CN110527953A - A kind of improved vacuum coating equipment cavity cooling device of structure - Google Patents
A kind of improved vacuum coating equipment cavity cooling device of structure Download PDFInfo
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- CN110527953A CN110527953A CN201910966987.5A CN201910966987A CN110527953A CN 110527953 A CN110527953 A CN 110527953A CN 201910966987 A CN201910966987 A CN 201910966987A CN 110527953 A CN110527953 A CN 110527953A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract
The invention discloses a kind of improved vacuum coating equipment cavity cooling devices of structure, including coating machine cavity, water cooling plant, the present invention is by being provided with water cooling plant in coating machine chamber outer surface, the inside spin convex block of inner casing body internal surface and coating machine cavity are subjected to contact sealing, the guiding gutter that inner casing body internal surface forms the decline of a spiral is split by inside spin convex block, water is imported by water inlet, water flow is exported along guiding gutter by water outlet, adequately contact plated film machine cavity body surface face, reach good cooling effect, by being provided with air cooling equipment in water cooling plant outer surface, by the way that inside spin convex block and coating machine cavity are carried out contact sealing, heat is led and gives inner casing ontology, wind guide channel is formed by external spiral heat dissipation convex block fitting outer cylinder again, it is worked by cooling fan energization, hot wind is discharged, cool breeze is led by air inlet Enter and blown over along wind guide channel, increase the area contacted with wind, improve heat dissipation effect, reduces the volume of device.
Description
Technical field
The present invention relates to vacuum coating equipment ancillary equipment related fields, specifically a kind of improved vacuum coating machine cavity of structure
Body cooling device.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
It includes vacuum ionic to evaporate, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition, main thought is divided into
Two kinds of evaporation and sputtering, evaporation coating are usually to heat target surface component is made to be evaporated out with atomic group or ionic species,
And it is deposited in substrate surface, film is formed by film forming procedure, for sputtering class plated film, can simply be interpreted as utilizing electronics
Or superlaser bombards target, and makes surface component be sputtered out with atomic group or ionic species, and be eventually deposited at base
Piece surface undergoes film forming procedure, ultimately forms film, vacuum coating equipment can generate a large amount of heat at work, need
It is cooled down by cooling device, to ensure that equipment works normally.
1 but existing water-cooling be usually that heat dissipation pipe is set in vacuum coating equipment chamber outer surface, or open up
Sink is radiated by heat dissipation pipe, and water does not contact directly with vacuum coating equipment cavity, and cooling effect is bad, by true
Empty coating machine chamber outer surface opens up sink and cools down, vacuum coating equipment chamber outer surface finite thickness, the small cooling of water flow
Effect is poor.
2, existing wind-cooling heat dissipating usually directly blows vacuum coating machine cavity by multiple fans progress spinning polygon degree
The outer surface of body is radiated, and area occupied, use is troublesome in poeration, and contact of the vacuum coating equipment chamber outer surface with air
Limited area, heat dissipation effect are poor.
The content of present invention
Therefore, in order to solve above-mentioned deficiency, it is cooling that the present invention provides a kind of improved vacuum coating equipment cavity of structure herein
Device.
The invention is realized in this way constructing a kind of improved vacuum coating equipment cavity cooling device of structure, the device packet
Include coating machine cavity, water cooling plant, air cooling equipment, sealing device, attachment device, water storage box, water pump, pump switch, power supply line,
First conduit and the second conduit, the coating machine cavity right end are provided with water storage box, set at the top of the water storage box with water pump bottom
The water inlet pipe set is fixedly connected, and the water pump front end is provided with pump switch, and water pump rear end is provided with power supply line, and described
One conduit right end and water storage box fixing seal, the water outlet seal of tube that second conduit bottom is arranged with water pump rear end are fixed, institute
It states water pump and pump switch is electrically connected with power supply line, the water cooling plant inner surface and the sealing of coating machine cavity are fixed, described
Water cooling plant outer surface is enclosed with air cooling equipment, and sealing is fixed at the top of the sealing device inner surface and coating machine cavity, described
It is tightly connected at the top of sealing device bottom and water cooling plant, the sealing device fits at the top of air cooling equipment, the connection dress
It sets left end and water cooling plant sealing is fixed, and outer diameter runs through air cooling equipment in the middle part of attachment device, the water cooling plant is by inner casing
Ontology, water outlet, water inlet, inside spin convex block, guiding gutter, internal screw thread, limiting slot and external spiral heat dissipation convex block composition, it is described interior
Shell ontology right end is respectively arranged with water inlet and water outlet in two sides up and down, and water outlet and water inlet inner surface are provided with company
Connection device, the inner casing body internal surface are provided with the inside spin convex block integrally cast, and pass through inside spin convex block for inner casing
Body internal surface is separated into evenly distributed guiding gutter, and the internal screw thread is scribed in inner casing bodies top internal diameter, and inner casing sheet
Body bottom inside is provided with circular limiting slot, and the external spiral heat dissipation convex block is uniformly arranged on inner casing body outer surface, and
External spiral heat dissipation convex block is integrated with inner casing ontology to be cast, and the inside spin convex block and the sealing of coating machine chamber outer surface are fixed,
The internal screw thread is threadably secured with sealing device bottom outer surface and connect, the limiting slot inner surface and coating machine cavity bottom
Portion's clearance fit, the external spiral heat dissipation convex block fit in air cooling equipment inner surface.
Preferably, the air cooling equipment is made of outer cylinder, cooling fan, fan switch and air inlet, the outer cylinder front end
Bottom is embedded with cooling fan, and cooling fan right end lower front is provided with fan switch, sets at the top of the outer cylinder front end
It is equipped with circular air inlet, and is bonded to each other at the top of outer cylinder with sealing device, the outer tube inner surface radiates convex with external spiral
Block is bonded to each other, and outer cylinder fits in external spiral heat dissipation convex block bottom, and the cooling fan and fan switch are and power supply line
Electrical connection.
Preferably, the sealing device is by sealing device ontology, connector, external screw thread, the first sealing ring and sealing shroud group
, the sealing device body bottom portion is provided with the connector integrally cast, and connector outer surface be provided with it is evenly distributed
External screw thread, the external screw thread outer surface is rotatably assorted with internal screw thread, is filled at the top of first sealing ring by glue and sealing
It sets ontology to be adhesively fixed, and sealing device ontology sees that sealing is fixed by the first sealing ring and water cooling plant, the sealing shroud
Outer surface is adhesively fixed by glue and sealing device ontology, and sealing device ontology passes through sealing shroud and coating machine cavity top
Portion's outside diameter seal is fixed, and the sealing device ontology fits at the top of outer cylinder.
Preferably, the attachment device is made of shell, special-shaped connector, transcapsidation, interior fixed block and the second sealing ring, institute
It states shell right end and is provided with the special-shaped connector integrally cast, and special-shaped connector outer surface and transcapsidation are matched by threads turn
It closes, second sealing ring left end is adhesively fixed by glue and interior fixed block, and interior fixed block right end is by screw thread and outside
Shell rotation connection, is provided with interior fixed block and the second sealing ring inside the water outlet and water inlet, outside the interior fixed block
Surface and water outlet and water inlet rotation are fixed, and junction is sealed fixation by the second sealing ring, in the shell
Portion's outer diameter and outer cylinder clearance fit.
Preferably, the special-shaped connector and the first conduit left end inner surface being arranged in the water outlet are interference fitted, and
First conduit is locked by transcapsidation.
Preferably, the special-shaped connector being arranged in the water inlet and the second conduit top inner surface are interference fitted, and
Second conduit is locked by transcapsidation.
Preferably, the water outlet and water inlet size shape are all the same, and water outlet and water inlet inner surface are all provided with
Set screw thread.
Preferably, the transcapsidation outer surface is provided with evenly distributed anti-skid chequer, and transcapsidation along special-shaped connector into
The angle of row rotation are as follows: 0-360 degree.
Preferably, the air inlet mouth-shaped is rounded, and air inlet internal diameter is provided with filter.
Preferably, the through-hole symmetrical with water outlet and water inlet there are two the outer cylinder right end settings, and through-hole
Aperture is greater than outer surface of outer cover diameter 1mm.
Preferably, the material of the outer cylinder are as follows: wolfram steel.
Preferably, the material of first sealing ring are as follows: polytetrafluoroethylene (PTFE).
Preferably, the interior fixed block uses stainless steel material.
The present invention has the advantage that the present invention provides a kind of improved vacuum coating equipment cavity of structure by improving herein
Cooling device has following improve compared with same type equipment:
Advantage 1: a kind of improved vacuum coating equipment cavity cooling device of structure of the present invention, by coating machine cavity
Outer surface is provided with water cooling plant, and the inside spin convex block of inner casing body internal surface and coating machine cavity are carried out contact sealing, by
The guiding gutter that inside spin convex block is split inner casing body internal surface formation one spiral decline is imported water by water inlet, water flow
It is exported along guiding gutter by water outlet, adequately contacts plated film machine cavity body surface face, and water flow is big, reach good cooling effect
Fruit.
Advantage 2: a kind of improved vacuum coating equipment cavity cooling device of structure of the present invention, by outside water cooling plant
Surface is provided with air cooling equipment, by the way that inside spin convex block and coating machine cavity are carried out contact sealing, heat is led and gives inner casing sheet
Body and external spiral heat dissipation convex block, then wind guide channel is formed by external spiral heat dissipation convex block fitting outer cylinder, it is powered by cooling fan and carries out work
Make, hot wind is discharged, cool breeze is imported by air inlet is blown over along wind guide channel, is increased the area contacted with wind, is improved
Heat dissipation effect reduces the volume of device.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is partial profile structure of the present invention；
Fig. 3 is water cooling plant structural schematic diagram of the present invention；
Fig. 4 is water cooling plant the schematic diagram of the section structure of the present invention；
Fig. 5 is air cooling equipment structural schematic diagram of the present invention；
Fig. 6 is schematic diagram of sealing device of the present invention；
Fig. 7 is sealing device the schematic diagram of the section structure of the present invention.
Fig. 8 is attachment device structural schematic diagram of the present invention.
Wherein: coating machine cavity -1, water cooling plant -2, air cooling equipment -3, sealing device -4, attachment device -5, water storage box -
6, water pump -7, pump switch -8, power supply line -9, the first conduit -10, the second conduit -11, inner casing ontology -21, water outlet -22, enter
The mouth of a river -23, inside spin convex block -24, guiding gutter -25, internal screw thread -26, limiting slot -27, external spiral heat dissipation convex block -28, outer cylinder -
31, cooling fan -32, fan switch -33, air inlet -34, sealing device ontology -41, connector -42, external screw thread -43, first
Sealing ring -44, sealing shroud -45, shell -51, special-shaped connector -52, transcapsidation -53, interior fixed block -54, the second sealing ring -55.
Specific embodiment
Below in conjunction with attached drawing 1-8, the present invention is described in detail, and technical solution in the embodiment of the present invention carries out
It clearly and completely describes, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
The present invention provides a kind of improved vacuum coating equipment cavity cooling device of structure, including coating machine by improving herein
Cavity 1, water cooling plant 2, air cooling equipment 3, sealing device 4, attachment device 5, water storage box 6, water pump 7, pump switch 8, power supply line
9, the first conduit 10 and the second conduit 11,1 right end of coating machine cavity are provided with water storage box 6,6 top of water storage box and 7 bottom of water pump
The water inlet pipe of setting is fixedly connected, and 7 front end of water pump is provided with pump switch 8, and 7 rear end of water pump is provided with power supply line 9, and first
10 right end of conduit and 6 fixing seal of water storage box, the water outlet seal of tube that 11 bottom of the second conduit is arranged with 7 rear end of water pump are fixed, water
Pump 7 and pump switch 8 are electrically connected with power supply line 9, and 2 inner surface of water cooling plant and the sealing of coating machine cavity 1 are fixed, water cooling plant
2 outer surfaces are enclosed with air cooling equipment 3, seal and fix at the top of 4 inner surface of sealing device and coating machine cavity 1,4 bottom of sealing device
It is tightly connected at the top of water cooling plant 2, sealing device 4 fits in 3 top of air cooling equipment, 5 left end of attachment device and water cooling plant 2
Sealing fix, and 5 middle part outer diameter of attachment device run through air cooling equipment 3, water cooling plant 2 by inner casing ontology 21, water outlet 22, enter
The mouth of a river 23, inside spin convex block 24, guiding gutter 25, internal screw thread 26, limiting slot 27 and external spiral heat dissipation convex block 28 form, inner casing ontology
21 right ends are respectively arranged with water inlet 23 and water outlet 22 in two sides up and down, and water outlet 22 and 23 inner surface of water inlet are respectively provided with
There is attachment device 5,21 inner surface of inner casing ontology is provided with the inside spin convex block 24 integrally cast, and passes through inside spin convex block 24
21 inner surface of inner casing ontology is separated into evenly distributed guiding gutter 25, internal screw thread 26 is scribed in 21 top internal diameter of inner casing ontology,
And 21 bottom inside of inner casing ontology is provided with circular limiting slot 27, and external spiral heat dissipation convex block 28 is uniformly arranged on inner casing ontology
21 outer surfaces, and external spiral heat dissipation convex block 28 is integrated with inner casing ontology 21 and casts, inside spin convex block 24 and coating machine cavity 1
Outer surface sealing is fixed, and internal screw thread 26 is threadably secured with 4 bottom outer surface of sealing device and connect, 27 inner surface of limiting slot and
The cooperation of 1 bottom gap of coating machine cavity, external spiral heat dissipation convex block 28 fit in 3 inner surface of air cooling equipment.
Further, the air cooling equipment 3 is made of outer cylinder 31, cooling fan 32, fan switch 33 and air inlet 34, institute
It states 31 front bottom end of outer cylinder and is embedded with cooling fan 32, and 32 right end lower front of cooling fan is provided with fan switch 33,
31 front top of outer cylinder is provided with circular air inlet 34, and 31 top of outer cylinder is bonded to each other with sealing device 4, described
31 inner surface of outer cylinder is bonded to each other with external spiral heat dissipation convex block 28, and outer cylinder 31 fits in external spiral heat dissipation 28 bottom of convex block,
The cooling fan 32 and fan switch 33 are electrically connected with power supply line 9.
Further, the sealing device 4 is by sealing device ontology 41, connector 42, external screw thread 43, the first sealing ring 44
It is formed with sealing shroud 45,41 bottom of sealing device ontology is provided with the connector 42 integrally cast, and outside connector 42
Surface is provided with evenly distributed external screw thread 43, and 43 outer surface of external screw thread is rotatably assorted with internal screw thread 26, and described first is close
It is adhesively fixed by glue with sealing device ontology 41 at the top of seal 44, and sealing device ontology 41 passes through the first sealing ring 44
See that sealing is fixed with water cooling plant 2,45 outer surface of sealing shroud is adhesively fixed by glue with sealing device ontology 41, and
Sealing device ontology 41 is fixed by sealing shroud 45 and the sealing of 1 top outer diameter of coating machine cavity, and the sealing device ontology 41 pastes
Together in 31 top of outer cylinder.
Further, the attachment device 5 is close by shell 51, special-shaped connector 52, transcapsidation 53, interior fixed block 54 and second
Seal 55 forms, and 51 right end of shell is provided with the special-shaped connector 52 integrally cast, and 52 outer surface of special-shaped connector
Being cooperated with transcapsidation 53 by threads turn, 55 left end of the second sealing ring is adhesively fixed by glue with interior fixed block 54, and
And interior 54 right end of fixed block is rotatablely connected by screw thread and shell 51, is provided with inside the water outlet 22 and water inlet 23 interior
Fixed block 54 and the second sealing ring 55, interior 54 outer surface of fixed block and water outlet 22 and the rotation of water inlet 23 are fixed, and
Junction is sealed fixation, the 51 middle part outer diameter of shell and 31 clearance fit of outer cylinder by the second sealing ring 55.
Further, the special-shaped connector 52 being arranged in the water outlet 22 is matched with the 10 left end inner surface interference of the first conduit
It closes, and the first conduit 10 is locked by transcapsidation 53, it is convenient closely to fix the first conduit 10.
Further, the special-shaped connector 52 being arranged in the water inlet 23 is matched with the 11 top inner surface interference of the second conduit
It closes, and the second conduit 11 is locked by transcapsidation 53, facilitates the second conduit 11 of locking.
Further, the water outlet 22 and 23 size shape of water inlet are all the same, and water outlet 22 and water inlet 23
Inner surface is respectively provided with screw thread, and convenient be threadably secured with interior 54 middle part outer diameter of fixed block connect.
Further, 53 outer surface of transcapsidation is provided with evenly distributed anti-skid chequer, and transcapsidation 53 connects along abnormity
The angle that connector 52 is rotated are as follows: 0-360 degree facilitates and carries out the first conduit 10 of locking and the second conduit 11.
Further, 34 shape of air inlet is rounded, and 34 internal diameter of air inlet is provided with filter, facilitates progress
Barrier dust is carried out while importing air.
Further, the through-hole symmetrical with water outlet 22 and water inlet 23 there are two 31 right end of the outer cylinder settings,
And through-hole aperture is greater than 51 outer surface diameter 1mm of shell, facilitates and carries out insertion shell 51.
Further, the material of the outer cylinder 31 are as follows: wolfram steel.
The outer cylinder 31 of the present invention according to upper table is made using wolfram steel, can reach, high rigidity, wear-resistant strength and good toughness,
The excellent performances such as heat-resisting, corrosion-resistant.
Further, the material of first sealing ring 44 are as follows: polytetrafluoroethylene (PTFE).
It is made according to the first sealing ring of the present invention 44 described in upper table using polytetrafluoroethylene (PTFE), there is high temperature resistant, low temperature resistant, corrosion resistant
The excellent performances such as erosion, weatherability, high lubrication, nonhazardous.
Further, the interior fixed block 54 uses stainless steel material.
According to upper table, fixed block 54 uses stainless steel material in the present invention, can achieve corrosion-resistant, light-weight effect
Fruit.
The present invention provides a kind of improved vacuum coating equipment cavity cooling device of structure by improving, and transports as follows
Row；
First, the present apparatus is moved to suitable position first, is then attached power supply line 9 in external power supply, is led to
Click pump switch 8 is crossed, is worked by the energization of water pump 7, carries out extracting the water in water storage box 6 by water pump 7, cold water is passed through
Second conduit 11 is imported by water inlet 23, is flowed cold water along guiding gutter 25, is exported by water outlet 22, be discharged into water storage box again
6；
Second, while clicking fan switch 33 and work general is carried out by the energization of cooling fan 32, by external spiral heat dissipation convex block 28
The hot gas discharge being bonded in the wind guide channel that outer cylinder 31 is formed, cool breeze, which is blown over by the importing of air inlet 34 along wind guide channel, to cool down；
Third, 1 outer surface of coating machine cavity contact with each other with inside spin convex block 24, generate heat, meeting during the work time
Logical heat transfer passes to inner casing ontology 21, is tentatively cooled down, and inner casing ontology 21 further through external spiral heat dissipation convex block 28 with
Outer cylinder 31 contacts, and carries out heat transmitting again and cools down, and cold water is by being split inner casing ontology 21 by inside spin convex block 24
The guiding gutter 25 that inner surface is formed carries out contact and absorbs the heat of 1 outer surface of coating machine cavity, while carrying out absorbing inner casing ontology
The heat of 21 inner surfaces cools down, and cold wind is by being bonded the wind guide channel that outer cylinder 31 is formed by external spiral heat dissipation convex block 28, internally
21 outer surface of shell ontology cools down, while cooling down again to 31 inner surface of outer cylinder, heat is carried out to multiple transmitting, to plating
Film machine cavity body 1 plays good cooling effect；
4th, the first conduit 10 is importing hot water for a long time, is easy expansion damage and is replaced, when replacement, can be passed through
Transcapsidation 53 is reversely rotated, transcapsidation 53 is separated with the first conduit 10, then pulls up the first conduit 10, by the first new conduit 10 1
End is attached with water storage box 6, and the other end is inserted by special-shaped 52 outer surface of connector, then positive into rotation transcapsidation 53, makes transcapsidation
53 move the first conduit 10 of locking to right end along special-shaped connector 52.
The present invention provides a kind of improved vacuum coating equipment cavity cooling device of structure by improving, by plated film machine cavity
1 outer surface of body is provided with water cooling plant 2, and the inside spin convex block 24 of 21 inner surface of inner casing ontology is connect with coating machine cavity 1
Touching sealing, by inside spin convex block 24 be split 21 inner surface of inner casing ontology is formed one spiral decline guiding gutter 25 by water by
Water inlet 23 imports, and water flow is exported along guiding gutter 25 by water outlet 22, adequately contacts 1 surface of plated film machine cavity body, and water flow
Amount is big, reaches good cooling effect, and by the way that inside spin convex block 24 and coating machine cavity 1 are carried out contact sealing, heat is led
To inner casing ontology 21 and external spiral heat dissipation convex block 28, then outer cylinder 31 is bonded by external spiral heat dissipation convex block 28 and forms wind guide channel, by dissipating
The energization of air-heater 32 works, and hot wind is discharged, and cool breeze is imported by air inlet 34 is blown over along wind guide channel, increase with
The area of wind contact, improves heat dissipation effect, reduces the volume of device.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, and the present invention makes
The standardized element used can commercially, and shaped piece can be ordered according to specification and attached drawing record
System, the specific connection type of each part are all made of the conventional means such as in the prior art mature tap rivet, welding, machinery,
Part and equipment are all made of in the prior art, conventional model, in addition circuit connection is using connection side conventional in the prior art
Formula, this will not be detailed here.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (10)
1. a kind of improved vacuum coating equipment cavity cooling device of structure, including coating machine cavity (1), water storage box (6), water pump
(7), pump switch (8), power supply line (9), the first conduit (10) and the second conduit (11), coating machine cavity (1) right end are set
It is equipped with water storage box (6), is fixedly connected at the top of the water storage box (6) with the water inlet pipe of water pump (7) bottom setting, the water pump (7)
Front end is provided with pump switch (8), and water pump (7) rear end is provided with power supply line (9), the first conduit (10) right end and storage
Water tank (6) fixing seal, the water outlet seal of tube that the second conduit (11) bottom is arranged with water pump (7) rear end are fixed, the water
Pump (7) and pump switch (8) are electrically connected with power supply line (9)；
It is characterized by also including water cooling plant (2), air cooling equipment (3), sealing device (4) and attachment device (5), the water
Device for cooling (2) inner surface and coating machine cavity (1) sealing are fixed, and water cooling plant (2) outer surface is enclosed with air cooling equipment
(3), fixation, sealing device (4) bottom and water are sealed at the top of sealing device (4) inner surface and coating machine cavity (1)
It is tightly connected at the top of device for cooling (2), the sealing device (4) fits at the top of air cooling equipment (3), and the attachment device (5) is left
End is fixed with water cooling plant (2) sealing, and outer diameter runs through air cooling equipment (3) in the middle part of attachment device (5), the water cooling plant
(2) by inner casing ontology (21), water outlet (22), water inlet (23), inside spin convex block (24), guiding gutter (25), internal screw thread (26),
Limiting slot (27) and external spiral heat dissipation convex block (28) composition, inner casing ontology (21) right end are respectively arranged with into water two sides up and down
Mouth (23) and water outlet (22), and water outlet (22) and water inlet (23) inner surface are provided with attachment device (5), it is described interior
Shell ontology (21) inner surface is provided with the inside spin convex block (24) integrally cast, and passes through inside spin convex block (24) for inner casing sheet
Body (21) inner surface is separated into evenly distributed guiding gutter (25), and the internal screw thread (26) is scribed at the top of inner casing ontology (21)
Diameter, and inner casing ontology (21) bottom inside is provided with circular limiting slot (27), and external spiral heat dissipation convex block (28) is uniform
It is set to inner casing ontology (21) outer surface, and external spiral heat dissipation convex block (28) is integrated with inner casing ontology (21) and casts, it is described
Inside spin convex block (24) and the sealing of coating machine cavity (1) outer surface are fixed, outside the internal screw thread (26) and sealing device (4) bottom
Surface is threadably secured connection, and limiting slot (27) inner surface and coating machine cavity (1) bottom gap cooperate, the outer spiral shell
Rotation heat dissipation convex block (28) fits in air cooling equipment (3) inner surface.
2. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: the wind
Device for cooling (3) is made of outer cylinder (31), cooling fan (32), fan switch (33) and air inlet (34), before the outer cylinder (31)
End bottom is embedded with cooling fan (32), and cooling fan (32) right end lower front is provided with fan switch (33), described
Outer cylinder (31) front top is provided with circular air inlet (34), and is bonded to each other at the top of outer cylinder (31) with sealing device (4),
Outer cylinder (31) inner surface and external spiral heat dissipation convex block (28) are bonded to each other, and to fit in external spiral heat dissipation convex for outer cylinder (31)
Block (28) bottom, the cooling fan (32) and fan switch (33) are electrically connected with power supply line (9).
3. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: described close
Seal apparatus (4) is by sealing device ontology (41), connector (42), external screw thread (43), the first sealing ring (44) and sealing shroud (45)
Composition, sealing device ontology (41) bottom is provided with the connector (42) integrally cast, and connector (42) outer surface
It being provided with evenly distributed external screw thread (43), external screw thread (43) outer surface is rotatably assorted with internal screw thread (26), and described first
It is adhesively fixed by glue with sealing device ontology (41) at the top of sealing ring (44), and sealing device ontology (41) passes through first
Sealing ring (44) and water cooling plant (2) see that sealing is fixed, and sealing shroud (45) outer surface passes through glue and sealing device ontology
(41) it is adhesively fixed, and sealing device ontology (41) is solid by sealing shroud (45) and the sealing of coating machine cavity (1) top outer diameter
Fixed, the sealing device ontology (41) fits at the top of outer cylinder (31).
4. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: the company
Connection device (5) is made of shell (51), special-shaped connector (52), transcapsidation (53), interior fixed block (54) and the second sealing ring (55),
Shell (51) right end is provided with the special-shaped connector (52) integrally cast, and special-shaped connector (52) outer surface and transcapsidation
(53) being cooperated by threads turn, the second sealing ring (55) left end is adhesively fixed by glue with interior fixed block (54), and
And interior fixed block (54) right end is rotatablely connected by screw thread and shell (51), the water outlet (22) and water inlet (23) are internal
It is provided with interior fixed block (54) and the second sealing ring (55), interior fixed block (54) outer surface and water outlet (22) and water inlet
(23) rotation is fixed, and junction is sealed fixation by the second sealing ring (55), in the middle part of the shell (51) outer diameter with
Outer cylinder (31) clearance fit.
5. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: it is described go out
The special-shaped connector (52) and the first conduit (10) left end inner surface being arranged in the mouth of a river (22) are interference fitted, and the first conduit
(10) it is locked by transcapsidation (53).
6. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: it is described enter
The special-shaped connector (52) and the second conduit (11) top inner surface being arranged in the mouth of a river (23) are interference fitted, and the second conduit
(11) it is locked by transcapsidation (53).
7. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 1, it is characterised in that: it is described go out
The mouth of a river (22) and water inlet (23) size shape are all the same, and water outlet (22) and water inlet (23) inner surface are respectively provided with spiral shell
Line.
8. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 4, it is characterised in that: described turn
Shell (53) outer surface is provided with evenly distributed anti-skid chequer, and the angle that transcapsidation (53) is rotated along special-shaped connector (52)
Degree are as follows: 0-360 degree.
9. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 2, it is characterised in that: it is described into
Air port (34) shape is rounded, and air inlet (34) internal diameter is provided with filter.
10. the improved vacuum coating equipment cavity cooling device of a kind of structure according to claim 2, it is characterised in that: described
There are two the through-holes symmetrical with water outlet (22) and water inlet (23) for the setting of outer cylinder (31) right end, and through-hole aperture is greater than
Shell (51) outer surface diameter 1mm.
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| CN110983286A (en) * | 2019-12-30 | 2020-04-10 | 江阴慕达斯真空设备有限公司 | Cooling cover for coated product |
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Application publication date: 20191203 |