CN110524732A - A kind of scribing machine - Google Patents
A kind of scribing machine Download PDFInfo
- Publication number
- CN110524732A CN110524732A CN201910750185.0A CN201910750185A CN110524732A CN 110524732 A CN110524732 A CN 110524732A CN 201910750185 A CN201910750185 A CN 201910750185A CN 110524732 A CN110524732 A CN 110524732A
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- CN
- China
- Prior art keywords
- spray head
- knife side
- blade
- control valve
- path control
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to wafer cutting technique field more particularly to a kind of scribing machines.Specifically, the cutter cooling drying system of scribing machine, comprising: control system；Liquid line is serially connected with fluid path control valve thereon；Gas piping is serially connected with gas path control valve thereon；And configuration, in the knife side spray head of one end for installing blade of static air pressure high-speed main spindle, knife side spray head is used to be blown from the axial sides of blade to blade；Liquid line and gas piping are connected with knife side spray head, and control system is connected with fluid path control valve and gas path control valve control respectively, and controls the on-off of gas path control valve and fluid path control valve respectively, are individually supplied to knife side spray head or feed flow with realizing.Scribing machine of the invention is utilized knife side spray head and carries out blow dried, the complexity of not excessive increase spindle nose structure to blade, and blows from the axial side of blade to blade, also can be improved the degree of drying and drying efficiency of blade.
Description
Technical field
The present invention relates to wafer cutting technique field more particularly to a kind of scribing machines.
Background technique
With the continuous development of electronic communication technology, crystal chip is obtained a large amount of and is widely applied, and one single chip is general
It is to cut to obtain by scribing machine by wafer.Scribing machine usually cuts wafer with static air pressure high-speed main spindle band cutting blade
Slot in cutting process, generates a large amount of heat, in order to guarantee service life and the processing quality of blade, needs in cutting process to knife
Piece is cooled down, as disclosed in the Chinese patent that Authorization Notice No. is CN102267198B and application publication number CN102615726A
Scribing machine mostly uses cooling tube to carry out water-spraying control to the cutting tip of blade at present.And scribing machine is cut to wafer
During, in order to guarantee the depth requirements of grooving, generally require to carry out the abrasion loss of cutter after a period of time that works
Measurement, but remaining coolant liquid has certain interference to measurement result on blade, and it is inaccurate to often lead to measurement result, shadow
Ring quality of notch.Problem more than being directed at present, has the fast idle natural air drying by blade, but this mode leads to knife
The piece idle period is longer, and drying efficiency is lower；Also blade is dried in the blowing drying device for having increase new, but in this way will
Greatly increase the complexity of structure.
Summary of the invention
The purpose of the present invention is to provide a kind of scribing machine, for solve existing scribing machine it is low to blade drying efficiency,
Drying device the problem of structure is complicated.
Scribing machine of the invention includes:
Rack；
Static air pressure high-speed main spindle；
Cutter cooling drying system, comprising:
Control system；
Liquid line is serially connected with fluid path control valve thereon；
Gas piping is serially connected with gas path control valve thereon；And
The knife side spray head configured in one end for installing blade of static air pressure high-speed main spindle, knife side spray head are used for from blade
Axial sides are blown to blade；Liquid line and gas piping are connected with knife side spray head, control system respectively with fluid path control
Valve and gas path control valve control connection processed, and the on-off of gas path control valve and fluid path control valve is controlled respectively, to realize to knife side
Spray head individually supplies or feed flow.
Scribing machine of the invention not only sprays coolant liquid using knife side spray head and cools down to blade, but also right using knife side spray
Blade carries out blow dried, and dual-use material solves current scribing machine dry to blade while guaranteeing that blade is cooling
When there are the problem of, and spindle nose structure is simple, and assembly cost is low, occupies little space；Moreover, using knife side spray head from knife
The axial side of piece blows to blade, also can be improved the degree of drying and drying efficiency of blade.
Further, liquid line and gas piping have in the downstream connection of the respectively upper control valve concatenated for converging two
Three-way connection is converged on road, knife side spray head with converge three-way connection and be connected to by downstream pipe.Setting for pipeline can be simplified in this way
It sets, avoids pipeline more relatively disorderly.
Further, there are two knife side spray heads, and the axial sides of blade are respectively at, downstream pipe includes and converges
The main feedline of three-way connection connection is connected on main feedline for the fork three-way connection for the main feedline that diverges and two
It is separately connected branch's delivery pipe of fork three-way connection and knife side spray head.Liquid line and gas piping are by converging again bifurcated
Mode is connected to two knife side spray heads, and pipeline arrangement is simple.
More specifically, the end for installing blade of static air pressure high-speed main spindle is configured with knife side nozzle mounting seat,
Knife side spray head is installed on the nozzle mounting seat of knife side, and quick connector, the installation of knife side spray head are also equipped on the nozzle mounting seat of knife side
Seat be internally provided with connection knife side spray head and quick connector channel, downstream pipe be connected on quick connector and with knife side spray
Head connection.Knife side spray head and quick connector can be pre-installed on the nozzle mounting seat of knife side in this way, be in modularization, in scribing machine
When machine assembly, corresponding pipeline need to be only connected on quick connector, simplify assembling process.
In addition, the end for installing blade of static air pressure high-speed main spindle is also equipped with main cooling spray mounting base, it is main
Main cooling spray is installed, main cooling spray is used to spray from the front side face cutting parts of blade and cool down in cooling spray mounting base
Liquid, liquid line is communicated with spray head pipeline, main cooling spray and spray head piping connection, and is serially connected with liquid on spray head pipeline
Road control valve and adjustable flow meter.The cooling effect of blade can be further increased by main cooling spray.
Alternatively, the end for installing blade of static air pressure high-speed main spindle is also equipped with main cooling spray mounting base, it is main
Main cooling spray is installed, main cooling spray is used to spray from the front side face cutting parts of blade and cool down in cooling spray mounting base
Liquid, main cooling spray are connected to the pipeline section in fluid path control valve downstream of liquid line.It can be into one by main cooling spray
Step improves the cooling effect of blade, and can be realized by fluid path control valve to the same of main cooling spray and knife side spray head
Step control synchronizes it and sprays coolant liquid and synchronous stopping hydrojet.
Detailed description of the invention
Fig. 1 be scribing machine of the invention embodiment in show the schematic diagram of main shaft and its end construction；
Fig. 2 is the schematic diagram that Fig. 1 shows spindle nose positional structure from the axial side of blade；
Fig. 3 is the connection signal of gas piping, liquid line and knife side spray head, spray head in the embodiment of scribing machine of the invention
Figure.
In figure: 1- blade；100- static air pressure high-speed main spindle；2- knife side nozzle mounting seat；22- knife side spray head；3- master is cold
But nozzle mounting seat；The main cooling spray of 32-；4- quick connector；6- mounting rack；62- Flushing nozzle；81- gas piping；810- gas
Road control valve, 82- fluid path general pipeline；821- liquid line；8210- knife side fluid path control valve；8211- knife side fluid path flowmeter；
822- spray head pipeline；8220- spray head fluid path control valve；8221- spray head fluid path flowmeter；83- converges three-way connection；
84- fork three-way connection.
Specific embodiment
The specific embodiment of scribing machine of the invention, including rack (not shown) are provided with workbench, work in rack
It is moveably mounted in rack as platform.It is additionally provided with movable stand in rack, is X to movable stand with the moving direction of workbench
Including the first movable part that can be moved along Y-direction and the second movable part that can be moved along Z-direction, wherein pacifying on the second movable part
Equipped with static air pressure high-speed main spindle, the rotation axis of static air pressure high-speed main spindle is for installing blade.
Scribing machine further includes cutter cooling drying system, cutter cooling drying system include gas piping, main liquid tube road with
And control system.As shown in Figs. 1-2, one end of the installation blade 1 of static air pressure high-speed main spindle 100 is fixed with installation pedestal, peace
Knife side nozzle mounting seat 2 is installed on dress pedestal, knife side nozzle mounting seat 2 can be adjusted in the up-down direction with respect to installation pedestal
It is whole, knife side spray head 22 is installed, there are two knife side spray heads 22, and parallel with blade 1 or in certain on knife side nozzle mounting seat 2
The axial side of the blade of the overhanging of angle；Main cooling spray mounting base 3, main cooling spray installation are also equipped in installation pedestal
Seat 3 can adjust in the up-down direction relative to installation pedestal, and main cooling spray 32 is equipped in main cooling spray mounting base 3, main
Front side face cutting parts of the cooling spray 32 from blade.
Gas piping 81 connects gas source when in use, and gas path control valve 810, main liquid tube road 82 are serially connected on gas piping 81
When in use for connecting liquid source, it is serially connected with master on main liquid tube road 82 and divides three-way connection, and divides three-way connection by total liquid by master
Pipeline 82 is divided to for 822 liang of branches of liquid line 821 and spray head pipeline, and liquid line 821 is serially connected with knife side fluid path control valve
8210 and knife side fluid path flowmeter 8211, spray head fluid path control valve 8220 and spray head are serially connected on spray head pipeline 822
Fluid path flowmeter 8221 connects main cooling spray 32 in the downstream side of spray head fluid path flowmeter 8221 on spray head pipeline 822.
The pipeline in 810 downstream of gas path control valve of gas piping 81 and liquid line 821 are in knife side fluid path flowmeter 8211
It is connected to and converges on three-way connection 83 at the position in downstream, converge three-way connection 83 and be also connected with main feedline, on main feedline
Connection fork three-way connection 84, other two interface of fork three-way connection 84 are respectively communicated with two knife side sprays by branch's delivery pipe
First 22.Knife side fluid path flowmeter and spray head fluid path flowmeter are adjustable flow meter, for adjusting the flow of coolant liquid.When
So, in other embodiments, if you do not need to adjustment flow, can not also concatenate flowmeter.
Control system is also configured on scribing machine, control system controls connection gas path control valve 810 and knife side fluid path respectively
Control valve 8210, in this way when scribing machine carries out cutting-up work, control system controls knife side fluid path control valve 8210, main jet first liquid
Road control valve 8220 is opened, and control gas path control valve 810 is closed, thus by knife side spray head 22 and main cooling spray 32 simultaneously to
Blade 1 sprays coolant liquid with cooling to blade 1；When scribing machine is ready for the abrasion loss detection of blade, blade 1 leaves workpiece,
At this point, control system control knife side fluid path control valve 8210, spray head fluid path control valve 8220 are closed, gas path control valve is controlled
810 open, at this point, being blown by knife side spray head 22 to blade 1, to accelerate the drying of blade 1.
Since two knife side spray heads are symmetrically blown the two sides of blade, such blade two sides stress can be balanced,
Unilateral pressure will not be applied to blade, by main feedline and fork three-way connection to two knife side spray head feed flows or gas supply, energy
Enough guarantee two knife side spray heads work consistency, further ensure the consistency of two side-jetting situation of blade, to blade into
Row protection.
More specifically, as described above, knife side spray head 22 is mounted on knife side nozzle mounting seat 2, knife side spray head
It is provided with channel in mounting base 2, quick connector 4 is also equipped on knife side nozzle mounting seat 2, it is logical in knife side nozzle mounting seat 2
Road is connected to quick connector 4 and knife side spray head 22, and branch's delivery pipe is connected to can be realized and knife side spray head 22 on quick connector 4
Connection, in this way while facilitating the upper and lower position for adjusting knife side spray head, convenient for the connection of knife side spray head and branch's delivery pipe.And
And knife side spray head and quick connector can be pre-installed on the nozzle mounting seat of knife side, at modularization, in scribing machine machine assembly
When, corresponding pipeline need to be only connected on quick connector, simplify assembling process.
Similar to the connection type of branch delivery pipe to knife side spray head, the inside of main cooling spray mounting base 3 is equipped with channel,
Quick connector 4 is installed, inner passage 4 is connected to quick connector 4 and main cooling spray 3, main jet in main cooling spray mounting base 3
Head tube road 822 is connected directly between the connection that can be realized on quick connector 4 with main cooling spray.From structure, in this way
While facilitating the upper and lower position for adjusting main cooling spray, convenient for the connection of main cooling spray and liquid line, main cooling spray
Head and quick connector can be pre-installed in main cooling spray mounting base, at modularization, in scribing machine machine assembly, only be needed
Corresponding pipeline is connected on quick connector, assembling process is simplified.
Scribing machine of the invention had not only been realized by knife side spray head sprays coolant liquid to blade to cool down blade, but also realizes pair
Blade is blown to dry blade, so not only, does not increase the structural complexity of spindle nose, and can be improved blade drying
Speed promotes blade drying effect.
Certainly, scribing machine of the invention is not limited to the above embodiments.
For example, in other embodiments, main cooling spray can be directly in liquid line by branch line
The pipeline section in fluid path control valve downstream is connected to, at this point, can be realized main cooling spray and knife side by controlling knife side fluid path control valve
The synchronous of spray head sprays coolant liquid and synchronous stopping hydrojet.
For example, in other embodiments, each knife side spray head connects gas piping and liquid line by three-way connection
Road is serially connected with control valve on the gas piping and liquid line corresponding to each knife side spray head, is can be realized in this way to two
The independent control of knife side spray head.
For another example branch's transfer pipeline can directly be connect with knife side spray head, knife side nozzle mounting seat is no longer set, this
When, clip or buckle can be set in installation pedestal, after knife side spray head is connect with branch transfer pipeline, then pass through clip or card
Button is fixedly mounted in installation pedestal.
Claims (6)
1. a kind of scribing machine, characterized in that include:
Rack；
Static air pressure high-speed main spindle；
Cutter cooling drying system, comprising:
Control system；
Liquid line is serially connected with fluid path control valve thereon；
Gas piping is serially connected with gas path control valve thereon；And
The knife side spray head configured in one end for installing blade of static air pressure high-speed main spindle, knife side spray head are used for from blade
Axial sides are blown to blade；
Liquid line and gas piping are connected with knife side spray head, control system respectively with fluid path control valve and gas path control valve
Control connection, and the on-off of gas path control valve and fluid path control valve is controlled respectively, knife side spray head is individually supplied or supplied to realize
Liquid.
2. scribing machine according to claim 1, characterized in that liquid line and gas piping are in the respectively upper control concatenated
The downstream connection of valve has the three-way connection that converges for converging two-way, and knife side spray head passes through downstream pipe company with three-way connection is converged
It is logical.
3. scribing machine according to claim 2, characterized in that there are two knife side spray heads, and downstream pipe includes and converges three
The main feedline of pass joint connection is connected on main feedline for the fork three-way connection for the main feedline that diverges and two pieces points
Lian Jie not diverge branch's delivery pipe of three-way connection and knife side spray head.
4. scribing machine according to claim 2 or 3, characterized in that static air pressure high-speed main spindle is used to install blade
End is configured with knife side nozzle mounting seat, and knife side spray head is installed on the nozzle mounting seat of knife side, also pacifies on the nozzle mounting seat of knife side
Equipped with quick connector, the channel for being internally provided with connection knife side spray head and quick connector of knife side nozzle mounting seat, downstream pipe
It is connected on quick connector and is connected to knife side spray head.
5. scribing machine according to claim 1 or 2 or 3, characterized in that static air pressure high-speed main spindle is used to install blade
End be also equipped with main cooling spray mounting base, main cooling spray, main cooling spray are installed in main cooling spray mounting base
For spraying coolant liquid from the front side face cutting parts of blade, liquid line is communicated with spray head pipeline, main cooling spray and master
Spray head piping connection, and fluid path control valve and adjustable flow meter are serially connected on spray head pipeline.
6. scribing machine according to claim 1 or 2 or 3, characterized in that static air pressure high-speed main spindle is used to install blade
End be also equipped with main cooling spray mounting base, main cooling spray, main cooling spray are installed in main cooling spray mounting base
For spraying coolant liquid from the front side face cutting parts of blade, main cooling spray and liquid line are in fluid path control valve downstream
Pipeline section connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910750185.0A CN110524732A (en) | 2019-08-14 | 2019-08-14 | A kind of scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910750185.0A CN110524732A (en) | 2019-08-14 | 2019-08-14 | A kind of scribing machine |
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| Publication Number | Publication Date |
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| CN110524732A true CN110524732A (en) | 2019-12-03 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910750185.0A Pending CN110524732A (en) | 2019-08-14 | 2019-08-14 | A kind of scribing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112606234A (en) * | 2020-12-28 | 2021-04-06 | 郑州光力瑞弘电子科技有限公司 | Scribing machine blade monitoring device and scribing machine |
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| CN101187762A (en) * | 2006-11-24 | 2008-05-28 | Nec液晶技术株式会社 | Liquid crystal display device and manufacturing method thereof |
| CN101402227A (en) * | 2007-10-03 | 2009-04-08 | 株式会社迪思科 | Cutting blade detection mechanism |
| CN102190497A (en) * | 2010-03-19 | 2011-09-21 | 三菱综合材料株式会社 | High-toughness crystalline cubic boron nitride-based ultrahigh pressure sintering material and cutting tool |
| CN102615726A (en) * | 2011-01-26 | 2012-08-01 | 北京中电科电子装备有限公司 | Cutter body cooling device and air static pressure electric spindle |
| CN106007350A (en) * | 2016-05-19 | 2016-10-12 | 台玻安徽玻璃有限公司 | Shaped float glass cutting system |
| JP6244248B2 (en) * | 2014-04-02 | 2017-12-06 | 株式会社ディスコ | Cutting equipment |
| CN207787724U (en) * | 2017-12-29 | 2018-08-31 | 程泰机械（吴江）有限公司 | A kind of improved knife tower inside blowning installation |
-
2019
- 2019-08-14 CN CN201910750185.0A patent/CN110524732A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101187762A (en) * | 2006-11-24 | 2008-05-28 | Nec液晶技术株式会社 | Liquid crystal display device and manufacturing method thereof |
| CN101402227A (en) * | 2007-10-03 | 2009-04-08 | 株式会社迪思科 | Cutting blade detection mechanism |
| CN102190497A (en) * | 2010-03-19 | 2011-09-21 | 三菱综合材料株式会社 | High-toughness crystalline cubic boron nitride-based ultrahigh pressure sintering material and cutting tool |
| CN102615726A (en) * | 2011-01-26 | 2012-08-01 | 北京中电科电子装备有限公司 | Cutter body cooling device and air static pressure electric spindle |
| JP6244248B2 (en) * | 2014-04-02 | 2017-12-06 | 株式会社ディスコ | Cutting equipment |
| CN106007350A (en) * | 2016-05-19 | 2016-10-12 | 台玻安徽玻璃有限公司 | Shaped float glass cutting system |
| CN207787724U (en) * | 2017-12-29 | 2018-08-31 | 程泰机械（吴江）有限公司 | A kind of improved knife tower inside blowning installation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112606234A (en) * | 2020-12-28 | 2021-04-06 | 郑州光力瑞弘电子科技有限公司 | Scribing machine blade monitoring device and scribing machine |
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Application publication date: 20191203 |
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