CN110541182A - Tank liquor on-line regulating and controlling device - Google Patents

Tank liquor on-line regulating and controlling device Download PDF

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Publication number
CN110541182A
CN110541182A CN201810523169.3A CN201810523169A CN110541182A CN 110541182 A CN110541182 A CN 110541182A CN 201810523169 A CN201810523169 A CN 201810523169A CN 110541182 A CN110541182 A CN 110541182A
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CN
China
Prior art keywords
gold
bath
concentration
tank
bath solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810523169.3A
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Chinese (zh)
Inventor
许方贤
郑增煌
林克凡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Avary Holding Shenzhen Co Ltd
Original Assignee
Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Avary Holding Shenzhen Co Ltd
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Publication date
Application filed by Hongqisheng Precision Electronics Qinhuangdao Co Ltd, Avary Holding Shenzhen Co Ltd filed Critical Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Priority to CN201810523169.3A priority Critical patent/CN110541182A/en
Publication of CN110541182A publication Critical patent/CN110541182A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02Tanks; Installations therefor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/02Heating or cooling
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/12Process control or regulation
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/12Process control or regulation
    • C25D21/14Controlled addition of electrolyte components

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

An online regulation and control device for electrogilding liquid is used for detecting and regulating and controlling bath liquid in a composite plating bath, a gold salt adding machine is arranged above the composite plating bath, the online regulation and control device for bath liquid comprises an online regulation and control unit, an X-ray fluorescence spectrometer and a controller, the online regulation and control unit comprises a driving pump and a containing groove, the driving pump is used for driving the bath liquid in the composite plating bath to circularly flow in the containing groove and the composite plating bath, the X-ray fluorescence spectrometer is used for continuously detecting the concentration of gold ions in the bath liquid in the containing groove, the controller is used for judging whether the concentration of the current gold ions is less than a first preset concentration, if so, the gold salt adding machine is controlled to add gold salt into the composite plating bath, and when the concentration of the current gold ions is greater than or equal to the first preset concentration and less than or equal to a second preset concentration, the controller controls the gold salt adding machine to stop adding the gold salt.

Description

Tank liquor on-line regulating and controlling device
Technical Field
The invention relates to the field of electroplating, in particular to an on-line regulating and controlling device for bath solution.
Background
Gold has the characteristics of high oxidation resistance, ductility, conductivity, wear resistance and the like, and therefore, the gold is widely applied to the surfaces of electronic components such as wafers, printed circuit boards, light emitting diodes and the like to form electroplated layers, so that the electronic components have high oxidation resistance, conductivity and wear resistance. When gold is electroplated, a gold electroplating solution is generally required. The concentration of gold ions in the gold electroplating solution directly influences the thickness of an electroplated layer, and the thickness of the electroplated layer directly influences the performance of the electronic component. For example, catalytic problems can arise when the plating is thick, and poor results when the plating is thin. Therefore, the concentration of gold ions in the gold plating solution has a great influence on the performance of the electronic component.
Disclosure of Invention
In view of the above, there is a need for an online tank liquid control device, which can solve the above problems.
An online bath solution regulating device is used for detecting and regulating bath solution in a composite plating bath, a gold salt adding machine is arranged above the composite plating bath, the online bath solution regulating device comprises an online regulating unit, an X-ray fluorescence spectrometer and a controller, the online regulating unit comprises a driving pump and a containing groove, the driving pump is used for driving bath solution in the composite plating bath to circularly flow in the containing groove and the composite plating bath, the X-ray fluorescence spectrometer is used for continuously detecting the concentration of gold ions in the bath solution in the containing groove, the controller is used for obtaining the concentration of the gold ions in the bath solution currently detected by the X-ray fluorescence spectrometer and judging whether the obtained concentration of the gold ions is less than a first preset concentration or not, and when the obtained concentration of the gold ions is less than the first preset concentration, the controller controls the gold salt adding machine to add the gold salt into the composite plating tank, continuously obtains the concentration of the gold ions in the tank liquor detected by the X-ray fluorescence spectrometer, and controls the gold salt adding machine to stop adding the gold salt when the obtained concentration of the gold ions is greater than or equal to a first preset concentration and less than or equal to a second preset concentration, wherein the second preset concentration is greater than the first preset concentration.
Compared with the prior art, the online bath solution regulating and controlling device can automatically control the gold salt adding machine to add the gold salt when the concentration of the gold ions in the bath solution does not meet the requirement, so that the concentration of the gold ions in the bath solution is in a reasonable concentration range, the thickness of a formed pre-plating layer or a formed plating layer is ensured, the yield is improved, and the use amount of the gold salts is reduced.
Drawings
Fig. 1 is a schematic diagram of an internal structure of an on-line control device for a bath solution applied to a composite plating tank according to a preferred embodiment of the present invention.
FIG. 2 is a schematic structural diagram of a detection unit of the online bath solution regulation and control device shown in FIG. 1.
Fig. 3 is a schematic structural view of a containing tank of the tank liquid online control device shown in fig. 1.
FIG. 4 is a schematic view of the external structure of the on-line tank liquid regulating device shown in FIG. 1.
Description of the symbols
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
Referring to fig. 1, a preferred embodiment of the present invention provides an online tank liquid control device 100. The bath solution on-line regulating device 100 is applied to a composite plating tank 200. The hybrid plating tank 200 at least includes a pre-gold plating tank 201 and a gold plating tank 202. The bath solution online regulation and control device 100 is respectively connected with the pre-gold-plating bath 201 and the gold-plating bath 202. The gold pre-plating bath 201 and the gold plating bath 202 contain bath solutions, which are respectively used for forming a pre-plating layer and a plating layer on the surface of an electronic component (not shown) during use. The bath solution online regulation and control device 100 is used for detecting and regulating bath solutions in the pre-gold-electroplating bath 201 and the gold-electroplating bath 202.
A gold salt adding machine 203 is arranged above the pre-gold-plating tank 201 and the gold-plating tank 202, and the gold salt adding machine 203 is respectively used for adding gold salt into the pre-gold-plating tank 201 and the gold-plating tank 202, so as to improve the concentration of gold ions in the tank solution. In this embodiment, the gold pre-plating tank 201 and the gold plating tank 202 are further provided with a heating unit 204, respectively, and the heating unit 204 is used for heating the bath solution so as to increase the temperature of the bath solution. The heating unit 204 may be a heat pump, a heating rod, or a heating coil. In the present embodiment, the heating unit 204 is a heating coil, and is disposed at the bottom of the pre-gold plating bath 201 and the gold plating bath 202.
The tank liquid online regulation and control device 100 comprises a shell 10 and two online regulation and control units 11 arranged inside the shell 10. The online regulating and controlling units 11 are arranged side by side and are respectively used for detecting and regulating bath solutions of the pre-gold-plating bath 201 and the gold-plating bath 202. Each of the on-line control units 11 includes a driving pump 20, a filter 30, a detecting unit 40 and a container 50. The driving pump 20, the filter 30, the detecting unit 40, and the container 50 are connected in sequence.
The driving pump 20 is disposed between the filter 30 and the gold pre-plating tank 201 or the gold plating tank 202, and the driving pump 20 is used for driving the tank solution in the gold pre-plating tank 201 or the gold plating tank 202 to circulate in the filter 30, the detection unit 40, the storage tank 50, and the gold pre-plating tank 201 or the gold plating tank 202. In the present embodiment, the drive pump 20 is a peristaltic pump.
the filter 30 is used to filter impurities in the bath solution and to flow the filtered bath solution to the detection unit 40. In this embodiment, the filter 30 has a filter element pore size greater than 20 microns, making the filter 30 useful for filtering macroscopic impurities in the bath solution.
Referring to fig. 2, the detecting unit 40 includes a detecting tank 41, and a thermometer 42, a pH meter 43 and a reference electrode 44 disposed in the detecting tank 41. The top wall of the detection tank 41 defines a first inlet 410, a first opening 411, a second opening 412 and a third opening 413, and the sidewall of the detection tank 41 defines a first outlet 414. The first inlet 410 is connected to the filter 30, that is, the filtered bath solution flows into the detection tank 41 through the first inlet 410. The pH meter 43, the thermometer 42, and the reference electrode 44 are inserted into the first opening 411, the second opening 412, and the third opening 413, respectively, and extend into the detection tank 41. The thermometer 42 detects the temperature of the bath solution in the detection bath 41. The pH is used to provide a potential value based on the concentration of hydrogen ions in the bath solution in the detection bath 41. The reference electrode 44 is used to provide a standard zero potential. In the present embodiment, the detection chamber 41 is made of glass, and the thermometer 42 is a thermocouple.
Referring to fig. 3, the sidewall and the top wall of the accommodating cavity 50 are respectively provided with a second inlet 51 and a second outlet 52. The second inlet 51 is connected to the first outlet 414 of the detection tank 41, that is, the tank solution in the detection tank 41 can flow into the containing tank 50 through the first outlet 414 and the second inlet 51. The second outlet 52 is connected to the gold pre-plating tank 201 or the gold plating tank 202, that is, the tank solution in the containing tank 50 can flow back to the gold pre-plating tank 201 or the gold plating tank 202 through the second outlet 52. Since the tank liquid flows out from the second outlet 52 on the top wall, it is beneficial to remove air bubbles and prevent the air bubbles from accumulating in the accommodating tank 50. In this embodiment, the material of the accommodating groove 50 is quartz.
The online bath conditioning device 100 further comprises an X-ray fluorescence spectrometer (i.e., XRF spectrometer) 60 and a controller 70 disposed inside the housing 10.
The XRF spectrometer 60 can move back and forth between the two accommodating grooves 50 of the two on-line control units 11, so that the XRF spectrometer is opposite to one of the accommodating grooves 50 to be measured. The XRF spectrometer 60 is configured to continuously detect the concentration of gold ions in the bath solution in the holding tank 50. The XRF spectrometer 60 is configured to emit X-rays to the container 50, so that the bath solution generates fluorescence after being irradiated by the X-rays, and then detect the number of times of generation in a unit time to calculate the concentration of gold ions in the bath solution. Wherein the XRF spectrometer 60 detects the concentration of gold ions in the bath solution in real time or periodically (e.g., every 15 minutes). Since the material of the receiving cavity 50 is quartz, no interference is generated to the XRF spectrometer 60. The drive pump 20 is cycled off while the XRF spectrometer 60 is operating.
The controller 70 is electrically connected to the XRF spectrometer 60 and the gold salt adding machine 203, and the controller 70 is configured to obtain a concentration of gold ions in the bath solution currently detected by the XRF spectrometer 60, and determine whether the obtained concentration of gold ions is less than a first preset concentration. When the acquired concentration of the gold ions is judged to be less than the first preset concentration, the controller 70 controls the gold salt adding machine 203 to add the gold salts into the pre-gold-plating bath 201 or the gold-plating bath 202 to increase the concentration of the gold ions in the bath solution, and continues to acquire the concentration of the gold ions in the bath solution currently detected by the XRF spectrometer 60, and when the acquired concentration of the gold ions is greater than or equal to the first preset concentration and less than or equal to a second preset concentration, the controller 70 controls the gold salt adding machine 203 to stop adding the gold salts. And when the concentration of the gold ions is within the reasonable concentration range, the thickness of the obtained pre-electroplated layer or electroplated layer is an ideal value when the bath solution is used for electroplating. In this embodiment, the first predetermined concentration is 1000ppm, and the second predetermined concentration is 1100 ppm. The controller 70 is a Programmable Logic Controller (PLC) 70.
In this embodiment, after obtaining the concentration of the gold ions detected by the XRF spectrometer 60, the controller 70 further compares the concentration of the gold ions detected by the XRF spectrometer 60 with the concentration of the gold ions in the same bath solution detected by an inductively coupled plasma spectrometer (ICP spectrometer, not shown). Taking the concentration of the gold ions detected by the ICP spectrometer as an X axis and the concentration of the gold ions detected by the XRF spectrometer 60 as a Y axis, performing linear fitting of the concentrations to obtain the following standard characteristic equation:
Y=aX+b,0<R≦1
Where X represents the concentration of gold ions detected by the ICP spectrometer, Y represents the concentration of gold ions detected by the XRF spectrometer 60, and R2 represents the fitting coefficient, i.e., the accuracy of the standard feature equation. The error detected by the XRF spectrometer 60 can be corrected by substituting the parameters a (slope) and b (intercept) of the standard feature equation into a calibration procedure built into the XRF spectrometer 60.
The controller 70 is also electrically connected to the heating unit 204. The controller 70 is further configured to obtain the temperature of the bath solution currently detected by the thermometer 42, and determine whether the obtained temperature is less than a first preset temperature. When the acquired temperature value is lower than the first preset concentration, the controller 70 controls the heating unit 204 to heat to increase the temperature of the bath solution, and continues to acquire the temperature of the bath solution currently detected by the thermometer 42, and when the acquired temperature value is greater than or equal to the first preset temperature and less than or equal to a second preset temperature, the controller 70 controls the heating unit 204 to stop heating. Wherein the second preset temperature is greater than the first preset temperature, and the first preset temperature and the second preset temperature reflect a reasonable temperature range of the bath solution. In this embodiment, the first preset temperature is 60 ℃ and the second preset temperature is 65 ℃.
More specifically, the controller 70 is further configured to obtain a potential value provided by the pH meter 43 and a standard potential value provided by the reference electrode 44, so as to calculate a pH value of the bath solution, and control the heating unit 204 to heat in combination with the pH value of the bath solution. Of course, in another embodiment, the pH meter 43 and the reference electrode 44 can be integrated into a pH detector.
Referring to fig. 4, in this embodiment, the online tank liquid regulation and control device 100 further includes a touch screen 80 disposed on the housing 10, where the touch screen 80 is used for a user to input the first preset concentration, the second preset concentration, the first preset temperature, and the second preset temperature, so that the user can manually set the reasonable concentration range and the reasonable temperature range.
In this embodiment, the online tank liquid control device 100 further includes a plurality of indicator lights 90 disposed on the housing 10, and the indicator lights 90 are respectively configured to emit light beams with different colors to emit different reminding signals. For example, the plurality of indicator lights 90 are respectively a first color indicator light 91 (e.g., a green light), a second color indicator light 92 (e.g., a red light), a third color indicator light 93 (e.g., a blue light), and a fourth color indicator light 94 (e.g., a yellow light), and the first color indicator light 91, the second color indicator light 92, the third color indicator light 93, and the fourth color indicator light 94 are all electrically connected to the controller 70. The controller 70 is configured to control the first color indicator lamp 91 to emit a first color when the online bath solution control device 100 is in normal operation, control the second color indicator lamp 92 to emit a second color when the controller 70 does not obtain the concentration of the gold ions detected by the XRF spectrometer 60 after a predetermined time period (e.g., 16min), control the third color indicator lamp 93 to emit a third color when the concentration of the gold ions obtained by the controller 70 is lower than the first predetermined concentration, and control the fourth color indicator lamp 94 to emit a fourth color when the gold salt is being added by the gold salt adding machine 203.
In other embodiments, the number of the online control unit 11 can be further increased, for example, to six, so that the online control device 100 can simultaneously detect and control the bath solutions of six pre-gold-plating baths 201 and/or gold-plating baths 202.
The bath solution online regulation and control device 100 can automatically control the gold salt adding machine 203 to add the gold salt when the concentration of the gold ions in the bath solution does not meet the requirement, so that the concentration of the gold ions in the bath solution is in a reasonable concentration range, the thickness of a formed pre-plating layer or a formed plating layer is ensured, the yield is improved, and the use amount of the gold salts is reduced.
It is understood that various other changes and modifications may be made by those skilled in the art based on the technical idea of the present invention, and all such changes and modifications should fall within the protective scope of the claims of the present invention.

Claims (11)

1. An online bath solution regulating device, which is used for detecting and regulating bath solution in a composite plating bath, wherein a gold salt adding machine is arranged above the composite plating bath, and is characterized in that the online bath solution regulating device comprises an online regulating unit, an X-ray fluorescence spectrometer and a controller, the online regulating unit comprises a driving pump and a containing groove, the driving pump is used for driving the bath solution in the composite plating bath to circularly flow in the containing groove and the composite plating bath, the X-ray fluorescence spectrometer is used for continuously detecting the concentration of gold ions in the bath solution in the containing groove, the controller is used for obtaining the concentration of the gold ions in the bath solution currently detected by the X-ray fluorescence spectrometer and judging whether the obtained concentration of the gold ions is less than a first preset concentration or not, and when the obtained concentration of the gold ions is less than the first preset concentration, the controller controls the gold salt adding machine to add the gold salt into the composite plating tank, continuously obtains the concentration of the gold ions in the tank liquor detected by the X-ray fluorescence spectrometer, and controls the gold salt adding machine to stop adding the gold salt when the obtained concentration of the gold ions is greater than or equal to a first preset concentration and less than or equal to a second preset concentration, wherein the second preset concentration is greater than the first preset concentration.
2. The online bath solution regulating and controlling device as claimed in claim 1, wherein the controller further obtains a concentration of gold ions in the bath solution detected by an inductively coupled plasma spectrometer, and corrects the X-ray fluorescence spectrometer according to detection results of the X-ray fluorescence spectrometer and the inductively coupled plasma spectrometer.
3. The on-line regulation and control device for bath solution according to claim 1, wherein the composite plating bath comprises a pre-gold-plating bath and a gold-plating bath, a gold salt adding machine is disposed above the pre-gold-plating bath and the gold-plating bath, the number of the on-line regulation and control units is two and is respectively connected with the pre-gold-plating bath and the gold-plating bath, the driving pump is disposed between the detection unit and the pre-gold-plating bath or the gold-plating bath, and the driving pump is used for driving the bath solution in the composite plating bath to circularly flow in the containing tank and the pre-gold-plating bath or the gold-plating bath.
4. The on-line tank liquid regulating device according to claim 3, wherein the X-ray fluorescence spectrometer reciprocates between the receiving tanks of the two on-line regulating units so as to be opposite to one receiving tank to be measured, and the driving pump stops circulating when the X-ray fluorescence spectrometer is operated.
5. A bath solution on-line regulating device according to claim 3, wherein said pre-gold-plating bath and said gold-plating bath are further provided with a heating unit for heating said bath solution, respectively, each on-line regulating unit further comprises a detection unit disposed between said driving pump and said containing tank, said driving pump being adapted to drive the bath solution in said gold-plating bath to circulate in said detection unit, said containing tank, and said pre-gold-plating bath or said gold-plating bath, said detection unit comprising a detection tank and a thermometer disposed in said detection tank, said filtered bath solution flowing into said detection tank, said thermometer being adapted to detect the temperature of said bath solution in said detection tank, said controller being further adapted to obtain the temperature of said bath solution currently detected by said thermometer, and judging whether the obtained temperature is less than a first preset temperature, controlling the heating unit to heat to improve the temperature of the bath solution by the controller when the obtained temperature value is lower than the first preset concentration, continuously obtaining the temperature of the bath solution currently detected by the thermometer, and controlling the heating unit to stop heating by the controller when the obtained temperature concentration is greater than or equal to the first preset temperature and less than or equal to a second preset temperature, wherein the second preset temperature is greater than the first preset temperature.
6. The on-line regulating device for tank liquid according to claim 5, wherein said detecting unit further comprises a pH meter and a reference electrode disposed in said detecting tank, said pH value is used for providing a potential value according to the concentration of hydrogen ions in said tank liquid in said detecting tank, said reference electrode is used for providing a standard zero potential, said controller is further used for calculating the pH value of said tank liquid according to the potential value provided by said pH meter and the standard potential value provided by said reference electrode, and controlling said heating unit to heat in combination with the pH value of said tank liquid.
7. An on-line regulation device for bath solution according to claim 5, wherein each on-line regulation unit further comprises a filter disposed between the driving pump and the detection unit, the driving pump is used for driving the bath solution in the pre-gold-plating bath or the gold-plating bath to circulate in the filter, the detection unit, the containing tank, and the pre-gold-plating bath or the gold-plating bath, and the filter is used for filtering impurities in the bath solution and flowing the filtered bath solution to the detection unit.
8. The online bath solution regulating device according to claim 1 or 5, further comprising a touch screen for a user to input the first preset concentration, the second preset concentration, the first preset temperature or the second preset temperature.
9. The on-line regulating device for bath solution according to claim 3, wherein an outlet is formed on the top wall of said containing tank, said outlet being connected to said pre-gold-plating tank or said gold-plating tank, so that the bath solution in said containing tank flows back to said pre-gold-plating tank or said gold-plating tank through said outlet.
10. The on-line tank liquid regulating device as claimed in claim 1, wherein the material of the containing tank is quartz.
11. The online bath solution control device according to claim 1, wherein the online bath solution control device further comprises a first color indicator, a second color indicator, a third color indicator, and a fourth color indicator, the controller is configured to control the first color indicator to emit a first color when the online bath solution control device is operating normally, control the second color indicator to emit a second color when the controller still does not obtain the concentration of gold ions detected by the X-ray fluorescence spectrometer after a predetermined period of time, control the third color indicator to emit a third color when the concentration of gold ions obtained by the controller is lower than the first predetermined concentration, and control the fourth color indicator to emit a fourth color when the gold salt adding machine is adding gold salt.
CN201810523169.3A 2018-05-28 2018-05-28 Tank liquor on-line regulating and controlling device Pending CN110541182A (en)

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CN201810523169.3A CN110541182A (en) 2018-05-28 2018-05-28 Tank liquor on-line regulating and controlling device

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Application Number Priority Date Filing Date Title
CN201810523169.3A CN110541182A (en) 2018-05-28 2018-05-28 Tank liquor on-line regulating and controlling device

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CN111487271A (en) * 2020-05-21 2020-08-04 上海朴维自控科技有限公司 Online XRF analytic system of gilding bath solution
CN114540884A (en) * 2022-02-23 2022-05-27 云锡文山锌铟冶炼有限公司 System, method and application for controlling temperature of electrodeposited liquid and purifying acid mist in hydrometallurgy

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Publication number Priority date Publication date Assignee Title
CN111487271A (en) * 2020-05-21 2020-08-04 上海朴维自控科技有限公司 Online XRF analytic system of gilding bath solution
CN114540884A (en) * 2022-02-23 2022-05-27 云锡文山锌铟冶炼有限公司 System, method and application for controlling temperature of electrodeposited liquid and purifying acid mist in hydrometallurgy
CN114540884B (en) * 2022-02-23 2023-05-30 云锡文山锌铟冶炼有限公司 Electro-deposition liquid temperature regulation and acid mist purification system, method and application in hydrometallurgy

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