CN110531111B - Fiber bragg grating acceleration sensor with temperature compensation function and measuring method thereof - Google Patents
Fiber bragg grating acceleration sensor with temperature compensation function and measuring method thereof Download PDFInfo
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- CN110531111B CN110531111B CN201910749436.3A CN201910749436A CN110531111B CN 110531111 B CN110531111 B CN 110531111B CN 201910749436 A CN201910749436 A CN 201910749436A CN 110531111 B CN110531111 B CN 110531111B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
- G01P15/032—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means by measuring the displacement of a movable inertial mass
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Abstract
The invention provides a miniaturized fiber bragg grating acceleration sensor with temperature compensation and a measuring method thereof. The sensor has simple structure, small volume and high frequency; the device has the advantages of small volume, high temperature resistance, capability of working in a small space, capability of realizing distributed detection and the like.
Description
Technical Field
The invention belongs to the technical field of mechanical vibration measurement, and particularly relates to a miniaturized fiber bragg grating acceleration sensor with temperature compensation and a measurement method thereof.
Background
In recent years, fiber grating sensors are widely developed and applied at home and abroad, and vibration measurement in the fields of national defense, national economy and the like is more and more extensive. The vibration sensor may characterize the vibration signal in terms of vibration acceleration or amplitude, frequency. The existing methods for detecting vibration can be classified into electrical detection methods and optical detection methods according to the physical manner of detecting vibration signals. The electrical detection method uses an electrical measurement acceleration sensor that senses vibration acceleration using a mass, an elastic element, and a conversion element. The acceleration of the type is mainly of three types, namely capacitance type, piezoelectric type and electromagnetic induction type. However, the electrical detection method is easily interfered by electromagnetic waves and is not favorable for remote detection. In the optical detection method, the acceleration of the fiber bragg grating is developed rapidly because of the advantages of lightness, safety, easy realization of remote measurement, strong anti-electromagnetic interference capability, high temperature resistance, corrosion resistance and the like. The conventional fiber grating vibration acceleration sensor mainly uses a diaphragm, an elastic sheet, an elastic beam and other structures to bear an external force caused by acceleration, so that the central wavelength of the fiber grating drifts, and the fiber grating wavelength drift is obtained by a demodulator to measure the acceleration. Although the acceleration sensor using the elastic beam, the diaphragm spring and other structures as the elastic element can meet the requirement of low-frequency vibration; however, the dynamic characteristic of the structure is influenced by the rigidity of the structure body, and the size of the whole structure is large, so that the structure is not beneficial to installation in a small space and vibration detection; in addition, most fiber grating acceleration sensors are only used for detecting vibration and cannot realize simultaneous measurement of temperature and vibration. The invention aims to design a miniaturized fiber bragg grating acceleration sensor with temperature compensation and a measuring method thereof for measuring acceleration information, and the sensor has small size and wide measuring range and can realize multi-parameter measurement of vibration and temperature.
Disclosure of Invention
Aiming at the problems in the prior art, the technical scheme adopted by the invention for solving the problems in the prior art is as follows:
a miniaturized fiber grating acceleration sensor with temperature compensation is characterized in that: the sensor comprises an upper shell, a lower shell and a mass block positioned between the upper shell and the lower shell, wherein two rectangular elastic plates are symmetrically arranged on two sides of the mass block, a threaded hole is formed in the middle of the mass block and is used for being connected with a screw rod, the bottom of the screw rod is connected with an elastic main body, the elastic main body comprises two side columnar outer walls, a pair of supporting columns and a connecting block positioned in the middle are arranged between the columnar outer walls, the outer walls are connected with the supporting columns and the connecting block through hinges, the bottom of the screw rod penetrates through the connecting block in the middle of the elastic main body, optical fiber grooves are formed in the lower surfaces of the two supporting columns of the elastic main body, optical fiber grooves are formed in the bottoms of the outer walls on two sides of the elastic main body, two optical fibers are arranged in the sensor, one of the two optical fibers is fixed in the optical fiber grooves at the bottoms of the two supporting columns through prestress, grating- #1FBG is carved on the optical fiber, one end of the other optical fiber is fixed in the optical fiber groove at the bottom of one side upright column, the other end is led out from the light groove at the bottom of the outer wall, a No. 2 grating- #2FBG is carved on the optical fiber, and the drift amount of the central wavelength of the optical fiber grating is obtained through demodulation equipment to obtain the vibration acceleration information and the change of the environmental temperature.
The upper shell is a U-shaped frame with a downward opening, the bottoms of two ends of the U-shaped frame are connected with the tops of outer walls on two sides of the elastic main body in a matched mode, and the outer edges of the rectangular elastic plates on two sides of the mass block are fixed between the upper shell and the outer walls.
The hinge is a block body with a narrow middle part and wide two ends, and two outer walls, two supporting columns and a connecting block are sequentially connected together through four hinges.
A measurement method for a miniaturized fiber bragg grating acceleration sensor with temperature compensation is characterized by comprising the following steps:
step S1, during measurement, the lower shell of the sensor is fixed on a measured object, the bottom surface of the lower cover is kept to be installed with the surface of the measured object, the bottom surface of the sensor is kept horizontal, when the measured object vibrates, the mass block moves up and down under the action of inertia, the elastic plate deforms, the deformation of the elastic plate is transferred to the connecting block in the elastic main body through the screw rod, the connecting block also moves up and down along the Z axis, when the connecting block moves up and down, the two supporting columns rotate slightly around the hinge along the opposite directions of the Y axis, and the #1FBG fixed on the supporting columns obtains the drift of the central wavelength; ambient temperature changes cause a shift in the center wavelength of the #2 FBG;
step S2, establishing a relation model between the acceleration of the measured object and the #1FBG wavelength drift amount; and establishing a relation model between the environmental temperature change and the #2FBG wavelength drift amount.
The specific steps of step S2 are:
step S21: under the action of inertia, the mass block generates vertical downward inertia force m2azThe inertial force makes the connecting blocks in the elastic plate and the elastic main body generate the same displacement, the constraint of the mass block is removed, and the sensing system is under the action of the inertial force of the mass block, the acting force of the optical fiber and the restoring force of the hinge according to the Dalebel theorem, and the mechanical balance equation is as follows:
2m1aZδl1+m2aZδl2-2k2l2δ2-4k1βδβ-4kfΔlfδΔlf＝0 (1)
F＝F1+F2＝m2az (2)
in the above formula, F1、F2Acting forces of the elastic plate and the connecting block on the mass block are respectively; m is1、m2The mass of each strut and mass block; a isZIs the vibration acceleration in the Z direction; delta l1、δl2、ΔlfRespectively displacement of the strut, the mass block and one end of the optical fiber fixed point; k is a radical offIs the optical fiber axial stiffness coefficient; k is a radical of1Is the hinge rotational stiffness; beta is the torsion angle of the hinge;
within a certain vibration excitation range, the torsion angle beta of the hinge is small, and then the displacement expressions of the strut, the mass block and one end of the optical fiber fixed point are respectively as follows:
l1＝(R+c1/2)β (3)
l2＝(c1+2R)β (4)
wherein R is the cutting radius of the hinge; c. C1Is the length of the strut; h is1The height of the strut below the hinge; lfThe distance between two fixed end points of the optical fiber; alpha is the included angle between the fixed point at the inner side of the optical fiber and the connecting line of the rotation center of the hinge in the Z direction, b1Is the width of the strut; c. C2、b2、h2The length, the width and the height of the mass block are respectively; let ρ be1、ρ2The material densities of the support column and the mass block are respectively, and the mass expressions are respectively as follows:
m1＝ρ1(2R+t+h1)c1b1 (6)
m2＝p2(c2b2h2) (7)
the distance between the two fixed end points of the optical fiber is as follows: lf＝2R+c4 (8)
In the formula, c4For the length of the connecting block, the optical fiber can be regarded as a spring here, and by combining the relationship between the axial stiffness coefficient of the optical fiber and the distance between two fixed end points of the optical fiber grating, the stiffness expression is as follows:
in the formula, EfTensile modulus of elasticity of the optical fiber; a. thefIs the cross-sectional area of the optical fiber;
r, b and t are respectively the cutting radius, width and thickness of the hinge structure; the hinge is an important part in the elastic main body, when the mass block transfers the motion to the connecting block by the aid of the screw rod, the connecting block moves up and down to enable the two supporting columns to slightly rotate around the hinge, so that the fiber bragg grating adhered in the optical fiber grooves of the supporting columns generates axial deformation, and the rotating rigidity k of the hinge structure is realized1Is an important parameter influencing the performance of the sensor, and the rotation rigidity of the hinge is obtained according to an empirical formula of the rigidity of the hinge, namely
In the formula, qmIs the central angle of the hinge; e is the elastic modulus of the flexible hinge material; f. of2Is an intermediate variable, and the expression is:
wherein i is R/t;
adopt the rectangle elastic plate to be favorable to reducing horizontal vibration interference, its rigidity expression is:
in the formula, E1The elastic modulus of a rectangular elastic plate material; l5、b5、h5The length, the width and the height of the rectangular elastic plate are respectively; the elastic plates on two sides of the mass block can be regarded as being connected in parallel, and the total rigidity of the elastic plates is 2k2；
In the simultaneous above formula, the minor twist angle β of the hinge is:
horizontal displacement delta l of one end of optical fiber fixed point on supportfComprises the following steps:
setting the distance between the fixed end points of the optical fibers on the two struts to be lfThe width of the rectangular flexible beam is b, and the axial strain delta epsilon of the first grating #1FBG1Comprises the following steps:
step S22: according to the strain and temperature sensing mechanism of the fiber grating, the relationship between the shift amount of the central wavelength of #1FBG and the strain and temperature is as follows:
in the formula, λ1The central wavelength of the No. 1 grating after applying certain prestress; delta lambda1The central wavelength drift amount of the fiber grating; delta epsilon1Is the strain of the fiber grating; p is a radical ofeIs the elasto-optic coefficient of the fiber; alpha is alphafIs the coefficient of thermal expansion of the optical fiber; xifIs the thermo-optic coefficient of the fiber; delta t is the temperature variation of the working environment of the sensor;
similarly, the relationship between the central wavelength drift amount of #2FBG and the temperature is:
the simultaneous expression can obtain the shift amount Delta lambda 'of the center wavelength of the #1FBG caused by vibration'1With its strain delta epsilon1The relation of (1):
step S23: obtaining the sensitivity S of the sensor in the Z-axis direction according to the expressions of the step S21 and the step S22ZComprises the following steps:
step S24: according to the expressions of the step 22 and the step 23, the acceleration of the measured object along the Z-axis direction is obtained as follows:
that is, the acceleration vibration signal of the object to be measured is obtained from the wavelength drift amount of the fiber bragg grating.
The invention has the following advantages:
the sensor has simple structure, small volume and high frequency; establishing a relation between the acceleration and the wavelength quantity of the long-period fiber grating, and obtaining the acceleration information of the vibration signal by measuring the wavelength change of the fiber grating; the rectangular elastic plate is adopted, so that the sensor works more stably; the elastic main body is used as an elastic element, so that vibration and temperature multi-parameter simultaneous detection can be realized; the device has the advantages of small volume, high temperature resistance, capability of working in a small space, capability of realizing distributed detection and the like.
Drawings
FIG. 1 is a perspective view of a sensor structure according to the present invention;
FIG. 2 is a block diagram of the integrated spring plate and mass of the sensor of the present invention;
FIG. 3 is a perspective view of the elastomeric body of the sensor of the present invention;
FIG. 4 is a schematic view of the forced deformation of the rectangular compliant beam-mass-spring body of the sensor of the present invention;
in the figure: 1. an upper shell; 2. a mass block; 3. a screw; 4. an elastic body; 5. an optical fiber; 6. a lower case; 7. grating number one (#1 FBG); 8. grating II (#2FBG), 9. colloid; 3-1, connecting blocks; 3-2. outer wall; 3-3. a hinge; 3-4. a pillar.
Detailed Description
The technical solution of the present invention is further described in detail below by way of embodiments and with reference to the accompanying drawings, as shown in fig. 1 to 4, a miniaturized fiber grating acceleration sensor with temperature compensation is characterized in that: comprises an upper shell 1, a lower shell 6, a mass block 2 positioned between the upper shell and the lower shell, two rectangular elastic plates are symmetrically arranged on two sides of the mass block, a threaded hole is arranged in the middle of the mass block 2 and is used for being connected with a screw rod 3, an elastic main body 4 is connected with the bottom of the screw rod, the elastic main body 4 comprises two side columnar outer walls 3-2, a pair of supporting columns 3-4 and a connecting block 3-1 positioned in the middle are arranged between the columnar outer walls, the outer walls are connected with the supporting columns and the connecting blocks through hinges 3-3, the bottom of the screw rod 3 passes through the connecting block in the middle of the elastic main body, the lower surfaces of the two supporting columns of the elastic main body are respectively provided with an optical fiber groove, two optical fibers are arranged in a sensor, one of the two optical fibers is fixed in the optical fiber grooves at the bottoms of the two supporting columns through prestress, and a No. 1 grating (# 1) FBG 7 is carved on the optical fiber, one end of the other optical fiber is fixed in the optical fiber groove at the bottom of the upright post at one side, the other end is led out from the light groove at the bottom of the outer wall, a No. 2 grating (#2FBG)8 is carved on the optical fiber,
the upper shell 1 is a U-shaped frame with a downward opening, the bottoms of two ends of the U-shaped frame are connected with the tops of outer walls on two sides of the elastic main body in a matched mode, and the outer edges of the rectangular elastic plates on two sides of the mass block are fixed between the upper shell and the outer walls.
The mass block 2 and the rectangular elastic plate are of an integrated structure, a threaded hole is formed in the middle of the mass block and is used for being connected with the screw rod 3, and the mass block 2 moves up and down along the Z axis under the inertia effect to enable the elastic plate to generate micro deformation;
the screw rod 3 fixedly connects the mass block 2 with a connecting body in the elastic main body 4 through a thread structure, and simultaneously can transmit the deformation of the elastic plate to a strut in the elastic main body, so that the free end of the strut generates displacement along the Y axis;
the hinges 3-3 are blocks with narrow middle parts and wide two ends, and two outer walls, two pillars and a connecting block are sequentially connected together through four hinges.
A measurement method for a miniaturized fiber bragg grating acceleration sensor with temperature compensation is characterized by comprising the following steps: step S1, during measurement, the lower shell of the sensor is fixed on a measured object, the bottom surface of the lower cover is kept to be installed with the surface of the measured object, the bottom surface of the sensor is kept horizontal, when the measured object vibrates, the mass block moves up and down under the action of inertia, the elastic plate deforms, the deformation of the elastic plate is transferred to the connecting block in the elastic main body through the screw rod, the connecting block also moves up and down along the Z axis, when the connecting block moves up and down, the two supporting columns rotate slightly around the hinge along the opposite directions of the Y axis, and the #1FBG fixed on the supporting columns obtains the drift of the central wavelength; ambient temperature changes cause a shift in the center wavelength of the #2 FBG;
step S2, establishing a relation model between the acceleration of the measured object and the #1FBG wavelength drift amount; and establishing a relation model between the environmental temperature change and the #2FBG wavelength drift amount.
The specific steps of step S2 are:
step S21: under the action of inertia, the mass block generates vertical downward inertia force m2azThe inertial force makes the elastic plate and the connecting block in the elastic main body produce the same displacement to release the restraint of the mass block, and the sensing system is under the action of the inertial force of the mass block, the acting force of the optical fiber and the restoring force of the hinge according to the Dalebel theoremThe mechanical equilibrium equation is:
2m1aZδl1+m2aZδl2-2k2l2δ2-4k1βδβ-4kfΔlfδΔlf＝0 (1)
F＝F1+F2＝m2az (2)
in the above formula, F1、F2Acting forces of the elastic plate and the connecting block on the mass block are respectively; m is1、m2The mass of each strut and mass block; a isZIs the vibration acceleration in the Z direction; delta l1、δl2、ΔlfRespectively displacement of the strut, the mass block and one end of the optical fiber fixed point; k is a radical offIs the optical fiber axial stiffness coefficient; k is a radical of1Is the hinge rotational stiffness; beta is the torsion angle of the hinge;
within a certain vibration excitation range, the torsion angle beta of the hinge is small, and then the displacement expressions of the strut, the mass block and one end of the optical fiber fixed point are respectively as follows:
l1＝(R+c1/2)β (3)
l2＝(c1+2R)β (4)
wherein R is the cutting radius of the hinge; c. C1Is the length of the strut; h is1The height of the strut below the hinge; lfThe distance between two fixed end points of the optical fiber; alpha is the included angle between the fixed point at the inner side of the optical fiber and the connecting line of the rotation center of the hinge in the Z direction, b1Is the width of the strut; c. C2、b2、h2The length, the width and the height of the mass block are respectively; let ρ be1、ρ2The material densities of the support column and the mass block are respectively, and the mass expressions are respectively as follows:
m1＝ρ1(2R+t+h1)c1b1 (6)
m2＝ρ2(c2b2h2) (7)
the distance between the two fixed end points of the optical fiber is as follows: lf＝2R+c4 (8)
In the formula, c4For the length of the connecting block, the optical fiber can be regarded as a spring here, and by combining the relationship between the axial stiffness coefficient of the optical fiber and the distance between two fixed end points of the optical fiber grating, the stiffness expression is as follows:
in the formula, EfTensile modulus of elasticity of the optical fiber; a. thefIs the cross-sectional area of the optical fiber;
r, b and t are respectively the cutting radius, width and thickness of the hinge structure; the hinge is an important part in the elastic main body, when the mass block transfers the motion to the connecting block by the aid of the screw rod, the connecting block moves up and down to enable the two supporting columns to slightly rotate around the hinge, so that the fiber bragg grating adhered in the optical fiber grooves of the supporting columns generates axial deformation, and the rotating rigidity k of the hinge structure is realized1Is an important parameter influencing the performance of the sensor, and the rotation rigidity of the hinge is obtained according to an empirical formula of the rigidity of the hinge, namely
In the formula, qmIs the central angle of the hinge; e is the elastic modulus of the flexible hinge material; f. of2Is an intermediate variable, and the expression is:
wherein i is R/t;
adopt the rectangle elastic plate to be favorable to reducing horizontal vibration interference, its rigidity expression is:
in the formula, E1The elastic modulus of a rectangular elastic plate material; l5、b5、h5The length, the width and the height of the rectangular elastic plate are respectively; the elastic plates on two sides of the mass block can be regarded as being connected in parallel, and the total rigidity of the elastic plates is 2k2；
In the simultaneous above formula, the minor twist angle β of the hinge is:
horizontal displacement delta l of one end of optical fiber fixed point on supportfComprises the following steps:
setting the distance between the fixed end points of the optical fibers on the two struts to be lfThe width of the rectangular flexible beam is b, and the axial strain delta epsilon of the first grating #1FBG1Comprises the following steps:
step S22: according to the strain and temperature sensing mechanism of the fiber grating, the relationship between the shift amount of the central wavelength of #1FBG and the strain and temperature is as follows:
in the formula, λ1The central wavelength of the No. 1 grating after applying certain prestress; delta lambda1The central wavelength drift amount of the fiber grating; delta epsilon1Is the strain of the fiber grating; p is a radical ofeIs the elasto-optic coefficient of the fiber; alpha is alphafIs the coefficient of thermal expansion of the optical fiber; xifIs the thermo-optic coefficient of the optical fiber(ii) a Delta t is the temperature variation of the working environment of the sensor;
similarly, the relationship between the central wavelength drift amount of #2FBG and the temperature is:
the simultaneous expression can obtain the shift amount Delta lambda 'of the center wavelength of the #1FBG caused by vibration'1With its strain delta epsilon1The relation of (1):
step S23: obtaining the sensitivity S of the sensor in the Z-axis direction according to the expressions of the step S21 and the step S22ZComprises the following steps:
step S24: according to the expressions of the step 22 and the step 23, the acceleration of the measured object along the Z-axis direction is obtained as follows:
that is, the acceleration vibration signal of the object to be measured is obtained from the wavelength drift amount of the fiber bragg grating.
The protective scope of the present invention is not limited to the above-described embodiments, and it is apparent that various modifications and variations can be made to the present invention by those skilled in the art without departing from the scope and spirit of the present invention. It is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.
Claims (4)
1. A miniaturized fiber grating acceleration sensor with temperature compensation is characterized in that: the sensor comprises an upper shell, a lower shell and a mass block positioned between the upper shell and the lower shell, wherein two rectangular elastic plates are symmetrically arranged on two sides of the mass block, a threaded hole is formed in the middle of the mass block and is used for being connected with a screw rod, the bottom of the screw rod is connected with an elastic main body, the elastic main body comprises two side columnar outer walls, a pair of supporting columns and a connecting block positioned in the middle are arranged between the columnar outer walls, the outer walls are connected with the supporting columns and the connecting block through hinges, the bottom of the screw rod penetrates through the connecting block in the middle of the elastic main body, optical fiber grooves are formed in the lower surfaces of the two supporting columns of the elastic main body, optical fiber grooves are formed in the bottoms of the outer walls on two sides of the elastic main body, two optical fibers are arranged in the sensor, one of the two optical fibers is fixed in the optical fiber grooves at the bottoms of the two supporting columns through prestress, grating- #1FBG is carved on the optical fiber, one end of the other optical fiber is fixed in the optical fiber groove at the bottom of one side upright column, the other end is led out from the light groove at the bottom of the outer wall, a No. 2 grating- #2FBG is carved on the optical fiber, and the drift amount of the central wavelength of the optical fiber grating is obtained through demodulation equipment to obtain the vibration acceleration information and the change of the environmental temperature.
2. A miniaturized fiber grating acceleration sensor with temperature compensation as in claim 1, wherein: the upper shell is a U-shaped frame with a downward opening, the bottoms of two ends of the U-shaped frame are connected with the tops of outer walls on two sides of the elastic main body in a matched mode, and the outer edges of the rectangular elastic plates on two sides of the mass block are fixed between the upper shell and the outer walls.
3. A miniaturized fiber grating acceleration sensor with temperature compensation as in claim 1, wherein: the hinge is a block body with a narrow middle part and wide two ends, and two outer walls, two supporting columns and a connecting block are sequentially connected together through four hinges.
4. A method for measuring a miniaturized fiber grating acceleration sensor with temperature compensation as claimed in any one of claims 1-3, characterized by comprising the following steps:
step S1, during measurement, the lower shell of the sensor is fixed on a measured object, the bottom surface of the lower cover is kept to be installed with the surface of the measured object, the bottom surface of the sensor is kept horizontal, when the measured object vibrates, the mass block moves up and down under the action of inertia, the elastic plate deforms, the deformation of the elastic plate is transferred to the connecting block in the elastic main body through the screw rod, the connecting block also moves up and down along the Z axis, when the connecting block moves up and down, the two supporting columns rotate slightly around the hinge along the opposite directions of the Y axis, and the #1FBG fixed on the supporting columns obtains the drift of the central wavelength; ambient temperature changes cause a shift in the center wavelength of the #2 FBG;
step S2, establishing a relation model between the acceleration of the measured object and the #1FBG wavelength drift amount; and establishing a relation model between the environmental temperature change and the #2FBG wavelength drift amount.
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| CN113655238A (en) * | 2021-08-18 | 2021-11-16 | 深圳市畅格光电有限公司 | Acceleration sensor based on femtosecond fiber bragg grating |
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| CN114217092A (en) * | 2021-12-15 | 2022-03-22 | 武汉理工大学 | FBG acceleration sensor based on diaphragm and elliptical hinge |
| CN115061240A (en) * | 2022-04-21 | 2022-09-16 | 上海拜安传感技术有限公司 | Elastic beam structure, optical fiber filter and assembling method thereof |
| CN116499576B (en) * | 2023-06-27 | 2023-09-12 | 山东省计算中心（国家超级计算济南中心） | Fiber bragg grating vibration sensor and measuring method thereof |
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