CN110553765B - Piezoresistive high-frequency high-temperature dynamic pressure sensor - Google Patents
Piezoresistive high-frequency high-temperature dynamic pressure sensor Download PDFInfo
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- CN110553765B CN110553765B CN201910885183.2A CN201910885183A CN110553765B CN 110553765 B CN110553765 B CN 110553765B CN 201910885183 A CN201910885183 A CN 201910885183A CN 110553765 B CN110553765 B CN 110553765B
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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Abstract
The invention relates to the technical field of sensors and discloses a piezoresistive high-frequency high-temperature dynamic pressure sensor which comprises a sensor shell, a sensor connecting pipe and a liquid connecting pipe, wherein the sensor connecting pipe is fixedly arranged at the lower side of the sensor shell, the sensor shell is connected with the liquid connecting pipe in an inserting mode through the sensor connecting pipe, a sealing mechanism is arranged between the sensor connecting pipe and the liquid connecting pipe, a clamping ring is fixedly arranged at the upper side of the pipe wall of the liquid connecting pipe, a moving ring is movably sleeved on the outer wall of the sensor shell, pull rods are respectively arranged at the left side and the right side of the lower surface of the moving ring, pull blocks are respectively and fixedly arranged at the lower ends, far away from the moving ring, of the two pull rods, the lower ends of the two pull. This piezoresistive high frequency high temperature dynamic pressure sensor can install sensor connecting pipe and liquid connecting pipe fast, has improved piezoresistive high frequency high temperature dynamic pressure sensor's installation effectiveness.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a piezoresistive high-frequency high-temperature dynamic pressure sensor.
Background
MEMS technology, beginning in the late 70 s of the 20 th century, has made advanced silicon piezoresistive pressure sensors smaller and smaller, and thus silicon piezoresistive pressure sensitive elements have higher natural frequencies. The miniature square diaphragm manufactured by Kulite company and Endevco company in the United states adopts the technology to realize miniaturization of a piezoresistive pressure sensor and high natural frequency of a chip, but the miniature square diaphragm and the high natural frequency chip do not solve the problem of full flush packaging, and meanwhile, the packaging cannot solve strong light interference in explosion, so that a laser forming protective net film before the chip packaging is detached to be suitable for high-frequency dynamic measurement when the miniature square diaphragm is used, and the miniature square diaphragm causes extremely high damage rate or disposable use in measurement.
The patent number is CN102072795B, which discloses a piezoresistive high-frequency high-temperature dynamic pressure sensor, which comprises a piezoresistive sensitive component, a sensor metal shell and a high-frequency broadband amplifier, wherein the piezoresistive sensitive component comprises a silicon piezoresistive sensitive element and a glass ring sheet, the silicon piezoresistive sensitive element is formed by a round flat silicon membrane, the front surface of the round flat silicon membrane is sequentially covered with a SiO2 layer and a Si3N4 layer, the middle part of the front surface of the silicon piezoresistive sensitive element is provided with a Wheatstone bridge, the periphery of the silicon membrane is exposed and then welded and fixed on one surface of the glass ring sheet, the back surface of the silicon piezoresistive sensitive element forms a metal reflective membrane, a strain resistor on the Wheatstone bridge is led out by a wire inner lead, the other surface of the glass ring sheet is fixed on an annular concave pit surface on a ceramic isolation base, the ceramic isolation base is also sintered and fixed on a pressure inlet port of the sensor metal shell, the wire inner lead on the piezoresistive sensitive component is, the invention can still have good characteristics under the conditions of bearing ultrahigh temperature and ultrahigh frequency impact.
However, when the piezoresistive high-frequency high-temperature dynamic pressure sensor in the above patent is installed on an external connecting pipe, there is a problem of inconvenient installation, which increases the labor intensity of workers, thereby reducing the practicability of the pressure sensor.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a piezoresistive high-frequency high-temperature dynamic pressure sensor which has the advantages that a sensor connecting pipe and a liquid connecting pipe can be quickly installed, the installation efficiency of the piezoresistive high-frequency high-temperature dynamic pressure sensor is improved, the problem that the piezoresistive high-frequency high-temperature dynamic pressure sensor is inconvenient to install when the external connecting pipe is installed is solved, the labor intensity of workers is increased, and the practicability of the pressure sensor is reduced.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme: a piezoresistive high-frequency high-temperature dynamic pressure sensor comprises a sensor shell, a sensor connecting pipe and a liquid connecting pipe, wherein the sensor connecting pipe is fixedly arranged at the lower side of the sensor shell, the sensor shell is connected with the liquid connecting pipe in an inserting manner through the sensor connecting pipe, a sealing mechanism is arranged between the sensor connecting pipe and the liquid connecting pipe, a snap ring is fixedly arranged at the upper side of the pipe wall of the liquid connecting pipe, a moving ring is movably sleeved on the outer wall of the sensor shell, pull rods are respectively arranged at the left side and the right side of the lower surface of the moving ring, pull blocks are respectively fixedly arranged at the lower ends of the two pull rods, which are far away from the moving ring, the lower ends of the two pull rods are respectively connected with the snap ring in a clamping manner through the pull blocks, an internal thread ring is arranged outside the sensor shell and positioned at, the lower side of the internal thread ring is rotatably connected with the upper side of the moving ring, the outer wall of the sensor shell is movably sleeved with the rotating ring on the upper side of the internal thread ring, and the lower side of the rotating ring is fixedly connected with the upper side of the internal thread ring.
Preferably, a strip-shaped groove is formed in the position, corresponding to the pull rod, of the lower side of the moving ring, a limiting slide rod is transversely arranged inside the strip-shaped groove, two ends of the limiting slide rod are fixedly connected with the left side and the right side of the strip-shaped groove respectively, a moving block is arranged inside the strip-shaped groove in a sliding mode, a limiting slide hole is formed in the side wall of the moving block, the moving block is connected with the rod wall of the limiting slide rod in a sliding mode through the limiting slide hole, a spring is movably sleeved on the rod wall of the limiting slide rod and located on the right side of the moving block, the left end of the spring is fixedly connected with the side wall of the moving block, and the right end of the spring.
Preferably, the inside of shift ring just is equipped with the annular cavity around the sensor casing, the inside slip of annular cavity is equipped with the slip ring, the annular opening has just been seted up around the sensor casing to the upside of annular cavity, the fixed two connecting rods that are equipped with of upside of slip ring, and two the connecting rod is the symmetry setting, two the one end that the slip ring was kept away from to the connecting rod all passes annular opening and all with the downside fixed connection of internal thread ring.
Preferably, the pipe wall cover of sensor connecting pipe is equipped with the sealing ring, the inner wall of sealing ring and the fixed welding of pipe wall of sensor connecting pipe, the seal groove has been seted up to the upside of liquid connecting pipe, the sensor connecting pipe passes through the cooperation of sealing ring and seal groove and pegs graft with the liquid connecting pipe is sealed, the fixed rubber packing pad that is equipped with in inside of seal groove.
Preferably, the upper side of the pulling block is provided with an anti-skid projection.
Preferably, the circumferential wall of the rotating ring is provided with anti-slip lines.
Preferably, the clamping ring, the moving ring, the pull rod, the pull block, the internal thread ring and the rotating ring are all made of stainless steel materials.
(III) advantageous effects
Compared with the prior art, the invention provides a piezoresistive high-frequency high-temperature dynamic pressure sensor which has the following beneficial effects:
1. this piezoresistive high-frequency high-temperature dynamic pressure sensor, through the shifting ring that sets up on the sensor housing, the pull rod, draw the piece, internal thread ring and rotating ring and the snap ring of setting on the liquid connecting pipe, staff's hand portion draws two pull rods to the outside simultaneously, make the outside removal of draw piece on two pull rods, make two draw the piece again cross the snap ring and all with the snap ring joint, later staff's hand twists the rotating ring, make internal thread ring rebound, and draw the shifting ring rebound through the connecting rod, thereby can make two draw the upwards taut snap ring of piece, and then can install sensor connecting pipe and liquid connecting pipe fast, piezoresistive high-frequency high-temperature dynamic pressure sensor's installation effectiveness has been improved.
2. This piezoresistive high-frequency high-temperature dynamic pressure sensor, through setting up the spacing slide bar in shift ring downside, movable block and spring, staff's hand portion draws two pull rods to the outside simultaneously, make the draw block lateral shifting on two pull rods and make movable block extrusion spring, when staff's hand leaves the pull rod, receive extruded spring this moment, can apply an external force for pull rod and draw the block, thereby make and draw block and snap ring chucking, through slip ring and the connecting rod of setting between shift ring and internal thread ring, when can guarantee internal thread ring pulling shift ring, guarantee that internal thread ring is rotatable with the shift ring.
Drawings
FIG. 1 is a schematic structural diagram of a piezoresistive high-frequency high-temperature dynamic pressure sensor according to the present invention;
FIG. 2 is an enlarged view of the portion A in FIG. 1;
FIG. 3 is an enlarged view of the portion B of FIG. 1;
fig. 4 is a schematic view showing a structure of the coupling of the internally threaded ring and the rotating ring of fig. 1.
In the figure: the device comprises a sensor shell 1, a sensor connecting pipe 2, a liquid connecting pipe 3, a snap ring 4, a moving ring 5, a pull rod 6, a pull block 7, an internal thread ring 8, a rotating ring 9, a limiting slide rod 10, a moving block 11, a spring 12, a sliding ring 13, a connecting rod 14 and a sealing ring 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, a piezoresistive high-frequency high-temperature dynamic pressure sensor comprises a sensor housing 1, a sensor connecting pipe 2 and a liquid connecting pipe 3, the sensor connecting pipe 2 is fixedly arranged at the lower side of the sensor housing 1, the sensor housing 1 is inserted into the liquid connecting pipe 3 through the sensor connecting pipe 2, a sealing mechanism is arranged between the sensor connecting pipe 2 and the liquid connecting pipe 3, a snap ring 4 is fixedly arranged at the upper side of the pipe wall of the liquid connecting pipe 3, a moving ring 5 is movably sleeved on the outer wall of the sensor housing 1, pull rods 6 are respectively arranged at the left side and the right side of the lower surface of the moving ring 5, pull blocks 7 are respectively fixedly arranged at the lower ends of the two pull rods 6 far away from the moving ring 5, the lower ends of the two pull rods 6 are respectively connected with the snap ring 4 through the pull blocks 7 in a clamping manner, an, the outer wall threaded connection of internal thread ring 8 through screw thread and sensor housing 1, the upside rotatable coupling of the downside of internal thread ring 8 and shift ring 5, the swivel becket 9 has just been located in the upside activity cover joint of internal thread ring 8 to the outer wall of sensor housing 1, the downside of swivel becket 9 and the upside fixed connection of internal thread ring 8.
The downside of shift ring 5 and the position department of corresponding with pull rod 6 have seted up the bar groove, the inside in bar groove transversely is equipped with spacing slide bar 10, the both ends of spacing slide bar 10 respectively with the left and right sides fixed connection in bar groove, the inside in bar groove slides and is equipped with movable block 11, spacing slide opening has been seted up to the lateral wall of movable block 11, movable block 11 passes through spacing slide opening and spacing slide bar 10's pole wall sliding connection, spacing slide bar 10's pole wall just is located the right side activity of movable block 11 and has cup jointed spring 12, spring 12's left end and movable block 11 by lateral wall fixed connection, spring 12's right-hand member and the right side wall fixed connection in bar groove.
The inside of shift ring 5 just is equipped with the annular cavity around sensor housing 1, and the inside slip of annular cavity is equipped with sliding ring 13, and the upside of annular cavity has just seted up the annular opening around sensor housing 1, and the fixed two connecting rods 14 that are equipped with of upside of sliding ring 13, and two connecting rods 14 are the symmetry setting, and the one end that sliding ring 13 was kept away from to two connecting rods 14 all passes the annular opening and all with the downside fixed connection of internal thread ring 8.
The pipe wall cover of sensor connecting pipe 2 is equipped with sealing ring 15, the inner wall of sealing ring 15 and the fixed welding of pipe wall of sensor connecting pipe 2, the seal groove has been seted up to the upside of liquid connecting pipe 3, sensor connecting pipe 2 passes through the cooperation of sealing ring 15 and seal groove and 3 sealed pegs graft of liquid connecting pipe, the fixed rubber packing pad that is equipped with in inside of seal groove, can increase the leakproofness of being connected between sensor connecting pipe 2 and the liquid connecting pipe 3.
The upper side of the pulling block 7 is provided with an anti-skid bulge, so that the frictional resistance between the pulling block 7 and the clamping ring 4 can be increased.
The circumferential wall of the rotating ring 9 is provided with anti-slip lines, so that the rotating ring 9 can be rotated by the hands of workers conveniently.
The clamping ring 4, the moving ring 5, the pull rod 6, the pull block 7, the internal thread ring 8 and the rotating ring 9 are all made of stainless steel materials.
In conclusion, when the piezoresistive high-frequency high-temperature dynamic pressure sensor is used, through the moving ring 5, the pull rods 6, the pull blocks 7, the internal thread ring 8, the rotating ring 9 and the clamping ring 4 arranged on the liquid connecting pipe 3, the hands of a worker simultaneously pull the two pull rods 6 outwards, so that the pull blocks 7 on the two pull rods 6 move outwards, the two pull blocks 7 cross the clamping ring 4 and are clamped with the clamping ring 4, then the worker twists the rotating ring 9 by hands, so that the internal thread ring 8 moves upwards, and pulls the moving ring 5 upwards through the connecting rod 14, so that the two pull blocks 6 upwards tension the clamping ring 4, the sensor connecting pipe 2 and the liquid connecting pipe 3 can be quickly installed, and the installation efficiency of the piezoresistive high-frequency high-temperature dynamic pressure sensor is improved; through setting up the spacing slide bar 10 in shift ring 5 downside, movable block 11 and spring 12, staff's hand outwards stimulates two pull rods 6 simultaneously, make the piece 7 that draws on two pull rods 6 outwards remove and make the movable block extrude spring 12, when staff's hand left pull rod 6, receive extruded spring 12 this moment, can exert an external force for pull rod 6 and the piece 7 that draws, thereby make and draw piece 7 and snap ring 4 chucking, through slip ring 13 and the connecting rod 14 of setting between shift ring 9 and internal thread ring 8, when can guaranteeing internal thread ring 8 pulling shift ring 5, guarantee that internal thread ring 8 is rotatable with shift ring 2.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a piezoresistive high frequency high temperature dynamic pressure sensor, includes sensor housing (1), sensor connecting pipe (2) and liquid connecting pipe (3), its characterized in that: the sensor connecting pipe (2) is fixedly arranged at the lower side of the sensor shell (1), the sensor shell (1) is connected with the liquid connecting pipe (3) in an inserting mode through the sensor connecting pipe (2), a sealing mechanism is arranged between the sensor connecting pipe (2) and the liquid connecting pipe (3), a clamping ring (4) is fixedly arranged on the upper side of the pipe wall of the liquid connecting pipe (3), a moving ring (5) is movably sleeved on the outer wall of the sensor shell (1), pull rods (6) are arranged on the left side and the right side of the lower surface of the moving ring (5), pull blocks (7) are fixedly arranged at the lower ends, far away from the moving ring (5), of the two pull rods (6), the lower ends of the two pull rods (6) are connected with the clamping ring (4) in a clamping mode through the pull blocks (7), an internal thread ring (8) is arranged on the outer portion of the sensor shell (, the outer wall of the sensor shell (1) is provided with threads, the internal thread ring (8) is in threaded connection with the outer wall of the sensor shell (1) through the threads, the lower side of the internal thread ring (8) is rotatably connected with the upper side of the moving ring (5), the outer wall of the sensor shell (1) and the upper side of the internal thread ring (8) are movably sleeved with a rotating ring (9), and the lower side of the rotating ring (9) is fixedly connected with the upper side of the internal thread ring (8);
a strip-shaped groove is formed in the lower side of the moving ring (5) and in a position corresponding to the pull rod (6), a limiting slide rod (10) is transversely arranged inside the strip-shaped groove, two ends of the limiting slide rod (10) are fixedly connected with the left side and the right side of the strip-shaped groove respectively, a moving block (11) is arranged inside the strip-shaped groove in a sliding mode, a limiting slide hole is formed in the side wall of the moving block (11), the moving block (11) is in sliding connection with the rod wall of the limiting slide rod (10) through the limiting slide hole, the rod wall of the limiting slide rod (10) is located on the outer side of the moving block (11) and movably sleeved with a spring (12), the left end of the spring (12) is fixedly connected with the outer side wall of the moving block (11), and the right end of the spring (12) is;
the inside of shift ring (5) just is equipped with the annular cavity around sensor housing (1), the inside slip of annular cavity is equipped with sliding ring (13), the annular opening has just been seted up around sensor housing (1) to the upside of annular cavity, the upside of sliding ring (13) is fixed to be equipped with two connecting rods (14), and two connecting rod (14) are the symmetry setting, two the one end that sliding ring (13) were kept away from in connecting rod (14) all passes the annular opening and all with the downside fixed connection of interior screw ring (8).
2. The piezoresistive high-frequency high-temperature dynamic pressure sensor according to claim 1, characterized in that: the pipe wall cover of sensor connecting pipe (2) is equipped with sealing ring (15), the inner wall of sealing ring (15) and the pipe wall fixed weld of sensor connecting pipe (2), the seal groove has been seted up to the upside of liquid connecting pipe (3), sensor connecting pipe (2) are sealed pegging graft with liquid connecting pipe (3) through the cooperation of sealing ring (15) and seal groove, the fixed rubber packing pad that is equipped with in inside of seal groove.
3. The piezoresistive high-frequency high-temperature dynamic pressure sensor according to claim 1, characterized in that: the upper side of the pulling block (7) is provided with an anti-skid bulge.
4. The piezoresistive high-frequency high-temperature dynamic pressure sensor according to claim 1, characterized in that: the circumferential wall of the rotating ring (9) is provided with anti-skid lines.
5. The piezoresistive high-frequency high-temperature dynamic pressure sensor according to claim 1, characterized in that: the clamping ring (4), the moving ring (5), the pull rod (6), the pull block (7), the internal thread ring (8) and the rotating ring (9) are all made of stainless steel materials.
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| CN201910885183.2A CN110553765B (en) | 2019-09-19 | 2019-09-19 | Piezoresistive high-frequency high-temperature dynamic pressure sensor |
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| CN201910885183.2A CN110553765B (en) | 2019-09-19 | 2019-09-19 | Piezoresistive high-frequency high-temperature dynamic pressure sensor |
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| CN110553765B true CN110553765B (en) | 2020-12-04 |
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| CN112284574B (en) * | 2020-09-30 | 2022-01-14 | 深圳信息职业技术学院 | Pressure sensor packaging structure capable of being packaged and formed at one time |
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| CN110553765A (en) | 2019-12-10 |
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Effective date of registration: 20220926 Address after: 230000 Room 203, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee after: Hefei Jiuzhou Longteng scientific and technological achievement transformation Co.,Ltd. Address before: 314001 2 building, Photovoltaic Science Park, 1288 Kang He road, Xiuzhou District, Jiaxing, Zhejiang. Patentee before: JIAXING University |
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Effective date of registration: 20221223 Address after: 714,000 Inside Huashan Innovation and Entrepreneurship Base, Huayin City, Weinan City, Shaanxi Province, 1-104 Patentee after: Shaanxi Xinke Jingnuo Automation Instrument Co.,Ltd. Address before: 230000 Room 203, building 2, phase I, e-commerce Park, Jinggang Road, Shushan Economic Development Zone, Hefei City, Anhui Province Patentee before: Hefei Jiuzhou Longteng scientific and technological achievement transformation Co.,Ltd. |