CN110531712A - Upper and lower computer information synchronization system and method for semiconductor equipment - Google Patents
Upper and lower computer information synchronization system and method for semiconductor equipment Download PDFInfo
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- CN110531712A CN110531712A CN201910123169.9A CN201910123169A CN110531712A CN 110531712 A CN110531712 A CN 110531712A CN 201910123169 A CN201910123169 A CN 201910123169A CN 110531712 A CN110531712 A CN 110531712A
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- 230000005540 biological transmission Effects 0.000 claims description 32
- 230000010365 information processing Effects 0.000 claims description 31
- 238000007726 management method Methods 0.000 claims description 21
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- 230000003647 oxidation Effects 0.000 description 5
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention discloses a kind of upper and lower computer information synchronization systems for semiconductor equipment.The system includes host computer, slave computer and system database, and the system database is communicated to connect with the host computer, the slave computer respectively.The host computer and the slave computer are used to record the event procedure information in the hardware information and process of semiconductor equipment, and the host computer and the slave computer are based on data image mechanism and realize synchronizing information, and synchronous information is fed back to the system database.The present invention realizes the management by synchronization mechanism of flexible choice processing mode and hardware information in software anomaly, and exception handling ability in perfect technical process facilitates the authenticity and reliability that promote hardware information.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing fields, and in particular, to a kind of for the upper and lower of semiconductor equipment
Position machine information synchronization system and method.
Background technique
The technique carried out in semiconductor equipment carries out a series of technique usually using silicon wafer as goods support, in silicon wafer
Process formation process semi-finished product or finished product.Carrying out the processing of silicon wafer technique under normal conditions is incoming by industry mechanical arm and passes
Equipment out, due to the difference of equipment, the wafer once processed and Foup (the Front opening for loading wafer
Unified pod, front openings standard container) also it is different.Such as vertical oxidation can once not process 1-141 piece not etc.
Wafer, as shown in Figure 1, whereinIndicate wafer,Indicate slot.When equipment carries out technique, if equipment goes out
It is now abnormal, such as the case where power-off or the case where any one bench control system of upper and lower computer powers off, restart after controlling equipment often
It will appear upper and lower computer and different situation recorded to the wafer and Foup that enter equipment progress.It is abnormal that apparatus and process is solved at present
In the case of the methods of the hardware synchronizations such as equipment upper and lower computer Foup and wafer be by the data-base recording of client and range estimation equipment
The middle position Foup and wafer carry out matching and are confirmed.
Vertical oxidation equipment is the important equipment on semiconductor production line, be mainly used for semiconductor production line oxidation and
Depositing technics.The structure of the equipment is as shown in Figure 2.The process of the transmission of wafer complete process is as follows in the device:
(1) Stocker (cassette cabinet) is put at user or the end FA (Factory Automation, factory automation)
Set Station (stand) A or station B on, then Foup Robot (Foup manipulator) will stand A/B on cassette cabinet in
Foup taking-up is placed on the Shelf with caching function (shelf), and shelf possess 16 or more stations and are used under normal conditions
Place Foup.Then Foup is placed on station C or station D by Foup manipulator, passes through WTM (Wafer Thinkness
Measure, wafer thickness measurement) Mapping (graphical layout) processing is carried out to Foup, last Foup manipulator is by Foup slave station
It is placed on shelf on C/D.This process that Foup slave station A/B is entered shelf is referred to as CarrierIn (moving in)；
(2) wafer on Station C/D is taken out by Wafer Robot (wafer manipulator) and is required gradually according to certain
It is put into Boat (cassette), we term it Charge (loading) processes；
(3) cassette, which enters, carries out process in processing chamber, we term it technical process；
(4) after technique, cassette comes out from processing chamber, and then wafer manipulator is by the wafer after technique from cassette
On be transferred on the Foup on Station C/D one by one, principle is to put on which Foup from which Foup.Wafer from
Process in cassette to Foup is disCharge (setting out)；
(5) finally, Foup manipulator takes out the Foup on Station C/D on placement shelf, and Foup is placed on
Whole work process is completed on Station A/B, this process is CarrierOut (moving out).
From the foregoing, it will be observed that whole process passes through CarryIn → Charge → Process → DisCharge → CarrierOut
Five processes are completed.In software control system, transmission process CarryIn, Charge, DisCharge, CarrierOut by
TMC (Transfer Module Controller, transmission module controller) is managed, and process control procedure is by PMC
(Process Module Controller, technical module controller) control, CTC (Cluster Tool Contronller,
Boundling type controller) carry out PMC and TMC management and running and control.In entire software systems, CTC is in a bench control system
In, referred to as host computer, TMC and PMC are in other control computer, referred to as slave computer.
It is as shown in Figure 2 that vertical oxidation apparatus and process transmits top view.Occur abnormal feelings when system is carrying out technique
Condition such as system cut-off, after then restarting software systems, user can obtain the position of Foup, but wafer and machinery by sensor
Hand can not be obtained by sensor, therefore the position of the system wafer of the upper and lower computer record of software, Foup and manipulator
Information is sometimes different, and is also possible to wafer, Foup and the manipulator in physical device not identical.At this time such as
Fruit user directly carries out without the synchronous of the information such as upper and lower computer wafer, Foup and manipulator wafer transfer, Foup is removed
The fortune even beginning of technique easily cause some position to have the forced transport of wafer or Foup and carry and cause this when
Hardware collisions occur the major accidents such as manipulator is damaged, cassette is broken, or even the great shadow of equipment scrapping and casualties occur
It rings.Therefore in the case where abnormal conditions occurs in system, it is necessary to carry out the hardware of confirmation and unified upper and lower computer to the hardware information of board
It just can be carried out normal technique processing after information.It is often recorded currently, solving the upper and lower computer wafer method synchronous with Foup
The method that data are compared to database and practical board, the mode used is carried out single on the basis of system database
The synchronizing information of wafer and Foup is carried out using host computer or slave computer as standard.Existing for the solution of existing passage
Disadvantage is as follows:
1) authenticity and validity of system data information are unable to get guarantee；
2) the data information source of synchronizing information is single, cannot achieve comparison；
3) synchronizing information is only carried out on the basis of host computer or slave computer, and user can not be in the light of actual conditions
Carry out realization selection；
4) user cannot achieve any change upper and lower computer wafer, Foup and manipulator related information parameters；
5) system data only relies on logical process record hardware transport process and final position, can not record
The triggering situation of the state and event of object in transmission process.
The information for being disclosed in background of invention part is merely intended to deepen the reason to general background technique of the invention
Solution, and it is known to those skilled in the art existing to be not construed as recognizing or imply that the information is constituted in any form
Technology.
Summary of the invention
In order to overcome problem above existing in the prior art, the invention proposes a kind of for the upper and lower of semiconductor equipment
Position machine information synchronization system and method.
According to an aspect of the invention, it is proposed that a kind of upper and lower computer information synchronization system for semiconductor equipment, packet
Include host computer, slave computer and system database, the system database respectively with the host computer, the slave computer communication link
It connects；
The host computer and the slave computer are used to record in the hardware information and process of semiconductor equipment
Event procedure information, and the host computer and the slave computer are based on data image mechanism and realize synchronizing information, and will be same
The information of step feeds back to the system database.
Preferably, the host computer includes: first pair as administrative center, first event processing center, first information processing
Center and the first control data corporation；
Described first pair is used to prepare transmission state table and interlocking for the hardware objects of semiconductor equipment as administrative center
List object；
The first event processing center is used for as each of described transmission state table movement binding dependent event, In
The generation of trigger event in process, and the first event processing center records event procedure information；
The first information processing center, for first event processing center and first pair of orthicon described in management by synchronization
The data information at reason center, and the data information after synchronizing is sent to first control data corporation；
First control data corporation is used to receive the data of the information processing centre, realizes and the slave computer
Synchronizing information.
Preferably, the slave computer includes: second pair as administrative center, second event processing center, the second information processing
Center and the second control data corporation；
Described second pair is used to prepare transmission state table and interlocking for the hardware objects of semiconductor equipment as administrative center
List object；
The second event processing center is used for as each of described transmission state table movement binding dependent event, In
The generation of trigger event in process, and the second event processing center records event procedure information；
Second information processing centre, for second event processing center and second pair of orthicon described in management by synchronization
The data information at reason center, and the data information after synchronizing is sent to second control data corporation；
Second control data corporation is used to receive the data of second information processing centre, realize with it is described upper
The synchronizing information of machine.
Preferably, the upper and lower computer information synchronization system for semiconductor equipment further includes software interface；
The software interface with user for interacting, and the software interface and the system database communication link
It connects, to send operational order to the system database and receive the data information of the system database to be shown.
Preferably, the event procedure packet of the first event processing center and second event processing center record
Include: executor executes time, implementing result.
Preferably, the first information processing center be specifically used for will be corresponding to the event of the first event processing center
Manipulator operation website as sequence chained list, using the movement to be done of each website manipulator as binary tree data structure
To update the transmission state table at first Object Management group center；
Second information processing centre is specifically used for machinery corresponding to the event of the second event processing center
The website of hand operation is as sequence chained list, using the movement to be done of each website manipulator as binary tree data structure to update
The transmission state table at second Object Management group center.
Preferably, first control data corporation and second data processing centre are also used to back up data
And compression.
Preferably, the software interface passes through the information of the real-time simulative display semiconductor equipment of animation.
Preferably, the host computer is boundling type controller.
According to another aspect of the invention, it is proposed that a kind of upper the next information synchronization method for semiconductor equipment, utilizes
The upper and lower computer information synchronization system as described above for being used for semiconductor equipment, comprising:
Step S1, the hardware information of upper computer and lower computer is read；
Step S2, judge whether the hardware information of upper computer and lower computer is identical, it is such as identical if difference thens follow the steps S3
Then terminate；
Step S3, selection is synchronized on the basis of host computer or is synchronized on the basis of slave computer, more than selection
It is synchronized on the basis of the machine of position and thens follow the steps S4, such as selection is synchronized on the basis of slave computer thens follow the steps S5；
Step S4, the data for reading host computer, to update the data of slave computer；
Step S5, the data for reading slave computer, for updating the data of host computer；
Step S6, system database is updated.
The present invention has following advantageous effects:
Upper computer and lower computer records the letter of the event in the hardware information and process of semiconductor equipment respectively
Breath realizes the synchronizing information in upper and lower computer based on data image mechanism, realizes the flexible choice in software anomaly
The management by synchronization mechanism of processing mode and hardware information, exception handling ability in perfect technical process, helps to promote hardware
The authenticity and reliability of information.
Method of the invention has other characteristics and advantages, these characteristics and advantages from the attached drawing being incorporated herein and with
Will be apparent in specific embodiment afterwards, or by the attached drawing and subsequent specific embodiment being incorporated herein into
Row statement, these the drawings and specific embodiments in detail are used together to explain specific principle of the invention.
Detailed description of the invention
Exemplary embodiment of the present is described in more detail in conjunction with the accompanying drawings, of the invention is above-mentioned and other
Purpose, feature and advantage will be apparent, wherein in exemplary embodiments of the present invention, identical reference label is usual
Represent same parts.
Fig. 1 shows the schematic side view after wafer transfer to cassette position；
Fig. 2 has shown the technique transmission top view of vertical oxidation equipment；
Fig. 3 shows the upper and lower computer synchronizing information system for semiconductor equipment in accordance with an exemplary embodiment of the invention
The structure chart of system；
Fig. 4 shows the upper and lower computer synchronizing information system for semiconductor equipment in accordance with an exemplary embodiment of the invention
The structure chart of the hardware information processing model of host computer in system；
Fig. 5 shows the upper and lower computer synchronizing information system for semiconductor equipment in accordance with an exemplary embodiment of the invention
The structure chart of the hardware information processing model of slave computer in system；
Fig. 6 shows the upper and lower computer synchronizing information side for semiconductor equipment in accordance with an exemplary embodiment of the invention
The flow chart of method；
Fig. 7 shows upper and lower computer synchronizing information software interface schematic diagram；
Fig. 8 shows upper and lower computer synchronizing information software animation simulation schematic diagram.
Main appended drawing reference explanation:
10, processing chamber, 20, shelf, 30, cassette, 40, Foup manipulator, 50, wafer manipulator, 11, stand A, 12, stand
B, 13, stand C, 14, stand D, 21, Foup A, 22, Foup B, 23, Foup C, 24, Foup D；
100, host computer, 200, slave computer, 300, system database, 400, software interface, in the 110, first Object Management group
The heart, 120, first event processing center, 130, first information processing center, the 140, first control data corporation, 210, second pairs
As administrative center, 220, second event processing center, the 230, second information processing centre, the 240, second control data corporation.
Specific embodiment
The present invention will be described in more detail below with reference to accompanying drawings.Although showing the preferred embodiment of the present invention in attached drawing,
However, it is to be appreciated that may be realized in various forms the present invention and should not be limited by the embodiments set forth herein.On the contrary, providing
These embodiments are and the scope of the present disclosure completely can be communicated to ability to keep the disclosure more thorough and complete
The technical staff in domain.
Fig. 3 shows the upper and lower computer synchronizing information system for semiconductor equipment in accordance with an exemplary embodiment of the invention
The structure chart of system.As shown in figure 3, the upper and lower computer information synchronization system includes host computer 100, slave computer 200 and system number
According to library 300, system database 300 is communicated to connect with host computer 100, slave computer 200 respectively.
Slave computer 100 includes transmission module controller TMC and technical module controller PMC；Slave computer 200 is to be transmitted
The control terminal of the manage and dispatch and control of module controller TMC and technical module controller PMC, for example, boundling type controller
CTC。
Host computer 100 and slave computer 200 for recording the hardware information and process of semiconductor equipment respectively
In event procedure information, and host computer 100 and slave computer 200 are based on data image mechanism and realize synchronizing information, and will be same
The information of step feeds back to system database 300.
In upper and lower computer information synchronization system shown in Fig. 3, the hard of semiconductor equipment is recorded simultaneously in upper and lower computer
Event procedure information in part information and process restores correlation data information using the method for data image, will
As a result system database is fed back to, so that the data of system database can obtain timely updates, and the data letter of system itself
Breath amount does not increase, and avoids the burden of system database redundancy.
In one example, host computer 100 is as shown in Figure 4, comprising: first pair as administrative center 110, first event processing
Center 120, first information processing center 130 and the first control data corporation 140.
First pair is used to prepare transmission state table and interlocking pair for the hardware objects of semiconductor equipment as administrative center 110
As list.
The wafer, Foup, manipulator (including wafer manipulator, Foup manipulator) of system are considered as pair by Object Management group center
As, each object has ID, title, current location, target position list, interlocking list object, the attributes such as whether can transmit.
Object Management group center is that each hardware device of system prepares transmission state table, can view and be somebody's turn to do by the transmission state table
The relevant information of object, by taking wafer manipulator as an example, transmission state table is as shown in table 1.By the transmission state table and combine
List object is interlocked, can be confirmed whether object can execute the status information after movement transmission and transmission.
Table 1
First event processing center 120 is used to bind dependent event for the movement of each of transmission state table, in technique
The generation of trigger event in implementation procedure, and first event processing center 120 records event procedure information.Procedural information includes
The executor of event executes the information such as time, implementing result, and automatically updates transmission state table.First event processing center
120 tracing management also for synchronizing information after later period system exception plays the role of clue, can restore letter by the rollback of event
The state of breath, while providing the foundation of software interface animation implementation procedure.
First information processing center 130 is used for management by synchronization first event processing center 120 and the first Object Management group center
110 data information, and the data information after synchronizing is sent to the first control data corporation 140.
To first pair as the management by synchronization of administrative center 110 and first event processing center 120 relates generally to synchronized algorithm,
It contains to first pair as the processing such as inquiry, update of transmission state table of administrative center 110, and in first event processing
The record of the event trigger sequence of the heart 120 such as inquires, increases, deletes and is inserted at the operation.In first information processing center 130,
Using the website of manipulator operation corresponding to the event of first event processing center 120 as sequence chained list, by each website machine
The movement to be done of tool hand is handled as binary tree data structure.It is influenced and is fed back to first pair of orthicon by algorithm management
Reason center 110 and first event processing center 120.Wherein, manipulator may include wafer manipulator and Foup manipulator.
Specifically, by the way that acquisition sequence chained list is unfolded in a transmission flow.For example, slave station A moves in one with reference to Fig. 2
A Foup, process exactly by cassette cabinet be placed on station A on, then Foup manipulator will stand A on cassette cabinet in
Foup taking-up be placed on station C/D on carry out graphical layout (mapping), Foup is taken out from C/D and is put by Foup manipulator after the completion
It sets on shelf.Therefore, the website that manipulator is completed is exactly A- > C/D- > shelf of standing of standing, and can regard a daisy chaining as
Table.For the website in each chained list, such as stand A, and manipulator movement to be done has initial position -> pickup (A), it can will
The movement is handled as binary tree data structure.Specifically, several roots is Foup manipulator, and two branches are exactly initial position
With pickup (A), and it is an oriented binary tree.For each website of said sequence chained list, there is a binary tree, it should
Binary tree had not only contained hardware objects (such as Foup manipulator), but also contained action sequence.By to every in sequence chained list
The position of the corresponding hardware objects of a website and movement are updated, that is, realize the synchronized update of transmission state table.
First control data corporation 140 is used to receive the data of first information processing center 130, realizes and slave computer 200
Synchronization.The first control data corporation 140 in host computer 100 is based on data image mechanism with slave computer 200 and realizes upper bottom
The synchronizing information of machine, and synchronous information is fed back into system database 300.
First control data corporation 140 using database as tool carry out data management, data include event handling center,
The various data at Object Management group center and information processing centre also include the record of action executing process abnormal conditions.The module
Periodically record the data information of other modules, and there is data backup, compression function, while can in upper and lower computer into
Row uploads and downloading, credibility and stability with height.
Slave computer 200 equally can carry out information processing using hardware information processing model.As shown in figure 5, slave computer 200
Hardware information processing model include second pair as administrative center 210, second event processing center 220, in the second information processing
The heart 230 and the second control data corporation 240.Structure and the processing method of the hardware information processing model of slave computer 200 with it is upper
Position machine 100 it is similar.
The upper and lower computer information synchronization system can also include software interface 400.As shown in figure 3, the software interface 400 is used
It is interacted in user, and software interface 400 and system database 300 communicate to connect, to be sent to system database 300
Operational order and the data information of system database 300 is received to be shown.Software interface 400 also realizes animation simultaneously
Real-time simulative display realizes simple and clear effect for the processing of abnormal conditions.
The invention also provides a kind of upper the next information synchronization methods for semiconductor equipment, are used using as described above
In the upper and lower computer information synchronization system of semiconductor equipment.As shown in fig. 6, the method comprising the steps of S1~S7.
In step sl, the hardware information of upper computer and lower computer is read.User can be logged in by software interface 400
System, and switch to synchronization interface.The synchronization interface shows the information of upper computer and lower computer, as shown in Figure 7.
In step s 2, judge whether the hardware information of upper computer and lower computer is identical.It can be shown by synchronization interface
Upper and lower computer information judged.If the same terminate, if difference thens follow the steps S3.
In step s3, selection is synchronized on the basis of host computer or is synchronized on the basis of slave computer.On if
The information that slave computer is shown be it is different, user can select to synchronize on the basis of host computer by software interface, or
Person is synchronized on the basis of slave computer.Selection of the system based on user, the mechanism based on data image realize upper and lower computer
Synchronizing information.Specifically, S4 is thened follow the steps as selection is synchronized on the basis of host computer, such as selection is on the basis of slave computer
It synchronizes and thens follow the steps S5.
In step s 4, the data for reading host computer, to update the data of slave computer.
In step s 5, the data for reading slave computer, for updating the data of host computer.
In step s 6, system database is updated.
It selects using host computer to be standard or slave computer as the option of standard using user, in addition system information final updated
As a result, it is possible to realize timely updating and modifying to information.
It can also include before after step s 5 step S51, S52 and S53 with step S6.
In step s 51, observation device virtual condition.
In step S52, judge whether to change other information.If not, terminating；If so, thening follow the steps S53.
In step S53, new information and state are set.
Namely after carrying out data information and synchronizing, by observation device virtual condition, other information is no longer changed determining
Later, system is arranged new information and state and updates system data centre data.
It can also include step S7 after step S6.In the step s 7, software interface and animation are updated, such as Fig. 8 institute
Show.
In conclusion the present invention carries out objectification processing to hardware informations such as wafer, Foup, manipulators, while handling
State data information and situation of the object in transmission process；Simultaneously use data image method, upper and lower computer simultaneously
Model mechanism is handled using hardware information, the data information of upper and lower computer is compared into processing, thus user can choose with
Synchronizing information on the basis of host computer also can choose the synchronizing information mode on the basis of slave computer.Optimization system information simultaneously
Data processing method, and the actual conditions of the wafer of combination board, Foup, manipulator carry out real time modifying, and pass through software
Interface realizes that information selection and animation real-time status update, and realizes the synchronism of software and hardware information, improves exception
Efficiency is managed, improves the accuracy of synchronizing information, and ensure that the security performance of board.
Using example
Below in technique transmission process shown in Fig. 2, when taking out 20 wafer transfers in wafer manipulator slave station D 14
To cassette slot 1- slot 20 when, it is same to upper the next information of the invention for exception has occurred when being placed into slot 15
Step system is further described.
In the prior art, when the slot 1- slot for taking out 20 wafer transfers to cassette in wafer manipulator slave station D 14
When 20, exception has occurred when being placed into slot 15, wafer manipulator slot 14 in middle position, host computer data has at this time
Record, but slot 15 is lost, and has slot record in the cassette of slave computer, but enters without wafer.It is caused after restarting at this time
The loss of information, because of information of the host computer without slot 15, slave computer has slot Information but without wafer information.If user
It is updated using slave computer as standard, it is believed that it is placed in slot 15, but without the information of wafer 15, therefore can not repair
Change；If be updated using host computer as standard, similarly think to be placed on slot 15, but without the information of slot 15
Also it can not modify, therefore cause the phenomenon that both sides can not confirm.
Since present invention employs hardware informations as shown in Figure 3 to handle model, no matter select host computer for standard
Or slave computer is standard, all there is the information of slot 15 and wafer 15 in system data, therefore can be carried out modifying.
That is, user can carry out mandatory modification to upper and lower computer data, it is synchronous that upper and lower computer is carried out after modification.For example, wafer transfer is extremely
Slot 15, if user forces to delete the slot 15 of host computer, and the update of 15 data of slot on slot 16, then more than
It is updated on the basis of the machine of position, is then finally reflected out wafer and has been placed on slot 16.
As it can be seen that it is same that the present invention realizes upper and lower computer information based on hardware information processing model and data image mechanism
Step, the information synchronization mechanism being both able to achieve on the basis of the above position machine, the information synchronization mechanism being also able to achieve on the basis of slave computer,
Ensure unicity, authenticity and the validity of the synchrodata information of upper and lower computer.
Various embodiments of the present invention are described above, above description is exemplary, and non-exclusive, and
It is not limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for this skill
Many modifications and changes are obvious for the those of ordinary skill in art field.The selection of term used herein, purport
In the principle, practical application or improvement to the technology in market for best explaining each embodiment, or make the art
Other those of ordinary skill can understand each embodiment disclosed herein.
Claims (9)
1. a kind of upper and lower computer information synchronization system for semiconductor equipment, which is characterized in that including host computer, slave computer with
And system database, the system database are communicated to connect with the host computer, the slave computer respectively；
The host computer and the slave computer are used to record the thing in the hardware information and process of semiconductor equipment
Part procedural information, and the host computer and the slave computer are based on data image mechanism and realize synchronizing information, and will be synchronous
Information feeds back to the system database.
2. the upper and lower computer information synchronization system according to claim 1 for semiconductor equipment, which is characterized in that described
Host computer includes: first pair as administrative center, first event processing center, first information processing center and the first data management
Center；
Described first pair is used to prepare transmission state table and interlocking object for the hardware objects of semiconductor equipment as administrative center
List；
The first event processing center is used to bind dependent event for the movement of each of described transmission state table, in technique
The generation of trigger event in implementation procedure, and the first event processing center records event procedure information；
The first information processing center, in first event processing center and first Object Management group described in management by synchronization
The data information of the heart, and the data information after synchronizing is sent to first control data corporation；
First control data corporation is used to receive the data of the information processing centre, realizes the information with the slave computer
It is synchronous；
The slave computer includes: second pair as administrative center, second event processing center, the second information processing centre and second
Control data corporation；
Described second pair is used to prepare transmission state table and interlocking object for the hardware objects of semiconductor equipment as administrative center
List；
The second event processing center is used to bind dependent event for the movement of each of described transmission state table, in technique
The generation of trigger event in implementation procedure, and the second event processing center records event procedure information；
Second information processing centre, in second event processing center and second Object Management group described in management by synchronization
The data information of the heart, and the data information after synchronizing is sent to second control data corporation；
Second control data corporation is used to receive the data of second information processing centre, realizes and the host computer
Synchronizing information.
3. the upper and lower computer information synchronization system according to claim 1 for semiconductor equipment, which is characterized in that also wrap
Include software interface；
The software interface with user for interacting, and the software interface and the system database communicate to connect,
To send operational order to the system database and receive the data information of the system database to be shown.
4. the upper and lower computer information synchronization system according to claim 2 for semiconductor equipment, which is characterized in that described
First event processing center and the event procedure information of second event processing center record include: executor, execute the time,
Implementing result.
5. the upper and lower computer information synchronization system according to claim 2 for semiconductor equipment, it is characterised in that:
The first information processing center is specifically used for grasping on manipulator corresponding to the event of the first event processing center
The website of work updates the movement to be done of each website manipulator as binary tree data structure described as sequence chained list
The transmission state table at the first Object Management group center；
Second information processing centre is specifically used for grasping on manipulator corresponding to the event of the second event processing center
The website of work updates the movement to be done of each website manipulator as binary tree data structure described as sequence chained list
The transmission state table at the second Object Management group center.
6. the upper and lower computer information synchronization system according to claim 2 for semiconductor equipment, which is characterized in that described
First control data corporation and second control data corporation are also used to back up data and compressed.
7. the upper and lower computer information synchronization system according to claim 3 for semiconductor equipment, which is characterized in that described
Software interface passes through the information of the real-time simulative display semiconductor equipment of animation.
8. the upper and lower computer information synchronization system according to claim 1 for semiconductor equipment, which is characterized in that described
Host computer is boundling type controller.
9. a kind of upper the next information synchronization method for semiconductor equipment, using as described in one in claim 1-8
Upper and lower computer information synchronization system for semiconductor equipment characterized by comprising
Step S1, the hardware information of upper computer and lower computer is read；
Step S2, judge whether the hardware information of upper computer and lower computer is identical, if difference thens follow the steps S3, as identical, tie
Beam；
Step S3, selection is synchronized on the basis of host computer or is synchronized on the basis of slave computer, and such as selection is with host computer
On the basis of synchronize and then follow the steps S4, such as selection is synchronized on the basis of slave computer thens follow the steps S5；
Step S4, the data for reading host computer, to update the data of slave computer；
Step S5, the data for reading slave computer, for updating the data of host computer；
Step S6, system database is updated.
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