CN110534269A - Insulator and quartz boat - Google Patents
Insulator and quartz boat Download PDFInfo
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- CN110534269A CN110534269A CN201910899331.6A CN201910899331A CN110534269A CN 110534269 A CN110534269 A CN 110534269A CN 201910899331 A CN201910899331 A CN 201910899331A CN 110534269 A CN110534269 A CN 110534269A
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- outer barrel
- quartz
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B17/00—Insulators or insulating bodies characterised by their form
- H01B17/38—Fittings, e.g. caps; Fastenings therefor
- H01B17/40—Cementless fittings
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of insulator and quartz boats, and wherein insulator, the positioning and insulation between pole piece are powered on for quartz boat, comprising: insulator body has first end and the second end opposite with the first end；First positioning region respectively has one in first end and second end, so as to disengage first distance between first end and first end lateral electrode piece and between second end and second end lateral electrode piece；Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.Insulator according to the present invention can effectively reduce the influence of the inverted decreasing insulating problem because depositing carbon.
Description
Technical field
The present invention relates to a kind of insulators, and the invention further relates to a kind of quartz boats equipped with the insulator.
Background technique
As the great development of new material industry, such as graphene, gallium nitride, silicon carbide material are divided into application end ten
It is ripe, it can be applied to the fields such as display, laser projection, illumination, electrotechnical, electronic, aerospace and space flight, but raw material preparation cost is high
High become limits the major obstacles that its Rapid Popularization is applied, at present LPCVD(Low Pressure Chemical Vapor
Deposition, low-pressure chemical vapour deposition technique) it is a kind of higher production technology of production graphene efficiency, and product quality
It is higher.
It needs to use graphite boat during the LPCVD growth technique of graphene, by the radio frequency between graphite boat electrode
Electric discharge, the carbon in atmosphere is deposited on substrate, to obtain high-quality graphene film.Fig. 1 show a kind of quartz
Boat structure, there are multiple first electrode sheets 1 and multiple second electrode sheets 6 on quartz boat, first electrode sheet 1 and second electrode sheet 6
Between be parallel to each other and successively interval setting.The component for realizing interval is between adjacent second electrode plates 6 and first electrode sheet 1
Insulator 4, thus make between second electrode sheet 6 and first electrode sheet 1 keep to set a distance, to obtain desired electric-field strength
Degree.
Insulator mostly 4 is spacer structure used in known quartz boat, can be sleeved on fixed link 2 as shown in Figure 1,
There are six fixed links 2 in figure, first electrode sheet 1, the insulator 4 of spacer shape, second electrode sheet 6 are successively threaded through in fixed link 2,
The interval of insulator 4 based on spacer shape keeps adjacent second electrode sheet 6 and first electrode sheet 1 to set a distance.Insulator
On the opposite face of the second electrode sheet 6 or first electrode sheet 1 at end where 4 both ends are supported directly on.In LPCVD growth technique,
Since, there are carbon, these carbons, also can be in the insulation for electrode slice to be isolated while depositing on workpiece in atmosphere
Sub 4 surfaces deposition, after the carbon-coating being deposited on insulator 4 reaches certain thickness, insulator 4 loses insulating properties.Insulator 4
The critical period of conducting can generate electric spark because electrical conductance is poor (resistance is big) during this period, it is possible to will lead to electrode slice and be burnt
It ruins.And with the progressive additive of carbon-coating, the conduction property of insulator is more and more stronger, and the electric field strength between electrode slice is more and more weaker,
And the technique execution time of the LPCVD made substantially extends, and generates additional energy consumption.
Aiming at the problem that insulator 4 above-mentioned is connected because depositing carbon, effective solution is had no at present in the industry.Some
In realization, insulator 4 uses ceramic material, it is intended to by reducing the surface roughness of the insulator 4 of ceramic material, to reduce carbon
Deposition, but effect is extremely limited, and current ceramic material surfaces roughness can accomplish Ra0.4, then improves surface essence
The cost of degree is too big, therefore, is direct replacement insulator 4 in more selections, thus can generate very big later maintenance.
Summary of the invention
The purpose of the present invention is to provide one kind can effectively mitigate the insulation performance generated because depositing carbon on insulator
The insulator for gradually decreasing problem, the present invention also provides a kind of quartz boats for having the insulator.
In an embodiment of the present invention, a kind of insulator is provided, positioning and insulation between pole piece are powered on for quartz boat, is wrapped
It includes:
Insulator body has first end and the second end opposite with the first end；
First positioning region respectively has one in first end and second end, so that between first end and first end lateral electrode piece and second
First distance is disengaged between end and second end lateral electrode piece；
Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.
Optionally, the depth of the first slit is 4 ~ 15 times of first distance.
Optionally, first distance is not less than 0.8mm, and is positively correlated with electrode slice institute's on-load voltage；
First distance is not more than 3mm.
Optionally, the first positioning region be the first ring washer or be molded over insulator body end center with center via hole
Protrusion.
Optionally, insulator body includes
First structure: the insulator body for having the first structure includes an outer barrel and an interior bucket, interior bucket bucket bottom and outer barrel bucket bottom
It is provided with via hole；Be embedded into outer barrel by inlet of interior bucket bung hole end, and make interior bucket bung hole end and outer barrel bucket bottom there are second away from
From or directly engaged with outer barrel bucket bottom；There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface
First end end face is constituted, outer barrel bucket bottom lateral surface constitutes second end end face；
Second structure: the insulator body for having second structure includes one group of insulating trip of axial alignment, between adjacent insulating trip
Second distance is determined based on the second positioning region, and the second slit is determined by the second distance；Or
Third structure: the insulator body for having the third structure includes the identical staving of an enantiomorph, two staving bottom pairings；
Staving is multilayered structure, each interlayer coaxial line, and there are the 4th distances for adjacent interlayer.
Optionally, in first structure, a sleeve or positioning component are provided for the axially position between outer barrel and interior bucket；
If positioning component, which includes that a grade sleeve and one second ring washer, the diameter of second ring washer are big
In the diameter of secondary sleeve；There are also an adjustment gasket between the second ring washer and outer barrel bottom, the diameter of the adjustment gasket is less than the
The diameter of two ring washers；
Second distance is 0.5 ~ 2mm.
Optionally, the insulator body and first positioning region are quartz material.
In an embodiment of the present invention, a kind of quartz boat for having aforementioned dielectric is additionally provided, the insulator is used for
Quartz boat powers on the insulation between pole piece.
Optionally, the fixed link for powering on pole piece assembling for quartz boat is quartz rod, and the quantity of quartz rod is 3 ~ 6；
Correspondingly, the fixation hole of respective numbers is provided on electrode slice, quartz rod successively wears electrode slice by fixation hole, adjacent
The insulator is arranged on quartz rod between electrode slice.
Optionally, quartz rod one end is bolt head, and the other end is screw rod, quartzy nut is adapted to, for fastening.
, it should be understood that the air-flow for carrying carbon dust flows between electrode slice is formed by electric field in such as PLCVD growth technique
Dynamic, flowing of the carbon dust between electrode slice shows the advection state for being roughly parallel to electrode slice.It is whole relative to traditional insulator
Body is exposed to the situation in the air-flow for carrying carbon dust, and in an embodiment of the present invention, insulator body cooperates the first positioning region
For the setting and insulation of adjacent electrode distance between commutator segments, wherein the first positioning region is relatively small, thus the two of insulator body
End forms the first slit.On the one hand first slit in end side, is based on newton internal friction, in end side portion (i.e. side where electrode slice)
Air-flow velocity is relatively low, meanwhile, the first slit can generate bigger flow resistance, further reduced air-flow velocity or complete inhibition
Air-flow passes through.And machinery field predictably, when fit clearance is sufficiently small, or even being capable of complete barrier fluid
Pass through, the principle of this i.e. labyrinth seal.To sum up, based on boundary friction and slit to the inhibiting effect of air-flow velocity, so that carbon
Deposition of the element at the first slit can be effectively suppressed perhaps reduce thus at the first positioning region will not or longer
Time in will not deposit the carbon-coatings of enough conductings, significantly reduce the later maintenance burden of quartz boat.
Detailed description of the invention
Fig. 1 is a kind of known quartz boat structure schematic diagram.
Fig. 2 is a kind of known fit structure schematic diagram of electrode slice and insulator.
Fig. 3 is by being adapted to insulator structure schematic diagram in first embodiment.
Fig. 4 is by being adapted to insulator structure schematic diagram in second embodiment.
Fig. 5 is by being adapted to insulator structure schematic diagram in 3rd embodiment.
In figure: 1. first electrode sheets, 2. fixed links, 3. nuts, 4. insulators, 5. slots, 6. second electrode sheets, 7. supports
Block, 8. supporting blocks, 9. connecting rods, 10. stabilizer blades, 11. connecting rods, 12. interior buckets, 13. outer barrels, 14. first gaskets, 15. positioning sleeves,
16. the second gasket, 17 third gaskets, 18. insulating trips, 19. the 4th gaskets, 20 insulation sleeves.
Specific embodiment
Used insulator 4 is generally set type structure on quartz boat, as shown in Figure 1,7 electrode slices are (also known as electric in Fig. 1
Pole plate) what is be parallel to each other is an entirety, the insulator being sleeved in fixed link 2 by six 2 attaching nut 3 of fixed link assembly
4 for the insulation between adjacent electrode piece, and determines the distance between adjacent electrode plates by the axial length of insulator 4.
In general, the air-flow for carrying carbon dust is flowed through in a manner of advection the space between electrode plate.About newton
The boundary friction effect of internal friction is more proximate to based on the conventional experience of life it may also be appreciated that such as the water flow in river
Line, water velocity is faster, conversely, being more proximate to bank, water velocity is slower, and the boundary for being that riverbank generates avris water flow is rubbed
Stress effect is wiped, avris water flow generates internal friction to inside water flow, and so on, riverbank is to the damping of water flow with one apart from negative
It closes, the water flow distance on the distance, that is, riverbank and specified region.Similarly, electrode slice also complies in newton the damping of air-flow and rubs
The principle of power, close to electrode slice side, air-flow it is relatively lower speed.
In addition, another principle that the present invention is relied on actually is also based on the principle of newton internal friction, Ke Yili
Solution is at labyrinth seal structure, only in an embodiment of the present invention, first provides the first slit, since it is determined that the first slit
Distance is smaller between two components, and boundary friction effect is stronger, and in some implementations, when the first slit is sufficiently small, boundary is rubbed
The flowing for being enough to completely inhibit the first slit interior air-flow is wiped, in more applications, when the first slit is relatively large, boundary friction
It then can at least weaken the speed of air-flow.
To sum up, under conditions of 4 axial length of insulator determines, two the first slits are constructed in the both ends of insulator 4,
Significantly to reduce because of later maintenance problem caused by insulation.
Wherein, the axial length of insulator 4 is used to determine as previously described the distance between adjacent electrode piece, and the first slit
Then constitute the structure for weakening air velocity or completely inhibiting air-flow flowing at the first slit.
Fig. 3 ~ 5 are shown in three embodiments, and shared feature is respectively to be formed with one in two end sides of insulator 4
First slit remembers that part of the insulator 4 between two first slits is insulator body, the portion of insulator body and electrode slice
It is divided into the first positioning region.
The first slit is formed between the outer peripheral surface of first positioning region, insulator body and electrode slice.
It is an external member on the whole for insulator 4 used on quartz boat, is similar to axis
Sleeve in upper part, for the axially position between parts on shaft.In quartz boat technical field, electricity is being provided using insulator 4
Between pole piece under conditions of axially position, should also have insulating properties.
Fig. 3 ~ three embodiments shown in fig. 5 are that more preferred embodiment, insulator body part is one total
At part, it is to be understood that under the requirement of the bottom of the present invention time, insulator body may be constructed a monomer structure,
Rather than assembly structure.
Currently, it is set type structure with the foundation structure of the insulator 4 on quartz boat, can covers as shown in Figure 1
In fixed link 2, in an embodiment of the present invention, determined based on fixed link 2 axial, radial.It is set accordingly, due to insulator 4
Part, referential are consistent with fixed link 2.
External member feature based on insulator body, and there is first end and the second end opposite with the first end.Traditional
Insulator 4 is an isometrical round buss structure, electrode chip bonding of the both ends directly with place end, when 4 table of insulator on the whole
Face deposits more carbon after forming carbon-coating, and the insulation performance of insulator 4 disappears.
In an embodiment of the present invention, insulator body and the first positioning region are formed by insulator 4 and are equivalent to drill holder
Cylinder, wherein the first positioning region respectively has one at the both ends of insulator body, thus make between first end and first end lateral electrode piece,
And first distance is disengaged between second end and second end lateral electrode piece；The first distance is obviously true by the length institute of the first positioning region
It is fixed.
It is subject to corresponding, the first positioning region outer diameter is less than insulator body outer diameter, and determines the by the first distance
One slit.Due to the presence of slit, based on the principle that the embodiment of the present invention above-mentioned is relied on, it is not easy to sink on the first positioning region
Carbon distribution will not may deposit carbon if slit depth-to-width ratio is sufficiently large completely on first positioning region, open circuit formed here, even if
It is that thicker carbon-coating is deposited in insulator body, still will not lead to the problem of is connected insulator 4 because of carbon-coating conduction.
Typically, it is located at second gasket 16 at both ends as shown in Figure 3,17 He of third gasket at both ends is located in Fig. 4
The 4th gasket 19 in Fig. 5, these gaskets constitute the first positioning region, and outer diameter is relatively small, relative to the outer of such as outer barrel 13
Diameter is much smaller, to will form slit between outer barrel 13 and such as first electrode sheet 1, i.e., the first slit above-mentioned is based on side
Boundary's friction, the first slit can generate very big flow resistance, to even have on Carbon deposition to such as the second gasket 16, be deposited
Amount is also very limited, is not enough to generate conducting, to greatly reduce the later maintenance of quartz boat.
In general, the first slit is deeper, about few but too deep slit on Carbon deposition to such as the second gasket 16 needs
The outer diameter of the insulator body of adaptation is bigger, so that bigger electrode slice surface can be covered.Therefore, available, the first slit
Depth be 4 ~ 15 times of first distance.
It is further preferred that the depth of the first slit is 5 times of first distance.
It is understood that entire length is usually more than 18mm, relatively for insulator 4 used in quartz boat
For, insulator body occupies the major part of 4 entire length of insulator, in contrast, the first slit be adapted to first away from
From will not be very big.
In a preferred embodiment, first distance be not less than 0.8mm, the first factor that first distance is considered be breakdown away from
From when insulator body deposited carbon layer forms conductor, first distance to be hit between insulator body and electrode slice
It wears.
The operating voltage being adapted to accordingly, due to different quartz boats is not identical, and voltage is bigger, and striking distance is also
Bigger, therefore, first distance and electrode slice institute's on-load voltage are positively correlated.
In addition, first distance is not more than 3mm.
In the structure shown in Fig. 3 ~ 5, the first positioning region is all made of gasket, in an embodiment of the present invention, the first positioning
The characteristics of portion and preferred quartz material production of insulator body, quartz material is that molding is relatively easy, and therefore, the first positioning region can
To construct in insulator body, and protrusion is molded in insulator body end.
Fig. 3 ~ Fig. 5 shows three kinds of 4 structures of insulator, explains one by one below to the structure of these three insulators 4.
The first structure of insulator 4 embodies in the embodiment shown in fig. 3, as it can be seen that insulator body has one in figure
Outer barrel 13 and an interior bucket 12, " bucket " therein are used to indicate the cylinder at one end band bottom, and the bottom of institute's band adapts to tube-in-tube structure, answers
It is provided with centre bore, which is used as the via hole for wearing fixed link 2.
Wherein, interior bucket 12 is embedded into outer barrel 13 by inlet of interior bucket bung hole end, is specifically found in Fig. 3, interior bucket 12 and outer
13 coaxial lines of bucket, can be based on the cooperation between the two and fixed link 2 to guarantee concentricity.
In structure shown in Fig. 3, there are second distances with outer barrel bucket bottom at interior bucket bung hole end, and the second distance is by Fig. 3
Shown in second gasket 16 determine.In some embodiments, interior bucket bung hole can directly be engaged with outer barrel bucket bottom.
Second distance is 0.5 ~ 2mm.
In Fig. 3, interior bucket 12 is nested with outer barrel 13, itself forms a labyrinth structure, is easy to generate frictional property in more preferably
Energy.
There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface constitutes first end end face,
Outer barrel bucket bottom lateral surface constitutes second end end face.
The via hole and the via hole at outer barrel bucket bottom at interior bucket bucket bottom bucket bottom and the cooperation of fixed link 2 generally use the side of clearance fit
Formula, therefore, the concentricity between interior bucket 12 and outer barrel 13 are relatively poor, in a preferred embodiment, need using axial component,
It is compressed by axial, to eliminate the deflection of outer barrel 13 and interior bucket 12 caused by fit clearance.
Specifically, referring to structure shown in Fig. 3, each second gasket 16 positioned at both ends constitutes above-mentioned first
Positioning region, as gasket part, the pretightning force based on assembly and kept between insulator body and corresponding terminal electrode film close
Engagement.
There are 15, first gaskets 14 of a positioning sleeve, between 13 bottom of the first gasket 14 and outer barrel also in interior bucket 12
One the second gasket 16, wherein 14 outer diameter of the first gasket is relatively large, greater than the outer diameter of the second gasket 16, also greater than positioning sleeve 15
Outer diameter, to form labyrinth structure.The positioning sleeve 15, the first gasket 14 and the second gasket 16 that set gradually can be used
One sleeve member replacement.
Sleeve member ontology can be variable-diameter structure, and form desired labyrinth structure.
4 structure of insulator shown in Fig. 4 is second of structure, is denoted as the second structure, has the insulator of second structure
Ontology includes one group of insulating trip 18 of axial alignment, is based on the second positioning region between adjacent insulating trip 18 and determines second distance, and
Second slit is determined by the second distance.Second positioning region therein is third gasket 17 shown in Fig. 4.
In Fig. 4, the second slit between adjacent insulating trip 18 insulator 4 can be led caused by significantly more efficient reduction Carbon deposition
Logical problem.
In addition, insulator 4 is made of multiple second gaskets 17 and multiple insulating trips 18 in structure shown in Fig. 4, assembly
It is relatively easy.
In structure shown in fig. 5, to have the insulator 4 of third structure, has the insulator body packet of the third structure
Include the identical staving of an enantiomorph, two staving bottom pairings；Staving is multilayered structure, each interlayer coaxial line, and adjacent interlayer stays
There is the 4th distance.
There are two the identical insulation sleeve 20 of structure, back-to-back setting, insulation therein for 4 structure of insulator tool shown in fig. 5
Set 20 is made of multiple stavings of coaxial line, and the gap between staving is conducive to generate bigger flow resistance.
Traditional insulator generallys use ceramics, and ceramics are easy to deposit carbon, and surface smoothness is not easy to improve, at this
In the embodiment of invention, the insulator body and first positioning region are quartz material, and quartz material is easily obtained 1 grade
Or 2 class precisions, i.e. mirror surface accuracy, it is not easy to be infiltrated by fluid.
Quartz boat according to claim 9, which is characterized in that quartz rod one end is bolt head, and the other end is screw rod,
It is adapted to quartzy nut, for fastening.
Claims (10)
1. a kind of insulator powers on positioning and insulation between pole piece for quartz boat characterized by comprising
Insulator body has first end and the second end opposite with the first end；
First positioning region respectively has one in first end and second end, so that between first end and first end lateral electrode piece and second
First distance is disengaged between end and second end lateral electrode piece；
Wherein, the first positioning region outer diameter is less than insulator body outer diameter, and determines the first slit by the first distance.
2. insulator according to claim 1, which is characterized in that the depth of the first slit is 4 ~ 15 times of first distance.
3. insulator according to claim 1 or 2, which is characterized in that first distance is not less than 0.8mm, and and electrode slice
Institute's on-load voltage is positively correlated；
First distance is not more than 3mm.
4. insulator according to claim 1, which is characterized in that the first ring washer is in the first positioning region or is molded over insulation
The protrusion with center via hole at sub- body end center.
5. insulator according to claim 1, which is characterized in that insulator body includes
First structure: the insulator body for having the first structure includes an outer barrel and an interior bucket, interior bucket bucket bottom and outer barrel bucket bottom
It is provided with via hole；Be embedded into outer barrel by inlet of interior bucket bung hole end, and make interior bucket bung hole end and outer barrel bucket bottom there are second away from
From or directly engaged with outer barrel bucket bottom；There are third distances between radial direction, interior bucket outer wall and outer barrel inner wall；Interior bucket bucket bottom lateral surface
First end end face is constituted, outer barrel bucket bottom lateral surface constitutes second end end face；
Second structure: the insulator body for having second structure includes one group of insulating trip of axial alignment, between adjacent insulating trip
Second distance is determined based on the second positioning region, and the second slit is determined by the second distance；Or
Third structure: the insulator body for having the third structure includes the identical staving of an enantiomorph, two staving bottom pairings；
Staving is multilayered structure, each interlayer coaxial line, and there are the 4th distances for adjacent interlayer.
6. insulator according to claim 5, which is characterized in that in first structure, provide a sleeve or positioning component with
For the axially position between outer barrel and interior bucket；
If positioning component, which includes that a grade sleeve and one second ring washer, the diameter of second ring washer are big
In the diameter of secondary sleeve；There are also an adjustment gasket between the second ring washer and outer barrel bottom, the diameter of the adjustment gasket is less than the
The diameter of two ring washers；
Second distance is 0.5 ~ 2mm.
7. insulator according to claim 1, which is characterized in that the insulator body and first positioning region are
Quartz material.
8. one kind has the quartz boat of any insulator of claim 1 ~ 7, the insulator is used for quartz boat top electrode
Insulation between piece.
9. quartz boat according to claim 8, which is characterized in that the fixed link for powering on pole piece assembling for quartz boat is stone
English bar, the quantity of quartz rod are 3 ~ 6；
Correspondingly, the fixation hole of respective numbers is provided on electrode slice, quartz rod successively wears electrode slice by fixation hole, adjacent
The insulator is arranged on quartz rod between electrode slice.
10. quartz boat according to claim 9, which is characterized in that quartz rod one end is bolt head, and the other end is screw rod,
It is adapted to quartzy nut, for fastening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910899331.6A CN110534269A (en) | 2019-09-23 | 2019-09-23 | Insulator and quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910899331.6A CN110534269A (en) | 2019-09-23 | 2019-09-23 | Insulator and quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110534269A true CN110534269A (en) | 2019-12-03 |
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ID=68669678
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910899331.6A Pending CN110534269A (en) | 2019-09-23 | 2019-09-23 | Insulator and quartz boat |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110791749A (en) * | 2019-12-09 | 2020-02-14 | 苏州拓升智能装备有限公司 | Inter-electrode isolation structure, vapor deposition apparatus, and graphite boat |
| CN111081605A (en) * | 2019-12-09 | 2020-04-28 | 苏州拓升智能装备有限公司 | Inter-electrode isolation structure, vapor deposition apparatus, and graphite boat |
| CN111326604A (en) * | 2020-02-20 | 2020-06-23 | 东莞南玻光伏科技有限公司 | Film coating method of PERC solar cell |
-
2019
- 2019-09-23 CN CN201910899331.6A patent/CN110534269A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110791749A (en) * | 2019-12-09 | 2020-02-14 | 苏州拓升智能装备有限公司 | Inter-electrode isolation structure, vapor deposition apparatus, and graphite boat |
| CN111081605A (en) * | 2019-12-09 | 2020-04-28 | 苏州拓升智能装备有限公司 | Inter-electrode isolation structure, vapor deposition apparatus, and graphite boat |
| CN111326604A (en) * | 2020-02-20 | 2020-06-23 | 东莞南玻光伏科技有限公司 | Film coating method of PERC solar cell |
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Address after: 250119 area a, building 13, Sino German Industrial Park, 8 Zidong Avenue, Tianqiao District, Jinan City, Shandong Province Applicant after: Shandong Liguan microelectronics equipment Co., Ltd Address before: 250119 Shandong Province Flyover District of Ji'nan City Shun Hing Sangzi Town Road No. 66 Ji'nan new materials industry science and Technology Park Building 1, 1 floor West Applicant before: JINAN LIGUAN ELECTRONIC TECHNOLOGY Co.,Ltd. |
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