CN110488043A - 自由电子激发增强近场信号的扫描近场光学显微镜 - Google Patents

自由电子激发增强近场信号的扫描近场光学显微镜 Download PDF

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CN110488043A
CN110488043A CN201910726384.8A CN201910726384A CN110488043A CN 110488043 A CN110488043 A CN 110488043A CN 201910726384 A CN201910726384 A CN 201910726384A CN 110488043 A CN110488043 A CN 110488043A
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near field
optical microscope
scanning
free electron
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CN110488043B (zh
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胡旻
张天宇
张倬铖
王玥莹
张晓秋艳
许星星
吴振华
龚森
赵陶
钟任斌
刘頔威
刘盛纲
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University of Electronic Science and Technology of China
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract

本发明公开了一种自由电子激发增强近场信号的扫描近场光学显微镜，属于扫描近场光学显微镜领域。本发明在现有扫描近场光学显微镜的基础之上，通过引入自由电子，在被测样品上产生表面近场，进而增强扫描近场光学显微镜近场信号及其成像质量。其实现将大幅提升红外太赫兹以及可见光等频段的微纳尺度结构的近场特性研究及其应用。

Description

自由电子激发增强近场信号的扫描近场光学显微镜
技术领域
本发明属于扫描近场光学显微镜(SNOM)领域，尤其是工作频率位于太赫兹频段(0.1-10THz)的散射式扫描近场光学显微镜(s-SNOM)。
背景技术
扫描近场光学显微镜因其超分辨成像能力，在中红外频段至可见光频段已取得了巨大的研究成果，在新型材料分析、等离子体激元(Plasmonics)检测和生物医学成像等领域取得了迅速发展，研究学者们利用其超分辨特性观察到了许多独特的物理现象，如新型二维材料中的各种激元，各种生物大分子的中红外频谱特性。随着技术的不断进步，近年来也已经出现了工作频率位于太赫兹频段的扫描近场光学显微镜。
作为众多扫描探针显微镜(SPM)中的一种[Scanning Probe Microscopy:The Labon a Tip.Springer Science&Business Media,(2003)]，扫描近场光学显微镜(SNOM)[Applied Physics Letters,1984,44(7):651-653.]是基于扫描隧道显微镜(STM)[Physical Review Letters,1982,49(1):57.]和原子力显微镜(AFM)[Physical ReviewLetters,1986,56(9):930.]发展而来的，用于突破光学分辨率的成像设备。近年来，由于SNOM能够克服光学成像的衍射极限分辨率，既能够实现纳米级分辨率成像，还可用于探索物质和结构的频谱特性，成为国际上研究的热点。根据其测量原理的不同，大致上可以将SNOM分为两大类：一是基于孔径式的SNOM，即a-SNOM[Nature,1972,237(5357):510.]，二是基于散射式的SNOM，即s-SNOM[Philosophical Transactions of the Royal Society ofLondon.Series A:Mathematical,Physical and Engineering Sciences 362.1817(2004):787-805.]。其中，由于s-SNOM的探针尖端可以加工至纳米尺度，能够对微纳结构进行探测，其研究和应用逐渐增多。经过长期的发展，s-SNOM的性能逐步完善，其具有极高的空间分辨率(一般为10-20nm，由针尖尖端曲率半径决定，与照射光源的波长完全无关)，目前可以实现：从太赫兹频段到可见光频段内的测量；区分不同的偏振态以及完成时间分辨的测量；同时记录场强的幅值和相位等功能。[Nature,2012,487(7405):82.],[Nature,2012,487(7405):77.]这些特性在各种实际场景中得到广泛应用。但当其应用于某些特殊频段时，如红外太赫兹和可见光频段时，由于系统信噪比相对较低，还未取得广泛应用，还存在一定的提升空间。
发明内容
本发明提出利用自由电子激发材料中的近场，与扫描近场光学显微镜中探针所激发的近场相互耦合增强的物理机制，从而提高系统散射信号中近场信号的功率，提升系统的信噪比，在不提升辐射源和检测器的性能的情况下，增强各频段扫描近场光学显微镜的性能和近场成像质量，具有深远的实用意义。
实现这种机理的关键技术问题主要有以下两个方面：
第一个是自由电子激发材料表面近场的物理特性。利用自由电子产生表面近场，需要极高质量的电子束，因此需要对自由电子进行约束和控制。
第二个问题，也是最关键的问题是s-SNOM自身探针激励产生的表面近场与用电子激励产生的表面近场之间的耦合。
本发明采用技术方案如下：一种自由电子激发增强近场信号的扫描近场光学显微镜，包括电子枪、扫描近场光学显微镜，所述电子枪产生的电子束激励样品产生第一种表面近场，所述扫描近场光学显微镜中的纳米针尖激励样品产生第二种表面近场，所述第一种、第二种表面近场为能够相互耦合的同一频率的表面近场，从而增强近场信号强度和近场成像质量，然后扫描近场光学显微镜得到成像结果。
通过调节自由电子和近场探针的物理特性，如通过控制电子枪产生的电子束的能量以及扫描近场光学显微镜的参数，我们可以得到工作于同一频率的近场，可以使得两种不同方式激励出的表面近场相互耦合，最终达到增强近场信号强度和近场成像质量的效果。
综上所述，我们提出利用自由电子激发样品产生表面近场与探针本身所激励的近场相互耦合的方式增强s-SNOM近场信号。实现这一物理现象，能够有效提高s-SNOM近场成像的质量，更好的分辨出各物质在近场下的特性差异。国际上利用这一机理的s-SNOM还未出现，本发明可以突破当前s-SNOM发展的一些瓶颈，这对科研人员研究各种物质和结构的近场特性具有深远意义，对诸如等离激元学，超分辨率成像，新型太赫兹辐射源，生物传感等学科的发展起到积极作用。
附图说明
图1是本发明的原理图。
具体实施方式
下面结合附图和实施例对本发明进一步说明。在图1中，电子枪产生的电子束(1)与扫描近场光学显微镜的纳米针尖(2)共同激励能够产生表面近场的样品(3)，两种方式产生的表面近场相互耦合，其频率为0.1-30THz，如10THz，进而增强纳米针尖(2)所提取的样品表面的近场信号。其中电子束(1)的能量大致为几个到数十个keV，1-30keV，如30keV，纳米针尖(2)的尖端尺寸一般为10～50个纳米，如30nm，样品(3)是如石墨烯、六角氮化硼(hBN)等可以支持表面近场的材料或结构。

Claims (1)

1.一种自由电子激发增强近场信号的扫描近场光学显微镜，包括电子枪、扫描近场光学显微镜，其特征在于，所述电子枪产生的电子束激励样品产生第一种表面近场，所述扫描近场光学显微镜中的纳米针尖激励样品产生第二种表面近场，所述第一种、第二种表面近场为能够相互耦合的同一频率的表面近场，从而增强近场信号强度和近场成像质量，然后扫描近场光学显微镜得到成像结果。
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CN111337711B (zh) * 2020-03-09 2021-07-06 电子科技大学 基于调制自由电子的扫描近场光学显微镜

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