CN110515192B - Super-resolution rapid automatic scanning imaging system and method based on water immersion objective lens - Google Patents
Super-resolution rapid automatic scanning imaging system and method based on water immersion objective lens Download PDFInfo
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 238000003384 imaging method Methods 0.000 title claims abstract description 60
- 238000007654 immersion Methods 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000005286 illumination Methods 0.000 claims abstract description 78
- 230000000737 periodic effect Effects 0.000 claims abstract description 18
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- 239000003921 oil Substances 0.000 description 7
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 239000008213 purified water Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000006059 cover glass Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012417 linear regression Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010869 super-resolution microscopy Methods 0.000 description 1
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- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
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- G02B21/00—Microscopes
- G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
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Abstract
The invention provides a super-resolution rapid automatic scanning imaging system and a method based on a water immersion objective, wherein the super-resolution rapid automatic scanning imaging system based on the water immersion objective comprises the following components: a structured light illumination system for illuminating the sample with periodic structured light of a plurality of directions and a plurality of phases; the water immersion objective imaging system is used for imaging the sample onto the camera through the water immersion objective and the barrel lens under the periodical structure light to obtain a plurality of spatial domain pictures subjected to periodical structure light modulation; the image processing system is used for carrying out Fourier transform on the spatial domain picture to obtain a super-resolution microscopic image after frequency domain image processing; and the control system is used for controlling the scanning position and direction when the water immersion objective imaging system images. The invention adopts the structural light illumination and the water immersion objective lens to realize super-resolution microscopic imaging, the effect of the super-resolution microscopic imaging reaches or exceeds the resolution of the imaging of the same series of oil immersion objective lenses, and the super-resolution microscopic imaging device can be applied to vaginal microecological pathology detection.
Description
Technical Field
The invention belongs to the field of biological cell imaging, and relates to a super-resolution rapid automatic scanning imaging system and method based on a water immersion objective.
Background
In the field of biological cell imaging, especially in the field of vaginal microecological pathology imaging, high resolution pictures are required, which requires the use of high magnification high numerical aperture NA oil immersion objectives. However, the oil immersion objective lens is troublesome to operate and inconvenient to clean, and automatic scanning imaging is difficult to realize. The operation of the water immersion objective lens is simpler than that of the oil immersion objective lens, and the cleaning is more convenient. However, the numerical aperture of the immersion objective is generally about 20% lower than that of the oil immersion objective. Therefore, the resolution of the imaging of the water immersion objective lens is not lower than that of the oil immersion objective lens by about 20 percent.
Disclosure of Invention
In order to improve the resolution of the water immersion objective and realize quick scanning imaging, the invention provides a super-resolution quick automatic scanning imaging system and method based on the water immersion objective, which adopt structured light illumination and the water immersion objective to realize super-resolution microscopic imaging, the effect of the system reaches or exceeds the resolution of the imaging of the same series of oil immersion objectives, and the system and the method can be applied to vaginal microecological pathology detection.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
super-resolution rapid automatic scanning imaging system based on water immersion objective, comprising:
A structured light illumination system for illuminating the sample with periodic structured light of a plurality of directions and a plurality of phases;
The water immersion objective imaging system is used for imaging the sample onto the camera through the water immersion objective and the barrel lens under the periodical structure light to obtain a plurality of spatial domain pictures subjected to periodical structure light modulation;
the image processing system is used for carrying out Fourier transform on the spatial domain picture to obtain a super-resolution microscopic image after frequency domain image processing;
And the control system is used for controlling the scanning position and direction when the water immersion objective imaging system images.
Preferably, the structured light illumination system comprises:
An illumination system for providing uniform illumination light to the total internal reflection prism;
a total internal reflection prism for reflecting illumination light from the illumination system into the spatial light modulator;
a spatial light modulator for receiving the reflected light from the total internal reflection prism and vertically reflecting the illumination light having a periodic structure;
a collimating lens for converting the illumination light from the spatial light modulator into collimated light and incident on the reflecting mirror;
a reflecting mirror for reflecting the collimated light from the collimating lens into the illumination objective;
An illumination objective for providing periodic structured light illumination of the sample by reflected light from the mirror.
Preferably, the structured light illumination system comprises:
An illumination system for providing uniform illumination light to the total internal reflection prism;
a total internal reflection prism for reflecting illumination light from the illumination system into the spatial light modulator;
a spatial light modulator for receiving the reflected light from the total internal reflection prism and vertically reflecting the illumination light having a periodic structure;
a collimating lens for converting the illumination light from the spatial light modulator into collimated light and incident on the reflecting mirror;
The reflecting mirror is used for reflecting the collimated light rays from the collimating lens into the semi-transparent semi-reflecting mirror or the bicolor mirror;
and the semi-transparent semi-reflecting mirror or the bicolor mirror is used for providing periodic structured light illumination for the sample through emergent light.
Preferably, the water immersion objective imaging system further comprises:
and the motion platform is used for bearing the sample and moving under the control of the control system.
Preferably, the control system is used for controlling the motion platform to perform horizontal x-direction and y-direction moving scanning and controlling the water immersion objective lens or the barrel lens to perform z-axis automatic focusing scanning.
Preferably, the water immersion objective imaging system further comprises:
And the water injection system is used for filling water between the sample and the water immersion objective lens.
Preferably, the image processing system is used for splicing the spectrums of the high-frequency part and the low-frequency part in different directions of the spatial domain picture through an image processing algorithm, and then performing inverse Fourier transform on the spliced spectrums to obtain the super-resolution microscopic image.
A super-resolution rapid automatic scanning imaging method based on a water immersion objective lens comprises the following steps:
1) Illuminating the sample with a plurality of directions and phases of periodic structured light;
2) Imaging the sample onto a camera through a water immersion objective lens and a cylindrical lens under the periodic structure light to obtain a plurality of spatial domain pictures subjected to periodic structure light modulation;
3) And (3) carrying out Fourier transform on the spatial domain picture obtained in the step (2) to obtain a super-resolution microscopic image after processing the spatial domain picture into a frequency domain image.
Preferably, step 3) comprises: and (3) carrying out Fourier transform on the airspace picture obtained in the step (2) to obtain a frequency spectrum of the airspace picture, splicing the frequency spectrums of the high-frequency part and the low-frequency part in different directions through an image processing algorithm, and carrying out inverse Fourier transform on the spliced frequency spectrum to obtain a picture exceeding diffraction limit resolution.
Preferably, parameters for spectral stitching of the high frequency part and the low frequency part are determined by means of frequency domain image cross correlation (cross-correlation). These parameters include: the direction, phase and modulation amplitude of the structured light.
Preferably, the method further comprises the step of placing the sample on a motion platform, wherein the motion platform is controlled by a control system to realize scanning in the horizontal x and y directions, and the water immersion objective is controlled to perform z-axis auto-focusing scanning.
The beneficial effects of the invention are as follows:
The method comprises the steps of obtaining a plurality of sinusoidal structure light imaging airspace pictures with different angles and different phases through a hardware system, carrying out Fourier transform on the airspace pictures through a software algorithm to obtain a frequency spectrum, carrying out inverse Fourier transform on the frequency spectrum after processing the frequency spectrum to obtain a high-resolution picture exceeding the diffraction limit, and at least exceeding 30% of the diffraction limit, wherein the effect reaches or exceeds the resolution of the same series of oil immersion objective imaging, and the method can be applied to vaginal microecological pathology detection.
Drawings
FIG. 1 is a schematic diagram of a super-resolution fast auto-scan imaging system employing transmission structured light illumination according to embodiment 1;
FIG. 2 is a schematic diagram of a reflective structured light illumination super-resolution fast auto-scan imaging system according to embodiment 2;
FIG. 3 is a schematic diagram of a sinusoidal structure;
FIG. 4 is a schematic illustration of a multi-directional sinusoidal structured light illumination imaging;
FIG. 5 is a schematic illustration of illumination imaging of structured light in the same direction but in different phases;
FIG. 6 is a schematic spectrum diagram of light illumination imaging of sinusoidal structures in multiple directions, wherein the large circle is a low frequency part and the small circle is a high frequency part;
FIG. 7 is a general spectrum obtained by processing and stitching the spectra of the illumination imaging of sinusoidal structured light in multiple directions;
FIG. 8 shows a conventional microimaging (left) and sinusoidal structured light illumination imaging (right) resolution contrast;
The labels in the above figures are: 1. a light source; 2. a lighting system; 3. a TIR prism; 4. a spatial light modulator; 5. a collimating lens; 6. a reflecting mirror; 7. an illumination objective; 8. a motion platform; 9. a sample; 10. a water immersion objective lens; 11. a cylindrical mirror; 12. a camera; 13. purified water; 14. a water injection system; 15. a motion control system; 16. an image processing system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
The technical scheme adopted by the invention mainly comprises a hardware system and a software algorithm system. And obtaining a plurality of periodic structure (for example, sine-shaped) light illumination imaging airspace pictures with different angles and different phases through a hardware system. And carrying out Fourier transform on the spatial pictures through a software algorithm to obtain a frequency spectrum, and carrying out inverse Fourier transform on the frequency spectrum after processing the frequency spectrum to obtain a high-resolution picture exceeding the diffraction limit.
Example 1
The present embodiment provides a super-resolution fast auto-scanning imaging system using transmission structured light illumination, as shown in fig. 1, a light source 1 makes uniform illumination light incident on a TIR prism 3 through an illumination system 2 and reflected by the TIR prism 3 at a specific angle into a spatial light modulator 4, and the spatial light modulator 4 vertically reflects sinusoidal illumination light (as shown in fig. 3). The sinusoidal illumination light is reflected into the illumination objective 7 via the collimator lens 5 and the mirror 6, forming a sinusoidal illumination on the sample 9. The space between the sample 9 and the water immersion objective 10 is filled with purified water 13 by a water injection system 14. Sample 9 is imaged onto camera 12 (for example, FLIR BFS-U3-32S4C camera may be used) under sinusoidal illumination light of multiple directions and multiple phases via water immersion objective 10 and barrel lens 11, resulting in multiple spatial domain pictures (as shown in fig. 4) modulated by sinusoidal structures. The image processing system 16 fourier transforms these spatial pictures to obtain their spectra, and in addition to the central low frequency portion, a high frequency portion (as shown in fig. 5) may also occur. The spectrum of the low frequency and the high frequency can be completely contained at the same time by splicing the high frequency part and the low frequency part in different directions through an image processing algorithm (as shown in fig. 6). The spectrum is then inverse fourier transformed to obtain a picture beyond the diffraction limited resolution, as shown in fig. 7, left: traditional microscopic imaging pictures, right: structural illumination clearly shows a microimage picture, and two or more points which cannot be distinguished by conventional microimaging can be clearly distinguished on the picture.
The motion platform 8 realizes automatic scanning in the horizontal x and y directions through a motion control system 15. In addition, the best focusing position can be obtained by adopting a quick automatic focusing algorithm for each scanning position, so that the pictures acquired by quick scanning are clear. The immersion objective 10 is subjected to autofocus scanning by a motion control system 15. The illumination objective 7 is scanned for illumination by a motion control system 15. In the invention, the motion platform 8 can be a PI M406.2PD high-precision linear motion platform, and the motion control system 15 can be a Copley driver and a Galil DMC-2x00 digital motion controller.
Example 2
Unlike embodiment 1, which uses transmissive structured light illumination, this embodiment provides a super-resolution fast auto-scan imaging system using reflective structured light illumination, as shown in fig. 2, the light source 1 makes uniform illumination light incident on the TIR prism 3 through the illumination system 2 and reflected into the spatial light modulator 4 at a specific angle through the TIR prism 3, and the spatial light modulator 4 reflects sinusoidal illumination light vertically. The sinusoidal illumination light is directed through the collimator lens 5, the mirror 6 and the half mirror or dichroic mirror 17 into the immersion objective 10, forming sinusoidal illumination on the sample 9. The space between the sample 9 and the water immersion objective 10 is filled with purified water 13 by a water injection system 14. The sample 9 is imaged on the camera 12 through the water immersion objective lens 10, the semi-transparent semi-reflecting mirror or the bicolor mirror 17 and the barrel lens 11 under sine-shaped illumination light with multiple directions and multiple phases, and a plurality of spatial domain pictures modulated by the sine-shaped structure are obtained. The image processing system 16 fourier transforms these spatial pictures to obtain their spectra, which may have a high frequency component in addition to the central low frequency component. The high-frequency part and the low-frequency part in different directions are spliced through an image processing algorithm, so that a complete frequency spectrum containing both low frequency and high frequency can be obtained. And then carrying out inverse Fourier transform on the frequency spectrum to obtain a picture exceeding the diffraction limit resolution.
The motion platform 8 realizes automatic scanning in the horizontal direction through the motion control system 15. The immersion objective 10 is subjected to autofocus scanning by a motion control system 15.
In the present application, sinusoidal structured light illumination in a plurality of directions may be used to obtain uniform super-resolution microscopy in all directions. The structured light illumination of each direction may cause the resolution of that direction to exceed the diffraction limit. The phase of the sinusoidal structured light in each direction can be varied in plurality. The spatial light modulator that produces sinusoidal illumination may be LCOS (Liquid Crystal on Silicon) silicon based liquid crystal, DMD (Digital Micromirror Device) digital micromirror, or other amplitude modulation device. Self-emissive Micro-display devices, such as Micro-OLEDs, etc., may also be employed. Laser interference may also be used. The initial phase of the sinusoidal structured light for each direction can be set precisely by the spatial light modulator SLM, and in addition, in case the initial phase is not determined, can also be determined by a complex linear regression algorithm (complex linear regression algorithm).
The light source can be RGB monochromatic light or white light. Alternatively, in the case of a simple structure, the illumination system may be an optical fiber; in cases where lighting effects and efficiency are a priority, the lighting system may employ a light bar or microlens array to homogenize the illumination.
The TIR prism angle parameters should be designed to match the spatial light modulator SLM that produces sinusoidal structured light. For example, when the spatial light modulator employs a texas instruments DLP660TE 0.66 inch DMD, the incident angle (normal to the DMD) of the light source reflected by the TIR prism should be 34 °, and the incident light exits normal to the DMD after being reflected by the DMD.
The illumination objective may be selected from infinity conjugate objectives, or from non-infinity conjugate objectives. When an infinity conjugate objective is used, the sinusoidal structured light reflected by the DMD is collimated by a collimating lens and then imaged onto the sample by the objective. When a non-infinity conjugate objective is used, a relay imaging system is used to image the sinusoidal structured light through the objective onto the sample.
The water injection system injects purified water to the surface of the sample cover glass through a water pipe, so that purified water is filled between the sample cover glass and the objective lens. The water pipe outlet of the water injection system can be positioned near the objective lens, and the sample moves to the lower part of the objective lens and then is injected with water; or can be positioned at other places, the surface of the cover glass of the sample is injected with water first and then moves to the lower part of the objective lens.
And after the sample is illuminated by the sine-shaped structured light, imaging the sample on a camera through the purified water environment, the water immersion objective lens and the barrel lens in sequence, and obtaining a spatial domain picture modulated by the sine-shaped structured light.
The software algorithm system carries out Fourier transform on the airspace pictures to obtain frequency spectrums, and then carries out inverse Fourier transform on the frequency spectrums to obtain high-resolution pictures exceeding diffraction limit.
The image of a sample illuminated by structured light can be expressed by the following formula:
Wherein, Representing the distribution of the sample at a depth z 0, L representing the illumination light distribution (e.g., sinusoidal structured light), h representing the system point spread function,/>Indicating the horizontal position (x, y).
The image of the focus position can be expressed as:
For each direction, we collect m structured light pictures of different phases (as shown in fig. 5, sinusoidal structured light of the same direction, different phases collect 5 images altogether), each picture is superimposed by n different frequencies (sinusoidal structured light modulation will generate high frequencies), and the mth image can be expressed as:
Its Fourier transform is
Wherein,Is the optical transfer function of the system. The above can be reduced to matrix multiplication:
Wherein,
Thus, in order to determine the sample distributionOnly the matrix M in equation (5) needs to be inverted:
if more pictures are acquired than necessary (i.e., M is not square), then the inverse of M uses Penrose pseudo inverse methods.
The spatial domain picture which is acquired by the camera and subjected to sinusoidal structure light modulation has a spectrum with a central low frequency part and a high frequency part. The direction of the high frequency portion is related to the direction of the sinusoidal structured light. The spectral stitching of the high frequency portion with the low frequency portion by an image processing algorithm can spread the spectrum of the sample imaging (known techniques. This can typically be achieved by WIENER FILER). So that the higher frequency portions of the sample in this direction can also be seen. The spread spectrum is subjected to inverse fourier transform, and a higher resolution picture exceeding the diffraction limit can be obtained. In theory, resolution can be doubled, but is limited by the overall system accuracy, noise, and algorithm accuracy, which can exceed at least 30% of the diffraction limit.
In order to obtain a more accurate result by the reconstruction algorithm, the background of the acquired spatial domain picture can be removed, the wavelength of the illumination light source and the numerical aperture of the objective lens also need to be considered, and the area needed by the frequency domain picture also needs to be carefully selected.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (10)
1. Super-resolution rapid automatic scanning imaging system based on water immersion objective, comprising:
A structured light illumination system for illuminating the sample with periodic structured light of a plurality of directions and a plurality of phases;
The water immersion objective imaging system is used for imaging the sample onto the camera through the water immersion objective and the barrel lens under the periodical structure light to obtain a plurality of spatial domain pictures subjected to periodical structure light modulation;
the image processing system is used for carrying out Fourier transform on the spatial domain picture to obtain a super-resolution microscopic image after frequency domain image processing;
the control system is used for controlling the scanning position and direction when the water immersion objective imaging system images;
The image of the sample illuminated by the structured light is represented by the following formula:
Wherein, Representing the distribution of the sample at a depth z 0, L representing the illumination light distribution, h representing the system point spread function,/>Represents a horizontal direction position (x, y);
The image of the focus position is expressed as:
For each direction, m structured light pictures of different phases are collected, each picture is superimposed by n different frequencies, and the mth image is expressed as:
Its Fourier transform is
Wherein,Is the optical transfer function of the system, and the above can be simplified as matrix multiplication:
Wherein,
Thus, in order to determine the sample distributionOnly the matrix M in equation (5) needs to be inverted:
If more pictures are acquired than necessary, then the inverse matrix of M uses Penrose pseudo inverse method.
2. The water immersion objective based super resolution fast auto-scan imaging system according to claim 1, wherein the structured light illumination system comprises:
An illumination system for providing uniform illumination light to the total internal reflection prism;
a total internal reflection prism for reflecting illumination light from the illumination system into the spatial light modulator;
a spatial light modulator for receiving the reflected light from the total internal reflection prism and vertically reflecting the illumination light having a periodic structure;
a collimating lens for converting the illumination light from the spatial light modulator into collimated light and incident on the reflecting mirror;
a reflecting mirror for reflecting the collimated light from the collimating lens into the illumination objective;
An illumination objective for providing periodic structured light illumination of the sample by reflected light from the mirror.
3. The water immersion objective based super resolution fast auto-scan imaging system according to claim 1, wherein the structured light illumination system comprises:
An illumination system for providing uniform illumination light to the total internal reflection prism;
a total internal reflection prism for reflecting illumination light from the illumination system into the spatial light modulator;
a spatial light modulator for receiving the reflected light from the total internal reflection prism and vertically reflecting the illumination light having a periodic structure;
a collimating lens for converting the illumination light from the spatial light modulator into collimated light and incident on the reflecting mirror;
The reflecting mirror is used for reflecting the collimated light rays from the collimating lens into the semi-transparent semi-reflecting mirror or the bicolor mirror;
and the semi-transparent semi-reflecting mirror or the bicolor mirror is used for providing periodic structured light illumination for the sample through emergent light.
4. The water immersion objective based super resolution fast auto-scan imaging system according to claim 1, further comprising:
and the motion platform is used for bearing the sample and moving under the control of the control system.
5. The super-resolution fast auto-scan imaging system based on a water immersion objective according to claim 4, wherein the control system is configured to control the motion platform to perform horizontal x-y direction moving scan and control the water immersion objective or the barrel lens to perform z-axis auto-focus scan.
6. The super-resolution rapid automatic scanning imaging system based on the water immersion objective according to claim 1, wherein the image processing system is used for splicing high-frequency part and low-frequency part spectrums in different directions of the spatial domain picture through an image processing algorithm, and performing inverse Fourier transform on the spliced spectrums to obtain a super-resolution microscopic image.
7. The super-resolution rapid automatic scanning imaging method based on the water immersion objective is realized by the super-resolution rapid automatic scanning imaging system based on the water immersion objective, which comprises the following steps:
1) Illuminating the sample with a plurality of directions and phases of periodic structured light;
2) Imaging the sample onto a camera through a water immersion objective lens and a cylindrical lens under the periodic structure light to obtain a plurality of spatial domain pictures subjected to periodic structure light modulation;
3) And (3) carrying out Fourier transform on the spatial domain picture obtained in the step (2) to obtain a super-resolution microscopic image after processing the spatial domain picture into a frequency domain image.
8. The water immersion objective based super-resolution fast auto-scan imaging method as claimed in claim 7, wherein step 3) comprises: and (3) carrying out Fourier transform on the airspace picture obtained in the step (2) to obtain a frequency spectrum of the airspace picture, splicing the frequency spectrums of the high-frequency part and the low-frequency part in different directions through an image processing algorithm, and carrying out inverse Fourier transform on the spliced frequency spectrum to obtain a picture exceeding diffraction limit resolution.
9. The method for rapid auto-scan imaging with super-resolution based on water immersion objective according to claim 8, wherein the parameters for the spectral stitching of the high frequency part and the low frequency part are determined by a frequency domain image cross-correlation method.
10. The method for rapid auto-scanning imaging with super-resolution based on a water immersion objective according to claim 7, further comprising placing the sample on a motion platform, controlling the motion platform to realize scanning in the horizontal x-y direction by a control system, and controlling the water immersion objective to perform z-axis auto-focusing scanning.
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| CN111240003B (en) * | 2020-03-26 | 2024-09-20 | 苏州睿仟科技有限公司 | High numerical aperture water immersion/oil immersion objective lens system and microscope scanning system |
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| CN1588543A (en) * | 2004-07-13 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Super-resolution near-field structure optical disk |
| WO2007109861A1 (en) * | 2006-03-29 | 2007-10-04 | The University Of Queensland | Super resolution microscopy |
| CN102928384A (en) * | 2012-10-24 | 2013-02-13 | 浙江大学 | Super-resolution microscopic imaging method and device based on micro waveguide |
| WO2015077926A1 (en) * | 2013-11-27 | 2015-06-04 | 苏州大学 | Super-resolution microscopy imaging method and system for continuously adjustable structured light illumination |
| CN210666189U (en) * | 2019-09-17 | 2020-06-02 | 苏州睿仟科技有限公司 | Super-resolution rapid automatic scanning imaging system based on water immersion objective lens |
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