CN110530903B - Arch bridge type moving platform for X-ray detection device - Google Patents
Arch bridge type moving platform for X-ray detection device Download PDFInfo
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- CN110530903B CN110530903B CN201910826548.4A CN201910826548A CN110530903B CN 110530903 B CN110530903 B CN 110530903B CN 201910826548 A CN201910826548 A CN 201910826548A CN 110530903 B CN110530903 B CN 110530903B
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Abstract
The invention discloses an arch bridge type motion platform for an X-ray detection device, which comprises a platform supporting frame, a three-axis linear motion mechanism and a two-axis rotary motion mechanism, wherein the platform supporting frame is provided with a support frame; the platform supporting frame comprises an arch bridge type frame, a horizontal supporting frame and a vertical supporting frame; two horizontal support frames are arranged, and the upper walls of the horizontal support frames are respectively fixed with two ends of the arch bridge type frame; a vertical support frame is arranged between the two side walls of the horizontal support frame, and the side walls of the vertical support frame are fixed with the two ends of the vertical support frame; the three-axis linear motion mechanism is fixedly arranged on the inner side of the vertical support frame; the two-axis rotary motion mechanism is fixedly arranged at the lower side of the top of the arch bridge type frame. According to the invention, through the arrangement of the arch bridge type frame, the internal stress distribution of the arch bridge type frame is relatively uniform compared with that of a square frame in the prior art, so that the modal shape vibration amplitude of the frame is relatively small, the resonance frequency of the frame is increased, the influence of environmental vibration on a motion platform is reduced, and the three-axis linear motion mechanism and the two-axis slewing mechanism are kept stable.
Description
Technical Field
The invention relates to the field of motion platforms, in particular to an arch bridge type motion platform for an X-ray detection device.
Background
The X-ray inspection apparatus is mainly directed to reliability inspection of integrated circuit packages, inspecting the circuit and its package to inspect the presence of defects in order to determine the cause of the defects, and has important applications in the field of semiconductor package inspection. The development of integrated circuit technology has placed the following requirements on the devices used for X-ray detection: 1) the motion platform has high stability so as to improve detail resolution. The resonance frequency of a motion platform of the X-ray detection device is improved, the environmental vibration isolation is improved, and the environmental vibration excitation is inhibited, so that the vibration of a ray tube, a working table surface and a detector surface is reduced; 2) the multi-axis motion can allow the detector to rotate relatively in a plurality of planes, so that the oblique scanning detection function of the object is realized; the object to be measured can move around three axes, so that the magnification is changed, and the object is kept in the view field of the detector; 3) the central amplification ratio is unchanged, and when the sample is subjected to oblique scanning detection, a point light source generated by X rays is always positioned on the sphere center of the spherical motion of the detector; 4) the center of the visual field is unchanged, the center of the visual field of the sample is unchanged in the vertical lifting process, and the X axis and the Y axis of the motion platform are required to be vertical to the Z axis; 5) the X-ray tube requires regular maintenance and the motion platform structure should be easy to maintain the X-ray tube.
In 2005, NordsonDage, usa, disclosed an X-ray manipulator (US7497617B2) whose technical features: the stage is movable in directions X, Y and Z, and the detector is movable along an arcuate frame, the ends of which are pivotally mounted by bearings and provided with counterweights. The technique has the following defects: the stability of the arched frame depends on the size of the counterweight and is poor.
In 2019, thirty-eighth research institute of china electronic technology group corporation proposed an X-ray detection device based on a five-axis motion platform (application number: 201910592325.6), which is characterized in that: a two-shaft swing mechanism is arranged above the square outer frame, and a three-shaft linear motion mechanism is arranged below the middle frame. The technique has the following defects: the five-axis motion platform has lower resonant frequency and poor anti-interference capability and is easy to be excited by external environment vibration; the perpendicularity error of the X, Y axis and the Z axis is large due to the cantilever structure, and the visual center changes in the sample lifting process.
Disclosure of Invention
The invention aims to provide an arch bridge type motion platform for an X-ray detection device, which has good stability and high resonant frequency.
The invention solves the technical problems through the following technical means:
an arch bridge type motion platform for an X-ray detection device comprises a platform supporting frame, a three-axis linear motion mechanism and a two-axis rotary motion mechanism; the platform supporting frame comprises an arch bridge type frame, a horizontal supporting frame and a vertical supporting frame; the number of the horizontal support frames is two, and the upper walls of the horizontal support frames are respectively fixed with two ends of the arch bridge type frame; a vertical support frame is arranged between the two side walls of the horizontal support frame, the side walls of the vertical support frame are fixed with the two ends of the vertical support frame, and the vertical support frame is of an inverted trapezoidal frame structure; the X-ray source assembly is fixed in the middle of the top end of the vertical support frame;
the three-axis linear motion mechanism is fixedly arranged on the inner side of the vertical support frame; the two-shaft rotary motion mechanism is fixedly arranged at the lower side of the top of the arch bridge type frame; the detector is fixed at the bottom of the two-axis rotary motion mechanism; according to the invention, through the arrangement of the arch bridge type frame, the internal stress distribution of the arch bridge type frame is relatively uniform compared with that of a square frame in the prior art, so that the modal shape vibration amplitude of the frame is relatively small, the resonance frequency of the frame is increased, the influence of environmental vibration on a motion platform is reduced, the three-axis linear motion mechanism and the two-axis rotary mechanism are kept stable, the X-ray tube, the working table and the detector are kept stable, and the detail identification capability of the X-ray is improved.
Preferably, the system further comprises a counterweight mechanism and a vibration isolator, wherein the counterweight mechanism comprises a leveling counterweight component and a gravity compensation counterweight component; the leveling counterweight components and the gravity compensation counterweight components are respectively provided with two groups, and the two groups of leveling counterweight components are symmetrically arranged on the front side walls of the two ends of the arch bridge type frame body; the two groups of gravity compensation counterweight components are symmetrically arranged on the front wall and the rear wall of the two ends of the arch bridge type frame body;
the vibration isolators are air floatation vibration isolation or rubber vibration isolation and are fixedly arranged at the bottoms of the front and rear ends of the frame bodies of the two vertical supporting frames; through the action of the vibration isolator, the modal vibration amplitude of the arch bridge type frame can be effectively reduced, and the influence of environmental vibration on the motion platform is reduced.
Preferably, the leveling weight assembly comprises a first pulley, a first traction rope, a first connecting rod and a first balancing weight; the first pulleys are symmetrically fixed on the front side walls of the two ends of the arch bridge type frame body, one end of the first traction rope penetrating through the pulleys is connected to a first connecting rod, the other end of the first traction rope is connected to a first balancing weight, and the other end of the first connecting rod is connected with the front end of the three-axis linear motion mechanism;
the gravity compensation counterweight component comprises a second pulley, a second traction rope, a second connecting rod and a second counterweight block; the second pulleys are symmetrically fixed on the rear side walls of the two ends of the arch bridge type frame body, one end of the second traction rope penetrating through the pulleys is connected to a second connecting rod, the other end of the second traction rope is connected to a second balancing weight, and the other end of the second connecting rod is connected to the rear end of the three-axis linear motion mechanism;
the weights of the first balancing weight and the second balancing weight are unequal;
a double-mass-block symmetrical structure with a simple structure is formed by the pulleys, the traction rope, the balancing weight and the connecting rod, the verticality error of the three-axis linear motion mechanism caused by the cantilever is compensated, and the characteristic that the center of the visual field of the sample is not changed in the vertical lifting process is realized; meanwhile, the design of a symmetrical structure of the double mass blocks is adopted in the driving direction of the motor, and the gravity action of the three-axis linear motion mechanism is compensated, so that the motion is uniform and stable in the lifting driving process, and the motion platform obtains higher motion precision.
Preferably, the three-axis linear motion mechanism comprises a Z-axis motion assembly, an X-axis motion assembly and a Y-axis motion assembly; the Z-axis moving assembly is fixedly arranged on the inner side of the vertical supporting frame, the X-axis moving assembly is fixedly arranged at the upper end of the Z-axis moving assembly, and the Y-axis moving assembly is fixedly arranged at the upper end of the X-axis moving assembly;
the triaxial linear motion mechanism is integrally in a reverse L shape, and the X-ray source assembly is installed without shielding and is easy to maintain.
Preferably, the Z-axis movement assembly comprises a first motor, a Z-axis slide rail, a nut and a sliding support frame; the first motor is arranged in the middle of the lower end of the vertical support frame through a motor mounting plate, and a lead screw of the first motor is fixed with the middle of the sliding support frame through a nut;
the first motors are symmetrically arranged on the trapezoidal waistline of the vertical support frame; sliding blocks on two sides of the sliding support frame are in sliding fit with the Z-axis sliding rail in the length direction; the top end of the sliding support frame is fixed with the lower end of the X-axis movement assembly.
Preferably, the X-axis motion assembly includes a first support frame, an X-axis slide rail, and a second motor; the first supporting frame is of a rectangular frame structure, and the left side and the right side of the bottom of the frame body of the first supporting frame are fixed with the two sides of the top end of the sliding supporting frame; the X-axis slide rail is arranged on the upper surface of the frame body of the first support frame in the X-axis direction; the second motor is arranged on the side surface of the frame body in the Y-axis direction of the first supporting frame; and a lead screw of the second motor is fixed with the lower end of the Y-axis movement assembly through an internal thread block, and the Y-axis movement assembly is ensured to be in sliding fit with the X-axis sliding rail in the length direction of the Y-axis movement assembly.
Preferably, the Y-axis moving assembly includes a second support frame, a Y-axis slide rail, a third motor, and a movable plate; the second supporting frame is of a rectangular frame structure, and the bottom of the second supporting frame is fixed with a lead screw of a third motor through an internal thread block; the Y-axis slide rail is arranged on the upper surface of the frame body of the second support frame in the Y-axis direction; the third motor is mounted on the side surface of the second support frame in the X-axis direction; the movable plate is fixed with a lead screw of the third motor through an internal thread block, and the movable plate is in sliding fit with the Y-axis slide rail in the length direction of the Y-axis slide rail.
Preferably, the two-axis rotary motion mechanism comprises a horizontal rotary device and a circular arc motion device; the horizontal rotating device is fixed on the lower side of the top of the arch bridge type frame; the arc motion device is fixedly arranged on the lower side of the horizontal rotation device; the axis of the X-ray source assembly is superposed with the vertical axis of the two-axis rotary motion mechanism; a point light source generated by the X-ray source assembly is superposed with the horizontal axis of the two-axis rotary motion mechanism;
the axis of the X-ray source assembly is superposed with the vertical axis of the two-axis rotary motion mechanism, and the generated point light source is superposed with the horizontal axis of the two-axis rotary motion mechanism, so that the central amplification ratio is unchanged; therefore, the invention has the characteristics of high stability, easy maintenance, five-axis motion, unchanged visual field center, unchanged central magnification ratio and the like.
Preferably, the horizontal slewing device comprises an upper mounting plate, a lower support plate, an arc connecting plate, a slewing motor, a slewing support frame and a slewing gear; the arch bridge type frame is provided with an installation groove in a jacking mode, and the upper installation plate is fixed in the installation groove; the rotary support frame is a bearing, inner teeth are arranged on the inner side of a bearing inner ring of the rotary support frame, and the top of the bearing inner ring of the rotary support frame is fixed at the bottom of the upper mounting plate;
the lower supporting plate is fixed at the bottom of the bearing outer ring of the rotary supporting frame, and a plurality of through holes which are uniformly distributed are formed in the position, which is positioned on the inner side of the bearing inner ring of the rotary supporting frame, on the lower supporting plate; the rotary motor is arranged at the bottom of the lower supporting plate, and an output shaft of the rotary motor penetrates through the through hole and is fixed with the axis position of the rotary gear; the rotary gear is meshed with inner teeth on a bearing inner ring of the rotary support frame; the top end of the arc connecting plate is fixed with the middle part of the bottom surface of the lower supporting plate, and the lower end of the arc connecting plate is of an arc structure; the arc motion device is fixed on the arc connecting plate;
through horizontal slewer's setting, install horizontal slewer on arched bridge formula frame top for horizontal slewer remains stable, utilizes horizontal slewer's rotation to drive circular arc telecontrol equipment's rotation simultaneously, and then drives the detector and move along horizontal slewer's circumferencial direction, can realize treating that the formation of image object is the circular shape scanning on the horizontal plane and detects.
Preferably, the circular arc motion device comprises a circular arc guide rail, a circular arc guide rail sliding block, a detector mounting plate, a motion motor and a motion gear; the arc top of the arc guide rail is fixed with the arc end of the arc connecting plate, and the inner arc surface of the arc guide rail is provided with inner teeth; the arc guide rail sliding block is arranged on the arc guide rail and is in sliding fit with the arc guide rail in the arc length direction;
the detector mounting plate is of an L-shaped connecting plate structure, and the upper end of a vertical plate of the detector mounting plate is fixed on the arc guide rail sliding block; the motion motor is arranged on a transverse plate of the detector mounting plate; the motion gear is fixed on an output shaft of the motion motor and is in meshed connection with the inner teeth of the arc guide rail; the detector is arranged at the bottom of the detector mounting plate;
through the setting of circular arc telecontrol equipment, it is fixed with the circular arc top and the circular arc connecting plate of circular arc guide rail for circular arc telecontrol equipment remains stable, utilizes the motion motor to drive detector mounting panel, detector and slides along circular arc guide rail simultaneously, can realize treating the 2.5 dimension wide-angle slope scanning detection of formation of image object.
The invention has the advantages that:
1. according to the invention, through the arrangement of the arch bridge type frame, the internal stress distribution of the arch bridge type frame is relatively uniform compared with that of a square frame in the prior art, so that the modal shape vibration amplitude of the frame is relatively small, the resonance frequency of the frame is increased, the influence of environmental vibration on a motion platform is reduced, the three-axis linear motion mechanism and the two-axis rotary mechanism are kept stable, the X-ray tube, the working table and the detector are kept stable, and the detail identification capability of the X-ray is improved.
2. The double-mass-block symmetrical structure with a simple structure is formed by the pulleys, the traction rope, the balancing weight and the connecting rod, the verticality error of the three-axis linear motion mechanism caused by the cantilever is compensated, and the characteristic that the center of the visual field of the sample is unchanged in the vertical lifting process is realized; meanwhile, the design of a symmetrical structure of the double mass blocks is adopted in the driving direction of the motor, and the gravity action of the three-axis linear motion mechanism is compensated, so that the motion is uniform and stable in the lifting driving process, and the motion platform obtains higher motion precision.
3. The triaxial linear motion mechanism is integrally in a reverse L shape, and the X-ray source assembly is installed without shielding and is easy to maintain.
4. The axis of the X-ray source assembly is superposed with the vertical axis of the two-axis rotary motion mechanism, and the generated point light source is superposed with the horizontal axis of the two-axis rotary motion mechanism, so that the central amplification ratio is unchanged; therefore, the invention has the characteristics of high stability, easy maintenance, five-axis motion, unchanged visual field center, unchanged central magnification ratio and the like.
Drawings
Fig. 1 is a schematic structural diagram of an arch bridge type moving platform for an X-ray detection apparatus according to a first embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a platform support frame according to a first embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an X-ray assembly and a detector assembly according to a first embodiment of the present invention;
fig. 4 is a schematic structural diagram of a three-axis linear motion mechanism according to a first embodiment of the present invention;
fig. 5 is a schematic structural view of a sliding support frame and a first support frame according to a first embodiment of the present invention;
fig. 6 is a schematic structural view of a two-axis rotary motion mechanism according to a first embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a horizontal swiveling device and a circular arc motion device according to a first embodiment of the present invention;
fig. 8 is a schematic front view of an arch bridge type moving platform for an X-ray detection apparatus according to a second embodiment and a third embodiment of the present invention;
fig. 9 is a schematic front view of a leveling weight assembly according to a second embodiment of the present invention;
fig. 10 is a schematic front view of a gravity compensation counterweight assembly according to a second embodiment of the present invention;
fig. 11 is a schematic structural view of a flat weight assembly and a gravity compensation weight assembly according to a second embodiment of the present invention.
The reference numbers illustrate:
1. a platform support frame; 11. an arch-bridge frame; 12. a horizontal support frame; 13. a vertical support frame; 2. a three-axis linear motion mechanism; 21. a Z-axis motion assembly; 211. a first motor; 212. a Z-axis slide rail; 213. a nut; 214. a sliding support frame; 22. an X-axis motion assembly; 221. a first support frame; 222. an X-axis slide rail; 223. a second motor; 23. a Y-axis motion assembly; 231. a second support frame; 232. a Y-axis slide rail; 233. a third motor; 234. a movable plate; 3. a two-axis rotary motion mechanism; 31. a horizontal turning device; 311. an upper mounting plate; 312. a lower support plate; 313. a circular arc connecting plate; 314. a rotary motor; 315. a rotating support frame; 316. a rotary gear; 32. a circular arc motion device; 321. a circular arc guide rail; 322. a circular arc guide rail slide block; 323. a detector mounting plate; 324. a motion motor; 325. a motion gear; 4. a counterweight mechanism; 41. leveling the counterweight assembly; 411. a first pulley; 412. a first pull cord; 413. a first connecting rod; 414. a first weight block; 42. a gravity compensating counterweight assembly; 421. a second pulley; 422. a second pull cord; 423. a second connecting rod; 424. a second counterweight block; 5. and a vibration isolator.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As shown in fig. 1 and fig. 2, the present embodiment discloses an arch bridge type moving platform for an X-ray detection apparatus, which includes a platform supporting frame 1, a three-axis linear motion mechanism 2 and a two-axis rotary motion mechanism 3; the platform supporting frame 1 comprises an arch bridge type frame 11, a horizontal supporting frame 12 and a vertical supporting frame 13; two horizontal support frames 12 are arranged, and the upper walls of the horizontal support frames 12 are respectively fixed with two ends of the arch bridge type frame 11; a vertical support frame 13 is arranged between two side walls of the horizontal support frame 12, and the side walls of the vertical support frame are fixed with two ends of the vertical support frame 12; the vertical support frame 13 is of an inverted trapezoidal frame structure;
as shown in fig. 3, the X-ray source assembly is fixed in the middle of the top end of the vertical support frame 13; the three-axis linear motion mechanism 2 is fixedly arranged on the inner side of the vertical support frame 13; the two-axis rotary motion mechanism 3 is fixedly arranged on the lower side of the frame top of the arch bridge type frame 11; the detector is fixed at the bottom of the two-axis rotary motion mechanism 3; according to the invention, through the arrangement of the arch bridge type frame 13, the internal stress distribution of the arch bridge type frame 13 is more uniform compared with that of a square frame in the prior art, so that the modal shape vibration amplitude of the frame is smaller, the resonance frequency of the frame is increased, the influence of environmental vibration on a motion platform is reduced, the three-axis linear motion mechanism 2 and the two-axis rotary mechanism 3 are kept stable, the stability of an X-ray tube, a working table and a detector is ensured, and the detail identification capability of the X-ray is improved.
As shown in fig. 4 and 5, the three-axis linear motion mechanism 2 includes a Z-axis motion assembly 21, an X-axis motion assembly 22, and a Y-axis motion assembly 23; the Z-axis moving assembly 21 is fixedly arranged on the inner side of the vertical support frame 13, the X-axis moving assembly 22 is fixedly arranged at the upper end of the Z-axis moving assembly 21, and the Y-axis moving assembly 23 is fixedly arranged at the upper end of the X-axis moving assembly 22; the triaxial linear motion mechanism 2 of this embodiment is wholly "gamma" type, and X ray source assembly installation is unshielded, easily maintains.
The Z-axis movement assembly 21 comprises a first motor 211, a Z-axis slide rail 212, a nut 213 and a sliding support frame 214; the first motor 211 is mounted in the middle of the lower end of the vertical support frame 13 through a motor mounting plate, and a lead screw of the first motor 211 is fixed in the middle of the sliding support frame 214 through a nut 213;
the first motor 211 is symmetrically arranged on the trapezoidal waist line of the vertical support frame 13; the sliding blocks on the two sides of the sliding support frame 214 are in sliding fit with the Z-axis slide rail 212 in the length direction; the top end of the sliding support frame 214 is fixed with the lower end of the X-axis moving component 22.
The X-axis moving assembly 22 includes a first support frame 221, an X-axis slide rail 222, and a second motor 223; the first supporting frame 221 is a rectangular frame structure, and the left and right sides of the bottom of the frame body of the first supporting frame 221 are fixed to the two sides of the top end of the sliding supporting frame 214; the X-axis slide rail 222 is disposed on the upper surface of the X-axis frame of the first support frame 221; the second motor 223 is attached to a side surface of the Y-axis direction frame of the first support frame 221; the lead screw of the second motor 223 is fixed with the lower end of the Y-axis moving assembly 23 through an internal thread block, and ensures that the Y-axis moving assembly 23 is in sliding fit with the X-axis slide rail 222 in the length direction thereof.
The Y-axis moving assembly 23 includes a second support frame 231, a Y-axis slide rail 232, a third motor 233, and a movable plate 234; the second support frame 231 is a rectangular frame structure, and the bottom of the second support frame 231 is fixed with a lead screw of the third motor 233 through an internal thread block; the Y-axis slide rail 232 is disposed on the upper surface of the Y-axis direction frame of the second support frame 231; the third motor 233 is attached to a side surface of the X-axis direction frame of the second support frame 231; the movable plate 234 and the lead screw of the third motor 233 are fixed by an internal thread block, and the movable plate 234 and the Y-axis slide rail 232 are ensured to be slidably fitted in the length direction thereof.
As shown in fig. 6 and 7, the two-axis rotary motion mechanism 3 includes a horizontal rotary device 31 and an arc motion device 32; the horizontal rotating device 31 is fixed at the lower side of the frame top of the arch bridge type frame 11; the circular arc motion device 32 is fixedly arranged at the lower side of the horizontal rotation device 31; the axis of the X-ray source assembly is superposed with the vertical axis of the two-axis rotary motion mechanism 3; a point light source generated by the X-ray source assembly is superposed with the horizontal axis of the two-axis rotary motion mechanism 3;
the axis of the X-ray source assembly is superposed with the vertical axis of the two-axis rotary motion mechanism 3, and the generated point light source is superposed with the horizontal axis of the two-axis rotary motion mechanism 3, so that the central amplification ratio is unchanged; therefore, the invention has the characteristics of high stability, easy maintenance, five-axis motion, unchanged visual field center, unchanged central magnification ratio and the like.
The horizontal slewing device 31 comprises an upper mounting plate 311, a lower support plate 312, an arc connecting plate 313, a slewing motor 314, a slewing support frame 315 and a slewing gear 316; an installation groove is arranged on the top of the arch bridge type frame 11, and the upper installation plate 311 is fixed in the installation groove; the rotary support frame 315 is a bearing, inner teeth are arranged on the inner side of a bearing inner ring of the rotary support frame 315, and the top of the bearing inner ring of the rotary support frame 315 is fixed at the bottom of the upper mounting plate 311;
the lower support plate 312 is fixed at the bottom of the bearing outer ring of the rotary support frame 315, and a plurality of uniformly distributed through holes are formed in the lower support plate 312 at the inner side of the bearing inner ring of the rotary support frame 315; the rotary motor 314 is installed at the bottom of the lower supporting plate 312, and an output shaft of the rotary motor 314 penetrates through the through hole and is fixed with the axis position of the rotary gear 316; the rotary gear 316 is meshed with the inner teeth on the bearing inner ring of the rotary support frame 315; the top end of the arc connecting plate 313 is fixed with the middle part of the bottom surface of the lower supporting plate 312, and the lower end of the arc connecting plate 312 is of an arc structure; the arc motion device 32 is fixed on the arc connecting plate 313;
through the setting of horizontal slewer 31, install horizontal slewer 31 at the 11 roof of arched bridge formula frame for horizontal slewer 31 remains stable, utilizes horizontal slewer 31's rotation to drive the rotation of circular arc telecontrol equipment 32 simultaneously, and then drives the detector and move along horizontal slewer 31's circumferencial direction, can realize treating that the formation of image object is the circular scanning on the horizontal plane and detects.
The arc motion device 32 comprises an arc guide rail 321, an arc guide rail slider 322, a detector mounting plate 323, a motion motor 324 and a motion gear 325; the arc top of the arc guide rail 321 is fixed with the arc connecting plate 313, and the inner arc surface of the arc guide rail 321 is provided with inner teeth; the arc guide rail sliding block 322 is arranged on the arc guide rail 321 and is in sliding fit with the arc guide rail 321 in the arc length direction;
the detector mounting plate 323 is of an L-shaped connecting plate structure, and the upper end of a vertical plate of the detector mounting plate 323 is fixed on the arc guide rail sliding block 322; the motion motor 324 is arranged on a transverse plate of the detector mounting plate 323; the motion gear 325 is fixed on the output shaft of the motion motor 324, and the motion gear 325 is engaged with the internal teeth of the arc guide rail 321; the detector is arranged at the bottom of the detector mounting plate 323;
the arc top of the arc guide rail 321 is fixed with the arc connecting plate 313 through the arrangement of the arc moving device 32, so that the arc moving device 321 is kept stable, and meanwhile, the moving motor 324 is utilized to drive the detector mounting plate 323 and the detector to slide along the arc guide rail 321, so that 2.5-dimensional large-angle inclined scanning detection of an object to be imaged can be realized.
The working principle of the embodiment is as follows: when the arch bridge type moving platform for the X-ray detection device provided by the invention is in a working state, firstly, the X-ray source assembly is arranged at the upper end of the middle part of the inner side of the vertical support frame 13, and rays emitted by the X-ray source assembly penetrate through the movable plate 234 and are positioned at the central position of the arc guide rail 321, so that the detailed characteristic position of the center of the visual field and the amplification ratio thereof are ensured not to change along with the change of the inclination angle in the process of oblique scanning imaging; then the three-axis linear motion mechanism 2 is controlled to move, the three-axis linear motion mechanism 2 can enable the movable plate 234 to move in three mutually perpendicular planes, so that the magnification is changed, firstly, the first motor 211 is operated, the lead screw of the first motor 211 drives the sliding support frame 214 to move up and down along the Z-axis slide rail 212, further, the first support frame 221, the second support frame 231 and the movable plate 234 are driven to move along the Z-axis direction, and a measured object positioned on the movable plate 234 can move along the Z-axis direction; then, the second motor 223 is operated, a lead screw of the second motor 223 drives the second support frame 231 and the movable plate 234 to move along the X-axis direction, and the object to be measured on the movable plate 234 can move along the X-axis direction; when the third motor 233 is operated, the lead screw of the third motor 233 drives the movable plate 234 to move along the Y-axis direction, and the object to be measured on the movable plate 234 can move along the X-axis direction; furthermore, the detector can rotate relatively and circularly in a plane, so that the function of oblique scanning detection of the object is realized; when the rotary motor 314 is operated, an output shaft of the rotary motor 314 drives the rotary gear 316 to rotate along the bearing inner ring of the rotary support frame 315, so as to drive the lower support plate 312 to do rotary motion, and the lower support plate 312 moves and simultaneously drives the circular arc motion device 32 to do rotary motion, so as to drive the detector arranged on the circular arc motion device 32 to do rotary motion; and finally, the motion motor 324 is operated, the output shaft of the motion motor 324 drives the motion gear 325 to perform arc motion along the arc guide rail 321, the arc guide rail slider 322 drives the detector mounting plate 323 to perform arc motion, and then the detector mounted on the detector mounting plate 323 performs arc motion, so that large-angle inclined scanning detection of the object to be imaged is realized.
Example two
As shown in fig. 8, this embodiment is different from the first embodiment in that it further includes a counterweight mechanism 4, where the counterweight mechanism 4 includes a leveling counterweight assembly 41 and a gravity compensation counterweight assembly 42; two groups of leveling counterweight components 41 and two groups of gravity compensation counterweight components 42 are arranged, and the two groups of leveling counterweight components 41 are symmetrically arranged on the front side walls of the two ends of the frame body of the arch bridge type frame 11; the two groups of gravity compensation counterweight components 42 are symmetrically arranged on the front wall and the rear wall of the two ends of the frame body of the arch bridge type frame 11;
as shown in fig. 9 and 11, the leveling weight assembly 41 includes a first pulley 411, a first traction rope 412, a first connecting rod 413 and a first counterweight 414; the first pulleys 411 are symmetrically fixed on the front side walls of the two ends of the frame body of the arch bridge type frame 11, one end of the first traction rope 412 passing through the pulleys 411 is connected to a first connecting rod 413, the other end of the first traction rope is connected to a first balancing weight 414, and the other end of the first connecting rod 413 is connected to the front end of the three-axis linear motion mechanism 2;
as shown in fig. 10 and 11, the gravity compensation weight assembly 42 includes a second pulley 421, a second traction rope 422, a second connecting rod 423 and a second counterweight 424; the second pulleys 421 are symmetrically fixed on the rear side walls of the two ends of the frame body of the arch bridge type frame 11, one end of the second traction rope 422 passing through the pulleys 421 is connected to the second connecting rod 423, the other end of the second traction rope is connected to the second balancing weight 424, and the other end of the second connecting rod 423 is connected to the rear end of the three-axis linear motion mechanism 2;
the weights of the first weight 414 and the second weight 424 are different;
a double-mass-block symmetrical structure with a simple structure is formed by the pulleys, the traction rope, the balancing weight and the connecting rod, the verticality error of the three-axis linear motion mechanism 2 caused by the cantilever is compensated, and the characteristic that the center of the visual field of the sample is not changed in the vertical lifting process is realized; meanwhile, the design of a symmetrical structure of double mass blocks is adopted in the driving direction of the motor, and the gravity action of the three-axis linear motion mechanism 2 is compensated, so that the motion is uniform and stable in the lifting driving process, and the motion platform obtains higher motion precision.
EXAMPLE III
As shown in fig. 8, the present embodiment is different from the first and second embodiments in that a vibration isolator 5 is further provided, the vibration isolator 5 is an air flotation vibration isolation or a rubber vibration isolation, and the vibration isolators 5 are fixedly disposed at the bottoms of the front and rear ends of the frame body of the two vertical support frames 13; through the action of the vibration isolator 5, the modal shape amplitude of the arch bridge type frame 11 can be effectively reduced, and the influence of environmental vibration on the motion platform is reduced.
The vertical support frames 13 of the embodiment can be further arranged into two groups, the two groups of vertical support frames 13 are symmetrically fixed between the two horizontal support frames 12, the two sides of the three-axis linear motion mechanism 2 are respectively fixed with the two groups of vertical support frames 12, and the two sides of the three-axis linear motion mechanism 2 are supported and fixed, so that the stability of the three-axis linear motion mechanism 2 can be further improved.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (6)
1. An arch bridge type motion platform for an X-ray detection device, characterized in that: the device comprises a platform supporting frame, a three-axis linear motion mechanism and a two-axis rotary motion mechanism; the platform supporting frame comprises an arch bridge type frame, a horizontal supporting frame and a vertical supporting frame; the number of the horizontal support frames is two, and the upper walls of the horizontal support frames are respectively fixed with two ends of the arch bridge type frame; a vertical support frame is arranged between the two side walls of the horizontal support frame, and the side walls of the vertical support frame are fixed with the two ends of the vertical support frame; an X-ray source assembly is fixed in the middle of the top end of the vertical support frame;
the three-axis linear motion mechanism is fixedly arranged on the inner side of the vertical support frame; the two-shaft rotary motion mechanism is fixedly arranged at the lower side of the top of the arch bridge type frame;
the counterweight mechanism comprises a leveling counterweight component and a gravity compensation counterweight component; the leveling counterweight components and the gravity compensation counterweight components are respectively provided with two groups, and the two groups of leveling counterweight components are symmetrically arranged on the front side walls of the two ends of the arch bridge type frame body; the two groups of gravity compensation counterweight components are symmetrically arranged on the front wall and the rear wall of the two ends of the arch bridge type frame body;
the vibration isolators are air floatation vibration isolation or rubber vibration isolation and are fixedly arranged at the bottoms of the front and rear ends of the frame bodies of the two vertical supporting frames;
the leveling counterweight component comprises a first pulley, a first traction rope, a first connecting rod and a first counterweight block; the first pulleys are symmetrically fixed on the front side walls of the two ends of the arch bridge type frame body, one end of the first traction rope penetrating through the pulleys is connected to a first connecting rod, the other end of the first traction rope is connected to a first balancing weight, and the other end of the first connecting rod is connected with the front end of the three-axis linear motion mechanism;
the gravity compensation counterweight component comprises a second pulley, a second traction rope, a second connecting rod and a second counterweight block; the second pulleys are symmetrically fixed on the rear side walls of the two ends of the arch bridge type frame body, one end of the second traction rope penetrating through the pulleys is connected to a second connecting rod, the other end of the second traction rope is connected to a second balancing weight, and the other end of the second connecting rod is connected to the rear end of the three-axis linear motion mechanism; a point light source generated by the X-ray source assembly is superposed with the horizontal axis of the two-axis rotary motion mechanism;
the two-axis rotary motion mechanism comprises a horizontal rotary device and an arc motion device; the horizontal rotating device is fixed on the lower side of the top of the arch bridge type frame; the arc motion device is fixedly arranged on the lower side of the horizontal rotation device;
the horizontal rotating device comprises an upper mounting plate, a lower supporting plate, an arc connecting plate, a rotating motor, a rotating support frame and a rotating gear; the arch bridge type frame is provided with an installation groove in a jacking mode, and the upper installation plate is fixed in the installation groove; the rotary support frame is a bearing, inner teeth are arranged on the inner side of a bearing inner ring of the rotary support frame, and the top of the bearing inner ring of the rotary support frame is fixed at the bottom of the upper mounting plate;
the lower supporting plate is fixed at the bottom of the bearing outer ring of the rotary supporting frame, and a plurality of through holes which are uniformly distributed are formed in the position, which is positioned on the inner side of the bearing inner ring of the rotary supporting frame, on the lower supporting plate; the rotary motor is arranged at the bottom of the lower supporting plate, and an output shaft of the rotary motor penetrates through the through hole and is fixed with the axis position of the rotary gear; the rotary gear is meshed with inner teeth on a bearing inner ring of the rotary support frame; the top end of the arc connecting plate is fixed with the middle part of the bottom surface of the lower supporting plate, and the lower end of the arc connecting plate is of an arc structure; the arc motion device is fixed on the arc connecting plate.
2. An arch bridge type motion platform for an X-ray detection device according to claim 1, wherein: the three-axis linear motion mechanism comprises a Z-axis motion assembly, an X-axis motion assembly and a Y-axis motion assembly; the Z-axis movement assembly is fixedly arranged on the inner side of the vertical support frame, the X-axis movement assembly is fixedly arranged at the upper end of the Z-axis movement assembly, and the Y-axis movement assembly is fixedly arranged at the upper end of the X-axis movement assembly.
3. An arch bridge type motion platform for an X-ray detection device according to claim 2, wherein: the Z-axis motion assembly comprises a first motor, a Z-axis slide rail, a nut and a slide support frame; the first motor is arranged in the middle of the lower end of the vertical support frame through a motor mounting plate, and a lead screw of the first motor is fixed with the middle of the sliding support frame through a nut;
the first motors are symmetrically arranged on the vertical supporting frame; sliding blocks on two sides of the sliding support frame are in sliding fit with the Z-axis sliding rail in the length direction; the top end of the sliding support frame is fixed with the lower end of the X-axis movement assembly.
4. An arch bridge type motion platform for an X-ray detection device according to claim 3, wherein: the X-axis movement assembly comprises a first support frame, an X-axis slide rail and a second motor; the first supporting frame is of a rectangular frame structure, and the left side and the right side of the bottom of the frame body of the first supporting frame are fixed with the two sides of the top end of the sliding supporting frame; the X-axis slide rail is arranged on the upper surface of the frame body of the first support frame in the X-axis direction; the second motor is arranged on the side surface of the frame body in the Y-axis direction of the first supporting frame; and a lead screw of the second motor is fixed with the lower end of the Y-axis movement assembly through an internal thread block, and the Y-axis movement assembly is ensured to be in sliding fit with the X-axis sliding rail in the length direction of the Y-axis movement assembly.
5. An arch bridge type motion platform for an X-ray detection device according to claim 4, wherein: the Y-axis movement assembly comprises a second supporting frame, a Y-axis sliding rail, a third motor and a movable plate; the second supporting frame is of a rectangular frame structure, and the bottom of the second supporting frame is fixed with a lead screw of a third motor through an internal thread block; the Y-axis slide rail is arranged on the upper surface of the frame body of the second support frame in the Y-axis direction; the third motor is mounted on the side surface of the second support frame in the X-axis direction; the movable plate is fixed with a lead screw of the third motor through an internal thread block, and the movable plate is in sliding fit with the Y-axis slide rail in the length direction of the Y-axis slide rail.
6. An arch bridge type motion platform for an X-ray detection device according to claim 1, wherein: the arc motion device comprises an arc guide rail, an arc guide rail sliding block, a detector mounting plate, a motion motor and a motion gear; the arc top of the arc guide rail is fixed with the arc end of the arc connecting plate, and the inner arc surface of the arc guide rail is provided with inner teeth; the arc guide rail sliding block is arranged on the arc guide rail and is in sliding fit with the arc guide rail in the arc length direction;
the detector mounting plate is of an L-shaped connecting plate structure, and the upper end of a vertical plate of the detector mounting plate is fixed on the arc guide rail sliding block; the motion motor is arranged on a transverse plate of the detector mounting plate; the motion gear is fixed on an output shaft of the motion motor and is connected with the inner teeth of the arc guide rail in a meshing manner.
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| CN111986822B (en) * | 2020-07-27 | 2022-11-29 | 哈尔滨工业大学 | X-ray characterization detector precision adjustment carrying mechanism |
| CN114280086B (en) * | 2021-11-16 | 2024-01-23 | 中国电子科技集团公司第三十八研究所 | CT imaging device |
| CN116642912B (en) * | 2023-07-27 | 2024-02-20 | 北京机械工业自动化研究所有限公司 | Horizontal industrial nondestructive testing device and system |
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| CN1985162A (en) * | 2004-07-05 | 2007-06-20 | 达格精度工业有限公司 | X-ray manipulator |
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