CN110509026A - A kind of maintenance method of the method for detaching pipelines, epitaxial device - Google Patents
A kind of maintenance method of the method for detaching pipelines, epitaxial device Download PDFInfo
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- CN110509026A CN110509026A CN201910853119.6A CN201910853119A CN110509026A CN 110509026 A CN110509026 A CN 110509026A CN 201910853119 A CN201910853119 A CN 201910853119A CN 110509026 A CN110509026 A CN 110509026A
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- CN
- China
- Prior art keywords
- gas
- pipeline
- exhaust piping
- gas exhaust
- boring cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Abstract
The maintenance method of the method, epitaxial device of a kind of detaching pipelines provided by the invention, the methods of the detaching pipelines the following steps are included: detaching pipelines first end, and close the first end；Dismantle the second end of the pipeline；And dry ice, the re-closed second end is added in the second end.The present invention is by being added dry ice in the second end, since dry ice is solid, it needs to absorb a large amount of heat during becoming gaseous from solid-state, so that the rapid drop in temperature of the air at second end, inhibit mixed gas and air in pipeline to react so that the aerial mixed gas of exposure can not spontaneous combustion and explosion, to reduce the damage of pipeline, personnel safety hidden danger under the risk of the damage of operating environment and the environment.
Description
Technical field
The present invention relates to field of semiconductor devices, more particularly to the maintenance of the method, epitaxial device of a kind of detaching pipelines
Method.
Background technique
Extension (Epitaxy, abbreviation EPI) technique refers to that one layer is grown in single crystalline substrate arranges with substrate with identical lattice
The monocrystal material of column, epitaxial layer can be homogeneity epitaxial layer (growing Si epitaxial layer on Si substrate), be also possible to epitaxially deposited layer
(grown on Si substrate and grow upper SiC epitaxial layer on SiGe epitaxial layer or Si substrate)；It is same to realize that epitaxial growth also has many sides
Method, including molecular beam epitaxy, ultra-high vacuum CVD, normal pressure and reduced pressure epitaxy etc..
Epitaxy technique is carried out in epitaxial device, and with the increase of production extension the piece number, epitaxial device need to be shut down clearly
Maintenance is washed, the gas exhaust piping of epitaxial device is also required to disassemble and be cleaned, but gas exhaust piping remains in row in disassembly
Gas in air pipe the problem of it is easy to appear spontaneous combustion or explosions, so that the breakage of gas exhaust piping is caused, the damage of operating environment
It is bad, or even threaten the safety of the personnel under the operating environment.
Summary of the invention
Technical problem to be solved by the present invention lies in provide a kind of method of detaching pipelines, the maintenance side of epitaxial device
Method, the problem of spontaneous combustion occurs or explodes to avoid the gas remained in gas exhaust piping, thus gas exhaust piping caused by reducing
Breakage, or even threaten maintenance personnel safety risk.
To solve the above-mentioned problems, the method for a kind of detaching pipelines provided by the invention, comprising the following steps:
The first end of detaching pipelines, and close the first end；
Dismantle the second end of the pipeline；And
Dry ice, the re-closed second end is added in the second end.
Optionally, vacuum line of the piping connection on the channel of the transmission gas of equipment, as transmission gas.
Further, when closing the first end, the first end of the pipeline is closed by boring cover, and the boring cover lid is located at
On the port of the first end.
Further, the boring cover be located on the port of the first end, so that the gas in pipeline can not be from institute
State first end disengaging.
Further, when closing the second end, the second end of the pipeline is closed by boring cover, and the boring cover lid is set
On the port of the second end.
On the other hand, the present invention also provides a kind of epitaxial device maintenance method, comprising the following steps:
The first end for the gas exhaust piping being connected on epitaxial device is disassembled, and closes the first end；
The second end for the gas exhaust piping being connected on epitaxial device is disassembled；
Dry ice, the re-closed second end is added in the second end；And
Clean the gas exhaust piping.
Optionally, in the gas exhaust piping there are hydrogen, hydrogen phosphide, dichlorosilane mixed gas.
Further, the gas exhaust piping is connected on the channel of transmission gas of epitaxial device, as transmission gas
Vacuum line.
Further, when closing the first end, the first end of the gas exhaust piping is closed by boring cover, the boring cover
Lid is located on the port of the first end.
Further, when closing the second end, the second end of the gas exhaust piping is closed by boring cover, the boring cover
Lid is located on the port of the second end.
Exist compared with prior art it is following the utility model has the advantages that
The maintenance method of the method, epitaxial device of a kind of detaching pipelines provided by the invention, the method for the detaching pipelines
The following steps are included: the first end of detaching pipelines, and close the first end；Dismantle the second end of the pipeline；And institute
It states second end and dry ice, the re-closed second end is added.The present invention is by being added dry ice in the second end, since dry ice is solid
State, need to absorb a large amount of heat during becoming gaseous from solid-state, so that the temperature of the air at second end is rapid
Decline, it is suppressed that the mixed gas in pipeline reacts with air, so that the aerial mixed gas of exposure can not spontaneous combustion
And explosion, to reduce the damage of pipeline, the personnel safety under the risk of the damage of operating environment and the environment is hidden
Suffer from.
Detailed description of the invention
Fig. 1 is a kind of flow diagram of the method for detaching pipelines of one embodiment of the invention.
Fig. 2 is a kind of flow diagram of the maintenance method of epitaxial device of one embodiment of the invention.
Specific embodiment
As stated in the background art, in the reaction chamber of epitaxial device, hydrogen and trichlorine one that gas supply device provides
Reduction reaction occurs for hydrogen silicon or dichlorosilane, to go out single crystal epitaxial in monocrystalline substrate grown above silicon.In this process,
It generates a large amount of by-product to need to be discharged by gas exhaust piping, therefore, largely there is hydrogen, hydrogen phosphide, two in gas exhaust piping
The mixed gas such as chlorine dihydro silicon.
Epitaxial device is needed to disassemble gas exhaust piping and be cleaned in maintenance, and is present in gas exhaust piping
The mixed gas of these easily spontaneous combustions will expose in air, cause spontaneous combustion, and hydrogen is easy to send out in closed environment
Raw explosion, there are the risks of the damage of gas exhaust piping and the damage of operating environment, and there is also the personnel safety under the environment is hidden
Suffer from.
Therefore, it is necessary to reduce the mixed gas such as hydrogen, hydrogen phosphide, the dichlorosilane exposure aerial time, and
After dismantling gas exhaust piping, as soon as possible by its internal environment and air exclusion.However, gas exhaust piping disassembly when, due to exhaust pipe
Length is passed by, or even needs across floor operation, operation difficulty is higher, this just undesirably increases the inner loop of gas exhaust piping
The border exposure aerial time, to considerably increase above-mentioned hidden danger.
Based on above-mentioned analysis, the maintenance method of the method, epitaxial device of a kind of detaching pipelines provided by the invention, it is described to tear open
Unload the method for pipeline the following steps are included: detaching pipelines first end, and close the first end；Dismantle the second of the pipeline
End；And dry ice, the re-closed second end is added in the second end.The present invention by the second end be added dry ice,
Due to dry ice be it is solid, from solid-state become it is gaseous during need to absorb a large amount of heat so that the sky at second end
The rapid drop in temperature of gas, it is suppressed that the mixed gas in pipeline reacts with air, so that the aerial mixing of exposure
Gas can not spontaneous combustion and explosion, so that the damage of pipeline is reduced, under the risk of the damage of operating environment and the environment
Personnel safety hidden danger.
The maintenance method work of method, epitaxial device to a kind of detaching pipelines of the invention is further retouched in detail below
It states.The present invention is described in more detail below with reference to accompanying drawings, which show the preferred embodiment of the present invention, it should manage
Solution those skilled in the art can modify invention described herein and still realize advantageous effects of the invention.Therefore, following
Description should be understood as the widely known of those skilled in the art, and be not intended as limitation of the present invention.
For clarity, not describing whole features of practical embodiments.In the following description, it is not described in detail well known function
And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments
In hair, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to related system or related business
Limitation, changes into another embodiment by one embodiment.Additionally, it should think that this development may be complicated and expend
Milling time, but to those skilled in the art it is only routine work.
To be clearer and more comprehensible the purpose of the present invention, feature, a specific embodiment of the invention is made with reference to the accompanying drawing
Further instruction.It should be noted that attached drawing is all made of very simplified form and using non-accurate ratio, only to side
Just, the purpose of the embodiment of the present invention is lucidly aided in illustrating.
A kind of method of detaching pipelines provided by the present embodiment, Fig. 1 are a kind of method of detaching pipelines of the present embodiment
Flow diagram.As shown in Figure 1, method includes the following steps:
Step S11: the first end of detaching pipelines, and close the first end；
Step S12: the second end of the pipeline is dismantled；And
Step S13: dry ice, the re-closed second end is added in the second end.
A kind of method of detaching pipelines disclosed in the present embodiment is introduced in more detail below.
Step S11, the first end of detaching pipelines is first carried out, and closes the first end.Wherein, the pipeline is, for example,
It is connected on the channel of transmission gas of equipment, the vacuum line as transmission gas.Largely there is hydrogen in the pipeline
The mixed gas such as gas, hydrogen phosphide, dichlorosilane.The pipeline includes interconnected first end and second end, and gas is from institute
The first end for stating pipeline enters, and is discharged from the second end；Alternatively, gas enters from the second end of the pipeline, from described the
One end discharge.When closing the first end, the first end of the pipeline is, for example, to be closed by boring cover, and the boring cover is, for example, to cover
It is located on the port of the first end, the boring cover is specifically, for example, on the port for be located in the first end, so that in pipeline
Gas can not be passed in and out from the first end.
Then step S12 is executed, the second end of the pipeline is dismantled.
After the second end of the pipeline is disassembled from the channel of the transmission gas of equipment, the pipeline is thoroughly dismantled
Get off.
Then step S13 is executed, dry ice, the re-closed second end is added in the second end.
This step specifically includes:
Firstly, the second end be added dry ice, due to dry ice be it is solid, from solid-state become it is gaseous during need
A large amount of heat is absorbed, so that the rapid drop in temperature of the air at second end, it is suppressed that mixed gas and sky in pipeline
Gas reacts so that the aerial mixed gas of exposure can not spontaneous combustion and explosion make to reduce the damage of pipeline
Personnel safety hidden danger under the risk of the damage of industry environment and the environment.
Secondly, closing the second end.When closing the second end, the second end of the pipeline is, for example, to be sealed by boring cover
It closes, the boring cover is, for example, to cover to be located on the port of the second end, and the boring cover is specifically, for example, that be located in the second end
Port on so that the gas in pipeline can not be passed in and out from the second end.
The present embodiment additionally provides a kind of maintenance method of epitaxial device, and Fig. 2 is a kind of epitaxial device of the present embodiment
The flow diagram of maintenance method.As shown in Fig. 2, the maintenance method the following steps are included:
Step S21: the first end for the gas exhaust piping being connected on epitaxial device is disassembled, and closes described first
End；
Step S22: the second end for the gas exhaust piping being connected on epitaxial device is disassembled；
Step S23: dry ice, the re-closed second end is added in the second end；And
Step S24: the gas exhaust piping is cleaned.
A kind of maintenance method of epitaxial device disclosed in the present embodiment is introduced in more detail below.
Step S21 is first carried out, the first end for the gas exhaust piping being connected on epitaxial device is disassembled, and closes institute
State first end.Wherein, the gas exhaust piping is, for example, to be connected on the channel of transmission gas of epitaxial device, as transmission gas
The vacuum line of body.Largely there is the mixed gas such as hydrogen, hydrogen phosphide, dichlorosilane in the gas exhaust piping.The row
Air pipe includes interconnected first end and second end, and gas enters from the first end of the gas exhaust piping, from described second
End discharge；Alternatively, gas enters from the second end of the gas exhaust piping, it is discharged from the first end.When closing the first end,
The first end of the gas exhaust piping is, for example, to be closed by boring cover, and the boring cover is, for example, to cover the port for being located at the first end
On, the boring cover is specifically, for example, on the port for be located in the first end, so that the gas in pipeline can not be from described first
End disengaging.
Then step S22 is executed, the second end for the gas exhaust piping being connected on epitaxial device is disassembled.
After the second end of the gas exhaust piping is disassembled from the channel of the transmission gas of epitaxial device, the exhaust
Pipeline thoroughly disassembles.
Then step S23 is executed, dry ice, the re-closed second end is added in the second end.
This step specifically includes:
Firstly, the second end be added dry ice, due to dry ice be it is solid, from solid-state become it is gaseous during need
A large amount of heat is absorbed, so that the rapid drop in temperature of the air at second end, it is suppressed that the mixed gas in gas exhaust piping
React with air so that the aerial mixed gas of exposure can not spontaneous combustion and explosion, to reduce gas exhaust piping
Damage, the personnel safety hidden danger under the risk of the damage of operating environment and the environment.
Secondly, closing the second end.When closing the second end, the second end of the gas exhaust piping e.g. passes through bored
Lid closing, the boring cover are, for example, to cover to be located on the port of the second end, and the boring cover is specifically, for example, that be located in described the
On the port at two ends, so that the gas in gas exhaust piping can not be passed in and out from the second end.
Then step S24 is executed, the gas exhaust piping is cleaned.
Specifically, firstly, gas exhaust piping closed at both ends is placed in the sink, then, by the first end and second
The boring cover that end upper cover is set is removed, and is cleaned to the inner wall of the gas exhaust piping.
In summary, the maintenance method of the method, epitaxial device of a kind of detaching pipelines provided by the invention, the disassembly pipe
The method on road the following steps are included: detaching pipelines first end, and close the first end；Dismantle the second end of the pipeline；
And dry ice, the re-closed second end is added in the second end.The present invention by the second end be added dry ice, due to
Dry ice be it is solid, need to absorb a large amount of heat during becoming gaseous from solid-state, so that air at second end
Rapid drop in temperature, it is suppressed that the mixed gas in pipeline reacts with air, so that the aerial mixed gas of exposure
Can not spontaneous combustion and explosion, to reduce the damage of pipeline, the personnel under the risk of the damage of operating environment and the environment
Security risk.
In addition, it should be noted that, unless stated otherwise or point out, the otherwise term " first " in specification, "
Two " description is used only for distinguishing various components, element, step etc. in specification, without being intended to indicate that various components, member
Logical relation or ordinal relation between element, step etc..It is understood that although the present invention is disclosed with preferred embodiment
As above, however above-described embodiment is not intended to limit the invention.For any person skilled in the art, it is not taking off
From under technical solution of the present invention ambit, many all is made to technical solution of the present invention using the technology contents of the disclosure above
Possible changes and modifications or equivalent example modified to equivalent change.Therefore, all without departing from technical solution of the present invention
Content, any simple modifications, equivalents, and modifications made to the above embodiment, still belong to according to the technical essence of the invention
In the range of technical solution of the present invention protection.
Claims (10)
1. a kind of method of detaching pipelines, which comprises the following steps:
The first end of detaching pipelines, and close the first end；
Dismantle the second end of the pipeline；And
Dry ice, the re-closed second end is added in the second end.
2. the method for detaching pipelines as described in claim 1, which is characterized in that transmission gas of the piping connection in equipment
Channel on, as transmission gas vacuum line.
3. the method for detaching pipelines as claimed in claim 2, which is characterized in that when closing the first end, the pipeline
First end is closed by boring cover, and the boring cover lid is located on the port of the first end.
4. the method for detaching pipelines as claimed in claim 3, which is characterized in that the boring cover be located in the end of the first end
On mouth, so that the gas in pipeline can not be passed in and out from the first end.
5. the method for detaching pipelines as claimed in claim 4, which is characterized in that when closing the second end, the pipeline
Second end is closed by boring cover, and the boring cover lid is located on the port of the second end.
6. a kind of maintenance method of epitaxial device, which comprises the following steps:
The first end for the gas exhaust piping being connected on epitaxial device is disassembled, and closes the first end；
The second end for the gas exhaust piping being connected on epitaxial device is disassembled；
Dry ice, the re-closed second end is added in the second end；And
Clean the gas exhaust piping.
7. maintenance method as claimed in claim 6, which is characterized in that there are hydrogen, hydrogen phosphide, two in the gas exhaust piping
The mixed gas of chlorine dihydro silicon.
8. maintenance method as claimed in claim 7, which is characterized in that the gas exhaust piping is connected to the transmission gas of epitaxial device
Vacuum line on the channel of body, as transmission gas.
9. maintenance method as claimed in claim 8, which is characterized in that when closing the first end, the of the gas exhaust piping
One end is closed by boring cover, and the boring cover lid is located on the port of the first end.
10. maintenance method as claimed in claim 9, which is characterized in that when closing the second end, the of the gas exhaust piping
Two ends are closed by boring cover, and the boring cover lid is located on the port of the second end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910853119.6A CN110509026A (en) | 2019-09-10 | 2019-09-10 | A kind of maintenance method of the method for detaching pipelines, epitaxial device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910853119.6A CN110509026A (en) | 2019-09-10 | 2019-09-10 | A kind of maintenance method of the method for detaching pipelines, epitaxial device |
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| CN110509026A true CN110509026A (en) | 2019-11-29 |
Family
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| CN201910853119.6A Pending CN110509026A (en) | 2019-09-10 | 2019-09-10 | A kind of maintenance method of the method for detaching pipelines, epitaxial device |
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2019
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| US5455072A (en) * | 1992-11-18 | 1995-10-03 | Bension; Rouvain M. | Initiation and bonding of diamond and other thin films |
| CN1590708A (en) * | 2003-09-01 | 2005-03-09 | 杜志刚 | Method of preventing and controlling mining working surface gas explosion |
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Application publication date: 20191129 |