CN110531301B - Calibration method and calibration device for output power of radio frequency power supply - Google Patents
Calibration method and calibration device for output power of radio frequency power supply Download PDFInfo
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- CN110531301B CN110531301B CN201810501926.7A CN201810501926A CN110531301B CN 110531301 B CN110531301 B CN 110531301B CN 201810501926 A CN201810501926 A CN 201810501926A CN 110531301 B CN110531301 B CN 110531301B
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- G01R35/04—Testing or calibrating of apparatus covered by the other groups of this subclass of instruments for measuring time integral of power or current
Abstract
The invention provides a calibration method and a calibration device for output power of a radio frequency power supply. The method comprises the following steps: acquiring a plurality of preset output calibration powers ai of the radio frequency power supply, wherein i is 1,2, …, n; acquiring a plurality of actual powers B [ i ], i being 1,2, …, n of the load, wherein the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one; obtaining a functional relation B ═ F (A) between the actual power B of the load and the preset output calibration power A of the radio frequency power supply according to the preset output calibration powers A [ i ] and the actual powers B [ i ]; taking a functional relation F between the preset output calibration power A and the actual power B as a functional relation between a theoretical output power C of the radio frequency power supply and an expected power P of the load: p ═ f (c). According to the method, the accuracy of the output power calibration of the radio frequency power supply can be improved.
Description
Technical Field
The invention relates to the technical field of radio frequency power supplies, in particular to a calibration method and a calibration device for output power of a radio frequency power supply.
Background
Radio frequency power supplies are widely used in microelectronic processing devices such as plasma devices and other fields. As shown in fig. 1, a radio frequency power supply 1 drives a load 4 through a coaxial cable 2. The load 4 is for example a plasma chamber or a coil. In order to maximize the power obtained by the load 4, a matching unit 3 is generally inserted between the load 4 and the coaxial cable 2.
Due to the loss of the coaxial cable 2 and the error of the rf power supply 1, the output power set by the user on the rf power supply 1 is not consistent with the power actually received by the load 4. The existing calibration method for the output power of the radio frequency power supply comprises the following steps:
the radio frequency power supply 1 is turned on, the maximum output power A of the radio frequency power supply 1 is set through the upper computer, after the whole system is stabilized, the actual power B of the load 4 is detected through the sensor 5, and the actual power B is input to the upper computer by a user. The user inputs the expected power X of the user of the load 4 into the upper computer, and the upper computer calculates the output power Y of the radio frequency power supply 1 which needs to be set actually according to the formula Y ═ AX/B.
The existing calibration method has three hypothesis preconditions: firstly, the error of the output power of the radio frequency power supply 1 is in direct proportion to the output power; secondly, the loss of the coaxial cable 2 is in direct proportion to the output power; thirdly, the accuracy of the maximum output power a of the radio frequency power supply 1 is within an acceptable range. However, the maximum output power a of the rf power supply 1 is not a stable parameter and is susceptible to other factors, and the relationship between the loss of the coaxial cable 2 and the output power of the rf power supply 1 and the relationship between the error of the output power of the rf power supply 1 and the output power of the rf power supply 1 are not linear, so that the existing calibration method has a large error.
Disclosure of Invention
The invention provides a calibration method and a calibration device for output power of a radio frequency power supply, which are used for improving the accuracy of the calibration of the output power of the radio frequency power supply.
According to a first aspect of the present invention, there is provided a calibration method of output power of a radio frequency power supply, the radio frequency power supply being used for driving a load, the calibration method comprising:
acquiring a plurality of preset output calibration powers ai of the radio frequency power supply, wherein i is 1, 2.
Acquiring a plurality of actual powers B [ i ], i ═ 1, 2. > n of the load, wherein the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one;
obtaining a functional relation B ═ F (A) between the actual power B of the load and the preset output calibration power A of the radio frequency power supply according to the preset output calibration powers A [ i ] and the actual powers B [ i ];
taking a functional relation F between the preset output calibration power A and the actual power B as a functional relation between a theoretical output power C of the radio frequency power supply and an expected power P of the load: p ═ f (c).
Optionally, the obtaining a functional relation B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ] includes:
sequencing the preset output calibration power ai according to a preset sequence;
calculating the ratio k [ i ] between the actual power B [ i ] corresponding to each preset output calibration power A [ i ] and the preset output calibration power A [ i ] in sequence according to the preset sequence:
fitting the relation between all the ratios k [ i ] and the preset output calibration power A [ i ], and obtaining a functional relation k between the ratio k between the actual power B of the load and the preset output calibration power A of the radio frequency power supply and the preset output calibration power A, which is G (A);
and determining the functional relation B (F) (A) according to the functional relation k (G) (A).
Optionally, the functional relationship k ═ g (a) includes:
optionally, after determining the functional relationship P ═ f (c), the method further includes:
bringing the expected power p of the load into a functional relationship F;
calculating theoretical output power c of the radio frequency power supply according to p ═ F (c);
and setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
Optionally, after determining the functional relationship P ═ f (c), the method further includes:
substituting the theoretical output power c of the radio frequency power supply into a functional relation F;
calculating the expected power p of the load of the radio frequency power supply according to the p ═ F (c);
and outputting the expected power p of the load of the radio frequency power supply.
According to a second aspect of the present invention, there is provided a calibration apparatus for output power of a radio frequency power supply, the radio frequency power supply being used for driving a load, the calibration apparatus comprising an obtaining module and a calculating module;
the acquisition module is configured to acquire a plurality of preset output calibration powers a [ i ], i being 1, 2.
Acquiring a plurality of actual powers B [ i ], i ═ 1, 2. > n of the load, wherein the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one;
the calculation module is configured to obtain a functional relationship B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to the plurality of preset output calibration powers a [ i ] and the plurality of actual powers bi ], and
and taking a functional relation F between the preset output calibration power and the actual power as a functional relation between a theoretical output power C of the radio frequency power supply and an expected power P of the load, wherein P is F (C).
Optionally, the obtaining a functional relation B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ] includes:
sequencing the preset output calibration power ai according to a preset sequence;
calculating the ratio of the actual power B [ i ] corresponding to each preset output calibration power A [ i ] to the preset output calibration power A [ i ] in sequence according to the preset sequence:
fitting the relation between all the ratios k [ i ] and the preset output calibration power A [ i ], and obtaining a functional relation k between the ratio k between the actual power B of the load and the preset output calibration power A of the radio frequency power supply and the preset output calibration power A, which is G (A);
and determining the functional relation B (F) (A) according to the functional relation k (G) (A).
Optionally, the functional relationship k ═ g (a) includes:
optionally, the obtaining module is further configured to obtain an expected power p of the load;
the calculation module is further to: substituting the expected power p of the load into a functional relation F, and calculating the theoretical output power c of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises a setting module for setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
Optionally, the obtaining module is further configured to obtain theoretical output power c of the radio frequency power supply;
the calculation module is further configured to bring the theoretical output power c of the radio frequency power supply into a functional relationship F, and calculate an expected power p of a load of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises an output module for outputting a desired power p of a load of the radio frequency power supply.
According to the calibration method provided by the embodiment of the invention, on one hand, the sectional calibration of the output power of the radio frequency power supply can be realized, and the calibration accuracy is improved; on the other hand, the method can automatically run on line, and the calibration process does not need user participation.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a system block diagram corresponding to a calibration method of output power of a conventional radio frequency power supply;
FIG. 2 is a flow chart of a method for calibrating output power of a radio frequency power supply according to an embodiment of the present invention;
FIG. 3 is a flow chart of a method for calibrating output power of a radio frequency power supply according to another embodiment of the present invention;
FIG. 4 is a flow chart of a method for calibrating output power of a radio frequency power supply according to another embodiment of the present invention;
fig. 5 is a block diagram of an apparatus for calibrating output power of a radio frequency power supply according to an embodiment of the present invention.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
According to a first aspect of the present invention, there is provided a calibration method for output power of a radio frequency power supply, the radio frequency power supply being used for driving a load, as shown in fig. 2, the calibration method comprising the following steps.
In step S1, a plurality of preset output calibration powers a [ i ], i being 1,2, …, n of the rf power source are obtained, that is, a plurality of preset output calibration powers of the rf power source are obtained.
Firstly, a user inputs information such as the model, the maximum range and the like of a radio frequency power supply to be calibrated on an upper computer, and the upper computer provides a human-computer interaction interface for the user.
In one example, a user sets a preset output calibration power to be calibrated at the host computer. And the upper computer sets the output power of the radio frequency power supply by using the preset output calibration power. The output power of the radio frequency power supply and the actual power of the load without any losses are equal to the powers identified by these preset output calibration powers. Or, the theoretical output power of the rf power supply is the actual power of the load without any loss.
In another example, the upper computer automatically generates the preset output calibration powers according to a set proportion of the maximum measuring range of the radio frequency power supply. For example, 30%, 60% and 100% of the maximum range are taken as the plurality of preset output calibration powers.
Specifically, the upper computer sets the output power of the radio frequency power supply in sequence according to the preset output calibration powers. Simultaneously, the lower computer or a Programmable Logic Controller (PLC) communicates with the upper computer, for example, and reads the preset output calibration power from the upper computer.
In step S2, a plurality of actual powers B [ i ], i being 1,2, …, n of the load are obtained, and the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one.
Firstly, the upper computer sequences a plurality of preset output calibration powers according to a preset sequence, and then sequentially sets the output powers of the radio frequency power supply according to the sequencing result. The predetermined order is, for example, a large-to-small order or a small-to-large order.
Specifically, the actual power of the load is detected by a sensor and sent to a lower computer or a PLC. And the lower computer or the PLC communicates with the upper computer so as to determine which preset output calibration power corresponds to the actual power of the load obtained currently.
In step S3, a functional relationship B ═ f (a) between the actual power B of the load and the preset output calibration power a of the rf power supply is obtained according to the plurality of preset output calibration powers a [ i ] and the plurality of actual powers B [ i ].
The step S3 may be executed by the lower computer or the PLC, or may be completed by the upper computer after the upper computer communicates with the lower computer to obtain the actual power of the load. The calculation method is as follows:
first, a plurality of the preset output calibration powers ai are sorted in a predetermined order. For example, a plurality of said preset output calibration powers are ordered in a predetermined order. For example, three preset output calibration powers A1, A2, A3 are obtained in descending order.
Then, calculating the ratio k [ i ] between the actual power B [ i ] corresponding to each preset output calibration power A [ i ] and the preset output calibration power A [ i ] in sequence according to the preset sequence:
and sequentially setting the radio frequency power supply according to the preset sequence and the preset output calibration power and detecting the corresponding actual power of the load.
For example, the detected actual power of the load is B1, B2, B3 from small to large, and three ratios are obtained in this step:
next, fitting the relationship between all the ratios k [ i ] and the preset output calibration power a [ i ], to obtain a functional relationship k ═ g (a) between the ratio k between the actual power B of the load and the preset output calibration power a of the radio frequency power supply and the preset output calibration power a.
For example, it is assumed that the ratio of the actual power of the load to the theoretical output power of the RF power source varies linearly between the theoretical output powers of two adjacent RF power sources (e.g., A1 and A2). The actual power B of the load corresponding to a preset output calibration power A of a radio frequency power supply between A1 and A2 is obtained by fitting, and is determined according to the following formula:
finally, the functional relation B ═ f (a) is determined from the functional relation k ═ g (a).
Specifically, will
With less belt
Then B ═ f (a) can be calculated.
According to the method, the ratio k between adjacent preset output calibration powers satisfies the following relationship:
with specific reference to the foregoing example, for example, between A [1] and A [2], the formula can be converted to:
it should be noted that, in this fitting method, the ratio of the actual power of the load to the ideal output power of the rf power supply can be set to be constant under the minimum output calibration power.
It should be noted that other fitting methods can be designed by those skilled in the art to obtain a functional relationship between the actual power of the load and the theoretical output power of the rf power supply. The fitting method includes, for example, a least squares method and the like.
In step S4, taking the functional relationship F between the preset output calibration power a and the actual power B as the functional relationship between the theoretical output power C of the rf power source and the expected power P of the load: p ═ f (c).
The theoretical output power C of the rf power source is a set value of the output power of the rf power source, and the expected power of the load is a predicted value of the power of the load calculated according to the set value and the functional relationship.
The step is to determine the functional relationship between the preset output calibration power of the rf power supply and the actual power of the corresponding load as the functional relationship between the theoretical output power of the rf power supply and the expected power of the load.
In the above functional relationships, for example, P ═ f (C) indicates only the functional relationship between P and C, and the functional relationship is not limited to an explicit functional relationship.
The method can be automatically completed in a program running mode, online automatic running is realized, and the user does not need to participate in the calibration process; in addition, the output power of the radio frequency power supply is calibrated in a segmented mode, so that the calibration accuracy is improved.
Further, in this embodiment, the present invention provides a fitting method, that is, between the powers indicated by the adjacent preset output calibration powers, the ratio of the actual power of the load to the preset output calibration power of the rf power source (i.e. the ratio of the expected power of the load to the theoretical output power of the rf power source) has a certain rule of variation, rather than being kept constant. Thus, the nonlinear characteristic of the error of the output power of the radio frequency power supply and the nonlinear specific between the loss of the coaxial cable and the output power of the radio frequency power supply can be reflected better than the prior art. The fitting precision is affected by the stability of the output power of the radio frequency power supply on each output calibration power, and the influence of the instability of the maximum output power of the radio frequency power supply on the fitting precision is reduced to a certain extent.
After obtaining the functional relationship P ═ f (c), the calculation is performed by a computer program, and the person skilled in the art can perform the following operations: if a person skilled in the art needs a load to obtain an expected power p, calculating to obtain how large theoretical output power c needs to be set for the radio frequency power supply through the functional relation; or when a person skilled in the art sets a specific theoretical output power c in the rf power supply, the actual power p of the load can be predicted through the above functional relationship.
That is, after determining the functional relationship P ═ f (c), the method further includes:
bringing the expected power p of the load into a functional relationship F;
calculating theoretical output power c of the radio frequency power supply according to p ═ F (c);
and setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
Or, after determining the functional relationship P ═ f (c), further comprising:
substituting the theoretical output power c of the radio frequency power supply into a functional relation F;
calculating the expected power p of the load of the radio frequency power supply according to the p ═ F (c);
and outputting the expected power p of the load of the radio frequency power supply.
The two operations can be completely or partially completed on the upper computer, can also be completely or partially completed on the lower computer or the PLC, and can also be completed on independent computer equipment, and the like.
For example, the desired power is input at the host computer. This expected power is also the actual power of the load desired by the user. And the upper computer sends the expected power to the lower computer or the PLC. After the lower computer or the PLC finishes the operation, the corresponding theoretical output power is sent to the upper computer, and the upper computer sets a radio frequency power supply according to the theoretical output power.
For another example, a specific theoretical output power is input into the upper computer, and the upper computer calculates and displays the expected power of the corresponding load.
Referring to the flowchart of the embodiment shown in fig. 3, the calibration method for the output power of the rf power supply provided by this embodiment is embodied in the previous embodiment.
In step S31, the maximum range of the rf power source is queried.
In step S32, the output calibration power of the rf power source and the amount of the output calibration power are queried.
In step S33, the output calibration powers of the radio frequency power supplies are sorted in order of arrival from small.
In step S34, the minimum uncalibrated output calibration power is selected, the upper computer sets the output power of the rf power source accordingly, and the lower computer or PLC reads the actual power of the corresponding load from the sensor.
In step S35, the ratio of the actual power of the load to the output calibration power of the corresponding rf power source is recorded.
In step S36, it is determined whether all output calibration powers are completely calibrated, and if so, the process goes to step S37, otherwise, the process goes to step S34.
In step S37, the lower computer or the PLC obtains a function relationship of the ratio of the actual power of the load to the theoretical output power of the rf power source as a function of the theoretical output power of the rf power source according to the fitting method provided in step S3.
After the functional relationship is obtained, if the user wants the actual power of the load to be a certain specific power, the specific power is only needed to be brought into the functional relationship, and then how much output power is needed to set the radio frequency power supply can be calculated.
Taking 380 machines as an example, the type of the radio frequency power supply is AE PMNT1513, the range of the radio frequency power supply is 1500W, and the default output calibration power (the set output power of the radio frequency power supply) of the upper computer is 50% and 100%. The upper computer and the lower computer (or PLC) automatically finish the automatic calibration of the output power of the radio frequency power supply. Referring to fig. 4, the detailed flow is as follows.
In step S41, the maximum range of the radio frequency power supply is set. Namely, the user inputs the maximum measuring range of the radio frequency power supply on the upper computer.
In step S42, the output calibration power of the rf power supply and its amount are determined. In this example, the default output calibration power set by the upper computer is 2, i.e., 750W and 1500W.
In step S43, the output calibration powers are sorted. In this example, the upper computer defines calibration point 1 as 750W and calibration point 2 as 1500W.
In step S44, the upper computer sets the theoretical output power of the rf power supply to 750W, and the upper computer notifies the lower computer (or PLC) to read the actual power P1 of the load from the sensor.
In step S45, the lower computer (or PLC) determines a scaling factor corresponding to the theoretical output power 750W. The scaling factor in this step is
In step S46, the upper computer sets the theoretical output power of the rf power supply to 1500W, and the upper computer notifies the lower computer (or PLC) to read the actual power P2 of the load from the sensor.
In step S47, the lower computer (or PLC) determines a scaling factor corresponding to the theoretical output power 1500W. The proportionality factor obtained in this step is
In step S48, the lower computer (or PLC) calculates a functional relationship between the ratio of the actual power of the load to the theoretical output power of the rf power supply and the theoretical output power of the rf power supply according to the results of step S45 and step S47. And sending the functional relationship to an upper computer. Therefore, when a user wants the actual power of the load to be a certain specific power, the upper computer can calculate the theoretical output power of the radio frequency power supply according to the functional relation and the specific power, and the radio frequency power supply is set according to the theoretical output power, so that the power of the load can be the power expected by the user. After the lower computer (or PLC) can also obtain the functional relation, the lower computer (or PLC) calculates and obtains the theoretical output power of the corresponding radio frequency power supply by combining the expected power of the user of the load obtained from the upper computer, and the lower computer (or PLC) directly sets the radio frequency power supply according to the theoretical output power.
In this embodiment, taking the method provided in the foregoing embodiment as an example, the functional relationship is:
when the expected power P of the load is between 0 and P1, the method defaults to the interval, the ratio of the actual power of the load to the ideal output power of the radio frequency power supply is constant, and the output power A of the radio frequency power supply needs to be set to be
When the expected power P of the load is between P1 and P2, the output power A of the radio frequency power supply needs to be set to be calculated according to the following formula:
it should be noted that, in order to further increase the reliability of calibration, the expected power of the load may also be used as one of the output calibration powers.
According to a second aspect of the present invention, as shown in fig. 5, a calibration apparatus for output power of an rf power supply is provided to implement the aforementioned calibration method. The calibration device is, for example, a lower computer, a PLC, an upper computer, a separate computer device, or a combination thereof. The radio frequency power supply is used for driving a load, and the calibration device comprises an acquisition module 31 and a calculation module 32.
The obtaining module 31 is configured to obtain a plurality of preset output calibration powers a [ i ], i being 1, 2.
The calculation module 32 obtains a functional relationship B ═ F (a) between an actual power B of the load and a preset output calibration power a of the rf power supply from a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ], and takes the functional relationship F between the preset output calibration power and the actual power as a functional relationship between a theoretical output power C of the rf power supply and an expected power P of the load, P ═ F (C).
Optionally, the obtaining a functional relation B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ] includes:
sequencing the preset output calibration power ai according to a preset sequence;
calculating the ratio of the actual power B [ i ] corresponding to each preset output calibration power A [ i ] to the preset output calibration power A [ i ] in sequence according to the preset sequence:
fitting the relation between all the ratios k [ i ] and the preset output calibration power A [ i ], and obtaining a functional relation k between the ratio k between the actual power B of the load and the preset output calibration power A of the radio frequency power supply and the preset output calibration power A, which is G (A);
and determining the functional relation B (F) (A) according to the functional relation k (G) (A).
Optionally, the obtaining module 31 is further configured to obtain an expected power p of the load;
the calculation module 32 is further configured to: substituting the expected power p of the load into a functional relation F, and calculating the theoretical output power c of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises a setting module 33 for setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
Optionally, the obtaining module 31 is further configured to obtain theoretical output power c of the radio frequency power supply;
the calculating module 32 is further configured to bring the theoretical output power c of the radio frequency power supply into the functional relationship F, and calculate an expected power p of a load of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises an output module 34 for outputting a desired power p of the load of the radio frequency power supply.
Reference is made in particular to the description of the calibration method section of the output power of the rf power supply.
According to the calibration device for the radio frequency power supply provided by the second aspect of the invention, multi-interval calibration can be realized, the calibration accuracy is improved, and online automatic calibration is realized. Further improving the accuracy of the calibration.
Optionally, in various embodiments provided by the present invention, the rf power source 1 drives the load 4 through the matcher 3.
Alternatively, in various embodiments provided by the present invention, the sensor 5 is integrated on the matching device 3, so that the sensor 5 and the matching device 3 are a single component, and the sensor 5 does not need to be separately provided.
Alternatively, in various embodiments provided by the present invention, the load 4 may be an actual load (e.g., a plasma chamber) or a dummy load. The method can be directly calibrated on the site of a client, does not depend on the simulation load, and reduces the difficulty of calibration.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (6)
1. A method for calibrating output power of a radio frequency power supply, the radio frequency power supply being configured to drive a load, the method comprising:
acquiring a plurality of preset output calibration powers ai of the radio frequency power supply, wherein i is 1,2, …, n;
acquiring a plurality of actual powers B [ i ], i being 1,2, …, n of the load, wherein the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one;
obtaining a functional relation B ═ F (A) between the actual power B of the load and the preset output calibration power A of the radio frequency power supply according to the preset output calibration powers A [ i ] and the actual powers B [ i ];
taking a functional relation F between the preset output calibration power A and the actual power B as a functional relation between a theoretical output power C of the radio frequency power supply and an expected power P of the load: p ═ f (c);
the obtaining a functional relation B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ], includes:
sequencing the preset output calibration power ai according to a preset sequence;
calculating the ratio k [ i ] between the actual power B [ i ] corresponding to each preset output calibration power A [ i ] and the preset output calibration power A [ i ] in sequence according to the preset sequence:
fitting the relation between all the ratios k [ i ] and the preset output calibration power A [ i ], and obtaining a functional relation k between the ratio k between the actual power B of the load and the preset output calibration power A of the radio frequency power supply and the preset output calibration power A, which is G (A);
determining a functional relation B ═ F (A) according to the functional relation k ═ G (A);
the functional relationship k ═ g (a) includes:
2. calibration method according to claim 1, characterized in that it further comprises, after determining the functional relation P ═ f (c):
bringing the expected power p of the load into a functional relationship F;
calculating theoretical output power c of the radio frequency power supply according to p ═ F (c);
and setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
3. Calibration method according to claim 1, characterized in that it further comprises, after determining the functional relation P ═ f (c):
substituting the theoretical output power c of the radio frequency power supply into a functional relation F;
calculating the expected power p of the load of the radio frequency power supply according to the p ═ F (c);
and outputting the expected power p of the load of the radio frequency power supply.
4. A calibration device for output power of a radio frequency power supply, wherein the radio frequency power supply is used for driving a load, and the calibration device comprises an acquisition module and a calculation module;
the obtaining module is configured to obtain a plurality of preset output calibration powers a [ i ], i being 1,2, …, n,
acquiring a plurality of actual powers B [ i ], i being 1,2, …, n of the load, wherein the plurality of actual powers B [ i ] of the load correspond to the plurality of preset output calibration powers a [ i ] one to one;
the calculation module is configured to obtain a functional relationship B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to the plurality of preset output calibration powers a [ i ] and the plurality of actual powers bi ], and
taking a functional relation F between the preset output calibration power and the actual power as a functional relation between a theoretical output power C of the radio frequency power supply and an expected power P of the load, wherein P is F (C);
the obtaining a functional relation B ═ f (a) between an actual power B of the load and a preset output calibration power a of the radio frequency power supply according to a plurality of the preset output calibration powers a [ i ] and a plurality of the actual powers B [ i ], includes:
sequencing the preset output calibration power ai according to a preset sequence;
calculating the ratio of the actual power B [ i ] corresponding to each preset output calibration power A [ i ] to the preset output calibration power A [ i ] in sequence according to the preset sequence:
fitting the relation between all the ratios k [ i ] and the preset output calibration power A [ i ], and obtaining a functional relation k between the ratio k between the actual power B of the load and the preset output calibration power A of the radio frequency power supply and the preset output calibration power A, which is G (A);
determining a functional relation B ═ F (A) according to the functional relation k ═ G (A);
the functional relationship k ═ g (a) includes:
5. calibration device according to claim 4,
the obtaining module is further used for obtaining the expected power p of the load;
the calculation module is further to: substituting the expected power p of the load into a functional relation F, and calculating the theoretical output power c of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises a setting module for setting the radio frequency power supply according to the theoretical output power c of the radio frequency power supply.
6. Calibration device according to claim 4,
the acquisition module is also used for acquiring the theoretical output power c of the radio frequency power supply;
the calculation module is further configured to bring the theoretical output power c of the radio frequency power supply into a functional relationship F, and calculate an expected power p of a load of the radio frequency power supply according to p ═ F (c);
the calibration device further comprises an output module for outputting a desired power p of a load of the radio frequency power supply.
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| CN113110687B (en) * | 2021-04-02 | 2023-06-16 | 北京北方华创微电子装备有限公司 | Sweep frequency power supply, control method of output power of sweep frequency power supply and semiconductor process equipment |
| CN113406527B (en) * | 2021-05-13 | 2023-05-16 | 北京北方华创微电子装备有限公司 | Radio frequency power supply control system, calibration method and device thereof and semiconductor device |
| CN113903642B (en) * | 2021-09-24 | 2024-04-16 | 北京北方华创微电子装备有限公司 | Control method and control device for output power of power source and semiconductor processing equipment |
| CN117691837B (en) * | 2024-02-04 | 2024-04-16 | 深圳市广能达半导体科技有限公司 | Method, device, equipment and medium for calibrating radio frequency power supply under different frequencies |
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