CN110529617A - A kind of isolating valve and ion injection machine table - Google Patents
A kind of isolating valve and ion injection machine table Download PDFInfo
- Publication number
- CN110529617A CN110529617A CN201910906725.XA CN201910906725A CN110529617A CN 110529617 A CN110529617 A CN 110529617A CN 201910906725 A CN201910906725 A CN 201910906725A CN 110529617 A CN110529617 A CN 110529617A
- Authority
- CN
- China
- Prior art keywords
- valve
- valve disc
- face
- isolating
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/312—Line blinds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Abstract
The present invention relates to semiconductor processing equipment technical field more particularly to a kind of isolating valve and ion injection machine table, which includes a valve disc, and the edge in the first face of valve disc has chamfering；The edge in valve disc second face opposite with the first face is equipped with a chip shield, or is also provided with chamfering at the edge in the second face of valve disc.Chamfering is arranged by the edge in the first face of valve disc in the present invention; at the edge in the second face of valve disc, chip shield or chamfering are set; make isolating valve during prolonged use, can prevent valve disc and jacket inner wall from rubbing and generate impurity, to influence the quality of wafer.
Description
Technical field
The present invention relates to semiconductor processing equipment technical field more particularly to a kind of isolating valves and ion injection machine table.
Background technique
In the production process of semiconductor, carried out under vacuum conditions there are many process requirement, such as in ion implanting work
During skill, as shown in Figure 1, wafer, during be sent in atmospheric environment and processed in vacuum cavity 1, centre needs
There is a transitional cavity 10, is needed in this conversion process in ion implantation apparatus for the conversion of atmosphere and vacuum environment
Vacuum pump 2 is set on the cavity 1 of platform and some isolating valves 3 are used cooperatively to realize.
In existing isolating valve, as shown in Fig. 2, being pneumatically isolated valve includes cylinder mainly using valve is pneumatically isolated
301, by the valve rod 302 in gas-powered cylinder 301, so that valve rod 302 drives valve disc 303 to move, to realize isolating valve
Open or close.As shown in figure 3, the structure based on existing isolating valve, since isolating valve is in prolonged switching process,
Valve rod 302 can shift (as shown in Figure 4), and then directly result in valve disc 303 and rub during the motion with the generation of sheath 304
It wipes, and valve disc 303 is generally made of metal material, the inner wall of valve disc 303 and sheath 304 can generate small in friction process
Metal fragment, metal fragment are accumulated in sheath 304 or around it, as shown in Fig. 2, with the inflation or pumping of transitional cavity 10
Gas, metal fragment can be fallen in crystal column surface, so that many defects can be generated in the subsequent technical process of wafer, for example, brilliant
Round surface is by metal fragment scratch etc., to influence product yield.
Therefore it provides a kind of new isolating valve, to improve isolating valve during opening and closing, valve disc and sheath it
Between friction, be a problem to be solved.
Summary of the invention
For the above-mentioned problems in the prior art, a kind of isolating valve and ion injection machine table are now provided.
Specific technical solution is as follows:
The present invention provides a kind of isolating valve, including a valve disc, which is characterized in that the edge in the first face of the valve disc has
Chamfering；
The edge in the valve disc second face opposite with first face is equipped with a chip shield, or in the valve disc
The edge in the second face is also provided with the chamfering.
Preferably, the chamfering is arc angling.
Preferably, the valve disc includes one first valve disc body and one second valve disc body；
First face is located on the first valve disc body；
Second face is located on the second valve disc body；
The first valve disc body and the second valve disc body are parallel to each other and keep the setting of default spacing, and make described the
It is opposite with second face on one side.
It preferably, further include a valve rod, one end of the valve rod is fixedly connected with the first valve disc body backwards to described first
Face and the second valve disc body backwards to second face while.
Preferably, further include a cylinder, a piston element is equipped in the cylinder, the other end of the valve rod protrudes into described
In cylinder, and connect the piston element.
Preferably, the first face of the valve disc is equipped with an annular groove, and a sealing ring is embedded in the annular groove.
Preferably, the edge in the second face of the valve disc has the step-like recess of an annular, and the chip shield is arranged
In in the step-like recess.
Preferably, the material of the chip shield is plastics.
It preferably, further include a sheath, the shape adaptation of the sheath and the valve disc, the sheath is connected to the gas
Cylinder is towards one end of the valve disc, and the valve rod passes through the sheath.
The present invention also provides a kind of ion injection machine table, the ion injection machine table include a vacuum cavity, at least one
Transitional cavity and at least one vacuum pump are equipped with a vacuum pipe, described between the transitional cavity and the vacuum pump
Vacuum pipe is equipped with isolating valve described above.
The beneficial effect of technical solution of the present invention is: providing a kind of improvement structure of isolating valve, specifically includes valve
The edge designs in the first face of disk are arc angling structure, install chip shield additional in the second face of valve disc or in the second face of valve disc
Edge be also provided with chamfering, during isolating valve prolonged use, prevent valve disc and sheath friction and produced in jacket inner wall
Raw metal fragment, and then avoid generating defect to wafer in the subsequent process.
Detailed description of the invention
With reference to appended attached drawing, to be described more fully the embodiment of the present invention.However, appended attached drawing be merely to illustrate and
It illustrates, and is not meant to limit the scope of the invention.
Fig. 1 is the structural schematic diagram of ion injection machine table in the prior art；
Fig. 2 is the structural schematic diagram of isolating valve in the prior art；
Fig. 3 is the structural schematic diagram of valve disc in the prior art；
Fig. 4 is the structural schematic diagram of valve disc when valve rod deviates in the prior art；
Fig. 5 is the structural schematic diagram of the isolating valve in the embodiment of the present invention；
Fig. 6 is the structural schematic diagram of the valve disc in the embodiment of the present invention；
Fig. 7 is the structural schematic diagram in the first face of the valve disc in the embodiment of the present invention；
Fig. 8 is the structural schematic diagram in the second face of the valve disc in the embodiment of the present invention；
Fig. 9 is the structural schematic diagram when isolating valve in the embodiment of the present invention is in close state；
Figure 10 is the structural schematic diagram when isolating valve in the embodiment of the present invention is in the open state.
In Fig. 1-10, appended drawing reference is respectively as follows: 1- vacuum cavity；2- vacuum pump；3- isolating valve；301- cylinder；302- valve
Bar；303- valve disc；3031- the first valve disc body；3032- the second valve disc body；304- sheath；305- chip shield；306- sealing ring；
307- quick coupling；308- connecting hole；10- transitional cavity.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art without creative labor it is obtained it is all its
His embodiment, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
The present invention will be further explained below with reference to the attached drawings and specific examples, but not as the limitation of the invention.
The present invention includes a kind of isolating valve, and the isolating valve includes a valve disc.As seen in figs. 5-6, the first face of valve disc 303
Edge have chamfering 3030；
The edge in second face opposite with the first face of valve disc 303 be equipped with a chip shield 305, for prevent valve disc 303 with
Friction is generated between sheath 304.
Specifically, since prolonged use may cause the deformation of valve rod 302 or offset, so that valve disc 303 and sheath 304
Inner wall generate friction, valve disc 303 is made of metal material, and will form metal fragment in friction process, metal fragment can be in chamber
Enter in vacuum cavity 1 when body pumping or air inlet with air-flow, to fall on the surface of wafer, thus in the subsequent technique of wafer
In the process, many defects can be generated, for example, the surface of wafer by metal fragment scratch etc., to influence product yield.
Further, in view of the foregoing drawbacks, the present embodiment proposes a kind of improvement structure of valve disc 303, as shown in fig. 7, valve
First face of disk 303 needs to be arranged sealing ring 306, to promote the isolation effect of isolating valve, and it is close due to being provided on the first face
Chip shield 305 can not be just arranged in seal 306 again, therefore, be arranged shown in Fig. 6 at the edge in the first face with sealing ring 306
Arc angling 3030 to reduce the generation of metal fragment, promoted and produced to reduce the friction between valve disc 303 and sheath 304
Product yield.
Specifically, through the above technical solutions, as shown in figure 8, chip shield is arranged at the second face edge of valve disc 303
305, to prevent valve disc 303 and the inner wall of sheath 304 from contacting, to generate metal fragment.It should be noted that setting neonychium
The better effect of circle 305, but due to being equipped with sealing ring 306 on the first face, then neonychium can not be installed on this same face
Therefore, in the present embodiment circle 305 uses setting arc angling 3030 on the first face and installs chip shield on the second surface
305 modes combined improve the structure of valve disc 303, the generation of metal fragment are effectively reduced, to promote wafer
Yield.
In another embodiment, chamfering structure (valve disc 303 is respectively provided at the edge in the first face of valve disc 303 and the second face
The second face chamfering it is not shown in the diagram go out), can also alleviate the friction between valve disc 303 and sheath 304 to a certain extent,
To reduce the generation of metal fragment.
As preferred embodiment, chip shield 305 is made of plastic material, and plastics are by several element groups of C, H, O
At, do not include metallic element, even if friction forms plastic scrap between chip shield 305 and sheath 304, the plastic scrap
It can relatively easily be removed during subsequent, not will cause wafer defect.
In a kind of preferably embodiment, as shown in figure 4, valve disc 303 includes the first valve disc body 3031 and the second valve disc body
3032, the first valve disc body 3031 and the second valve disc body 3032 can be disc, and one end of valve rod 302 is fixedly connected with first
Valve disc body 3031 backwards to the first face and the second valve disc body 3032 backwards to the second face while, the first face is located at the first valve disc
On body 3031, the second face is located on the second valve disc body 3032；First valve disc body 3031 and the second valve disc body 3032 be parallel to each other and
The setting of default spacing is kept, and keeps the first face of valve disc 303 opposite with the second face.
Specifically, through the above technical solutions, the first valve disc body 3031 and the second valve disc are fixed in one end of valve rod 302
Body 3032, so that valve rod 302 drives valve disc 303 mobile.
In a kind of preferably embodiment, as shown in fig. 7, the first face of valve disc 303 is equipped with an annular groove, a sealing ring
306 are embedded in annular groove；
As shown in figure 8, the second face of valve disc 303 has a step-like recess, chip shield 305 is sheathed on step-like recess
It is interior.
Specifically, chip shield 305 is ring structure, and the size fit with step-like recess, so that chip shield 305
It is sheathed in step-like recess, and chip shield 305 is fixed in step-like recess by multiple flat head screws.In this implementation
In example, the external diametrical extent of chip shield 305 is 60~80mm, and preferably 70mm, inside diameter ranges are 50~70mm, preferably
60mm。
In a kind of preferably embodiment, as shown in Figure 9 and Figure 10, the shape adaptation of sheath 304 and valve disc 303, sheath
304 are connected to cylinder 301 towards one end of valve disc 303, and valve rod 302 passes through sheath 304.
Specifically, when isolating valve is in close state, valve disc 303 stretches out outside sheath 304, and enters in vacuum pipe,
Transitional cavity and vacuum pump is isolated；When isolating valve is opened, valve disc 303 is retracted back in sheath 304, makes transitional cavity and true
Sky pump connection.
In a kind of preferably embodiment, as shown in figure 5, isolating valve includes cylinder 301, a piston is equipped in cylinder 301
Element, the other end of valve rod 302 protrudes into cylinder 301, and connects piston element；Isolating valve is equipped at least one quick coupling
307, for connecting compressed air pipe.
Specifically, isolating valve further includes the connecting hole 308 of connecting cable, and control system is sent out by cable to valve is pneumatically isolated
Send open signal or shutdown signal.For example, when control system to be pneumatically isolated valve send shutdown signal when, compressed air pipe to
The interacvity air-filling of cylinder 301, to push piston element, so that valve rod 302 be pushed to the outside of sheath 304.Fig. 9 show gas
State when dynamic isolating valve is closed, Figure 10 show the state being pneumatically isolated when valve is opened.It should be noted that the present invention is implemented
Example is improved primarily directed to the structure of valve disc 303, and the improvement structure of above-described embodiment is applicable not only to be pneumatically isolated valve, together
Sample is suitable for the other kinds of isolating valves such as motor-operated isolation valve, hydraulically operated isolation valve.
The embodiment of the present invention also provide a kind of ion injection machine table, including a vacuum cavity, at least one transitional cavity with
And at least one vacuum pump, a vacuum pipe is equipped between transitional cavity and vacuum pump；Vacuum pipe is equipped with any of the above-described reality
Apply the isolating valve of the valve disc composition in example.
The beneficial effect of technical solution of the present invention is: providing a kind of improvement structure of isolating valve, specifically includes valve
The edge designs in the first face of disk are arc angling structure, install chip shield additional in the second face of valve disc or the second of valve disc
The edge in face is also provided with arc angling, during isolating valve prolonged use, prevents valve disc with sheath friction and in sheath
Inner wall generates metal fragment, to influence the quality of wafer in subsequent technical process.
The foregoing is merely preferred embodiments of the present invention, are not intended to limit embodiments of the present invention and protection model
It encloses, to those skilled in the art, should can appreciate that all with made by description of the invention and diagramatic content
Equivalent replacement and obviously change obtained scheme, should all be included within the scope of the present invention.
Claims (10)
1. a kind of isolating valve, including a valve disc, which is characterized in that the edge in the first face of the valve disc has chamfering；
The edge in the valve disc second face opposite with first face is equipped with a chip shield, or the second of the valve disc
The edge in face is also provided with the chamfering.
2. isolating valve according to claim 1, which is characterized in that the chamfering is arc angling.
3. isolating valve according to claim 1, which is characterized in that the valve disc includes one first valve disc body and one second valve
Disk body；
First face is located on the first valve disc body；
Second face is located on the second valve disc body；
The first valve disc body and the second valve disc body are parallel to each other and keep the setting of default spacing, and make first face
It is opposite with second face.
4. isolating valve according to claim 3, which is characterized in that further include a valve rod, one end of the valve rod is fixed to be connected
Connect the first valve disc body backwards to first face and the second valve disc body backwards to second face while.
5. isolating valve according to claim 4, which is characterized in that further include a cylinder, be equipped with a piston in the cylinder
Element, the other end of the valve rod protrude into the cylinder, and connect the piston element.
6. isolating valve according to claim 1, which is characterized in that the first face of the valve disc be equipped with an annular groove, one
Sealing ring is embedded in the annular groove.
7. isolating valve according to claim 1, which is characterized in that the edge in the second face of the valve disc has an annular
Step-like recess, the chip shield are sheathed in the step-like recess.
8. isolating valve according to claim 1, which is characterized in that the material of the chip shield is plastics.
9. isolating valve according to claim 5, which is characterized in that further include a sheath, the sheath and the valve disc
Shape adaptation, the sheath is connected to the cylinder towards one end of the valve disc, and the valve rod passes through the sheath.
10. a kind of ion injection machine table, including a vacuum cavity, at least one transitional cavity and at least one vacuum pump, institute
It states and is equipped with a vacuum pipe between transitional cavity and the vacuum pump, which is characterized in that the vacuum pipe is equipped with such as right
It is required that any isolating valve in 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910906725.XA CN110529617A (en) | 2019-09-24 | 2019-09-24 | A kind of isolating valve and ion injection machine table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910906725.XA CN110529617A (en) | 2019-09-24 | 2019-09-24 | A kind of isolating valve and ion injection machine table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110529617A true CN110529617A (en) | 2019-12-03 |
Family
ID=68669933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910906725.XA Pending CN110529617A (en) | 2019-09-24 | 2019-09-24 | A kind of isolating valve and ion injection machine table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110529617A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2256260A (en) * | 1991-05-31 | 1992-12-02 | Warman Int Ltd | A seat assembly for a gate valve |
| US6338469B1 (en) * | 1997-01-22 | 2002-01-15 | Kalsi Engineering, Inc. | Flexible wedge gate valve |
| CN203784340U (en) * | 2014-04-02 | 2014-08-20 | 天津市永拓机械有限公司 | Valve plate of straight-through type gate valve |
| CN205260882U (en) * | 2015-08-26 | 2016-05-25 | 苏州日塑精密机械有限公司 | Dry cargo airplane of plastic pellet fortune material valve |
| CN108644399A (en) * | 2013-09-29 | 2018-10-12 | 应用材料公司 | Removable isolating valve shields plug-in package |
| CN208331303U (en) * | 2018-05-14 | 2019-01-04 | 苏州开天斧机械有限公司 | Valve plate equipment suitable for metalwork surface treatment |
-
2019
- 2019-09-24 CN CN201910906725.XA patent/CN110529617A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2256260A (en) * | 1991-05-31 | 1992-12-02 | Warman Int Ltd | A seat assembly for a gate valve |
| US6338469B1 (en) * | 1997-01-22 | 2002-01-15 | Kalsi Engineering, Inc. | Flexible wedge gate valve |
| CN108644399A (en) * | 2013-09-29 | 2018-10-12 | 应用材料公司 | Removable isolating valve shields plug-in package |
| CN203784340U (en) * | 2014-04-02 | 2014-08-20 | 天津市永拓机械有限公司 | Valve plate of straight-through type gate valve |
| CN205260882U (en) * | 2015-08-26 | 2016-05-25 | 苏州日塑精密机械有限公司 | Dry cargo airplane of plastic pellet fortune material valve |
| CN208331303U (en) * | 2018-05-14 | 2019-01-04 | 苏州开天斧机械有限公司 | Valve plate equipment suitable for metalwork surface treatment |
Non-Patent Citations (3)
| Title |
|---|
| 何业东等: "《材料腐蚀与防护概论》", 30 April 2005, 机械工业出版社 * |
| 袁飞: "机械设计与制造中的零件倒角思考", 《山东工业设计》 * |
| 赵育祥等: "《无机化工专业实习教材》", 30 June 1990, 化学工业出版社 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100961678B1 (en) | Opening and shutting valve and processing apparatus having the same | |
| US10184291B2 (en) | Door for closing a chamber opening in a chamber wall of a vacuum chamber | |
| CN109162982B (en) | Double-acting cylinder device without piston | |
| CN110529617A (en) | A kind of isolating valve and ion injection machine table | |
| CN204299877U (en) | A kind of axial seal structure for screw compressor | |
| CN201009097Y (en) | Knife discharging cylinder for ball high-speed electric principal axis | |
| CN109778138B (en) | Microwave plasma diamond film deposition equipment | |
| CN105202061A (en) | Clutch slave cylinder and clutch disengagement system | |
| CN204187023U (en) | Spool and use rapid escape valve and the pneumatic piston actuating mechanism of this spool | |
| CN203518528U (en) | Discharge device in drying machine | |
| CN109659213A (en) | Reaction chamber and semiconductor processing equipment | |
| CN101451626A (en) | Method for replacing valve sealing filler | |
| CN203652410U (en) | Novel mixing and conveying tank structure | |
| CN206694259U (en) | A kind of sliding-vane air compressor inlet valve and its compression main frame | |
| CN202948878U (en) | Novel guide sleeve of vacuum arc-extinguishing chamber | |
| CN204852417U (en) | Air cooling sealing device | |
| CN104500744A (en) | High-vacuum degree rotary sealing mechanism | |
| CN205859754U (en) | LED underwater lamp | |
| CN215806283U (en) | High temperature resistant shaft end sealing structure for powder equipment | |
| CN104047848A (en) | Vortex air compressor with built-in suction valve | |
| CN108953616A (en) | A kind of Tiebar structure for reaction chamber | |
| CN212898163U (en) | Pressure reduction transition cavity structure | |
| CN2926815Y (en) | Clamp with exhausting and aerating combination | |
| CN208804224U (en) | A kind of new Joining Structure formula rubber plug | |
| CN210045707U (en) | Annular axial air knife device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191203 |
|
| RJ01 | Rejection of invention patent application after publication |