CN110515173A - A kind of Three Degree Of Freedom laser mirror adjustment device - Google Patents

A kind of Three Degree Of Freedom laser mirror adjustment device Download PDF

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Publication number
CN110515173A
CN110515173A CN201910833998.6A CN201910833998A CN110515173A CN 110515173 A CN110515173 A CN 110515173A CN 201910833998 A CN201910833998 A CN 201910833998A CN 110515173 A CN110515173 A CN 110515173A
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CN
China
Prior art keywords
sway
pitching
adjustment frame
phase magnet
pitch adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201910833998.6A
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Chinese (zh)
Inventor
杨直
何哲
魏玉凤
张雷
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Hangzhou Aochuang Photonics Technology Co Ltd
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Hangzhou Aochuang Photonics Technology Co Ltd
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Application filed by Hangzhou Aochuang Photonics Technology Co Ltd filed Critical Hangzhou Aochuang Photonics Technology Co Ltd
Priority to CN201910833998.6A priority Critical patent/CN110515173A/en
Publication of CN110515173A publication Critical patent/CN110515173A/en
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention discloses a kind of Three Degree Of Freedom laser mirrors to adjust device, belong to optical element orientation adjustment technical field, a kind of Three Degree Of Freedom laser mirror adjustment device, reflecting mirror may be implemented in debugging or use process, it can be translated along X-axis, swinging around Y-axis and swing three parts about the z axis can be separately adjustable, replaceability is strong, and swinging around Y-axis and swing about the z axis can be adjustable within the scope of wide-angle ± 10 °, X-direction is adjustable within the scope of 0-5mm, compared to the prior art, the present apparatus increases effectively adjustable range, guarantee that pitching and side-sway are adjusted to after suitable position by magnet suction type simultaneously, the state is able to maintain to be positioned, compared to the prior art, the case where it generates displacement because of external interference can be greatly reduced, so that the position of reflecting optics is in use process In be not susceptible to angular deviation, and then improve using effect, reduce and the frequency that angle readjusts is carried out to reflecting optics, reduce workload.

Description

A kind of Three Degree Of Freedom laser mirror adjustment device
Technical field
The present invention relates to optical element orientation adjustment technical fields, anti-more specifically to a kind of Three Degree Of Freedom laser Penetrate mirror adjustment device.
Background technique
Laser mirror is the component transferred for laser system to optical path.Currently, reflecting mirror available on the market It is most of that reflecting mirror is mounted in equipment using easy open mirror holder, likewise, in the laser there is reflecting mirror, Extend optical path by reflecting mirror, reduces the volume of laser, reflecting mirror is usually fixedly mounted on mirror support, works as reflecting mirror After bracket is fixedly mounted on the bottom plate of laser, reflecting mirror cannot be conditioned, and such purpose is to guarantee reflecting mirror Accuracy, prevent from changing in use, lead to the offset of reflected light path, but in order to accurately reflect, installing When reflecting mirror and mirror support, it is necessary to devote a tremendous amount of time the position that mirror support is adjusted on laser base board It sets, and these adjustings are all trace regulations, operation difficulty is very big, even if in fastener cycle after the completion of adjusting, reflecting mirror Bracket is also possible to move, and causes to adjust and fails, or is finally unable to get the optimum efficiency of reflection, thus generally can will be anti- It penetrates mirror to be mounted on adjustment frame, carries out the adjusting of mirror angle.
The reflector alignment frame of the prior art is generally set by fixed plate, the movable plate equipped with reflecting mirror with what is be connected It is constituted in steel ball, spring and the screw rod on same diameter circumference, wherein steel ball plays a supportive role, spring plays tensioning function, screw rod is used In the orientation adjustment to movable plate progress relative to fixed plate.This optical adjusting frame has the following deficiencies: that adjustable range is small, produces Product replaceability is poor, and X-direction can not carry out translation fine tuning, and the swing of Y-axis and Z axis can not accomplish separately adjustable, and spring It is poor with the earthquake-resistant structure kinetic force of screw combinations.
Summary of the invention
1. technical problems to be solved
Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a kind of Three Degree Of Freedom laser mirror tune Engagement positions, reflecting mirror may be implemented in debugging or use process in it, can translate along X-axis, swing around Y-axis and swing about the z axis Three parts can be separately adjustable, and replaceability is strong, and swinging and swing about the z axis around Y-axis can be within the scope of wide-angle ± 10 ° Adjustable, X-direction is adjustable within the scope of 0-5mm, and compared to the prior art, the present apparatus increases effectively adjustable range, the present apparatus Guarantee that pitching and side-sway are adjusted to after suitable position by magnet suction type, is able to maintain the state, total antidetonation Property is good, and angle is not susceptible to deviate, and compared to the prior art, its feelings that displacement is generated because of external interference can be greatly reduced Condition so that the position of reflecting optics is not susceptible to angular deviation in use, and then improves using effect, reduction pair Reflecting optics carry out the frequency that angle readjusts, and reduce workload.
2. technical solution
To solve the above problems, the present invention adopts the following technical scheme that.
A kind of Three Degree Of Freedom laser mirror adjustment device, including pedestal, there are two pedestal waists for pedestal top cutting Type hole, the pedestal upper end are fixedly connected with support frame by attachment screw, and support frame as described above left end is equipped with pitch adjustment frame, institute It states and is equipped with right magnetic plate between support frame and pitch adjustment frame, there are two symmetrical support frame arcs for the cutting of support frame as described above right end Waist-shaped hole, support frame as described above and the corresponding position of pitch adjustment frame, which are dug, right dowel hole, the right positioning pin hole location Between two support frame arc waist-shaped holes, pitching lock-screw is connected in support frame as described above arc waist-shaped hole, and pitching is locked Tight screw extends in pitch adjustment frame, is inserted with pitching alignment pin, the pitch adjustment in two right dowel holes It is equipped with side-sway adjustment frame below frame, upper magnetic plate, the side-sway adjustment are equipped between the pitch adjustment frame and side-sway adjustment frame Reflecting optics are installed on frame, side-sway adjustment frame position corresponding with pitch adjustment frame, which is dug, upper dowel hole, Side-sway alignment pin is inserted on the upper dowel hole, there are two symmetrical pitch adjustments for the cutting of pitch adjustment frame upper end Frame arc waist-shaped hole, two pitch adjustment frame arc waist-shaped holes are located at the two sides of dowel hole, the pitching tune Side-sway lock-screw is connected in whole frame arc waist-shaped hole, and side-sway lock-screw extends in side-sway adjustment frame, may be implemented Reflecting mirror can translate along X-axis in debugging or use process, swing around Y-axis and swing three parts about the z axis and can independently adjust Section, replaceability is strong, and swinging and swing about the z axis around Y-axis can be adjustable within the scope of wide-angle ± 10 °, and X-direction is in 0- Adjustable within the scope of 5mm, compared to the prior art, the present apparatus increases effectively adjustable range, and the present apparatus passes through magnet suction type Guarantee that pitching and side-sway are adjusted to after suitable position, is able to maintain the state, total shock resistance is good, and angle is not susceptible to Offset, compared to the prior art, can be greatly reduced the case where it generates displacement because of external interference, so that reflecting mirror The position of piece is not susceptible to angular deviation in use, and then improves using effect, reduces and carries out angle to reflecting optics The frequency readjusted reduces workload.
Further, tight between the side-sway adjustment frame and pitch adjustment frame and between support frame and pitch adjustment frame Contiguity touching, is effectively ensured when turning side-sway lock-screw and pitching lock-screw, side-sway adjustment frame can react in time in Y The adjustment for carrying out angle is swung on axis or X-axis, improves the sensitivity that the present apparatus adjusts reflecting optics angle.
Further, the pitching lock-screw and side-sway lock-screw outer end be arranged with respectively pitching lock big gasket and Side-sway locks big gasket, and the pitching locks big gasket between pitching lock-screw and support frame, and the side-sway locking is big Gasket is between side-sway lock-screw and pitch adjustment frame, and big gasket is locked in pitching and side-sway lock-screw can be with effective protection It is not easily susceptible to damage between pitching lock-screw and support frame and side-sway lock-screw and the contact surface of pitch adjustment frame, simultaneously The two can also play the role of improving frictional force, so that being difficult to cause pitching to be locked because of extraneous vibration after determining angle The rotation or movement of screw and side-sway lock-screw, are effectively ensured the case where reflecting optics are displaced in the case of a shock, Effectively improve using effect.
Further, the upper magnetic plate includes upper side-sway phase magnet and lower side-sway phase magnet, and upper side-sway positions Magnet and lower side-sway phase magnet are respectively positioned on the outside of side-sway alignment pin, and side-sway adjustment frame upper end, which is dug, upper groove, institute It states lower side-sway phase magnet to be mounted in upper groove, the upper side-sway phase magnet is embedded in pitch adjustment frame.
Further, the right magnetic plate includes right pitching phase magnet and left pitching phase magnet, and upper side-sway positions Magnet and lower side-sway phase magnet are respectively positioned on the outside of pitching alignment pin, and the pitch adjustment frame right end cutting has right groove, institute It states left pitching phase magnet to be mounted in right groove, the right pitching phase magnet is embedded in support frame.
Further, the side-sway alignment pin and upper side-sway phase magnet and pitching alignment pin and right pitching positioning Magnet passes through epoxy glue and is solidificated on pitch adjustment frame and support frame respectively, so that upper side-sway phase magnet and pitch adjustment frame And pitching alignment pin and right pitching phase magnet can be integrally formed, and then when Y-axis and Z axis are adjusted, one is tied Structure enables the movement of two structures to synchronize, so that the angle of regulation is more convenient.
Further, the upper side-sway phase magnet and lower side-sway phase magnet one end close to each other and right pitching are fixed Position magnet and left pitching phase magnet one end magnetic pole close to each other are contrary, so that upper side-sway phase magnet and lower side-sway position It can mutually adsorb, be effectively ensured in pitching and side between magnet and between left pitching phase magnet and left pitching phase magnet Pendulum is adjusted to after suitable position, can temporarily hold the state, effectively avoids causing when fixing by being screwed into screw in the later period Mobile situation, and then the deviation for the adjusted angle that reflecting optics are caused because turning effectively is avoided, and then effectively improve anti- Penetrate accuracy and adjusting efficiency that eyeglass is adjusted in Y-axis and Z axis.
Further, the adjustable range of the reflecting optics are as follows: X-direction is adjustable within the scope of 0-5mm, around Y-axis and around Z Axis swings adjustable within the scope of ± 10 °, and compared to the prior art, the present apparatus increases effectively adjustable range, and the present apparatus without Spring, without steel ball, total stability is more preferable compared to the prior art, it can be greatly reduced because of external interference and generates position It moves, so that the position of reflecting optics is not susceptible to angular deviation in use, and then improves using effect, reduction pair Reflecting optics carry out the frequency that angle readjusts, and reduce workload.
Further, the edge of the pitch adjustment frame arc waist-shaped hole, support frame arc waist-shaped hole and pedestal waist-shaped hole Be equipped with one group of injustice limit convex starting point, injustice limit convex starting point described in three groups respectively with pitch adjustment frame, support frame and pedestal It is fixedly connected, by uneven limit convex starting point, the side-sway that can be in contact with it locks big gasket and the pad such as big gasket is locked in pitching Depressed clamping is formed between piece, and side-sway lock-screw and pitching lock-screw are kept under biggish external force Stablize, further effectively improves the stability of angle after present apparatus reflecting optics are adjusted.
Further, the uneven limit convex starting point surface is rough irregular, the injustice retention bead Point depressed section is embedded with solid lubricant layer, and uneven limit convex starting point can be effectively reduced by solid lubricant layer and side-sway is locked The frictional force when contact of big gasket is locked in big gasket or pitching, and then reduces difficulty when adjusting, and uneven limit convex starting point with The ratio of solid lubricant layer towards extraneous surface area is 1:1-1.5, so that uneven limit convex starting point can be effectively prevent outside Side-sway locks big gasket under boundary's active force or pitching is locked big gasket and is displaced, while the adjusting that can also reduce user is difficult Degree.
3. beneficial effect
Compared with the prior art, the present invention has the advantages that
(1) reflecting mirror may be implemented in debugging or use process in this programme, can along X-axis translate, around Y-axis swing and around Z axis swing three parts can be separately adjustable, replaceability is strong, and around Y-axis swing and about the z axis swing can wide-angle ± Adjustable within the scope of 10 °, X-direction is adjustable within the scope of 0-5mm, and compared to the prior art, the present apparatus increases effectively adjusting model It encloses, the present apparatus guarantees that pitching and side-sway are adjusted to after suitable position by magnet suction type, is able to maintain the state, entirely Seismic resistance is good, and angle is not susceptible to deviate, and compared to the prior art, it can be greatly reduced and generates because of external interference The case where displacement, so that the position of reflecting optics is not susceptible to angular deviation in use, and then improves using effect Fruit reduces and carries out the frequency that angle readjusts to reflecting optics, reduces workload.
(2) it is in close contact, has between side-sway adjustment frame and pitch adjustment frame and between support frame and pitch adjustment frame Effect guarantees that, when turning side-sway lock-screw and pitching lock-screw, side-sway adjustment frame can react in time in Y-axis or X-axis The adjustment for carrying out angle is swung, the sensitivity that the present apparatus adjusts reflecting optics angle is improved.
(3) pitching lock-screw and side-sway lock-screw outer end are arranged with pitching respectively and lock big gasket and side-sway locking greatly Gasket, pitching lock big gasket between pitching lock-screw and support frame, and side-sway locks big gasket and is located at side-sway locking screw Between nail and pitch adjustment frame, big gasket is locked in pitching and side-sway lock-screw can be with effective protection pitching lock-screw and support It is not easily susceptible to damage between frame and side-sway lock-screw and the contact surface of pitch adjustment frame, while the two can also play raising The effect of frictional force, so that being difficult to lead to pitching lock-screw and side-sway lock-screw because of extraneous vibration after determining angle Rotation or movement, the case where reflecting optics are displaced in the case of a shock is effectively ensured, effectively improves using effect.
(4) magnetic plate includes upper side-sway phase magnet and lower side-sway phase magnet on, and upper side-sway phase magnet and downside Pendulum phase magnet is respectively positioned on the outside of side-sway alignment pin, and side-sway adjustment frame upper end, which is dug, upper groove, lower side-sway phase magnet peace In upper groove, upper side-sway phase magnet is embedded in pitch adjustment frame.
(5) right magnetic plate includes right pitching phase magnet and left pitching phase magnet, and upper side-sway phase magnet and downside Pendulum phase magnet is respectively positioned on the outside of pitching alignment pin, and the cutting of pitch adjustment frame right end has right groove, left pitching phase magnet peace In right groove, right pitching phase magnet is embedded in support frame.
(6) side-sway alignment pin and upper side-sway phase magnet and pitching alignment pin and right pitching phase magnet pass through Epoxy glue is solidificated in respectively on pitch adjustment frame and support frame, so that upper side-sway phase magnet and pitch adjustment frame and pitching are fixed Position pin shaft and right pitching phase magnet can be integrally formed, and then when Y-axis and Z axis are adjusted, integral structure makes two The movement of structure can synchronize, so that the angle of regulation is more convenient.
(7) side-sway phase magnet and lower side-sway phase magnet one end close to each other and right pitching phase magnet and a left side on Pitching phase magnet one end magnetic pole close to each other is contrary so that between upper side-sway phase magnet and lower side-sway phase magnet with And can mutually be adsorbed between left pitching phase magnet and left pitching phase magnet, it is effectively ensured and adjusts in pitching and side-sway to conjunction Right position postpones, and can temporarily hold the state, effectively avoids causing mobile situation when fixing by being screwed into screw in the later period, And then the deviation that the adjusted angle of reflecting optics is caused because turning effectively is avoided, and then effectively improve reflecting optics in Y-axis The accuracy and adjusting efficiency adjusted with Z axis.
(8) adjustable range of reflecting optics are as follows: X-direction is adjustable within the scope of 0-5mm, swing around Y-axis and about the z axis ± Adjustable within the scope of 10 °, compared to the prior art, the present apparatus increases effectively adjustable range, and the present apparatus without spring, without steel Pearl, total stability is more preferable compared to the prior art, it can be greatly reduced and generates displacement because of external interference, so that The position of reflecting optics is not susceptible to angular deviation in use, and then improves using effect, reduce to reflecting optics into The frequency that row angle readjusts reduces workload.
(9) edge of pitch adjustment frame arc waist-shaped hole, support frame arc waist-shaped hole and pedestal waist-shaped hole is equipped with one group Uneven limit convex starting point, three groups of injustice limit convex starting points are fixedly connected with pitch adjustment frame, support frame and pedestal respectively, by not Flat limit convex starting point, the side-sway that can be in contact with it locks big gasket and pitching locks and forms depressed between the gaskets such as big gasket Clamping enables side-sway lock-screw and pitching lock-screw to keep stablizing under biggish external force, further effectively Improve the stability of angle after present apparatus reflecting optics are adjusted.
(10) uneven limit convex starting point surface is rough irregular, and uneven limit convex starting point depressed section is embedded There is solid lubricant layer, uneven limit convex starting point can be effectively reduced by solid lubricant layer and side-sway locks big gasket or pitching is locked Frictional force when tight big gasket contact, and then difficulty when adjusting is reduced, and uneven limit convex starting point and solid lubricant layer direction The ratio of extraneous surface area is 1:1-1.5, so that uneven limit convex starting point can effectively prevent the side-sway under external forces It locks big gasket or pitching is locked big gasket and is displaced, while can also reduce the adjusting difficulty of user.
Detailed description of the invention
Fig. 1 is three-dimensional structural schematic diagram of the invention;
Fig. 2 is positive structural schematic diagram of the invention;
Fig. 3 is the structural schematic diagram of pitch adjustment frame arc waist-shaped hole part of the invention;
Fig. 4 is the structural schematic diagram of side-sway lock-screw and pitch adjustment frame arc waist-shaped hole front portion of the invention;
Fig. 5 is the structural schematic diagram in this Fig. 4 at A.
Figure label explanation:
Big gasket, 6 pitching lock-screws, 7 sides are locked in 1 pedestal, 2 attachment screws, 3 support frames, 4 pitch adjustment framves, 5 pitching Put adjustment frame, 8 side-sways lock big gasket, 9 side-sway lock-screws, 10 reflecting optics, 11 side-sway alignment pins, side-sway positioning on 12 Magnet, 13 lower side-sway phase magnets, 14 pitching alignment pins, 15 right pitching phase magnets, 16 left pitching phase magnets, 17 pitching Adjustment frame arc waist-shaped hole, 18 support frame arc waist-shaped holes, 19 pedestal waist-shaped holes, 20 uneven limit convex starting points, 21 solid lubrication Layer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention;Technical solution in the embodiment of the present invention carries out clear, complete Site preparation description;Obviously;Described embodiments are only a part of the embodiments of the present invention;Instead of all the embodiments, it is based on Embodiment in the present invention;It is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment;It shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the instruction such as term " on ", "lower", "inner", "outside", " top/bottom end " Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the present invention and simplification retouch It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, Therefore it is not considered as limiting the invention.In addition, term " first ", " second " are used for description purposes only, and cannot understand For indication or suggestion relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation " " is set Be equipped with ", " be arranged/connect ", " connection " etc., shall be understood in a broad sense, such as " connection ", may be a fixed connection, be also possible to removable Connection is unloaded, or is integrally connected;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, it can also be in Between medium be indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be specific Situation understands the concrete meaning of above-mentioned term in the present invention.
Embodiment 1:
A kind of Three Degree Of Freedom laser mirror adjusts device, including pedestal 1 referring to FIG. 1-2, and digging above pedestal 1 has Two pedestal waist-shaped holes 19,1 upper end of pedestal are fixedly connected with support frame 3 by attachment screw 2, and attachment screw 2 consolidates support frame 3 It is scheduled on pedestal 1, whole device can be fixed in optical platform or laser product by the pedestal waist-shaped hole 19 on pedestal 1, base Seat waist-shaped hole 19 can also carry out the fine tuning of X-axis, and 3 left end of support frame is equipped with pitch adjustment frame 4, support frame 3 and pitch adjustment frame 4 Between be equipped with right magnetic plate, 3 right end of support frame is dug there are two symmetrical support frame arc waist-shaped hole 18, support frame 3 and pitching The corresponding position of adjustment frame 4, which is dug, right dowel hole, right dowel hole be located at two support frame arc waist-shaped holes 18 it Between, pitching lock-screw 6 is connected in support frame arc waist-shaped hole 18, and pitching lock-screw 6 extends to pitch adjustment frame 4 It is interior, pitching alignment pin 14 is inserted in two right dowel holes;
It is equipped with side-sway adjustment frame 7 below pitch adjustment frame 4, upper magnetic is equipped between pitch adjustment frame 4 and side-sway adjustment frame 7 Plate is equipped with reflecting optics 10 on side-sway adjustment frame 7, and the position corresponding with pitch adjustment frame 4 of side-sway adjustment frame 7, which is dug, to be had Upper dowel hole, is inserted with side-sway alignment pin 11 on upper dowel hole, and 4 upper end of pitch adjustment frame digs that there are two symmetrically bows Adjustment frame arc waist-shaped hole 17 is faced upward, two pitch adjustment frame arc waist-shaped holes 17 are located at the two sides of dowel hole, pitching Side-sway lock-screw 9 is connected in adjustment frame arc waist-shaped hole 17, and side-sway lock-screw 9 extends in side-sway adjustment frame 7, instead Penetrate the adjustable range of eyeglass 10 are as follows: X-direction is adjustable within the scope of 0-5mm, and swinging around Y-axis and about the z axis can within the scope of ± 10 ° Adjust, compared to the prior art, the present apparatus increases effectively adjustable range, and the present apparatus without spring, without steel ball, total is steady It is qualitative more preferable compared to the prior art, it can be greatly reduced and generates displacement because of external interference, so that reflecting optics 10 Position is not susceptible to angular deviation in use, and then improves using effect, reduces and carries out angle weight to reflecting optics 10 The frequency newly adjusted reduces workload.
Referring to Fig. 2, between side-sway adjustment frame 7 and pitch adjustment frame 4 and between support frame 3 and pitch adjustment frame 4 It is in close contact, is effectively ensured when turning side-sway lock-screw 9 and pitching lock-screw 6, side-sway adjustment frame 7 can make instead in time The adjustment for carrying out angle should be swung in Y-axis or X-axis, improved the sensitivity that the present apparatus adjusts 10 angle of reflecting optics, bowed It faces upward lock-screw 6 and 9 outer end of side-sway lock-screw is arranged with pitching respectively and locks big gasket 5 and the big gasket 8 of side-sway locking, pitching Big gasket 5 is locked between pitching lock-screw 6 and support frame 3, side-sway locks big gasket 8 and is located at 9 He of side-sway lock-screw Between pitch adjustment frame 4, big gasket 5 is locked in pitching and side-sway lock-screw 9 can be with effective protection pitching lock-screw 6 and support It is not easily susceptible to damage between frame 3 and side-sway lock-screw 9 and the contact surface of pitch adjustment frame 4, while the two can also play The effect of frictional force is improved, so that being difficult to cause pitching lock-screw 6 and side-sway to be locked because of extraneous vibration after determining angle The rotation or movement of screw 9, are effectively ensured the case where reflecting optics 10 are displaced in the case of a shock, effectively improve use Effect.
Upper magnetic plate includes upper side-sway phase magnet 12 and lower side-sway phase magnet 13, and upper side-sway phase magnet 12 is under Side-sway phase magnet 13 is respectively positioned on 11 outside of side-sway alignment pin, and 7 upper end of side-sway adjustment frame, which is dug, upper groove, lower side-sway positioning Magnet 13 is mounted in upper groove, and upper side-sway phase magnet 12 is embedded in pitch adjustment frame 4, and right magnetic plate includes that right pitching is fixed Position magnet 15 and left pitching phase magnet 16, and upper side-sway phase magnet 12 and lower side-sway phase magnet 13 are respectively positioned on pitching positioning 14 outside of pin shaft, the cutting of 4 right end of pitch adjustment frame have right groove, and left pitching phase magnet 16 is mounted in right groove, right pitching Phase magnet 15 is embedded in support frame 3.
Side-sway alignment pin 11 and upper side-sway phase magnet 12 and pitching alignment pin 14 and right pitching phase magnet 15 It is solidificated on pitch adjustment frame 4 and support frame 3 respectively by epoxy glue, so that upper side-sway phase magnet 12 and pitch adjustment frame 4 and pitching alignment pin 14 and right pitching phase magnet 15 can be integrally formed, and then when Y-axis and Z axis are adjusted, one Body structure enables the movement of two structures to synchronize, so that the angle of regulation is more convenient, upper side-sway phase magnet 12 One end close to each other and right pitching phase magnet 15 and left pitching phase magnet 16 mutually lean on lower side-sway phase magnet 13 Close one end magnetic pole is contrary so that between upper side-sway phase magnet 12 and lower side-sway phase magnet 13 and left pitching position magnetic It can mutually adsorb, be effectively ensured after pitching and side-sway are adjusted to suitable position between iron 16 and left pitching phase magnet 16, The state can be temporarily held, effectively avoids causing mobile situation when fixing by being screwed into screw in the later period, and then effectively The deviation for the adjusted angle for causing reflecting optics 10 because turning is avoided, and then effectively improves reflecting optics 10 in Y-axis and Z axis The accuracy and adjusting efficiency of adjusting.
Please refer to Fig. 3-4, pitch adjustment frame arc waist-shaped hole 17, support frame arc waist-shaped hole 18 and pedestal waist-shaped hole 19 Edge is equipped with one group of injustice limit convex starting point 20, three groups of injustice limit convex starting points 20 respectively with pitch adjustment frame 4, support frame 3 It is fixedly connected with pedestal 1, by uneven limit convex starting point 20, the side-sway that can be in contact with it locks big gasket 8 and pitching locking Depressed clamping is formed between the gaskets such as big gasket 5, enables side-sway lock-screw 9 and pitching lock-screw 6 biggish It keeps stablizing under external force, further effectively improves the stability of angle after present apparatus reflecting optics 10 are adjusted, please refer to figure 5, uneven 20 surface of limit convex starting point be it is rough irregular, uneven 20 depressed section of limit convex starting point is embedded with solid Lubricant layer 21 can be effectively reduced uneven limit convex starting point 20 by solid lubricant layer 21 and lock big gasket 8 or pitching with side-sway The frictional force when contact of big gasket 5 is locked, and then reduces difficulty when adjusting, and uneven limit convex starting point 20 and solid lubricant layer The ratio of the extraneous surface area of 21 directions is 1:1-1.5, so that uneven limit convex starting point 20 both can effectively prevent and act on outer boundary Side-sway locks big gasket 8 under power or pitching is locked big gasket 5 and is displaced, while can also reduce the adjusting difficulty of user.
Reflecting mirror may be implemented in debugging or use process, three can be translated, swung around Y-axis and swung about the z axis along X-axis A part can be separately adjustable, and replaceability is strong, and swinging and swing about the z axis around Y-axis can within the scope of wide-angle ± 10 ° It adjusts, X-direction is adjustable within the scope of 0-5mm, and compared to the prior art, the present apparatus increases effectively adjustable range, and the present apparatus is logical It crosses magnet suction type and guarantees that pitching and side-sway are adjusted to after suitable position, be able to maintain the state, total shock resistance Good, angle is not susceptible to deviate, and compared to the prior art, its feelings that displacement is generated because of external interference can be greatly reduced Condition so that the position of reflecting optics 10 is not susceptible to angular deviation in use, and then improves using effect, reduces The frequency that angle readjusts is carried out to reflecting optics 10, reduces workload;
It, can according to actual needs, by increasing pitch adjustment when the swing for the translation and greater angle for needing greater angle Frame arc waist-shaped hole 17, support frame arc waist-shaped hole 18, pedestal waist-shaped hole 19 length realize.
It is described above;It is merely preferred embodiments of the present invention;But scope of protection of the present invention is not limited thereto; Anyone skilled in the art is in the technical scope disclosed by the present invention;According to the technique and scheme of the present invention and its It improves design and is subject to equivalent substitution or change;It should be covered by the scope of protection of the present invention.

Claims (10)

1. a kind of Three Degree Of Freedom laser mirror adjusts device, including pedestal (1), it is characterised in that: opened above the pedestal (1) There are two pedestal waist-shaped hole (19) for chisel, and pedestal (1) upper end is fixedly connected with support frame (3) by attachment screw (2), described Support frame (3) left end is equipped with pitch adjustment frame (4), and right magnetic plate is equipped between support frame as described above (3) and pitch adjustment frame (4), There are two symmetrical support frame arc waist-shaped hole (18), support frame as described above (3) and pitch adjustments for the cutting of support frame as described above (3) right end The corresponding position of frame (4), which is dug, right dowel hole, and the right dowel hole is located at two support frame arc waist-shaped holes (18) it between, is connected with pitching lock-screw (6) in support frame as described above arc waist-shaped hole (18), and pitching lock-screw (6) prolongs It extends in pitch adjustment frame (4), is inserted with pitching alignment pin (14) in two right dowel holes, the pitch adjustment frame (4) lower section is equipped with side-sway adjustment frame (7), and upper magnetic plate, institute are equipped between the pitch adjustment frame (4) and side-sway adjustment frame (7) It states and is equipped on side-sway adjustment frame (7) reflecting optics (10), the side-sway adjustment frame (7) is corresponding with pitch adjustment frame (4) Position, which is dug, upper dowel hole, is inserted on the upper dowel hole side-sway alignment pin (11), the pitch adjustment frame (4) there are two symmetrical pitch adjustment frame arc waist-shaped hole (17), two pitch adjustment frame arc waist-shaped holes for upper end cutting (17) two sides of dowel hole are located at, are connected with side-sway lock-screw in the pitch adjustment frame arc waist-shaped hole (17) (9), and side-sway lock-screw (9) extends in side-sway adjustment frame (7).
2. a kind of Three Degree Of Freedom laser mirror according to claim 1 adjusts device, it is characterised in that: the side-sway tune It is in close contact between whole frame (7) and pitch adjustment frame (4) and between support frame (3) and pitch adjustment frame (4).
3. a kind of Three Degree Of Freedom laser mirror according to claim 2 adjusts device, it is characterised in that: the pitching lock Tight screw (6) and side-sway lock-screw (9) outer end are arranged with pitching respectively and lock big gasket (5) and the big gasket (8) of side-sway locking, The pitching is locked big gasket (5) and is located between pitching lock-screw (6) and support frame (3), and the side-sway locks big gasket (8) Between side-sway lock-screw (9) and pitch adjustment frame (4).
4. a kind of Three Degree Of Freedom laser mirror according to claim 1 adjusts device, it is characterised in that: the upper magnetic Plate includes upper side-sway phase magnet (12) and lower side-sway phase magnet (13), and upper side-sway phase magnet (12) and lower side-sway position Magnet (13) is respectively positioned on the outside of side-sway alignment pin (11), and side-sway adjustment frame (7) upper end, which is dug, upper groove, the downside Pendulum phase magnet (13) is mounted in upper groove, and the upper side-sway phase magnet (12) is embedded in pitch adjustment frame (4).
5. a kind of Three Degree Of Freedom laser mirror according to claim 4 adjusts device, it is characterised in that: the right magnetic Plate includes right pitching phase magnet (15) and left pitching phase magnet (16), and upper side-sway phase magnet (12) and lower side-sway position Magnet (13) is respectively positioned on the outside of pitching alignment pin (14), and pitch adjustment frame (4) the right end cutting has right groove, and the left side is bowed It faces upward phase magnet (16) to be mounted in right groove, the right pitching phase magnet (15) is embedded in support frame (3).
6. a kind of Three Degree Of Freedom laser mirror according to claim 5 adjusts device, it is characterised in that: the side-sway is fixed Position pin shaft (11) and upper side-sway phase magnet (12) and pitching alignment pin (14) and right pitching phase magnet (15) pass through Epoxy glue is solidificated in respectively on pitch adjustment frame (4) and support frame (3).
7. a kind of Three Degree Of Freedom laser mirror according to claim 6 adjusts device, it is characterised in that: the upper side-sway Phase magnet (12) and lower side-sway phase magnet (13) one end close to each other and right pitching phase magnet (15) and left pitching Phase magnet (16) one end magnetic pole close to each other is contrary.
8. a kind of Three Degree Of Freedom laser mirror according to claim 1 adjusts device, it is characterised in that: the reflecting mirror The adjustable range of piece (10) are as follows: X-direction is adjustable within the scope of 0-5mm, and swinging around Y-axis and about the z axis can within the scope of ± 10 ° It adjusts.
9. a kind of Three Degree Of Freedom laser mirror according to claim 1 adjusts device, it is characterised in that: the pitching tune The edge of whole frame arc waist-shaped hole (17), support frame arc waist-shaped hole (18) and pedestal waist-shaped hole (19) is equipped with one group of injustice limit Position raised points (20), injustice limit convex starting point (20) described in three groups respectively with pitch adjustment frame (4), support frame (3) and pedestal (1) It is fixedly connected.
10. a kind of Three Degree Of Freedom laser mirror according to claim 1 adjusts device, it is characterised in that: the injustice Limit convex starting point (20) surface be it is rough irregular, described injustice limit convex starting point (20) depressed section is embedded with solid Body lubricant layer (21), and the ratio of uneven limit convex starting point (20) and solid lubricant layer (21) towards extraneous surface area is 1:1- 1.5。
CN201910833998.6A 2019-09-04 2019-09-04 A kind of Three Degree Of Freedom laser mirror adjustment device Withdrawn CN110515173A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111047765A (en) * 2019-12-25 2020-04-21 恒银金融科技股份有限公司 Financial equipment paper currency magnetic image inductor clearance adjusting device
CN111916988A (en) * 2020-06-11 2020-11-10 杭州奥创光子技术有限公司 Adjusting device and adjusting method for mode-locked laser absorber
CN112130276A (en) * 2020-10-19 2020-12-25 杭州奥创光子技术有限公司 Closed-loop control light path automatic reset adjusting method, device and application thereof
CN114137689A (en) * 2021-11-03 2022-03-04 中航洛阳光电技术有限公司 Accurate angle regulation's speculum mechanism in succession
CN116632633A (en) * 2023-04-27 2023-08-22 齐鲁中科光物理与工程技术研究院 Magnetic force adjusting laser mirror bracket

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111047765A (en) * 2019-12-25 2020-04-21 恒银金融科技股份有限公司 Financial equipment paper currency magnetic image inductor clearance adjusting device
CN111916988A (en) * 2020-06-11 2020-11-10 杭州奥创光子技术有限公司 Adjusting device and adjusting method for mode-locked laser absorber
CN111916988B (en) * 2020-06-11 2022-04-29 杭州奥创光子技术有限公司 Adjusting device and adjusting method for mode-locked laser absorber
CN112130276A (en) * 2020-10-19 2020-12-25 杭州奥创光子技术有限公司 Closed-loop control light path automatic reset adjusting method, device and application thereof
CN114137689A (en) * 2021-11-03 2022-03-04 中航洛阳光电技术有限公司 Accurate angle regulation's speculum mechanism in succession
CN114137689B (en) * 2021-11-03 2023-06-20 中航洛阳光电技术有限公司 Mirror mechanism capable of accurately and continuously adjusting angle
CN116632633A (en) * 2023-04-27 2023-08-22 齐鲁中科光物理与工程技术研究院 Magnetic force adjusting laser mirror bracket
CN116632633B (en) * 2023-04-27 2024-01-05 齐鲁中科光物理与工程技术研究院 Magnetic force adjusting laser mirror bracket

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Application publication date: 20191129