrate, so that a shadow effect is caused, and the evaporation material of one sub-pixel is diffused and mixed into the adjacent sub-pixels, so that color mixing is caused.
Based on the above problem, the present embodiment provides the following solutions:
embodiments of the present invention provide a mask assembly, which may be a high-precision metal mask.
The mask assembly includes:
At least one first mask bar having at least one opening region disposed thereon, the opening region including at least two first openings for forming sub-pixels;
The mask frame comprises a frame opening and a frame body arranged around the frame opening, and the first mask strip extends along a first direction and is fixed on the mask frame; the vertical projection of the opening area on the plane of the mask frame is positioned in the frame opening;
at least one second mask strip, wherein the at least one second mask strip is fixed on the mask frame, and along a direction perpendicular to a plane of the mask frame, a first overlapping area exists between the second mask strip and at least one opening area, and the second mask strip is used for supporting the opening area of the first mask strip;
the second mask strips are provided with second openings, and the perpendicular projection of the first openings in the first overlapping area on the plane of the second mask strips is positioned in the second openings.
According to the mask assembly provided by the embodiment of the invention, along the direction perpendicular to the plane of the mask frame, the first overlapping area exists between the second mask strips and the opening areas of the first mask strips, the second mask strips are used for supporting the screen surfaces of the opening areas AA of the first mask strips, the problems that the screen surfaces of the opening areas AA of the first mask strips are too large and the screen surfaces sag due to dead weight are solved, the problems that the first mask strips cannot be completely attached to an evaporation substrate to form a shadow effect and cause color mixing are solved, and the evaporation quality is improved. The second mask strips are provided with second openings, and the vertical projection of the first openings in the first overlapping areas on the plane where the second mask strips are located is located in the second openings, so that the second mask strips can be prevented from blocking the first openings.
For a better understanding of embodiments of the present invention, mask assemblies provided in the present embodiments are described in detail below with reference to the following drawings:
fig. 1 is a schematic structural diagram of a first mask stripe according to an embodiment of the present invention, as shown in fig. 1, the first mask stripe 110 is a stripe-shaped film, and an opening area AA is disposed on the first mask stripe 110, where the opening area AA includes at least two first openings for forming sub-pixels, and the first openings are pixel openings. In other words, the opening area AA is a web surface provided with a first opening. It should be noted that, in this embodiment, the arrangement manner of the first openings is not limited, and may be, for example, a standard RGB arrangement manner, an RGB-Pentile arrangement manner, or an RGB-Delta arrangement manner.
fig. 2 is a schematic structural diagram of a mask frame according to an embodiment of the present invention, and as shown in fig. 2, the mask frame 200 includes a frame opening 210 and a frame body disposed around the frame opening 210, the frame body includes four side frames, the four side frames are connected end to form a rectangular mask frame 200, and the four side frames surround the frame opening 210. Illustratively, the mask frame 200 is rectangular to accommodate the first mask stripes and the second mask stripes, two first rims 201 are arranged in parallel along a first direction X, two second rims 202 are arranged in parallel along a second direction Y, the first rims 201 extend along the second direction Y, the second rims 202 extend along the first direction X, and the first direction X and the second direction Y may be two directions perpendicular to each other in a plane in which the mask frame 200 is located. It should be noted that, in other embodiments, the mask frame 200 may have other shapes, and the invention is not limited thereto.
fig. 3 is a schematic structural diagram of a second mask stripe according to an embodiment of the present invention, as shown in fig. 3, the second mask stripe 310 is a stripe-shaped diaphragm, and the second mask stripe 310 is provided with a second opening.
Fig. 4 is a schematic structural view of a mask assembly according to an embodiment of the present invention, and as shown in fig. 4, the mask assembly may include one first mask stripe 110, a mask frame 200, and three second mask stripes 310.
Referring to fig. 1 to 4, the first mask stripes 110 extend in the first direction X, and the first mask stripes 110 are fixed to two first rims 201 opposite to the mask frame 200, and for example, the first mask stripes 110 may be welded to the mask frame 200 by laser welding. The vertical projection of the opening area AA of the first mask bar 110 on the plane in which the mask frame 200 is located within the frame opening 210, i.e., the area of the frame opening 210 is greater than the area of the opening area AA.
The three second mask stripes 310 are fixed to the two second rims 202 opposite to the mask frame 200. Specifically, the second mask stripes 310 may be welded to the mask frame 200 by means of laser welding. In a direction perpendicular to the plane of the mask frame 200, there is a first overlapping area 610 of the second mask stripes 310 with the opening area AA of the first mask stripes 110, and this first overlapping area 610 is shown in a dashed box in fig. 4, i.e., the second mask stripes 310 cross the opening area AA, and the second mask stripes 310 are used to support the mesh surface of the opening area AA of the first mask stripes 110. Illustratively, in the present embodiment, the second mask stripes 310 are disposed between the mask frame 200 and the first mask stripes 110 in a third direction Z (not shown), i.e., in a direction perpendicular to the plane of the mask frame 200, for supporting the mesh of the opening area AA of the first mask stripes 110, and the third direction Z is perpendicular to the first direction X and the second direction Y, i.e., perpendicular to the frame opening 210 of the mask frame 200.
In this embodiment, the second mask stripes 310 are used for supporting the mesh surface of the opening area AA of the first mask stripe 110, so that the problem that the mesh surface of the first mask stripe 110 sags due to dead weight of the mesh surface caused by the overlarge mesh surface of the opening area AA, and the first mask stripe cannot be completely attached to an evaporation substrate to form a shadow effect, thereby causing color mixing is solved, and the evaporation quality is improved.
In addition, in order to enable the evaporation material to smoothly pass through the first opening and reach the evaporation substrate without being shielded by the second mask strip 310, the second opening is arranged on the second mask strip 310, and the vertical projection of the first opening in the first overlapping region 610 on the plane where the second mask strip 310 is located inside the second opening, so that the second mask strip 310 is prevented from shielding the first opening, and the evaporation quality is ensured.
In this embodiment, the number and shape of the second openings are not limited. One or more than one first opening may be located in the same second opening in the vertical projection in the third direction Z, and the invention is not limited thereto as long as the second mask stripe 310 does not block the first opening.
fig. 5 is a schematic view showing the sag of the web surface of the opening area AA in the prior art, and fig. 6 is a schematic view showing the sag of the web surface of the opening area AA in the embodiment of the present invention, as shown in fig. 5 and 6, in which the web surface of the AA area of the first mask stripes 110 is supported by the second mask stripes 310, and the sag H2 of the web surface of the AA area is much smaller than the sag H1 of the web surface of the opening area AA in the prior art.
In the above embodiments, the mask assembly includes one first mask strip, and the first mask strip includes one opening region, in other embodiments, in order to improve the evaporation efficiency, the mask assembly may include two or more first mask strips, and the first mask strip may include two or more opening regions. For example, fig. 7 is a schematic structural diagram of another mask assembly according to an embodiment of the present invention, as shown in fig. 7, in this embodiment, the mask assembly includes two first mask stripes 110, each first mask stripe 110 includes two opening regions AA, and four display panels can be formed by one evaporation, so that evaporation efficiency can be improved.
On the basis of the above embodiment, the number of the second mask stripes 310 overlapping one opening area AA is at least two, and at least two second mask stripes 310 are arranged in parallel. With such an arrangement, each opening area AA can be supported by a plurality of second mask strips 310, so that the mesh supporting capability of the second mask strips 310 on the opening area AA is further improved, at least two second mask strips 310 are arranged in parallel, and the plurality of second mask strips 310 can adopt the same alignment welding process, thereby reducing the process difficulty.
As shown in fig. 4 and 7, the number of the second mask stripes 310 overlapping one opening area AA is three, that is, three second mask stripes 310 are disposed on the mesh surface of each opening area AA to support the mesh surface of the opening area AA, so that the supporting capability of the mesh surface of the opening area AA is improved.
On the basis of the above-described embodiment, the second mask stripes 310 extend in the second direction Y, which is perpendicular to the first direction X, i.e., the second mask stripes 310 are perpendicular to the first mask stripes 110.
specifically, when the length of the first mask stripes 110 in the first direction X is long, not only the mesh surface of the opening area AA may sag due to self-weight, but also the longer frame (i.e., the frame extending along the first direction X) of the first mask stripes 110 may sag due to self-weight, and by arranging the second mask stripes 310 to be perpendicular to the first mask stripes 110, the second mask stripes 310 may support the mesh surface of the opening area AA, and at the same time, may support the frame extending along the first direction X of the first mask stripes 110, thereby improving the problem of sagging of the frame of the first mask stripes 110, and further improving the evaporation quality.
exemplarily, referring to fig. 7, in this embodiment, the mask assembly includes two first mask stripes 110, and the two first mask stripes 110 are arranged in parallel along the second direction Y. Each of the first mask stripes 110 includes two opening regions AA, which are disposed on the first mask stripes 110 in an extending direction (i.e., the first direction X) of the first mask stripes 110. The vertical projection of all open areas AA onto the plane of the mask frame 200 is located within the frame opening 210. As shown in fig. 7, in the embodiment of the present invention, four AA areas are arranged in an array of 2 × 2. Six second mask stripes 310 are arranged in parallel along first direction X, and second mask stripes 310 extend along second direction Y, i.e. second mask stripes 310 are perpendicular to first mask stripes 110. Wherein three second mask stripes 310 traverse the first row of open areas AA for supporting the mesh side of the row of open areas AA; three additional second mask stripes 310 are positioned across the second row of open areas AA for supporting the mesh side of the row of open areas AA. The six second mask stripes 310 are arranged in parallel and perpendicular to the first mask stripes 110, which can improve the stability of the mask assembly. When the first mask stripes 110 are provided with a plurality of opening regions AA along the extending direction of the first mask stripes 110, the length of the first mask stripes 110 in the first direction X is too long, so that the frame of the first mask stripes 110 extending along the first direction X may sag. By arranging the six second mask strips 310 to be perpendicular to the first mask strips 110, not only can the mesh surface of the opening area AA be supported, but also the frame of the first mask strips 110 extending along the first direction X can be supported, so that the overall droop of the first mask strips 110 is reduced, and the evaporation quality is improved.
On the basis of the above embodiment, the perpendicular projections of at least two second mask stripes 310 overlapping with one opening area AA on the plane of the first mask stripes 110 may be uniformly distributed in the opening area AA, that is, the distance between two adjacent second mask stripes 310 is equal, so that at least two second mask stripes 310 provide uniform supporting force to the mesh surface of the opening area AA.
It should be noted that, in the above embodiment, the number of the second mask stripes overlapping with one opening region is three, three second mask stripes are arranged in parallel, and are perpendicular to and orthogonal to the first mask stripes, which is taken as an example to describe the present invention, in other embodiments, the number of the second mask stripes overlapping with one opening region AA may be one or more than two, when the number of the second mask stripes is more than two, the arrangement manner of the second mask stripes may also be non-parallel, and the extending direction of the second mask stripes may also not be perpendicular to and orthogonal to the first mask stripes, as long as the mesh surface of the opening region of the first mask stripe can be supported, and the first opening of the opening region is not blocked, which is not limited herein.
On the basis of the above-described embodiment, a perpendicular projection of at least one of the first openings located in the first overlap region 610 onto the plane of the second mask strip is located in one of the second openings. Illustratively, fig. 8 is a partially enlarged view of an overlapping portion of a second mask strip and an opening region provided in an embodiment of the present invention, fig. 9 is a partially enlarged view of an overlapping portion of a second mask strip and an opening region provided in an embodiment of the present invention, and fig. 10 is a partially enlarged view of an overlapping portion of a second mask strip and an opening region provided in an embodiment of the present invention. As shown in fig. 8, 9 and 10, the overlapping portion of the second mask strip 310 and the opening area AA is provided with at least two second openings 311, so that the perpendicular projection of at least one of the first openings 111 located in the first overlapping area 610 on the plane of the second mask strip 310 is located in one second opening 311, i.e. at least one first opening corresponds to one second opening. The greater the number of second openings 311, the greater the area of the contact portions 312 of the second mask stripes 310 with the first mask stripes, which can provide a greater and more uniform supporting force to the mesh surface of the opening area AA. The greater the number of second openings 311, the greater the difficulty in designing and manufacturing second mask stripes 310, and in order to reduce the difficulty in designing and manufacturing second mask stripes 310, at least two of first openings 111 located in first overlapping region 610 are located in one second opening 311 in a perpendicular projection on a plane where second mask stripe 310 is located, that is, one second opening 311 corresponds to at least two first openings.
on the basis of the above embodiment, the second opening 311 includes a polygonal opening, a circular opening, or an elliptical opening. For example, the shape of the second opening 311 may be determined according to the shape and arrangement of the first opening 111. The first openings 111 are generally regular in shape and arrangement, for example, the first openings 111 are rectangular, and the arrangement is an array arrangement, so that the second openings 311 can be regular polygons (such as rectangles), circles or ellipses, so as to reduce the difficulty in designing and manufacturing the second openings 311, and reduce the production cost.
Illustratively, as shown in fig. 7, the second opening 311 is a square opening, the vertical projections of four first openings 111 are located in one second opening 311, and the vertical projections of four first openings 11 are located at four corners of the second opening 311, respectively. As shown in fig. 8, the second opening 311 is a strip-shaped opening, the vertical projections of the four first openings 111 are located in one second opening 311, and the vertical projections of the four first openings 111 are uniformly arranged along the extending direction of the second opening 311. As shown in fig. 9, the second opening 311 is a cross-shaped opening, the cross-shaped opening includes four end portions, the four end portions are arranged in a cross shape, and the vertical projections of the four first openings 111 are respectively located in the four end portions of the cross-shaped opening.
It should be noted that, in the present embodiment, the number and the shape of the second openings 311 are not limited, and a perpendicular projection of at least one of the first openings 111 located in the first overlapping region 610 on the plane where the second mask strip 310 is located in one second opening 311, as long as the second mask strip 310 does not block the first opening 111.
In this embodiment, as shown in fig. 4 and 7, the mask assembly further includes at least one third mask stripe 410, the third mask stripe 410 extending in the first direction X and fixed to the first rim of the mask frame 200; the third mask stripes 410 are disposed between two adjacent first mask stripes 110, and are used for shielding gaps between two adjacent first mask stripes 110; and/or between the first mask stripes 110 and a rim (i.e., a second rim) of the mask frame 200 adjacent to the first mask stripes 110 for blocking a gap between the first mask stripes 110 and the second rim of the mask frame 200, wherein the second rim is perpendicular to the first rim.
As shown in fig. 4 and 7, the total width of the first mask stripes 110 in the second direction Y is smaller than the width of the frame opening of the mask frame 200 in the second direction Y, so that a gap exists between the first mask stripes 110 and the second rim of the mask frame, and further, as shown in fig. 7, a gap also exists between two adjacent first mask stripes 110. In the evaporation process, the gap corresponds to a non-evaporation region on the evaporation substrate, and therefore the gap needs to be shielded. The gap is shielded by the third mask strips 410, so that the problem that evaporation materials are deposited in a non-evaporation area of an evaporation substrate in the evaporation process to influence the quality of a display panel formed by evaporation is solved. Illustratively, the third mask stripes 410 may be welded to the mask frame 200 by means of laser welding.
In addition, in general, the thickness of the first mask stripes 110 in the high-precision metal mask plate is only 10 to 100um, which is thin and fragile, and it is very difficult to attach the high-precision metal mask plate to the surface of the evaporation substrate (glass plate or flexible substrate) and maintain a high positional precision, so before the first mask stripes 110 are welded to the mask frame 200, it is necessary to weld the alignment mask stripes for alignment to the mask frame 200, and then establish a coordinate system with the alignment mask stripes to weld the first mask stripes 110 to the mask frame 200.
Therefore, on the basis of the above embodiment, the mask assembly further comprises two fourth mask stripes, the fourth mask stripes extend along the first direction, and along the direction perpendicular to the plane of the mask frame, a second overlapping area exists between the fourth mask stripes and the frame body;
the fourth mask strip is provided with a first alignment mark positioned in the second overlapping area;
The mask frame is provided with a second alignment mark which is positioned in the second overlapping area and is used for aligning with the first alignment mark.
Illustratively, as shown in fig. 4 and 7, the mask assembly further includes two fourth mask stripes 510, the two fourth mask stripes 510 are arranged in parallel, and the fourth mask stripes 510 extend along the first direction X, i.e., in parallel with the first mask stripes 110. The fourth mask stripes 510 are respectively disposed on the two second rims, and specifically, the fourth mask stripes 510 may be welded to the mask frame 200 by laser welding. There is a second overlapping area of the fourth mask stripes 510 with the frame body 200 in a direction perpendicular to the plane of the mask frame 200. The overlapping portion of the fourth mask strip 510 and the main body of the mask frame 200 is provided with a first alignment mark 511, and in a specific embodiment, the first alignment mark 511 may be an alignment hole. The overlapping portion of the main body of the mask frame 200 and the fourth mask strip 510 is provided with a second alignment mark for aligning with the first alignment mark 511, and in an embodiment, the second alignment mark may be a cross alignment mark. In this embodiment, the fourth mask stripes 510 are alignment mask stripes for alignment, and when the fourth mask stripes 510 are welded on the mask frame 200, a tensile force is applied to both ends of the fourth mask stripes 510, so that the first alignment mark 511 and the second alignment mark are aligned, and both ends of the fourth mask stripes 510 are welded on the mask frame 200 by laser. Subsequently, a coordinate system is established by the fourth mask strip 510, and the first mask strip 110 is welded on the mask frame 200, so that the position accuracy of the high-precision metal mask plate and the evaporation substrate when being attached is ensured.
It should be noted that the first mask stripes 110, the second mask stripes 310, the third mask stripes 410 and the fourth mask stripes 510 are stretched by a stretching device and are laser-welded to the mask frame 200. To facilitate the clamping and stretching operation of the tentering device, the lengths of the first, third and fourth mask stripes 110, 410, 510 in the first direction X are generally larger than the length of the mask frame 200 in the first direction X, and the length of the second mask stripe 310 in the second direction Y is larger than the width of the mask frame 200 in the second direction Y. After the first, second, third and fourth mask stripes 110, 310, 410 and 510 are stretched and welded to the mask frame 200, the excess portions may be cut off by cutting means such as laser cutting, and in particular, as shown in fig. 4 and 7, the portions of the first, second, third and fourth mask stripes 110, 310, 410 and 510 that exceed the mask frame 200 may be cut off by cutting along the dotted lines in the drawing.
In the present embodiment, the material of the first, second, third, fourth and mask stripes 110, 310, 410, 510 and the mask frame 200 may be Invar Steel (Invar Steel) or SUS alloy. Invar belongs to one of iron-nickel alloys, and comprises the components of 36% of nickel, 63.8% of iron and 0.2% of carbon. Invar steel and SUS alloy are characterized by extremely small deformation along with temperature, thereby avoiding the deformation of mask components caused by high temperature in the vapor deposition process and causing the vapor deposition quality problem.
in this embodiment, the length of the diagonal line of the opening area AA of the first mask bar 110 is greater than or equal to 8 inches, and the length of the diagonal line of the opening area AA is similar to the size of the display panel, that is, the embodiment of the present invention can be applied to a display panel with a medium-large area of more than 8 inches, so as to avoid the mesh surface sag caused by the dead weight of the mesh surface due to the oversize mesh surface of the opening area AA, which leads to the problem that the first mask bar 110 cannot be completely attached to the evaporation substrate to form a shadow effect, resulting in color mixing, and improve the evaporation quality.
Fig. 11 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present invention, and as shown in fig. 11, the evaporation apparatus includes an evaporation source 10 and a mask assembly 20, and the evaporation source 10 is disposed on a side of a mask frame 200 away from a first mask bar.
Specifically, as shown in fig. 11, the vapor deposition source 10 is positioned directly below the mask assembly 20, the vapor deposition substrate 30 is provided on the side of the mask assembly 20 away from the vapor deposition source 10, and the mask assembly 20 and the vapor deposition substrate 30 may be attached to each other by magnetic attraction.
specifically, mask assembly 20 includes:
at least one first mask strip, wherein at least one opening region is arranged on the first mask strip, and the opening region comprises at least two first openings for forming sub-pixels; after the mask assembly 20 is attached to the evaporation substrate 30, the first mask stripes are attached to the evaporation substrate 30;
The mask frame comprises a frame opening and a frame body arranged around the frame opening, and the first mask strips extend along a first direction and are fixed on the mask frame; the vertical projection of the opening area on the plane of the mask frame is positioned in the frame opening;
The second mask strips are fixed on the mask frame, first overlapping regions exist between the second mask strips and the at least one opening region along the direction perpendicular to the plane of the mask frame, and the second mask strips are used for supporting the opening regions of the first mask strips;
the second mask strips are provided with second openings, and the vertical projection of the first openings in the first overlapping area on the plane of the second mask strips is positioned in the second openings.
In some embodiments, a perpendicular projection of at least one of the first openings located within the first overlap region onto a plane in which the second mask stripes are located is located within one of the second openings.
In some embodiments, the number of the second mask stripes overlapping one opening region is at least two, and at least two of the second mask stripes are arranged in parallel.
In some embodiments, the second mask stripes extend in a second direction, the second direction being perpendicular to the first direction.
in some embodiments, the second opening comprises a polygonal opening, a circular opening, or an elliptical opening.
in some embodiments, the mask assembly further comprises at least one third mask bar extending in the first direction and fixed to the first rim of the mask frame; the third mask strip is arranged between two adjacent first mask strips and used for blocking a gap between the two adjacent first mask strips, and/or,
The frame body comprises end-to-end borders, and the third mask strips are arranged between the first mask strips and the borders close to the first mask strips and used for shielding gaps between the first mask strips and the borders close to the first mask strips.
in some embodiments, the mask assembly further comprises two fourth mask stripes extending in the first direction and having a second overlapping area with the frame body in a direction perpendicular to the plane of the mask frame;
The fourth mask strip is provided with a first alignment mark positioned in the second overlapping area;
And a second alignment mark which is positioned in the second overlapping area and is used for aligning with the first alignment mark is arranged on the mask frame.
In some embodiments, the material of the first and second mask stripes comprises invar or a SUS alloy.
In some embodiments, the open areas of the first mask stripes have diagonal lengths greater than or equal to 8 inches.
specifically, the specific structure of the mask assembly has been described in detail in the foregoing embodiments of the present invention, and is not described herein again.
the evaporation device provided by the embodiment of the invention comprises an evaporation source and a mask assembly, wherein the evaporation source is arranged on one side of a mask frame far away from a first mask strip, in the mask assembly, along the direction perpendicular to the plane of the mask frame, a first overlapping area exists between the opening areas of a second mask strip and the first mask strip, the second mask strip is used for supporting the mesh surface of the opening area AA of the first mask strip, the problem that the mesh surface of the opening area AA of the first mask strip is too large and the mesh surface sags due to the dead weight of the mesh surface is solved, the problem that the first mask strip cannot be completely attached to an evaporation substrate to form a shadow effect, the color mixing problem is caused is solved, and the evaporation quality is improved. The second mask strips are provided with second openings, and the vertical projection of the first openings in the first overlapping areas on the plane where the second mask strips are located is located in the second openings, so that the second mask strips can be prevented from blocking the first openings.
in the description herein, it is to be understood that the terms "upper", "lower", "right", and the like are based on the orientations and positional relationships shown in the drawings and are used for convenience in description and simplicity in operation, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be constructed in a particular operation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used merely for descriptive purposes and are not intended to have any special meaning.
In the description herein, references to the description of "an embodiment," "an example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be appropriately combined to form other embodiments as will be appreciated by those skilled in the art.
The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.

Claims (10)

1. A mask assembly, comprising:
At least one first mask bar having at least one opening region disposed thereon, the opening region including at least two first openings for forming sub-pixels;
the mask frame comprises a frame opening and a frame body arranged around the frame opening, the first mask strip extends along a first direction and is fixed on the mask frame, and the vertical projection of the opening area on the plane of the mask frame is positioned in the frame opening;
At least one second mask strip, wherein the at least one second mask strip is fixed on the mask frame, and along a direction perpendicular to a plane of the mask frame, a first overlapping area exists between the second mask strip and at least one opening area, and the second mask strip is used for supporting the opening area of the first mask strip;
The second mask strips are provided with second openings, and the perpendicular projection of the first openings in the first overlapping area on the plane of the second mask strips is positioned in the second openings.
2. A mask assembly according to claim 1, wherein a perpendicular projection of at least one of the first openings located within the first overlap region onto a plane in which the second mask stripes lie lies within one of the second openings.
3. The mask assembly of claim 1, wherein the number of second mask stripes overlapping at least one of the open regions is at least two, and the at least two second mask stripes are arranged in parallel.
4. A mask assembly according to any one of claims 1-3, wherein the second mask stripes extend in a second direction, and wherein the second direction is perpendicular to the first direction.
5. The mask assembly of claim 1, wherein a shape of the second opening comprises a polygon, a circle, or an ellipse.
6. The mask assembly of claim 1, further comprising at least one third mask stripe, the third mask stripe extending in the first direction; the third mask strip is arranged between two adjacent first mask strips and used for blocking a gap between the two adjacent first mask strips; and/or the presence of a gas in the gas,
The frame body comprises end-to-end borders, and the third mask strips are arranged between the first mask strips and the borders close to the first mask strips and used for shielding gaps between the first mask strips and the borders close to the first mask strips.
7. The mask assembly of claim 1, further comprising two fourth mask stripes extending in the first direction and having a second area of overlap with the frame body in a direction perpendicular to the plane of the mask frame;
the fourth mask strip is provided with a first alignment mark positioned in the second overlapping area;
and a second alignment mark which is positioned in the second overlapping area and is used for aligning with the first alignment mark is arranged on the mask frame.
8. The mask assembly of claim 1, wherein the material of the first and second mask stripes comprises invar or SUS alloy.
9. The mask assembly of claim 1, wherein a length of a diagonal of the open area of the first mask strip is greater than or equal to 8 inches.
10. an evaporation apparatus comprising an evaporation source and the mask assembly according to any one of claims 1 to 9, wherein the evaporation source is provided on a side of the mask frame away from the first mask bar.
CN201910995278.XA 2019-10-18 2019-10-18 mask assembly and evaporation device Pending CN110565050A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103695841A (en) * 2013-11-28 2014-04-02 昆山允升吉光电科技有限公司 Assembling method of mask assembly
CN105839051A (en) * 2016-05-09 2016-08-10 京东方科技集团股份有限公司 Masking plate, manufacturing method thereof, OLED display substrate and display device
CN105839052A (en) * 2016-06-17 2016-08-10 京东方科技集团股份有限公司 Mask board and assembling method of mask board
CN206266699U (en) * 2016-11-23 2017-06-20 信利（惠州）智能显示有限公司 Mask supports external member
CN107723659A (en) * 2017-11-28 2018-02-23 信利（惠州）智能显示有限公司 Mask plate and preparation method for evaporation
CN207818628U (en) * 2018-02-01 2018-09-04 信利（惠州）智能显示有限公司 Mask plate
CN109097729A (en) * 2018-09-29 2018-12-28 京东方科技集团股份有限公司 Solder mask frame, support plate, solder mask frame component and mask plate component

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103695841A (en) * 2013-11-28 2014-04-02 昆山允升吉光电科技有限公司 Assembling method of mask assembly
CN105839051A (en) * 2016-05-09 2016-08-10 京东方科技集团股份有限公司 Masking plate, manufacturing method thereof, OLED display substrate and display device
CN105839052A (en) * 2016-06-17 2016-08-10 京东方科技集团股份有限公司 Mask board and assembling method of mask board
CN206266699U (en) * 2016-11-23 2017-06-20 信利（惠州）智能显示有限公司 Mask supports external member
CN107723659A (en) * 2017-11-28 2018-02-23 信利（惠州）智能显示有限公司 Mask plate and preparation method for evaporation
CN207818628U (en) * 2018-02-01 2018-09-04 信利（惠州）智能显示有限公司 Mask plate
CN109097729A (en) * 2018-09-29 2018-12-28 京东方科技集团股份有限公司 Solder mask frame, support plate, solder mask frame component and mask plate component

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