CN110535021A - It is a kind of to be directed toward constant wavelength broad tuning deep ultraviolet laser system - Google Patents
It is a kind of to be directed toward constant wavelength broad tuning deep ultraviolet laser system Download PDFInfo
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- CN110535021A CN110535021A CN201810509336.9A CN201810509336A CN110535021A CN 110535021 A CN110535021 A CN 110535021A CN 201810509336 A CN201810509336 A CN 201810509336A CN 110535021 A CN110535021 A CN 110535021A
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- ultraviolet laser
- deep ultraviolet
- laser
- frequency
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
Abstract
The present invention relates to all-solid-state deep ultraviolet laser field, discloses and a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system, comprising: basic frequency laser source, ultraviolet lasing system, deep ultraviolet laser emission system, vacuum system and control device；Ultraviolet lasing system includes: the first frequency multiplication angle demodulator and the first frequency multiplier for being arranged on the first frequency multiplication angle demodulator；Deep ultraviolet laser emission system includes: the second frequency multiplication angle demodulator and the second frequency multiplier for being arranged on the second frequency multiplication angle demodulator.It is provided by the invention it is a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system, can guarantee different wave length deep ultraviolet output laser alignment it is accurate, have repeat tuning deep ultraviolet laser wavelength when, the constant characteristic of laser alignment.
Description
Technical field
The present invention relates to all-solid-state deep ultraviolet laser technical fields, are directed toward constant wavelength broad tuning more particularly to a kind of
Deep ultraviolet laser system.
Background technique
Deep ultraviolet light source refers generally to electromagnetic radiation wave band of the wavelength between 40nm to 200nm, due to its wavelength is short,
Photon energy is high, thus in numerous areas such as high-resolution imaging, spectrum of use, microfabrication and laser lithographies with important
Application value, be one of most important developing direction of laser field.Currently employed nonlinear crystal converter technique, can produce height
Beam quality, short pulse, narrow linewidth deep ultraviolet laser.But since deep ultraviolet band is the invisible wave band of human eye, it has not been convenient to optical path
It adjusts, current optical path adjusting means depend on to be adjusted repeatedly manually.
Summary of the invention
(1) technical problems to be solved
The purpose of the present invention is to solve deep ultraviolet laser human eye in the prior art is invisible, needing to manually adjust causes
The inaccurate technical problem of direction, provide and a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system.
(2) technical solution
Constant wavelength broad tuning deep ultraviolet laser system is directed toward in order to solve the above technical problem, the present invention provides a kind of
System, comprising: basic frequency laser source, ultraviolet lasing system, deep ultraviolet laser emission system, vacuum system and control device；
The ultraviolet lasing system includes: that ultraviolet laser generates unit, and it includes: the first frequency multiplication angle that the ultraviolet laser, which generates unit,
Degree adjuster and the first frequency multiplier being arranged on the first frequency multiplication angle demodulator；The deep ultraviolet laser emission system
It include: that deep ultraviolet laser generates unit, it includes: the second frequency multiplication angle demodulator and setting that the deep ultraviolet laser, which generates unit,
The second frequency multiplier on the second frequency multiplication angle demodulator；The vacuum system is equipped with the ultraviolet laser input through inner cavity
Window and deep ultraviolet laser output window, the deep ultraviolet laser emission system are arranged in the inner cavity of the vacuum system；Institute
It states basic frequency laser source transmitting fundamental light wave and is converted to ultraviolet light to first frequency multiplier and by first frequency multiplier reception
Wave；The first frequency multiplier emitting ultraviolet light wave, and entered in the vacuum system by ultraviolet laser input window, by described
The reception of second frequency multiplier is converted to deep ultraviolet light wave, and the deep ultraviolet light wave is exported by the deep ultraviolet laser output window；
Wherein, the first frequency multiplication angle demodulator and the second frequency multiplication angle demodulator are electrically connected with the control device respectively；It is described
Control device controls the first frequency multiplication angle demodulator rotation, so that the ultraviolet light wave of the first frequency multiplier transmitting is directed at the purple
Outer laser input window；The control device controls the second frequency multiplication angle demodulator rotation, so that the second frequency multiplier emits
Deep ultraviolet light wave be directed at deep ultraviolet laser output window output.
Further, first frequency multiplier is bbo crystal；Second frequency multiplier is KBBF crystal.
Further, the fundamental light wave of the basic frequency laser source transmitting 750-820nm wavelength.
Further, the ultraviolet lasing system further include: ultraviolet laser transmits unit, the ultraviolet laser transmission
Unit includes: the first motorized adjustment mirror holder；The first motorized adjustment mirror holder is respectively equipped with ultraviolet laser high reflective mirror piece, and being used for will
The ultraviolet light wave of the first frequency multiplier transmitting reflexes in the ultraviolet laser input window；The control device and described the
The electrical connection of one motorized adjustment mirror holder makes the described ultraviolet of reflection for controlling to adjust the angle of the first motorized adjustment mirror holder
Light wave is directed at the ultraviolet laser input window.
Further, the deep ultraviolet laser emission system further include: deep ultraviolet laser transmission unit, the deep ultraviolet swash
Optical transmission unit includes: the second motorized adjustment mirror holder；The second motorized adjustment mirror holder is equipped with deep ultraviolet laser high reflective mirror piece,
Deep ultraviolet light wave reflection for emitting second frequency multiplier is to the deep ultraviolet laser output window；The control device
It is electrically connected with the second motorized adjustment mirror holder, for controlling to adjust the angle of the second motorized adjustment mirror holder, makes reflection
The deep ultraviolet light wave is directed at the deep ultraviolet laser output window.
Further, the deep ultraviolet laser transmission unit further include: lens；The lens setting is electronic described second
It adjusts between mirror holder and the deep ultraviolet laser output window, for collimating deep ultraviolet light wave.
Further, the ultraviolet laser input window and the ultraviolet laser, which generate, is equipped with the spy of the first photoelectricity between unit
Device is surveyed, the second photodetector is equipped between the deep ultraviolet laser transmission unit and the deep ultraviolet laser output window.
Further, the first frequency multiplication angle demodulator, the second frequency multiplication angle demodulator, the first motorized adjustment mirror holder with
And second motorized adjustment mirror holder be respectively closed loop feedback Electronic control.
Further, at the ultraviolet lasing system under vacuum conditions.
Further, the interior intracavitary nitrogen full of 99.9% or more purity of the vacuum system.
Further, the watch window through inner cavity is additionally provided in the vacuum system.
Further, the ultraviolet light output window through inner cavity is additionally provided in the vacuum system.
(3) beneficial effect
It is provided by the invention it is a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system, by setting ultraviolet laser it is defeated
Enter window and deep ultraviolet laser output window is directed toward the outbound course of deep ultraviolet light, while different wave length is controlled by control device
The angle of lower second frequency multiplication angle demodulator is guaranteed under different wave length with accurately controlling the matched angle of the second frequency multiplier, dark purple
The repeatability that the generation and transmission of outer laser are directed toward has to guarantee that the deep ultraviolet output laser alignment of different wave length is accurate
When repeating tuning deep ultraviolet laser wavelength, the constant characteristic of laser alignment.
Detailed description of the invention
Fig. 1 is a kind of overall schematic for being directed toward constant wavelength broad tuning deep ultraviolet laser system of the invention；
Fig. 2 is the structural schematic diagram of uv generation unit in Fig. 1；
Fig. 3 is the structural schematic diagram of vacuum system in Fig. 1；
Fig. 4 is the structural schematic diagram that deep ultraviolet light generates unit in Fig. 1；
Fig. 5 is the structural schematic diagram of deep ultraviolet light transmission unit in Fig. 1.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Following instance
For illustrating the present invention, but it is not intended to limit the scope of the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Fig. 1 gives a kind of structural schematic diagram for being directed toward constant wavelength broad tuning deep ultraviolet laser system of the invention；
Fig. 2 is the structural schematic diagram of uv generation unit in Fig. 1；Fig. 3 is the structural schematic diagram of vacuum system in Fig. 1；Fig. 4 is Fig. 1
Middle deep ultraviolet light generates the structural schematic diagram of unit；Fig. 5 is the structural schematic diagram of deep ultraviolet light transmission unit in Fig. 1.Such as Fig. 1-5
Shown, a kind of of the embodiment of the present invention is directed toward constant wavelength broad tuning deep ultraviolet laser system, comprising: basic frequency laser source 5, purple
Outer laser transmitting system 1, deep ultraviolet laser emission system 2, vacuum system 3 and control device 4；The ultraviolet lasing system
System 1 includes: that ultraviolet laser generates unit 11, the ultraviolet laser generate unit 11 include: the first frequency multiplication angle demodulator 112 with
And the first frequency multiplier 111 on the first frequency multiplication angle demodulator 112 is set；The deep ultraviolet laser emission system 2 is wrapped
Include: deep ultraviolet laser generates unit 21, the deep ultraviolet laser generate unit 21 include: the second frequency multiplication angle demodulator 212 with
And the second frequency multiplier 211 on the second frequency multiplication angle demodulator 212 is set；The vacuum system 3, which is equipped with, penetrates inner cavity
Ultraviolet laser input window 31 and deep ultraviolet laser output window 32, the deep ultraviolet laser emission system 2 is arranged described
In the inner cavity of vacuum system 3；The basic frequency laser source 5 emits fundamental light wave to first frequency multiplier 111 and by described first
The reception of frequency multiplier 111 is converted to ultraviolet light wave；First frequency multiplier, the 111 emitting ultraviolet light wave, and inputted by ultraviolet laser
Window 31 enters in the vacuum system 3, is converted to deep ultraviolet light wave, the deep ultraviolet by second frequency multiplier 211 reception
Light wave is exported by the deep ultraviolet laser output window 32；Wherein, the first frequency multiplication angle demodulator 112 and the second frequency multiplication
Angle demodulator 212 is electrically connected with the control device 4 respectively；The control device 4 controls the first frequency multiplication angular adjustment
Device 112 rotates, so that the ultraviolet light wave of the first frequency multiplier 111 transmitting is directed at the ultraviolet laser input window 31；The control
Device 4 controls the rotation of the second frequency multiplication angle demodulator 212, so that the deep ultraviolet light wave of the second frequency multiplier 211 transmitting is aligned
The deep ultraviolet laser output window 32 exports.
Specifically, the wavelength for the fundamental light wave that basic frequency laser source 5 generally emits is within the scope of 750-820nm.
First frequency multiplier 111 is bbo crystal, and settable multiple bbo crystals are cut as shown in Fig. 2, the present embodiment is arranged two pieces
The completely the same bbo crystal of chamfer degree is respectively placed on two the first frequency multiplication angle demodulators 112.First frequency multiplication angle tune
Saving device 112 can be closed loop electric rotary table structure, but not limited to this.Encoder control program is set in control device 4, and setting is different
The angle of first frequency multiplication angle demodulator 112 under wavelength accurately controls the matched angle of bbo crystal, guarantees under different wave length,
The repeatability that the generation and transmission of ultraviolet laser are directed toward.Ultraviolet laser generates the fundamental frequency light that unit 11 emits basic frequency laser source 5
Wave is converted to ultraviolet light wave, to launch outward ultraviolet light wave.
Second frequency multiplier 211 is KBBF crystal, is placed on the second frequency multiplication angle demodulator 212.Second frequency multiplication angle tune
Saving device 212 can be two-dimentional modulator, including the regulation of y, θ direction two-dimension high-precision, control accuracy are higher than 0.1mm, High Precision One Dimensional
Rotation is adjusted, and degree of regulation is higher than 0.1 °, but not limited to this.Similarly, encoder control program is set in control device 4, sets
The angle of the second frequency multiplication angle demodulator 212, accurately controls the angle of KBBF crystal match under different wave length, guarantees different waves
Under length, the generation of ultraviolet laser and the repeatability of transmission direction.Deep ultraviolet laser generates unit 21 for ultraviolet lasing system 1
The ultraviolet light wave of transmitting is converted to the deep ultraviolet light wave of wavelength broad tuning, to launch outward deep ultraviolet light wave.
Vacuum system 3 is the cavity of sealing, and inner cavity is vacuum environment, and the nitrogen of 99.9% or more purity can be full of in inner cavity
Gas feed 35 and gas vent 36, the gas being convenient for changing in inner cavity can be also arranged in gas in vacuum system 3.Ultraviolet laser
Input window 31 and deep ultraviolet laser output window 32 are both transparent for light wave, and the ultraviolet light wave of the first frequency multiplier 111 transmitting is by purple
Outer laser input window 31 is through entering in the inner cavity of vacuum system 3, and the deep ultraviolet light wave of the second frequency multiplier 211 transmitting is by dark purple
Outer laser output window 31 is penetrated and is issued from the inner cavity of vacuum system 3.The observation window through inner cavity is additionally provided in vacuum system 3
Mouth 34, facilitates observation.The also settable ultraviolet light output window 33 through inner cavity, exportable part ultraviolet light in vacuum system 3
Wave.
It is provided by the invention it is a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system, by setting ultraviolet laser it is defeated
Enter window 31 and deep ultraviolet laser output window 32 is directed toward the outbound course of deep ultraviolet light, while not by the control of control device 4
The angle of second frequency multiplication angle demodulator 212 under co-wavelength is guaranteed not with accurately controlling the matched angle of the second frequency multiplier 211
Under co-wavelength, the repeatability that the generation and transmission of deep ultraviolet laser are directed toward, to guarantee the deep ultraviolet output laser of different wave length
It is directed toward precisely, when there is repetition tuning deep ultraviolet laser wavelength, the constant characteristic of laser alignment.
Based on the above embodiment, as a kind of preferred embodiment, with reference to Fig. 1, the ultraviolet lasing system 1 is also wrapped
Include: ultraviolet laser transmits unit 12, and the ultraviolet laser transmission unit 12 includes: the first motorized adjustment mirror holder 121；Described first
Motorized adjustment mirror holder 121 is equipped with ultraviolet laser high reflective mirror piece, the ultraviolet light wave reflection for emitting first frequency multiplier 111
In to the ultraviolet laser input window 31；The control device 4 is electrically connected with the first motorized adjustment mirror holder 121, is used for
The angle for controlling to adjust the first motorized adjustment mirror holder 121 makes the ultraviolet light wave of reflection be directed at the ultraviolet laser defeated
Enter window 31.
The angle that the first motorized adjustment mirror holder 121 is controlled by control device 4 can facilitate the first frequency multiplier 111 to emit
Ultraviolet light wave is accurately transmitted to ultraviolet laser input window 31, can be improved the design flexibility of equipment.Similarly, in fundamental frequency
Settable high reflective mirror piece between laser source 5 and the first frequency multiplier 111, for reflecting the fundamental light wave of the sending of basic frequency laser source 5.
Based on the above embodiment, as a kind of preferred embodiment, with reference to Fig. 5, the deep ultraviolet laser emission system 2 is also wrapped
Include: deep ultraviolet laser transmission unit 22, the deep ultraviolet laser transmission unit 22 include: the second motorized adjustment mirror holder 221；It is described
Second motorized adjustment mirror holder 221 is equipped with deep ultraviolet laser high reflective mirror piece, dark purple for emitting second frequency multiplier 211
Outer light wave reflection is to the deep ultraviolet laser output window 32；The control device 4 and 221 electricity of the second motorized adjustment mirror holder
Connection makes described in the deep ultraviolet light wave alignment of reflection for controlling to adjust the angle of the second motorized adjustment mirror holder 221
Deep ultraviolet laser output window 32.
Second motorized adjustment mirror holder 221 controls angle by control device 4, the depth that the second frequency multiplier 211 can be facilitated to emit
Ultraviolet light wave is accurately transmitted to deep ultraviolet laser output window 32, can be improved the design flexibility of equipment.Swash in deep ultraviolet
Light generates settable multiple second motorized adjustment mirror holders 221 between unit 21 and deep ultraviolet laser output window 32, and quantity is unlimited,
As shown in figure 4, the deep ultraviolet laser high reflective mirror piece of the present embodiment is 45 ° of high reflection mirrors of deep ultraviolet, it is mounted on the second motorized adjustment
On mirror holder 221, three the second motorized adjustment mirror holders 221, the deep ultraviolet light wave that the second frequency multiplier 211 is emitted is arranged in the present embodiment
By triple reflection, deep ultraviolet laser output window 32 is reached.Further, in the second motorized adjustment mirror holder 221 and deep ultraviolet
Settable lens between laser output window 32, the deep ultraviolet light wave of collimated reflected.Lens may be provided to be passed along deep ultraviolet laser
After second second motorized adjustment mirror holder 221 in defeated direction；May also be arranged on third the second motorized adjustment mirror holder 221 it
Afterwards.
It should be noted that the first frequency multiplication angle demodulator 112, the second frequency multiplication angle demodulator 212, the first motorized adjustment mirror
Frame 121 and the second motorized adjustment mirror holder 221 are respectively closed loop feedback Electronic control.Ultraviolet lasing system 1 can also be in
It works under vacuum environment.
It based on the above embodiment,, can also be high in two neighboring deep ultraviolet laser with reference to Fig. 5 as a kind of preferred embodiment
Glass bubbles diaphragm 222 is set between anti-eyeglass, there is circular aperture among glass bubbles diaphragm 222, hole diameter be 0.5m~
10mm can make deep ultraviolet laser generate fluorescence on glass bubbles diaphragm 222, adjust deep ultraviolet laser, keep it small by glass
The late center of hole light 222 guarantees deep ultraviolet laser by being pre-designed optic path.Wherein the quantity of glass bubbles diaphragm 222 is unlimited,
Quantity in the present embodiment is 4, can also be other quantity.Movement can be also set between two deep ultraviolet laser high reflective mirror pieces
Glass 223 adjusts deep ultraviolet laser optical path, quantity is unlimited, and the present embodiment moves for observing the fluorescence of deep ultraviolet laser generation
Dynamic glass 223 is 1.Glass bubbles diaphragm 222 and movable glass 223 are in deep ultraviolet band there is fluorescence to generate energy dead-wood
Material, such as quartz.
Specifically, it can also be generated in ultraviolet laser input window 31 and ultraviolet laser and be equipped with the spy of the first photoelectricity between unit 11
Device 6 is surveyed, the second photodetector 7 is equipped between deep ultraviolet laser transmission unit 22 and deep ultraviolet laser output window 32.
It is provided by the present invention to be directed toward constant wavelength broad tuning deep ultraviolet laser system, its working principle is that: using closing
The high repeatable accuracy of ring electric device, determine deep ultraviolet broad tuning laser difference output wavelength under electric device position, from
And guarantee that the deep ultraviolet output laser alignment of different wave length is accurate, and when there is repetition tuning deep ultraviolet laser wavelength, laser alignment
Constant characteristic.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (12)
1. a kind of be directed toward constant wavelength broad tuning deep ultraviolet laser system characterized by comprising basic frequency laser source, ultraviolet
Laser transmitting system, deep ultraviolet laser emission system, vacuum system and control device；
The ultraviolet lasing system includes: that ultraviolet laser generates unit, and it includes: first times that the ultraviolet laser, which generates unit,
Frequency angle demodulator and the first frequency multiplier being arranged on the first frequency multiplication angle demodulator；
The deep ultraviolet laser emission system includes: that deep ultraviolet laser generates unit, and the deep ultraviolet laser generates unit and includes:
Second frequency multiplication angle demodulator and the second frequency multiplier being arranged on the second frequency multiplication angle demodulator；
The vacuum system is equipped with ultraviolet laser input window and deep ultraviolet laser output window through inner cavity, the deep ultraviolet
Laser transmitting system is arranged in the inner cavity of the vacuum system；
The basic frequency laser source emits fundamental light wave and is converted to purple to first frequency multiplier and by first frequency multiplier reception
Outer light wave；The first frequency multiplier emitting ultraviolet light wave, and entered in the vacuum system by ultraviolet laser input window, by
The second frequency multiplier reception is converted to deep ultraviolet light wave, and the deep ultraviolet light wave is defeated by the deep ultraviolet laser output window
Out；
Wherein, the first frequency multiplication angle demodulator and the second frequency multiplication angle demodulator are electrically connected with the control device respectively；
The control device controls the first frequency multiplication angle demodulator rotation, so that the ultraviolet light wave of the first frequency multiplier transmitting is directed at institute
State ultraviolet laser input window；The control device controls the second frequency multiplication angle demodulator rotation, so that the second frequency multiplier
The deep ultraviolet light wave of transmitting is directed at the deep ultraviolet laser output window output.
2. being directed toward constant wavelength broad tuning deep ultraviolet laser system as described in claim 1, which is characterized in that described first
Frequency multiplier is bbo crystal；Second frequency multiplier is KBBF crystal.
3. being directed toward constant wavelength broad tuning deep ultraviolet laser system as described in claim 1, which is characterized in that the fundamental frequency
The fundamental light wave of laser source transmitting 750-820nm wavelength.
4. being directed toward constant wavelength broad tuning deep ultraviolet laser system as described in claim 1, which is characterized in that described ultraviolet
Laser transmitting system further include: ultraviolet laser transmits unit, and the ultraviolet laser transmission unit includes: the first motorized adjustment mirror
Frame；The first motorized adjustment mirror holder is equipped with ultraviolet laser high reflective mirror piece, the ultraviolet light for emitting first frequency multiplier
In wave reflection to the ultraviolet laser input window；
The control device is electrically connected with the first motorized adjustment mirror holder, for controlling to adjust the first motorized adjustment mirror holder
Angle, so that the ultraviolet light wave of reflection is directed at the ultraviolet laser input window.
5. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claimed in claim 4, which is characterized in that described dark purple
Outer laser transmitting system further include: deep ultraviolet laser transmission unit, the deep ultraviolet laser transmission unit include: the second electric adjustable
Save mirror holder；The second motorized adjustment mirror holder is equipped with deep ultraviolet laser high reflective mirror piece, for emitting second frequency multiplier
Deep ultraviolet light wave reflection to the deep ultraviolet laser output window；
The control device is electrically connected with the second motorized adjustment mirror holder, for controlling to adjust the second motorized adjustment mirror holder
Angle, so that the deep ultraviolet light wave of reflection is directed at the deep ultraviolet laser output window.
6. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claimed in claim 5, which is characterized in that described dark purple
Outer laser transmission unit further include: lens；The lens are arranged in the second motorized adjustment mirror holder and the deep ultraviolet laser
Between output window, for collimating deep ultraviolet light wave.
7. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claimed in claim 5, which is characterized in that described ultraviolet
Laser input window and the ultraviolet laser generate and are equipped with the first photodetector between unit, and the deep ultraviolet laser transmission is single
It is first that the second photodetector is equipped between the deep ultraviolet laser output window.
8. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claimed in claim 5, which is characterized in that described first
Frequency multiplication angle demodulator, the second frequency multiplication angle demodulator, the first motorized adjustment mirror holder and the second motorized adjustment mirror holder are respectively
Closed loop feedback Electronic control.
9. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claim 1-8 is described in any item, which is characterized in that
At the ultraviolet lasing system under vacuum conditions.
10. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claim 1-8 is described in any item, feature exists
In the interior intracavitary nitrogen full of 99.9% or more purity of the vacuum system.
11. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claim 1-8 is described in any item, feature exists
In being additionally provided with the watch window through inner cavity in the vacuum system.
12. being directed toward constant wavelength broad tuning deep ultraviolet laser system as claim 1-8 is described in any item, feature exists
In being additionally provided with the ultraviolet light output window through inner cavity in the vacuum system.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810509336.9A CN110535021B (en) | 2018-05-24 | 2018-05-24 | Wavelength width tuning deep ultraviolet laser system with unchanged direction |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810509336.9A CN110535021B (en) | 2018-05-24 | 2018-05-24 | Wavelength width tuning deep ultraviolet laser system with unchanged direction |
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| CN110535021B CN110535021B (en) | 2021-02-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111106507A (en) * | 2019-11-25 | 2020-05-05 | 苏州英谷激光有限公司 | Laser directivity adjusting assembly, laser and laser light directivity adjusting method |
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| CN104064949A (en) * | 2014-05-30 | 2014-09-24 | 中国科学院理化技术研究所 | Generation and transmission device for deep ultraviolet laser |
| CN104104006A (en) * | 2013-04-02 | 2014-10-15 | 中国科学院理化技术研究所 | Device for generation of high-power vacuum ultraviolet laser by direct frequency multiplication and method thereof |
| CN105305214A (en) * | 2015-12-03 | 2016-02-03 | 哈尔滨工业大学 | Method for acquiring high repetition frequency and large energy ultraviolet tunable laser pulses |
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| JPH04318527A (en) * | 1991-04-17 | 1992-11-10 | Fuji Photo Film Co Ltd | Light wavelength converting device |
| US5260953A (en) * | 1992-09-08 | 1993-11-09 | Alcon Surgical, Inc. | Tunable solid-state laser |
| CN102324689A (en) * | 2011-08-25 | 2012-01-18 | 中国科学院理化技术研究所 | A kind of direct frequency multiplication produces the device of narrow linewidth deep ultraviolet laser |
| CN104104006A (en) * | 2013-04-02 | 2014-10-15 | 中国科学院理化技术研究所 | Device for generation of high-power vacuum ultraviolet laser by direct frequency multiplication and method thereof |
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| CN111106507A (en) * | 2019-11-25 | 2020-05-05 | 苏州英谷激光有限公司 | Laser directivity adjusting assembly, laser and laser light directivity adjusting method |
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| CN110535021B (en) | 2021-02-19 |
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