CN110542949A - optical fiber manufacturing method and heating device for silicon optical waveguide connection and coupling - Google Patents
optical fiber manufacturing method and heating device for silicon optical waveguide connection and coupling Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2551—Splicing of light guides, e.g. by fusion or bonding using thermal methods, e.g. fusion welding by arc discharge, laser beam, plasma torch
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2552—Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends
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Abstract
The application discloses an optical fiber manufacturing method and a heating device for silicon optical waveguide connection and coupling, and belongs to the technical field of optical fiber communication. The method comprises the steps of firstly, locally heating a thin core optical fiber matched with an output mode field of a mode spot converter to enable a fiber core mode field of a heating area of the thin core optical fiber to be increased to the width of a fiber core of a single mode optical fiber, then cutting off the thin core optical fiber at the middle of the fiber core increasing area of the thin core optical fiber, and finally welding the thin core optical fiber with the single mode optical fiber at a breakpoint of the fiber core increasing area of the thin core optical fiber. The mode of local heating is adopted, the fiber core mode field of the thin-core optical fiber connected with the output mode field of the spot size converter is enlarged and then is welded with the single-mode optical fiber, so that the single-mode optical fiber and the output mode field of the spot size converter achieve the optimal coupling efficiency and the lowest coupling loss.
Description
Technical Field
the application belongs to the technical field of optical fiber communication, and particularly relates to an optical fiber manufacturing method and a heating device for silicon optical waveguide connection and coupling.
Background
in recent years, with the development of silicon optical technology, the application of silicon optical integration is gradually mature, and the market thereof is gradually opened. In the field of optical fiber communication technology, more and more optical devices adopt silicon optical technology. The coupling and packaging of silicon photonic devices has been a popular field of silicon photonic research and also a research difficulty. In a conventional optical device coupling package, a single mode optical fiber can be easily coupled and aligned with a conventional waveguide, laser, detector, etc. However, the size of the silicon photonic waveguide adopting the CMOS (complementary metal oxide semiconductor) process is greatly reduced, for example, the waveguide size of the silicon photonic device based on the SOI material is only 0.3um to 0.5um, the fiber core of the standard single mode fiber coupled with the waveguide is 8 um to 10um, and the large difference between the physical sizes of the two is large, so that the large mode field mismatch during coupling is caused, and the coupling loss is extremely high. Although the existing scheme adds an end face coupler (SSC (single-mode solid state transducer)) in front of a silicon waveguide, the waveguide with the width of 0.5um can be enlarged to 3um mode field output, and the coupling loss with a single-mode fiber is reduced, but the 3um mode field and a 9um fiber core of the single-mode fiber still have large mode field mismatch, and the coupling loss cannot be completely reduced.
Disclosure of Invention
the application discloses an optical fiber manufacturing method and a heating device for silicon optical waveguide connection and coupling, which match standard single-mode optical fibers with a mode field of a silicon photonic waveguide to achieve optimal coupling efficiency and lowest coupling loss.
According to a first aspect, there is provided in one embodiment a method of fabricating an optical fiber for silicon optical waveguide connection and coupling, comprising:
Locally heating the thin core optical fiber matched with the output mode field of the mode spot converter to increase the fiber core mode field of the heating area of the thin core optical fiber to the fiber core width of the single mode optical fiber;
Cutting off the thin-core optical fiber at the middle most of the core enlarged area of the thin-core optical fiber;
And welding the end face of the core enlarged region of the thin-core optical fiber with a single-mode optical fiber.
Further, the temperature at which the thin core optical fiber is locally heated is at least 1300 ℃.
Further, the thin-core optical fiber is locally heated by using hydrogen-oxygen flame.
Further, the fiber core width of the fine-core optical fiber is 3 um; and/or the fiber core width of the single-mode optical fiber is 8-9 um.
further, still include:
And coupling and connecting one end of the thin-core optical fiber non-fiber core enlarged region with a waveguide of a silicon photonic device through the mode spot converter.
Further, still include:
And carrying out secondary high-temperature heating treatment on the welding point of the thin-core optical fiber and the single-mode optical fiber.
Further, the performing of the secondary high-temperature heating process on the fusion-splicing point of the thin-core optical fiber and the single-mode optical fiber includes:
Connecting the other end of the single mode fiber with a laser source, and connecting the other end of the thin core fiber with an optical power meter;
Then carrying out high-temperature heating treatment on the welding point of the thin-core optical fiber and the single-mode optical fiber, and monitoring the change of the power value of the optical power meter in the treatment process;
And when the power value of the optical power meter is not increased or the power output curve reaches the highest point, stopping the high-temperature heating treatment.
According to a second aspect, an embodiment provides a coupling fiber having a core width of 9um at one end and a core width of 3um at the other end.
Further, the one end that the fibre core width is 9um is used as coupling fiber's input, and the one end that the fibre core width is 3um is used as coupling fiber's output.
Further, the coupling fiber is obtained by the method of the first aspect.
According to a third aspect, an embodiment provides a heating device for manufacturing an optical fiber for silicon optical waveguide connection and coupling, which comprises an optical fiber fixing device and two hydrogen-oxygen flame nozzles; the optical fiber fixing device is used for locally fixing the thin-core optical fiber matched with the output mode field of the spot size converter; the two hydrogen-oxygen flame nozzles are used for locally heating the thin-core optical fiber fixed by the optical fiber fixing device from two sides so as to increase the fiber core mode field of the thin-core optical fiber heating area to the fiber core width of the single-mode optical fiber; after the fiber core mode field of the thin core fiber heating area is increased to the width of the fiber core of the single mode fiber, the thin core fiber is cut off in the fiber core increasing area and is welded with the single mode fiber at a break point.
Further, the device also comprises a laser light source and an optical power meter; when the high-temperature heating treatment is carried out on the fusion joint of the thin core optical fiber and the single mode optical fiber, one end of the single mode optical fiber after fusion is connected with the laser light source, one end of the thin core optical fiber is connected with the optical power meter, the laser light source is used for emitting a light source with a fixed wavelength, and the optical power meter is used for monitoring the change of the power value of light received by one end of the thin core optical fiber; when the power value monitored by the optical power meter is not increased or the power output curve reaches the highest point, the heating device stops heating.
according to the method and the heating device for manufacturing the optical fiber for connecting and coupling the silicon optical waveguide, firstly, the thin-core optical fiber matched with the output mode field of the mode spot converter is locally heated so that the fiber core mode field of the heating area of the thin-core optical fiber is increased to the fiber core width of the single-mode optical fiber, then the thin-core optical fiber is cut off in the fiber core increasing area of the thin-core optical fiber, and finally the single-mode optical fiber is welded at the break point of the fiber core increasing area of the thin-core optical fiber. The mode of local heating is adopted, the fiber core mode field of the thin-core optical fiber matched with the output mode field of the spot size converter is widened and then is welded with the single-mode optical fiber, so that the single-mode optical fiber and the output mode field of the spot size converter achieve the optimal coupling efficiency and the lowest coupling loss, and meanwhile, the optical fiber connected and coupled by adopting the mode has low cost, high production efficiency and low coupling loss and is suitable for mass production.
Drawings
FIG. 1 is a schematic diagram of a waveguide and spot size converter connection for a silicon photonic device;
FIG. 2 is a schematic diagram showing a waveguide width comparison of a single mode fiber and a spot transformer;
FIG. 3 is a schematic flow chart illustrating a method for fabricating an optical fiber for silicon optical waveguide coupling and coupling in one embodiment;
FIG. 4 is a schematic illustration of localized heating of a thin core optical fiber according to one embodiment;
FIG. 5 is a schematic diagram of a break point of a fine core optical fiber according to an embodiment;
FIG. 6 is a schematic diagram of fusion splicing of a fine-core fiber to a single-mode fiber according to one embodiment;
FIG. 7 is a schematic diagram of a connection of a single mode fiber to a spot-size converter in accordance with an embodiment;
FIG. 8 is a schematic view of a weld spot being subjected to a secondary high temperature heat treatment in one embodiment;
FIG. 9 is a schematic view of a weld spot being subjected to a secondary high temperature heat treatment in one embodiment;
FIG. 10 is a schematic diagram of a coupling fiber according to an embodiment.
Detailed Description
The present invention will be described in further detail with reference to the following detailed description and accompanying drawings. Wherein like elements in different embodiments are numbered with like associated elements. In the following description, numerous details are set forth in order to provide a better understanding of the present application. However, those skilled in the art will readily recognize that some of the features may be omitted or replaced with other elements, materials, methods in different instances. In some instances, certain operations related to the present application have not been shown or described in detail in order to avoid obscuring the core of the present application from excessive description, and it is not necessary for those skilled in the art to describe these operations in detail, so that they may be fully understood from the description in the specification and the general knowledge in the art.
Furthermore, the features, operations, or characteristics described in the specification may be combined in any suitable manner to form various embodiments. Also, the various steps or actions in the method descriptions may be transposed or transposed in order, as will be apparent to one of ordinary skill in the art. Thus, the various sequences in the specification and drawings are for the purpose of describing certain embodiments only and are not intended to imply a required sequence unless otherwise indicated where such sequence must be followed.
the numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings).
referring to fig. 1 and fig. 2, a schematic diagram of a connection between a waveguide of a silicon photonic device and a spot-size converter and a schematic diagram of a comparison between waveguide widths of a single-mode fiber and a spot-size converter are shown, and a key part of a silicon photonic device packaging technology is to realize coupling connection between an optical signal in a chip and an external optical signal (mostly, an optical fiber). The core diameter of the single-mode optical fiber is about 8-10 microns, the size of the cross section of the waveguide of the silicon photonic device is smaller than 1 micron, the size difference of the two is large, severe mode field mismatch is caused, and coupling loss is large. Therefore, a special spot size converter needs to be designed at the input/output end of the chip to realize mode field matching and improve coupling efficiency. The spot-size converter has two modes of end face coupling and vertical grating coupling. The grating coupler has low coupling efficiency and is not favorable for packaging, and is mostly used for design test of silicon photonic devices. The end face coupling has the characteristics of simple packaging process, high coupling efficiency and the like, and is widely applied. The end face coupling is realized by directly aligning the waveguide cross section of the chip input/output port with the cross section of the optical fiber through the spot-size converter, so that the mode field of the single-mode optical fiber is matched with the mode field of the silicon waveguide, and the optimal coupling efficiency is achieved. The design mechanism of the cantilever beam wedge-shaped spot size converter is widely adopted as a mature design due to small product size and excellent optical indexes. The coupling method of the conventional planar waveguide chip is to align and couple with the end face waveguide of the chip through a Fiber Array (FA). The coupling end face of the chip and the optical fiber array only uses one glue, and simultaneously realizes refractive index matching and strength bonding. However, in the silicon photonic device designed by the cantilever beam structure, the periphery of the end surface waveguide is suspended and is connected with the chip main body only by the cantilever, and the structure is sensitive to stress, so that the cantilever structure can be damaged when the stress is large, and the chip is scrapped. The hard glue selected by the conventional coupling mode can generate larger stress due to environmental change, and cannot be used for coupling of the cantilever beam waveguide chip. In addition, the bottom of the end face of the chip is provided with a bulge (the protruding part is larger than the coupling distance), the conventional optical fiber array cannot be used, the optical fiber array with a special specification needs to be customized for coupling alignment, the manufacturing process of the optical fiber array is complex, the processing difficulty is high, the cost is higher, and the coupling process with the chip is complex.
in the manufacturing method and the heating device for optical fiber connection and coupling in the embodiment of the invention, the thin-core optical fiber matched with the output mode field of the spot size converter is locally heated to increase the fiber core mode field of the heating area of the thin-core optical fiber to the fiber core width of the single-mode optical fiber, then the thin-core optical fiber is cut off in the fiber core increasing area of the thin-core optical fiber, and finally the thin-core optical fiber is welded with the single-mode optical fiber at the breakpoint of the fiber core increasing area of the thin-core optical fiber. The mode of local heating is adopted, the fiber core mode field of the thin-core optical fiber matched with the output mode field of the spot size converter is widened and then is welded with the single-mode optical fiber, so that the single-mode optical fiber and the output mode field of the spot size converter achieve the optimal coupling efficiency and the lowest coupling loss, and meanwhile, the optical fiber connected and coupled by adopting the mode has low cost, high production efficiency and low coupling loss and is suitable for mass production.
Example one
Referring to fig. 3, a flow chart of an embodiment of a method for fabricating an optical fiber for coupling and connecting a silicon optical waveguide includes:
Step one, local heating is carried out on the thin-core optical fiber.
Firstly, a thermally expanded core optical fiber is manufactured. Namely, the thin core optical fiber matched with the output mode field of the mode spot converter is locally heated, so that the fiber core mode field of the heating area of the thin core optical fiber is increased to the width of the fiber core of the single mode optical fiber. Referring to fig. 4, a schematic diagram of a local heating of a thin-core optical fiber according to an embodiment includes a thin-core optical fiber 10, a core 20 of the thin-core optical fiber, a hydrogen-oxygen flame 30, and a heating region 40. In one embodiment, the core width of the fine core fiber is 3 um. The thin core optical fiber 10 is locally heated at a high temperature of at least 1300 c using a hydrogen-oxygen flame 30. When the heating temperature exceeds 1300 ℃, germanium ions in the fiber core 20 of the thin-core optical fiber can diffuse to the cladding, and finally the fiber core of the optical fiber is enlarged. The diameter of the 3um fiber core of the fine-core optical fiber can be expanded to 8-9um mode field for output through hydrogen-oxygen flame high-temperature heating for a period of time.
And step two, cutting off the enlarged area of the core of the thin-core optical fiber.
the thin core optical fiber is cut in the core enlarged region of the thin core optical fiber. Referring to fig. 5, which is a schematic diagram of a broken point of a thin core optical fiber in an embodiment, after the heating and core expanding of the thin core optical fiber 10 are completed, the optical fiber is cut at the middle of the core expanding region of the thin core optical fiber 10, that is, each optical fiber can be cut into two core expanding optical fibers after the core expanding process.
and step three, welding the single-mode optical fiber at the breakpoint.
Referring to fig. 6, a schematic diagram of fusion splicing of a thin-core fiber and a single-mode fiber according to an embodiment includes a thin-core fiber 10, a core 20 of the thin-core fiber, a core 50 of the single-mode fiber, and a core 60 of the single-mode fiber. A single mode fiber 50 is fused to the fine core fiber 20 at the break point of the enlarged core region. In one embodiment, the core width of the single mode fiber is 8-9 um.
In one embodiment, one end of the thin-core optical fiber non-fiber core enlarged region is coupled with the waveguide of the silicon photonic device through the mode spot converter. Referring to fig. 7, a schematic diagram of the connection between the single mode fiber and the spot-size converter in an embodiment includes a thin-core fiber 10, a thin-core fiber core 20, a single mode fiber 50, a single mode fiber core 60, a spot-size converter 70, and a silicon photonic device waveguide 70. Wherein, the width of single mode fiber core 60 is 8-9um, and the width of thin core fiber core 20 is 3um, and the width of spot-size converter 70 is 0.5 um. The fused optical fiber is a new coupling optical fiber, can be better matched with an output mode field of an SSC mode spot converter of a waveguide, and achieves optimal coupling efficiency, one end of the new coupling optical fiber is provided with a single-mode optical fiber 9um fiber core which can be used as an optical signal input end, and the other end of the new coupling optical fiber is provided with a 3um fiber core which can be used as an output end. The coupling optical fiber disclosed by the application can output the optical mode field of 3um, the size of the optical mode field is close to that of the optical mode field of 3um when the SSC mode spot converter or the waveguide is used for carrying out optical coupling between the optical mode field and the waveguide, and the coupling efficiency is higher. Compared with the coupling of the waveguide by using the common single-mode optical fiber, the coupling optical fiber disclosed by the application has lower coupling loss.
In one embodiment, the method for manufacturing an optical fiber for connecting and coupling a silicon optical waveguide disclosed in the present application further includes:
and step four, carrying out secondary high-temperature treatment on the welding points.
and carrying out secondary high-temperature heating treatment on the welding point of the thin-core optical fiber and the single-mode optical fiber. Referring to fig. 8, a schematic diagram of an embodiment of performing a secondary high temperature heating process on a fusion point includes a core fiber 10, a core 20 of the core fiber, a hydrogen-oxygen flame 30, a heating region 40, a single mode fiber 50, and a core 60 of the single mode fiber. After the single mode fiber 50 is fusion-spliced with the core-expanded thin core fiber 10, there still exists fiber transmission loss, there also exists an angle difference in the cutting of the fiber end faces on both sides, and the cladding regions and cores on both end faces cannot be completely fused or are not uniform. Therefore, in the embodiment, the high-temperature treatment can be performed on the optical fiber welding area by adopting the method of the first step, so that the cladding and the fiber core at the welding position can be better fused and homogenized.
further, referring to fig. 9, a schematic diagram of performing a secondary high-temperature heating process on the fusion point in an embodiment includes a thin-core optical fiber 10, a core 20 of the thin-core optical fiber, a hydrogen-oxygen flame 30, a heating region 40, a single-mode optical fiber 50, a core 60 of the single-mode optical fiber, a laser light source 100, and an optical power meter. The other end of the single mode fiber 50 is connected to the laser light source 100, and the other end of the thin core fiber 10 is connected to the optical power meter 200. Then, the fusion point of the thin core fiber 10 and the single mode fiber 50 is heated at a high temperature, and the change of the power value of the optical power meter 200 is monitored during the process. And when the power value of the optical power meter 200 is not increased or the power output curve reaches the highest point, stopping the high-temperature heating treatment. In one embodiment, the laser source 100 outputs light having a wavelength of 1310nm or 1550 nm. After the single-mode optical fiber is welded with the core-expanded thin-core optical fiber, the other end of the single-mode optical fiber is connected with a laser light source with the wavelength of 1310nm or 1550nm, the other end of the thin-core optical fiber is connected with an optical power meter, and preliminary optical fiber transmission power is tested. And then placing the optical fiber fusion point in a hydrogen-oxygen flame heating zone, setting technological parameters to start heating, monitoring the power value change of the optical power meter in the heating process, after the heating is started, slowly increasing the power value displayed by the monitor, and immediately stopping heating when the power value reaches the maximum value and does not increase any more or the power curve reaches the highest point and tends to be flat, wherein the optical fiber transmission reaches the minimum fusion loss at the moment, and even can reach zero loss.
Referring to fig. 10, a structural schematic diagram of the coupling optical fiber in an embodiment is obtained by using the above process, where a fiber core at one end has a width of 9um as an input end, a fiber core at one end has a width of 3um as an output end, and the 9um fiber core region and the 3um fiber core region can be processed to a desired length according to actual needs.
in the method for manufacturing the optical fiber for connecting and coupling the silicon optical waveguide and the heating device, firstly, the thin core optical fiber matched with the output mode field of the mode spot converter is locally heated so as to increase the fiber core mode field of the heating area of the thin core optical fiber to the fiber core width of the single mode optical fiber, then the thin core optical fiber is cut off in the fiber core increasing area of the thin core optical fiber, and finally the broken point of the fiber core increasing area of the thin core optical fiber is welded with the single mode optical fiber. The mode of local heating is adopted, the fiber core mode field of the thin-core optical fiber matched with the output mode field of the spot size converter is widened and then is welded with the single-mode optical fiber, so that the single-mode optical fiber and the output mode field of the spot size converter achieve the optimal coupling efficiency and the lowest coupling loss, and meanwhile, the optical fiber connected and coupled by adopting the mode has low cost, high production efficiency and low coupling loss and is suitable for mass production.
Example two:
the present application also discloses a heating device for the fabrication of light for the connection and coupling of silicon optical waveguides, please refer to fig. 9, which includes an optical fiber fixing device and two hydrogen-oxygen flame nozzles 30. The optical fiber fixing device is used for locally fixing the thin-core optical fiber matched with the output mode field of the mode spot converter. The two hydrogen-oxygen flame nozzles 30 are used for locally heating the thin-core optical fiber 10 fixed by the optical fiber fixing device from two sides, so that the fiber core mode field of the heating area of the thin-core optical fiber 10 is increased to the fiber core width of the single-mode optical fiber 50. After the core mode field of the heating region of the thin-core fiber 10 is increased to the core width of the single-mode fiber 50, the thin-core fiber 10 is cut off in the core increasing region, and is fused with the single-mode fiber 50 at the break point. In one embodiment, the heating device further comprises a laser source 100 and an optical power meter 200. When the high-temperature heating treatment is performed on the welding point of the thin core optical fiber 10 and the single mode optical fiber 50, one end of the welded single mode optical fiber 50 is connected with the laser light source 100, one end of the thin core optical fiber 10 is connected with the optical power meter 200, the laser light source 100 is used for emitting a light source with a fixed wavelength, and the optical power meter 200 is used for monitoring the change of the power value of light received by one end of the thin core optical fiber 10. Wherein, when the power value monitored by the optical power meter 200 is not increasing or the power output curve reaches the highest point, the heating device is stopped heating.
The present invention has been described in terms of specific examples, which are provided to aid understanding of the invention and are not intended to be limiting. For a person skilled in the art to which the invention pertains, several simple deductions, modifications or substitutions may be made according to the idea of the invention.
Claims (10)
1. A method of fabricating an optical fiber for coupling and connecting a silicon optical waveguide, comprising:
Locally heating the thin core optical fiber matched with the output mode field of the mode spot converter to increase the fiber core mode field of the heating area of the thin core optical fiber to the fiber core width of the single mode optical fiber;
Cutting off the thin-core optical fiber at the middle most of the core enlarged area of the thin-core optical fiber;
and welding the end face of the core enlarged region of the thin-core optical fiber with a single-mode optical fiber.
2. The method of claim 1, wherein the temperature at which the thin core optical fiber is locally heated is at least 1300 ℃.
3. the method of claim 1, wherein the fine core optical fiber is locally heated using a hydrogen-oxygen flame.
4. The method of claim 1, wherein the fine-core fiber has a core width of 3 um; and/or the fiber core width of the single-mode optical fiber is 8-9 um.
5. The method of claim 1, further comprising:
And coupling and connecting one end of the thin-core optical fiber non-fiber core enlarged region with a waveguide of a silicon photonic device through the mode spot converter.
6. The method of claim 1, further comprising:
And carrying out secondary high-temperature heating treatment on the welding point of the thin-core optical fiber and the single-mode optical fiber.
7. The method of claim 6, wherein said subjecting the fusion splice of the core-spun optical fiber and the single-mode optical fiber to a second high temperature heating process comprises:
connecting the other end of the single mode fiber with a laser source, and connecting the other end of the thin core fiber with an optical power meter;
Then carrying out high-temperature heating treatment on the welding point of the thin-core optical fiber and the single-mode optical fiber, and monitoring the change of the power value of the optical power meter in the treatment process;
And when the power value of the optical power meter is not increased or the power output curve reaches the highest point, stopping the high-temperature heating treatment.
8. The utility model provides a coupling optical fiber, its characterized in that, the fibre core width of coupling optical fiber one end is 9um, and the width of other end fibre core is 3 um.
9. A heating device for manufacturing an optical fiber for connecting and coupling a silicon optical waveguide is characterized by comprising an optical fiber fixing device and two hydrogen-oxygen flame nozzles; the optical fiber fixing device is used for locally fixing the thin-core optical fiber matched with the output mode field of the spot size converter; the two hydrogen-oxygen flame nozzles are used for locally heating the thin-core optical fiber fixed by the optical fiber fixing device from two sides so as to increase the fiber core mode field of the thin-core optical fiber heating area to the fiber core width of the single-mode optical fiber; after the fiber core mode field of the thin core fiber heating area is increased to the width of the fiber core of the single mode fiber, the thin core fiber is cut off in the fiber core increasing area and is welded with the single mode fiber at a break point.
10. the heating device of claim 9, further comprising a laser light source and an optical power meter; when the high-temperature heating treatment is carried out on the fusion joint of the thin core optical fiber and the single mode optical fiber, one end of the single mode optical fiber after fusion is connected with the laser light source, one end of the thin core optical fiber is connected with the optical power meter, the laser light source is used for emitting a light source with a fixed wavelength, and the optical power meter is used for monitoring the change of the power value of light received by one end of the thin core optical fiber; when the power value monitored by the optical power meter is not increased or the power output curve reaches the highest point, the heating device stops heating.
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| CN112180504A (en) * | 2020-09-29 | 2021-01-05 | 中国科学院物理研究所 | Suspended waveguide structure and preparation method thereof |
| CN112230332A (en) * | 2020-12-16 | 2021-01-15 | 武汉驿路通科技股份有限公司 | Single fiber and preparation method thereof |
| CN113791474A (en) * | 2021-08-17 | 2021-12-14 | 深圳市速腾聚创科技有限公司 | Coupler and optical fiber array packaging method, packaging structure and chip |
| CN114252957A (en) * | 2021-11-11 | 2022-03-29 | 中山大学 | High-stability coupling packaging method for waveguides on amorphous material chip |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0690318A1 (en) * | 1994-07-01 | 1996-01-03 | Fujitsu Limited | A method for splicing optical fibers and a splicing apparatus capable of adjusting attenuation |
| TW309926U (en) * | 1990-10-12 | 1997-07-01 | Sumitomo Electric Industries | Heating device of producing optical fiber coupler |
| CN1320222A (en) * | 1998-09-25 | 2001-10-31 | 康宁股份有限公司 | Optical fiber having expande dmode field diameter and method of expanding the mode field diameter of optical fiber |
| US20020076160A1 (en) * | 2000-12-14 | 2002-06-20 | U-Conn Technology Inc. | Optical fiber coupling system |
| CN1444063A (en) * | 2002-03-12 | 2003-09-24 | 住友电气工业株式会社 | Method for enlarging fibre-optic mode field diameter and equipment |
| US6676307B1 (en) * | 2000-06-14 | 2004-01-13 | Ciena Corporation | Method and system for controlling splice attenuation |
| EP1726932A1 (en) * | 2005-05-26 | 2006-11-29 | Harris Corporation | Method and apparatus for measuring spatial temperature distribution of flames |
| CN1952359A (en) * | 2005-10-19 | 2007-04-25 | 曼柴油机欧洲股份公司 | Gas engine and ignition device for gas engine |
| CN101750677A (en) * | 2010-01-15 | 2010-06-23 | 清华大学 | Method utilizing medium with low melting point to realize fusion coupling of side face of optical fiber |
| CN102419462A (en) * | 2011-12-08 | 2012-04-18 | 燕山大学 | Optical fiber fusion point heating device |
| CN102741722A (en) * | 2009-11-18 | 2012-10-17 | 波士顿科学国际医疗贸易公司 | Methods and apparatus related to a distal end portion of an optical fiber having a substantially spherical shape |
| CN103676003A (en) * | 2013-12-30 | 2014-03-26 | 北京航天时代光电科技有限公司 | Welding method of polarization-maintaining photonic crystal fiber |
| CN103969744A (en) * | 2013-02-04 | 2014-08-06 | 大豪信息技术（威海）有限公司 | Discharging strength correction method of optical fiber fusion splicer |
| CN204256211U (en) * | 2014-11-04 | 2015-04-08 | 北京工业大学 | A kind of low loss fiber mould field adaptation with the all-fiber peeling off function |
| CN104520741A (en) * | 2012-08-03 | 2015-04-15 | Sei光学前沿株式会社 | Heat treatment device for optical fiber reinforcing member, optical fiber fusion splicer provided with same heat treatment device, and method for heat treating optical fiber reinforcing member |
| CN106019482A (en) * | 2016-08-04 | 2016-10-12 | 华中科技大学 | Method for splicing photonic crystal fiber and single-mode fiber |
-
2019
- 2019-09-20 CN CN201910891182.9A patent/CN110542949B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW309926U (en) * | 1990-10-12 | 1997-07-01 | Sumitomo Electric Industries | Heating device of producing optical fiber coupler |
| EP0690318A1 (en) * | 1994-07-01 | 1996-01-03 | Fujitsu Limited | A method for splicing optical fibers and a splicing apparatus capable of adjusting attenuation |
| CN1320222A (en) * | 1998-09-25 | 2001-10-31 | 康宁股份有限公司 | Optical fiber having expande dmode field diameter and method of expanding the mode field diameter of optical fiber |
| US6676307B1 (en) * | 2000-06-14 | 2004-01-13 | Ciena Corporation | Method and system for controlling splice attenuation |
| US20020076160A1 (en) * | 2000-12-14 | 2002-06-20 | U-Conn Technology Inc. | Optical fiber coupling system |
| CN1444063A (en) * | 2002-03-12 | 2003-09-24 | 住友电气工业株式会社 | Method for enlarging fibre-optic mode field diameter and equipment |
| EP1726932A1 (en) * | 2005-05-26 | 2006-11-29 | Harris Corporation | Method and apparatus for measuring spatial temperature distribution of flames |
| US20070099133A1 (en) * | 2005-10-19 | 2007-05-03 | Man Diesel Se | Gas engine and ignition device for a gas engine |
| CN1952359A (en) * | 2005-10-19 | 2007-04-25 | 曼柴油机欧洲股份公司 | Gas engine and ignition device for gas engine |
| CN102741722A (en) * | 2009-11-18 | 2012-10-17 | 波士顿科学国际医疗贸易公司 | Methods and apparatus related to a distal end portion of an optical fiber having a substantially spherical shape |
| CN101750677A (en) * | 2010-01-15 | 2010-06-23 | 清华大学 | Method utilizing medium with low melting point to realize fusion coupling of side face of optical fiber |
| CN102419462A (en) * | 2011-12-08 | 2012-04-18 | 燕山大学 | Optical fiber fusion point heating device |
| CN104520741A (en) * | 2012-08-03 | 2015-04-15 | Sei光学前沿株式会社 | Heat treatment device for optical fiber reinforcing member, optical fiber fusion splicer provided with same heat treatment device, and method for heat treating optical fiber reinforcing member |
| CN103969744A (en) * | 2013-02-04 | 2014-08-06 | 大豪信息技术（威海）有限公司 | Discharging strength correction method of optical fiber fusion splicer |
| CN103676003A (en) * | 2013-12-30 | 2014-03-26 | 北京航天时代光电科技有限公司 | Welding method of polarization-maintaining photonic crystal fiber |
| CN204256211U (en) * | 2014-11-04 | 2015-04-08 | 北京工业大学 | A kind of low loss fiber mould field adaptation with the all-fiber peeling off function |
| CN106019482A (en) * | 2016-08-04 | 2016-10-12 | 华中科技大学 | Method for splicing photonic crystal fiber and single-mode fiber |
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|---|---|---|---|---|
| CN112180504A (en) * | 2020-09-29 | 2021-01-05 | 中国科学院物理研究所 | Suspended waveguide structure and preparation method thereof |
| CN112180504B (en) * | 2020-09-29 | 2023-11-14 | 中国科学院物理研究所 | Suspended waveguide structure and preparation method thereof |
| CN112230332A (en) * | 2020-12-16 | 2021-01-15 | 武汉驿路通科技股份有限公司 | Single fiber and preparation method thereof |
| CN113791474A (en) * | 2021-08-17 | 2021-12-14 | 深圳市速腾聚创科技有限公司 | Coupler and optical fiber array packaging method, packaging structure and chip |
| CN114252957A (en) * | 2021-11-11 | 2022-03-29 | 中山大学 | High-stability coupling packaging method for waveguides on amorphous material chip |
| CN114252957B (en) * | 2021-11-11 | 2024-03-08 | 中山大学 | High-stability coupling packaging method for waveguides on amorphous material sheet |
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